JP3242318B2 - Wire saw device and method of cutting workpiece using the same - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wire saw device suitable for use in slicing a block of ceramic or ferrite.

[0002]

2. Description of the Related Art Conventionally, as an apparatus for performing precision slice cutting of a block of ceramic or ferrite or a block of brittle material such as quartz, silicon, or glass,
2. Description of the Related Art A wire saw device configured to perform cutting with a wire and an abrasive fluid constituting a wire blade is used. FIG. 22 shows a conventional example of this type of wire saw device. A wire saw device A of this example includes a vertically movable table 2 on which a workpiece 1 is installed, and is provided on a rear side of the table 2. Control panel 5, three support rollers 6, 6, 6 provided horizontally on the front side of the control panel 5, and a plurality of control rollers provided on the front side of the control panel behind these support rollers 6. Guide rollers 7, 8, 9, 10, 11, 12, 13, 14, 15, 1
6, a supply reel 17 and a supply roller 18 for supplying the wire S to these guide rollers, and a winding roller 19 and a take-up reel 20 for collecting the used wire S from these guide rollers. Is mainly composed. In the center of the front upper part of the control panel 5, a central shaft 2 is provided.
A seesaw shaft 22 that swings up and down around an axis 1 is provided, and the guide rollers 11 and 8 attached to the end of the seesaw shaft 22 can swing up and down alternately. Among the plurality of guide rollers, guide rollers 7, 8, and 9 are arranged in order from the top on the right side of the front surface of the control panel, and guide rollers 10, 1 and 2 are arranged on the left side of the front surface of the control panel in order from the bottom.
The guide rollers 13 and 15 are disposed adjacent to the front surface of the control panel in the portion between the guide rollers 7 and 12 on the left and right sides. The guide rollers 16 are respectively arranged below.

Further, in the wire saw device A, the wire S sent from the sending reel 17 is sent to the guide roller 7 via the supply roller 18 and the guide rollers 15 and 16, and further, the guide rollers 8 and 9 Through the support rollers 6, 6, 6. Further, two of the support rollers 6, 6, 6 are horizontally supported with a separation on the lower side, the other one is horizontally supported above the other two rollers, and three support rollers 6 are provided. Are arranged at triangular positions as shown in FIG. 22, and the wire S is repeatedly wound around three support rollers 6 so as to cover an appropriate width.
Next, the wire S drawn out from the support rollers 6, 6, 6 is wound around guide rollers 13, 14 via guide rollers 10, 11, 12, and further taken up by a take-up reel 20 via a take-up roller 19. It is designed to be wound up.
Therefore, the delivery reel 17 and the supply roller 18 constitute a supply mechanism, and the take-up roller 19 and the take-up reel 20 constitute a take-up mechanism. The guide rollers 7, 8, 9, 10,
11, 12, 13, 14, 15, 16 and each support roller 6
Are provided with grooves for stably supporting the wire S. In addition, in the wire saw device A, the lower side of the table 2 is covered with a cover member 3 so as to prevent scattering of the abrasive fluid during slice cutting, but this cover member 3 may be omitted. Absent. A recovery mechanism K is provided inside the cover member 3 for recovering the abrasive fluid supplied to the workpiece 1 from an unillustrated abrasive fluid supply device.

[0004] The wire saw device A having the above-described configuration is capable of winding the wire S sequentially fed from the supply roll 17 to the winding roll 20.
The wire wire S is sequentially moved in such a manner as to be wound, and the table 2 supporting the workpiece 1 is sequentially raised, so that the wire wire S wound multiple times between the lower supporting rolls 6 Is pressed against the workpiece 1 as shown in FIG.
Simultaneously, the workpiece 1 can be precisely slice-cut by supplying the abrasive fluid to the workpiece 1 from an unillustrated abrasive fluid supply device.

[0005] In the wire saw device A having the above configuration,
In order to adjust the tension of the wire S wound around the support rolls 6, 6, a rotation of, for example, about 1.1 to 1.2: 1 is provided between the front guide roller 15 and the rear guide roller 13. A difference is generated, a tension is applied to the wire S by the rotation difference, and the wire S wound around the support rolls 6, 6, 6 is strongly pulled by using the tension, thereby performing the slice cutting of the workpiece 1. It is possible. Here, conventionally, since the tension generating mechanism of the wire S is an important mechanism that greatly affects the slice cutting accuracy of the workpiece 1, a gear mechanism having a special configuration as shown in FIG. Is used to adjust the tension.

The gear mechanism B shown in FIG. 24 is arranged on the back side of the control panel 5 shown in FIG.
And a rotation shaft 26 for supporting the guide roller 15 are attached to the gear box 27 so as to be spaced apart from each other in parallel with each other, and between the rotation shafts 25 and 26 of the gear box 27. An adjusting shaft 28 is supported in parallel, and a powder clutch device 30 for adjusting the number of revolutions of the adjusting shaft 28 is mounted outside the gear box 27. The rotating shafts 25 and 26 and the adjusting shaft 28 are rotatably supported via bearings 29 provided on a gear box. A gear 31 is provided on the rotating shaft 25 in the gear box 27, and a gear 31 is provided on the rotating shaft 26. The gears 31 and 32 are engaged with a gear 33 or a gear 34 attached to the adjustment shaft 28. The adjusting shaft 28 has a double structure with a one-way clutch. The powder clutch device 30 has a double structure of an internal shaft 35 and an external shaft 36, and the internal shaft 35 extends to the powder clutch device 30. The external shaft 36 is connected to the locking plate 37 in the powder clutch device 30 and the powder clutch device 3
Rotating member 3 extending to the 0 side and in powder clutch device 30
8, the gear 33 is attached to the outer periphery of an external shaft 36 in the gear box 27. In FIG. 24, the structure of the portion where the external shaft 36 extends toward the powder clutch device 30 is simplified.

The powder clutch device 30 includes a disc-shaped clutch plate 37 made of an electromagnet provided rotatably in the circumferential direction, and a rotating member 38 made of a hollow disc-shaped electromagnet surrounding the clutch plate 37. Magnetic powder is filled between the rotating member 37 and the rotating member 38, and the connection between the clutch plate 37 and the rotating member 38 can be adjusted by the strength of these electromagnetic forces. That is, by increasing the electromagnetic force to strengthen the coupling state between the clutch plate 37 and the rotating member 38 by the magnetic powder, the torque of the clutch plate 37 is transmitted to the rotating member 38 sufficiently efficiently, or the electromagnetic force is reduced to reduce the magnetic powder. By weakening the coupling state between the clutch plate 37 and the rotating member 3 by the above, it is possible to switch between transmitting only a part of the torque of the clutch plate 37 to the rotating member 38. Therefore, according to the powder clutch device 30 described above, the rotation speed difference between the clutch plate 37 and the rotation member 38 can be adjusted, and thereby the rotation speed difference between the rotation shaft 26 and the rotation shaft 25 can be adjusted. Therefore, a rotation speed difference between the guide rollers 13 and 15 can be generated, and the tension can be applied to the wire S as described above using the rotation speed difference.

[0008]

FIG. 25 shows a state in which the workpiece 1 is slice-cut with the wire S wound around the support rollers 6, 6, 6 under tension.
(A) and (B) show. As shown in these figures, the wire S cuts the workpiece 1 while forming the cutting groove 1a. When the cutting groove 1a reaches the bottom of the workpiece 1, the processing is completed. During cutting, a mixture of cutting oil and abrasive grains is usually poured from above, as indicated by the arrow in FIG. 25A, so that cutting can be performed smoothly. However, since the wire S is wound between the support rollers 6, 6, 6 under tension and pressed against the workpiece 1, the wire S covers and covers the bottom 1b of the cutting groove 1. The cutting proceeds in the state of being cut. Then, the abrasive grain does not spread to the bottom 1b of the cutting groove 1 satisfactorily, and in some cases, the cutting proceeds in a state where the abrasive grain does not exist, so that the cutting speed decreases, and in some cases, the wire S There was a possibility that the wire was damaged due to an excessive load.

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and it is possible to reliably supply abrasive grains to the bottom of a cutting groove of a workpiece while cutting the workpiece, thereby reducing the cutting speed. And a cutting method using the same.

[0010]

According to a first aspect of the present invention, there is provided a table for holding a workpiece, and a plurality of tables provided above the table so as to face the workpiece. A supporting roller, a control panel erected on one side of the table, a plurality of guide rollers provided on the control panel, and a supply mechanism for supplying a wire wire to the guide roller of the control panel, A winding mechanism for winding a wire wound around the plurality of support rollers via a guide roller of the control panel through another guide roller of the control panel; A wire saw device configured to allow a workpiece and a plurality of support rollers to be freely movable toward and away from each other and press a wire wound between the plurality of support rollers against the workpiece to perform a slice cutting process on the workpiece. Is vertically movable A pull-up device is provided on one side of the table to constantly urge the table upward, and a pressing member for preventing the table from being lifted is provided on the other side of the table. all SANYO intermittent vertical movement mechanism for temporarily lowering the table via the pressing member is urged downward is formed by attached, the intermittent vertical
A moving mechanism is provided with a base portion provided to be movable up and down,
A support that is pin-connected to the base and that is pivotable up and down
The holding piece and the support piece attached to the base portion are turned downward.
And a pressing device for rotating the table.
At the lower part of the support piece to allow the support piece to pivot downward.
An operation rod that can be pushed down
is there. Next, in the invention according to claim 2 , the workpiece is
A table to be held, and the workpiece to be processed above the table.
A plurality of support rollers provided to face the object;
A control panel erected on one side of the
And the guide rollers of the control panel.
Supply mechanism for supplying the ear wire, and guide of the control panel
A wire wound around the plurality of support rollers via rollers;
Wind the wire through another guide roller of the control panel.
And a take-up mechanism.
A number of support rollers are configured so that they can be
The wire wound between the rollers is pressed against the workpiece
A wire saw device that slices and cuts workpieces.
The table is supported so as to be movable up and down,
A pulling device that always urges the table upward on one side of the bull
The table is attached to the other side of the table.
Pressing member that prevents the rise of the
To push the table temporarily through the pressing member.
With an intermittent vertical movement mechanism for lowering
The intermittent vertical movement mechanism is provided so as to be vertically movable.
And the base is pivoted up and down
The support piece is provided freely, and the support piece is
And a pressing device for rotating the supporting piece downward.
The table extends below the support piece and is supported on the table.
The operating rod, which is depressed by the downward rotation of the
Using a continuous wire saw device, a method for cutting the workpiece by raising the table, pressing the wire wound around the plurality of support rollers against the workpiece, and supplying the abrasive fluid, During cutting, the table is temporarily lowered to release the contact between the workpiece and the wire to form a gap between the wire bottom and the wire bottom of the cutting groove formed in the workpiece, It is characterized in that the abrasive liquid is introduced into the groove bottom of the cutting groove from this gap .

[0011]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows an example of a wire saw device according to the present invention. The basic configuration of a wire saw device C of this example is the same as that of the conventional wire saw device described above with reference to FIG. And the detailed description is omitted. The difference between the wire saw device C of this example and the wire saw device A of the previous example is that the mechanism for applying tension to the wire S is changed to a tension generating mechanism D having the configuration shown in FIGS. The point is that an intermittent vertical mechanism E for adjusting the vertical position of S is provided, and an idler mechanism F for winding the wire S in a special state on the support rollers 6, 6, 6 is added.

The tension generating mechanism D of this embodiment includes a first rotating shaft 51 shown in FIG. 2 connected to the guide roller 13 on the upper center side of the control panel 5 shown in FIG. A second rotation shaft 52 connected to the guide roller 15 on the side is separated from and parallel to a plate-like support member 53, and is rotatably supported on each other. The first rotary shaft 51 and the second rotary shaft 52 are rotatably supported by a support member 53 via bearings 54 and members 55, respectively. Next, a magnetic torque clutch mechanism G is provided on one end side of the second rotating shaft 52. This magnetic torque clutch mechanism G has a cylindrical case 57 as shown in FIG.
And a doughnut-shaped permanent magnet member 59, 60 sandwiching the clutch plate 58 made of a disk-shaped ferromagnetic material provided in the center of the clutch plate 58 from both sides in the thickness direction. The one end of the second rotating shaft 52 is inserted and fixed to the clutch plate 58. The one end of the rotating shaft 52 is rotatably supported by bearings 61 and 62 so that the clutch plate 58
Are rotatably supported inside the case 57. The case 57 includes a central case 57a and an end case 57b.
The permanent magnet member 59 is attached to one case and the permanent magnet member 60 is attached to the other case, and the one case is rotated by a predetermined angle around the central axis with respect to the other case. By moving it, the facing position of the permanent magnet members 59 and 60 can be changed in a state where the permanent magnet members 59 and 60 face each other in parallel.

As shown in FIG. 4, the permanent magnet member 59 includes four sector-shaped permanent magnet discs 59a, 59b, 59c, 5c.
9d, and the permanent magnet member 60 is formed by joining four sector-shaped permanent magnet discs 60a, 60b, 60c, 60d, and is adjacent to each of the permanent magnet members 59, 60 in their circumferential direction. Permanent magnet disk 59a ..., 60a
Are different in polarity. Therefore, by changing the facing positions of the permanent magnet members 59 and 60, the number of magnetic force lines of the permanent magnet discs 59a... 60a applied to the clutch plate 58 can be changed as shown in FIG. Thus, the rotation resistance of the clutch plate 58 during rotation can be adjusted.

Next, a timing pulley 65 integrated with the case 57 is attached to the support plate 53 side of the case 57. A timing belt (rotation transmitting member) 66 is wound around the timing pulley 65, and The belt 66 is wound around a timing pulley 67 attached to one end of the first rotating shaft 51, and is configured to transmit the rotating force of the first rotating shaft 51 to the timing pulley 65 to drive the case 57 to rotate. ing. Therefore, from the above configuration, by adjusting the rotation angle of the center case 57a and the end case 57b, the clutch plate 5
8 can be changed to increase or decrease the resistance of the clutch plate 58 during rotation, whereby the rotation speed of the first rotation shaft 51 and the rotation speed of the second rotation shaft 52 can be changed. A rotation speed difference can be generated.

FIG. 7 shows the entire structure of an intermittent up-down movement mechanism E provided in the wire saw device C of this embodiment. The intermittent up-down movement mechanism E of this embodiment comprises a table 2 for holding a workpiece. , A control rod 71 extending from the back side of the support base 70 to the side of the support base 70, and a depression provided above the distal end of the control rod 71. The apparatus mainly includes a device 72 and a pulling device 73 for constantly pulling the table 2 upward. The table 2 is provided with a support jig 75 on the upper surface as shown in detail in FIG. 8 so that the work 1 can be gripped by the support jig 75 and a support on the lower side of the table 2 is provided. The base 70 extends to the back side of the operation panel 5 via a connection block 76 provided on the lower side of the operation panel 5, and the operation rod 71 is connected to the back side of the connection block 76. The operation panel 5 is vertically movably supported along a guide rail (not shown) provided on the rear surface side. The support jig 75 is provided with support pieces 7 on both ends of a substrate 78 fixed on the table 2.
It is an inverted U-shape provided with 9, 79
The workpiece 1 can be gripped between the support pieces 79, 79 by a screw shaft 80 screwed into a screw hole formed in the work piece.

The lifting device 73 is connected to the connection block 7.
6, a supporting roller 82 provided above the back side of the connection block 76 and wound around the pulling wire 81, and a pulling wire provided on the side of the supporting roller 82. A support roller 83 around which the support roller 81 is wound and a heavy weight member 85 provided below the support roller 83 for pulling the pulling wire 81 are mainly constituted. Is acting.

The pressing device 72 includes the operating rod 71.
A push block 90 installed above the distal end of the push block 90, a position adjusting device 91 provided above the base end of the push block 90, and a push device 92 such as an air cylinder attached to the distal end of the push block 90. It is configured as a subject.

The pressing block 90 has a block-shaped base portion 95, an upper support piece 96 extending integrally with the base portion 95 on an upper side surface thereof, and a horizontally extending lower portion of the base portion 95. A lower support piece 98 is provided to be pivotable up and down via the pivot pin 97 provided. More specifically, a concave portion is provided at the bottom of the base portion 95, and the base end portion of the rod-shaped lower support piece 98 is inserted into the concave portion, and penetrates the base end portions of the base portion 95 and the lower support piece 98. A pivot pin 97 is provided, and a lower support piece 98 is pivotally supported about the pivot pin 97. A pressing device 92 such as an air cylinder is attached to the tip of the support piece 96 with the piston rod 99 facing downward. By extending the piston rod 99 of the pressing device 92, the pivot pin 97 is used as a fulcrum. The lower support piece 98 can be turned downward. Further, a rod-shaped pressing member 100 is provided between the distal end portion of the lower support piece 98 and the mounting portion of the rotation pin 97, and the lower support piece 98 is provided.
When is turned downward, the operating rod 71 is pressed down by the pressing member 100 so that the table 2 can be lowered by a predetermined distance.

Next, a motor 102 is provided above the base portion 95 and supported by a support board 101. A screw shaft 103 is connected to a rotating shaft of the motor 102, and the screw shaft 103 is connected to the motor 102. Is directed downward and the support plate 10
1 is screwed into a screw hole formed in the base 95 in the vertical direction, and the base 95 can be moved up and down by the rotation of the screw shaft 103. The reference numeral 105 in FIG. 7 denotes a micrometer provided at the lower side of the distal end of the operation rod 71 for positioning the operation rod vertically. The operation is performed by moving the center axis 106 of the micrometer 105 up and down. The vertical position of the rod 71 can be precisely measured.

According to the structure of the intermittent lifting mechanism E described above, the table 2 can be constantly pulled upward by the lifting device 73, and the lifting of the table 2 can be performed by pressing the pressing member 10 up.
0 and the lower support piece 9
8 is turned downward, and the operating rod 71 is
Is lowered so that the table 2 can be lowered by a very small distance.

Next, at the center of the front surface of the control panel 5 shown in FIG. 1, an idler mechanism F for controlling the wire S to be wound around the support rollers 6, 6, 6 into a special winding state.
Is provided. As shown in FIG. 9, the idler mechanism F includes a position adjustment block 110 provided at the center of the front surface of the control panel 5 so as to be able to move forward or backward, and an angle adjustment block provided at the front left and right sides of the position adjustment block 110. 111, 112, an idle roller 115 attached to a support shaft 113 projecting from the front surface of the angle adjustment block 111, and an idle roller 11 attached to a support shaft 116 projected from the front surface of the angle adjustment block 112.
7 are provided. The front surface of the angle adjustment block 111 is slightly inclined downward, and the front surface of the angle adjustment block 112 is slightly inclined upward. The idle roller 115 is slightly inclined downward, and the idle roller 117 is slightly inclined. It is inclined upward. A circumferential groove 115 for winding the wire S is formed at the center of the circumferential surface of the idle rollers 115 and 117.
a and 117a are formed.

Next, the wire S wound around the guide roller 9 of the control panel 5 and pulled out is first supported by the support rollers 6, 6,.
6 starts to surround three support rollers 6 along a circumferential groove 6a on the rear end 6b side (control panel 5 side), and after being wound about half of the support rollers 6, 6, 6 Circumferential groove 11 of idle roller 115 pulled out from upper support roller 6
5a , and then in the order of the circumferential groove 17a of the idle roller 117, and then the support roller 6,
6, 6 from the central part side to the tip part side,
It is wound around 6,6. That is, the support roller 6,
The wire wire S is wound around 6, 6 so as to have two winding portions 6A, 6B before and after which are separated from each other.
In addition, the width of these winding parts 6A and 6B is made substantially equal, and is made substantially equal to the length of the workpiece 1 described later. With the above configuration, the sheet is sent out from the sending reel 17.
The supply wire 18, the guide roller 15,
16 to the guide roller 7 and further to the guide roller 8,
9, one end side of a winding portion 6A of the support rollers 6, 6, 6
(The left end of the winding portion 6A in FIG. 9),
In the middle of 6, 6, 6, the upper support at the right end of the winding portion 6A in FIG.
Pull out from the holding roller 6 and idle rollers 115 and 11
7 again, the support roller 6, 6, 6
Return to one side end (left end of the winding portion 6B in FIG. 9), and further wind
Upper part at the other end of the portion 6B (right end of the winding portion in FIG. 9)
Guide wire with the wire S drawn out from the support roller 6
Wrap around guide rollers 13 and 14 via 10, 11 and 12
And wound on a take-up reel 20 via a take-up roller 19.
You can take it.

Next, the work 1 to be slice-cut by the wire saw device A of this embodiment will be described in detail below. FIG. 10 shows the entire structure of the workpiece 1. The workpiece 1 in this example is a block for manufacturing the magnetic head H having the structure shown in FIG. The magnetic head H having the structure shown in FIG. 12 has plate-shaped magnetic core halves 120 and 121 made of ferrite, ceramic, or the like.
Welding layers 122, 122 of glass or the like between 20a, 121a
Is provided with a magnetic gap G sandwiched on both sides. The thickness of the magnetic head H in this example is, for example, about 0.1 to 0.2 mm. In order to manufacture a magnetic head H having this configuration, usually, two block bars made of ceramic or ferrite are formed with a groove, and a magnetic film or a gap film is formed on the grooved portion as necessary. It is manufactured by joining both block bars with a welding material such as glass via a film. Here, the workpiece 1 shown in FIG.
Are two block bars 12 integrated with the welding material.
6, 127, and two block bars 126, 12
7, a glass welding layer 129 is provided in a bonding hole 128 formed by abutting a plurality of grooves formed in the base 7 and the two block bars 126 and 127 are bonded to each other. A magnetic gap G is formed between a large number of protrusions 126a and 127a formed in the above. Therefore, the work piece 1 is slice-cut along cutting lines 130 shown in FIG. 11 orthogonal to the longitudinal direction of the work piece 1 in this example, so that the magnetic head H shown in FIG.
Can be obtained simultaneously.

The wire saw device A having the above-described structure is used to manufacture a large number of magnetic heads H shown in FIG. 12 at a time by slicing from the workpiece 1 shown in FIG. Further, in order to slice-cut the workpiece 1 having the above structure using the wire saw device A, a plate-shaped FIG.
3, a plurality of workpieces 1 are fixed to the fixing jig 135 in an aligned state with an adhesive or the like,
The fixing jig 135 is fixed to a support jig 75 shown in FIG. 8, and the wire wire S is pressed against the workpieces 1. In addition, on the upper surface of the plate-shaped jig 135 shown in FIG.
Although not shown in FIG. 13, a plurality of protrusions 136 and 137 are formed as shown by two-dot chain lines in FIG. 11, and the workpiece 1 is set along these protrusions 136 and 137,
By fixing the workpiece 1 to the projections 136 and 137 with an adhesive, the workpiece 1 can be used for slice cutting.

In order to perform the slice cutting of the workpiece 1, first, a jig 135 shown in FIG. 13 to which a large number of workpieces 1 are fixed is placed on a substrate 78 of a support jig 75 shown in FIG. The jig 135 is rotated by rotating the screw shaft 80 to support the jig 75.
And fixed to the substrate 78. In this state, the direction of each workpiece 1 and the direction of the wire S wound around the support rollers 6, 6, 6 are orthogonal as shown in FIG. 13, and furthermore, two rows of workpieces are arranged on a jig 135. Object 1, 1 and support roll 6
The positional relationship between and the wire line S is as shown in FIG. Next, as shown in FIG.
7 and the guide rollers 18, 15, 16, 7,
8 and 9 are wound around a plurality of times so as to have a predetermined width, and then the support rollers 6, 6, 6
The required number of windings as shown in FIG. 9 is performed about half the number of times, and then the necessary number of times is wound around the remaining half of the supporting rolls 6, 6, and 6 again through the idle rollers 115 and 117 as shown in FIG. Rollers 10, 11, 12, 13, 1
The wire S is continuously moved at a predetermined speed so that the wire S is wound around the guide roller 19 and wound up by the winding roll 20 in the order of 4.

During the continuous movement of the wire S, the tension generating mechanism D is operated to apply a tension to the wire S. In the tension generating mechanism D of the wire S, by adjusting the rotation angles of the center case 57a and the end case 57b of the case 57 shown in FIG. Since the number can be changed as shown in FIG. 5 or FIG. 6, a difference in the number of rotations between the first rotation shaft 51 and the second rotation shaft 52 can be generated. In this rotation speed difference, (the rotation speed of the first rotation shaft 51):
By setting (the number of rotations of the second rotation shaft 52) = 1: 1.1 to 1.2, the speed of the support roller 6, 6, Since the speed of the wire S wound up from 6, 6 can be made necessary and sufficiently high, tension can be generated on the wire S as a result.

The rotation of the clutch plate 58 is suppressed by the lines of magnetic force by adjusting the number of lines of magnetic force crossing the clutch plate 58 by changing the facing positions of the permanent magnet members 59, 60, so that one rotating shaft 51 and the other rotating shaft are controlled. If a rotational speed difference is produced between the clutch plate 58 and the permanent magnet members 59 and 60, fine adjustment of the rotational speed of the clutch plate 58 can be accurately performed by fine adjustment of the facing position of the permanent magnet members 59 and 60. The value can be finely adjusted precisely, and when a fine magnetic head with a thickness of about a fraction of a millimeter from the workpiece 1 is accurately sliced and cut, generation of undulation on the workpiece 1 is suppressed. Slicing can be accurately performed while cutting. It is preferable that the seesaw shaft 22 be appropriately swung during the movement of the wire S to make the movement of the wire S as smooth as possible.

Since the wire S with the tension applied thereto is wound around the support rolls 6, 6, 6 a plurality of times,
By gradually raising the table 2 at a constant speed, the wound wire S can be pressed against the workpieces 1. At the same time as the wire S is moved, the abrasive fluid is supplied to the wire S and the workpiece 1 from an unillustrated abrasive fluid supply device. To raise the table 2, FIG.
By rotating the screw shaft 103 of the intermittent vertical mechanism E shown in FIG.
Can be gradually raised, so that the table 2 can be gradually raised at a constant speed by using the traction force of the heavy weight member 85 via the traction wire 81. When the table 2 rises and a large number of workpieces 1 on the jig 135 come into contact with the wire wires S wound between the support rolls 6, 6, 6, the wire wires S simultaneously hold the large number of workpieces 1 in a predetermined manner. Slice cutting at intervals of.

At this time, the wire S wound around the supporting rolls 6, 6, 6 is wound around two winding portions 6A, 6B which are almost the same as the length of the workpiece 1, as shown in FIG. Since the wire is wound, almost all of the wire S wound around the support rolls 6, 6, 6 can be used for slice cutting. That is, it is possible to eliminate as much as possible the wire S that does not come into contact with the workpiece 1 in the wire S wound around the support rolls 6, 6, 6. In this way, it is possible to perform the slice cutting while pressing the workpiece 1... Evenly on almost all of the wire wires S wound around the support rolls 6, 6, 6, so that the cutting accuracy of the workpiece 1 by the wire wire S is improved. Can be improved. The reason for this is that if the wire S is wound around the entire length of the support rolls 6, 6, 6, the wire S that contacts the workpiece 1 and the wire S that does not contact the workpiece 1 have the support roll 6, 6,
6, the load balance with respect to the wire S is lost, and the wire S with increased tension and the wire S with reduced tension are present on the support rolls 6, 6, 6, so that the cutting accuracy is improved. Will decrease.

Further, by minimizing the number of wire wires S wound around the support rolls 6, 6, 6, the load on the support portions of the support rolls 6, 6, 6 can be reduced, and the slice cutting accuracy can be reduced. Contribute to the improvement of That is, the supporting rolls 6, 6, 6 having a length capable of being wound 130 times.
When the wire S is wound around the entire length, the number of windings is 130. When the winding force is 2 kg per winding, a force of 260 kg acts on the supporting rollers 6, 6, and 6. . On the other hand, as shown in FIG. 9, if the wire S is wound around only the portion corresponding to the length of the workpiece 1 in accordance with the shape of the workpiece 1,
The number of windings is about 00, and the force applied to the support rolls 6, 6, 6 at that time becomes 200 kg. Thereby, the pressure load on the support shaft of the rolls 6, 6, 6 is reduced, and the bending and warpage of the support shaft are reduced.
Since the gap difference between the wire lines S wound around the support rolls 6, 6, 6 is reduced, the processing accuracy of the slice cutting processing is improved.

Next, the tension generating mechanism D, which applies a tension to the wire S, applies two rotating shafts 51, 5 to the supporting member 53.
2 are only supported by one bearing portion, respectively, which is less than the three gears required in the conventional gear mechanism B shown in FIG. The number of shafts and the number of shaft supports are reduced, so that the work of positioning the rotary shaft becomes easier, and the positioning accuracy can be improved. Further, since two rotating shafts, each of which is supported by the support member 53, are basically supported by two, the work of removing the rotating shafts 51 and 52 can be performed more easily than the conventional structure. Therefore, maintenance work involving disassembly work can be performed more easily than before. From the above, it is possible to improve the positional deviation accuracy and the eccentricity accuracy during rotation of the first rotary shaft 51 and the second rotary shaft 52, thereby stabilizing the value of the tension applied to the wire S. Therefore, the processing accuracy at the time of slice cutting of the workpiece 1 can be improved. In other words, the workpiece 1 can be slice-cut with less undulation than the conventional device.

On the other hand, in the gear mechanism B having the above-described structure, it is necessary to provide the rotating shafts 25 and 26 and the adjusting shaft 28, and to support each shaft with at least two bearings. , 26 requires three shafts and six bearings to adjust the rotational speed difference, and in order to rotate the shafts with high accuracy without interlocking, the positioning accuracy of each shaft must be There is a problem that is required at an extremely high level. Further, since the mechanism inside the gear box is complicated and difficult to disassemble, there is a problem that the operation becomes extremely complicated when maintenance is required. That is, when it becomes necessary to perform maintenance of the gear mechanism B, there is a problem that removal of each rotating shaft and gear or replacement of parts is extremely complicated. Further, in the configuration using the powder clutch device 30, when the rotation of the clutch plate 37 and the rotation member 38 is connected by the magnetic powder, there is a limit in the followability of the magnetic powder to the clutch operation, and thus the rotation resistance is reduced. There is a problem that unevenness is likely to occur, and there is a problem that tension unevenness is easily generated in the wire S. If the tension unevenness of the wire S appears to occur, there is a problem that the cut portion of the workpiece 1 tends to undulate when the workpiece 1 becomes small.

Next, when cutting is being continued, there may be a case where the abrasive fluid is not sufficiently supplied to the contact portion between the workpiece 1 and the wire S. FIG. 14 shows a wire line S
Shows a state in which the workpiece 1 is being cut. In this state, tension is applied to the wire S, but since the wire S is pressed against the workpiece 1, the wire S is slightly upward. The workpiece 1 comes into contact with the workpiece 1 while being curved, and the processing proceeds in this state. Here, when the abrasive fluid is supplied from around the workpiece 1, the abrasive fluid easily penetrates to the inlet side of the cutting groove 1a of the workpiece 1, but easily enters the bottom 1b side of the cutting groove 1a. It becomes impossible to penetrate, and in some cases, the cutting proceeds without the abrasive liquid being supplied to the bottom 1b of the cutting groove 1a, and in some cases, the wire S may be disconnected.

In order to solve such a problem, an operation of separating the wire S from the bottom 1b of the cutting groove 1a of the workpiece 1 is performed at predetermined time intervals as the slice cutting process proceeds. In order to perform this operation, the intermittent up-down mechanism E shown in FIG. 7 is operated. When the lower support piece 98 is lowered by extending the piston rod 99 of the pressing device 90 of the intermittent raising and lowering mechanism E, and the table 2 is lowered by a minute distance by the pressing member 100, the wire S shown in FIG. 14 is shown in FIG. As described above, the abrasive fluid can be raised and separated from the bottom 1b of the cutting groove 1a so as not to protrude from the cutting groove 1a, so that the abrasive liquid is supplied to the bottom 1b of the cutting groove 1a from the gap 140 formed in the separated portion. can do. Since the supply of the abrasive liquid to the bottom 1b can be performed instantaneously, the operation of lowering the table 2 by operating the intermittent up-down mechanism E may be performed at predetermined intervals for a short time. With such an operation, it is possible to prevent the wire S from breaking due to the inability to supply the abrasive liquid. In addition, as the cutting progresses, the cutting groove 1 of the workpiece 1
In FIG. 5A, processing waste and processing sludge are generated on the wire S, and this is going to accumulate. However, the wire wire S is pulled up by the intermittent up-down mechanism E, and these are lifted by the wire S. When it is lifted, the abrasive fluid sprayed on the workpiece 1 and flowing on the surface of the workpiece 1 rinses them away, so that machining chips and machining sludge can be easily removed from the cutting groove 1a.

Next, the amount of downward pivotal movement of the lower support piece 98 can be easily adjusted by finely adjusting the amount of vertical movement of the piston rod 99 of the pressing device 92, and the descending distance of the table 2 is adjusted accordingly. Since the wire S can be adjusted, the wire S can be easily raised by a necessary amount so as not to come out of the cutting groove 1a. Accordingly, the wire S can be reliably separated from the bottom 1b of the cutting groove 1a without taking the wire S out of the cutting groove 1a.
There is an effect that the wire line S can be moved up and down without damaging the peripheral portion of a. Instead of the above-described configuration, the supporting portions of the support rollers 6, 6, 6 are configured to be swingable, and the support rollers 6, 6, 6 are swung by a slight angle with respect to the workpiece 1. Although the wire S can be configured to be able to be separated from the workpiece 1 in this manner,
When the wire S coming out of the fine cutting groove 1a enters the cutting groove 1a again, it may collide with the periphery of the opening of the cutting groove 1a. There is a possibility that it will be done. Therefore, it is important to provide the vertical intermittent moving mechanism E as in the above-described structure so that the wire S is slightly raised inside the cutting groove 1a.

The above-mentioned slice cutting is continued,
The workpiece 1 is cut by the wire S. When the wire S reaches the fixing jig 135 supporting the workpiece 1, the slice cutting is completed. Fixing jig 1 after processing
By removing the fixing jig 135 from the support jig 75 and immersing the fixing jig 135 and the workpiece 1 in an adhesive dissolving solution to dissolve the adhesive, a large number of magnetic heads H shown in FIG. Can be obtained at the same time.

[0037]

【Example】

Example 1 A test was conducted on the occurrence of undulation when a bar-shaped ferrite workpiece was sliced and cut using a wire saw device having the configuration shown in FIG. The support roll is made of ultra-high-molecular-weight polyethylene and has an outer diameter of 60 mm and a length of 5 mm.
One having 0 mm and 130 peripheral grooves was used. As the wire, a piano wire having a diameter of 0.134 mm was used, and the wire was wound around support rolls in two turns each having a length of 15 mm over 50 turns. The abrasive used was # 6000
Was dispersed in oil, and a cutting oil was added thereto and supplied from above the workpiece. In this apparatus, a wire gear is cut by cutting a forty workpiece by applying tension to the wire using a conventional gear device B shown in FIG. 24, and a wire is formed using a tension generating mechanism D shown in FIG. FIG. 16 shows the result of obtaining a variation in tension when 40 workpieces were cut by applying tension to the workpiece. In addition, in order to generate tension in the wire, the rotation speed difference between the rotation shafts 25 and 26 of the gear device B shown in FIG.
Was set at 1.2: 1.

The tension fluctuation value is measured by using a tension meter to measure the resistance value when the rotating shaft 25 of the gear device B is fixed and the rotating shaft 26 is rotated.
Was fixed, and the resistance value when rotating the rotating shaft 52 was measured with a tension meter. As shown in FIG. 16, when the conventional gear device was used, a large tension variation (about 800 g) occurred before and after machining, whereas when the tension generating mechanism D was used, before and after machining. It was found that no large fluctuation in tension occurred in the sample (a fluctuation of about 100 g). That is, in the device using the conventional gear mechanism, the tension decreases with the progress of the processing, so that a stable tension cannot be applied from the beginning to the end of the processing, whereas the tension generating mechanism D according to the present invention uses the tension generating mechanism D to perform the processing. It is clear that the slice cutting can be performed while applying a substantially constant tension from the beginning to the end.

[Embodiment 2] Next, in the case where a magnetic head H having the shape shown in FIG. 17 is obtained from the rod-shaped workpiece 1 by slicing, the relationship between the undulation and the tension of the wire wire, the undulation and the grinding Measure the relationship between grain size, the relationship between swell and abrasive grain viscosity, the relationship between swell and load (press load by wire), the relationship between swell and wire wire sending speed, and the relationship between swell and number of reciprocating wires. The results are shown in FIGS. FIG.
From the results shown in (F), it was found that the influence on the undulation was large in the wire wire tension and the size of the abrasive grains. However, the abrasive grain size is a parameter that cannot be freely selected when manufacturing a magnetic head, and there is a limitation that abrasive grains having a size almost fixed according to the material of the magnetic head to be cut must be used. Therefore, it became clear that slicing using the tension generating mechanism D used in Example 1 was extremely important in order to manufacture a magnetic head with little undulation and high dimensional accuracy.

Example 3 Next, an experiment was conducted to verify the effect of the intermittent vertical movement mechanism E when the workpiece 1 is slice-cut. Use a single-crystal ferrite bar as the workpiece, use a polycrystalline ferrite block as the fixing jig, bond them together with a high-hardness instant adhesive, and integrate them with the single-crystal ferrite. When performing slice cutting from the bar to the surface of the fixing jig, the work is lowered for an instant of 0.2 mm at intervals of 1 minute and then returned (0.2 ATF)
When the intermittent vertical movement mechanism E is operated under the condition of (1), the intermittent vertical movement mechanism E is operated under the condition of the operation (0.4 ATF) of lowering and returning the workpiece by 0.4 mm for one minute at intervals of one minute. FIG. 19 shows the result of obtaining the relationship between the cutting position and the processing time when the intermittent vertical movement mechanism E is not used and when the intermittent vertical movement mechanism E is not used.

When the intermittent vertical movement mechanism E is operated under the conditions of 0.2 ATF or 0.4 ATF and the slice cutting is performed, and when the slice cutting is performed without being operated, the workpiece made of single crystal ferrite is used. There is almost no difference until the cutting itself is completed (parts P to Q in FIG. 19), but the slice cutting processing exceeds the adhesive part (R part in FIG. 19), and When both of them reach the slice cutting portion (T portion in FIG. 19), a difference occurs between them, and the intermittent vertical movement mechanism E
It became clear that more cutting was possible when actuated. Therefore, it was revealed that the slice cutting can be performed at a higher cutting speed by operating the intermittent vertical movement mechanism E.

[Embodiment 4] By providing the idler mechanism according to the present invention to form two wire wire winding portions separated from the support roll, and consequently reducing the number of wire wires wound around the support roller. The effect was tested. The same support roller as used in Example 1 was wound 130 times over the entire length, and 5
A total of 100 turns were prepared, each having 0 turns, and the amount of shaft eccentricity W (see FIG. 20), the amount of roller expansion / contraction Z, and the heat generation state during processing were measured when using the supporting rollers of each number of turns. . The results are shown in Table 1 below.

[0043]

[Table 1]

As is apparent from the results shown in Table 1, 1
The use of a 100-roll support roller reduces the amount of eccentricity of the roller shaft by 1 in comparison with the use of a 30-roll support roller.
伸縮, and the roller expansion / contraction amount is reduced to 1/6
It has been found that the heat generation can be reduced to about 1/7, and the heat generated during processing can be significantly reduced. The characteristics that can be greatly improved in this way are that the number of windings of the wire wire around the support roller has been reduced to reduce the winding pressure applied to the support roller, and that cutting has been performed when slicing the workpiece. This is considered to be a synergistic effect of eliminating wire wires that do not contribute to the above. In addition, if the number of windings increases and the shaft of the supporting roller bends, the rotational resistance increases, and heat is thereby generated. As a result, it is expected that the processing heat will increase. It seems that reducing the number is effective.

Fifth Embodiment The cut surface roughness of a magnetic head obtained from a workpiece by slice cutting using a support roller having 100 turns in the fourth embodiment is compared with that in the fourth embodiment for comparison. FIG. 21 shows the results obtained by measuring the cut surface roughness of the magnetic head obtained by using the 130-roll support roller used in Example 1 and determining the variation in surface roughness for each lot. In the bar graph of FIG. 21, one bar indicates the variation of 10 samples. As is clear from the results shown in FIG. 21, by adopting the configuration using the support roller having a small number of windings, the variation in the surface roughness of the cut surface can be reduced from the conventional range of 5 to 13 μm to the range of 1 to 5 μm. It became clear that we could do less. This is because if there are wire wires wound on the support roll that contact the work piece and those that do not touch the work piece, loosening occurs between the wire wire that touches the work piece and the wire wire that does not touch the work piece. Then, the contact state of the wire wire with the workpiece is partially changed, which is considered to be due to the fact that the unevenness of the cut surface increases due to this. If the variation in surface roughness is in the range of 5 to 13 μm, the surface accuracy required for the magnetic head is insufficient. Therefore, it is necessary to further apply lapping and finish the cut surface before sending to the next step. However, if the variation has an accuracy of 1 to 5 μm, it can be sent to the next step without performing such a lapping process, so that the lapping process can be omitted.

[0046]

As described above, the wire saw of the present invention is used.
According to the device , the table is supported so as to be vertically movable, and a pulling device that constantly urges the table upward is provided on one side of the table, and a pressing member that prevents the table from being raised on the other side of the table. Since an intermittent vertical movement mechanism for temporarily urging the pressing member downward and temporarily lowering the table via the pressing member is provided, the wire is pressed against the workpiece to supply abrasive grains. In the state of slice cutting, the wire can be temporarily separated from the bottom of the cutting groove, and at the time of this separation, the abrasive grains are formed by forming a gap between the wire and the bottom of the cutting groove. The contained abrasive fluid can be reliably supplied to the bottom of the cutting groove. Therefore, by performing cutting while performing such wire wire separation work, slice cutting can be performed without causing a phenomenon that abrasive grains cannot be supplied between the wire and the bottom of the cutting groove. There is an effect that the slice cutting can be performed at a higher speed while preventing. Further, since the cutting chips accumulated around the wire line can be removed from the cutting groove by pulling up the wire line, the slice cutting can be performed without causing cutting defects due to clogging of the cutting chips. Further, the wire saw device of the present invention is provided with
In the moving mechanism, the pin is connected to the base and
The support piece provided at the time, the said attached to the base portion,
And a pressing device for rotating the support piece downward.
And the table can be pushed down by the support
Adopted, fine adjustment of the amount of downward movement of the support piece
The descent distance of the wire can be finely adjusted.
It can be easily lifted by the necessary amount so that it does not come out
it can. This allows the wire to exit the cutting groove
Ensure that the wire is separated from the bottom of the cutting groove
The wire without damaging the periphery of the cutting groove.
There is an effect that the line can be moved up and down.

According to the cutting method of the present invention,
While performing wire wire separation using a yasaw device
By cutting, the grinding between the wire and the bottom of the cutting groove
Without causing the phenomenon that the particles cannot be supplied.
The chair can be cut, preventing damage to the wire.
There is an effect that the slice cutting can be performed at a higher speed. Ma
The wire around the wire by pulling it up
Since the accumulated cuttings can be removed from the cutting groove,
Slice cutting without causing cutting failure due to clogging
Can be cut. Further, the wire saw device having the above configuration is used.
Operation by fine adjustment of the amount of downward rotation of the support piece
Fine adjustment of table lowering distance via rod
It is necessary to keep the wire from coming out of the cutting groove
Lift the wire up and out of the groove.
Ensure that the wire is separated from the bottom of the cutting groove
The wire without damaging the periphery of the cutting groove.
There is an effect that the line can be moved up and down.

[Brief description of the drawings]

FIG. 1 is a configuration diagram illustrating an example of a wire saw device according to the present invention.

FIG. 2 is a sectional view showing a tension generating mechanism provided in the wire saw device shown in FIG.

FIG. 3 is a sectional view showing an example of a magnetic torque clutch mechanism incorporated in the tension generating mechanism shown in FIG.

FIG. 4 is a perspective view of a permanent magnet member provided in the magnetic torque clutch mechanism shown in FIG.

FIG. 5 is an explanatory diagram showing an example of the direction of lines of magnetic force generated from the permanent magnet member shown in FIG.

FIG. 6 is an explanatory diagram showing an example of the direction of lines of magnetic force generated from the permanent magnet member shown in FIG.

FIG. 7 is a configuration diagram showing an example of an intermittent vertical movement mechanism provided in the wire saw device shown in FIG.

FIG. 8 is a perspective view of a table portion provided in the wire saw device provided in FIG. 1;

FIG. 9 is a side view showing a support roller and an idler mechanism provided in the wire saw device provided in FIG. 1;

10 is a perspective view showing an example of a workpiece to be slice-cut by the wire saw device shown in FIG. 1;

11 is a perspective view showing a state where the workpiece shown in FIG. 10 is fixed to a fixing jig.

12 is a plan view showing an example of a magnetic head obtained from the workpiece shown in FIG.

FIG. 13 is an explanatory diagram showing a relative positional relationship between a workpiece, a fixing jig, and a wire.

FIG. 14 is a perspective view showing a state where a wire is slice-cut on a workpiece.

FIG. 15 is a perspective view showing a state in which a wire is lifted in a state where a workpiece is being slice-cut.

FIG. 16 is a view showing the results of measuring the tension fluctuation before and after processing in the conventional apparatus and the apparatus of the present invention.

17 (A) is a side view of a magnetic head slice-cut from a workpiece, and FIG. 17 (B) is a diagram showing the amount of undulation of the magnetic head.

18A is a diagram showing the relationship between the amount of undulation and the wire linear tension, FIG. 18B is a diagram showing the relationship between the amount of undulation and the size of the abrasive grains of the abrasive fluid, and FIG. FIG. 18 (D) is a diagram showing the relationship between the amount and the abrasive viscosity of the abrasive fluid, FIG. 18 (D) is a diagram showing the relationship between the swell amount and the load (the pressing load of the wire wire against the workpiece), and FIG. FIG. 18F is a diagram showing the relationship between the wire line feed speed and FIG. 18F is a diagram showing the relationship between the swell amount and the rotational speed of the drive.

FIG. 19 is a diagram showing a relationship between a cutting position and a descent time when a workpiece is slice-cut using an apparatus according to the present invention and a conventional apparatus.

FIG. 20 is a diagram for explaining the amount of bending and the amount of expansion and contraction of a support roller.

FIG. 21 is obtained when a workpiece is sliced by using a device in which a wire is wound over the entire length of a support roller and a device in which two winding portions are formed on the support roller and the number of windings is reduced. FIG. 4 is a diagram showing a distribution of surface roughness of a cut surface of a magnetic head that has been cut.

FIG. 22 is a configuration diagram illustrating an example of a conventional wire saw device.

FIG. 23 is a diagram showing a state in which a workpiece is being sliced by a conventional wire saw device.

FIG. 24 is a sectional view showing a gear device used in a conventional wire saw device.

FIG. 25 (A) is an enlarged perspective view showing a state in which a workpiece is being cut by a wire, and FIG. 25 (B) is a view showing a relationship between a wire in a cutting groove and abrasive grains. .

[Description of Signs] C wire saw device, D tension generating mechanism, E intermittent vertical movement mechanism, F idler mechanism, G magnetic torque clutch mechanism, S wire wire, 1 workpiece, 1a cutting groove, 1b bottom, 2 table, 5 Control panel , 6 support rollers, 7, 8, 9 guide rollers, 10, 11, 12 guide rollers, 13, 14, 15, 16 guide rollers, 17 supply rolls, 20 take-up rolls, 71 operating rod, 72 pressing device, 73 lifting device, 81 pulling wire, 85 heavy weight member, 90 pressing block, 92 pressing device, 95 base, 97 rotating pin, 98 lower support piece, 100 pressing member, 105 micrometers.

Continuation of the front page (56) References JP-A-1-306169 (JP, A) JP-A-54-139189 (JP, A) JP-A-62-68267 (JP, A) JP-A-49-112287 (JP, A) , A) Japanese Utility Model 62-11556 (JP, U) (58) Fields investigated (Int. Cl. ⁷ , DB name) B28D 5/04 B24B 27/06

Claims (2)

(57) [Claims] A table for holding a workpiece, a plurality of support rollers provided above the table so as to face the workpiece, a control panel erected on one side of the table, A plurality of guide rollers provided on the control panel, a supply mechanism for supplying a wire wire to the guide rollers of the control panel, and a wire wound around the plurality of support rollers via the guide rollers of the control panel A winding mechanism for winding the wire through another guide roller of the control panel, wherein the workpiece and a plurality of support rollers are configured to be able to approach and separate from each other, and a plurality of support rollers are provided. A wire saw device for slicing a workpiece by pressing a wire wound around the table on a workpiece, wherein the table is supported so as to be vertically movable, and a table is always attached to one side of the table upward. Lifting device A pressing member attached to the other side of the table to prevent the table from rising, and an intermittent vertical movement for temporarily urging the pressing member downward to temporarily lower the table via the pressing member mechanism Ri is Na is attached, the intermittent vertical movement mechanism, provided to be movable up and down based on
The base and this base are pin-coupled to allow up and down pivoting
The support piece provided, and the support attached to the base portion.
A push device for pivoting the piece downward,
The table extends below the support piece and extends below the support piece.
The operation rod that is pushed down by turning to
Wire saw apparatus characterized by comprising. 2. A table for holding a workpiece, and a table.
A plurality of supports provided above the
Holding roller and a control panel erected on one side of the table
A plurality of guide rollers provided in the control panel,
Feeder for feeding wire wire to guide rollers of control panel
And the plurality of supports via guide rollers of the control panel.
The wire wound around the roller is connected to another guide rod of the control panel.
And a winding mechanism for winding through a roller
The workpiece and the plurality of support rollers can be approached and separated freely
And the wire wound around the support rollers
Slice the workpiece by pressing it against the workpiece
A wire saw device, wherein the table is supported movably up and down, and the table
A pulling device that always urges the table upward is attached to one side
While it is, of the tables on the other side of the table
Pressing member that prevents ascent and temporarily
To lower the table temporarily via the pressing member
An intermittent up-down movement mechanism is provided, and the intermittent up-down movement mechanism is
The base and this base are pin-coupled to allow up and down pivoting
The support piece provided, and the support attached to the base portion.
A push device for pivoting the piece downward,
The table extends below the support piece and extends below the support piece.
The operation rod that is pushed down by turning to
A method of cutting a workpiece by raising a table, pressing a wire wound around a plurality of support rollers against the workpiece, and supplying an abrasive fluid, using a wire saw device. During cutting, the table is temporarily lowered to release the contact between the workpiece and the wire, and a gap is formed between the bottom of the cutting groove formed on the workpiece and the wire. A method of cutting a workpiece using a wire saw device, wherein an abrasive liquid is introduced from the gap into the groove bottom of the cutting groove.