JP3249247B2 - Ultrasound diagnostic equipment - Google Patents
Ultrasound diagnostic equipmentInfo
- Publication number
- JP3249247B2 JP3249247B2 JP19622993A JP19622993A JP3249247B2 JP 3249247 B2 JP3249247 B2 JP 3249247B2 JP 19622993 A JP19622993 A JP 19622993A JP 19622993 A JP19622993 A JP 19622993A JP 3249247 B2 JP3249247 B2 JP 3249247B2
- Authority
- JP
- Japan
- Prior art keywords
- frequency
- probe
- piezoelectric body
- single crystal
- vibrator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
- Transducers For Ultrasonic Waves (AREA)
Description
【0001】[0001]
【産業上の利用分野】本発明は、超音波診断装置に関
し、特に人体の断層像の表示機能とドプラ効果を利用し
て血流情報を表示する機能とを有する超音波診断装置に
係わる。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic diagnostic apparatus and, more particularly, to an ultrasonic diagnostic apparatus having a function of displaying a tomographic image of a human body and a function of displaying blood flow information using the Doppler effect.
【0002】[0002]
【従来の技術】医療用診断装置に用いられる超音波プロ
ーブは、圧電素子(振動子)を超音波と電気信号の交換
素子として用いている。圧電素子に用いられる圧電セラ
ミックの材料定数である電気機械結合係数は、超音波プ
ローブの特性を決定する重要なパラメータの一つで、こ
の値が大きいほど望ましい。電気機械結合係数は、方向
性を有する振動子の種々の振動モードで値を異にする
が、振動モードは分極方向と振動子形状により決められ
る。一般の医療用超音波プローブは、振動子を多数配列
したアレイプローブと称する構成で、各振動子の形状は
前記電気機械結合係数k33’の振動モードで励起され
る。2. Description of the Related Art An ultrasonic probe used in a medical diagnostic apparatus uses a piezoelectric element (vibrator) as an exchange element between ultrasonic waves and electric signals. The electromechanical coupling coefficient, which is a material constant of the piezoelectric ceramic used for the piezoelectric element, is one of the important parameters that determine the characteristics of the ultrasonic probe, and the larger the value, the more desirable. The electromechanical coupling coefficient has different values in various vibration modes of a vibrator having directionality, and the vibration mode is determined by the polarization direction and the vibrator shape. A general medical ultrasonic probe has a configuration called an array probe in which a large number of transducers are arranged, and the shape of each transducer is excited in a vibration mode having the electromechanical coupling coefficient k 33 ′.
【0003】現在、開発され実用化されている圧電セラ
ミック材料において前記k33’の最高値は70%という
値である。振動子の裏面には、背面負荷材(バッキング
材)、超音波放射面には音響マッチング層を形成するこ
とにより超音波プローブを構成している。プローブ特性
は、前記各部材の構造やそれらの特性などにより変化す
る。At present, the highest value of k 33 ′ is 70% in a piezoelectric ceramic material developed and put to practical use. An ultrasonic probe is formed by forming a back load material (backing material) on the back surface of the vibrator and an acoustic matching layer on the ultrasonic radiation surface. The probe characteristics vary depending on the structure of each of the members, their characteristics, and the like.
【0004】前記プローブ特性の一つに送受信感度の占
有周波数帯の幅とその中心周波数の比を取った比帯域幅
があり、一般に大きな方が好ましい。感度と比帯域は相
反する関係にあり、最適化されたプローブの比帯域は7
0%程度である。超音波プローブの公称周波数は、比帯
域の中心周波数で表され、一般に周波数が大きなプロー
ブほど断層像の分解能が向上し、解像度の高い画像が得
られる。しかしながら、生体減衰は周波数が高いほど大
きくなるため、深部の画像が得られ難くなる。断層像
は、中心周波数に合わせたパルスで駆動されるが、血流
情報は血液からの微弱な反射信号を用いるために生体減
衰の影響の小さい低周波領域を活用する。その駆動信号
は、バースト波が用いられるが、その波数は目的により
1から連続波と言える長大なものまで使い分けられてい
る。[0004] One of the probe characteristics is a fractional bandwidth obtained by taking the ratio of the width of the occupied frequency band of transmission / reception sensitivity to the center frequency thereof. Sensitivity and bandwidth are in opposition, and the optimized bandwidth of the probe is 7
It is about 0%. The nominal frequency of the ultrasonic probe is represented by the center frequency of the fractional band. In general, a probe having a higher frequency improves the resolution of the tomographic image and obtains an image with higher resolution. However, since the biological attenuation increases as the frequency increases, it becomes difficult to obtain a deep image. The tomographic image is driven by a pulse adjusted to the center frequency, but the blood flow information uses a low-frequency region where the influence of biological attenuation is small because a weak reflected signal from blood is used. A burst signal is used for the drive signal, and the wave number is appropriately selected from 1 to a long wave that can be called a continuous wave depending on the purpose.
【0005】例えば、中心周波数が5MHzの超音波プ
ローブの比帯域幅が70%である場合、ドプラに使用さ
れる周波数は3.5MHz以上になり、極めて浅い領域
の血流情報しか得られない。このため、血流情報を得る
ために断層像の解像度の劣る公称周波数のより低いプロ
ーブを用い、解像度の高い断層像を得るには周波数の高
いプローブを使用すると言うように2種のプローブを使
い分けることが行われていた。しかしながら、このよう
な2種のプローブを使い分けることは診断時間のロスを
招く。For example, when the specific bandwidth of an ultrasonic probe having a center frequency of 5 MHz is 70%, the frequency used for Doppler becomes 3.5 MHz or more, and only blood flow information in an extremely shallow region can be obtained. For this reason, two types of probes are selectively used, such as using a probe having a lower nominal frequency, which is inferior in resolution of a tomographic image, to obtain blood flow information, and using a probe having a higher frequency to obtain a tomographic image having a high resolution. That was being done. However, properly using such two types of probes causes a loss of diagnostic time.
【0006】このようなことから、本出願人は振動子を
積層構造にし、周波数比が約2倍の2つの周波数帯域を
表す超音波プローブを特開昭63−173954号公
報、特開平4−211599号公報として既に出願し
た。このような超音波プローブは、高周波側の周波数帯
域で分解能の高い断層像を、低周波側の周波数帯域で高
感度のドプラ画像を得ることを可能にした。しかしなが
ら、1つの振動子で2つの周波数帯域を活用するために
各々の周波数帯域幅は中心周波数が等しい、つまり単一
周波数帯域で使用される従来のプローブに比べて50〜
70%減少する。断層像では、周波数が高いほど分解能
が向上するものの、生体減衰により高周波成分ほど大き
く減衰するため、深い領域からの信号が得られ難くな
り、視野深度が浅くなる。したがって、周波数帯域幅が
浅くなると、帯域内の最低周波数は高くなり、帯域幅の
広いものと比べた場合、視野深度が浅くなって深い領域
を観察できなくなる。このように2つの周波数帯域を有
するプローブは、断層像の中心周波数が同じ従来のプロ
ーブと比較すると、ドプラ信号では2倍以上の高感度化
を達成できるものの、断層像は視野深度の深い領域が観
察できず、比較的浅い領域を対象とするプローブに限ら
れる。In view of the above, the present applicant has disclosed an ultrasonic probe having a laminated structure of a vibrator and representing two frequency bands having a frequency ratio of about twice as disclosed in Japanese Patent Application Laid-Open Nos. 63-173954 and 4-1992. No. 211599 has already been filed. Such an ultrasonic probe makes it possible to obtain a high-resolution tomographic image in a high-frequency band and a high-sensitivity Doppler image in a low-frequency band. However, in order to utilize two frequency bands with one vibrator, each frequency bandwidth has the same center frequency, that is, 50 to 50 times compared to a conventional probe used in a single frequency band.
70% reduction. In the tomographic image, the higher the frequency, the higher the resolution, but the higher the frequency, the higher the attenuation due to the biological attenuation, so that it is difficult to obtain a signal from a deep region, and the depth of field becomes shallow. Therefore, when the frequency bandwidth becomes shallower, the lowest frequency in the band becomes higher, and the depth of field becomes shallower as compared with a wide bandwidth, so that a deep region cannot be observed. In this way, the probe having two frequency bands can achieve a Doppler signal more than twice as high in sensitivity as the conventional probe having the same center frequency of the tomographic image, but the tomographic image has an area with a deep field of view. It is limited to probes that cannot be observed and target relatively shallow regions.
【0007】[0007]
【発明が解決しようとする課題】本発明の目的は、断層
像に用いる周波数帯域の中心周波数に対してより小さい
低周波数にドプラ情報用の周波数帯域を有する振動子を
備えた超音波診断装置を提供しようとするものである。SUMMARY OF THE INVENTION An object of the present invention is to provide an ultrasonic diagnostic apparatus provided with an oscillator having a frequency band for Doppler information at a lower frequency lower than the center frequency of a frequency band used for tomographic images. It is something to offer.
【0008】[0008]
【課題を解決するための手段】本発明に係わる超音波診
断装置は、振動子を備え、人体の断層像の表示機能とド
プラ効果を利用して血流情報を表示する機能とを有する
超音波診断装置において、前記振動子は、亜鉛ニオブ酸
鉛−チタン酸鉛の固溶系単結晶からなる圧電体を積層し
た構造を有し、周波数比が2倍もしくはほぼ2倍の偶数
次の高調波が励起されることを特徴とするものである。SUMMARY OF THE INVENTION An ultrasonic diagnostic apparatus according to the present invention comprises an oscillator and has a function of displaying a tomographic image of a human body and a function of displaying blood flow information using the Doppler effect. In the diagnostic device, the vibrator has a structure in which a piezoelectric body composed of a solid solution single crystal of lead zinc niobate-lead titanate is laminated, and an even-order harmonic having a frequency ratio of 2 or almost 2 is generated. It is characterized by being excited.
【0009】前記亜鉛ニオブ酸鉛−チタン酸鉛の固溶系
単結晶としては、チタン酸鉛のモル分率が20%以下の
組成のものを用いることが望ましい。このような固溶系
単結晶からなる圧電体を用いることにより、PZTセラ
ミックからなる圧電体に比べて音速を20%以上遅くす
ることができるため、高感度化が図られた超音波プロー
ブを得ることが可能になる。As the solid solution single crystal of lead zinc niobate-lead titanate, it is desirable to use one having a composition in which the molar fraction of lead titanate is 20% or less. By using such a solid solution-based single crystal piezoelectric body, the speed of sound can be reduced by 20% or more as compared with a piezoelectric body made of PZT ceramic, so that an ultrasonic probe with higher sensitivity can be obtained. Becomes possible.
【0010】特に、組成式 PbA [(Zn1/3 Nb
2/3 )1-x Tix )]B O3 (ただし、xは0.05≦
x≦0.20、化学量論比A/Bは0.98≦A/B<
1.00を示す)で表される組成からなる亜鉛ニオブ酸
鉛−チタン酸鉛の固溶系単結晶を用いることが望まし
い。前記組成式のxを規定したのは次のような理由によ
るものである。前記xを0.05未満にすると、前記固
溶系単結晶のキュリー温度が低く、フレキシブル印刷配
線板やアース電極板の半田付け時や前記固溶系単結晶の
切断時に脱分極する恐れがある。一方、前記xが0.2
0を越えると大きな電気機械結合係数が得られないばか
りか、誘電率が低下して送受信回路都の音響インピーダ
ンスのマッチングが取り難くくなる恐れがある。より好
ましいxは0.06〜1.2である。前記組成式の前記
A/Bが前記範囲を逸脱すると得られた超音波プローブ
の実作動時における信頼性が低下する恐れがある。In particular, the composition formula Pb A [(Zn 1/3 Nb)
2/3) 1-x Ti x) ] B O 3 ( here, x is 0.05 ≦
x ≦ 0.20, stoichiometric ratio A / B is 0.98 ≦ A / B <
It is preferable to use a solid solution single crystal of lead zinc niobate-lead titanate having a composition represented by 1.00). The reason for defining x in the above composition formula is as follows. When the value x is less than 0.05, the Curie temperature of the solid solution single crystal is low, and there is a possibility that depolarization may occur when soldering a flexible printed wiring board or an earth electrode plate or when cutting the solid solution single crystal. On the other hand, x is 0.2
If it exceeds 0, not only a large electromechanical coupling coefficient cannot be obtained, but also the dielectric constant is lowered, and it may be difficult to match the acoustic impedance of the transmitting and receiving circuit. More preferably, x is 0.06 to 1.2. If the ratio A / B of the composition formula deviates from the above range, the reliability of the obtained ultrasonic probe at the time of actual operation may be reduced.
【0011】[0011]
【作用】本発明によれば、振動子を圧電体を積層した構
造にすることによって、特開昭63−173954号公
報、特開平4−211599号公報に開示したように偶
数次の高調波を励起でき、基本周波数と2次高調波を利
用することにより周波数比が2倍ないしほぼ2倍の2つ
の周波数帯域を有する超音波プローブを実現できる。そ
の結果、高調波側を断層像に、低周波側をドプラ情報に
用いることでドプラ情報用の周波数をより低く設定でき
る。このような圧電体が積層した振動子において、前記
圧電体を電気機械結合係数k33’が約83%の亜鉛ニオ
ブ酸鉛−チタン酸鉛の固溶系単結晶から形成することに
よって前記周波数比をさらに拡大することができる。ま
た、前記固溶系単結晶からなる圧電体を積層した振動子
を備えた超音波プローブは従来プローブに比べて高周波
側の周波数帯域幅も広がるため、ドプラ情報のS/Nが
さらに向上して断層像の視野深度も深くなり、診断領域
を拡大することが可能になる。According to the present invention, the vibrator has a structure in which a piezoelectric material is laminated, so that even-order harmonics are disclosed as disclosed in JP-A-63-173954 and JP-A-4-212599. By using the fundamental frequency and the second harmonic, it is possible to realize an ultrasonic probe having two frequency bands whose frequency ratio is doubled or almost doubled. As a result, the frequency for Doppler information can be set lower by using the higher harmonic side for tomographic images and the lower frequency side for Doppler information. In the vibrator in which such piezoelectric members are stacked, the frequency ratio is reduced by forming the piezoelectric members from a solid solution single crystal of lead zinc niobate-lead titanate having an electromechanical coupling coefficient k 33 ′ of about 83%. Can be further expanded. Further, since the ultrasonic probe including the vibrator in which the piezoelectric body made of the solid solution single crystal is laminated has a wider frequency bandwidth on the high frequency side than the conventional probe, the S / N of Doppler information is further improved and the The depth of field of the image is also increased, and the diagnosis area can be expanded.
【0012】[0012]
【実施例】以下、本発明の好ましい実施例を詳細に説明
する。 実施例 まず、出発原料としてPbO、ZnO、Nb2 O5 、T
iO2 を用い、これらを純度補正した後、亜鉛ニオブ酸
(PZN)とチタン酸鉛(PT)とが91:9のモル比
になるように秤量し、さらにフラックスとして同量のP
bOを添加した。この粉末に純水を添加し、ZrO2 ボ
ールが収納されたボールミルで1時間混合した。得られ
た混合物の水分を除去した後、ライカイ機で十分に粉砕
し、さらにゴム型容器に入れ、2トン/cm2 の圧力で
ラバープレスを行った。ゴム型から取り出した固形物6
00gを直径50mm、容量250ccの白金製容器に
入れ、1250℃の温度まで5時間で昇温して溶解し、
0.8℃/hrの速度で800℃まで徐冷した後、室温
まで冷却した。その後、前記白金製容器に20%濃度の
硝酸を添加し、8時間煮沸して固溶系単結晶を取り出し
た。前記単結晶の一部を粉砕し、X線回折を行なったと
ころ、良好な結晶構造を有することが確認された。ま
た、前記単結晶をラウエカメラを用いて(100)面を
出し、この面に垂直にカッタで切断した。切断後の結晶
を白金棒に種結晶として取り付けた。DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below in detail. EXAMPLES First, PbO, ZnO, Nb 2 O 5 , T
After correcting the purity of these using iO 2 , zinc niobate (PZN) and lead titanate (PT) were weighed so as to have a molar ratio of 91: 9, and the same amount of P was used as a flux.
bO was added. Pure water was added to this powder and mixed for 1 hour in a ball mill containing ZrO 2 balls. After removing the water content of the obtained mixture, the mixture was sufficiently pulverized by a raikai machine, further placed in a rubber-type container, and subjected to rubber press at a pressure of 2 ton / cm 2 . Solid 6 removed from rubber mold
00g was placed in a platinum container having a diameter of 50 mm and a capacity of 250 cc, and was heated to a temperature of 1250 ° C. in 5 hours and dissolved.
After slowly cooling to 800 ° C. at a rate of 0.8 ° C./hr, it was cooled to room temperature. Thereafter, nitric acid at a concentration of 20% was added to the platinum container, and the mixture was boiled for 8 hours to take out a solid solution single crystal. When a part of the single crystal was pulverized and subjected to X-ray diffraction, it was confirmed that the single crystal had a good crystal structure. Further, the (100) plane was taken out of the single crystal using a Laue camera, and cut with a cutter perpendicular to this plane. The crystal after cutting was attached to a platinum rod as a seed crystal.
【0013】次いで、PbO、ZnO、Nb2 O5 、T
iO2 を純度補正した後、亜鉛ニオブ酸(PZN)とチ
タン酸鉛(PT)とが91:9のモル比になるように秤
量し、さらにフラックスをPZN−PT:PbO=25
モル%:75モル%となるように添加してボールミルで
混合した。得られた混合物の水分を除去した後、ライカ
イ機で十分に粉砕し、さらにゴム型容器に入れ、2トン
/cm2 の圧力でラバープレスを行った。ゴム型から取
り出した固形物を直径50mm、容量250ccの白金
製容器に入れ、970℃の温度まで昇温して前記固形物
を完全に溶解させた。この溶融物に前述した方法で作製
した種結晶を浸漬し、前記種結晶を取り付けた白金棒を
60rpmの速度、0.1mm/hrの引上げ速度で引
上げを行うことにより単結晶の育成を行った。Next, PbO, ZnO, Nb 2 O 5 , T
After correcting the purity of iO 2 , zinc niobate (PZN) and lead titanate (PT) were weighed so as to have a molar ratio of 91: 9, and the flux was further PZN-PT: PbO = 25.
Molar%: 75 mol% was added and mixed with a ball mill. After removing the water content of the obtained mixture, the mixture was sufficiently pulverized by a raikai machine, further placed in a rubber-type container, and subjected to rubber press at a pressure of 2 ton / cm 2 . The solid material removed from the rubber mold was placed in a platinum container having a diameter of 50 mm and a capacity of 250 cc, and the temperature was raised to 970 ° C. to completely dissolve the solid material. A single crystal was grown by immersing the seed crystal prepared by the above-described method in the melt and pulling the platinum rod with the seed crystal attached at a speed of 60 rpm and a pulling speed of 0.1 mm / hr. .
【0014】次いで、育成された結晶をラウエカメラで
(100)面を出し、この面に垂直にカッタで切り出し
た。つづいて、前記切断面を#2000の研磨材でその
厚さが220μmになるまで研磨した。研磨した結晶片
(第1圧電体)の両面にスパッタ法によりTi/Au電
極をそれぞれ形成した。また、前記圧電体とほぼ同じ厚
さで電極が形成されていない結晶片(第2圧電体)を前
記第1圧電体の一方の電極にエポキシ系接着剤で貼り合
わせた。この際、接着剤層は薄くなるように接着剤を選
択し、加圧して接着する。このような方法で製造した振
動子を図1に示す。図1中の1は第1圧電体、2、3は
前記第1圧電体1の両面にそれぞれ形成された電極、4
は前記電極3に貼り合わされた第2圧電体、5は前記電
極2、3から引き出されたリードである。前記リード
5、5間に駆動信号を印加することにより2つの周波数
帯域の超音波信号の送受信が可能になる。Next, the grown crystal was taken out of the (100) plane with a Laue camera and cut out perpendicular to this plane with a cutter. Subsequently, the cut surface was polished with a # 2000 abrasive until the thickness became 220 μm. Ti / Au electrodes were formed on both sides of the polished crystal piece (first piezoelectric body) by sputtering. Further, a crystal piece (second piezoelectric body) having substantially the same thickness as the piezoelectric body and having no electrode formed thereon was bonded to one electrode of the first piezoelectric body with an epoxy-based adhesive. At this time, the adhesive is selected such that the adhesive layer becomes thin, and the adhesive is applied by pressing. FIG. 1 shows a vibrator manufactured by such a method. In FIG. 1, 1 is a first piezoelectric body, 2 and 3 are electrodes formed on both surfaces of the first piezoelectric body 1, respectively.
Is a second piezoelectric member bonded to the electrode 3, and 5 is a lead drawn out from the electrode 2, 3. By applying a drive signal between the leads 5, 5, it is possible to transmit and receive ultrasonic signals in two frequency bands.
【0015】前述した図1に示す振動子を用いてアレイ
プローブを作製した。すなわち、前記電極が形成されな
い第2圧電体をバッキング材にエポキシ系接着剤で貼り
合わせた。前記第1圧電体の表面側の電極に音響マッチ
ング層を形成した。前記音響マッチング層の厚さは、高
周波側の周波数帯域の幅が広くなるように設定した。こ
の後、ダイシングソーにより前記音響マッチング層から
前記第2圧電体に亘って所定ピッチで切断することによ
り短冊状の積層圧電体を有する複数の振動子を備えたア
レイプローブを作製した。An array probe was manufactured using the transducer shown in FIG. That is, the second piezoelectric body on which the electrodes were not formed was bonded to a backing material using an epoxy adhesive. An acoustic matching layer was formed on an electrode on the surface side of the first piezoelectric body. The thickness of the acoustic matching layer was set such that the width of the frequency band on the high frequency side was widened. Thereafter, the acoustic probe was cut from the acoustic matching layer to the second piezoelectric body at a predetermined pitch by a dicing saw, thereby producing an array probe including a plurality of vibrators having strip-shaped laminated piezoelectric bodies.
【0016】比較例として、圧電体として圧電セラミッ
ク(東芝セラミック社製商品名;T−96,k33’=6
8%)を用いた以外、同様な構造のアレイプローブを作
製した。As a comparative example, a piezoelectric ceramic (T-96, k 33 ′ = 6, manufactured by Toshiba Ceramics Co., Ltd.) was used as the piezoelectric body.
8%), and an array probe having a similar structure was prepared.
【0017】得られた実施例および比較例のアレイプロ
ーブの周波数特性を測定した。その結果、実施例のプロ
ーブは図2に示す特性図、比較例のプローブは図3に示
す特性図になった。The frequency characteristics of the array probes obtained in Examples and Comparative Examples were measured. As a result, the probe of the example had the characteristic diagram shown in FIG. 2, and the probe of the comparative example had the characteristic diagram shown in FIG.
【0018】図2に示すようにk33’が83%のPZN
−PT固溶系単結晶からなる圧電体を有する実施例のア
レイプローブは低周波側のピーク周波数fLが1.9M
Hz、高周波側の−6dBの中心周波数fHが6.6M
Hz、−6dB比帯域(Δf/fH)が35%であり、
図3に示すようにk33’が68%の圧電セラミックから
なる圧電体を有する比較例のアレイプローブは低周波側
のピーク周波数fLが2.5MHz、高周波側の−6d
Bの中心周波数fHが6.6MHz、−6dB比帯域
(Δf/fH)が29%である。また、全体の振幅レベ
ルも実施例のプローブは比較例のプローブに比べて数d
B大きくなっており、S/Nが向上している。[0018] PZN k 33 'of 83%, as shown in FIG. 2
-The array probe of the embodiment having the piezoelectric body made of a PT solid solution single crystal has a peak frequency fL on the low frequency side of 1.9M.
Hz, the center frequency fH of -6 dB on the high frequency side is 6.6M
Hz, -6 dB ratio band (Δf / fH) is 35%,
As shown in FIG. 3, the array probe of the comparative example having a piezoelectric body made of a piezoelectric ceramic with k 33 ′ of 68% has a peak frequency fL on the low frequency side of 2.5 MHz and -6d on the high frequency side.
The center frequency fH of B is 6.6 MHz, and the -6 dB ratio band (Δf / fH) is 29%. In addition, the overall amplitude level of the probe of the example is several d higher than that of the probe of the comparative example.
B has increased, and the S / N has improved.
【0019】したがって、実施例のプローブは比較例の
プローブと高周波側の中心周波数が同じ値であるが、低
周波側のピーク周波数fLを2.5MHz(比較例)か
ら1.9MHZに低減でき、しかもドプラ信号のS/N
を向上でき、さらに高周波側の比帯域も増大できるた
め、比較例のプローブに比べて断層像の視野深度を深く
できる。Therefore, the probe of the embodiment has the same center frequency on the high frequency side as the probe of the comparative example, but the peak frequency fL on the low frequency side can be reduced from 2.5 MHz (comparative example) to 1.9 MHZ. Moreover, the S / N of the Doppler signal
Can be improved, and the fractional band on the high frequency side can be increased, so that the depth of field of the tomographic image can be made deeper than the probe of the comparative example.
【0020】また、前記音響マッチング層を単層から多
層にすることにより高周波側の比帯域がさらに増大され
たアレイプローブを実現できる。なお、本発明に係わる
超音波プローブは前述した図1に示す構造に限定されな
い。例えば、図4に示すように両面に電極2、3を有す
る圧電体1と同様に電極2´、3´を有する圧電体1´
とを分極方向(図の矢印方向)が互いに対向するように
薄いエポキシ系接着剤で貼り合わせた構造の振動子を用
いてもよい。外側に位置する前記電極2、3´にリード
5、5をそれぞれ接続し、前記リード5、5間に駆動信
号を印加することにより2つの周波数帯域の超音波信号
の送受信が可能になる。ただし、図4に示す積層構造の
振動子において内部の電極3、2´は駆動に使用しな
い。このような構成の振動子においても従来の圧電セラ
ミックからなる圧電体を有する振動子と高周波側の中心
周波数が同じであるならば、前記従来の振動子に比べて
低周波側のピーク周波数を低減できるため、高周波側の
比帯域を増大させることができる。Further, by making the acoustic matching layer from a single layer to a multilayer, it is possible to realize an array probe in which the specific band on the high frequency side is further increased. The ultrasonic probe according to the present invention is not limited to the structure shown in FIG. For example, as shown in FIG. 4, a piezoelectric body 1 'having electrodes 2' and 3 'as well as a piezoelectric body 1 having electrodes 2 and 3 on both surfaces.
And a vibrator having a structure in which the polarization directions (arrow directions in the drawing) face each other with a thin epoxy-based adhesive may be used. Leads 5, 5 are connected to the electrodes 2, 3 'located on the outside, respectively, and a drive signal is applied between the leads 5, 5 to enable transmission and reception of ultrasonic signals in two frequency bands. However, the internal electrodes 3, 2 'in the resonator having the laminated structure shown in FIG. 4 are not used for driving. If the vibrator having such a configuration has the same center frequency on the high frequency side as the vibrator having the piezoelectric body made of the conventional piezoelectric ceramic, the peak frequency on the low frequency side is reduced as compared with the conventional vibrator. As a result, the fractional band on the high frequency side can be increased.
【0021】前述した図4に示す振動子は、両側に電極
を有する2枚の圧電体を分極方向(図の矢印方向)が互
いに対向するように薄いエポキシ系接着剤で貼り合わせ
たが、前記固溶系単結晶の特徴を生かした別の方法によ
り接着剤層を介在せずに作製できる。すなわち、ニオブ
酸リチウム単結晶はキュリー点に近い温度で熱処理する
ことにより分極反転層を形成でき、熱処理により反転層
の厚さを制御できることが知られている。本発明で用い
るPZN−PT固溶系単結晶もキュリー点に近い170
〜180℃で熱処理することにより反転層を形成でき
る。このような現象を利用して図5の(A)に示すよう
にPZN−PT固溶系単結晶からなる圧電体11の両面
に電極12、13をそれぞれ形成した後、所定条件で熱
処理することにより図5の(B)に示すように分極方向
(図の矢印方向)が互いに対向する圧電体11、11´
を有する分極対向構造にすることができる。なお、図5
の(B)中の14はリードである。このような図5の
(B)に示す構造の振動子は、対向界面に電極や接着剤
層が介在されていないため、理想的な振動がなされ、前
述したようにダイシングソーにより短冊状に切断した場
合、接着方式に比べてアレイ素子間の特性ばらつきや特
性の劣化の少ないアレイプローブを実現できる。したが
って、前記分極反転法は本発明のように2つの周波数帯
域を有する超音波プローブの製造に有効である。In the vibrator shown in FIG. 4 described above, two piezoelectric bodies having electrodes on both sides are bonded with a thin epoxy-based adhesive so that the polarization directions (arrow directions in the drawing) are opposite to each other. It can be produced without an adhesive layer by another method utilizing the characteristics of the solid solution single crystal. That is, it is known that a domain-inverted layer can be formed by heat-treating a lithium niobate single crystal at a temperature close to the Curie point, and the thickness of the inversion layer can be controlled by the heat treatment. The PZN-PT solid solution single crystal used in the present invention also has a 170 Curie point close to the Curie point.
By performing a heat treatment at about 180 ° C., an inversion layer can be formed. By utilizing such a phenomenon, as shown in FIG. 5A, electrodes 12 and 13 are respectively formed on both surfaces of a piezoelectric body 11 made of a PZN-PT solid solution single crystal, and then heat-treated under predetermined conditions. As shown in FIG. 5B, the piezoelectric bodies 11 and 11 'whose polarization directions (arrow directions in the figure) are opposed to each other.
Can be obtained. FIG.
14B is a lead. The vibrator having the structure shown in FIG. 5B has an ideal vibration since no electrode or adhesive layer is interposed at the facing interface, and is cut into strips by the dicing saw as described above. In this case, it is possible to realize an array probe with less variation in characteristics between array elements and less deterioration of characteristics than the bonding method. Therefore, the polarization inversion method is effective for manufacturing an ultrasonic probe having two frequency bands as in the present invention.
【0022】[0022]
【発明の効果】以上説明したように、本発明によれば低
周波数側のピーク周波数を低減し、高周波側の比帯域を
増大できるため、血流情報を捕らえる超音波周波数をよ
り低い値に設定でき、血球からの極めて微弱な反射信号
の生体による減衰を軽減でき、S/Nの高い血流信号を
得ることができ、かつ断層像も広帯域化したことにより
深い領域を観察でき、診断領域を大幅に改善できる等顕
著な効果を奏する超音波診断装置を提供できる。As described above, according to the present invention, since the peak frequency on the low frequency side can be reduced and the fractional band on the high frequency side can be increased, the ultrasonic frequency for capturing blood flow information is set to a lower value. Attenuation of extremely weak reflected signals from blood cells by the living body can be reduced, a blood flow signal with a high S / N ratio can be obtained, and a deep region can be observed by widening the tomographic image. It is possible to provide an ultrasonic diagnostic apparatus having remarkable effects such as a remarkable improvement.
【図1】本発明に係わる超音波プローブに用いられる振
動子を示す正面図。FIG. 1 is a front view showing a transducer used for an ultrasonic probe according to the present invention.
【図2】本発明の実施例における超音波プローブの周波
数特性を示す線図。FIG. 2 is a diagram showing frequency characteristics of the ultrasonic probe according to the embodiment of the present invention.
【図3】比較例の超音波プローブの周波数特性を示す線
図。FIG. 3 is a diagram showing frequency characteristics of an ultrasonic probe of a comparative example.
【図4】本発明の他の例を示す振動子の正面図。FIG. 4 is a front view of a vibrator showing another example of the present invention.
【図5】本発明における分極反転法で振動子を製造する
工程を示す正面図。FIG. 5 is a front view showing a step of manufacturing a vibrator by the polarization inversion method in the present invention.
1、1´、4、11、11´…圧電体、2、3、2´、
3´、12、13…電極。1, 1 ', 4, 11, 11' ... piezoelectric body, 2, 3, 2 ',
3 ', 12, 13 ... electrodes.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 河内 勝 神奈川県川崎市幸区小向東芝町1番地 株式会社東芝研究開発センター内 (72)発明者 小林 剛史 神奈川県川崎市幸区小向東芝町1番地 株式会社東芝研究開発センター内 (72)発明者 山下 洋八 神奈川県川崎市幸区柳町70番地 株式会 社東芝柳町工場内 (56)参考文献 特開 昭56−161035(JP,A) 特開 昭62−155000(JP,A) 特開 平2−294199(JP,A) 特開 昭56−115582(JP,A) 特開 昭56−115586(JP,A) (58)調査した分野(Int.Cl.7,DB名) A61B 8/00 - 8/15 H04R 17/00 330 G01N 29/00 - 29/28 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Masaru Kawachi 1 Toshiba-cho, Komukai-shi, Kawasaki-shi, Kanagawa Prefecture Inside the Toshiba R & D Center (72) Inventor Takeshi Kobayashi Toshiba-cho, Koyuki-ku, Kawasaki-shi, Kanagawa No. 1 Toshiba R & D Center Co., Ltd. (72) Inventor Yohachi Yamashita 70, Yanagicho, Kochi-ku, Kawasaki-shi, Kanagawa Prefecture In-house Toshiba Yanagimachi Plant (56) References JP-A-56-161035 (JP, A) JP-A-62-155000 (JP, A) JP-A-2-294199 (JP, A) JP-A-56-115582 (JP, A) JP-A-56-115586 (JP, A) (58) Int.Cl. 7 , DB name) A61B 8/00-8/15 H04R 17/00 330 G01N 29/00-29/28
Claims (1)
ブを備え、人体の断層像の表示機能とドプラ効果を利用
して血流情報を表示する機能とを有する超音波診断装置
において、 前記超音波プローブを構成する振動子は、亜鉛ニオブ酸
鉛−チタン酸鉛の固溶系単結晶からなる圧電体を有する
ことを特徴とする超音波診断装置。1. An ultrasonic diagnostic apparatus comprising an ultrasonic probe having two frequency bands and having a function of displaying a tomographic image of a human body and a function of displaying blood flow information using a Doppler effect. An ultrasonic diagnostic apparatus, wherein the transducer constituting the probe has a piezoelectric body made of a solid solution single crystal of lead zinc niobate-lead titanate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19622993A JP3249247B2 (en) | 1993-08-06 | 1993-08-06 | Ultrasound diagnostic equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19622993A JP3249247B2 (en) | 1993-08-06 | 1993-08-06 | Ultrasound diagnostic equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0747065A JPH0747065A (en) | 1995-02-21 |
| JP3249247B2 true JP3249247B2 (en) | 2002-01-21 |
Family
ID=16354352
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19622993A Expired - Fee Related JP3249247B2 (en) | 1993-08-06 | 1993-08-06 | Ultrasound diagnostic equipment |
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| Country | Link |
|---|---|
| JP (1) | JP3249247B2 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5295531B2 (en) * | 2007-08-27 | 2013-09-18 | 一般財団法人電力中央研究所 | Ultrasonic flaw detection method and apparatus for surface flaw detection |
| KR102300643B1 (en) * | 2019-07-12 | 2021-09-10 | 안광숙 | High intensity focused ultrasonic transducer |
-
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- 1993-08-06 JP JP19622993A patent/JP3249247B2/en not_active Expired - Fee Related
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| Publication number | Publication date |
|---|---|
| JPH0747065A (en) | 1995-02-21 |
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