JP3264972B2 - Method for optically recognizing a structure containing aluminum nitride sintered body as a component - Google Patents
Method for optically recognizing a structure containing aluminum nitride sintered body as a componentInfo
- Publication number
- JP3264972B2 JP3264972B2 JP10291692A JP10291692A JP3264972B2 JP 3264972 B2 JP3264972 B2 JP 3264972B2 JP 10291692 A JP10291692 A JP 10291692A JP 10291692 A JP10291692 A JP 10291692A JP 3264972 B2 JP3264972 B2 JP 3264972B2
- Authority
- JP
- Japan
- Prior art keywords
- aluminum nitride
- sintered body
- nitride sintered
- optically recognizing
- component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 title claims description 39
- 238000000034 method Methods 0.000 title claims description 35
- 239000000758 substrate Substances 0.000 claims description 41
- 239000000470 constituent Substances 0.000 claims description 5
- 238000000862 absorption spectrum Methods 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 description 22
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical group [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 19
- 239000000463 material Substances 0.000 description 16
- 238000005219 brazing Methods 0.000 description 14
- 238000004040 coloring Methods 0.000 description 14
- 238000007689 inspection Methods 0.000 description 6
- 229910000679 solder Inorganic materials 0.000 description 6
- 238000007639 printing Methods 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000006071 cream Substances 0.000 description 3
- 238000004042 decolorization Methods 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 238000005304 joining Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 238000007650 screen-printing Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000000975 dye Substances 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 239000000654 additive Substances 0.000 description 1
- 230000004397 blinking Effects 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000002070 germicidal effect Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
Landscapes
- Supply And Installment Of Electrical Components (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Sampling And Sample Adjustment (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、例えば、絶縁性基板を
窒化アルミニウム焼結体で構成した回路基板のように、
窒化アルミニウム焼結体を構成要素に含む構造体の形状
等を光学的に認識する窒化アルミニウム焼結体を構成要
素に含む構造体の光学的認識方法に関する。BACKGROUND OF THE INVENTION The present invention relates to, for example, a circuit board in which an insulating substrate is made of an aluminum nitride sintered body.
The present invention relates to a method for optically recognizing a structure including an aluminum nitride sintered body as a component that optically recognizes a shape and the like of the structure including the aluminum nitride sintered body as a component.
【０００２】[0002]
【従来の技術】近年、高温ペーストを焼き付けるハイブ
リットＩＣ用の基板や熱密度の高いプリント配線板等の
回路基板を構成する絶縁性基板の材料として、熱伝導率
が金属なみに高いとともに、電気的、機械的、物理的特
性にも勝れているセラミック材である窒化アルミニウム
焼結体が注目されている。2. Description of the Related Art In recent years, as a material for an insulating substrate constituting a circuit board such as a printed circuit board having a high heat density or a hybrid IC board for baking a high-temperature paste, the thermal conductivity is as high as that of a metal and the electrical conductivity is high. Attention has been focused on aluminum nitride sintered bodies, which are ceramic materials that excel in mechanical and physical properties.
【０００３】ここで、ハイブリットＩＣや回路基板の製
造あるいは検査を自動的に行う場合においては、基板に
形成されたプリントパターン等のパターンもしくは基板
に実装された部品の位置・形状等を光学的センサやビデ
オカメラを備えた画像処理装置等によって光学的に認識
することが行われる。すなわち、プリントパターンや実
装部品等の像をビデオカメラ等によって取り込み、所定
の画像処理を施してそれらの形状や位置の計測もしくは
それら相互の比較又はそれらと基準パターンとの比較等
を行いつつ部品の実装や検査を行う。Here, in the case of automatically manufacturing or inspecting a hybrid IC or a circuit board, an optical sensor is used to detect the pattern such as a printed pattern formed on the board or the position / shape of a component mounted on the board. Optical recognition is performed by an image processing apparatus equipped with a video camera. That is, an image of a printed pattern, a mounted component, or the like is captured by a video camera or the like, and subjected to predetermined image processing to measure their shape and position or to compare them with each other or to compare them with a reference pattern. Perform mounting and inspection.
【０００４】この光学的認識の際には、認識対称物の光
学的特性が背景となる物体の光学的特性に近似している
と、コントラストがとれないために認識率が低下する場
合がある。例えば、上述の絶縁性基板を窒化アルミニウ
ム焼結体で構成したプリント配線板の場合にあっては、
絶縁性基板を構成する窒化アルミニウム焼結体が灰色系
であり、一方、この絶縁性基板上には回路パターンに沿
って灰色系のレジストあるいはクリームハンダ等が形成
される場合も多い。このような場合においては、灰色系
の背景（絶縁性基板）に灰色系のパターン（レジストや
クリームハンダ）が存在することになる。このため、こ
のパターンを光学的に認識することが困難となり、認識
率の低下をきたす。At the time of this optical recognition, if the optical characteristics of the object to be recognized are close to the optical characteristics of the object serving as the background, the contrast cannot be obtained and the recognition rate may be reduced. For example, in the case of a printed wiring board in which the above-described insulating substrate is formed of an aluminum nitride sintered body,
The aluminum nitride sintered body forming the insulating substrate is grayish, while a grayish resist or cream solder is often formed on the insulating substrate along the circuit pattern. In such a case, a gray pattern (resist or cream solder) exists on a gray background (insulating substrate). For this reason, it becomes difficult to optically recognize this pattern, and the recognition rate decreases.
【０００５】このような場合に従来は、以下のような方
法が試みられていた。In such a case, conventionally, the following method has been tried.
【０００６】(1) 絶縁性基板を構成する窒化アルミニウ
ム焼結体又はレジストやクリームハンダ等に染料等を添
加して両者のコントラスト比及び他の背景とのコントラ
スト比を大きくする。(1) A dye or the like is added to an aluminum nitride sintered body, a resist, a cream solder, or the like constituting an insulating substrate to increase the contrast ratio between the two and the background.
【０００７】(2) 絶縁性基板を構成する窒化アルミニウ
ム焼結体の下に拡散板を敷き、その下から光を照射して
透過照明を行い、コントラスト比を高める。(2) A diffusion plate is laid under the aluminum nitride sintered body constituting the insulating substrate, and light is irradiated from underneath to perform transmission illumination, thereby increasing the contrast ratio.
【０００８】(3) 背景からの反射光と認識対称物との反
射光の偏光の相違を利用してビデオカメラ等に偏光フィ
ルタを装着することによりコントラスト比を高める。(3) The contrast ratio is increased by attaching a polarizing filter to a video camera or the like by utilizing the difference in the polarization of the reflected light from the background and the reflected light between the object to be recognized.
【０００９】[0009]
【発明が解決しようとする課題】しかしながら、上述の
各方法には以下の問題点があった。However, the above-described methods have the following problems.
【００１０】(1) の方法 この方法は、処理が煩雑でコストがかさむとともに、染
料等の添加物は、各構成物にとっては一種の不純物であ
り、その添加により品質低下をまねくおそれがある。さ
らに、場合によっては、光学的認識処理の後に脱色をし
なければならない場合もあるが、脱色が困難であった
り、著しく煩雑である場合が少なからず生ずる。 Method (1) In this method, processing is complicated and cost is increased, and additives such as dyes are a kind of impurities for each component, and the addition thereof may cause quality deterioration. Further, in some cases, it is necessary to perform decolorization after the optical recognition process. However, there are many cases where decolorization is difficult or extremely complicated.
【００１１】(2) の方法 絶縁性基板の表裏全体に不透明なろう材やハンダ材等が
印刷される場合が少なからずあるが、そのような場合に
はこの透過照明方法では効果的なコントラストを得るこ
とができない。 Method (2) In many cases, an opaque brazing material, a solder material, or the like is printed on the entire front and back surfaces of the insulating substrate. In such a case, an effective contrast is obtained by this transmission illumination method. I can't get it.
【００１２】(3) の方法 この方法は、背景からの反射光と認識対称物からの反射
光との光学特性（偏光等）が有為に相違していることが
前提であるが、その前提が満たされない場合が少なから
ずあり、そのような場合にはこの方法では効果的なコン
トラストを得ることができない。 Method (3) This method is based on the premise that the optical characteristics (polarization, etc.) of the reflected light from the background and the reflected light from the object to be recognized are significantly different. Is not satisfied in many cases, and in such a case, an effective contrast cannot be obtained by this method.
【００１３】このような事情は、プリント配線板等の回
路基板以外であっても、窒化アルミニウム焼結体を構成
要素に含む構造体の光学的認識を行う全ての場合に共通
する。Such a situation is common to all cases in which a structure including an aluminum nitride sintered body as a component is optically recognized, even if the structure is not a circuit board such as a printed wiring board.
【００１４】本発明は、上述の背景のもとでなされたも
のであり、窒化アルミニウム焼結体を構成要素に含む構
造体の光学的認識を行う場合に、窒化アルミニウム焼結
体と他の構成要素もしくは背景とのコントラストを簡単
な処理により向上させることを可能にする窒化アルミニ
ウム焼結体を構成要素に含む構造体の光学的認識方法を
提供することを目的としたものである。SUMMARY OF THE INVENTION The present invention has been made under the above-mentioned background. When optically recognizing a structure including an aluminum nitride sintered body as a constituent element, the present invention relates to an aluminum nitride sintered body and another structure. It is an object of the present invention to provide a method of optically recognizing a structure including a sintered body of aluminum nitride as a component, which enables the contrast with an element or a background to be improved by a simple process.
【００１５】[0015]
【課題を解決するための手段】上述の課題を解決するた
めに本発明にかかる窒化アルミニウム焼結体を構成要素
に含む構造体の光学的認識方法は、 （１） 窒化アルミニウム焼結体を構成要素に含む構造
体の光学的認識方法であって、前記構造体の光学的認識
を行う前に該構造体の少なくとも窒化アルミニウム焼結
体に紫外線を照射して該窒化アルミニウム焼結体の光に
対する吸収スペクトル特性を変化させる処理を行うこと
を特徴とした構成とした。Means for Solving the Problems In order to solve the above-mentioned problems, a method for optically recognizing a structure including an aluminum nitride sintered body as a component according to the present invention is as follows. A method for optically recognizing a structure contained in an element, comprising: irradiating at least an aluminum nitride sintered body of the structure with ultraviolet light before optically recognizing the structure. The configuration is characterized by performing a process of changing the absorption spectrum characteristics.
【００１６】また、構成１の態様として、 （２） 構成１の窒化アルミニウム焼結体を構成要素に
含む構造体の光学的認識方法において、前記構造体が絶
縁性基板を窒化アルミニウム焼結体で構成した回路基板
であることを特徴とした構成とした。According to a first aspect of the present invention, there is provided a method for optically recognizing a structure including the aluminum nitride sintered body of the first aspect as a constituent element, wherein the structure comprises an insulating substrate made of an aluminum nitride sintered body. The configuration is characterized by being a configured circuit board.
【００１７】[0017]
【作用】上述の構成１において、窒化アルミニウム焼結
体に所定の電磁波を照射すると、該窒化アルミニウム焼
結体の光に対する吸収スペクトル特性が時間とともに変
化し、いわゆる着色現象がおこる。この現象は、窒化ア
ルミニウム焼結体に含まれる不純物遷移元素等の作用に
よって生ずるものと推定される。照射する電磁波の波長
が短い程、また、電磁波の強度が高い程着色性に勝れる
傾向が認められる。また、照射時間の経過にともなって
着色の色が変化する。すなわち、例えば、最初灰色系で
あったものが緑色系に変化し、さらに照射を続けると次
第にやまぶき色に変化して落ち着く。したがって、照射
時間を制御することにより背景に対して区別しやすい色
を選定することもできる。なお、この変化の程度や着色
の色の種類は窒化アルミニウム焼結体に含まれる不純物
遷移元素等の種類によって多少相違する。照射する電磁
波としては、原理的には赤外線からＸ線を含む全てを含
むが、実用的には可視光（波長７００ｎｍ以下）もしく
は紫外光が好ましい。その場合、短時間で着色するため
には可視光の場合は強力なランプが必要になるが、紫外
光（波長２２０ｎｍ）では一般的に市販されている紫外
線ランプで十分着色できる。なお、自然光に所定時間以
上さらしても着色が得られるが、照射強度や時間等の条
件を揃えることが困難であり、一定の色に着色すること
が困難であるとともに、着色に長時間を要するので好ま
しくない。また、この着色は、数時間ないし十数時間暗
所で自然放置するかもしくは比較的低温度（２００°Ｃ
内外）で暗所で加熱することによって簡単に脱色できる
ことが確認されている。In the structure 1, when a predetermined electromagnetic wave is irradiated on the aluminum nitride sintered body, the absorption spectrum characteristic of the aluminum nitride sintered body with respect to light changes with time, and a so-called coloring phenomenon occurs. This phenomenon is presumed to be caused by the action of impurity transition elements contained in the aluminum nitride sintered body. It is recognized that the shorter the wavelength of the irradiated electromagnetic wave and the higher the intensity of the electromagnetic wave, the better the coloring property. Further, the color of the color changes with the elapse of the irradiation time. That is, for example, the color that was initially grayish changes to greenish, and when the irradiation is further continued, the color gradually changes to a blinking color and calms down. Therefore, by controlling the irradiation time, a color that can be easily distinguished from the background can be selected. It should be noted that the degree of the change and the kind of the coloring are slightly different depending on the kind of the impurity transition element contained in the aluminum nitride sintered body. The electromagnetic wave to be irradiated includes, in principle, everything from infrared rays to X-rays, but practically, visible light (wavelength of 700 nm or less) or ultraviolet light is preferable. In this case, a strong lamp is required in the case of visible light for coloring in a short time, but a commercially available ultraviolet lamp can be sufficiently colored for ultraviolet light (wavelength 220 nm). In addition, although coloring can be obtained even when exposed to natural light for a predetermined time or more, it is difficult to align conditions such as irradiation intensity and time, and it is difficult to color to a certain color, and coloring requires a long time. It is not preferable. In addition, this coloring is carried out by leaving it naturally in a dark place for several hours to ten and several hours or at a relatively low temperature (200 ° C.).
(Inside and outside), it has been confirmed that decolorization can be easily achieved by heating in a dark place.
【００１８】この電磁波照射による着色現象により、窒
化アルミニウム焼結体と構造体の他の構成要素もしくは
背景との光学的コントラストを向上させることが可能と
なり、構造体の光学的認識が容易となる。The coloring phenomenon caused by the electromagnetic wave irradiation makes it possible to improve the optical contrast between the aluminum nitride sintered body and other components or the background of the structure, thereby facilitating the optical recognition of the structure.
【００１９】また、構成２によれば、画像処理装置等の
光学的認識装置を用いたプリント配線板の製造や検査の
際における光学的認識を容易にすることができる。Further, according to the configuration 2, it is possible to easily perform optical recognition at the time of manufacturing or inspecting a printed wiring board using an optical recognition device such as an image processing device.
【００２０】[0020]
【実施例】図１は本発明の一実施例にかかる窒化アルミ
ニウム焼結体を構成要素に含む構造体の光学的認識方法
を適用したプリント配線板製造工程説明図である。以
下、図１を参照にしながら一実施例を説明する。なお、
この一実施例は、搬送ロボット等を備えたコンピュータ
制御の自動実装装置を用い、窒化アルミニウム焼結体の
基板に所定形状のろう材ペーストを印刷して同じ形状の
銅パーツを自動的に接合・実装する際に、その形状計測
及び検査に本発明の方法を用いた例である。FIG. 1 is an explanatory view of a printed wiring board manufacturing process to which a method for optically recognizing a structure including a sintered body of aluminum nitride according to an embodiment of the present invention is applied. Hereinafter, an embodiment will be described with reference to FIG. In addition,
This embodiment uses a computer-controlled automatic mounting device equipped with a transfer robot and the like, prints a brazing material paste of a predetermined shape on a substrate of an aluminum nitride sintered body, and automatically joins copper parts of the same shape. This is an example in which the method of the present invention is used for shape measurement and inspection when mounting.
【００２１】まず、本実施例に用いる自動実装装置の概
略構成を説明する。First, a schematic configuration of the automatic mounting apparatus used in this embodiment will be described.
【００２２】図１において、符号１０はコンピュータで
あり、このコンピュータ１０の指令により、第１ロボッ
ト１１、第２ロボット１２、スクリーン印刷機１３、紫
外線ランプ１４及びテレビカメラ１５が所定の動作を
し、窒化アルミニウム焼結体基板（以下ＡｌＮ基板とい
う）１や銅パーツ２の搬送、印刷、紫外線照射、光学的
認識による形状計測、実装及び検査の作業を自動的に行
う。In FIG. 1, reference numeral 10 denotes a computer, and a first robot 11, a second robot 12, a screen printing machine 13, an ultraviolet lamp 14, and a television camera 15 perform predetermined operations according to instructions from the computer 10. The work of transporting, printing, irradiating ultraviolet rays, measuring the shape by optical recognition, mounting and inspection of the aluminum nitride sintered body substrate (hereinafter referred to as AlN substrate) 1 and copper parts 2 is automatically performed.
【００２３】すなわち、第１ロボット１１は、そのロボ
ットツール１１ａによってＡｌＮ基板１を把持して搬送
・位置決め等を行う。また、第２ロボット１２は、その
ロボットツール１２ａによってＡｌＮ基板１及び銅パー
ツ２の搬送・位置決め、ＡｌＮ基板１への銅パーツ２の
実装等を行うとともに、ロボットツール１２ａの先端に
取り付けられたテレビカメラ１５を所定の撮像場所にセ
ットする。また、スクリーン印刷機１３は制御装置１３
ａを通じてコンピュータ１０の指令にしたがってＡｌＮ
基板１に印刷により所定形状のろう材ペーストパターン
３を形成する。紫外線ランプ１４は駆動装置１４ａを通
じてコンピュータ１０の指令にしたがってＡｌＮ基板１
に波長約２２０ｎｍの紫外光を所定の時間照射する処理
を行う。テレビカメラ１５は、画像処理装置１５ａ及び
コンピュータ１０によってＡｌＮ基板１の形状計測、ろ
う材ペーストパターン３及び銅パーツ２の形状計測、並
びに、実装後におけるこれらの位置ずれ量の計測を行
う。That is, the first robot 11 grips the AlN substrate 1 with its robot tool 11a to perform transport, positioning, and the like. In addition, the second robot 12 uses the robot tool 12a to transport and position the AlN substrate 1 and the copper part 2, mount the copper part 2 on the AlN substrate 1, and the like, and also has a television attached to the tip of the robot tool 12a. The camera 15 is set at a predetermined imaging location. Further, the screen printing machine 13 includes a control device 13.
a in accordance with a command from the computer 10 through a
A brazing material paste pattern 3 having a predetermined shape is formed on the substrate 1 by printing. The ultraviolet lamp 14 is driven by the AlN substrate 1 according to a command from the computer 10 through a driving device 14a.
Is irradiated with ultraviolet light having a wavelength of about 220 nm for a predetermined time. The television camera 15 uses the image processing device 15a and the computer 10 to measure the shape of the AlN substrate 1, the shape of the brazing material paste pattern 3 and the shape of the copper part 2, and the amount of displacement of these after mounting.
【００２４】次に、この自動実装装置を用いてＡｌＮ基
板１に銅パーツ２を実装する手順を説明する。Next, a procedure for mounting the copper part 2 on the AlN substrate 1 using the automatic mounting apparatus will be described.
【００２５】(1) 印刷 基板ストッカーに載置されたＡｌＮ基板１を第１ロボッ
ト１１によってスクリーン印刷機１３の印刷処理部に搬
送し、位置決めした後、ＡｌＮ基板１の表面の所定位置
にろう材ペーストによる印刷処理を施し、ろう材ペース
トパターン３を形成する。(1) Printing The AlN substrate 1 placed on the substrate stocker is transported by the first robot 11 to the print processing section of the screen printer 13 and positioned, and then the brazing material is placed at a predetermined position on the surface of the AlN substrate 1. A printing process using a paste is performed to form a brazing material paste pattern 3.
【００２６】(2) 着色 印刷処理後のＡｌＮ基板１を第１ロボット１１によって
紫外線照射部に搬送し、紫外線ランプ１４によってＡｌ
Ｎ基板１の表面に波長約２２０ｎｍの紫外光を約５分間
照射する。これにより、灰色系であったＡｌＮ基板１の
表面がやまぶき色系に変化して着色され、灰色系のろう
材ペーストパターン３と光学的に明確に区別できるよう
になる。なお、紫外線ランプ１４としては、松下電機産
業株式会社製の殺菌灯ＧＬー１５Ｗ（商品名）を用い
た。また、照射は室温かつ常圧で行った。(2) Coloring The AlN substrate 1 after the printing process is transported to the ultraviolet irradiation unit by the first robot 11, and the AlN substrate 1 is
The surface of the N substrate 1 is irradiated with ultraviolet light having a wavelength of about 220 nm for about 5 minutes. As a result, the surface of the AlN substrate 1 which has been grayish is changed to a tinted color and colored, so that it can be optically clearly distinguished from the brazing material paste pattern 3 which is grayish. In addition, as the ultraviolet lamp 14, a germicidal lamp GL-15W (trade name) manufactured by Matsushita Electric Industrial Co., Ltd. was used. Irradiation was performed at room temperature and normal pressure.
【００２７】(3) 光学的認識（ろう材ペーストパターン
３の形状計測） 着色処理後のＡｌＮ基板１を第１ロボット１１によって
光学的認識部に搬送し、位置決め後、ＡｌＮ基板１の表
面をテレビカメラ１５によって撮像し、画像処理を施し
てろう材ペーストパターン３の形状計測を行い、その結
果をコンピュータ１０に格納する。(3) Optical Recognition (Measurement of Shape of Brazing Material Paste Pattern 3) The AlN substrate 1 after the coloring process is transported by the first robot 11 to the optical recognizing unit, and after positioning, the surface of the AlN substrate 1 is set on a television. An image is taken by the camera 15, image processing is performed, the shape of the brazing material paste pattern 3 is measured, and the result is stored in the computer 10.
【００２８】(4) 光学的認識（銅パーツ２の形状計測） 銅パーツパレット等に保持された銅パーツ２を第２ロボ
ット１２によって光学的認識部に搬送し、位置決め後、
銅パーツ２をテレビカメラ１５によって撮像し、画像処
理を施して銅パーツ２の形状計測を行い、その結果をコ
ンピュータ１０に格納する。(4) Optical Recognition (Measurement of Shape of Copper Parts 2) Copper parts 2 held on a copper parts pallet or the like are conveyed to the optical recognition unit by the second robot 12 and positioned.
The copper part 2 is imaged by the television camera 15, image processing is performed, the shape of the copper part 2 is measured, and the result is stored in the computer 10.
【００２９】(5) 実装 第２ロボット１２によって銅パーツ２をＡｌＮ基板１の
表面に実装する。この場合、銅パーツ２がＡｌＮ基板１
の表面に形成されたろう材ペーストパターン３に正確に
重なるように位置制御がなされる。その位置制御のデー
タとして前の工程で計測してコンピュータに格納されて
いる形状データが用いられる。(5) Mounting The copper part 2 is mounted on the surface of the AlN substrate 1 by the second robot 12. In this case, the copper part 2 is the AlN substrate 1
The position is controlled so as to accurately overlap with the brazing material paste pattern 3 formed on the surface of the solder paste. The shape data measured in the previous step and stored in the computer is used as the position control data.
【００３０】(6) 光学的認識（銅パーツ２とろう材ペー
ストパターン３との重なり位置ずれ量検査） 実装処理後のＡｌＮ基板１を第２ロボット１２によって
光学的認識部に搬送し、ＡｌＮ基板１の表面をテレビカ
メラ１５によって撮像し、画像処理を施して銅パーツ２
とろう材ペーストパターン３との重なり位置ずれ量を計
測する。図２はこの重なり位置ずれの状態を示すもの
で、図２におけるｅ1 ，ｅ2 が重なり位置ずれ量であ
る。こうして計測された重なり位置ずれ量ｅ1 ，ｅ2 は
コンピュータ１０に予め格納されている最大許容位置ず
れ量と比較され、その範囲内にあるか否かの判定が行わ
れる。この判定で不合格のものは不良品とされる。(6) Optical Recognition (Inspection of Overlapping Position between Copper Parts 2 and Brazing Material Paste Pattern 3) The AlN substrate 1 after the mounting process is transported by the second robot 12 to the optical recognizing unit, where the AlN substrate is transferred. 1 is imaged by the television camera 15 and subjected to image processing to form a copper part 2
The amount of overlapping displacement with the solder paste pattern 3 is measured. FIG. 2 shows the state of the overlap position shift, and e 1 and e 2 in FIG. 2 are the overlap position shift amounts. The overlap position shift amounts e 1 and e 2 measured in this way are compared with the maximum allowable position shift amounts stored in the computer 10 in advance, and it is determined whether or not they are within the range. A product rejected in this determination is regarded as a defective product.
【００３１】以上の処理を経たＡｌＮ基板１は、次に、
加熱・接合処理がなされ、銅パーツ実装工程を終了す
る。なお、この加熱・接合処理は、接合炉内の暗所で行
われるので、ＡｌＮ基板１の着色は完全に脱色され、着
色が残って後の工程で不都合が生ずるようなことがな
い。The AlN substrate 1 having undergone the above processing is then
Heating / joining processing is performed, and the copper part mounting step is completed. Since the heating / joining process is performed in a dark place in the joining furnace, the coloring of the AlN substrate 1 is completely decolored, and there is no possibility that the coloring remains and causes inconvenience in the subsequent steps.
【００３２】上述の一実施例によれば、光学的認識の前
にＡｌＮ基板１が着色されるから、ＡｌＮ基板１とろう
材ペーストパターン３とがコントラスト比が著しく高く
なり、これらを光学的に区別することが著しく容易にな
る。したがって、これらの形状の光学的認識が容易・正
確に行われ、実装精度及び検査精度を著しく高めること
ができる。しかも、着色の処理は、単に紫外光を照射す
るだけであるから処理作業自体が極めて簡単であるとと
もに、この処理装置も単純なものであるから、これを既
存の自動実装装置に容易に追加して設けることができ
る。さらには、この着色は、後の加熱・接合工程によっ
て完全に脱色されるから、脱色工程を別個に追加する必
要もない。According to the above-described embodiment, since the AlN substrate 1 is colored before optical recognition, the contrast ratio between the AlN substrate 1 and the brazing material paste pattern 3 is significantly increased, and these are optically recognized. The distinction is significantly easier. Therefore, optical recognition of these shapes is easily and accurately performed, and mounting accuracy and inspection accuracy can be significantly improved. In addition, since the coloring process involves merely irradiating ultraviolet light, the processing operation itself is extremely simple, and since this processing device is also simple, it can be easily added to an existing automatic mounting device. Can be provided. Furthermore, since this coloring is completely decolored by the subsequent heating and bonding steps, there is no need to separately add a decoloring step.
【００３３】なお、上述の一実施例では、自動実装装置
を用いてＡｌＮ基板に銅パーツを実装する際の光学的認
識を行う場合に本発明の方法を適用した例をかかげた
が、銅パーツ以外の他のパーツの実装や検査、あるい
は、プリント配線板以外であっても窒化アルミニウム焼
結体を構成要素に含む構造体の光学的認識を行う全ての
場合に適用できる。また、その場合、用いる電磁波は紫
外光以外にも可視光、赤外光あるいはＸ線であってもよ
いが、実用的には７００ｎｍ以下の可視光もしくは紫外
光が好ましく、より望ましくは紫外光がよい。In the above-described embodiment, an example in which the method of the present invention is applied to the case where optical recognition is performed when mounting a copper part on an AlN substrate using an automatic mounting apparatus has been described. The present invention can be applied to all cases in which mounting and inspection of other parts other than the above, or optical recognition of a structure including an aluminum nitride sintered body as a constituent element even in a case other than a printed wiring board. In that case, the electromagnetic wave used may be visible light, infrared light or X-rays other than ultraviolet light, but practically, visible light or ultraviolet light of 700 nm or less is preferable, and more preferably ultraviolet light is used. Good.
【００３４】また、上述の一実施例では、ＡｌＮ基板が
やまぶき色になるまで紫外光を照射した例を述べたが、
区別すべき対象によっては、照射時間を短くして緑色系
に着色したほうがよい場合もある。Further, in the above-described embodiment, the example in which the AlN substrate is irradiated with the ultraviolet light until the AlN substrate becomes a bright color has been described.
Depending on the object to be distinguished, it may be better to shorten the irradiation time and color it greenish.
【００３５】[0035]
【発明の効果】以上詳述したように、本発明は、窒化ア
ルミニウム焼結体を構成要素に含む構造体を光学的に認
識する前にこの構造体の少なくとも窒化アルミニウム焼
結体に電磁波を照射して該窒化アルミニウム焼結体の光
に対する吸収スペクトル特性を変化させる処理を行うこ
とを特徴としたもので、これにより、窒化アルミニウム
焼結体と他の構成要素もしくは背景とのコントラストを
極めて簡単な処理により著しく向上させることを可能に
したものである。As described above in detail, the present invention irradiates at least the aluminum nitride sintered body of this structure with electromagnetic waves before optically recognizing the structure including the aluminum nitride sintered body as a component. Then, a process of changing the absorption spectrum characteristic of the aluminum nitride sintered body with respect to light is performed, whereby the contrast between the aluminum nitride sintered body and other components or the background can be extremely simplified. It is possible to remarkably improve by processing.
【図１】本発明の一実施例にかかる窒化アルミニウム焼
結体を構成要素に含む構造体の光学的認識方法を適用し
たプリント配線板製造工程説明図である。FIG. 1 is an explanatory view of a printed wiring board manufacturing process to which a method of optically recognizing a structure including an aluminum nitride sintered body as a component according to an embodiment of the present invention is applied.
【図２】銅パーツとろう材ペーストパターンとの重なり
位置ずれの様子を示す図。FIG. 2 is a view showing a state of an overlap position shift between a copper part and a brazing material paste pattern.
１…ＡｌＮ基板、２…銅パーツ、３…ろう材ペーストパ
ターン、１０…コンピュータ、１１…第１ロボット、１
２…第２ロボット、１３スクリーン印刷機、１４…紫外
線ランプ、１５…テレビカメラ。DESCRIPTION OF SYMBOLS 1 ... AlN board, 2 ... Copper parts, 3 ... Brazing material paste pattern, 10 ... Computer, 11 ... 1st robot, 1
2 ... second robot, 13 screen printing machine, 14 ... ultraviolet lamp, 15 ... TV camera.
フロントページの続き (72)発明者 秋山 貴彦 東京都千代田区丸の内一丁目８番２号 同和鉱業株式会社内 (56)参考文献 特開 平４−264757（ＪＰ，Ａ) 特開 平３−162589（ＪＰ，Ａ) (58)調査した分野(Int.Cl.7，ＤＢ名) G01B 11/24 G01N 1/36 H05K 3/00 H05K 13/08 Continuation of front page (72) Inventor Takahiko Akiyama 1-8-2 Marunouchi, Chiyoda-ku, Tokyo Dowa Mining Co., Ltd. (56) References JP-A-4-264757 (JP, A) JP-A-3-162589 ( JP, A) (58) Fields investigated (Int. Cl. 7 , DB name) G01B 11/24 G01N 1/36 H05K 3/00 H05K 13/08
Claims (2)
む構造体の光学的認識方法であって、前記構造体の光学
的認識を行う前に該構造体の少なくとも窒化アルミニウ
ム焼結体に紫外線を照射して該窒化アルミニウム焼結体
の光に対する吸収スペクトル特性を変化させる処理を行
うことを特徴とした窒化アルミニウム焼結体を構成要素
に含む構造体の光学的認識方法。1. A method for optically recognizing a structure including an aluminum nitride sintered body as a component, wherein ultraviolet light is applied to at least the aluminum nitride sintered body of the structure before optically recognizing the structure. A method for optically recognizing a structure containing an aluminum nitride sintered body as a constituent element, the method comprising irradiating the aluminum nitride sintered body to change the absorption spectrum characteristic of the aluminum nitride sintered body with respect to light.
体を構成要素に含む構造体の光学的認識方法において、 前記構造体が絶縁性基板を窒化アルミニウム焼結体で構
成した回路基板であることを特徴とした窒化アルミニウ
ム焼結体を構成要素に含む構造体の光学的認識方法。2. The method for optically recognizing a structure including an aluminum nitride sintered body as a component according to claim 1, wherein the structure is a circuit board in which an insulating substrate is formed of an aluminum nitride sintered body. A method for optically recognizing a structure containing a sintered body of aluminum nitride as a constituent element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10291692A JP3264972B2 (en) | 1992-04-22 | 1992-04-22 | Method for optically recognizing a structure containing aluminum nitride sintered body as a component |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10291692A JP3264972B2 (en) | 1992-04-22 | 1992-04-22 | Method for optically recognizing a structure containing aluminum nitride sintered body as a component |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05296895A JPH05296895A (en) | 1993-11-12 |
| JP3264972B2 true JP3264972B2 (en) | 2002-03-11 |
Family
ID=14340185
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10291692A Expired - Lifetime JP3264972B2 (en) | 1992-04-22 | 1992-04-22 | Method for optically recognizing a structure containing aluminum nitride sintered body as a component |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3264972B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5741913B2 (en) * | 2011-03-30 | 2015-07-01 | 三菱マテリアル株式会社 | Manufacturing method of ceramic substrate for power module comprising blackened aluminum nitride substrate |
-
1992
- 1992-04-22 JP JP10291692A patent/JP3264972B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH05296895A (en) | 1993-11-12 |
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