JP3254297B2 - Cleaning equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cleaning apparatus for cleaning various parts and products such as electronic parts and mechanical parts, and more particularly to a cleaning apparatus for cleaning using a hydrocarbon-based cleaning agent. About.

[0002]

2. Description of the Related Art
As industrial cleaning agents for cleaning electronic components, mechanical components, and the like, CFC-based cleaning agents and chlorine-based solvents such as trichloroethane have been used. However, these industrial cleaning agents have the problem of causing destruction of the ozone layer, contamination of groundwater, and deterioration of the working environment.
Its use is being regulated.

Therefore, in recent years, a method using a hydrocarbon-based cleaning agent as another cleaning agent has been proposed. However, in a cleaning method using a hydrocarbon-based cleaning agent,
As the cleaning agent is used repeatedly, the cleaning agent is contaminated and the cleaning effect is reduced. Therefore, the cleaning agent in the cleaning device needs to be updated at a predetermined pitch. In order to replace the cleaning agent, the operation of the cleaning device must be stopped, and there is a problem that the efficiency is reduced.

Further, for example, when a used cleaning agent extracted from a cleaning device is regenerated by using a regenerating device provided in another place and returned to the cleaning device for reuse, the used cleaning agent is extracted. In addition, there is a problem that a process such as transporting and mounting in a cleaning device is required, which is not only complicated but also increases the cost.

On the other hand, discarding the contaminated hydrocarbon-based cleaning agent is not only disadvantageous in terms of cost but also wastes resources and is not preferable.

In order to solve the above-mentioned problems, a method of purifying a detergent by distillation and repeatedly using the same has been proposed and implemented. Usually, a low-boiling dirt component such as water or a low-boiling solvent is used. There is a problem that it is not always easy to sufficiently separate oil and grease and other high-boiling dirt components.

Further, a washing apparatus in which a distilling device is attached to each of a plurality of washing tanks has also been proposed. However, attaching a distilling device to each washing tank causes an increase in manufacturing cost and is inefficient. There is a problem.

[0008] Further, in the cleaning apparatus provided with the distilling apparatus as described above, when the distillation is performed at normal pressure, the boiling point (ie, the operating temperature) is increased, and thus the cleaning agent is deteriorated. In addition, there is a problem that the danger of fire occurrence increases as the operating temperature increases.

The present invention has been made to solve the above problems, and efficiently maintains a hydrocarbon-based cleaning agent in a clean state having a predetermined cleaning effect without requiring a complicated structure. It is another object of the present invention to provide a cleaning apparatus capable of continuously performing stable cleaning.

[0010]

In order to achieve the above object, a cleaning apparatus according to the present invention comprises a cleaning tank for cleaning an object to be cleaned at a temperature below a flash point using a hydrocarbon-based cleaning agent;
A drying tank for drying the cleaning object by supplying the drying object gas after supplying the cleaning object after the cleaning, and a cleaning agent supplied to the following vacuum distilling device, and a low-boiling-point soil component in the cleaning agent. A vacuum pre-heater for evaporating and separating the low-boiling-point contaminant component, which is preheated by the pre-heater, and continuously vacuum-distilling the cleaning agent, thereby collecting the distillate as a regenerated cleaning agent and cleaning the cleaning agent. And a vacuum distilling device for separating the high boiling point dirt component as a residue.

In addition, two or more cleaning tanks are arranged in series so that at least two or more stages of cleaning can be performed, and the preheater and the vacuum distiller perform preheating and vacuum distillation, respectively. It is characterized by being provided one by one so that it can be performed in a place.

In the cleaning apparatus of the present invention, a cleaning tank having functions such as ultrasonic vibration, jet agitation, vibration agitation, and shower rinsing can be used as the cleaning tank to improve the cleaning power.

[0013]

In the cleaning apparatus of the present invention, the object to be cleaned is cleaned in the cleaning tank with a hydrocarbon-based cleaning agent. On the other hand, the cleaning agent containing the dirt component used in the cleaning tank is preheated in a preheater, and low-boiling dirt components such as water and a low-boiling solvent are evaporated and separated. The cleaning agent, which has been preheated in the preheater and the low-boiling-point dirt component has been evaporated and separated, is purified by continuous vacuum distillation in a vacuum distilling device, and the distillate is recovered as a regenerated cleaning agent. The high-boiling dirt components therein are separated as a residue. In this way, after evaporating and separating the low boiling point dirt component by the preheater, by performing the vacuum distillation with the vacuum still,
The cleaning agent can be efficiently distilled and purified.

Therefore, the hydrocarbon-based cleaning agent is maintained in a clean state having a predetermined cleaning effect without stopping the operation of the cleaning device and replacing the cleaning agent entirely, and is continuously stable. Cleaning can be performed.

Further, since the distillation of the cleaning agent is performed under vacuum (reduced pressure), the boiling point (ie, the operating temperature) is lower than in the case where distillation is performed at normal pressure, and deterioration of the cleaning agent due to heat is prevented. In addition, since the operating temperature is low, it is possible to reduce the risk of fire occurrence and improve safety.

When two or more washing tanks are arranged in series so that at least two or more washing steps can be performed, preheating and vacuum distillation can be performed at one place. By arranging one preheater and one vacuum distiller as described above, the configuration can be simplified and the manufacturing cost can be reduced as compared with the case where the distillers are arranged in each of a plurality of washing tanks. .

[0017]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram showing a configuration of a cleaning apparatus according to one embodiment of the present invention.

In the cleaning apparatus of this embodiment, the cleaning tank 1a for rough cleaning, the cleaning tank 1b for medium cleaning, and the cleaning tank 1c for fine cleaning, which are connected in series, and the cleaned object to be cleaned are ventilated. A drying tank 2 for drying and a cooling tank 3 for cooling an object to be cleaned dried in the drying tank 2 are housed in an apparatus body (case) 4.

Each of the cleaning tanks 1a, 1b, and 1c has a cooling jacket (not shown) so that the cleaning can be performed at a temperature lower than the flash point of the cleaning agent. It is arranged. In addition, the cleaning tank 1a for rough cleaning is provided with a circulating filter 8 for removing solid contaminants mixed in the cleaning agent and a jet stirring nozzle 20 for improving the cleaning power. An ultrasonic vibration device 14 is provided in the cleaning tank 1b for cleaning in order to improve the cleaning power.

Further, a blower 5 for circulating and supplying the drying gas to the drying tank 2 and a heater 6 for heating the drying gas by steam are accommodated in the apparatus main body 4. The drying tank 2 is configured so that a predetermined amount of the drying gas is discharged out of the system so that the concentration of the cleaning agent vapor in the drying gas becomes lower than the explosion lower limit.

Further, the apparatus main body 4 is provided with an exhaust means (air blower) 7 for exhausting the cleaning agent vapor evaporated in the cleaning step and the drying step from the apparatus main body 4. The exhaust means 7 can be specifically provided by, for example, attaching it to an exterior panel (not particularly shown) of the apparatus main body 4.

On the outside of the apparatus main body, there is provided a vacuum distilling device 9 for purifying the cleaning agent containing the dirt component used for cleaning in the cleaning tanks 1a, 1b and 1c by continuously vacuum distilling the same. A preheater 10 for preheating the cleaning agent supplied to the vacuum still 9 is provided. The vacuum still 9 includes an evaporator 11, a rectifying tower 12, a condenser 13, a forced circulation pump 21, and a vacuum pump 22.

Next, the operation in the case where the object to be cleaned is cleaned by using the cleaning apparatus configured as described above will be described. When the object to be cleaned is cleaned using the cleaning apparatus of this embodiment, a cleaning jig (for example, a container formed of a wire mesh) 15 containing a plurality of objects to be cleaned is cleaned in the cleaning tank 1a for coarse cleaning. Washing is performed by dipping in the agent. Next, the cleaning jig 15 in which the object to be cleaned is stored,
After being transferred from the cleaning tank 1a for rough cleaning to the cleaning tank 1b for medium cleaning and being subjected to intermediate cleaning, the wafer is further transferred to the cleaning tank 1c for fine cleaning, where the fine cleaning is performed.

Then, the cleaning jig 15 containing the object to be cleaned is transferred to the drying tank 2, and the drying gas heated in the heater 6 is circulated and supplied to the drying tank 2 by the blower 5, thereby providing the cleaning object. The thing is dried. Thereafter, the cleaning jig 15 containing the object to be cleaned is moved from the drying tank 2 to the cooling tank 3.
The cooling gas is supplied (a gas before being sent to the heater 6 and heated and circulated) used for drying discharged from the drying tank 2 to be cooled (gradually cooled).

On the other hand, the cleaning agent is withdrawn from the cleaning tank 1a at a predetermined ratio and sent to the preheater 10, where the low-boiling dirt components such as water and low-boiling solvents are evaporated and separated by the preheater 10.
It is sent to the vacuum still 9 and vacuum distilled. Then, the distillate condensed in the condenser 13 is recovered as a regenerating cleaning agent, while the high-boiling dirt component is separated as a residue in the vacuum distiller 9. As described above, after the low-boiling-point contaminant components are evaporated and separated by the preheater 10 and then vacuum-distilled by the vacuum distilling device 9, the cleaning agent can be efficiently distilled and purified.

The regenerated cleaning agent recovered as described above is circulated and supplied to the cleaning tank 1c for fine cleaning.
Part of the cleaning agent in the cleaning tank 1c overflows and flows into the cleaning tank 1b for intermediate cleaning, and further, part of the cleaning agent in the cleaning tank 1b overflows and the cleaning tank 1 for coarse cleaning.
flows into a.

By purifying (regenerating) and circulating the cleaning agent in this manner, the cleaning agent is maintained in a clean state having a predetermined cleaning effect without replacing the entire cleaning agent. This makes it possible to continuously and stably perform washing.

Further, since the distillation of the cleaning agent is performed under a vacuum (reduced pressure), the boiling point is lower than in the case where the distillation is performed at normal pressure, so that the deterioration of the cleaning agent due to heat can be prevented. At the same time, since the operating temperature is lowered, it is possible to reduce the risk of fire occurrence and improve safety.

In the cleaning apparatus of the above embodiment,
While three washing tanks 1a, 1b, and 1c are arranged in series so that a plurality of washing steps (multi-stage washing) can be performed, only one vacuum distillation unit 9 and one preheating unit 10 are arranged. Since preheating and vacuum distillation are performed at one location, the overall configuration of the apparatus can be simplified as compared to the case where a plurality of washing tanks are each provided with a distilling apparatus, thereby reducing manufacturing costs. become.

In the above embodiment, three washing tanks 1
Although the case where a, 1b, and 1c are arranged in series has been described, in the cleaning apparatus of the present invention, the number of cleaning tanks (the number of cleaning stages) is not particularly limited, and either one-stage cleaning or multiple-stage cleaning is performed. It is also possible to employ.

In the above embodiment, the case where the vacuum distilling device 9 is disposed outside the apparatus main body 4 has been described. However, the vacuum distilling device 9 may be configured to be housed in the apparatus main body 4. is there.

In other respects, the present invention is not limited to the above-described embodiment. The scope of the present invention relates to the structure of a washing tank, a drying tank and a cooling tank, the specific structure of a vacuum still, and the like. Within the above, various application modifications can be made.

[0033]

As described above, the cleaning device of the present invention is
A vacuum distilling device that continuously vacuum-distills a cleaning agent containing a dirt component used in the cleaning tank; and a preheater that preheats the cleaning agent supplied to the vacuum distilling device. After evaporating and separating low boiling point dirt components in the agent,
Distillation is performed in a vacuum still, and the distillate is recovered as a regenerative cleaning agent, and high-boiling dirt components in the cleaning agent are separated as a residue, so that the cleaning agent can be efficiently distilled and purified. It is possible to continuously and stably perform cleaning while maintaining the cleaning agent efficiently in a clean state having a predetermined cleaning effect without stopping the operation of the apparatus and replacing the cleaning agent entirely. It becomes possible.

Further, since the distillation of the cleaning agent is performed under vacuum (reduced pressure), the boiling point is lower than in the case where distillation is performed at normal pressure, and the deterioration of the cleaning agent due to heat can be prevented. Since the operating temperature is lower, the risk of fire occurrence can be reduced and safety can be improved.

When two or more washing tanks are arranged in series so that at least two or more washing tanks can be washed, preheating and vacuum distillation can be performed at one place. In the case where one preheater and one vacuum distilling device are arranged as described above, the configuration can be simplified and the manufacturing cost can be reduced as compared with a case where a distilling device is arranged in each of a plurality of washing tanks. Become.

[Brief description of the drawings]

FIG. 1 is a diagram showing a configuration of a cleaning apparatus according to one embodiment of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1a, 1b, 1c Washing tank 2 Drying tank 3 Cooling tank 4 Main unit 5 Blower 6 Heater 7 Exhaust air 8 Circulating filter 9 Vacuum distillation apparatus 10 Preheater 11 Evaporator 12 Rectification tower 13 Condenser 20 Jet stirring nozzle 21 Forced circulation pump 22 Vacuum pump

Claims (2)

(57) [Claims] 1. A cleaning tank for cleaning an object to be cleaned at a temperature below the flash point using a hydrocarbon-based cleaning agent, and an object to be cleaned by supplying the object to be cleaned after cleaning and supplying a drying gas. A drying tank for drying the cleaning agent supplied to the following vacuum distilling device, and a preheating device for evaporating and separating low boiling point dirt components in the cleaning agent. A vacuum distilling device that continuously collects the fraction as a regenerated cleaning agent by continuously vacuum-distilling the separated cleaning agent, and separates a high-boiling-point dirt component in the cleaning agent as a residue. Characterized cleaning equipment. 2. The washing tank is provided in series with two or more washing tanks so that at least two or more washing stages can be performed, and the preheater and the vacuum distilling unit perform preheating and vacuum distillation respectively. A cleaning device, wherein one cleaning device is provided so that the cleaning can be performed at a location.