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JP3252430B2 - Manufacturing method of lead wire for hermetic terminal - Google Patents
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JP3252430B2 - Manufacturing method of lead wire for hermetic terminal - Google Patents

Manufacturing method of lead wire for hermetic terminal

Info

Publication number
JP3252430B2
JP3252430B2 JP05972392A JP5972392A JP3252430B2 JP 3252430 B2 JP3252430 B2 JP 3252430B2 JP 05972392 A JP05972392 A JP 05972392A JP 5972392 A JP5972392 A JP 5972392A JP 3252430 B2 JP3252430 B2 JP 3252430B2
Authority
JP
Japan
Prior art keywords
lead wire
wire
manufacturing
balance
terminal according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP05972392A
Other languages
Japanese (ja)
Other versions
JPH05226018A (en
Inventor
和直 工藤
昭寿 田上
尚志 樋口
明 津田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP05972392A priority Critical patent/JP3252430B2/en
Publication of JPH05226018A publication Critical patent/JPH05226018A/en
Application granted granted Critical
Publication of JP3252430B2 publication Critical patent/JP3252430B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Connections Arranged To Contact A Plurality Of Conductors (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】この発明は水晶振動子やトランジ
スタ等に使用される気密端子用リード線の製造方法に関
する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a lead wire for a hermetic terminal used for a crystal oscillator, a transistor, and the like.

【0002】[0002]

【従来の技術】図4に示すように水晶振動子は、気密構
造とするためにリード線11を金属外環12のリード線
挿入穴に挿入し、この穴とリード線11の隙間をガラス
(例えばホウケイ酸ガラス)13等を用いてシールして
いる。尚、この図において14は水晶片、15はキャッ
プである。
2. Description of the Related Art As shown in FIG. 4, in a quartz oscillator, a lead wire 11 is inserted into a lead wire insertion hole of a metal outer ring 12 to form an airtight structure. For example, sealing is performed using borosilicate glass 13 or the like. In this figure, 14 is a crystal blank and 15 is a cap.

【0003】上記の水晶振動子において、リード線11
とのガラス封止性を高めるためには図5に示すような工
程で表面処理がなされている。
In the above-described quartz oscillator, the lead wire 11
In order to improve the glass sealing property, a surface treatment is performed in a process as shown in FIG.

【0004】即ち、リード線となるコイル状の線材をカ
ットプレス(成型)し、次いで表面エッチングの工程で
塩化第2鉄等を用いて表面を0.1〜10.0μmの凹
凸にし、この凹凸面に封止工程にてホウケイ酸ガラスが
かみ込み封止性を良好にする方法が行われている。
[0004] That is, a coil-shaped wire material serving as a lead wire is cut and pressed (molded), and then the surface is made to have a roughness of 0.1 to 10.0 µm using ferric chloride or the like in a surface etching step. A method has been used in which a borosilicate glass bites into a surface in a sealing step to improve sealing properties.

【0005】この工程の場合、線材をプレス切断加工
(カットプレス)して複雑な形状になった部品をエッチ
ング処理するため、網状のケースに入れてバッチ処理す
る。
[0005] In this step, in order to subject a wire material to a complicated shape by press cutting (cut pressing), the wire material is put into a net-like case and batch-processed.

【0006】[0006]

【発明が解決しようとする課題】上記の加工方法の場
合、線が曲ったり、ひっかかったりするために不良品が
多くなる。又、バッチ処理のため、ケース内において、
線が重なっているところはうまくエッチングできないの
で、全部品を均一にエッチング処理することが不可能で
ある等の問題が生じ、得られた気密封止栓にバラツキが
見られる。
In the case of the above-mentioned processing method, the number of defective products increases because the wire is bent or caught. Also, for batch processing, in the case,
Since the portions where the wires are overlapped cannot be etched well, there arises a problem that it is impossible to uniformly etch all the parts, and the obtained hermetic sealing plug varies.

【0007】このため、図6に示すように、リード線材
を予めコイルの状態で表面エッチングして0.1〜1
0.0μm凹凸状としたのち、ワイヤーカット、ヘッダ
ー加工等のカットプレスを行ったのち、ガラス封止する
工程が実施されている。
For this reason, as shown in FIG. 6, the surface of the lead wire is etched in advance in the state of a coil by 0.1 to 1 mm.
After forming a 0.0 μm uneven shape, a process of performing a wire press, a header processing, and other cut presses, and then performing a glass sealing process is performed.

【0008】しかし、この方法もエッチングによって金
属表面に微細な凹凸ができるとともに、その凹凸部は活
性になっており、表面積も大きくなるため、凹部にエッ
チング後の洗浄液が残ったり、乾燥ドライを行っても凹
部の活性面が先に酸化したりして、カットプレス前に完
全に酸化して錆となり、正常なリード線とならないとい
う問題が生じている。
However, in this method, fine irregularities are formed on the metal surface by etching, and the irregularities are activated, and the surface area is increased. Therefore, a cleaning liquid after etching remains in the concave portions, or drying and drying are performed. However, there is a problem in that the active surface of the concave portion is oxidized first, and is completely oxidized to rust before the cut press, so that a normal lead wire is not obtained.

【0009】この発明の課題は、上記のような従来方法
の問題点に鑑みて、微細な凹凸が形成されてホウケイ酸
ガラスのかみ込みが良好であり、しかも錆の発生が殆ど
ない気密端子用リード線の製造方法を提供することであ
る。
SUMMARY OF THE INVENTION In view of the problems of the conventional method as described above, an object of the present invention is to provide an airtight terminal which has fine irregularities, has good borosilicate glass penetration, and hardly generates rust. An object of the present invention is to provide a method for manufacturing a lead wire.

【0010】[0010]

【課題を解決するための手段】上記の課題を解決するた
めに、この発明が講じた手段は、リード線は予め線材の
状態で連続的に槽中で化学的エッチング処理して表面に
R=0.1〜10μmの凹凸を有する長尺体としたの
ち、Hを含む高温炉において還元処理を施すことであ
る。
Means for Solving the Problems In order to solve the above-mentioned problems, the means taken by the present invention is that a lead wire is continuously subjected to a chemical etching treatment in a bath in the state of a wire material in advance, and the lead wire is formed on a surface thereof.
After forming a long body having irregularities of R = 0.1 to 10 μm , a reduction treatment is performed in a high-temperature furnace containing H 2 .

【0011】[0011]

【作用】この発明は上記した工程により、エッチング後
の塩化第2鉄液、塩酸液、又は洗浄液が多少残っても完
全に除去できる。又、エッチング後しばらく放置して多
少酸化が進んでいても還元処理されて正常なものにな
る。更に、この発明で処理したものは、その凹凸が均一
に活性化されるので部分的な錆の発生は見られない。
According to the present invention, according to the above-described steps, even if a ferric chloride solution, a hydrochloric acid solution, or a cleaning solution after etching slightly remains, it can be completely removed. Further, even if oxidation is slightly progressed after being left for a while after the etching, a reduction treatment is performed to become normal. Furthermore, in the case of the treatment according to the present invention, since the irregularities are uniformly activated, no partial rusting is observed.

【0012】[0012]

【実施例】以下、この発明の実施例を添付図面に基づい
て説明する。
Embodiments of the present invention will be described below with reference to the accompanying drawings.

【0013】図1乃至図3に示す実施例において、リー
ド線の材料として真空溶解又は大気溶解法により合金化
された50%Ni−Fe合金と29%Ni−17%Co
−Fe合金製のものを用意した。
In the embodiment shown in FIGS. 1 to 3, 50% Ni-Fe alloy and 29% Ni-17% Co alloyed by vacuum melting or air melting are used as the material of the lead wire.
-An alloy made of Fe was prepared.

【0014】又、他の例として42%Ni−6Cr−F
e合金、Fe−18%Cr合金も用意した。
Another example is 42% Ni-6Cr-F.
e alloy and Fe-18% Cr alloy were also prepared.

【0015】これらの成分を溶解してインゴットに成
型、鋳造後、線材圧延、伸線、軟化を繰り返し0.45
mmφのコイル状の線材1とした。この線材1の抗張力
は50〜90kg/mm2 であった。
After dissolving these components into an ingot, casting and casting, wire rolling, drawing and softening are repeated 0.45
This was a coiled wire rod 1 of mmφ. The tensile strength of the wire 1 was 50 to 90 kg / mm 2 .

【0016】このコイル状線材1を図2の符号2に示す
ように塩化第2鉄溶液槽(溶液の比重:35〜46ボー
メ,pH1以下)中を2〜10m/分で通過させ、次い
で水洗槽3、乾燥ライン4、並びにH2 還元炉5を順次
通過させて巻き取った。
The coiled wire 1 is passed through a ferric chloride solution tank (specific gravity of the solution: 35 to 46 Baume, pH 1 or less) at a rate of 2 to 10 m / min as shown by reference numeral 2 in FIG. Winding was performed by sequentially passing through the tank 3, the drying line 4, and the H 2 reduction furnace 5.

【0017】上記に於いて、2の塩化第2鉄槽は塩酸及
び水を調節して比重を42ボーメ,pHは1以下程度と
し、液温は30℃±5℃にコントロールした。又、H2
還元炉5は連続的にインライン中で処理してもよく、バ
ッチ処理として巻取工程後コイル状で行ってもよい。
In the above, the ferric chloride tank 2 was adjusted to a specific gravity of 42 Baume and a pH of about 1 or less by controlling hydrochloric acid and water, and the liquid temperature was controlled at 30 ° C. ± 5 ° C. Also, H 2
The reduction furnace 5 may be continuously processed in-line, or may be performed in a coil form after the winding step as a batch processing.

【0018】以下に各例について詳細に説明する。Hereinafter, each example will be described in detail.

【0019】例1 連続ラインの場合(図2) H2 を含む還元炉5は炉温を250℃〜1200℃とし
てH2 を5%以上残りをH2 又はArなどの不活性ガス
を有する炉を用いた。この炉は線材1の入口からH2
外に出る開放型である。ここで温度を250℃以上とし
たのは、時に200℃以下では線速2〜20m/分で連
続的に通過させた場合に線材表面に吸着した水分や塩鉄
をH2 と反応させて分解させる能力がないためで、40
0℃〜1000℃が最適である。
[0019] Example 1 In continuous line furnace having (Figure 2) inert gas remaining reducing furnace 5 of H 2 5% or more of furnace temperature as 250 ° C. to 1200 ° C. containing H 2 such as H 2 or Ar Was used. This furnace is of an open type in which H 2 exits from the inlet of the wire 1. The reason why the temperature is set to 250 ° C. or higher is that, when passing continuously at a linear speed of 2 to 20 m / min at a temperature of 200 ° C. or lower, water or salt iron adsorbed on the surface of the wire reacts with H 2 to decompose. 40
0 ° C to 1000 ° C is optimal.

【0020】炉温は1200℃以上でも効果は同じであ
るが、省エネルギーの面で適当でないので1200℃ま
でとした。ここでH2 を5%〜100%としたのはH2
の還元能力から4%以下では炉長を極めて長くする必要
があるので量産ラインとしてふさわしくないためであ
る。一般的には75%H2 〜100%H2 とするのが適
当である。
The effect is the same when the furnace temperature is 1200 ° C. or higher, but the temperature is set to 1200 ° C. because it is not appropriate in terms of energy saving. Here, H 2 is set to 5% to 100% because H 2
If the reduction capacity is 4% or less, the furnace length must be extremely long, which is not suitable for a mass production line. In general, it is appropriate to the 75% H 2 ~100% H 2 .

【0021】又、炉中の通過時間を2秒以上としたのは
2秒以下1秒未満ではH2 による還元能力が不十分にな
るからである。
The reason why the passage time in the furnace is 2 seconds or more is that if the time is 2 seconds or less and 1 second or less, the reducing ability by H 2 becomes insufficient.

【0022】例2 バッチ処理の場合(図3) 線材1を図2に示す塩化第2鉄液槽2を通過させた後、
コイル状に巻取って、コイル状線材6とし、これをバッ
チ炉として、H2 5%以上を含むポット型焼鈍炉7で還
元処理する。炉中にはH2 を5%以上にして外側の炉体
8により室温より昇温して250℃以上に設定した温度
にしたのち炉冷した。
Example 2 In the case of batch processing (FIG. 3) After passing the wire 1 through the ferric chloride liquid tank 2 shown in FIG.
It is wound into a coil to form a coiled wire 6, which is used as a batch furnace and reduced in a pot-type annealing furnace 7 containing 5% or more of H 2 . The oven was cooled later furnace to a temperature set above 250 ° C. the temperature was raised from room temperature outside of the furnace body 8 and of H 2 5% or more.

【0023】温度及びH2 の効果は前記した例1と同じ
である。ここで、バッチ炉は炉中に入れ、取り出すまで
に数十分から数時間を要するのはその構造からやむを得
ぬ時間である。
The effects of temperature and H 2 are the same as in Example 1 above. Here, it takes tens of minutes to several hours to put the batch furnace into the furnace and take it out, which is unavoidable time due to its structure.

【0024】[0024]

【発明の効果】この発明は上記のように予め線材の状態
で連続的にエッチング処理して表面に凹凸を有する長尺
体としたのち、H2 を含む高温炉において還元処理を施
すことを特徴とするものであるが、この発明方法を実施
した線材と、上記還元処理を施さない従来方法の線材と
を比較した。
As described above, the present invention is characterized in that a long body having irregularities on its surface is continuously subjected to etching in advance in the state of a wire as described above, and then subjected to a reduction treatment in a high-temperature furnace containing H 2. A comparison was made between a wire that had been subjected to the method of the present invention and a wire that had not undergone the above-described reduction treatment according to the conventional method.

【0025】線材は何れも29Hi−17Co−Feを
用いた。
Each of the wires used was 29Hi-17Co-Fe.

【0026】条件として塩化鉄2鉄溶液、比重:42ボ
ーメ、液温30℃、線速10m/分で表面粗さR=3〜
4μmとしたのちに水洗、乾燥ブロアー通過後、H2
75%、N2 =25%のNH3 分解ガス炉、450℃に
して通過させ還元処理したこの発明の線材Aと、このよ
うな還元処理を施さなかった従来のままの線材Bとを約
30cmづつ吊下げ1日〜1ヶ月間空気中に於いて暴露
テストを行った(常温で湿度60%)。n=10本づつ
As conditions, a ferrous chloride solution, specific gravity: 42 Baume, a liquid temperature of 30 ° C., a linear velocity of 10 m / min, and a surface roughness R = 3 to
After washing with water and passing through a dry blower after 4 μm, H 2 =
A wire A of the present invention, which has been passed through a 75% N 2 = 25% NH 3 decomposition gas furnace at 450 ° C. and subjected to a reduction treatment, and a conventional wire B not subjected to such a reduction treatment are about 30 cm in length. An exposure test was performed in the air for one day to one month under hanging conditions (60% humidity at room temperature). n = 10 each

【0027】上記の実験の結果、従来の線材Bは1日〜
3日で赤く発錆した。これに対してこの発明方法により
処理した線材Aは10日目にやや発錆し、1ヶ月ほどで
赤く錆が発生した。
As a result of the above-mentioned experiment, the conventional wire rod B has been
Rusted in 3 days. On the other hand, the wire A treated by the method of the present invention slightly rusted on the 10th day, and red rust was generated in about one month.

【0028】上記で明らかなように、この発明の処理方
法は錆の発生が遅いので気密端子用リード線として用い
た場合、気密性の良好なリード線となる。
As is clear from the above, the treatment method of the present invention produces a good hermetic seal when used as a lead wire for hermetic terminals because rust is generated slowly.

【図面の簡単な説明】[Brief description of the drawings]

【図1】実施例を示すブロック図。FIG. 1 is a block diagram showing an embodiment.

【図2】実施例の一部縦断側面図。FIG. 2 is a partially longitudinal side view of the embodiment.

【図3】他の実施例の縦断側面図。FIG. 3 is a longitudinal sectional side view of another embodiment.

【図4】水晶振動子の縦断正面図。FIG. 4 is a vertical sectional front view of the crystal unit.

【図5】従来方法のブロック図。FIG. 5 is a block diagram of a conventional method.

【図6】他の従来方法のブロック図。FIG. 6 is a block diagram of another conventional method.

【符号の説明】[Explanation of symbols]

1 線材 2 塩化第2鉄溶液槽 3 水洗槽 4 乾燥ライン 5 H2 還元炉Reference Signs List 1 wire rod 2 ferric chloride solution tank 3 washing tank 4 drying line 5 H 2 reduction furnace

───────────────────────────────────────────────────── フロントページの続き (72)発明者 津田 明 兵庫県伊丹市昆陽北一丁目1番1号 住 友電気工業株式会社 伊丹製作所内 (56)参考文献 特開 平5−5170(JP,A) 特開 平4−3970(JP,A) 特開 平3−274232(JP,A) (58)調査した分野(Int.Cl.7,DB名) H01R 9/16 H01L 23/48 H01R 43/16 ──────────────────────────────────────────────────続 き Continuation of the front page (72) Inventor Akira Tsuda 1-1-1, Kunyokita, Itami-shi, Hyogo Sumitomo Electric Industries, Ltd. Itami Works (56) References JP-A-5-5170 (JP, A JP-A-4-3970 (JP, A) JP-A-3-274232 (JP, A) (58) Fields investigated (Int. Cl. 7 , DB name) H01R 9/16 H01L 23/48 H01R 43 / 16

Claims (8)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 リード線貫通用の穴を有する金属外環の
該穴に挿入して、ガラスを介して気密絶縁封止するリー
ド線において、該リード線は予め線材の状態で連続的に
槽中で化学的エッチング処理して表面にR=0.1〜1
0μmの凹凸を有する長尺体としたのち、Hを含む高
温炉において還元処理を施すことを特徴とする気密端子
用リード線の製造方法。
1. A lead wire which is inserted into the hole of a metal outer ring having a hole for penetrating a lead wire and hermetically insulated and sealed through glass, wherein the lead wire is continuously formed in a wire state in advance.
R = 0.1-1 on the surface by chemical etching in a bath
A method for manufacturing a lead wire for an airtight terminal, comprising: forming a long body having irregularities of 0 μm, and performing a reduction treatment in a high-temperature furnace containing H 2 .
【請求項2】 上記リード線はHを5〜100%、残
りN、又はArを含む高温炉で処理することを特徴と
する請求項1記載の気密端子用リード線の製造方法。
2. The method for manufacturing a lead wire for a hermetic terminal according to claim 1, wherein said lead wire is treated in a high-temperature furnace containing 5 to 100% of H 2 and the balance of N 2 or Ar.
【請求項3】 上記リード線はバッチ炉を使用し、リー
ド線の温度を250℃〜700℃、処理時間10分以上
の還元処理を施すことを特徴とする請求項1記載の気密
端子用リード線の製造方法。
3. The lead wire uses a batch furnace.
Wire temperature is 250 ℃ ~ 700 ℃, treatment time is more than 10 minutes
The method for producing a lead wire for an airtight terminal according to claim 1 , wherein a reduction treatment is performed .
【請求項4】 上記リード線は開放型連続処理焼鈍炉を
使用し、リード線の温度を400℃〜1200℃、処理
時間2秒以上の還元処理を施すことを特徴とする請求項
1記載の気密端子用リード線の製造方法。
4. The lead wire is an open type continuous processing annealing furnace.
Use, the temperature of the lead wire is 400 ℃ ~ 1200 ℃, treatment
2. The method for manufacturing a lead wire for an airtight terminal according to claim 1, wherein a reduction treatment is performed for a time of 2 seconds or more .
【請求項5】 上記リード線はNi40%〜52%、添
加元素として1.0%以下のSi、Mn、Ti、Al、
Cを含有し、残部のFeの組成からなることを特徴とす
る請求項1記載の気密端子用リード線の製造方法。
5. The lead wire according to claim 1, wherein said lead wire comprises 40% to 52% of Ni, and 1.0% or less of an additive element such as Si, Mn, Ti, Al,
2. The method for producing a lead wire for a hermetic terminal according to claim 1, wherein C is contained and the balance is Fe.
【請求項6】 上記リード線はNi27%〜30%、C
o17%〜20%、添加元素として1.0%以下のS
i、Mn、Ti、Al、Cを含有し、残部のFeの組成
からなることを特徴とする請求項1記載の気密端子用リ
ード線の製造方法。
6. The lead wire according to claim 1, wherein said lead wire comprises 27% to 30% of Ni,
o 17% to 20%, 1.0% or less of S as an additive element
2. The method for manufacturing a lead wire for a hermetic terminal according to claim 1, comprising i, Mn, Ti, Al, C, and a balance of Fe.
【請求項7】 上記リード線はCr16%〜20%、添
加元素として1.0%以下のSi、Mn、Ti、Cを含
有し、残部のFeの組成からなることを特徴とする請求
項1記載の気密端子用リード線の製造方法。
7. The lead wire according to claim 1, wherein the lead wire contains 16% to 20% of Cr, 1.0% or less of additional elements of Si, Mn, Ti, and C, and has a balance of Fe. A method for producing a lead wire for an airtight terminal as described in the above.
【請求項8】 上記リード線は、Ni40%〜45%、
Cr4%〜8%、添加元素として1.0%以下のSi、
Mn、Ti、Cを含有し、残部のFeの組成からなるこ
とを特徴とする請求項1記載の気密端子用リード線の製
造方法。
8. The method according to claim 1 , wherein the lead wire is 40% to 45% Ni.
Cr 4% to 8%, as an additive element 1.0% or less of Si,
2. The method for producing a lead wire for a hermetic terminal according to claim 1, wherein Mn, Ti, and C are contained and the balance is Fe.
JP05972392A 1992-02-13 1992-02-13 Manufacturing method of lead wire for hermetic terminal Expired - Fee Related JP3252430B2 (en)

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Application Number Priority Date Filing Date Title
JP05972392A JP3252430B2 (en) 1992-02-13 1992-02-13 Manufacturing method of lead wire for hermetic terminal

Publications (2)

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JPH05226018A JPH05226018A (en) 1993-09-03
JP3252430B2 true JP3252430B2 (en) 2002-02-04

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Publication number Priority date Publication date Assignee Title
JP2002343531A (en) * 2001-05-18 2002-11-29 Denso Corp Terminal molded part and method of manufacturing the same

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