JP3279031B2 - Superconducting electromagnet device for charged particles and charged particle storage ring - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a superconducting electromagnet for charged particles which is applied to a portion which generates a magnetic field by using a superconducting coil and guides the charged particles to an intended orbit.

[0002]

2. Description of the Related Art FIG.
onic Engineering 11 (1990) 2
An example of the conventional superconducting electromagnet for charged particles shown on pages 25 to 228, that is, a bird's-eye view of a superconducting deflection electromagnet for an electron storage ring, FIG. 25 is a longitudinal sectional view of a central portion of FIG. 24, and FIG. FIG. 27 is a perspective view showing the shape of the coil. In the figure, 1 is a pair of superconducting coils having a shape in which a superconducting wire is wound in a banana shape and both ends are flipped up. The coil container 3 has a rectangular cross section provided at the center of the coil container 2 so that the outside is open along the deflection (bending) radius of the banana coil on the vertically symmetric surface of the superconducting coil 1. An electron beam path, 4 a heat shield covering the periphery of the coil container 2 and blocking radiant heat, 5 a vacuum tank containing the above components, 6 a heat insulating support member for supporting the coil container 2 in a vacuum tank in an adiabatic manner, 7 Is a helium supply port for supplying liquid helium to the coil container 2, and 8 is the vacuum tank 5
A beam entrance port for guiding an electron beam to the electron beam path 3 through the wall surface on the side of the straight orbit of the electron beam path 9;
A beam exit port for extracting an electron beam through the vacuum chamber 5 from the plurality of radiation light ports 10 disposed at appropriate intervals through the vacuum chamber 5 in a tangential direction of the trajectory of the electron beam passage 3; It is a superconducting electromagnet constituted as follows. FIG. 28 shows a superconducting electromagnet 1 configured as described above.
In this figure, two superconducting electromagnets 11 are installed symmetrically at a fixed distance from each other so as to form a racetrack-shaped beam trajectory, and 12 is a linear accelerator. Beam injector for guiding electrons accelerated to a predetermined energy by a laser or a synchrotron (not shown) into a circular orbit, 13 is a high-frequency cavity, 14 is a linear beam duct that connects a superconducting electromagnet and each component of the linear section. It is. The ends of the plurality of synchrotron radiation ports 10 are respectively connected via extended beam ducts or the like, so that a vacuum can be sealed in the middle or at the end.
(Not shown).

Next, the operation will be described. First, the vacuum chamber 5 of the superconducting electromagnet 11 is evacuated to a predetermined degree of vacuum using a vacuum pump (not shown). Next, liquid helium is supplied to the coil container 2 from the helium supply port 7 to cool the superconducting coil 1 to a predetermined temperature. When the superconducting coil 1 enters a superconducting state (state in which the electric resistance is 0), it can generate an intended magnetic field by being energized through an external excitation power supply (not shown). The operation when the superconducting electromagnet 11 is applied to the electron storage ring shown in FIG. 28 is as follows. The electrons accelerated to a predetermined energy by the linear accelerator or the synchrotron are incident on the orbit of the ring from the beam injector 12. This high-energy electron beam orbits from the straight section beam duct 14 through the beam entrance port 8, the electron beam passage 3 and the beam exit port 9 on a race track orbit. When a certain amount of these electrons accumulates, the injection is stopped, and after that, a long-time operation is continued while continuously operating a resonator such as a high-frequency cavity to supplement the lost energy. Here, the electrons emit bremsstrahlung or synchrotron radiation in the tangential direction of the orbit when bent by 180 degrees in the deflection magnetic field of the superconducting electromagnet. The synchrotron radiation is extracted from the plurality of radiation ports 10 and is widely used for various measurements at the atomic and molecular levels such as X-ray lithography and X-ray diffraction.
Here, if there are residual gas molecules on the orbit around which the electron beam (a bundle of accumulated electrons accelerated to high energy) orbits, the accelerated electrons collide with the residual gas molecules, resulting in energy attenuation or scattering. It disappears by jumping out of the orbit and the accumulated life is shortened. For this reason, in consideration of the storage life of the electron beam, the inside of the electron beam path 3 is usually set to an ultra-high vacuum of the order of 10 ^-9 Torr. On the other hand, the superconducting coil 1 cooled by liquid helium is insulated by vacuum, but when heat transfer by molecular conduction of the residual gas is taken into consideration, the degree of vacuum necessary to guarantee the heat insulating performance is sufficient if the degree of vacuum is of the order of 10 ^-6 Torr. It is. In the superconducting electromagnet 11, the electron beam path 3 for passing the electron beam
And the adiabatic vacuum part of the superconducting coil, that is, the vacuum of the vacuum tank 5 is communicated.

[0004]

As described above, the conventional superconducting electromagnet for the electron storage ring has a structure in which the adiabatic vacuum section and the vacuum of the electron beam passage communicate with each other. The cooling surface including the coil is kept in a state of adsorption equilibrium of residual gas molecules by the action of a cryopump, and when thermal disturbance is applied thereto, the equilibrium state is broken and a part of the adsorbed gas is desorbed, and the vacuum chamber 5, the degree of vacuum of the electron beam path 3 may be deteriorated.
In such a case, an ultra-high vacuum cannot be maintained, and the storage life of the electron beam may be significantly reduced. In addition, if the vacuum breaks in any of the beam lines connected to the outside from the electron beam entrance port, exit port, and synchrotron radiation port during operation, the vacuum chamber of the superconducting electromagnet is directly affected, and heat insulation can be maintained. When it disappears, there are drawbacks such as abnormal evaporation of liquid helium, quench of the superconducting coil (transition from superconducting state to normal conducting state), and failure to function as a superconducting electromagnet.

[0005]

SUMMARY OF THE INVENTION It is an object of the present invention to solve the above-described problem. The present invention is directed to a method for stably guiding a beam by always maintaining a vacuum at a portion where an electron beam passes through an ultra-high vacuum, and a beam connected to the outside of a superconductive magnet. An object of the present invention is to provide a superconducting electromagnet having a structure in which vacuum breakage on the line side does not affect adiabatic vacuum. In the present invention,
To provide a cryostat that reduces the amount of heat infiltrated into the low-temperature portion of the superconducting coil and reduces the amount of liquid helium evaporated. Also, even if the magnetic field changes suddenly due to the quench of the superconducting coil, eddy currents are induced in components such as the heat shield. It is an object of the present invention to provide a superconducting electromagnet having a structure that is not easily deformed and does not cause a temperature rise of the heat shield member itself or deformation due to electromagnetic force.

[0006]

According to a first aspect of the present invention, there is provided a beam chamber which forms an independent vacuum space in a portion of a superconducting electromagnet through which an electron beam passes, and a vacuum seal is provided at a beam inlet and an outlet port which penetrate a vacuum chamber. The opening was opened through a flange joint provided with a, and a charged beam was guided.

According to a second aspect of the present invention, there is provided a synchrotron wherein a plurality of radiation ports are provided on the outer peripheral wall of the beam chamber, and the radiation ports are opened through a flange joint provided with a vacuum seal at a portion penetrating the vacuum chamber. Synchrotron radiation can be extracted.

According to a third aspect of the present invention, the beam chamber is adiabatically supported on the superconducting coil unit via a plurality of heat insulating support members, and a plurality of ducts communicating with the beam chamber pass through the vacuum chamber. A flexible joint that can expand and contract is provided.

According to a fourth aspect of the present invention, when the beam chamber is supported on the superconducting coil by a plurality of heat-insulating support members, one or two reference positions are substantially fixedly supported, and the beam chamber is heated or superconducting. Displacement due to thermal expansion and contraction caused by cooling of the coil is absorbed by sliding and bending displacement of the adiabatic support member, so that the relative positions of the beam chamber and the superconducting coil can be maintained in substantially the same state.

According to a fifth aspect of the present invention, a plurality of support members are provided on the side surface of the beam chamber, and a heat insulating support member is mounted on the support member to support the superconducting coil.

According to a sixth aspect of the present invention, the beam chamber is supported by a plurality of multiple cylindrical adiabatic columns.

According to a seventh aspect of the present invention, a superconducting coil is provided with an integrated radiation heat shielding material covering substantially the entire circumference of the beam chamber.

According to an eighth aspect of the present invention, a multilayer laminated heat insulating material is wound directly around the beam chamber as a heat insulating material for the beam chamber, and a heat shield entirely covered by a plurality of heat insulating support rods from the beam chamber is integrally provided therearound. I did it.

According to a ninth aspect of the present invention, the member of the beam chamber and the heat shield and the heat insulating support rod for supporting the heat shield between each other are laminated with a fiber-reinforced resin laminate, a laminate rod, and the like.
A laminated pipe was used.

According to a tenth aspect of the present invention, a non-magnetic metal plate having a large thermal conductivity is provided on a member for covering a surface in a direction substantially parallel to a magnetic flux of a main magnetic field formed by a superconducting coil among heat shield members of a beam chamber. The members covering the surfaces in the intersecting direction are each formed of a nonmagnetic metal plate having a large electric resistance.

According to the eleventh aspect of the present invention, the heat shield is disposed on a thin plate of a non-magnetic metal having a high electric resistance at a suitable interval with a non-magnetic metal conductive plate having a high thermal conductivity and attached with an adhesive. It was made up of an integrated shield plate.

According to a twelfth aspect of the present invention, when a plurality of beam ducts are taken out of the beam chamber through each port of the vacuum chamber, a relay flange is provided at each port and the beam duct communicates with the beam chamber via the relay flange. And the vacuum in the vacuum chamber was individually vacuum-sealed.

According to a thirteenth aspect of the present invention, a cooling jacket or a cooling pipe is provided on a wall surface of the beam chamber to circulate a refrigerant or a low-temperature liquefied gas of a general-purpose refrigerator to cool the beam.

[0019]

In the superconducting electromagnet constructed as in the first aspect of the present invention, since the beam chamber for passing an electron beam is independently installed in the vacuum chamber, thermal disturbances and the like are applied to the superconducting coil portion and the vacuum chamber Even if the degree of vacuum in the inside deteriorates, the electron beam can be guided while maintaining an ultra-high vacuum without affecting the inside of the beam chamber. Conversely, even if the vacuum on the beam chamber side deteriorates, it does not affect the adiabatic vacuum of the superconducting coil, so that the cryostat can be stably operated without abnormal evaporation of liquid helium.

According to the second aspect of the present invention, a plurality of beam ducts are provided in the tangential direction of the beam orbit from the beam chamber, and a vacuum seal is provided at a portion penetrating through the port of the vacuum chamber. The desired beam can be extracted by maintaining the inside of the beam chamber in an ultra-high vacuum state without being affected by the change.

According to the third aspect of the present invention, the beam chamber is installed so as to slide on the superconducting coil unit via the heat insulating support member, and a plurality of beam ducts pass through the vacuum chamber from the beam chamber via a flexible joint. To take it out,
The gap between the beam chamber and the superconducting coil unit can be kept constant without dislocation from the superconducting coil unit and generation of stress due to thermal expansion or contraction of components.

According to a fourth aspect of the present invention, the beam chamber is fixedly insulated and supported at one or two places on the superconducting coil unit, and another plurality of heat insulating support members are abutted or supported with a slight gap. As a result, it is possible to relieve the stress caused by the misalignment of the support portion and the difference in thermal elongation and to keep the relative reference position of the beam chamber and the superconducting coil unit almost constant.

According to the fifth aspect of the present invention, a plurality of support members are provided on the side surface of the beam chamber, and the heat-insulating support members are mounted via the support members. Therefore, the mounting span of the heat-insulating support members up to the support surface of the superconducting coil unit is provided. Can be taken for a long time. Further, the work space for mounting the heat insulating support member is increased.

According to the sixth aspect of the present invention, since the beam chamber is installed on the superconducting coil via a plurality of multiple cylindrical heat insulating columns, a predetermined heat insulating distance can be secured even in a narrow installation space, and the heat insulating support member itself invades by heat conduction. Heat can be reduced sufficiently.

According to the seventh aspect of the present invention, since the radiation chamber is integrally combined with the radiation heat shielding member in advance with the superconducting coil unit via the heat insulating support member, the construction can be performed reliably and easily.

According to the eighth aspect of the present invention, a multi-layer laminated heat insulating material is wound around a beam chamber, and a heat shield integrated through a heat insulating support rod so as to substantially cover the periphery thereof is combined with the superconducting coil unit. The state of assembly can always be checked visually. In addition, since the external dimensions are sequentially measured and fine adjustment of the assembly can be reliably performed, mutual thermal contact can be prevented.

In the ninth aspect of the present invention, the plurality of heat-insulating support rods supporting the beam chamber, the heat shield, and the heat shield are made flexible by a laminated rod of fiber reinforced resin, a laminated pipe, or the like. Slight dimensional error,
The difference in elongation due to thermal expansion and contraction can be absorbed by elastic deformation. In addition, the elastic deformation of the heat-insulating support rod can alleviate an increase in stress of the heat shield itself, thereby preventing contact due to deformation of the heat shield.

According to the tenth aspect of the present invention, the shield member on the surface parallel to the magnetic field formed by the superconducting coil is a non-magnetic metal plate having a small thermal resistance, and the member on the surface intersecting with the magnetic field is formed of a non-magnetic metal having a large electric resistance. Since the thin plate is used, even if there is a sharp change in the magnetic field due to the quench of the superconducting coil or the like, the eddy current induced in the heat shield is small and deformation of the heat shield itself due to electromagnetic force can be suppressed. Further, the shield member on the surface intersecting with the magnetic flux can cool the heat shield by using a member having a small thermal resistance as a heat transfer path.

According to the eleventh aspect of the present invention, as the heat shield member, a non-magnetic metal conductive plate having a low thermal resistance is bonded to a thin non-magnetic metal plate having a high electrical resistance with an adhesive. Even when there is a steep magnetic field change due to the above, the eddy current flowing through the member in the heat shield can be reduced, and the electromagnetic force acting on the shield plate itself can be reduced to suppress deformation. The shield plate can be cooled by heat conduction by connecting the end of the tropical plate to a cold heat source.

According to the twelfth aspect of the invention, when the beam chamber is integrated with the superconducting coil unit and mounted on the vacuum chamber, the beam chamber is connected to the joint flange of the beam chamber and the through port of the vacuum chamber via a relay flange. A material having a small outgassing rate can be applied to this portion, and it is possible to easily reach an ultra-high vacuum in a portion communicating with the beam chamber. Also, superconducting the beam chamber
Conductive when attached to the vacuum vessel of the magnet can be easily assembled wider working space since Hazuseru relay flange.

According to the thirteenth aspect of the present invention, since the wall surface of the beam chamber can be cooled, radiant heat and heat entering the superconducting coil unit due to heat conduction through the heat insulating support member are suppressed, and liquid helium, which is a cryogen for the superconducting coil, is evaporated. Loss can be reduced.

[0032]

【Example】

Embodiment 1 FIG. FIG. 1 is a longitudinal sectional view of a central portion of a charged particle superconducting electromagnet according to an embodiment of the present invention, and FIG. 2 is a horizontal sectional view of FIG. In the figure, 1,
4, 5, 6, 7 and 10 are the same or corresponding parts to the conventional device. Coordinate axes for explanation are also shown in each figure.
20 is an upper coil container for storing the superconducting coil 1, 21
Is a lower coil container for storing the superconducting coil 1 symmetrically with the above 20; 22 is an upper coil container 20 and a lower coil container 2
Reference numeral 1 denotes a low-temperature electromagnetic force support mounted to secure a space for taking out the orbit of the electrons and the synchrotron radiation, and supports the electromagnetic force acting between the upper and lower superconducting coils 1. 23 is a superconducting coil unit obtained by integrating the above 20, 21 and 22; 24 is a Z-axis heat insulating support member for supporting the load in the vertical direction of the superconducting coil unit 23; 25 is a member for supporting unbalanced electromagnetic force in the horizontal plane. X-axis heat-insulating support member, 26 is a beam chamber provided with orbital trajectories of electrons inserted into the upper coil container 20, the lower coil container 21, and the low-temperature heat-insulating support member 22 at appropriate intervals, respectively, and 27 is a beam chamber. 26, flange joints provided with vacuum seals at both ends and connected to the beam inlet port 8 and the beam outlet port 9 of the vacuum chamber 5, respectively;
Are a plurality of synchrotron radiation ports 1 of the vacuum chamber 5 for extracting synchrotron radiation from the outer peripheral wall of the beam chamber 26.
A plurality of synchrotron radiation ducts A provided so as to communicate with each other via a vacuum seal.

Numeral 31 denotes a magnetic shield provided so as to surround almost the entire periphery of the vacuum chamber 5 in order to reduce a leakage magnetic field to the outside of the superconducting coil. Numeral 32 penetrates the magnetic shield 31 from the outer wall surface of the vacuum chamber 5. The radiation light ducts B and 33 for guiding the synchrotron radiation light are vacuum gate valves provided so as to block the open ends of the radiation light duct B. Reference numeral 34 denotes a liquid helium reservoir provided above the magnetic shield 31; 35, a helium reservoir vacuum tank that vacuum-insulates around the liquid helium reservoir, which is provided so as to communicate the vacuum tank 5 with a vacuum portion; Helium pipes A and 37 which communicate the coil container 20 are helium pipes B which similarly communicate the liquid helium reservoir 34 and the lower coil container 21.

Next, the operation will be described. The vacuum chamber 5 is evacuated to a predetermined degree of vacuum using a vacuum pump (not shown) as in the conventional apparatus. In this case, only to be obtained vacuum degree of 10 ^{over 6} Torr orders necessary for heat insulation of the low temperature portion. When a predetermined degree of vacuum is reached, the superconducting coil 1 moves from the liquid helium reservoir 34 to the helium pipe A35 and the helium pipe B.
Liquid helium is supplied from 36 and cooled to a predetermined temperature,
An external excitation power supply (not shown) is connected to excite superconducting coil 1 to generate a desired magnetic field.

When the superconducting electromagnet 11 is applied to the electron storage ring in the same manner as the conventional apparatus, the beam chamber 26 integrated with the superconducting coil unit 23 is connected to the beam injector 12 and the high-frequency cavity via the linear beam duct 14. 13 and the like to form an independent vacuum donut around the ring. This vacuum donut part is ^10-10 To using an ultra-high vacuum pump (not shown).
Vacuum is applied to obtain a degree of vacuum of the rr order.
In this state, the electron beam accelerated to high energy incident from the beam injector 12 circulates from the linear beam duct 14 through the beam entrance port 8, the beam chamber 26, and the beam exit port 9 of the superconducting electromagnet. Here, since the ultrahigh vacuum section of the beam chamber 26 is provided independently of the vacuum for insulation of the vacuum chamber 5 of the superconducting electromagnet 11, even if the degree of vacuum in the vacuum chamber 5 is deteriorated due to thermal disturbance on the side of the superconducting coil, the beam is not changed. The vacuum inside the chamber 26 is maintained at a predetermined degree of vacuum without being affected, and the electron beam can stably circulate for a long time. In addition, since it is not necessary to make the entire vacuum chamber 5 ultra-high vacuum, there is an advantage that the volume of the ultra-high vacuum section can be greatly reduced, and vacuum evacuation becomes easy.

Conversely, even if the beam chamber 26 is opened to the atmosphere, the degree of vacuum of the vacuum chamber 5 is not affected, so that the superconducting electromagnet 11 can be operated regardless of the vacuum of the beam chamber 26. .

A radiation light duct A2 for extracting radiation light
8 is directly connected to the radiation light port 10 of the vacuum chamber 5 from the side wall surface of the beam chamber 26 to form a common vacuum with the beam chamber 26, so that radiation light can be efficiently extracted. Also, the radiation light duct B3
Even if the inflow of air from the second side occurs, the degree of vacuum of the vacuum chamber 5 on the superconducting coil 1 side is not affected similarly to the above, so that the operation of the superconducting electromagnet 11 can be stably performed.

Embodiment 2 FIG. FIG. 3 is a plan view showing a third embodiment of the present invention, and FIG. 4 is a sectional view taken along the line (AA) of FIG. In the first embodiment, the flange joint 27 and the plurality of radiation light ducts A28 at both ends of the beam chamber 26 are directly connected to the beam inlet port 8, the beam exit port 9 and the plurality of radiation light ports 10 of the vacuum chamber 5, respectively. However, in this embodiment, 41 is a first bellows joint which can be extended and contracted respectively provided at both ends of the beam chamber, and 42 is provided at a portion of the plurality of radiation light ducts connected to the radiation light port 10 on the vacuum tank 5 side. An extendable second bellows joint 43 is a first heat-insulating support member provided so as to adiabatically support the beam chamber 26 on the superconducting coil 1. The heat insulating support member 43 is made of a heat insulating material, is fixed to the beam chamber 26, and
21 is slidably abutted or inserted with a slight gap. The first heat-insulating support member 43 may be provided with one or more fulcrums depending on the shape, size and weight of the beam chamber. With such a configuration, the vertical distance between the superconducting coil unit 23 and the beam chamber 26 can be maintained substantially constant, and thermal contact can be prevented. In addition, since the beam chamber 26 and the vacuum chamber 5 are connected via the flexible bellows joints 41 and 42, even if the beam chamber 26 and the superconducting coil unit 23 are displaced due to dimensional errors, thermal expansion, etc., the bellows portion is not used. This displacement can be tolerated so that excessive stress is not applied to the first heat insulating support member 43. Although the heat insulating support member 43 is fixed to the beam chamber 26 in this embodiment, the heat insulating support member 43 may be fixed to the coil containers 20 and 21 and slidably contact the beam chamber 26.

Embodiment 3 FIG. FIG. 5 is a partial sectional view showing an embodiment of the fourth aspect of the present invention. In the second embodiment, the first heat-insulating support member 43 is disposed so that the distance between the superconducting coil unit 23 and the beam chamber 26 can be maintained substantially constant. And a second heat-insulating support member for heat-insulating and supporting the lower coil container 21 with a limited sliding distance in a horizontal plane. As the second heat-insulating support member 44, one of the first heat-insulating support members 43 near the center of symmetry axis is selected.
The other plural points are fixedly connected to the beam chamber 26 side by using the first heat insulating support member 43 in the same manner as that shown in FIG. 3, and the superconducting coil unit 23 is abutted or slid with a slight gap. Support as much as possible. With such a configuration, the amount of displacement between the superconducting coil unit 23 and the beam chamber 26 is limited, so that the distance can be maintained substantially constant, and the relative position of the superconducting coil unit 23 and the beam chamber 26 in the horizontal plane can be determined. The electron beam can be held almost at the reference position, and the electron beam can stably circulate. In addition, the superconducting coil side of the second heat insulating support member can be slid within a limited range in preparation for respective displacements due to thermal contraction during cooling of the superconducting coil unit 23 and thermal expansion during baking of the beam chamber 26. Therefore, it is possible to suppress an increase in the internal stress of each component. The second heat insulating support member 44 of the present embodiment is the beam chamber 2
6, but fixed to coil containers 20 and 21 on the contrary,
The beam chamber 26 may be limitedly slidable.

Embodiment 4 FIG. FIG. 6 is a plan view showing another embodiment of the invention of claim 4, and FIG. 7 is a cross-sectional view taken along the line (AA) of FIG. In the third embodiment, the beam chamber 26 is supported via the second heat insulating support member 44 so as to fix the position on the lower coil container 21. In the drawing, reference numeral 45 denotes the second heat insulating support member 44. The beam chamber 26 is provided on a substantially symmetric X-axis on a plan view,
A third heat-insulating support member that allows a displacement of ± several millimeters in a direction parallel to the X-axis at a position at an appropriate interval on the extension of the X-axis and restricts displacement in a direction perpendicular to the X-axis.
Reference numeral 46 denotes a heat-insulating support shaft fixedly attached to the beam chamber 26; 47, a post fixedly mounted on the lower coil container 21 at an appropriate distance from a fulcrum of the heat-insulation support shaft 46; Is a connecting member for rotatably connecting the front end of the support member 47 and the shaft end of the support column 47 at respective fulcrums. With this configuration, the rotational position deviation in the mounting plane of the beam chamber 26 can be restrained, so that the relative reference position of the superconducting coil unit 23 is almost fixed, and the electron beam is more stable than in the case of the third embodiment. The beam chamber can be displaced due to thermal expansion.

Embodiment 5 FIG. FIG. 8 is a partial cross-sectional view of the heat insulating support member of the beam chamber 26 according to an embodiment of the present invention. In the drawing, reference numeral 51 denotes a plurality of support fittings provided on the side surface of the beam chamber 8. One end of each of the first and second heat-insulating support members 43 and 44 is fixed and attached to the plurality of support fittings 51. Are fixed or abutted to the superconducting coil unit 23, so that the heat insulating distance of the heat insulating support member can be increased, and the first and second heat insulating support members 43, 4
4, heat entering the superconducting coil unit 23 due to heat conduction can be reduced. In addition, since the space for the mounting portion of the heat insulating support member can be widened, the heat insulating support portion can be easily assembled.

Embodiment 6 FIG. FIG. 9 is a sectional view showing an embodiment of the sixth aspect of the present invention. Reference numeral 52 denotes a multiple heat insulating support column in which a plurality of cylindrical heat insulating materials are concentrically arranged, the cylindrical members are thermally separated from each other, and the ends of adjacent cylinders are alternately turned back and connected. One end of the cylindrical column 52 is fixed to the beam chamber 26 side, and the other end is abutted or fixed on the superconducting coil unit 23, respectively. The amount of heat that penetrates due to heat conduction of the member can be greatly reduced. In addition, since the axial rigidity of the heat insulating support member can be increased and the spring constant in the direction perpendicular to the axis can be reduced, the weight of the beam chamber 26 is rigidly supported to suppress displacement, and also due to thermal expansion and contraction in the horizontal direction. The displacement is absorbed by the elastic deformation of the member itself, so that the stress generated in the heat insulating support portion can be reduced.

Embodiment 7 FIG. FIG. 10 is a perspective view showing an embodiment of the seventh aspect of the present invention, and FIG. 11 is a sectional view of a central portion (A plane) of FIG. In the figure, 54 is the beam chamber 2
Radiation heat shielding means provided so as to cover almost the entire circumference of 6, and is made of a metal plate or the like. The radiation heat shielding means 54 connects the beam chamber 26 to the superconducting coil unit 2.
Before combining with the superconducting coil unit 23 as in the above-described embodiment, it is necessary to integrate the beam into the beam chamber 26 before combining with the superconducting coil unit 23.
4 and the superconducting coil unit 23 are attached while being thermally insulated. By providing the radiant heat shielding means 54 in the beam chamber 26 in this manner, the amount of radiant heat entering from the beam chamber 26 to the superconducting coil unit 23 can be reduced. However, the radiant heat shielding means 54 is integrated and attached to the beam chamber 26 in advance. As a result, the construction becomes very easy, and the final dimensions of the assembled state are confirmed and combined with the superconducting coil unit 23, so that the contact with the superconducting coil unit 23 is prevented and the heat insulation performance is reliably exhibited. be able to.

Embodiment 8 FIG. FIG. 12 is a sectional view of a beam chamber according to an embodiment of the present invention. In the present embodiment, the radiant heat shielding means of the seventh embodiment is constituted by a multi-layer heat insulating material 55 and a heat shield 56 constituted by a metal plate.
In the figure, 55 is a laminate in which several layers to several tens of layers of a reflective material having a low emissivity such as a mylar sheet on which aluminum is deposited and a heat insulating spacer having a small thermal conductivity such as a nylon net are alternately stacked. A multi-layered heat insulating material wound and attached directly so as to cover almost the entire circumference of the surface of the beam chamber 26 with respect to the superconducting coil unit 23, a heat shield 56 provided so as to cover the outer side of the multi-layered heat insulating material 55, The divided members are connected by bolts or the like, 57 is an upper plate, 58 is a lower plate, and 59 is a side plate. 6
Reference numeral 0 denotes a plurality of heat-insulating support rods that support the heat shield in a heat-insulating manner while maintaining a predetermined interval from the beam chamber 26. With this configuration, the optimum number of layers is adjusted according to the temperature at which the respective members of the beam chamber 26 and the heat shield 56 are balanced, and the gap that can be secured between the beam chamber 26 and the heat shield 56. A multi-layered heat insulating material can be installed, and the heat shield 56 can be mounted by adjusting the relative position after confirming the final finished state of the multi-layered heat insulating material 55, so that heat insulation can be reliably performed. In this embodiment, the radiation heat shielding means 5
4 is constituted by both the multi-layered heat insulating material 55 and the heat shield 56, but may be constituted by either one.

Embodiment 9 FIG. FIG. 13 is a sectional view of a beam chamber according to another embodiment of the invention. In the eighth embodiment, the multi-layer heat insulating material 55 is directly wound around the beam chamber 26.
It is a heat-resistant heat insulating member provided between them.

Normally, a baking heater 62 is installed on the wall of the beam chamber 26 for performing baking for releasing the residual gas from the vacuum wall in a short time to make the inside of the beam chamber 26 an ultra-high vacuum. When the multi-layered heat insulating material 55 comes into direct contact with the high-temperature portion, it may be melted or burnt, which may significantly lower the heat insulating performance. The heat-resistant heat insulating member 61 is provided with the heat-resistant heat-insulating member 61. A heat-resistant plastic sheet such as a glass fiber tape or cloth, Kapton, a laminated plate of glass epoxy resin, or the like is suitably used in consideration of the heating temperature of the beam chamber 26. Use a suitable one. With this configuration, even if the beam chamber 26 is heated, the multi-layered heat insulating material 55 does not deteriorate, so that the required heat insulating performance can be maintained.

Embodiment 10 FIG. FIG. 14 is a perspective view showing another embodiment of the invention of claim 8 and showing a construction state of a multi-layered heat insulating material. In the figure, reference numeral 63 denotes a first multi-layered heat insulating material in which the outer surface of the beam chamber 26 is divided into almost two parts, and 64 denotes a portion where the other half of the beam chamber 26 is adjacent to the first multi-layered heat insulating material 63. It is a second multi-layered heat insulating material attached with a large gap.

In a state where the layers of the multi-layered heat insulating material covering the periphery of the beam chamber 26 are each formed substantially in a plane as shown in FIG. 10, when the charged particles are circulated in the beam chamber 26, the aluminum vapor deposition layer is formed. An eddy current flows, which affects the detection sensitivity of various beam measurement monitors, and when the superconducting coil 1 is quenched, a large eddy current flows, and the temperature of the multi-layered heat insulating material 55 itself may rise. The division as described above can reduce the eddy current loop and reduce the noise of the measurement monitor. In addition, a rise in temperature during quench of superconducting coil 1 can be reduced.

The number of divisions and the shape of the divided pieces of the multi-layered heat insulating material may be appropriately determined in consideration of the eddy current loop.

Embodiment 11 FIG. Referring to FIG. 12, one embodiment of the present invention will be described. In the figure, reference numeral 60 denotes a plurality of heat-insulating support rods for supporting the beam chamber 26 and the heat shield in a heat-insulating manner. The axial load is rigidly supported, and a displacement of several millimeters is allowed so that the horizontal force acting between the two fulcrums of the shaft can be absorbed by the elastic deformation of the support rod. With such a configuration, the beam chamber 2
When the heat shield 6 and the heat shield 56 are assembled, a slight positional deviation in the horizontal direction can be absorbed by the elastic deformation of each of the heat insulating support bars 60 itself. Further, a difference in expansion and contraction due to thermal expansion during baking of the beam chamber 26 and thermal contraction in the cooling process of the heat shield 56 can be absorbed by the elastic deformation of each heat insulating support rod 60 itself in the same manner as described above. Therefore, no excessive stress is generated, and therefore, deformation of the heat shield 56 due to thermal stress or the like, and further, contact caused by this deformation can be prevented.

Embodiment 12 FIG. FIG. 12 illustrates an embodiment of the tenth aspect of the present invention. In the figure, the heat shield 56 covering the beam chamber 26 is composed of an upper plate 57 and a lower plate 58.
And two side plates 59, but the upper plate 5
7 and the lower plate 58 are a non-magnetic metal plate having a large electric resistance,
For example, an austenitic stainless steel plate is used, and the side plate 59 is made of a non-magnetic metal plate having high thermal conductivity, for example, a pure aluminum plate.

The operation in this case will be described. The superconducting coil 1 is arranged so that a magnetic flux penetrates in the vertical direction of the beam chamber 26. When the superconducting coil 1 is excited to generate a high magnetic field and quench occurs, the heat shield 56 An eddy current flows through each component, and an electromagnetic force having a magnitude proportional to the eddy current acts on each member. Since the eddy current is proportional to the area where the magnetic flux intersects, and is inversely proportional to the specific resistivity of the constituent members, a high-resistance stainless steel member is applied to the upper plate 57 and the lower plate 58 where the magnetic flux intersects over a wide area. The electromagnetic force caused by the eddy current during the quench is prevented from exceeding the allowable stress of the member itself. On the other hand, the side plate 59 is arranged substantially parallel to the direction of the magnetic force lines, and the area intersecting with the magnetic flux is very small as compared with the upper plate 57 and the lower plate 58, and the electromagnetic force due to the eddy current can be ignored. (Low electrical resistance)
This is used as a heat transfer path so that the upper plate 57 and the lower plate 58 can be cooled. In this case, if a vertical slit is formed in the center of the side plate 59, the electric loop can be separated while securing the heat transfer path.

In Examples 8 to 12, the heat shield 56 was used.
Although the upper plate 57 or the lower plate 58 and the side plate 59 are overlapped and fastened with a plurality of bolts,
A sheet, film, or adhesive tape of polyethylene, polyimide, or the like may be sandwiched between the surfaces contacting the above members. By doing so, the upper plate 57 or the lower plate 58 and the side plate 59 can be electrically insulated, so that the eddy current loop between these members can be cut off.

Embodiment 13 FIG. FIG. 15 is a perspective view of a heat shield according to another embodiment of the present invention. In the twelfth embodiment, the upper plate 57 and the lower plate 58 are each composed of one sheet. However, 65 is a divided upper plate which is divided into a plurality of parts and attached with a fixed interval, and 66 is the same as the upper plate 65 described above. It is a divided lower plate divided and attached. By dividing the upper plate and the lower plate into a plurality of pieces, the eddy current flowing through each of the divided pieces is reduced, and the electromagnetic force and heat generated on the shield member itself when the superconducting coil is quenched can be reduced.

Embodiment 14 FIG. FIG. 16 is a plan view of a heat shield plate according to another embodiment of the present invention. In FIG. 16, (A) shows a plurality of cutouts provided in the upper plate 57 and the lower plate 58 of the heat shield 56, each of which is alternately shifted in a direction perpendicular to the beam path. By forming the notch in this way, the eddy current flowing through the plate can maintain the same effect as in the thirteenth embodiment, and the upper plate 57 and the lower plate 58 can be treated as one member each, so that the assembly of parts can be facilitated. . FIG. 16B shows a structure in which a suitable number of cutouts are provided at appropriate intervals in the beam trajectory direction and the direction orthogonal to the beam except for the periphery of the upper plate 57 or the lower plate 58 of the heat shield 56. Providing the peripheral edge as described above does not cause deformation, so that parts can be easily handled and assembly can be performed with high accuracy.

Embodiment 15 FIG. FIG. 17 is a perspective view and a partial cross-sectional view of a heat shield according to an embodiment of the present invention.
FIG. 18 is a cross-sectional view of the central portion (A surface) of FIG. In the drawing, the upper plate 57 and the lower plate 58 of the heat shield 56 are non-magnetic stainless steel plates constructed in the same manner as in the twelfth embodiment, and 67 is cut into a suitable size and a plurality is cut out.
Alternatively, a metal plate having a large thermal conductivity, such as a copper tropical plate, disposed at an appropriate interval on the lower plate 58, 68 is an adhesive for bonding the upper plate 57 or the lower plate 58 and a plurality of tropical plates 67, 69 Are a plurality of fixing screws provided at appropriate intervals so as to prevent the adhesive surface of the tropical plate 67 from peeling off. As the fixing screw 69, a laminated rod of polycarbonate or glass epoxy resin is used in consideration of electric insulation and heat insulation.

As described above, by forming the upper plate 57 or the lower plate 58 and the tropical plate 67 with a thin adhesive layer, it is possible to electrically insulate or form a large electric resistance layer. By appropriately selecting the mounting interval, the eddy current loop can be reduced, and the electromagnetic force induced when the superconducting coil 1 is quenched can be sufficiently reduced. Further, the thickness of the adhesive layer between the tropical plate 67 and the upper plate 57 or the lower plate 58 can be 0.1 to 0.2 mm or less, so that the thermal resistance here is sufficiently small. With this configuration, deformation of the heat shield due to electromagnetic force at the time of quench of the superconducting coil is suppressed, and the upper plate 57 and the lower plate 58 of the heat shield are connected to the tropical plate 6.
By cooling one end of 7, cooling can be performed by heat conduction using the heat transfer plate 67 as a heat transfer path. In this case, if the tropic plate 67 is divided into two parts at the center, the formation of an eddy current loop can be avoided while securing a heat transfer path.

Further, a thin fiber or cloth of glass may be laid in a mat shape on an adhesive portion between the upper plate 57 or the lower plate 58 and the tropical plate 67 and solidified with an adhesive 68.
By doing so, the upper plate 57 or the lower plate 58
And the tropical plate 67 can be prevented from directly contacting each other, so that electrical insulation can be ensured.

In the fifteenth embodiment, the heat shield 56
The side plate 60 is made of a member having a high thermal conductivity such as aluminum, but if the heat transfer path can be sufficiently secured by the tropical plate 67, the entire heat shield is made of a non-magnetic metal plate having a large electric resistance. It may be configured to cover.

Embodiment 16 FIG. FIG. 19 is a perspective view of a heat shield according to another embodiment of the present invention. In the sixteenth embodiment, the tropical plate 68 is installed in a direction parallel to the beam trajectory of the beam chamber 26, but 70 is a tropical plate provided in a direction orthogonal to the beam trajectory of the beam chamber 26. With this configuration, the side plate 60
Can be used as a heat transfer path to cool the upper plate 58 and the lower plate 59, so that the average temperature of the shield can be reduced by the reduction in thermal resistance.

Embodiment 17 FIG. FIG. 20 is a cross-sectional view showing an embodiment of the twelfth aspect of the present invention. In the figure, reference numeral 71 designates an extendable portion of a first bellows joint 41 (see FIG. 3) provided at both ends of the beam chamber 26. The first bellows 72 is a first flange provided with two sealing grooves on the end face of the first bellows joint 71, and the first bellows 73 is connected to the beam inlet port 8 or the beam outlet port 9 of the vacuum chamber 5. A relay flange for connecting to the flange 72, 7
4 is a first vacuum seal mounted inside the two seal grooves of the first flange, 75 is a second vacuum seal mounted outside the two seal grooves, and 76 is through the relay flange 73. The first vacuum seal 74 is connected to the first flange 72.
And a plurality of fixing bolts 77 for providing and fastening the necessary sealing surface pressure to the second vacuum seal 75, and a plurality of fixing bolts 77 are provided between the beam entrance port 8 or the beam exit port 9 and the relay flange 73.
And a third vacuum seal for sealing the vacuum seal. Here, the relay flange 73 is made of a material having a low outgassing rate, for example, a vacuum melting material of austenitic stainless steel in consideration of forming a part of an ultra-high vacuum beam duct. Such a configuration can be applied to the radiation light port 10.

With this configuration, the first vacuum seal 74 of the first flange 72 is on the ultra-high vacuum side inside the beam chamber, and the second vacuum seal 75 is on the adiabatic vacuum side of the vacuum chamber 5. Since the sealing is performed independently, the helium gas can be blown from the atmosphere side when performing a helium leak test by evacuating each system. Therefore, the inflow of helium gas, which is a kind of gas that is difficult to be evacuated in the vacuum portion, particularly in the vacuum evacuation on the ultrahigh vacuum side, can be prevented, so that ultrahigh vacuum can be easily achieved. In addition, a material that emits a small amount of gas is applied only to a portion where an ultra-high vacuum is formed, and a vacuum chamber 5 that does not require an ultra-high vacuum
By using a magnetic material such as pure iron, a part of the magnetic shield can be formed, and the superconducting electromagnet can be designed rationally.

Embodiment 18 FIG. FIG. 21 is a sectional view showing another embodiment of the twelfth aspect of the present invention. In Embodiment 17 described above, the first flange 72 is provided with a double vacuum seal, but in the figure, the first flange 72 is provided with only the first vacuum seal, and instead, a plurality of fixings of the relay flange 73 are performed. A countersunk screw hole is provided in the counterbored portion of the bolt head of the bolt 76, and a plurality of packings 78 are respectively mounted on the seating surfaces of the screw holes, and 79 is brought into contact with the packing 78 to provide an appropriate surface pressure. A submerged bolt that seals the vacuum by adding With this configuration, the first
Since the second vacuum seal of the flange is eliminated, the outer shape of the flange can be reduced and the tightening force of the seal can be reduced, so that there is a margin in designing the strength of the flange, and the size of the flange can be reduced one size.

Embodiment 19 FIG. FIG. 22 is a sectional view showing another embodiment of the twelfth aspect of the present invention. In Embodiments 19 and 20, the end face of the relay flange 73 is located outside the inner wall surface of the vacuum vessel 5, but in FIG. 22, the end face of the relay flange 73 is located inside the inner wall face of the vacuum vessel 5. I stick it out. With such a configuration,
When the beam chamber 26 is mounted on the vacuum chamber 5, the first bellows 71 of the bellows joint is compressed and inserted with a gap provided between the end face of the first flange 72 of the beam chamber 26 and the inner wall surface of the vacuum chamber 5. Relay flange 7
A sufficient interval can be ensured in a state where 3 is removed, and the assembling work becomes easier. In addition, the first bellows has a short amount of expansion and contraction,
That is, a bellows having a small number of peaks can be obtained.

Embodiment 20 FIG. FIG. 23 is a sectional view of a superconducting electromagnet according to an embodiment of the present invention. In the figure, 81 is a plurality of cooling jackets provided in contact with the outer wall surface of the beam chamber 26, 82 is a connecting pipe of the cooling jacket 81 arranged in a distributed manner, and 83 is adiabatically guided through the vacuum chamber 5. The refrigerant pipe 84 is a general-purpose refrigerator using Freon or the like as a refrigerant.

In the structure configured as described above,
The beam chamber 26 is cooled to a predetermined temperature, for example, by circulating a refrigerant such as chlorofluorocarbon through a refrigerant pipe 83 from a general-purpose refrigerator 84 provided outside the vacuum chamber 5 of the superconducting electromagnet 11 in the cooling jacket 81 of the beam chamber 26. ,
The cooling is performed from -15 ° C to about -30 ° C. By adopting such a configuration, the heat entering the superconducting coil unit 23, which is cooled and held at 4K from the wall surface of the beam chamber 26, can be reduced, so that the liquid helium that cools the superconducting coil 1 to 4K can be reduced. Evaporation loss can be reduced. Also, by lowering the wall temperature of the beam chamber 26, the amount of gas released from the inner wall surface of the beam chamber 26 is reduced, so that the ultimate pressure of ultra-high vacuum can be reduced.

In the above embodiment, the cooling is provided by providing a cooling jacket on the wall surface of the beam chamber 26. However, the cooling pipe is directly contacted and wound around at an appropriate interval according to the shape of the wall surface. You may.

[0068]

As described above, according to the first aspect of the present invention, the beam chamber through which the charged particles pass is provided independently in the vacuum chamber of the superconducting coil. Even if the degree of vacuum changes due to various disturbances or the like, the interior of the beam chamber can be maintained at the desired ultra-high vacuum. As a result, the instability factors of the charged beam circulating in the beam chamber, such as collision and scattering with the residual gas molecules, can be suppressed, and the accumulated charged beam can be circulated stably for a long time. Further, since the adiabatic vacuum of the superconducting coil is not affected even if the beam chamber is opened to the atmosphere, there is an effect that the operation of the superconducting electromagnet can be stably performed regardless of the vacuum on the beam chamber side.

According to the second aspect of the present invention, a plurality of radiation light ducts are thermally insulated from the side surface of the beam chamber with the superconducting coil unit, and the radiation light can be extracted by providing a vacuum seal at a portion penetrating the vacuum chamber. So,
Even if the degree of vacuum on the side of the superconducting coil changes, the synchrotron radiation can be stably extracted without being affected by the inside of the radiation light duct. In addition, since the vacuum of the adiabatic vacuum portion of the superconducting coil is not deteriorated even if the radiation light duct side is opened to the atmosphere, the superconducting electromagnet can be operated irrespective of the vacuum of the radiation light duct system.

According to the third aspect of the present invention, the beam chamber is adiabatically supported on the wall surface of the superconducting coil container by a heat insulating support member at a predetermined interval, and a plurality of ports of the beam chamber pass through the wall surface of the vacuum chamber. Each part has an elastic bellows joint, so
The beam chamber can be installed along the charged particle beam trajectory, and the charged particle can be circulated stably.

According to the fourth aspect of the present invention, one or two of the heat-insulating supporting members for supporting the beam chamber, which serve as a reference relative to the superconducting coil container, are fixedly supported at one or two positions. Are adiabatically supported at a plurality of points so that the distance between the superconducting coils and the beam chamber is substantially constant, so that the charged particles can stably circulate while maintaining the relative position and the parallelism between the superconducting coil and the beam chamber substantially constant. .

According to the fifth aspect of the present invention, a supporting member is provided on a side surface of the beam chamber, and a heat insulating supporting member is attached to the supporting member to support the heat insulating member on the wall surface of the superconducting coil container. The span can be lengthened, and the amount of heat penetrated by heat conduction through the heat insulating support member can be reduced. In addition, there is an effect that the installation space is widened and the workability of assembly is improved.

According to the sixth aspect of the present invention, since the heat insulating support member of the beam chamber is constituted by a multiple cylindrical heat insulating column, the heat insulating distance can be made twice or more longer than the mounting span length, and the heat insulating performance is greatly improved. Can be improved. Also,
Since the axial direction of the heat insulating support member is rigidly supported and the displacement of several millimeters in the direction perpendicular to the axis at the fulcrum at both ends can be absorbed by elastic deformation, the distance between the beam chamber and the superconducting coil container is kept constant. In addition to the above, there is an effect that thermal stress can be reduced by elastic deformation to absorb displacement caused by heating and baking of the beam chamber and cooling and expansion of the superconducting coil during cooling.

According to the seventh aspect of the present invention, since the heat radiation shielding means is pre-integrated and attached to the beam chamber, the construction becomes very easy, and the final dimensions of the assembled state are confirmed before the superconducting coil is mounted. Since they can be combined, they have a large practical effect, such as preventing thermal contact or the like and ensuring heat insulation performance.

In the invention according to the eighth aspect, the multi-layered heat insulating material is directly attached to the beam chamber, and a heat shield is provided so as to substantially surround the periphery thereof. Is very easy to do. In addition, the optimum number of layers is adjusted in the gap between the beam chamber and the heat shield, and the multi-layered heat insulating material is installed. The final finished state is checked, and the relative position of the heat shield is adjusted and installed. This has the effect that the heat insulation performance of the steel can be secured.

According to a ninth aspect of the present invention, a plurality of heat-insulating support rods supported by the heat shield of the beam chamber are rigidly supported in the axial direction by using a fiber-reinforced resin lamination rod or a pipe, and a direction perpendicular to the axis at both ends of the shaft is provided. Can absorb displacements of several millimeters by elastic deformation, so that the weight of the heat shield is rigidly supported, the distance between the superconducting coil container and the heat shield can be kept constant, preventing thermal contact and heat shielding. Since the difference in elongation due to the contraction of the plate can be absorbed by the elastic deformation of the heat insulating support rod, the thermal stress through the support portion of the heat shield can be reduced, and the deformation of the shield plate itself can be suppressed, thereby preventing thermal contact. And so on.

According to the tenth aspect of the present invention, the shield plate for covering the surface of the heat shield member of the superconducting electromagnet in the direction substantially intersecting with the magnetic flux is provided by a non-magnetic metal plate having a large electric resistance, and the surface substantially parallel to the magnetic flux. A non-magnetic metal plate with a small thermal resistance is placed on the shield plate that covers the shield, so even if a steep magnetic field change occurs due to the quench of the superconducting coil, the electromagnetic force due to the eddy current induced in the heat shield member The deformation of the shield plate itself can be prevented by keeping it small. In addition, since a member having a small thermal resistance can be used as a heat transfer path to cool a member having a high resistance, the average cooling temperature of the shield can be reduced.

According to the eleventh aspect of the present invention, the heat shield plate is made of a non-magnetic metal plate having a large electric resistance and a non-magnetic metal plate having an appropriate shape having a small heat resistance is integrally formed by bonding. Even if the magnetic field changes abruptly when the superconducting coil is quenched, the eddy current flowing through the heat shield is small, so that the electromagnetic force generated in the heat shield itself can be reduced. Further, since a plurality of heat transfer plates can be appropriately dispersed and cooled in the heat shield plate, there is an effect that the entire heat shield can be uniformly cooled.

According to a twelfth aspect of the present invention, there is provided a vacuum chamber, a superconducting coil unit having a space provided in the vacuum chamber so as to guide charged particles along a predetermined trajectory; A beam chamber for guiding charged particles by separating the beam chamber, a plurality of beam ducts communicating with the wall surface of the beam chamber are respectively provided with relay flanges at portions penetrating the vacuum chamber, and a sealing surface of the relay flange and the beam chamber are provided. It is possible to easily achieve an ultra-high vacuum in a portion through which a charged beam passes so that the end face of the beam duct and the sealing face of the through-hole of the vacuum tank are connected via a vacuum seal. In addition, due to the above division, it can be applied to a part of a magnetic shield that suppresses a leakage magnetic field from a superconducting coil that generates a high magnetic field using a magnetic material such as pure iron to a vacuum chamber that does not require an ultra-high vacuum. This has the effect that the superconducting electromagnet can be designed rationally.

According to the thirteenth aspect of the present invention, a beam chamber integrated with a superconducting coil is circulated through a refrigerant or a liquefied gas of a general-purpose refrigerator to provide a simple and reliable cooling system for cooling. Therefore, there is an effect that heat entering the superconducting coil side can be reduced and the amount of expensive liquid helium evaporated can be reduced.

[Brief description of the drawings]

FIG. 1 is a view showing a longitudinal section of a charged particle superconducting electromagnet according to an embodiment of the present invention.

FIG. 2 is a view showing a horizontal section of FIG. 1;

FIG. 3 is a horizontal sectional view showing a superconducting electromagnet according to an embodiment of the present invention;

FIG. 4 is a sectional view of a portion (AA) in FIG. 3;

FIG. 5 is a partial sectional view of a heat insulating support portion of a beam chamber of a superconducting magnet for charged particles according to an embodiment of the present invention.

FIG. 6 is a plan view of a heat insulating support structure of a beam chamber of a superconductive magnet for charged particles according to another embodiment of the present invention.

FIG. 7 is a partial sectional view (AA) of a heat insulating support portion of the beam chamber of FIG. 6;

FIG. 8 is a sectional view of a heat insulating support structure of a beam chamber of a superconductive magnet for charged particles according to an embodiment of the present invention.

FIG. 9 is a sectional view of a heat-insulating support portion of a beam chamber of a superconducting electromagnet for charged particles according to an embodiment of the present invention.

FIG. 10 is a perspective view showing a heat insulating structure of a beam chamber of a superconducting magnet for charged particles according to an embodiment of the present invention.

FIG. 11 is a perspective view of a central portion (A surface) of FIG. 10;

FIG. 12 is a sectional view of a heat shield of a superconducting magnet for charged particles according to an embodiment of the present invention.

FIG. 13 is a cross-sectional view of a heat shield of a charged particle superconducting electromagnet according to another embodiment of the present invention.

FIG. 14 is a perspective view showing an external appearance of a multi-layer heat insulating material for a superconducting electromagnet for charged particles according to an embodiment of the present invention.

FIG. 15 is a perspective view of a heat shield of a superconducting electromagnet for charged particles according to another embodiment of the present invention.

FIG. 16 is a perspective view of a heat shield plate of a superconducting electromagnet for charged particles according to another embodiment of the present invention.

FIG. 17 is a perspective view and a partial cross-sectional view of a heat shield of a superconducting electromagnet for charged particles according to an embodiment of the present invention.

18 is a partial cross-sectional view of a central portion (A surface) of FIG.

FIG. 19 is a perspective view of a heat shield of a superconductive magnet for charged particles according to another embodiment of the eleventh aspect of the present invention.

FIG. 20 is a partial sectional view showing a structure of a joint portion of a beam chamber of a superconducting electromagnet for charged particles according to an embodiment of the present invention.

FIG. 21 is a partial sectional view showing a structure of a joint portion of a beam chamber of a superconducting electromagnet for charged particles according to another embodiment of the present invention.

FIG. 22 is a partial sectional view showing a structure of a joint portion of a beam chamber of a superconducting magnet for charged particles according to another embodiment of the twelfth aspect of the present invention.

FIG. 23 is a sectional view showing a superconductive magnet for charged particles according to an embodiment of the present invention;

FIG. 24 is a bird's-eye view of a deflection electromagnet for an electron storage ring, showing an example of a conventional charged particle superconducting electromagnet.

FIG. 25 is a vertical sectional view of a central portion of FIG. 24;

26 is a horizontal sectional view of the electron beam trajectory shown in FIG. 24.

FIG. 27 is a perspective view showing a shape and appearance of a superconducting coil portion in FIG. 25;

FIG. 28 is a conceptual diagram of a configuration of an electron storage ring showing an example of application of a conventional superconductive magnet for charged particles.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Superconducting coil 2 Coil container 3 Electron beam passage 4 Heat shield 5 Vacuum tank 6 Thermal insulation support member 7 Helium supply port 8 Beam entrance port 9 Beam exit port 10 Plural radiation ports 11 Superconducting electromagnet 12 Beam injector 13 High frequency cavity 14 Straight line Part beam duct 20 Upper coil container 21 Lower coil container 22 Low temperature electromagnetic force support 23 Superconducting coil unit 24 Z-axis heat insulating support 25 X-axis heat insulating support 26 Beam chamber 27 Flange joint 28 Synchrotron duct A 31 Magnetic shield 32 Synchrotron radiation Duct B 33 Vacuum gate valve 34 Liquid helium reservoir 35 Helium vacuum tank 36 Helium pipe A 37 Helium pipe B 41 First bellows joint 42 Second bellows joint 43 First heat insulating support member 44 Second heat insulating support member 45 First 3 breaks Supporting member 46 Insulating support shaft 47 Supporting column 48 Connecting member 51 Plural support fittings 52 Multiple insulating supporting columns 54 Radiation heat shielding means 55 Multiple laminated heat insulating material 56 Heat shield 57 Upper plate 58 Lower plate 59 Side plate 60 First heat insulating support rod 61 High temperature heat insulating member 62 Sheath heater 63 First multi-layer heat insulator 64 Second multi-layer heat insulator 65 Split upper plate 66 Split lower plate 67 Tropical plate 68 Adhesive 69 Fixing screw 70 Tropical plate B 71 First bellows 72 First flange 73 Relay flange 74 First vacuum seal 75 Second vacuum seal 76 Fixing bolt 77 Third vacuum seal 78 Plural packings 79 Sunk bolt 81 Cooling jacket 82 Communication pipe 83 Refrigerant pipe 84 General-purpose refrigerator

Continued on front page (72) Inventor Toshie Takeuchi 8-1-1, Tsukaguchi-Honcho, Amagasaki-shi Mitsubishi Electric Corporation Central Research Laboratory (72) Inventor Shunji Yamamoto 8-1-1, Tsukaguchi-Honmachi, Amagasaki-shi Mitsubishi Electric Corporation (72) Inventor Tadatoshi Yamada 8-1-1 Tsukaguchi Honcho, Amagasaki City Mitsubishi Electric Corporation Central Research Laboratory (72) Inventor Shiro Nakamura 8-1-1, Tsukaguchi Honmachi, Amagasaki City Mitsubishi Electric Corporation (72) Inventor Akinori Ohara 8-1-1, Tsukaguchi-Honcho, Amagasaki-shi Mitsubishi Electric Corporation Central Research Laboratory (72) Inventor, Masao Morita 8-1-1, Tsukaguchi-Honmachi, Amagasaki-shi Mitsubishi Electric Corporation (72) Inventor Shoichi Yokoyama 8-1-1, Tsukaguchi Honcho, Amagasaki City Mitsubishi Electric Corporation Central Research Laboratory (72) Inventor Kenji Shimohata 8-1-1, Tsukaguchi Honmachi, Amagasaki City Mitsubishi Electric Corporation (72) Inventor Takashi Inaguchi Tsukaguchi Amagasaki 8-1-1, Mitsubishi-cho, Central Research Laboratory Mitsubishi Electric Corporation (72) Inventor Kazutake Senoo 8-1-1, Tsukaguchi-Honmachi, Amagasaki-shi Mitsubishi Electric Corporation Central Research Laboratory (56) References JP-A-6 JP-A-140190 (JP, A) JP-A-6-132118 (JP, A) JP-A-4-73988 (JP, A) JP-A-4-71199 (JP, A) JP-A-5-109497 (JP, A) JP-A-3-30298 (JP, A) JP-A-3-29303 (JP, A) JP-A-62-193100 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) H05H 7/04 H05H 13/04

Claims (14)

(57) [Claims] 1. A vacuum vessel, a pair of superconducting coils provided in the vacuum vessel and forming a trajectory of charged particles, and a pair of superconducting coils housed in a pair of coil containers together with liquid helium, respectively. A superconducting coil unit disposed insulated in the vacuum chamber; a beam chamber disposed insulated in a space between a pair of coil containers of the superconducting coil unit to pass charged particles; and A superconducting electromagnet apparatus for charged particles, characterized in that a joint provided with a vacuum seal is provided at a portion penetrating a vacuum chamber and opened, and a vacuum space of the vacuum chamber and a vacuum space of a beam chamber are made independent. 2. A joint provided with a radiation duct for extracting radiation in a tangential direction of a charged particle trajectory on a side wall of an outer peripheral portion of the beam chamber, and having a vacuum seal at a part where the radiation light duct penetrates the vacuum chamber. 2. The superconducting electromagnet device for charged particles according to claim 1, wherein the vacuum space in the vacuum chamber and the vacuum space in the beam chamber are made independent. 3. A heat insulating support member for thermally supporting the superconducting coil unit in the vacuum chamber, an electromagnetic force support for supporting an electromagnetic force generated between a pair of coil containers of the superconducting coil unit, and the beam. A plurality of heat insulating support members for thermally insulating the chamber in a space between a pair of coil containers of the superconducting coil; and a vacuum seal at both ends of the beam chamber or / and at a portion where the radiation light duct penetrates the vacuum chamber. The superconducting electromagnet device for charged particles according to claim 1 or 2, further comprising a joint that is provided with a telescopic joint, wherein the heat-insulating support member that thermally supports the beam chamber is slidable in a horizontal plane. 4. A variation in the position of the beam chamber is limited by limiting a range in which one or two of the plurality of heat insulating support members for thermally insulating the beam chamber can slide. 請 characterized by
The superconducting electromagnet device for charged particles according to claim 3 . 5. The beam chamber according to claim 1, wherein a plurality of support members are provided on a side surface of the beam chamber, and the heat-insulating support members of the beam chamber are supported on the support members. Superconducting electromagnet device for charged particles. 6. The superconducting electromagnet device for charged particles according to claim 1, wherein the heat-insulating support member of the beam chamber is constituted by a multiple cylindrical heat-insulating column. 7. The beam chamber according to claim 1, wherein a radiation heat shielding means for covering substantially the entire surface of the beam chamber facing the superconducting coil unit is provided integrally with the beam chamber. Superconducting magnet device for charged particles. 8. The heat shield comprising a metal plate box provided with a heat insulating support member for thermally insulating and supporting the beam chamber, wherein the radiation heat shielding means covers substantially the entire surface of the beam chamber, and is wound around the beam chamber. The superconducting electromagnet device for charged particles according to any one of claims 1 to 7, wherein the superconducting magnet device for charged particles is made of at least one of a plurality of laminated heat insulating materials separated from the heat shield. Wherein said beam chamber laminates of the fiber reinforced resin having a heat-insulating support member flexible for supporting the heat shield, charged according to claim 8, characterized in that it consists of stacked bar or stack pipe Superconducting electromagnet device for particles. 10. An austenitic stainless steel member of the heat shield in a direction crossing the main magnetic field of the superconducting coil.
Constituted by less steel, pure said main magnetic field in a direction parallel member
10. The structure according to claim 8 , wherein the structure is made of an aluminum plate.
A superconducting electromagnet device for charged particles according to claim 1. 11. Oh the at least a portion of said heat shield
Composed of austenitic stainless steel, the austenite
The superconducting electromagnet device for charged particles according to any one of claims 8 to 10 , wherein a pure aluminum plate is electrically insulated and joined to a lithium-based stainless steel plate . 12. A relay flange is provided on each of the beam duct portions of the beam chamber penetrating the vacuum chamber, a vacuum flange for sealing the relay flange and a beam duct end face of the beam chamber, the relay flange and the vacuum chamber. The superconducting electromagnet device for charged particles according to any one of claims 1 to 11, further comprising a vacuum seal for sealing the through hole of the superconducting charged particle. 13. A cooling section comprising a cooling jacket or a cooling pipe provided on a wall surface of the beam chamber, and the cooling section and a refrigerator provided outside the vacuum tank are connected by a heat insulating pipe penetrating the vacuum tank. The superconducting electromagnet device for charged particles according to any one of claims 1 to 12, characterized in that: 14. A charged, characterized in that using the superconducting electromagnet charged particles according to any one of claims 1及至13
Particle storage ring.