JP3250817B2 - Leveling device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for mounting an object to be measured or a workpiece to be measured for surface roughness, and three-dimensionally adjusting the orientation of the surface to be measured or the surface to be processed. The present invention relates to a leveling device that can be set in a posture.

[0002]

2. Description of the Related Art As a leveling device capable of placing an object to be mounted on a mounting member and making the positions of the surface to be measured and the surface to be processed three-dimensionally desired, a leveling device is provided on the mounting member side. When the scan is measured, the attitude control (tilt control) is performed so as to obtain a desired attitude based on the attitude obtained by the detection of the inclination of the mounting member at each measurement of one scan, and When the first attitude control is completed, the second tilt detection and tilt correction, the third tilt detection and tilt correction, and the like are repeated as many times as desired to continuously perform tilt correction. Had been.

[0003]

In the conventional leveling apparatus, the inclination of the mounting member is detected by performing one scanning measurement on the mounting member, and a desired posture is determined based on the posture obtained by the detection. However, the inclination detection obtained by performing one scan measurement on the mounting member side is only for a partial surface near the scan detected portion. However, it cannot be said that the attitude of the entire surface of the object to be controlled is detected, and the tilt detection result obtained is not a result of the entire surface to be measured. As a result, the tilt of the entire mounting member side is not necessarily obtained. There is a problem that correction cannot always be performed. Also, one scanning measurement is performed on the mounting member side to obtain a posture detection result, and each time the detection result is obtained, the posture control (tilt correction) is performed so as to obtain a desired posture based on the posture obtained by the detection. ), There is a problem that much time is required until the final attitude control.

[0004] In order to solve these problems,
By continuously performing a plurality of scans on the posture control surface, the positions of a plurality of points on the posture control surface are randomly determined, and an average plane that is a plane is determined based on the positions of the points, A leveling device in which the obtained control attitude is accurate and the time required for the attitude control is short by configuring the attitude control with the average plane as the attitude control plane is conceivable.

However, when continuously scanning and detecting the attitude control surface to take a plurality of points at random and obtain the positions of those points, the result of the detection indicates the detectable range of the detecting means. It may be possible to exceed. In such a case, if the operation of continuous scanning detection on the attitude control surface is redone from the beginning again, there is a problem that much time and labor are required. If the scanning detection means is a contact type surface roughness meter, the operation of scanning detection on the posture control surface is repeated from the beginning, and a larger number of scanning surfaces (posture control surfaces) are correspondingly increased. The problem of hurt arises.

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and is for obtaining an initial attitude of a surface to be attitude-controlled by scanning detection. It is an object of the present invention to provide a leveling device in which the time required for control is short, and in addition, when the scanning detection exceeds the detectable range, the operation of scanning detection on a surface to be attitude-controlled need not be repeated from the beginning.

[0007]

SUMMARY OF THE INVENTION The present invention is directed to a continuous scanning detection for obtaining an initial posture of a mounting member with respect to a substrate when a detection result exceeds a detectable range of a detecting means. And a leveling device configured to cancel a detection result exceeding a detectable range.

[0008] In order to achieve the above object, the present invention relates to the present invention.
The leveling device, a substrate, a mounting member, a support unit,
A variable unit, a detection unit, a calculation unit, and a control unit;
Storage means and judgment means
And. Here, the storage means is the detection means
The detection result of each point obtained in the step is stored. The said judging means
During the continuous scanning detection by the detection means,
The over range beyond the detectable range of the
If it occurs less than the number of times, a unique point on the attitude control surface
Is determined to have occurred due to the detection of
At least some detection results within the detectable range of the
Detection is continued until a certain number is obtained. On the other hand, the overlay
If the change continues for a predetermined number of times,
Judge that it is caused by the inclination of your surface and interrupt the detection
You. Then, the calculating means is activated by the determining means.
The bar range is generated by detecting a unique point on the attitude control surface.
If it is determined that the
After completion, the detectable range of the detecting means obtained in the storage means
The attitude of the attitude control surface based on the detection results
You. On the other hand, the overrange is controlled by the determination means.
If it is determined that it is caused by the inclination of the surface,
Detectable range of the detecting means obtained in the storage means after the interruption
The attitude of the attitude control surface based on the detection results
You. In addition, the control means is overrun by the judgment means.
The range is caused by a unique point on the attitude control surface
If it is determined, the posture control surface obtained by the calculation means
The posture is set to a desired posture. On the other hand,
It is determined that the bar range is caused by the inclination of the attitude control surface.
In the case of a rejection, the posture obtained by the calculating means is detected by the detecting means.
It is characterized by making it a provisional posture within the range where it can go out
You. Note that, in the present invention, the over-
-Judge that the range is caused by the inclination of the attitude control surface
Is detected, the control means can detect the detection means.
After the provisional attitude control in the
Attitude control by the detection and control means,
It is preferable to repeat until the obtained posture becomes the desired posture
It is. In the present invention, the setting means and the counter
And a step. And it is over by the judgment means.
The range is caused by a unique point on the attitude control surface
When the judgment is made, the count number of the counter means is set.
If the number of setting means has not been reached, at least
The count number of the counter means reaches the set number of the setting means
Until the detection by the detection means is continued. Meanwhile, the setting
If the number of means has been reached, the detection is terminated or
It is preferred to continue. Here, the setting means is
Attitude control surface required to determine the attitude of the attitude control surface
Set the number of points above. The counter means may be
Of the detection results obtained in the storage means, detectable by the detection means
Count the number of detection results within the operable range.

[0009]

The detection result exceeding the detectable range of the detecting means is canceled, and the attitude control is performed based on the detection result within the detectable range of the detecting means.

[0010]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in detail with reference to the embodiments shown in FIGS. However, the present invention is not limited by the embodiment. The leveling device 1 is shown in FIGS.
As shown in FIG. 7, a substrate 2, a mounting member 3, a support unit, variable units 4 and 5, and a control unit 6 are provided. The mounting member 3 is for mounting an object to be measured, which is an object to be measured.

The support means comprises three support portions 7, 8 and 9, and supports the mounting member 3 so as to obtain a desired posture with respect to the substrate 2. As shown in FIGS. 2, 3, 4 and 5, the supporting portion 7 pivotally supports the rotating member 10 obtained by making round bars orthogonal to each other, and pivotally rotates the rotating member 10 in the direction of arrow A. Pivoting members 11 and 12 and rotating member 10
Supporting members 13 and 1 for pivotally supporting the rotation in the direction of arrow B.
4. Then, the pivot members 11 and 1
2 is attached and fixed to the lower surface of the mounting member 3 with screws,
The pivot members 13 and 14 are fixed to the upper surface of the substrate 2 by screws. With this configuration, the support section 7 supports the mounting member 3 with respect to the substrate 2 while keeping the distance between the substrate 2 and the mounting member 3 constant. The pivot member 11,
Holes 15, 16, 17 and 18 for pivotally supporting the rotating member 10 are provided in 12, 13 and 14, respectively.

As shown in FIGS. 1, 2 and 3, the support portion 8 has a spherical roller 19, a pivotal member 20 for pivotally supporting the spherical roller 19, and a spherical roller 19 capable of rotating. It mainly comprises a slider 21 to be engaged. Thus, the pivot 20 is fixed to the lower surface of the mounting member 3 and
Numeral 1 is movable on the upper surface of the substrate 2 in the direction of arrow C. Also, the upper surface of the slider 21 is in contact with the spherical roller 19 and
It is inclined at an angle of ゜. The support portion 8 has this configuration,
The distance between the substrate 2 and the mounting member 3 is made variable, that is, the mounting member 3 is supported so as to be displaceable in the direction of arrow D with respect to the substrate 2.

As shown in FIGS. 1, 2 and 4, the support portion 9 has a spherical roller 22, a pivoting member 23 for pivotally supporting the spherical roller 22, and a spherical roller 22 capable of rotating. It mainly comprises a slider 24 to be engaged. Then, the pivot 23 is fixed to the lower surface of the mounting member 3 and the slider 2
Reference numeral 4 is movable on the upper surface of the substrate 2 in the direction of arrow C. Also, the spherical roller 22 engages with the upper surface of the slider 24, and the upper surface of the slider 24
It is inclined at an angle of ゜. The support portion 9 has this configuration,
The distance between the substrate 2 and the mounting member 3 is made variable, that is, the mounting member 3 is supported so as to be displaceable in the direction of arrow D with respect to the substrate 2.

The three support portions 7, 8 and 9 are arranged so as to form an isosceles triangle with the support portion 7 at the top. Thus, the length of the base, that is, the distance between the two support portions 8 and 9 is 2 l, and the height, that is, the distance from the support portion 7 to the line connecting the two support portions 8 and 9 is also 2 l. It has become.

As shown in FIGS. 1, 2 and 3, the variable means 4 includes a motor 25 as an output means, a screw rod 26, a joint 28 connecting the output shaft 27 of the motor 25 and the screw rod 26, It is mainly composed of a bush 29. Then, the motor 25 is fixed to the substrate 2, and the bush 29 is screwed to the screw rod 26 and fixed to the slider 21. With this configuration, the variable means 4 causes the slider 21 to slide in the direction of arrow C when the motor 25 is output, and the sliding of the slider 21 causes the pivot 20 to move in the direction of arrow D, which is the vertical direction. Part 8
Is to change the distance between the part of the substrate 2 and the part of the mounting member 3 that are supported.

As shown in FIGS. 1, 2 and 4, the variable means 5 includes a motor 30 as an output means, a screw rod 31, a joint 33 connecting the output shaft 32 of the motor 30 and the screw rod 31, and It is mainly composed of a bush 34. Then, the motor 30 is fixed to the substrate 2, and the bush 34 is screwed to the screw rod 31 and fixed to the slider 24. With this configuration, when the motor 30 is output, the slider 24 slides in the direction of arrow C, and the sliding movement of the slider 24 causes the pivoting member 23 to move in the direction of arrow D, which is the up and down direction. Part 9
Is to change the distance between the part of the substrate 2 and the part of the mounting member 3 that are supported.

Each of the motors 25 and 30 is a step motor that makes one rotation in 1000 steps.
The pitch of the screws of both the screw rods 26 and 31 is determined so that the bushes 29 and 34 respectively move by 0.5 mm in the direction of arrow C by one rotation.

The control means 6, as shown in FIG.
The motor driver 49 and the controller 50 of the motor 25 for outputting the motor 5 as desired, the motor driver 51 and the controller 52 of the motor 30 for outputting the motor 30 as desired, and the output amounts of the motors 25 and 30 are obtained. Amount calculation unit 53 of motors 25 and 30 for
A data memory 54 for storing data from a detection unit 36 of the surface roughness meter 35 described later, an average inclination angle calculation unit 55 for calculating an average inclination angle of the mounting member 3, and a system controller 56. It is configured. The control means 6
When the attitude of the mounting member 3 with respect to the substrate 2 is detected and a desired attitude is determined, a signal for setting the detected attitude to the desired attitude is output to the variable means 4 and the variable means 5, respectively.

Further, the control means 6 sets, between the data memory 54 and the system controller 56, the number of points to be sampled on the posture control surface (measured surface) of the measured object 48 by scanning detection. A setting unit 63; a determination unit 64 that determines whether or not the value of the position of the sampled point on the attitude control surface, which is a detection result, is within a range that can be detected by the detection unit 36; A cancel signal output unit 65 for sending a signal for erasing (cancelling) the detection result to the data memory 54 when the detection result is not within the range detectable by the detection unit 36; Is the detector 3
A counter 66 is provided for counting the size of the data when it is within the detectable range of 6. The detailed operation of the control means 6 will be described later in the description of the use of the leveling device 1.

The leveling device 1 is configured as described above. Hereinafter, the use of the leveling device 1 when used with the surface roughness meter 35 will be described using a flowchart (FIG. 8) showing an outline of the operation sequence and a flowchart (FIGS. 9 to 12) showing the operation sequence.

The measurement of the inclination (posture) of the object 48 placed on the leveling device 1 is performed using a surface roughness meter 35 as shown in FIG. That is, in detail, the surface roughness is measured by performing at least two different scans on the surface to be measured (upper surface) of the object to be measured 48 by the surface roughness meter 35, and the three-dimensional relative position of a point in the scan is measured. Find coordinates. An average surface is determined based on a plurality of data obtained by the coordinate measurement, and the determined average surface is regarded as a plane of the surface to be measured of the object to be measured 48,
In addition, the attitude (inclination) of the plane is regarded as the attitude (inclination) of the measured surface. Then, the leveling device 1 is operated to correct the inclination of the DUT 48 so that this plane is parallel to the scanning direction of the detection unit 36 regardless of the movement of the DUT 48 in the arrow Y direction. (Posture control) (“calculation of average plane” in FIG. 8).

When the inclination correction is required only in two dimensions, the surface roughness meter 35 is scanned only once with respect to the object 48 to measure the surface roughness only once. A regression line is obtained based on the result, and the regression line is achieved by operating the leveling device 1 so as to be parallel to the scanning direction of the detection unit 36 (see “Automatic tilt correction (posture control) in FIG. 8). , The necessary measurement conditions are set on the operation / display panel 42 ".
1). In the surface roughness measurement for tilt correction (attitude control), the data transmitted from the detection unit 36 as it is, that is, the cross-section curve itself indicating the surface roughness of the DUT 48 is expressed. , And data obtained via a filter for removing a swell component, for example, is not used.

As shown in FIG. 7, the surface roughness meter 35 includes a detection unit 36 provided with a stylus (not shown) and a motor 37, and holds the detection unit 36 to scan in the direction of arrow X. A scanning unit 38 and a motor 39 are provided, and a slide unit 41 that slides the scanning unit 38 in the up and down direction, that is, the arrow Z direction along the column 40 is provided.
The front surface of the base 44 of the surface roughness meter 35 is an operation / display panel 42.

The leveling device 1 is mounted on a slider 46 of a slide device 43 on a base 44 of a surface roughness meter 35. The slide device 43 is provided with a motor 45,
The slider 46 is configured to slide in the arrow Y direction with respect to the main body 47. A motor driver 57 and an arrow X direction controller 58, a motor driver 59 and an arrow Z direction controller 60, and a motor driver 61 and an arrow Y direction controller 62 are provided between the system controller 56 and the motors 37, 39 and 45, respectively. Is interposed.

Here, the slide device 43 is arranged such that the scanning direction of the detection unit 36 of the surface roughness meter 35 and the moving direction of the slider 46 are orthogonal to each other. Next, the device under test 48 is mounted on the mounting member 3 of the leveling device 1 and
The leveling device 1 such that the surface to be measured, that is, the upper surface of the object to be measured 48 is parallel to the moving direction of the stylus.
Activate

By operating the operation / display panel 42 with respect to the leveling device 1, the measurer firstly operates the surface roughness meter 35.
The conditions of use of, that is, measurement range setting, sampling length setting, measurement length setting, scanning interval setting,
The measurement conditions such as the number of points to be detected by the counter of the system controller 56, that is, the size of a sample to be detected are set. Subsequently, the scanning / display panel 42 is operated to turn on the auto-leveling selection key.

Subsequently, measurement conditions for automatically correcting the inclination (position control) of the mounting member 3 on which the object to be measured 48 is mounted are set. The scanning unit 38 is operated, the detection unit 36 scans and detects the surface roughness of the object 48, and the slide device 43 is operated to slide the object 48 in the direction of the arrow Y by a distance determined by the scanning interval Dy. The operator sets the number of scans n for performing the scanning detection of the surface roughness later. By setting this number n,
A signal for outputting the motor 45 (n-1) times is sent from the system controller 56 to the arrow Y-direction controller 62. Here, the sampling interval Δy in the arrow Y direction is determined. In addition, even if the size of the sample for detection is constant, the larger the number n of scans,
Detection points are randomly selected without bias from the entire surface of the object 48 to be measured, and more appropriate leveling can be performed in conformity with the fact that the entire surface to be measured is subject to attitude control. .

At this point, the start key is turned on to start the preliminary measurement. With the start of this preliminary measurement, the system controller 56 sends the arrow X direction controller 58
The output of the motor 37, that is, a signal for operating the scanning unit 38 is sent, and the detection data is sent from the detection unit 36 to the data memory 54 of the control unit 6. Therefore, the scanning unit 38 and the detecting unit 3 of the surface roughness meter 35
6, the data memory 54 takes in and stores the discrete data in the range of the distance Lx. The data is also sent to the judging section 64 via the counter 66, and the judging section 64 judges whether or not the data is within the measurable range of the detecting section 36. If it is determined that the result of the determination is not within the measurable range of the detection unit 36, the cancel signal output unit 65 deletes data that is not within the measurable range of the detection unit 36 and the number of the data. Are sent to the data memory 54 and the counter 66, respectively. In this manner, the value of the position of a point randomly taken from the measured surface of the measured object 38 is stored in the data memory 54 by the scanning detection. The number of data to be stored, that is, the size of a detection sample determined to be valid within the measurable range of the detection unit 36 by the determination unit 64 of the system controller 56 is the same as the size set by the setting unit 63. When the counter 66 determines that there is, the scanning / display panel 42 displays that fact.

At the time of this scanning detection, the slide device 43
Performs (n-1) times of slide operations,
The position j in the arrow Y direction 6 and the moving distance Dy in the arrow Y direction until the next scan detection are given by the equations shown in the flowchart of FIG. If the detection result exceeds the measurable range of the detection unit 36, that is, if an overrange state occurs sporadically, the system controller 56 sets a particularly high point or a special point on the surface of the object 48 to be measured. It is determined that a peculiar point which is a low point is detected, and scanning detection is continued. On the other hand, when the over-range state continues continuously for a predetermined number of times, the system controller 56 determines that the over-range has occurred due to the inclination of the surface of the object 48 to be measured and sends an instruction to the arrow X-direction controller 58. A signal for interrupting the detection scan is sent, and a signal for performing the first attitude control based on the data stored in the data memory 54 is sent to each section of the control means 6. The leveling device 1 tentatively controls the posture of the device under test 48 so as to take a posture in a range that can be detected by the detection unit 36, and further continues to take a desired posture after the provisional posture control. Perform attitude control.

In addition, when exceeding the limit of the slide device 43, if the number of data obtained by the detection has not reached the set value, the position of the object 48 to be detected in the direction of the arrow Y can be detected. Slide to,
Scan detection is continued so that the number of data reaches the initially set detection sampling size.

By the above preliminary measurement, an average plane is obtained based on a plurality of data obtained from the coordinate measurement. The average plane determined here is regarded as the plane of the measured surface of the measured object 48. Note that the average plane is set as Z = a + bX + cY, and the constants b and c are obtained from this. Then, from the constants b and c, the inclination components of the average plane in the arrow X direction and the arrow Y direction with respect to the arrow Z direction are obtained. That is, a component λ in the direction of the arrow X and a component μ in the direction of the arrow Y of the direction cosine vector of the average plane Z are obtained. The data stored in the data memory 54 of the control means 6 is transmitted to the system controller 5
6 is sent to the average inclination angle calculation section 55, and the inclination angle of the average plane is obtained. Here, the inclination components of the average plane in the arrow X direction and the arrow Y direction with respect to the arrow Z direction are obtained.

Here, the system controller 56 sends a signal for calculating the output amounts of the motors 25 and 30 of the variable means to the output amount calculating section 53 of the motors 25 and 30, and in the case of the automatic function ("h" in FIG. 9). = 0 ”) is the motor 3
The signal 9 is output and the slide unit 41 is operated to send a signal for raising the detecting unit 36 by 10 mm from the measured object 48 to the arrow Z direction controller 60, and the detecting unit 36 moves up by 10 mm in the arrow Z direction.

Here, the leveling function of the leveling device 1 operates, and the inclination correction (attitude control) of the measured surface of the measured object 48 is executed. Output amount calculation unit 5 for motors 25 and 30
3, the system controller 56 sends the motor 25 and the motor 30 to the controller 50 of the motor 25 and the controller 52 of the motor 30.
Are sent to output a predetermined amount.

The variable means 4 and the variable means 5 are operated by the outputs of the motor 25 and the motor 30, respectively. That is, the slider 21 in the variable means 4 and the slider 24 in the variable means 5 slide by a predetermined distance in the direction of arrow C, and by this sliding, the slider 21 engages with the spherical roller 19 and the slider 24 engaged with the slider 21. Each of the spherical rollers 22 moves in the direction of arrow D by a predetermined amount, and the distance between the substrate 2 supported by the support portion 8 and the mounting member 3 and the position of the substrate 2 supported by the support portion 9 are set. The distance between the members 3 changes. On the other hand, the distance between the substrate 2 and the mounting member 3 supported by the support unit 7 does not change and remains constant.
By determining the support state of the three support portions 7, 8, and 9, the inclination correction (posture control) of the mounting member 3 with respect to the substrate 2 is performed, and as a result, the inclination correction of the measured surface of the DUT 48 is performed. Will be.

When the mounting member 3 is within the limit, the inclination correction is repeated so that the degree of the correction obtained by the above-mentioned inclination correction becomes as desired by the measurer, and the object to be measured 48 is in a desired posture. Get a state. Of course, the surface to be tilt-corrected and the surface whose tilt has been corrected are average surfaces. The measurer can use the surface roughness meter 35 to measure the surface roughness of the object 48 in a desired posture.

As described above, the leveling apparatus 1 scans the tilt correction target surface of the device under test 48 to obtain an average surface from a plurality of points taken at random, and performs tilt correction on the obtained average surface. Since the tilt correction is performed, the tilt correction is performed on the entire surface, and more appropriate tilt correction is obtained as compared with the case where the tilt correction is performed on a specific portion of the surface.

After the initial posture is obtained, a substantially desired posture can be obtained by one posture control, and the time required for the whole posture control is short. In addition, since the surface in the desired posture by the posture control is the average surface, when performing surface roughness measurement or surface processing, the target surface is the average surface after the posture control, and the target surface There is also obtained an effect that more appropriate measurement and processing are performed for the whole.

Now, in the operation of the leveling device 1,
Even if the detection result exceeds the detectable range of the detection unit 36 at the time of scanning detection for obtaining the initial posture, the detection result exceeding the detectable range is canceled by the operation of the system controller 56. Is done. And then
By using the detection result within the detectable range obtained up to that point without discarding it, the initial posture is obtained and the work of scanning detection is not repeated from the beginning, so the time required for posture control is shortened. And it is easy to handle. In addition, the object 36 is less likely to be damaged by the contact-type surface roughness meter 35.

In the leveling apparatus 1, a judgment unit 64 for judging whether or not the detection result is within a detectable range and a counter 66 for counting the size of the sample for detection are provided by the data memory 54 and the system controller 56. Although provided between them, the arrangement place is not limited, and for example, it may be interposed between the detection unit 36 and the data memory 54.
The cancel signal output unit 65 may be provided between the determination unit 64 and the data memory 54.

The setting unit 63 for setting the size of the detection sample may be a rewritable unit having a RAM, or a unit having a ROM so as to keep the size of the detection sample constant. There may be.

In addition, in the use of the leveling apparatus 1 described above, the contact-type surface roughness meter 35 is used to determine the initial posture of the surface of the object 48 to be measured. A scale may be used. Also, when obtaining the orientation of the average surface from the measured surface, if the scanning means to randomly take a point on the measured surface, if the measuring means can determine the position of the point,
Other than the surface roughness meter may be used.

[0042]

According to the present invention, when the detection result exceeds the detectable range and exceeds the detectable range in the scan detection for obtaining the initial posture, the detection result exceeding the detectable range is obtained. By configuring to cancel, when overrange occurs, the time required for attitude control can be shortened as compared with the case where scanning detection is restarted from the beginning, and the leveling device is easier to handle. .

[Brief description of the drawings]

FIG. 1 is a perspective view showing an embodiment of the present invention.

FIG. 2 is a plan view of the embodiment shown in FIG. 1 with a mounting member removed;

FIG. 3 is a sectional view taken along line II of FIG. 1;

FIG. 4 is a side view of the embodiment shown in FIG.

FIG. 5 is an exploded perspective view of a main part of a first support portion of the embodiment shown in FIG. 1;

FIG. 6 is an explanatory diagram showing a control system including the configuration of the control means of the embodiment shown in FIG. 1 and operating when operated together with the surface roughness meter and the slider device.

FIG. 7 is an overall perspective view when the embodiment shown in FIG. 1 is operated together with a surface roughness meter and a slider device.

FIG. 8 is a flowchart showing an outline of an operation sequence when the embodiment shown in FIG. 1 is operated together with the surface roughness meter and the slider device.

FIG.

FIG.

FIG.

FIG. 12 is a flowchart showing an operation sequence when the embodiment shown in FIG. 1 is operated together with the surface roughness meter and the slider device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Leveling device 2 Substrate 3 Placement member 4,5 Movable means 6 Control means 7,8,9 Support part (support means) 54 Data memory 63 Setting part 64 Judgment part 65 Cancel part 66 Counter

Continuation of the front page (56) References JP-A-62-274201 (JP, A) JP-A-62-138201 (JP, U) JP-A-62-15802 (JP, U) (58) Fields investigated (Int) .Cl. ⁷ , DB name) G05D 3/00-3/20 G05B 11/00-13/04

Claims (3)

(57) [Claims] (1)A substrate and a mounting member for mounting an object to be mounted
And a substrate and a mounting member interposed between the substrate and the mounting member.
Supporting means for supporting the substrate,
Variable means for changing the attitude of the mounting member, and the appearance of the mounting member
The power control surface is continuously scanned and detected.
Detection that obtains location information from multiple randomly selected points
Means based on the detection results of the plurality of points obtained by the detection means.
Calculating means for determining the attitude of the attitude control surface with respect to the substrate
And a control means for setting the attitude obtained by the arithmetic means to a desired attitude.
And a leveling device comprising: Storage means for storing the detection result of each point obtained by the detection means
When, During continuous scanning detection by the detection means,
Overrange beyond the detectable range
If it is less than the specified value, the detection of a unique point on the attitude control surface is performed.
And that the storage means
At least the detection result within the detectable range of
Detection continues until a count is obtained, while the overrange is
If it continues for a predetermined number of times or more,
Judgment method that interrupts detection by judging that it is caused by inclination
Steps and And the calculating means is over by the judging means.
Range is generated by detecting a unique point on the attitude control surface
If it is determined that there is
Later, within the detectable range of the detection means obtained in the storage means
The attitude of the attitude control surface is determined based on a certain detection result.
On the other hand, the overrange of the controlled posture
If it is determined that the tilt is caused, stop the detection.
After that, it is within the detectable range of the detecting means obtained in the storage means.
The attitude of the attitude control surface based on the detection result The control means determines that the overrange is determined by the determination means.
Is determined to be caused by a unique point on the attitude control surface
The attitude of the attitude control surface obtained by the arithmetic means,
The desired posture, while the judgment means overrange
Is determined to be caused by the inclination of the attitude control surface
In this case, the posture obtained by the calculation means is detected by the detection
Leveling characterized by the provisional posture of the enclosure
apparatus. (2)The leveling device according to claim 1,
hand, The overrange is determined by the judging means so that the inclination of the posture control surface is
When it ’s caused by a slope If it is determined, the control means
Provisional attitude control that can be detected by the detection means
After control, detection by the detection means and appearance by the control means
Force control, the posture obtained by the arithmetic means is a desired posture.
A leveling device, which repeats until it reaches the end. (3)The leveling device according to claim 1 or 2.
And Attitude control required to determine the attitude of the attitude control surface
Setting means for setting the number of points on the surface; Of the detection results obtained in the storage means,
A cow that counts the number of detection results within the available range
Counter means, And the overrange is controlled by the determination means.
When it is determined that it is caused by a peculiar point of your face,
The count number of the counter means reaches the set number of the setting means.
If not, at least the counter means
The detecting means until the number of counts reaches the set number of the setting means.
Detection on the other hand, on the other hand,
The detection is terminated or continued.
Leveling device.