JP3279880B2 - Fine movement positioning control device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a positioning device of the order of submicron using a piezo element, which is a typical example of a displacement generating type actuator, and more particularly to a means for compensating for a minor acceleration loop provided for a position main feedback loop. Related to the configuration.

[0002]

2. Description of the Related Art In recent years, positioning precision on the order of submicrons has been required for fine positioning in fields such as precision processing, assembly, and adjustment. Particularly, in an ultra-precision positioning stage for exposing a fine pattern, a piezoelectric element or an electrostrictive element is frequently used as a displacement generating actuator in order to realize a high resolution and a high frequency response band. As an example, FIG. 3 shows a three-degree-of-freedom fine movement positioning device that controls the positioning of one degree of freedom in translation in the vertical Z-axis direction and two degrees of freedom in inclination in a horizontal plane. This device is disclosed in Japanese Patent Application No. 6-132405, and includes an actuator 2M that displaces a flat substrate 1 as a positioning target in a vertical Z-axis direction in accordance with an applied voltage.
Positioning control is performed by 2R and 2L. The actuators 2M, 2R, and 2L include a piezo element as a driving element and a displacement magnifying mechanism for enlarging the displacement.
Near the actuators 2M, 2R, 2L, there are position sensors 3M, 3R, which measure displacement of the substrate 1 in the vertical Z-axis direction.
3L are arranged. The actuators 2M, 2
Near the R and 2L, acceleration sensors 12M, 12R and 12L for measuring the acceleration of the substrate 1 in the vertical Z-axis direction are also arranged. A mechanism including these components is called a fine movement positioning mechanism.

In FIG. 1, position sensors 3M, 3R, 3
The displacement in the vertical Z-axis direction of the substrate 1 measured by L is
Displacement amplifier 4M, 4R, electrical signal z _M of each axis displaced by 4L, z _R, is converted to z _L. The electric signal is guided to the motion mode extraction circuit 9 and the motion mode displacement signals z _g , z
θ _x, the zθ _y. The operation of the exercise mode extraction circuit 9 is as follows.
For example, it is shown in Equation 1.

[0004]

(Equation 1) Next, the motion mode displacement signals z _g , zθ _x , zθ _y are compared with target voltages z _g0 , zθ _x0 , zθ _y0 applied to the command voltage input terminals 5M, 5R, 5L, and the motion mode deviation signals e _g , eθ _x and eθ _y . This deviation signal is guided to deviation amplifiers 6M, 6R, 6L to obtain a predetermined sensitivity. Further, the outputs of the deviation amplifiers 6M, 6R, 6L are used as gain compensators 7M, 7M, which adjust the control loop for each motion mode.
It is guided to 7R and 7L and becomes motion mode-specific compensation signals c _g , cθ _x , and cθ _y relating to positions.

On the other hand, the acceleration sensors 12M, 12R, 12
The output of _L is converted into electric signals a _M , a _R , and a _L by acceleration amplifiers 13M, 13R, and 13L, and is led to a motion mode extraction circuit (second motion mode extraction circuit) 11 for the acceleration signal, and the motion mode is extracted. Separate acceleration signals a _g , a θ
_x, the aθ _y. The operation of the motion mode extraction circuit for the acceleration signal also follows Equation 1. That is, Equation 2 is obtained.

[0006]

(Equation 2) The acceleration signals a _g , aθ _x and aθ _y for each motion mode are
Appropriate filtering is performed by the filter circuits 14M, 14R, 14L, and the gain circuits 15M, 15R, 1
5L by gain-adjusted motion mode by the acceleration negative feedback signal a _g a _{', aθ x', aθ y} '( meaning the appropriate filtering will be described later). The negative feedback signal is input to the subtraction terminals of the adders 16M, 16R, 16L, and is calculated as motion mode compensation signals c _g , cθ _x , cθ _y for the position signals output from the gain compensators 7M, 7R, 7L. Then, the drive signals d _g , dθ _x , dθ _y for each motion mode are obtained. Finally, these drive signals d _g , d
θ _x and dθ _y are input to the motion mode distribution circuit 10 as shown in Equation 3, for example, and drive signals d _M ,
d _R, d _L, and the current output type power amplifier 8M, 8
R and 8L are driven.

[0007]

(Equation 3) The non-interacting feedback device including the minor loop relating to the acceleration signal and the main loop relating to the position signal as described above is referred to as a non-interacting feedback device, and the fine moving positioning device including the fine motion positioning mechanism and the non-interacting feedback device.

[0008] Incidentally. Here, the exercise mode extraction circuit 9,
The specific operation contents of the second exercise mode extraction circuit 11 and the exercise mode distribution circuit 10 are defined as Equations 1, 2 and 3, respectively. FIG. 4 shows actuators 2M and 2
A coordinate system in which R, 2L, position sensors 3M, 3R, 3L and acceleration sensors 12M, 12R, 12L are arranged is shown. When the translational motion and the in-plane rotational motion are defined with respect to the origin of the coordinates, The relationship up to Equation 3 is derived.
Of course, the decoupling feedback device can be configured by defining the translational motion and the rotational motion centered on a position shifted from the origin of the coordinate system shown in FIG. in this case,
Although the calculated values of Equations 1 to 3 are naturally different, it goes without saying that the structure of the control device in FIG. 3 is unchanged.
In the above description, the power amplifiers 8M, 8R, 8
L is of a type that outputs a current with respect to an input voltage. According to the configuration of such a feedback device, convergence to the steady-state error “zero” is guaranteed. This is because the piezo elements, which are components of the actuators 2M, 2R, 2L, are electrically capacitors, and include the current output type power amplifiers 8M, 8R, 8L and the piezo elements driven by them. The transfer function includes an integrator by itself,
The so-called closed loop of the position is of the form 1, and according to the teaching of control theory, the steady-state error "zero" is compensated.

[0009]

The fine positioning control apparatus as described above can adjust the damping for each motion mode by operating the gain circuits 15M, 15R and 15L, which are the damping adjusting means. did it. In addition, the positioning time was shortened by sequentially increasing the gains of the gain compensators 7M, 7R, and 7L for each motion mode, which is the positioning characteristic adjusting means. However, there is still a limit in improving the positioning response. In other words, the prior art could not respond to a request to increase positioning responsiveness while ensuring stability, that is, to increase the eigenvalue.

An object of the present invention is to further improve the positioning response while ensuring stability in a fine movement positioning device.

[0011]

As described above, when the gain of the position feedback loop in the fine movement positioning mechanism is increased, the responsiveness is sequentially increased. However, eventually, the dynamics of the mechanism itself are stimulated, and the improvement of the responsiveness is leveled off. Therefore, in order to further increase the responsiveness, it has been already proposed to provide damping using an acceleration sensor.

In the present invention, not only damping is electrically provided by acceleration feedback, but also rigidity is provided simultaneously with damping. According to such an acceleration feedback, the fine movement positioning mechanism can be electrically re-formed to have good stability and a high natural frequency. On the other hand, when a closed loop of the position is configured, it can be expected that the settling property is good and the positioning time is shortened.

A fine movement positioning control device according to a first aspect of the present invention comprises a plurality of displacement generating actuators for driving a positioning object, a plurality of position sensors for measuring a moving distance of the positioning object, and A displacement amplifier that converts an output of the position sensor into an electric signal, a first motion mode extraction circuit that extracts motion modes related to a plurality of positions with respect to the positioning target by an operation that receives an output signal of the displacement amplifier, A deviation amplifier for acquiring a deviation signal for each exercise mode between the output signal of the exercise mode extraction circuit and a given target position command signal and making each deviation signal a predetermined sensitivity, and a gain for adjusting the gain of the output of the deviation amplifier A compensator, a plurality of acceleration sensors for detecting the acceleration of the positioning object, an acceleration amplifier for converting an output of the acceleration sensor into an electric signal, A second motion mode extracting circuit for extracting a motion mode regarding a plurality of acceleration in the object to be positioned by calculation to an output signal in degrees amplifier, line compensates for the output of the second motion mode extraction circuit
And at least one or more motion mode signals
Then , the output of the gain feedback compensator and the output of the acceleration feedback compensation circuit are compared with the acceleration feedback compensation circuit provided with the compensation element of the integral characteristic, and the driving signal for each motion mode is obtained. And a current output type power amplifier that drives a displacement generating actuator in response to an output signal of the motion mode distribution circuit.

Further, in the fine movement positioning control device according to the second aspect of the present invention, the current output type power amplifier in the first aspect is replaced with a voltage output type power amplifier in which a PI compensator is connected in a preceding stage. It is characterized in that it is.
Here, the zero point of the PI compensator is characterized in that it is designed to cancel the pole as a first-order lag characteristic of the voltage output type power amplifier. In the present invention,
It is provided with a integral element and first-order lag form of compensation element of the cascade connection element instead of the compensation element of the integral characteristic
Good .

It is also possible to replace the acceleration sensor on the substrate as the positioning object with a speed sensor. In this case, a speed amplifier is provided instead of the acceleration amplifier, and the acceleration feedback compensation circuit shown in FIGS. wherein for at least one or more modes of motion of the signal at the site of 26
Gain compensation element instead of the compensation element of the integrating characteristics that feature.

Under the condition that the positioning actuator is of a displacement generating type (for example, a piezo element) and driven by a current output type power amplifier, from the input voltage to the power amplifier to the displacement of the fine movement positioning mechanism. Includes an integrator in the transfer function. On the other hand, under the condition of being driven by the voltage output type power amplifier, the integrator is not included.

Under the condition that the displacement generating type actuator is driven by the current output type power amplifier, a signal obtained by integrating the acceleration signal with the current output type is utilized by utilizing the special feature that an integrator is included. Negative feedback to the previous stage of the power amplifier described above, the amount of feedback acts on the fine movement positioning mechanism so as to increase both the viscosity term and the rigidity term. Therefore, when the rigidity term is added to the fine movement positioning mechanism together with the viscous term by the acceleration feedback as described above, and the position feedback is formed outside this, the stabilization is good and high-speed positioning can be performed.

[0018]

FIG. 1 shows the configuration of a fine movement positioning apparatus according to one embodiment of the present invention. In the same drawing, the same reference numerals are given to parts common or corresponding to FIG. 3, and detailed description of the parts is omitted.

Now, the fine positioning of the present invention shown in FIG.
This shows that the viscous term and the rigidity term can be electrically and simultaneously applied to the fine positioning mechanism by the function of the acceleration feedback loop when the configuration of the device is adopted. However, in FIG. 1, the acceleration feedback configuration is such that the viscous term and the rigidity term are simultaneously increased only for the vertical Z-axis translational motion, and only the viscous term is increased for the rotational motion around the Z-axis and the Y-axis. Has become.

First, for the sake of simplicity, it will be shown that the viscosity term and the rigidity term can be simultaneously increased for a one-axis fine movement positioning mechanism. FIG. 5 is a block diagram when the one-axis fine positioning mechanism 17 is driven by the power amplifier 8 of the current output type. The transfer function G _p (s) from the drive displacement x _d to the load displacement x is given by equation (4). However,
M is the mass, K is the spring constant, D is the viscous friction coefficient, and s is the Laplace operator.

[0021]

(Equation 4) In the prior art, through the detection signal of the acceleration detector 18 as shown in FIG. 6 to the filter circuit 14, it had negative feedback the output signal to the front stage of the current output type power amplifier 8. At this time, the transfer function from v to x is as shown in Equation 5.

[0022]

(Equation 5) Here, when T is designed so that T = 2ζT ₀ , Equation 6
Get the expression.

[0023]

(Equation 6) Equation 6 means that an electric viscosity term can be given by acceleration feedback. On the other hand, in the present invention, as shown in FIG. 7, the output of the acceleration detector 18 is passed through an integrator 19 having an appropriate gain, and the output is negatively fed back to a stage preceding the current output type power amplifier 8. At this time, the transfer function from v to x is given by equation (7).

[0024]

(Equation 7) Equation 7 means that not only the viscous term but also the rigidity term can be increased by negatively feeding back the signal obtained by passing the output of the acceleration detector 18 through the integrator 19 to the previous stage of the current output type power amplifier 8. . That is, when the closed loop of the position is formed with respect to Expression 7, compared to the case of acceleration feedback as shown in Expression 6, there is, of course, no acceleration feedback, and Expression 4 expressing the fine movement positioning mechanism itself is used. Compared with the equation, the settling property is good and a high-speed response can be achieved.

Referring again to the minor loop of the acceleration signal in FIG. 1, the signal aθ _x passes through the filter circuit 14R and the gain circuit 15R, and aθ _y passes through the filter circuit 14L and the gain circuit 15L before the motion mode distribution circuit 10. Negative feedback has been received. In other words, a feedback loop configuration similar to that of FIG. 3 is used for both the rotation about the X axis and the rotation about the Y axis. Therefore, only the viscous term is electrically applied to these motion modes. However, the signal a _g is inputted to the integration circuit 25M through preprocessing circuit 24M for performing signal processing such as offset voltage removal and high frequency noise removed, and negative feedback the output signal in front of the motion mode distributing circuit 10. That is, the Z-axis translational movement has an effect of increasing both viscosity and rigidity. Of course, not a _g only, constitute an acceleration feedback compensation circuit 26 to also negatively fed back to the preceding stage of the signal through the integrating circuit motion mode distributing circuit 10, such as a 25M respect A.theta. _X and A.theta. _Y No problem. That is, based on the positioning specification, an integrator such as 25M may be provided for one or more acceleration signals for each motion mode.

Finally, the effectiveness of the fine movement positioning apparatus of the present invention shown in FIG. 1 will be shown by numerical experiments. FIG. 9 shows a step response for each motion mode when an integration circuit is inserted only into the Z-axis translation motion mode in the acceleration feedback compensation circuit 26. That is, it is a positioning deviation waveform when only the Z-axis translational motion is selected from the three motion modes, and the positioning is performed by increasing the viscosity term and the rigidity term of the motion mode.

In FIG. 9, the solid line indicates the case where the integrating circuit is not inserted (case of FIG. 3), and the broken line indicates the response when the integrating circuit is inserted (case of FIG. 1). First, the data on the left side of FIG. 9 is a response when a Z-axis translation step is commanded in the Z-axis direction. According to the above-mentioned analysis, both the viscosity term and the rigidity term of the positioning mechanism could be electrically increased by inserting an integrating circuit. Therefore, in the positioning waveform in response to the translation step command in the Z-axis direction, a response in which damping is effective and the natural frequency should increase. Observation of the translation error signal e _g, can understand that the period of the pulsation to be superposed on the response waveform exhibits a slow response by the increase in comparison to is shorter, and viscosity term to that of the solid line.

On the other hand, since the Z-axis translation is commanded,
The influence on the rotational motion deviation eθ _x about the X axis and the rotational motion deviation signal eθ _y about the Y axis is, of course, small.

Next, the rotation step response around the X axis in the center of FIG. 9 will be examined. Since the insertion of the integration circuit in the acceleration feedback loop is only for the Z-axis return motion, there should be no influence on the rotational motion about the X-axis, which supports that of the numerical experiment results. That is, the solid line and the broken line overlap in the response of eθ _x , and the response is unchanged. Similarly, it can be understood that the response does not change even in the rotation step about the Y axis on the right side of FIG.

[0030]

Other Embodiments In the first embodiment, the current output type power amplifiers 8M, 8R, 8L are used for driving the piezo elements (actuators) 2M, 2R, 2L. Under the condition that the piezo element is driven by this type of power amplifier, both the viscosity and rigidity terms of the fine positioning mechanism can be increased by inserting an integrating circuit into the acceleration feedback loop, and this effect is used. As a result, the positioning characteristic when a closed loop of the position is formed is a high-speed positioning characteristic with good stability.

However, in general, the piezo element is driven by a voltage output type power amplifier. Therefore, this second
In the embodiment, the configuration of the fine movement positioning device is given based on the specifications of the voltage output type power amplifier. FIG. 2 is a block diagram showing the configuration of the fine movement positioning device according to the second embodiment. In the figure, 20M, 20R and 20L are voltage output type power amplifiers, and 21M, 21R and 21L cascade-connected before them are PI compensators. These P
The I compensator is a voltage output type power amplifier 20M, 20R,
It is designed to cancel the pole as a first-order lag characteristic of 20L at the zero point of the PI compensator. When designed in this way, the total transfer function of the cascade connection of the PI compensator and the voltage output type power amplifier becomes an integral characteristic, and the characteristic equivalent to the case where the actuator is driven by the current output type power amplifier in FIG. You get Here, P means proportional and I means integral operation. The configuration of the acceleration feedback is the same as that of FIG. 1, and both the viscosity and the rigidity can be simultaneously and electrically applied only to the Z-axis translational motion. Of course, it is needless to say that the viscosity and the rigidity terms can be electrically applied to the respective motion modes of the rotation about the X axis and the rotation about the Y axis.

The fine movement positioning device shown in FIGS. 1 and 2
This is an example of application to a three-axis fine movement positioning mechanism. Of course, the application of the present invention not only to the fine movement positioning mechanism in the three-degree-of-freedom direction but also to the fine movement positioning mechanism in the multi-degree-of-freedom direction from the one-degree-of-freedom direction is not hindered without departing from the scope of the present invention. In the embodiments shown in FIGS. 1 and 2, the control system is realized by an analog arithmetic circuit, but a part or all of the control system may be replaced by a digital arithmetic device such as an electronic computer.

Referring again to FIG. 7, the acceleration detector 18
Is fed back through the integrator 19 to obtain the transfer function of the equation (7). A similar transfer function can be realized by replacing the acceleration sensor with a speed sensor. FIG.
, 22 is a speed detector, 23 is a speed detector 22
This is a gain circuit for compensating the gain for the output of (1), and the transfer function from v to x is represented by Expression 8.

[0034]

(Equation 8) Clearly, equation (8) is the same as equation (7). Therefore, when the above principle is applied to the embodiment of FIGS. 1 and 2, the acceleration sensors 12M, 12R, 12L and the acceleration amplifiers 13M,
13R and 13L, a speed sensor and a speed amplifier for converting the output of the speed sensor into an electric signal are provided.
Is provided with a gain compensation element for at least one or more motion mode signals. In addition, as a speed sensor,
For example, a geophone sensor can be suitably used.

According to FIG. 7, by feeding back the signal of the output of the acceleration detector 18 to the integrator 19, the viscous term and the rigid term are simultaneously given to the one-axis fine positioning mechanism 17. On the other hand, when only the viscosity term is given, acceleration feedback as shown in FIG. 6 may be performed. Thus, in the present embodiment, the one-axis fine movement positioning mechanism 1
7 is provided with a compensating means for electrically applying only the rigidity term.
According to FIG. 7, both the viscous term and the rigidity term are electrically provided. By subtracting the electrically increased viscous term by the feedback configuration of FIG. 6, only the rigidity term is electrically obtained as a result. Can be granted. Therefore, the configuration of the acceleration feedback that gives only the rigidity term is shown in FIG. Using the symbols shown, the transfer function from v to x is given by equation (9).

[0036]

(Equation 9) In the derivation of equation (9), of course, T = 2 も ち ろ ん T0 is selected. Here, the design is made so that B = AT. After all, the integrator 19 and the first-order lag characteristic filter circuit 1
10 are connected in parallel as shown in FIG. 10, and the transfer function from v to x is expressed by Equation 11 when the total transfer function is in the form of a cascade connection of an integral element and a first-order lag element as shown in Equation 10. It becomes an expression.

[0037]

(Equation 10)

[0038]

[Equation 11] Obviously, there is an effect of electrically increasing only the rigidity term.
Therefore, when the above-described principle is applied to the apparatus shown in FIG. 1 or FIG.
It will have a compensating element in the form of equation 0.

[0039]

Conventionally, when the position loop gain is sequentially increased, the positioning time can be reduced.
There has been a problem that the dynamics of the fine movement positioning mechanism are gradually stimulated and the upper limit of the loop gain is suppressed. However, by the present invention lever, since the dynamics of fine positioning mechanism by acceleration feedback can be shifted to the stable side, the loop gain of the position can be further set higher than before. That is, there is an effect that the positioning time can be shortened as compared with the related art.
In particular, in acceleration feedback for each exercise mode,
By inserting an integration circuit into a specific motion mode, it is possible to simultaneously increase not only the viscosity term but also the rigidity term in only that motion mode. Therefore, when a closed loop of positions is configured, there is an effect that high-speed positioning with good settling properties can be performed. The type of disturbance applied to the fine movement positioning mechanism of the present invention is unique depending on the operation pattern of the device on which the mechanism is mounted. Therefore, an application of electrically increasing viscosity and rigidity can be expected only in a specific motion mode to which the disturbance is applied . Thus, there is an effect that the positioning characteristics can be improved at a minimum cost.

[Brief description of the drawings]

FIG. 1 is a block diagram of a fine movement positioning control device according to one embodiment of the present invention.

FIG. 2 is a block diagram of a fine movement positioning control device according to another embodiment of the present invention.

FIG. 3 is a block diagram of a fine-movement positioning control device according to the related art.

FIG. 4 is a coordinate system showing an arrangement of the actuator, the position sensor, and the acceleration sensor of FIG. 3;

FIG. 5 is a block diagram when a one-axis fine movement positioning mechanism is driven by a current output type power amplifier.

FIG. 6 is a block diagram in a case where a one-axis fine movement positioning mechanism is driven by a current output type power amplifier and acceleration feedback is performed.

FIG. 7 is a block diagram in a case where a one-axis fine movement positioning mechanism is driven by a current output type power amplifier, and when an acceleration output is fed back through an integrator.

FIG. 8 is a block diagram in a case where a one-axis fine movement positioning mechanism is driven by a current output type power amplifier, and when speed feedback is performed;

FIG. 9 is a numerical experiment result showing the effect of the present invention.

FIG. 10 is a block diagram for electrically applying only a rigidity term when a one-axis fine movement positioning mechanism is driven by a current output type power amplifier.

[Explanation of symbols]

1: substrate, 2M, 2R, 2L: actuator such as piezoelectric element, 3M, 3R, 3L: position sensor, 4M, 4R,
4L: displacement amplifier, 5M, 5R, 5L: command voltage input terminal, 6M, 6R, 6L: deviation amplifier, 7M, 7R, 7
L: gain compensator, 8M, 8R, 8L, 8: current output type power amplifier, 9: first motion mode extraction circuit, 10:
Exercise mode distribution circuit, 11: second exercise mode extraction circuit, 12M, 12R, 12L: acceleration sensor, 13M,
13R, 13L: acceleration amplifier, 14M, 14R, 14
L: Filter circuit, 15M, 15R, 15L: Gain circuit, 16M, 16R, 16L: Adder, 17: 1-axis fine movement positioning mechanism, 18: Acceleration detector, 19: Integrator,
20M, 20R, 20L: voltage output type power amplifier, 2
1M, 21R, 21L: PI compensator, 22: speed detector, 23: gain circuit, 24M: pre-processing circuit, 25M:
Integration circuit, 26: acceleration feedback compensation circuit, e
_g , eθ _x , eθ _y : deviation signal for each motion mode, z _M , z
_R, z _L: displacement amplifier 4M, 4R, output of 4L, z _g,
zθ _x , zθ _y : displacement signals for each motion mode, c _g , cθ
_x , cθ _y : Compensation signals for each motion mode, d _g , dθ _x , d
θ _y : drive signal for each motion mode, d _M , d _R , d _L : drive signal for each axis, a _M , a _R , a _L : acceleration signal, a _g ,
aθ _x , aθ _y : acceleration signal for each motion mode, a _g ′, a
θ _x ′, aθ _y ′: acceleration negative feedback signal for each motion mode, z
_{g0, zθ x0, zθ y0:} command voltage input terminal 5M', 5R
', Target voltage applied to 5L'.

──────────────────────────────────────────────────続 き Continuation of the front page (51) Int.Cl. ⁷ identification symbol FI H01L 21/68 H01L 21/68 K (58) Investigated field (Int.Cl. ⁷ , DB name) G05D 3/00-3 / 20 G05B 11/00-13/04 H01L 21/68

Claims (6)

(57) [Claims] 1. A plurality of displacement generating actuators for driving a positioning target, a plurality of position sensors for measuring a moving distance of the positioning target, and converting an output signal of each of the position sensors into an electric signal. A displacement amplifier; a first motion mode extraction circuit for extracting motion modes related to a plurality of positions with respect to the positioning object by an operation which receives an output signal of the displacement amplifier; and an output of the first motion mode extraction circuit A deviation amplifier that obtains a deviation signal for each motion mode between a signal and a given target position command signal and makes each deviation signal have a predetermined sensitivity; a gain compensator that performs gain adjustment on an output of the deviation amplifier; A plurality of acceleration sensors for detecting an acceleration of an object; an acceleration amplifier for converting an output of the acceleration sensor into an electric signal; Row and second motion mode extraction circuit, the compensation for the output of the second motion mode extracting circuit for extracting a motion mode regarding a plurality of acceleration in the object to be positioned by a calculation as an input the output signal of the amplifier
And at least one or more motion mode signals
And an acceleration feedback compensation circuit provided with a compensation element having an integral characteristic, and comparing the output of the gain compensator with the output of the acceleration feedback compensation circuit to obtain a drive signal for each motion mode, based on this signal. A motion mode distribution circuit for generating a drive signal to each axis; and a current output type power amplifier for driving the displacement generating actuator in response to an output signal of the motion mode distribution circuit. Characteristic fine movement positioning control device. 2. A plurality of displacement generating actuators for driving a positioning target, a plurality of position sensors for measuring a moving distance of the positioning target, and a displacement for converting an output of each of the position sensors into an electric signal. An amplifier; a first motion mode extraction circuit for extracting motion modes relating to a plurality of positions with respect to the positioning object by an operation which receives an output signal of the displacement amplifier; and an output signal of the first motion mode extraction circuit And a target voltage to be applied to the command voltage input terminal, to obtain a deviation signal for each motion mode, and to make each deviation signal a predetermined sensitivity; and a gain compensator for performing gain adjustment to the output of the deviation amplifier. A plurality of acceleration sensors for detecting the acceleration of the positioning object; and an acceleration amplifier for converting an output of the acceleration sensor into an electric signal. A second motion mode extraction circuit for extracting a plurality of motion modes related to the acceleration of the positioning object by an operation using an output signal of the acceleration amplifier as an input; and compensating for an output signal of the second motion mode extraction circuit. row have, and at least one motion mode signal
An acceleration feedback compensation circuit provided with a compensation element having an integral characteristic, and comparing the output of the gain compensator and the output of the acceleration feedback compensation circuit with a drive signal for each motion mode,
A motion mode distribution circuit that generates a drive signal to each axis based on the signal; a PI compensator for an output of the motion mode distribution circuit; and a displacement generating actuator in response to an output signal of the PI compensator. A fine movement positioning control device, comprising: a voltage output type power amplifier to be driven. 3. The fine movement positioning control device according to claim 2, wherein the zero point of the PI compensator is designed to cancel a pole as a first-order lag characteristic of the voltage output type power amplifier. . 4. A speed sensor for detecting a speed of the positioning object in place of the acceleration sensor and the acceleration amplifier, and a speed amplifier for converting an output of the positioning object into an electric signal, and the acceleration feedback compensation circuit includes The integration characteristic for at least one or more motion mode signals
3. The fine movement positioning control device according to claim 1, further comprising a gain compensation element in place of the compensation element. 5. The fine movement positioning control device according to claim 1, wherein a compensation element in the form of a cascade connection of an integral element and a first-order lag element is provided in place of the compensation element for the integral characteristic. . 6. An actuator for driving a positioning target, a first sensor for detecting the position of the positioning target, and a first feedback for negatively feeding back the detected position to obtain a deviation from a predetermined target position. Means, a second sensor for detecting the acceleration or speed of the positioning object, second feedback means for negatively feeding back the output of the second sensor, and a negative feedback value of the deviation and the second feedback means. And a driving unit for driving the actuator by a driving means, wherein a transfer function from an input to the driving unit to a position of the positioning target has an integral characteristic, and the second feedback unit is in addition the integration effect in the acceleration is intended to negative feedback negative feedback is allowed, or the speed, thereby the positioning of the deviation A fine movement positioning control device, characterized in that a transfer function reaching the position of the object has a rigidity term whose value depends on the negative feedback of the second feedback means.