JP3228538B2 - Manufacturing method of floating magnetic head - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a floating magnetic head which is one of the main components of a hard disk drive (hereinafter referred to as an HDD).

[0002]

2. Description of the Related Art An HDD device used as a computer auxiliary storage device has been actively developed for miniaturization and high capacity. In magnetic disks, which are one of the main components of HDD devices, the technology for improving the coercive force (HC) and thinning, along with the technology for improving the flatness of the aluminum alloy substrate that forms the magnetic film, has advanced, and high-density recording due to low flying height has been achieved. Has been realized. 2. Description of the Related Art Conventionally, a coating type magnetic disk mainly used is manufactured by mixing a magnetic powder, a lubricant and an adhesive and applying the mixture to an aluminum alloy substrate. In contrast, thin-film magnetic disks
A magnetic film is formed by plating or sputtering, and a lubricating film is formed on the surface of the magnetic film. Since a thin film magnetic disk contains no adhesive or lubricant in the magnetic film, a high output can be obtained with a thin film. For this reason, this magnetic disk is used in most recent small HDD devices. On the other hand, floating magnetic heads (hereinafter referred to as magnetic heads) are used for contact start / stop with thin film magnetic disks.
In order to improve the performance of the ski surface (hereinafter referred to as CSS), studies have been made to improve the flatness of the ski surface, and methods have been proposed such as providing irregularities along crystal grain boundaries by sputter etching the ski surface ( For example, JP-A-1-251308).

[0003]

However, it is difficult to increase the thickness of the lubricating film of the conventional thin film magnetic disk in order to improve the electromagnetic conversion characteristics by reducing the gap between the magnetic head and the magnetic head. It is suppressed to the extent.
Therefore, when CSS is repeated, there is a problem that the static friction coefficient increases in a smaller number of times than in the case of the coating type magnetic disk. In order to improve this, a technique has been disclosed in which a ski surface of a magnetic head is sputter-etched to form irregularities along crystal grain boundaries. However, this technology can be used only for magnetic heads using polycrystalline materials. In magnetic heads using single crystal materials, which will become the mainstream in the future with high output and low noise, there is no grain boundary, so sputter etching is performed. However, no unevenness occurs. That is, in the magnetic head using the single crystal material, an increase in the coefficient of static friction due to the repetition of CSS is a serious problem. An object of the present invention is to solve the above-mentioned conventional problems and to provide a floating magnetic head capable of suppressing an increase in a coefficient of static friction and reducing a gap between a magnetic head and a magnetic disk. It is.

[0004]

[MEANS FOR SOLVING THE PROBLEMS] To achieve the above object
The method for manufacturing a floating magnetic head according to the present invention includes a slider
Providing a hole or groove in the ski surface of the ski;
Forming a carbon lubricating film on the entire surface,
The ski surface is flattened to remove any excess
Remove the lubricating film and leave the lubricating film in the hole or groove.
And exposing a lubricating film on a part of the ski surface.
It is characterized by.

[0005]

Therefore, a method of manufacturing the above floating magnetic head
Since the magnetic head is filled with a material having a lubricating effect made of carbon into the holes or grooves on the ski surface to form a lubricating film, even when the magnetic head is repeatedly CSS-
Increased durability without peeling of the lubricating film, also rather low friction of the thin film magnetic disk surface, suppresses the rise in the static friction coefficient by repeating Therefore CSS, to thin the lubricating film formed on the surface of the thin film magnetic disk can and Do Ri, as a result, it is possible to improve the electromagnetic conversion characteristics can be reduced gap between the magnetic head and the magnetic disk
A floating magnetic head can be provided .

[0006]

FIG. 1 is a perspective view of a floating magnetic head according to an embodiment of the present invention, and FIGS. 2 and 3 show a manufacturing process of the floating magnetic head. After forming the gap forming surfaces of the first core 2 and the second core 3 on which the winding grooves 1 have been processed into mirror surfaces, the two cores are bonded to a required magnetic gap via a gap material to manufacture a magnetic head bar. Next, after the air escape groove 5 is formed on the first surface 4 of the magnetic head bar, the mirror surface is finished by lapping using diamond abrasive grains or the like. At this time, the gap depth (GD) is desirably finished to 10 μm or less in order to improve the conversion performance of the magnetic head. Next, the back taper 6 and the front taper 7 are processed, and about 10 to 100 magnetic head bars are arranged.
3 (a) to 3 (e) show the steps of the cross section taken along the line aa 'of FIG. Using a spinner made of photoresist 8, a magnetic head bar having approximately 10 to 100 lines is coated to a uniform thickness (FIG. 3).
(a)). Next, prebaking is performed at about 90 ° C., and exposure is performed through a photomask 9 to remove unnecessary portions of the photoresist 8 using a developing solution (FIG. 3B). In the present embodiment, the photomask 9 was manufactured so that 20 μm circles were arranged on the ski surface 10 (FIG. 1) at a pitch of 50 μm vertically and horizontally. Then, using a device such as ion milling, a hole 1
After forming 1, the photomask 9 is removed (FIG. 3C,
(d)). In this embodiment, the hole is made of a circular hole. However, the effect does not change even if the shape, the size and the pitch of the hole are changed. Also, it is considered that the effect is not changed even if a groove is formed in the longitudinal direction or the lateral direction of the ski 10. Next, the carbon lubricating film 12 having excellent lubricating performance is
It is formed to a thickness of about 4 μm (FIG. 3E). Next, aa 'shown in FIG.
After that, the magnetic head is obtained by regulating the ski width (SW) and the track width (TW) of FIG. Next, the unevenness of the ski surface 10 processed by ion milling is finished to a flat surface by lapping. If the lapping dimension is increased, the dimension of the front taper 7 changes, and it is difficult to uniformly wrap the entire surface with a processing amount of about 1 μm. Therefore, a magnetic head fixing plate shown in FIG. 4 is used. This magnetic head fixed platen is made by bonding elastic rubber
A magnetic head is arranged on 14 and processed. In the magnetic head manufactured by the above manufacturing method, since a part of the ski surface is formed of carbon having excellent lubricating performance, an increase in the static friction coefficient due to repetition of CSS can be suppressed.

[0007]

According to the method of manufacturing a floating magnetic head of the present invention ,
According to this method , a magnetic head is provided in which a hole or a groove is provided in a ski surface and a carbon lubrication film is formed in the hole or the groove .
The manufactured magnetic head can prevent the lubricating film from peeling off even when the CSS is repeated, suppress the rise in the coefficient of static friction, and prevent scratches on the ski surface of the magnetic disk and the magnetic head. This has the effect that no generation occurs.

[Brief description of the drawings]

FIG. 1 is a perspective view of a floating magnetic head according to an embodiment of the present invention.

FIG. 2 is a manufacturing process diagram of a floating magnetic head according to an embodiment of the present invention.

FIG. 3 is a manufacturing process diagram of the floating magnetic head in one embodiment of the present invention.

FIG. 4 is a perspective view of a magnetic head fixed surface plate.

[Description of Signs] 1 ... winding groove, 2 ... first core, 3 ... second core, 4 ...
1st surface, 5: air escape groove, 6: back taper, 7
... front taper, 8 ... photoresist, 9 ... photomask, 10 ... ski surface, 11 ... hole, 12 ... lubrication film,
13 ... substrate, 14 ... rubber.

──────────────────────────────────────────────────続 き Continued on front page (58) Field surveyed (Int.Cl. ⁷ , DB name) G11B 5/60 G11B 21/21

Claims (1)

(57) [Claims] (1) A hole or groove is provided in a ski surface of a slider.
And a lubrication film made of carbon on the entire surface of the ski surface.
And forming a flattening process on the ski surface
Remove any excess lubrication film on the ski surface and remove the holes or holes.
Lubricates part of the ski surface leaving the lubrication film in the groove
A floating magnet, comprising a step of exposing the film.
The manufacturing method of the air head .