JP3246396B2 - Stage equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a high-precision positioning stage. More specifically, the present invention relates to a highly accurate positioning stage. The present invention relates to a stage device provided with a means for temporarily fixing a moving stage to a stage base in order to prevent the movement.

[0002]

2. Description of the Related Art Exposure apparatuses are used for producing semiconductors, printed circuit boards, and liquid crystal screens. In the above-described exposure apparatus, alignment is performed before exposure using an alignment mark written on a mask and a work. However, in order to improve exposure accuracy, it is necessary to increase alignment accuracy.
For this reason, a moving stage for holding and positioning a work / mask is required to have a high positioning accuracy of about 0.1 μm. One of the factors that lowers the positioning accuracy of the moving stage is that when the moving stage is positioned and stopped by the drive unit, vibration applied from the outside through the drive unit, instability of the control system of the drive unit, ball screw of the drive unit, etc. The displacement of the position of the moving stage may be raised due to thermal expansion of the mechanical element.

[0003] In order to solve the above-mentioned problem, this type of stage device usually includes a moving stage,
Means for fixing the moving stage to a stage base (a base on which the moving stage is mounted) is provided. 9A and 9B are views showing an example of a conventional stage device provided with the fixing means. FIG. 9A is a top view of the stage device, and FIG. 9B is a sectional view taken along line AA in FIG. (C) is an enlarged view of a portion surrounded by a dotted line in (b). In the figure, reference numeral 100 denotes a moving stage (hereinafter, referred to as a stage), and a stage 100 includes a stage base 101.
It is mounted so as to be movable via a movement guide 103, and is driven in an XYθ direction (X is a direction parallel to the stage surface, Y is a direction parallel to the stage surface and orthogonal to X, and θ is an XY plane by the drive unit 102). (Rotation about orthogonal axes).

A fixing means 104 is shown in FIG.
As shown in (c), the stage 100 includes a suction member 104a attached to the stage base 101 via a leaf spring 104b. The suction member 104a faces the member to be sucked 100a provided on the back surface of the stage 100, Slightly spaced. Further, the suction member 104a is provided with a concave portion 104c, and the concave portion 104c communicates with the evacuation unit via the through hole 104d and the conduit 104e. In the drawing, after the moving stage 100 is positioned by the driving unit 102, the pipeline 104e and the through hole 104d are evacuated by the vacuum exhaust means.
The pressure of the concave portion 104c of the suction member 104a is reduced to a negative pressure through. Thereby, the attraction member 104a attached by the leaf spring 104b moves upward while deforming the leaf spring 104b, and the attraction member 100 on the back surface of the stage 100 is moved.
Adsorb to a. As a result, the stage 100 is fixed so as not to move.

[0005]

In the conventional stage apparatus described above, after positioning the stage 100, the stage 10
0 can be fixed, but has the following drawbacks because the stage 100 is directly connected to the drive unit 102. (1) The vibration applied from the outside of the stage device is
The signal is transmitted to the directly connected stage 100 via the element 02. Depending on the strength of the vibration, a large suction force is required to fix and hold the stage 100.

(2) As the stage device has a higher positioning accuracy, the drive transmission mechanism of the drive unit 102 is provided with a small pitch ball screw, a leverage mechanism with a large reduction ratio, and the like. Fine movement is realized.
Normally, a servo motor that is feedback-controlled is used to drive such a positioning stage device. For this reason, even when the servomotor is stopped, it always vibrates by ± 1 pulse. The vibration of ± 1 pulse is applied to the driving unit 1
02 is transmitted to the stage 100 as a large force. In addition, the servomotor may vibrate minutely due to the instability of the electric circuit itself of the control system or the sensor, or disturbance to the control system (for example, electromagnetic wave, heat, etc.). Further, the driving unit 10
The thermal expansion accompanying the temperature change of the elements constituting 2 causes the stage 100 to move directly or indirectly with a large force. Considering these, an extremely large suction force is required to hold the stage fixedly.

(3) As described in the above (1) and (2), in the conventional stage device, since a large force is applied from the outside or the like through the elements of the drive unit 102, the stage 100 is fixed. Although it is necessary to increase the suction power, the suction power is limited to 1 kgf / cm ² even if the degree of vacuum is increased in a state where the suction surface is an ideal plane and there is no leak amount. Therefore, the suction area is increased, the plane area of the stage is significantly increased, the apparatus itself is enlarged, and the cost is increased. (4) When the suction force for fixing the stage 100 is increased as described in (3), the element of the driving unit 102 may receive a large reaction force and may be damaged. The present invention has been made in order to solve the above-mentioned problems of the prior art, and an object thereof is to prevent an external force from being transmitted to the stage when the stage is fixed. It is an object of the present invention to provide a stage device which prevents minute displacement of a stage due to vibration or the like and enables high-precision positioning.

[0008]

Means for Solving the Problems The above-mentioned problems are solved in the present invention as follows. A stage base, an intermediate stage arranged on the stage base and guided to be movable in a plane parallel to the stage base surface, and an intermediate stage arranged on the intermediate stage and parallel to the intermediate stage surface The intermediate stage in a stage device having a stage movably guided in a simple plane
Driving means, first fixing means for directly fixing the stage to the intermediate stage, second fixing means for directly fixing the stage to the stage base, the driving means,
And control means for controlling the second fixing means.
The stage, the stage is intermediate by the first fixing means
Fixed to the stage, and the intermediate stage
Move the stage together to position the stage.
After the completion of the positioning, the second fixing means
The stage is fixed to the stage base, and the first fixing means is used.
Control to release the fixation.

[0009] In the invention of claim 1 of the present invention, the
As in the first to fix directly the stage to the intermediate stage
Since the fixing means and the second fixing means for directly fixing the stage to the stage base were provided, the stage and the intermediate stage were fixed by the first fixing means, and the intermediate stage and the stage were moved to perform positioning. After that, the fixing of the first fixing means can be released, and the stage can be fixed to the stage base by the second fixing means.

That is, after the positioning, the stage can be separated from the intermediate stage and fixed directly to the stage base. Therefore, external vibration applied to the intermediate stage through the driving unit for driving the intermediate stage, and the motor of the driving unit The stage is not affected by vibration or thermal expansion or the like due to temperature changes of the elements constituting the drive unit. Therefore, there is no need to fix the stage with a large force, and the stage can always be stably fixed without displacement.
The positioning accuracy can be improved. In addition, the first fixing means and the second fixing means are constituted by an adsorbing member and an adsorbed member, one of which is attached via a leaf spring as in the invention of claim 3, so that it is relatively simple. Using the mechanism, the stage and the intermediate stage, and the stage and the stage base can be fixed without causing displacement.

[0011]

Embodiments of the present invention will be described below. (1) First Embodiment FIG. 1 is a diagram showing a configuration of a stage device according to a first embodiment of the present invention. FIG. 1A is a diagram of the stage device of the present embodiment viewed from above, and FIG. FIG. 2B is a sectional view taken along line AA of FIG. 1A and 1B, reference numeral 1 denotes a stage, 2
Denotes an intermediate stage, and 3 denotes a stage base. First movement guides 5-1, 5-2, 5-3 are provided on the stage base 3; -3, the intermediate stage 2 is movably mounted. The intermediate stage 2 is driven by the driving units 4-1, 4-2, and 4-3 in the XYθ direction (X is a direction parallel to the stage surface, Y is a direction parallel to the stage surface and orthogonal to X, and θ is orthogonal to the XY plane. (Rotation about an axis).

Further, the second movement guides 6-1, 6-2, 6-
3 is erected on the stage base 3, and the second movement guides 6-1, 6-2, 6-3 pass through openings 2 a (three places) provided in the intermediate stage 2, The stage 1 projects above the intermediate stage 2, and is movably mounted on the second movement guide 6. Also, the inner diameter of the opening 2a is set to the second movement guide 6 so that the intermediate stage 2 can move.
-1, 6-2, 6-3. That is, the stage 1 and the intermediate stage 2 respectively include the first movement guides 5-1, 5-2, 5-3 and the second movement guide 6.
-1, 6-2, and 6-3 so as to be independently movable on the stage base 3.

Reference numeral 7 denotes a first fixing means.
Is provided between the stage 1 and the intermediate stage 2,
The first fixing means 7 can fix the stage 1 and the intermediate stage 2 so as not to move relative to each other. 8 is the second
The second fixing means 8 is provided between the stage bases 3, and can be fixed by the second fixing means 8 so that the stage 1 does not move with respect to the stage base 3. The intermediate stage 2 has an opening 2b so that the intermediate stage 2 can move.
The second fixing means 8 penetrates through the opening 2b and the stage base 3
The opening 2 b is formed upright, and the inner diameter of the opening 2 b is larger than the outer diameter of the second fixing means 8.

FIG. 2 is a view showing the structure of the first and second fixing means. FIG. 2A is a view showing the structure of C surrounded by a dotted line in FIG.
FIG. 1 (b) is an enlarged view of the portion, and FIG.
A view of the back surface of the stage 1 from the BB direction, FIG.
Shows another embodiment of the fixing means. As shown in FIG. 2A, the first fixing means 7 includes a suction member 7a attached to the intermediate stage 2 and a
The suction member 7d is symmetrically attached via a leaf spring 7e, and the suction member 7a and the suction member 7d are slightly separated from each other. The suction surface of the suction member 7a and the suction surface of the suction member 7d are arranged to be parallel to the moving surface of the stage 1. A suction port 7c is formed on a suction surface of the suction member 7a, and the suction port 7c is connected to a pipe 7b.
Through a vacuum exhaust means (not shown). Further, the to-be-adsorbed member 7d is attached to the concave portion 1a provided on the back surface of the stage 1 via the two leaf springs 7e as described above. A holding plate 7f is provided on the mounting portion of the plate spring 7e, and the plate spring 7e is fixed to the stage 1 and the member 7d to be sucked together with the holding plate 7f by screws or the like.

The two leaf springs 7e are of the same shape and of the same material.
d is parallelly moved only in the vertical direction with respect to the moving surface of the stage 1 and is rotationally symmetrically mounted so as not to be displaced in the horizontal direction, so that the stage 1 and the intermediate stage 2 can be fixed without causing displacement. it can. It is desirable to use a material having a large mutual friction coefficient as the material of the attracting member 7a and the attracted member 7d.
Stainless steel can be used as the member 7d to be attracted. 2 (a) and 2 (b) show the case where the to-be-adsorbed member 7d is attached by two leaf springs 7e, but one leaf spring is used and both ends of one leaf spring are attached to the back surface of the stage 1. May be attached to both sides of the recessed portion 1a provided in the plate spring, and the to-be-sucked member 7d may be attached to the center of the leaf spring. In this case, since there are two portions acting as leaf springs, it is functionally equivalent to two leaf springs. FIG. 2 (c)
As shown in the figure, the surface to be sucked of the member to be sucked 7d and the leaf spring 7e
May be attached so that the surfaces are substantially coplanar. With such a configuration, even if the member 7d to be sucked is inclined at the time of suction, the surface of the stage 1 is not compared with the case where the surface of the plate spring 7e is not the same as the surface to be sucked shown in FIG. The amount of displacement can be reduced. Second fixing means 8
The configuration is the same as that of the first fixing means 7 except that the suction member 8a is attached to the stage base 3. Then, as shown in FIG. 2 (b), the first and second fixing means 7, 8 d are attached to the suction members 7 d, 8 d in the concave portions 1 a, 1 a ′ provided on the back surface of the stage 1. 8e.

In FIG. 1, for example, when the intermediate stage 2 and the stage 1 are fixed by the first fixing means 7,
The suction port 7c of the suction member 7a is set to a negative pressure through a pipe 7b by a vacuum exhaust means (not shown). Thus, the attracted member 7d attached to the back surface of the stage 1 by the leaf spring 7e moves downward while deforming the leaf spring 7e, and is attracted to the attracting member 7a. As a result, the stage 1 and the intermediate stage 2 are fixed so as not to move mutually. Second
When the stage 1 is fixed to the stage base 3 by the fixing means 8, the same operation as described above is performed.

FIG. 3 is a diagram showing an example of the configuration of a control system of the stage device of this embodiment. In the figure, reference numeral 10 denotes a stage device of the present embodiment, and a pipe 7b of the first fixing means 7 is connected to a pump 12 which is a vacuum exhaust means via a pipe 15a and an on-off valve 14a. Branch pipe 15
The leak valve 13a is connected to b. The pipe 8b of the second fixing means 8 is connected to the pump 12 via a pipe 16a and an on-off valve 14b, and a leak valve 13b is connected to a pipe 16b branched from the pipe 16a. Reference numeral 11 denotes a control device, and a drive unit 4-
1, 4-2 and 4-3 are driven, and the leak valve 1
3a, 13b and on-off valves 14a, 14b are controlled.

Next, the positioning operation of the stage device of this embodiment will be described with reference to FIG. (a) The controller 11 closes the leak valve 13a, opens the on-off valve 14a, supplies a negative pressure to the first fixing means 7, and suction-fixes the stage 1 and the intermediate stage 2. (b) When the stage 1 is suction-fixed to the stage base 3 by the second fixing means, the on-off valve 14b is closed and the leak valve 13b is opened to release the suction, and the control device 11 releases the driving unit 4 By driving -1, 4-2 and 4-3, the intermediate stage 2 is moved in a plane. Since the stage 1 is fixed to the intermediate stage 2 by suction, the stage 1 moves together with the intermediate stage 2. The stage 1 is moved by moving the intermediate stage 2 as described above, and the stage 1 is positioned.

(C) After the predetermined positioning is completed, the control device 11
With this, the leak valve 13b is closed and the on-off valve 14
b is opened, a negative pressure is supplied to the second fixing means 8, and the stage 1 is suction-fixed to the stage base 3. (d) The on-off valve 14a is closed and the leak valve 13a is opened to release the suction and fixing by the first fixing means 7.

As described above, in this embodiment, the intermediate stage 2, the first fixing means 7 for adsorbing and fixing the intermediate stage 2 and the stage 1, and the second fixing means 8 for fixing the stage 1 to the stage base 3. After the intermediate stage 2 and the stage 1 are suction-fixed by the first fixing means 7 and the intermediate stage 2 is driven by the driving means 4-1, 4-2, and 4-3 to position the stage 1, The stage 1 is fixed to the stage base 3 by the second fixing means 8, and the suction fixing of the intermediate stage 2 and the stage 1 by the first fixing means 7 is released.
The stage 1 is not affected by external vibration applied to the motor, vibration of the motor of the driving unit 4, and thermal expansion due to a temperature change of the elements constituting the driving units 4-1, 4-2, and 4-3. . For this reason, there is no need to fix the stage 1 with a large suction force, and the stage 1 can always be stably fixed without displacement.

(2) Embodiment 2 In a stage for holding a mask used in an exposure apparatus or the like, a window for transmitting exposure light through the mask is provided at the center of the stage. This embodiment shows an embodiment suitable for application to a stage having the above window. 4 and 5 are views showing the configuration of the stage device of the present embodiment. FIG. 4 is a view seen from above, FIG. 5B is a cross-sectional view taken along line AA of FIG. b) is a BB cross-sectional view.

4 and 5, reference numeral 1 denotes a stage, 2 denotes an intermediate stage, and 3 denotes a stage base.
Windows 1w, 2w, and 3w for transmitting the exposure light are provided at the center of the intermediate stage 2 and the stage base 3, and mask holding means such as vacuum suction means is provided on the back side of the stage 1. . On the stage base 3, first movement guides 5-1, 5-2 and 5-3 are provided.
The intermediate stage 2 is movably mounted via 1, 5-2, and 5-3, and the intermediate stage 2 is
Driven in the XYθ direction by 1, 4-2 and 4-3.

Further, the second movement guides 6-1, 6-2, 6-
3 is erected on the stage base 3, and the second movement guides 6-1, 6-2, 6-3 pass through openings 2 a (three places) provided in the intermediate stage 2, The stage 1 projects above the intermediate stage 2, and is movably mounted on the second movement guide 6. Also, the inner diameter of the opening 2a is set to the second movement guide 6 so that the intermediate stage 2 can move.
Is formed to be larger than the outer diameter. That is, similarly to the first embodiment, the stage 1 and the intermediate stage 2 are attached so as to be independently movable on the stage base 3 by the first moving guide 5 and the second moving guide 6, respectively. I have.

Reference numerals 7-1, 7-2, and 7-3 denote first fixing means, and the first fixing means 7-1, 7-2, and 7-3 are provided between the stage 1 and the intermediate stage 2. Thus, the stage 1 and the intermediate stage 2 can be fixed by the first fixing means 7-1, 7-2, 7-3 so as not to move mutually. 8-1, 8-2, 8-3 are second fixing means, and the second fixing means 8-1, 8-2, 8-3 are provided between the stage 1 and the stage base 3, The stage 1 can be fixed so as not to move with respect to the stage base 3 by the second fixing means 8. An opening 2b is provided in the intermediate stage 2 so that the intermediate stage 2 can move, and the second fixing means 8 is erected on the stage base 3 through the opening 2b. The inner diameter of the opening 2 b is formed larger than the outer diameter of the second fixing means 8.

The first fixing means 7-1, 7-2,
7-3, the second fixing means 8-1, 8-2, 8-3 have the same configuration as the first and second fixing means of the first embodiment, respectively, and as described above, the evacuation means The first and second fixing means 7-1, 7-2, 7-3, 8-1, 8-2,
By supplying a negative pressure to 8-3, the stage 1 and the intermediate stage 2, and the stage 1 and the stage base 3 can be fixed by suction.

The positioning operation of the stage device of the present embodiment is performed as follows, as in the first embodiment. (a) A negative pressure is supplied to the first fixing means 7-1, 7-2, 7-3 to fix the stage 1 and the intermediate stage 2 by suction. (b) Stage 1 is the second fixing means 8-1, 8-2, 8-3
When the stage is fixed to the stage base 3 by suction,
The suction is released, and the stage 1 is moved and the stage 1 is positioned by moving the intermediate stage 2 by the driving units 4-1, 4-2, and 4-3. (c) After the predetermined positioning is completed, the second fixing means 8-1, 8-
The stage 1 is suction-fixed to the stage base 3 by supplying a negative pressure to 2, 8-3, and then the first fixing means 7-1, 7-
The adsorption fixation by 2,7-3 is released.

As described above, in the present embodiment, in the stage apparatus having the window for transmitting the exposure light,
Fixing means 7-1, 7-2, 7-3, second fixing means 8-
1, 8-2, 8-3 are arranged around the window, and the intermediate stage 2 and the stage 1 are suction-fixed by the first fixing means 7-1, 7-2, 7-3. Drive means 4
After positioning the stage 1 by driving the
The stage 1 is fixed to the stage base 3 by the fixing means 8-1, 8-2, 8-3, and the first fixing means 7-1, 7-2,
Since the suction fixation of the intermediate stage 2 and the stage 1 by 7-3 is released, similarly to the first embodiment, from the outside which is applied to the intermediate stage 2 through the driving units 4-1, 4-2, and 4-3. The stage 1 is not affected by the vibration of the motors of the drive units 4-1, 4-2, and 4-3, the thermal expansion, etc. due to the temperature change of the elements constituting the drive unit 4. For this reason, there is no need to fix the stage 1 with a large suction force, and the stage 1 can always be stably fixed without displacement. Also, the first fixing means 7-1, 7-2, 7-
3. Since a plurality of second fixing means 8-1, 8-2, 8-3 are provided, the stage can be reliably fixed even when a large moment force that rotates the stage 1 is applied. .

(3) Embodiment 3 This embodiment shows an embodiment in which the present invention is applied to a multistage stage device in which a rotary stage is installed on a stage moving in the X and Y directions. 6 and 7 are views showing the configuration of the stage device of the present embodiment. FIG. 6 is a view seen from above, FIG. 7A is a cross-sectional view taken along the line AA of FIG.
(B) is BB sectional drawing. 6 and 7, 1
Is a stage, 2 'is an intermediate rotation stage, 2 is an intermediate stage, 3 is a stage base, and on the stage base 3,
First movement guides 5-1, 5-2, 5-3 are provided,
The intermediate stage 2 is movably mounted via movement guides 5-1, 5-2, and 5-3, and the intermediate stage 2 is provided with driving units 4-1 and 4-2 mounted on a stage base 3.
Is driven in the X and Y directions.

The intermediate stage 2 has a rotation guide 9-.
1, 9-2, 9-3 are provided, and the rotation guide 9-
The intermediate rotary stage 2 'is rotatably supported by 1, 9-2, and 9-3. The intermediate rotating stage 2 ′ is rotationally driven by a driving unit 4-3 attached to the intermediate stage 2. Further, the second movement guides 6-1, 6-2, 6-
3 is erected on the stage base 3, and the second movement guides 6-1, 6-2, 6-3 are provided with openings 2 a, 2 a ′ provided in the intermediate stage 2 and the intermediate rotary stage 2 ′ ( 3 places)
, Protrudes above the intermediate rotary stage 2 ′, and the stage 1 is movably mounted on the second moving guides 6-1, 6-2, 6-3. Also, intermediate stage 2,
The opening 2 is provided so that the intermediate rotary stage 2 ′ can move.
The inner diameters of a and 2a 'are the second moving guides 6-1, 6-2, 6-
3 is formed larger than the outer diameter.

That is, the stage 1 and the intermediate stage 2 can be independently moved on the stage base 3, respectively.
The intermediate rotary stage 2 'is configured to be rotatable on the intermediate stage 2, and by driving the driving units 4-1 and 4-2, the intermediate rotary stage 2' is moved in the XY directions together with the intermediate stage 2. The driving unit 4-
By driving 3, the intermediate rotating stage 2 ′ can be rotated with respect to the intermediate stage 2.

Reference numeral 7 denotes a first fixing means.
Is provided between the stage 1 and the intermediate rotary stage 2 ′, and can be fixed by the first fixing means 7 so that the stage 1 and the intermediate rotary stage 2 ′ do not move mutually. Reference numeral 8 denotes a second fixing means. The second fixing means 8 is provided between the stage 1 and the stage base 3. The second fixing means 8 prevents the stage 1 from moving with respect to the stage base 3. Can be fixed. The intermediate stage 2 and the intermediate rotary stage 2 'are provided with openings 2b and 2b so that the intermediate stage 2 and the intermediate rotary stage 2' can move.
2b 'is provided, and the second fixing means 8
The openings 2b and 2b 'are formed upright on the stage base 3 so as to penetrate through the openings 2b and 2b'. The first fixing means 7 and the second fixing means 8 of the present embodiment have the same configuration as the first and second fixing means of the first embodiment, respectively. By supplying a negative pressure to the second fixing means 7 and 8, the stage 1 and the intermediate rotating stage 2 ', and the stage 1 and the stage base 3 can be fixed by suction.

The positioning operation of the stage device of the present embodiment is performed as follows. (a) By supplying a negative pressure to the first fixing means 7, the stage 1 and the intermediate rotary stage 2 'are fixed by suction. (b) The stage 1 is moved to the stage base 3 by the second fixing means 8.
Is fixed to the stage 1, the stage 1 is moved by moving the intermediate stage 2 and the intermediate rotary stage 2 'in a plane by the driving units 4-1 and 4-2. Is performed in the X and Y directions. (c) The driving unit 4-3 is driven to rotate the intermediate rotary stage 2 ′ by a predetermined amount, thereby rotating the stage 1 and positioning the stage 1 in the θ direction. (d) After completion of the predetermined positioning, a negative pressure is supplied to the second fixing means 8 to fix the stage 1 to the stage base 3 by suction, and then the suction fixing by the first fixing means 7 is released.

As described above, in the present embodiment, the intermediate stage 2 movably mounted on the stage base 3 and the intermediate rotary stage 2 rotating on the intermediate stage 2
a ′, and a stage 1 arranged on the intermediate rotary stage 2a ′ and configured to be movable with respect to the stage base 3, and the intermediate rotary stage 2 ′ and the stage 1 can be suction-fixed by the first fixing means 7. So that the second fixing means 8 is provided between the stage base 3 and the final stage 1.
Is provided, and the stage 1 can be suction-fixed to the stage base 3 by the second fixing means 8. Therefore, in a multistage stage device in which a rotary stage is installed, vibrations applied from the outside, the driving units 4-1 and 4 The stage 1 can always be stably fixed without any displacement without being affected by the vibration of the motor of -2, 4-3, thermal expansion or the like due to a temperature change. Also, there is no need to attract the stage with a large force.

(4) Embodiment 4 This embodiment shows an embodiment of a stage device in which the stage 1 and the intermediate stage 2 are arranged on the same plane to make the vertical direction compact. 8A and 8B are diagrams showing the configuration of the stage device of the present embodiment. FIG. 8A is a diagram viewed from above, and FIG. 8B is a cross-sectional view taken along line AA of FIG. 8A. In FIG. 8, 1 is a stage, 2 is an intermediate stage, 3 is a stage base, and on the stage base 3,
First movement guides 5-1, 5-2, 5-3 are provided,
The intermediate stage 2 is movably mounted via movement guides 5-1, 5-2 and 5-3, and the intermediate stage 2 is provided with driving units 4-1 and 4-4 mounted on a stage base 3.
Driven in the XYθ direction by 2, 4-3. The intermediate stage 2 is provided with an opening 2c, and the stage 1 is disposed in the opening 2c. The stage 1 is moved by the second moving guides 6-1, 6-2, 6-3 to the stage base 3. Mounted movably on top. The opening 2c is formed larger than the stage 1 so that the stage 1 can move. Therefore, the stage 1 and the intermediate stage 2 can move independently on the stage base 3.

The stage 1 has a fixing means mounting member 2
0a, 20b are attached, and the fixing means attaching member 20
a, 20b and the intermediate stage 2 between the first fixing means 7-
1, 7-2, and the first fixing means 7-1, 7
By -2, the stage 1 and the intermediate stage 2 can be fixed so as not to move mutually. Stage 1
A second fixing means 8 is provided between the stage base 3 and the stage base 3, and the second fixing means 8 can fix the stage 1 so as not to move with respect to the stage base 3. The first fixing means 7-1 and 7-2 and the second fixing means 8 of this embodiment have the same configuration as those of the first and second fixing means of the first embodiment, respectively. By supplying a negative pressure to the first and second fixing means 7 and 8 from the exhaust means, the stage 1 and the intermediate stage 2 and the stage 1 and the stage base 3 can be fixed by suction.

The positioning operation of the stage device of this embodiment is the same as that of the first embodiment, and is performed as follows. (a) By supplying a negative pressure to the first fixing means 7-1 and 7-2, the stage 1 and the intermediate stage 2 are fixed by suction. (b) The stage 1 is moved to the stage base 3 by the second fixing means 8.
If the intermediate stage 2 is fixed to the intermediate stage 2 by the driving units 4-1, 4-2, and 4-3, the suction is released.
By moving the stage 1 in the Yθ direction, the stage 1 is moved and the stage 1 is positioned. (c) After the predetermined positioning is completed, a negative pressure is supplied to the second fixing means 8 to fix the stage 1 to the stage base 3 by suction, and then the suction fixing by the first fixing means 7-1 and 7-2 is performed. To release.

As described above, in this embodiment, the stage 1 is disposed in the opening 2d provided in the intermediate stage 2, and the fixing means mounting members 20a, 20a,
20b and the first fixing means 7-1, 7 between the intermediate stage 2.
-2, and the second fixing means is provided between the stage 1 and the stage base 3, as in the first embodiment.
The stage 1 can always be fixed stably without any displacement, and the vertical direction of the stage device can be made compact.

(5) Other Embodiments The above embodiment can be modified as follows. In the first to fourth embodiments, the member to be attracted is provided on the stage side,
In addition, the suction member is provided on the intermediate stage, the stage base, and the intermediate rotation stage side, but the suction member is provided on the intermediate stage, the stage base, and the intermediate rotation stage side, and the suction member is provided on the stage side. Can obtain the same effect. In the first to fourth embodiments, the member to be attracted is attached via the leaf spring. However, the same effect can be obtained by fixing the member to be attracted to the stage and attaching the attracting member via the leaf spring. . In the first to fourth embodiments, as the first and second fixing means, the suction member and the member to be sucked by the negative pressure are used. However, the first and second fixing means are not limited to the vacuum suction. For example, fixing means using magnetism or static electricity may be used. Examples 1 to 4 above
Although the first and second movement guides use ball-based movement guidance, the movement guidance may use, for example, pneumatic, hydraulic, magnetic, or the like.

In the first to fourth embodiments, the case where the to-be-adsorbed member is attached by the two leaf springs has been described. However, the leaf spring is not limited to the above-described embodiment, and when the to-be-adsorbed member is adsorbed. It is sufficient that the member to be attracted is attached so as to move parallel to the moving surface of the stage only in the vertical direction and not to be displaced in the horizontal direction. For example, the leaf spring is point-symmetric with respect to the center of the member to be sucked (or the member to be sucked),
Alternatively, the member to be attracted may be arranged symmetrically with respect to a straight line passing through the center, or the member to be attracted may be formed in a circular shape, and an annular or disk-shaped leaf spring may be used. In the above description, the case where the stage apparatus is applied to the exposure apparatus has been described. However, the stage apparatus of the present invention, in addition to the exposure apparatus, a processing machine, a measuring instrument,
It can be applied to various microscopes and the like.

[0040]

As described above, according to the present invention, a stage base, an intermediate stage disposed on the stage base and supported movably with respect to the stage base surface, and an intermediate stage disposed on the intermediate stage A stage device having a stage movably supported on a plane parallel to the intermediate stage surface, a first fixing means for directly fixing the stage to the intermediate stage, and a stage base And the second fixing means for directly fixing the
After positioning, separate the stage from the intermediate stage,
Vibration applied to the intermediate stage through a drive unit that drives the intermediate stage, which can be directly fixed to the stage base,
The stage is not affected by the instability of the control system of the drive unit or the thermal expansion of mechanical elements such as the ball screw of the drive unit.

Therefore, it is not necessary to fix the stage with a large force, and the stage can always be fixed stably without any displacement, and the positioning accuracy can be improved. Further, the first fixing means and the second fixing means are constituted by an adsorbing member and a to-be-adsorbed member. By connecting to a rotationally symmetrical leaf spring so that it moves only parallel to the surface in the vertical direction and does not displace in the horizontal direction, it uses a relatively simple mechanism and does not cause displacement. The stage and the intermediate stage and the stage and the stage base can be fixed.

[Brief description of the drawings]

FIG. 1 is a diagram showing a configuration of a stage device according to a first embodiment of the present invention.

FIG. 2 is a diagram showing a configuration of first and second fixing means in FIG. 1;

FIG. 3 is a diagram illustrating a configuration example of a control system of the stage device according to the first embodiment.

FIG. 4 is a diagram illustrating a configuration of a stage device according to a second embodiment.

FIG. 5 is a diagram illustrating a configuration of a stage device according to a second embodiment.

FIG. 6 is a diagram illustrating a configuration of a stage device according to a third embodiment.

FIG. 7 is a diagram illustrating a configuration of a stage device according to a third embodiment.

FIG. 8 is a diagram illustrating a configuration of a stage device according to a fourth embodiment.

FIG. 9 is a view showing a conventional stage device.

[Explanation of symbols]

 Reference Signs List 1 stage 1a, 1a 'recess 1w, 2w, 3w window 2' intermediate rotation stage 2 intermediate stage 2a, 2a ', 2b opening 2b, 2b', 2c opening 3 stage base 4, 4-1 to 4- 3 Drive unit 5, 5-1 to 5-3 First movement guide 6, 6-1 to 6-3 Second movement guide 7, 7-1 to 7-3 First fixing means 7a, 8a Suction member 7e, 8e Leaf spring 7d, 8d Adsorbed member 7c Suction port 7b, 8b Pipe line 7f, 8f Suppression plate 8, 8-1 to 8-3 Second fixing means 11 Controller 12 Pump 13a, 13b Leak valve 14a, 14b Open / close valve 15a , 15b Pipes 16a, 16b, 17a Pipes 20a, 20b Fixing means mounting member

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int. Cl. ⁷ , DB name) G05D 3/00-3/20 B23Q 1/00-1/30 H01L 21/68

Claims (1)

(57) [Claims] 1. A stage base, an intermediate stage disposed on the stage base, and guided movably in a plane parallel to the stage base surface; and an intermediate stage disposed on the intermediate stage. What is claimed is: 1. A stage device comprising: a stage movably guided in a plane parallel to a plane, a driving unit for driving the intermediate stage, and a first fixing unit for directly fixing the stage to the intermediate stage. A second fixing means for directly fixing the stage to a stage base ; a driving means; and a control means for controlling the first and second fixing means.
Control means, wherein the control means sets the stage to an intermediate stage by the first fixing means.
Fixed, and the stage together with the intermediate stage
The stage is moved by moving the stage, and after the positioning is completed , the stage is moved by the second fixing means.
Is fixed to the stage base and fixed by the first fixing means.
A stage device for canceling the condition.