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JP3224716B2 - High temperature corrosion resistant surface treatment method - Google Patents
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JP3224716B2 - High temperature corrosion resistant surface treatment method - Google Patents

High temperature corrosion resistant surface treatment method

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Publication number
JP3224716B2
JP3224716B2 JP19007095A JP19007095A JP3224716B2 JP 3224716 B2 JP3224716 B2 JP 3224716B2 JP 19007095 A JP19007095 A JP 19007095A JP 19007095 A JP19007095 A JP 19007095A JP 3224716 B2 JP3224716 B2 JP 3224716B2
Authority
JP
Japan
Prior art keywords
alloy
temperature
coating layer
coating
temperature corrosion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP19007095A
Other languages
Japanese (ja)
Other versions
JPH0931668A (en
Inventor
利夫 米澤
正治 中森
勇 榧野
育昌 小城
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP19007095A priority Critical patent/JP3224716B2/en
Publication of JPH0931668A publication Critical patent/JPH0931668A/en
Application granted granted Critical
Publication of JP3224716B2 publication Critical patent/JP3224716B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/02Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material
    • C23C28/021Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material including at least one metal alloy layer
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/02Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material
    • C23C28/021Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material including at least one metal alloy layer
    • C23C28/022Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material including at least one metal alloy layer with at least one MCrAlX layer
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/02Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material
    • C23C28/023Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material only coatings of metal elements only

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)

Abstract

PROBLEM TO BE SOLVED: To impart more excellent high temp. corrosion resistance to a metallic material base material by subjecting a metallic material base material for high temp. use successively coated with Pt or Ta, Cr base metal and an MCrAlY alloy to thermal diffusion treatment in a vacuum furnace or an Ar-H2 atmospheric furnace. SOLUTION: For example, an Fe base alloy A286, a Co base alloy ECY768 or an Ni base alloy IN738LC is used as a base material 1, which is plated with a Pt layer 2 hard to thermally diffuse 2 into 2 to 3μm objective thickness. Next, Cr plating 3 is executed into 10 to 15μm objective thickness. After that, it is coated with a Co-32wt.%Ni-21wt.%Cr-8wt.%Al-0.5wt.%Y alloy into 50μm objective thickness. Furthermore, Cr plating treatment and low pressure plasma spraying treatment of CoNiCrAlY alloy are the same as the above executed once more, and after that, thermal diffusion treatment at 1050 deg.C for 4hr is executed in a vacuum furnace (0.1 to 1.0mmHg).

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は高温使用金属材料へ
耐高温腐食性を付与する方法に関し、特にガスタービン
の動・静翼へ適用される高温耐食性表面処理方法に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for imparting high-temperature corrosion resistance to metal materials used at high temperatures, and more particularly to a high-temperature corrosion-resistant surface treatment method applied to moving and stationary blades of gas turbines.

【0002】[0002]

【従来の技術】コンバインドサイクルプラントに代表さ
れる高効率化された最近の産業用ガスタービンのタービ
ン入口ガス温度の上昇は著しく1300℃以上となって
いる。このような高温ガスに曝露される動・静翼に使用
される耐熱合金は精力的な研究開発が行なわれ、その許
容使用温度も年々上昇しているが、実用合金では850
〜900℃程度である。このため、実機ガスタービンで
は薄肉化した内部空気冷却翼がもちいられている。一
方、使用される燃料はLNG、副生ガスや重油におよび
最近では石炭を液化又はガス化して利用することも研究
されているため、空気冷却翼の高温酸化や高温腐食防止
を目的として低圧プラズマで溶射法(以下、VPSとい
う)によりNiCoCrAlYやCoCrAlYなどの
耐食合金のコーティングが行なわれている。
2. Description of the Related Art The temperature of a gas at the inlet of a recent industrial gas turbine of high efficiency represented by a combined cycle plant has risen significantly to 1300 ° C. or more. The heat-resistant alloy used for the moving and stationary blades exposed to such a high-temperature gas has been vigorously researched and developed, and its allowable use temperature has been increasing year by year.
About 900 ° C. For this reason, thinned internal air cooling blades are used in actual gas turbines. On the other hand, the fuels used are LNG, by-product gas and heavy oil, and recently, the use of liquefied or gasified coal has been studied. Therefore, low pressure plasma is used to prevent high temperature oxidation and high temperature corrosion of air cooling blades. A coating of a corrosion resistant alloy such as NiCoCrAlY or CoCrAlY is performed by a thermal spraying method (hereinafter, referred to as VPS).

【0003】[0003]

【発明が解決しようとする課題】高温化されたガスター
ビンにおいて、直接燃焼ガスと接触する動・静翼はガス
温度の上昇にともなって酸化速度や腐食速度が増加し、
前記のような耐食コーティングを行った場合でも燃料や
燃焼空気より高温腐食成分が持込まれると顕著な腐食損
傷を受ける事態が出現している。このため、より一層高
温耐食性にすぐれた耐食性を有する動・静翼の出現が望
まれている。本発明は上記技術水準及び上記要望に応
じ、高温使用金属材料へ耐高温腐食性を付与する表面処
理方法を提供しようとするものである。
In a high temperature gas turbine, the moving and stationary blades that come into direct contact with the combustion gas increase in oxidation rate and corrosion rate as the gas temperature increases.
Even when the above-mentioned corrosion-resistant coating is applied, a situation has appeared where significant corrosion damage is caused when a high-temperature corrosive component is introduced from fuel or combustion air. For this reason, the appearance of moving and stationary blades having more excellent high-temperature corrosion resistance is desired. The present invention aims to provide a surface treatment method for imparting high-temperature corrosion resistance to a high-temperature-used metal material in accordance with the above-mentioned technical level and the above-mentioned demand.

【0004】[0004]

【課題を解決するための手段】本発明は(1) 高温
使用金属材料基材へ熱拡散しにくいPtまたはTaをコ
ーティングする第1工程、 上記第1工程のコーティ
ング層上に純CrまたはCrを50wt%以上含むM′
Cr合金(但し、M′はNi及び/又はCo)をコーテ
ィングする第2工程、 上記第2工程のコーティング
層上にMCrAlY合金(但し、MはNi,Co及びF
eよりなる群のうちの1種以上)をコーティングする第
3工程、 上記第3工程を終えた各コーティング層を
有する高温使用金属材料基材を真空炉またはAr−H2
雰囲気炉中で熱拡散処理する第4工程よりなることを特
徴とする高温使用金属材料基材の表面に密着性、均一
性、高温耐食性に優れたコーティング層を形成させる高
温耐食性表面処理方法及び(2)コーティング層の厚さ
の要求に応じ、上記第2工程及び第3工程を複数回繰返
すことを特徴とする上記(1)記載の高温耐食性表面処
理方法である。
SUMMARY OF THE INVENTION The present invention provides (1) a first step of coating Pt or Ta, which hardly diffuses heat to a metal material substrate used at a high temperature, and a step of coating pure Cr or Cr on the coating layer in the first step. M 'containing 50 wt% or more
A second step of coating a Cr alloy (where M 'is Ni and / or Co), and an MCrAlY alloy (where M is Ni, Co and F) on the coating layer of the second step.
e) coating the high-temperature-use metal material substrate having each coating layer after the third step with a vacuum furnace or Ar-H 2.
A high-temperature corrosion-resistant surface treatment method for forming a coating layer having excellent adhesion, uniformity, and high-temperature corrosion resistance on the surface of a high-temperature-used metal material substrate, which comprises a fourth step of performing thermal diffusion treatment in an atmosphere furnace. 2) The high-temperature corrosion-resistant surface treatment method according to the above (1), wherein the second step and the third step are repeated a plurality of times according to a request for the thickness of the coating layer.

【0005】[0005]

【発明の実施の形態】本発明の第1は、 Fe基合
金、Co基合金、Ni基合金などの高温使用金属材料基
材へPtまたはTaを2〜5μm厚さにメッキ、蒸着に
よりコーティングし(第1工程)、 第1工程のコー
ティング層上に純CrまたはCrを50wt%以上含む
M′Cr合金(但し、M′はNi及び/又はCo)を1
0〜50μm厚さ(メッキ、蒸着では10〜20μm、
溶射では30〜50μm)にコーティングし(第2工
程)、 第2工程のコーティング層上にMCrAlY
合金(但し、MはNi,Co及びFeよりなる群のうち
の1種以上)を30〜100μm厚さ(蒸着では30〜
50μm、溶射では50〜100μm)にコーティング
し(第3工程)、 第3工程を終えた各コーティング
層を有する高温使用金属材料基材を真空炉(真空条件:
0.1〜1.0mmHg)中またはAr−H2雰囲気炉
(Ar−H2 雰囲気条件:Ar:H2 =5:1、圧力:
50〜100mmHg)中で熱拡散処理(例えば105
0℃×4時間または1150℃×2時間)する(第4工
程)ことによって高温使用金属材料基材表面に密着性、
均一性、高温耐食性に優れたコーティング層を形成させ
る方法である。
BEST MODE FOR CARRYING OUT THE INVENTION The first aspect of the present invention is to coat Pt or Ta to a thickness of 2 to 5 μm on a high-temperature metal material base material such as an Fe-based alloy, a Co-based alloy, or a Ni-based alloy by vapor deposition. (1st step), Pure Cr or M'Cr alloy containing 50 wt% or more of Cr (where M 'is Ni and / or Co) is 1 on the coating layer of the first step.
0 to 50 μm thickness (10 to 20 μm for plating and evaporation,
( 2nd step), and MCrAlY is applied on the coating layer of the second step.
An alloy (where M is at least one member from the group consisting of Ni, Co and Fe) is formed to a thickness of 30 to 100 μm (30 to 100 μm by vapor deposition).
50 μm, 50 to 100 μm for thermal spraying) (third step), and the high-temperature-use metal material base having each coating layer after the third step is subjected to a vacuum furnace (vacuum conditions:
0.1~1.0MmHg) or in Ar-H 2 atmosphere furnace (Ar-H 2 atmosphere conditions: Ar: H 2 = 5: 1, pressure:
Thermal diffusion treatment (for example, 105 to 100 mmHg)
(0 ° C. × 4 hours or 1150 ° C. × 2 hours) (fourth step) to obtain adhesion to the surface of the metal material substrate used at high temperature,
This is a method for forming a coating layer having excellent uniformity and high-temperature corrosion resistance.

【0006】本発明の第2は、上記本発明の第1の第1
工程のPtまたはTaのコーティングを施こしてから、
第2工程の純CrまたはCrを50wt%以上含むM′
Cr合金層のコーティングと第3工程のMCrAlY合
金層のコーティングが所望の厚さとなるまで繰返し施こ
した後、第4工程の熱拡散処理を行うものである。
A second aspect of the present invention is the first first aspect of the present invention.
After applying the Pt or Ta coating of the process,
M ′ containing 50 wt% or more of pure Cr or Cr of the second step
The coating of the Cr alloy layer and the coating of the MCrAlY alloy layer in the third step are repeatedly performed until a desired thickness is obtained, and then the thermal diffusion treatment in the fourth step is performed.

【0007】(作用)第4工程の熱拡散処理により、第
2工程で形成されたコーティング層中のCrまたはM′
Cr合金層中のCrは第3工程で形成されたMCrAl
Y層へ拡散し、MCrAlY層中のCr濃度を増加さ
せ、MCrAlY層の高温耐食性を向上させる。高温腐
食環境での使用にともない、MCrAlY表層よりCr
が徐々に消耗し、脱クロム層を生じて耐食性が低下する
場合が多いが、本発明では高温使用中もCr,M′Cr
合金層よりMCrAlY層へ拡散によりCrの供給が行
なわれるため脱クロム層の形成を抑制することができ
る。
(Action) Cr or M 'in the coating layer formed in the second step by the thermal diffusion treatment in the fourth step.
Cr in the Cr alloy layer is MCrAl formed in the third step.
It diffuses into the Y layer, increases the Cr concentration in the MCrAlY layer, and improves the high-temperature corrosion resistance of the MCrAlY layer. Due to the use in high temperature corrosive environment, Cr
Is often consumed and a dechromized layer is formed to deteriorate the corrosion resistance in many cases. However, in the present invention, Cr, M'Cr
Since Cr is supplied from the alloy layer to the MCrAlY layer by diffusion, the formation of a dechromized layer can be suppressed.

【0008】また、高温使用金属材料基材とコーティン
グ層の境界に存在するPtまたはTaは自己、相互拡散
係数とも比較的おそいため、該基材側へCrが拡散し、
該基材の機械的強度を低下させることを防止することが
できる。
Further, since Pt or Ta present at the boundary between the metal material base material used at a high temperature and the coating layer has relatively low self and mutual diffusion coefficients, Cr diffuses into the base material side,
It is possible to prevent the mechanical strength of the substrate from being reduced.

【0009】[0009]

【実施例】以下、本発明の具体的実施例をあげ、本発明
の効果を明らかにする。
EXAMPLES Hereinafter, specific examples of the present invention will be described to clarify the effects of the present invention.

【0010】(例1)表1に示すFe基合金A286、
Co基合金ECY768、Ni基合金IN738LC
を、図1(a)に示すように、基材1とし、Pt層2を
2〜3μmを目標にメッキした。Ptメッキは塩化白金
酸:26g/リットル、亜硝酸ソーダ:10g/リット
ル、硝酸ソーダ:100g/リットル、アンモニア水:
50g/リットルのメッキ浴中で90〜95℃、約7A
/dm2 の条件で行なった。
(Example 1) Fe-based alloy A286 shown in Table 1
Co-based alloy ECY768, Ni-based alloy IN738LC
As shown in FIG. 1A, a Pt layer 2 was plated with a target of 2 to 3 μm as a base material 1. Pt plating: chloroplatinic acid: 26 g / liter, sodium nitrite: 10 g / liter, sodium nitrate: 100 g / liter, aqueous ammonia:
90-95 ° C, about 7A in 50g / liter plating bath
/ Dm 2 .

【0011】[0011]

【表1】 [Table 1]

【0012】次に、10〜15μm厚さを目標にCrメ
ッキ3を行った。Crメッキは無水クロム酸:250g
/リットル、硫酸クロム:3g/リットル、炭酸クロ
ム:7g/リットルのメッキ浴中で40〜50℃、2〜
10A/dm2 (2〜4V)の条件で行った。
Next, Cr plating 3 was performed for a thickness of 10 to 15 μm. Cr plating is chromic anhydride: 250g
/ Liter, chromium sulfate: 3 g / liter, chromium carbonate: 7 g / liter, in a plating bath at 40 to 50 ° C.
The test was performed under the conditions of 10 A / dm 2 ( 2 to 4 V).

【0013】この後、下記表1に示す低圧プラズマ溶射
法によりCo−32wt%Ni−21wt%Cr−8w
t%Al−0.5wt%Y(残部:Co、以下同じ)合
金4を50μm厚さを目標にコーティングを行った。
Thereafter, Co-32 wt% Ni-21 wt% Cr-8w is formed by a low-pressure plasma spraying method shown in Table 1 below.
An alloy 4 of t% Al-0.5wt% Y (remainder: Co, the same applies hereinafter) was coated with a target of a thickness of 50 μm.

【0014】[0014]

【表2】 [Table 2]

【0015】さらに、上記と同じCrメッキ処理とCo
NiCrAlY合金の低圧プラズマ溶射処理をもう一度
行った後、真空炉(真空条件:0.1〜1.0mmH
g)中で1050℃×4時間の熱拡散処理を行って図1
(b)に示すようなコーティング層を有する高温使用金
属材料を得た。以上の結果、得られたコーティング層を
有する高温使用金属材料の高温耐食性を後記表3にまと
めて示す。
Furthermore, the same Cr plating treatment and Co
After the low-pressure plasma spraying of the NiCrAlY alloy is performed again, a vacuum furnace (vacuum condition: 0.1 to 1.0 mmH
g) was subjected to a thermal diffusion treatment at 1050 ° C. × 4 hours in FIG.
A high-temperature-use metal material having a coating layer as shown in (b) was obtained. As a result, the high-temperature corrosion resistance of the high-temperature-use metal material having the obtained coating layer is summarized in Table 3 below.

【0016】(例2)例1と同じCo基合金ECY76
8を、図2(a)に示すように基材1とし、蒸着法によ
ってTa金属5を2mmを目標にコーティング、引続
き、20wt%Ni−80wt%Cr合金6を10μ
m、次にCo−25wt%Cr−14wt%Al−1w
t%Y(Co:残部)合金7を30μmコーティングし
た。溶射法は二極スパッタリング装置を使用し、電圧、
電流密度条件(DC:3〜7KV、0.5〜1.0mA
/dm2 、RF:5〜10KW、1〜10W/c
2 )、雰囲気条件(アルゴンガス:10-3atm)で
行った。
(Example 2) Same Co-based alloy ECY76 as in Example 1
2 was used as a base material 1 as shown in FIG. 2 (a), a Ta metal 5 was coated by a vapor deposition method with a target of 2 mm, and subsequently, a 20 wt% Ni-80 wt% Cr alloy 6 was coated with 10 μm.
m, then Co-25wt% Cr-14wt% Al-1w
t% Y (Co: balance) alloy 7 was coated at 30 μm. The thermal spraying method uses a bipolar sputtering device, voltage,
Current density conditions (DC: 3 to 7 KV, 0.5 to 1.0 mA
/ Dm 2 , RF: 5-10 KW, 1-10 W / c
m 2 ) under atmospheric conditions (argon gas: 10 −3 atm).

【0017】上記と同じNi−Cr合金6とCoCrA
lY合金7の蒸着を、さらに2度繰返して行った後、例
1と同じ真空炉中で1150℃×2時間の熱拡散処理を
行って、図2(b)に示すようなコーティング層を有す
る高温使用金属材料を得た。以上の結果、得られたコー
ティング層を有する高温使用金属材料の高温耐食性を後
記表3にまとめて示す。
The same Ni-Cr alloy 6 and CoCrA as described above
After the deposition of the 1Y alloy 7 was further repeated twice, a heat diffusion treatment was performed at 1150 ° C. for 2 hours in the same vacuum furnace as in Example 1 to obtain a coating layer as shown in FIG. A metal material used at high temperature was obtained. As a result, the high-temperature corrosion resistance of the high-temperature-use metal material having the obtained coating layer is summarized in Table 3 below.

【0018】(例3)例1と同じNi基合金IN738
LCを図3(a)に示すように基材1とし、例1と同様
な条件でPtメッキ層2を3μmを目標にメッキし、例
1と同様の低圧プラズマ溶射条件で50wt%Ni−5
0wt%Cr合金8を30μm、引続きCo−32wt
%Ni−21wt%Cr−8wt%Al−0.5wt%
Y合金9をコーティングし、同じNiCr合金8、Co
NiCrAlY合金9をもう一度同じ厚さだけ低圧プラ
ズマ溶射し、次にAr−H2 雰囲気炉(Ar:H2
5:1、圧力:50〜100mmHg)で1050℃×
4時間の熱拡散処理を行って図3(b)に示すようなコ
ーティング層を有する高温使用金属材料を得た。以上の
結果、得られたコーティング層を有する高温使用金属材
料の高温耐食性を後記表3にまとめて示す。
Example 3 Same Ni-based alloy IN738 as in Example 1
As shown in FIG. 3 (a), the LC was used as the base material 1, the Pt plating layer 2 was plated under the same conditions as in Example 1 with a target of 3 μm, and under the same low pressure plasma spraying conditions as in Example 1, 50 wt% Ni-5 was used.
30 wt.% Of 0 wt% Cr alloy 8, followed by Co-32 wt.
% Ni-21 wt% Cr-8 wt% Al-0.5 wt%
Y alloy 9 is coated, and the same NiCr alloy 8, Co
The NiCrAlY alloy 9 is again low-pressure plasma sprayed by the same thickness, and then an Ar-H 2 atmosphere furnace (Ar: H 2 =
5: 1, pressure: 50 to 100 mmHg) at 1050 ° C x
By performing a heat diffusion treatment for 4 hours, a metal material used at high temperature having a coating layer as shown in FIG. 3B was obtained. As a result, the high-temperature corrosion resistance of the high-temperature-use metal material having the obtained coating layer is summarized in Table 3 below.

【0019】(例4)例1と同じCo基合金ECY76
8を図4(a)に示すように基材1とし、例1と同様な
条件でPtメッキ層2を3μmメッキした後、例1と同
様の低圧プラズマ溶射条件で25wt%Ni−75wt
%Cr合金10を50μm、引続きCo−25wt%C
r−14wt%Al−1wt%Y合金7を100μmを
目標にしてコーティングし、次にAr−H2 雰囲気炉
(Ar:H2 =5:1、圧力:50〜100mmHg)
で1150℃×2時間の熱拡散処理を行って、図4
(b)に示すようなコーティング層を有する高温使用金
属材料を得た。以上の結果、得られたコーティング層を
有する高温使用金属材料の高温耐食性を下記表3に示
す。
Example 4 Same Co-based alloy ECY76 as in Example 1
8 was used as the base material 1 as shown in FIG. 4A, and after plating the Pt plating layer 2 at 3 μm under the same conditions as in Example 1, 25 wt% Ni-75 wt under the same low pressure plasma spraying conditions as in Example 1.
% Cr alloy 10 at 50 μm, followed by Co-25 wt% C
r-14 wt% Al-1 wt% Y alloy 7 is coated with a target of 100 μm, and then an Ar-H 2 atmosphere furnace (Ar: H 2 = 5: 1, pressure: 50-100 mmHg)
4 at 1150 ° C. for 2 hours.
A high-temperature-use metal material having a coating layer as shown in (b) was obtained. As a result, the high-temperature corrosion resistance of the obtained high-temperature-use metal material having the coating layer is shown in Table 3 below.

【0020】なお、表3にはCo基合金ECY768
に、表1に示す低圧プラズマ溶射法によりCo−25w
t%Cr−14wt%Al−1wt%YまたはCo−3
2wt%Ni−21wt%Cr−8wt%Al−0.5
wt%Y合金をコーティングした高温使用金属材料を比
較例として、その高温耐食性も併せて示す。
Table 3 shows Co-based alloy ECY768.
The Co-25w was formed by the low pressure plasma spraying method shown in Table 1.
t% Cr-14wt% Al-1wt% Y or Co-3
2wt% Ni-21wt% Cr-8wt% Al-0.5
The high-temperature corrosion resistance of the high-temperature-use metal material coated with the wt% Y alloy is also shown as a comparative example.

【0021】[0021]

【表3】 [Table 3]

【0022】この結果、本発明による例1〜4のコーテ
ィング層を有する高温使用金属材料の腐食減量は比較材
であるCoCrAlYをコーティングしたものゝ60%
以下、CoNiCrAlYをコーティングしたものゝ5
0%以下であり、最大浸食深さで比較しても両比較材の
50%以下であった。
As a result, the corrosion loss of the high-temperature-use metal material having the coating layers of Examples 1 to 4 according to the present invention was about 60% of that of the comparative material coated with CoCrAlY.
Hereinafter, those coated with CoNiCrAlY # 5
0% or less, and 50% or less of both comparative materials even when compared at the maximum erosion depth.

【0023】[0023]

【発明の効果】本発明の表面処理方法によれば、従来の
高温使用金属材料よりも耐高温腐食性に優れた高温使用
金属材料を得ることができる。
According to the surface treatment method of the present invention, it is possible to obtain a high-temperature-use metal material which is more excellent in high-temperature corrosion resistance than conventional high-temperature-use metal materials.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の第1実施例の方法の模式的説明図。FIG. 1 is a schematic explanatory view of a method according to a first embodiment of the present invention.

【図2】本発明の第2実施例の方法の模式的説明図。FIG. 2 is a schematic explanatory view of a method according to a second embodiment of the present invention.

【図3】本発明の第3実施例の方法の模式的説明図。FIG. 3 is a schematic diagram illustrating a method according to a third embodiment of the present invention.

【図4】本発明の第4実施例の方法の模式的説明図。FIG. 4 is a schematic diagram illustrating a method according to a fourth embodiment of the present invention.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 小城 育昌 兵庫県高砂市荒井町新浜二丁目1番1号 三菱重工業株式会社 高砂研究所内 (58)調査した分野(Int.Cl.7,DB名) C23C 28/00 C23C 4/00 C23C 10/14 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Ikumasa Ogi 2-1-1, Shinhama, Arai-machi, Takasago-shi, Hyogo Mitsubishi Heavy Industries, Ltd. Inside Takasago Research Laboratory (58) Field surveyed (Int. Cl. 7 , DB name) C23C 28/00 C23C 4/00 C23C 10/14

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 高温使用金属材料基材へ熱拡散しに
くいPtまたはTaをコーティングする第1工程、
上記第1工程のコーティング層上に純CrまたはCrを
50wt%以上含むM′Cr合金(但し、M′はNi及
び/又はCo)をコーティングする第2工程、 上記
第2工程のコーティング層上にMCrAlY合金(但
し、MはNi,Co及びFeよりなる群のうちの1種以
上)をコーティングする第3工程、 上記第3工程を
終えた各コーティング層を有する高温使用金属材料基材
を真空炉またはAr−H2 雰囲気炉中で熱拡散処理する
第4工程よりなることを特徴とする高温使用金属材料基
材の表面に密着性、均一性、高温耐食性に優れたコーテ
ィング層を形成させる高温耐食性表面処理方法。
A first step of coating Pt or Ta which is hardly thermally diffused to a metal material substrate used at a high temperature;
Pure Cr or Cr on the coating layer of the first step
A second step of coating an M′Cr alloy (where M ′ is Ni and / or Co) containing 50 wt% or more, and an MCrAlY alloy (where M is Ni, Co and Fe) on the coating layer of the second step A third step of coating one or more of the groups), a third step of thermally diffusing the high-temperature-use metal material base having each coating layer after the third step in a vacuum furnace or an Ar-H 2 atmosphere furnace. A high-temperature corrosion-resistant surface treatment method for forming a coating layer having excellent adhesion, uniformity, and high-temperature corrosion resistance on the surface of a metal substrate used at high temperature, comprising four steps.
【請求項2】 コーティング層の厚さの要求に応じ、上
記第2工程及び第3工程を複数回繰返すことを特徴とす
る請求項1記載の高温耐食性表面処理方法。
2. The high-temperature corrosion-resistant surface treatment method according to claim 1, wherein the second step and the third step are repeated a plurality of times in response to a request for the thickness of the coating layer.
JP19007095A 1995-07-26 1995-07-26 High temperature corrosion resistant surface treatment method Expired - Lifetime JP3224716B2 (en)

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JP3224716B2 true JP3224716B2 (en) 2001-11-05

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