JP3248647B2 - Wafer sheet enlarger - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wafer sheet stretching apparatus for stretching a wafer sheet to which a wafer is attached.

[0002]

2. Description of the Related Art One of semiconductor manufacturing processes is a pellet bonding process. In this step, pellets are picked up one by one from the wafer, and thereafter, the pellets are transferred to a lead frame directly or via a positioning position as necessary, and bonding is performed at a predetermined position on the lead frame. It is. The pellet bonding apparatus used for this operation includes a process of stretching a wafer sheet to which a wafer is attached, for example, Japanese Patent Application Laid-Open No. 4-6855.
There is a device equipped with a wafer sheet stretching device such as the invention described in Japanese Patent Publication No. 3 (JP-A) No. 3 (1999).

[0003]

[0004] In this wafer sheet stretching apparatus 1, as shown in FIG. 4, a press ring 3 is provided on the outer periphery of an expand ring 2 so as to be movable in the axial direction of the expand ring 2, and a wafer 4 is attached thereto. The wafer sheet 5 is placed on the end of the expand ring 2, and the wafer ring 6 holding and holding the wafer sheet 5 is pushed down by the press ring 3, and the expandable ring 2 stretches the wafer sheet 5. Wafer sheet 5
When the wafer 4 is diced, a gap is formed between a large number of pellets 7 formed by dicing the wafer 4,
Pickup is facilitated.

[0005]

However, in the above-mentioned conventional example, when the press ring 3 is pushed down, the wafer sheet 5 is directly in contact with the tip of the expand ring 2 and is stretched. There is a possibility that the frictional resistance between the end of the expand ring 2 and the wafer sheet 5 becomes large, and the wafer sheet 5 cannot be stretched uniformly.

SUMMARY OF THE INVENTION The present invention has been made in consideration of the above circumstances, and has as its object to provide a wafer sheet stretching apparatus capable of uniformly stretching a wafer sheet and optimally securing a gap between pellets.

[0007]

According to the first aspect of the present invention, an expand ring is formed in an expand table.
A press ring is arranged on the outer periphery of the expand ring so as to be relatively movable in the axial direction of the expand ring, and a wafer sheet on which a wafer is adhered is placed on the end of the expand ring, and the press ring and the expand ring are placed. In the wafer sheet stretching device for stretching the wafer sheet by the relative movement of the ring, a fluid outflow portion is formed at the tip of the expand ring, and a fluid layer can be formed between the wafer sheet and the tip of the expand ring. Things.

[0008]

Therefore, according to the wafer sheet stretching apparatus of the present invention, a fluid outflow portion for flowing out fluid is formed at the end of the expand ring, and a fluid layer can be formed between the wafer sheet and the end of the expand ring. Therefore, when the wafer sheet is stretched by the relative movement of the press ring and the expand ring, the frictional resistance between the wafer sheet and the expand ring can be extremely reduced by the fluid layer. As a result, the wafer sheet can be stretched uniformly, and an optimum gap can be secured between the pellets of the wafer.

[0009]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a perspective view showing one embodiment of a wafer sheet stretching apparatus according to the present invention. FIG. 2 is a longitudinal sectional view of the wafer sheet stretching apparatus of FIG. FIG. 3 is a plan view showing the expanding table of FIG.

First, as shown in FIGS. 1 and 2, a wafer 11 is attached to a wafer sheet 12, and the wafer sheet 12 is fixedly held by a wafer ring 13. The wafer 11 is diced before being carried into the wafer sheet stretching device 10 and divided into a large number of pellets 14. The wafer sheet stretching apparatus 10 stretches the wafer sheet 12 to form an appropriate gap 15 between a large number of pellets 14, and each pellet 1 is formed by using a collet 16 or the like.
4 to make it easier to take out.

The above-described wafer sheet stretching apparatus 10 includes an expanding table 18 having an expanding ring 17, a press ring 19, a stopper claw 20, and an air supply system 21.

The expand ring 17 is configured to stand upright in a cylindrical shape on the inner peripheral portion of the expand table 18, and is capable of supporting the wafer sheet 12 at the tip 17A. Also,
The press ring 19 has a ring shape and is arranged on the outer periphery of the expand ring 17.
Are disposed so as to be movable in the axial direction of the motor. This press ring 1
9 enables the wafer ring 13 to be pushed down when the wafer sheet 12 is supported by the leading end of the expand ring 17.

The stopper claw 20 is supported in an upright floating manner by being supported by a spring (not shown) or the like. The stopper claw 20 is provided on the outer periphery of the expand ring 17 on the expand table 18 at appropriate intervals. The stopper claw 20 is in contact with the upper surface of the press ring 19 to prevent the press ring 19 from being lifted by a repulsive force from the stretched wafer sheet 12 (described later).
An elastic support 22 is buried in the expanding table 18 at a position directly below the press ring 19 when the press ring 19 is arranged on the outer periphery of the expanding ring 17, and the wafer ring 13 pushed down by the press ring 19 is positioned.

Now, the tip 17 of the expand ring 17
As shown in FIGS. 2 and 3, a large number of air outlets 23 are provided in A as a fluid supply unit. This air outlet 2
3 is formed over the entire circumference of the expand ring 17 in the circumferential direction. The air supply system 21 supplies air to the air outlets 23, and includes a compressor 24 and a solenoid valve 25. By the ON operation of the solenoid valve 25, air is supplied from the compressor 24 to the air outlet 23, and between the wafer sheet 12 supported by the tip 17A of the expanding ring 17 and the tip 17A,
An air layer 26 as a fluid layer can be formed. The supply of air to the air outlet 23 is shut off by the OFF operation of the solenoid valve 25.

Next, the operation and effect will be described. First, the wafer sheet 12 to which the wafer 11 has been attached is moved to the front end 1 in an expand ring 17 of the wafer sheet stretching apparatus 10.
Place on 7A. Next, the press ring 19 is placed on the upper surface of the wafer ring 13 holding the wafer sheet 12. Thereafter, the electromagnetic valve 25 is turned on to form an air layer 26 between the tip 17A of the expand ring 17 and the wafer sheet 12.

In this state, a manual expanding force is applied to the press ring 19 to push down the press ring 19 and extend the wafer sheet 12. After that, the press ring 19 is prevented from floating by the stopper claw 20,
The wafer sheet 12 is maintained in a stretched state. The ON operation of the electromagnetic valve 25 is performed at least from the start of the stretching of the wafer sheet 12 by the press ring 19 to the end of the stretching.

According to the above embodiment, an air outlet 23 for discharging air is formed at the tip 17A of the expand ring 17 so that the wafer sheet 12 and the expand ring 1
Since the air layer 26 can be formed between the fluid layer 26 and the wafer ring 12 when the wafer ring 13 is pressed down by the press ring 19, the frictional resistance between the wafer sheet 12 and the expanded ring 17 can be reduced. Can be extremely reduced. As a result, the wafer sheet 12 can be stretched uniformly, and an optimum gap 15 between the pellets 14 of the wafer 11 can be secured.

In the above embodiment, the case where the fluid outlet is the air outlet 23 has been described. However, the fluid outlet may be an air outlet groove extending in the circumferential direction of the expand ring 17. The fluid that flows out may be a gas such as an inert gas other than air.

When the wafer sheet 12 is stretched, the press ring 19 is manually moved to the expand ring 1.
Although the case of moving in the axial direction of 7 has been described, the press ring 19 may be moved by a driving source such as a cylinder. Further, instead of moving the press ring 19, the expanding table 18 may be moved.

[0020]

As described above, according to the wafer sheet stretching apparatus according to the present invention, the wafer sheet can be stretched uniformly and the gap between the pellets can be optimally secured.

[Brief description of the drawings]

FIG. 1 is a perspective view showing one embodiment of a wafer sheet stretching apparatus according to the present invention.

FIG. 2 is a longitudinal sectional view of the wafer sheet stretching apparatus of FIG.

FIG. 3 is a plan view showing the expanding table of FIG. 1;

FIG. 4 is a longitudinal sectional view showing a conventional wafer sheet stretching apparatus.

[Explanation of symbols]

 REFERENCE SIGNS LIST 10 wafer sheet stretching device 11 wafer 12 wafer sheet 13 wafer ring 14 pellet 15 gap 17 expand ring 18 expand table 19 press ring 21 air supply system 23 air outlet 26 air layer

──────────────────────────────────────────────────続 き Continued on front page (58) Field surveyed (Int.Cl. ⁷ , DB name) H01L 21 / 52,21 / 58 H01L 21/78

Claims (2)

(57) [Claims] 1. An expand ring is formed on an expand table, and a press ring is disposed on the outer periphery of the expand ring so as to be relatively movable in the axial direction of the expand ring. Placed on the tip of the ring, in the wafer sheet stretching device to stretch the wafer sheet by the relative movement of the press ring and the expand ring,
A wafer sheet stretching device, wherein a fluid outflow portion is formed at a tip of the expand ring so that a fluid layer can be formed between the wafer sheet and the tip of the expand ring. 2. The wafer sheet stretching apparatus according to claim 1, wherein the fluid outlet is an air outlet provided at a tip of an expand ring.