JP3280922B2 - Constant temperature liquid circulation device using Stirling refrigerator - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thermostatic liquid circulating apparatus using a Stirling refrigerator using a Stirling refrigerator, which is a cooling device in a semiconductor production line, a cold trap device, various experimental devices, an injection cooler, etc.
The present invention relates to an extremely versatile thermostatic liquid circulation device using a Stirling refrigerator, which can be used in food distribution, medical care, biotechnology, and other industrial fields, or in any industrial field such as household equipment.

[0002]

2. Description of the Related Art Hitherto, as a constant temperature liquid circulating apparatus, a system using a refrigerator using chlorofluorocarbon (single, binary or mixed refrigerant) as a refrigerant has been known. In addition, refrigerators using HCFCs and HFCs have been known to comply with the recent regulations for CFCs.

[0003] However, with the full-scale implementation of international approaches to global environmental issues, further restrictions on the use of CFCs, including specific CFCs and alternative CFCs, are required in the future, and other types of cooling systems have been developed. The need has become important.

A conventional constant temperature liquid circulating apparatus using chlorofluorocarbon as a refrigerant has a narrow operating temperature range due to the characteristics of the system. In particular, the limit is about −80 ° C. in a low temperature range. With the development of technology in the field, the realization of a very low temperature range (-100 to -150 ° C) is required.

[0005] Further, the cooling device of the conventional constant temperature liquid circulation device is
Since it is a two-stage or two-stage refrigeration system, the structure is complicated and the cost is high. In addition, it is difficult for the conventional cooling device to perform heating for maintaining a constant temperature.

Against this background, the present applicant has already proposed a Stirling cooling device as shown in FIG. 1 as Japanese Patent Application No. 10-41235. In FIG. 1, a Stirling cooling device 1 has a box-shaped case 2, and a Stirling refrigerator 3 is arranged in the case 2.

The Stirling refrigerator 3 has a cold head 4. The cold head 4 is connected to a cold refrigerant pipe 5 that circulates a cold refrigerant (a refrigerant for transferring cold generated by the Stirling refrigerator 3 to heat utilization equipment such as a freezer). Case 2 at both ends of 5
, And outside the case 2, an inlet plug 6 for the cold refrigerant
And an outlet plug 7 are provided.

When the Stirling cooling device 1 is used, the outlet plug 9 and the outlet plug 7 are removably connected to an outlet end 9 and an inlet end 10 of a cold refrigerant pipe of a cold utilization device 8 such as a freezer. . A cryogenic refrigerant pump P2 is provided in the middle of the cryogenic refrigerant pipe 5, and circulates the cryogenic refrigerant between the cold head 4 of the Stirling refrigerator 3 and the chilled heat utilization equipment.

In addition to the freezer, the cold heat utilization equipment 8 includes a refrigerator, a throw-in type cooler, a thermostatic liquid circulation device, a low temperature thermostat for various temperature characteristic tests, a thermostat, a heat shock test device, a freeze dryer, a cold dryer, and the like. There is a cooler, etc.
The Stirling cooling device 1 can be used by connecting these cold heat utilizing devices 8 to the above-mentioned inlet plug 6 and outlet plug 7.

In the constant-temperature liquid circulating device among the cold heat utilization equipments 8, the fluctuation of the cooling temperature is not preferable. For example, in the semiconductor manufacturing process, if the cooling temperature of the constant temperature liquid circulating device fluctuates, the cooling condition fluctuates and quality and reliability decrease.

[Problems to be solved by the invention]

An object of the present invention is to solve these problems of the conventional thermostatic liquid circulation device, and the problems are as follows. (1) A constant-temperature liquid circulation device adapted to global environmental issues by using a low-melting-point refrigerant such as ethyl alcohol, nitrogen, or helium as a refrigerant other than chlorofluorocarbon as a working gas. Becomes wider, and in particular, realizes a further ultra-low temperature. (2) The temperature fluctuation of the cold refrigerant due to the operating state of the Stirling refrigerator is leveled, and the constant temperature liquid circulation device is easily maintained at a constant temperature. (3) To provide a Stirling refrigerating constant temperature liquid circulating apparatus that makes full use of the characteristics of a Stirling refrigerating machine that is compact, has a high coefficient of performance, and improves energy efficiency.

[0012]

According to the present invention, in order to solve the above-mentioned problems, a working gas is sealed, and a Stirling refrigerator having a cold head and a heat exchanger for radiating heat can be connected to equipment utilizing cold heat. A cold refrigerant pipe for circulating the cold refrigerant from the cold head between the Stirling refrigerator and the cold heat utilization equipment, and a cold refrigerant constant temperature storage for storing the cold refrigerant in the middle of the cold refrigerant pipe. A constant temperature liquid circulation using a Stirling refrigerator, wherein a temperature variation of the cold refrigerant due to an operation state of the Stirling refrigerator is not directly affected by a cooling temperature of the cold utilization device. It is to provide a device.

In order to solve the above-mentioned problems, the present invention provides a Stirling refrigerator having a cold head and a heat exchanger for radiating a working gas, and a cold head having both ends connected to the cold head. A cooling medium line for circulating the cooling medium to be cooled in the cooling medium line, and a heat exchange section of the cooling medium line for storing the secondary cooling medium and contacting the secondary cooling medium. Both ends of the secondary cryogenic refrigerant constant temperature storage tank and the secondary refrigerant storage layer tank are connected, and the secondary cryogenic refrigerant is connected to the cold heat utilization equipment and circulates between the secondary cold heat refrigerant constant temperature storage tank and the utilization equipment. And a secondary cryogenic refrigerant line for causing the temperature fluctuation of the cryogenic refrigerant due to the operating state of the Stirling refrigerator not to directly affect the cooling temperature of the cold utilization device. Stirling To provide a frozen machine utilizing constant temperature liquid circulating apparatus.

According to the present invention, a Stirling refrigerating machine having a cold head and a heat exchanger for radiating heat is filled with a working gas, a cold refrigerant cooled in the cold head is flowed, and connected to a cold utilization device. A cold refrigerant pipe arranged to circulate the cold refrigerant between the Stirling refrigerator and the cold heat utilization equipment, and the cold refrigerant is stored, and the cold head is disposed to penetrate from the bottom thereof, A cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling / cooling. It is an object of the present invention to provide a constant temperature liquid circulating apparatus using a Stirling refrigerator, wherein

The Stirling refrigerator includes a compression cylinder having a compression piston and an expansion cylinder having an expansion piston or a displacer, and determines that the compression piston and the expansion piston or the displacer reciprocate with a phase difference. It is a feature.

The working gas of the above Stirling refrigerator is nitrogen, helium or hydrogen, and the cooling / heating refrigerant is ethyl alcohol, HFE (hydrofluoroether), P
FC (perfluorocarbon), PFG (perfluoroglycol), nitrogen or helium.

Further, a temperature control device for controlling the temperature by controlling the operation of the above Stirling refrigerator and / or controlling the electric heater attached to the cold and constant temperature refrigerant storage tank is provided.

Further, the motor of the Stirling refrigerator is controlled to rotate in the reverse direction to perform temperature adjustment, high-temperature heating or defrosting.

[0019] By providing rotatable stirring blades in the cold-cooled refrigerant constant-temperature storage tank, it is possible to prevent a temperature difference between the cold-cooled refrigerant in the cold-cooled refrigerant constant-temperature storage tank.

[0020]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described below in detail with reference to the drawings based on embodiments. FIG. 2 is a diagram showing a constant temperature liquid circulation device 11 using a Stirling refrigerator according to the first embodiment of the present invention. In FIG. 2, the housing 12 of the Stirling refrigerator 3 is formed of a casting.

The interior of the housing 12 is partitioned by a partition wall 13 into a motor chamber 14 and a crank chamber 15. The motor chamber 14 is provided with a motor 16 capable of normal and reverse rotation. A rotary reciprocating conversion mechanism 17 for converting an operation into a reciprocating motion is provided. The opening of the motor chamber 14 and the crank chamber 15 are respectively
9 and the inside of the housing 12 is maintained in a semi-sealed state.

In the housing 12, a crankshaft 23 which penetrates the partition wall 13 and is supported by bearings 20, 21 and 22 is rotatably arranged. The motor 16 includes a stator 24 and a rotor 25 rotatably disposed on the inner peripheral side of the stator 24.
The crankshaft 23 is fixed to the center of the.

The rotary reciprocating conversion mechanism 17 includes a crankshaft 26 of a crankshaft extending into the crankcase 15,
27, connecting rods 28 and 29 connected to the crank portions 26 and 27, and cross guide heads 30 and 31 attached to the tips of the connecting rods 28 and 29, and function as drive transmission means of the Stirling refrigerator 3. are doing.

The cross guide heads 30 and 31 are provided with cross guide liners 32 provided on the inner wall of the housing 12.
33 are arranged so as to be able to reciprocate. Crank part 2
6 and 27 are formed with a phase difference so that the crank 27 moves ahead of the crank 26 when the motor 16 rotates forward. As this phase difference, a phase difference of about 90 degrees is generally adopted.

A compression cylinder 34 and an expansion cylinder 35 are disposed above the crank chamber 15 of the housing 12 of the Stirling refrigerator 3. As the working gas, for example, helium, hydrogen, nitrogen, or the like is sealed in the compression cylinder 34, the expansion cylinder 35, and the housing 12.

The compression cylinder 34 has a compression cylinder block 36 fixed to the housing 12 by bolts or the like. A compression piston 37 provided with a piston ring reciprocates in the space of the compression cylinder block 36, The upper part (compression space) of this space is a high temperature chamber 38,
The working gas therein is compressed to a high temperature.

The compression piston rod 39 has one end fixed to the compression piston 37, the other end extending into the crank chamber 15 through the oil seal 40, and rotatably connected to the cross guide head 30 by a pin. Since the sliding direction of the reciprocating compression piston 37 is reversed at the top dead center and the bottom dead center, the speed becomes zero, and the speed is slow near the top dead center and the bottom dead center, and the amount of change in volume per unit time is also small. It is small and has the maximum speed at each intermediate point when moving from bottom dead center to top dead center and from top dead center to bottom dead center, and the amount of change in volume due to movement of the compression piston 37 per unit time is also maximum. Becomes

On the other hand, the expansion cylinder 35 is
2 has an expansion cylinder block 41 fixed by bolts or the like, and an expansion piston 42 provided with a piston ring reciprocates in the space of the expansion cylinder block 41 to reciprocate. ) Is a low-temperature chamber in which the working gas expands to a low temperature. One end of an expansion piston rod 43 is fixed to the expansion piston 42, and the other end of the expansion piston rod 43 is connected to an oil seal 44.
And extends into the crank chamber 15 and is connected to the cross guide head 31. The expansion piston 42 moves ahead of the compression piston 37 by a phase of 90 degrees.

The expansion cylinder block 41 is provided with a manifold 45 through which a working gas flows into and out of a high-temperature chamber (compression space) 38 of the compression cylinder 34. The manifold 45 further includes a heat-radiating heat exchanger (high-temperature side heat exchanger). An exchanger) 46, a regenerator 47, and a cooling heat exchanger (low-temperature side heat exchanger) 48 are arranged in an annular shape so as to sequentially communicate with each other.

Near the upper end of the compression cylinder block 36, a communication hole 4 for communicating the high temperature chamber 38 and the manifold 45 is provided.
The high temperature chamber 38 (compression space) and the low temperature chamber (expansion space) 50 are formed by the communication hole 49, the manifold 45, the heat exchanger 46 for heat radiation, the regenerator 47, and the heat exchanger for cooling. It is configured so as to sequentially communicate with each other via 48.

The heat radiating heat exchanger 46 is an annular type heat exchanger, for example, a shell and tube type heat exchanger (a number of tubes for flowing working gas into an annular heat exchange chamber are axially provided, A heat exchanger that cools the working gas by flowing cooling water into the heat exchange chamber.) Alternatively, as shown in FIG. 3, an annular jacket 5 is provided around the annular working gas flow path.
1 and a heat exchanger for cooling the working gas by flowing cooling water through the jacket 51.

The heat radiating heat exchanger 46 is provided with a cooling water circulation line 52.
And, it is connected to the radiator 53 via the cooling water pump P1, and circulates the cooling water. The cooling water heated and exchanged by the heat radiating heat exchanger 46 is supplied to the cooling fan 5 of the radiator 53.
Cooled from 4. The cooling water circulation pipe 52 is connected to a water reservoir tank 56 via a reservoir valve 55. The radiator 53 is connected to an air vent 57 and a drain valve 58.

The heat-exchanging heat exchanger 46 may be of an air-cooled type in which air-cooled fins are formed on the outer wall surface of the working gas flow path of the expansion cylinder block 41 instead of the water-cooled type as described above.

On the upper part (cold head 59) of the expansion cylinder block 41, the cooling heat exchanger (low-temperature side heat exchanger) 48 is formed. This cooling heat exchanger 48
Is formed such that a working gas flow path 60 is formed inside the upper part of the expansion cylinder block 41 and cools the cold refrigerant outside the expansion cylinder block 41. The cooling of the cold refrigerant in the cold head 59 is performed, for example, by providing a jacket 61 around the cold head 59 as shown in FIG.

The cold head 59 is connected to the cold utilization device 8 via the cold refrigerant pipe 5 and the cold refrigerant pump P2, and circulates the cold refrigerant. In the middle of the cold refrigerant pipe 5, a cold refrigerant constant temperature storage tank 62 is provided. The cold / cooled refrigerant constant temperature storage tank 62 is configured such that a storage tank wall 63 is covered with a heat insulating wall 64, and may be a closed type.
It may be an open type having a lid.

The capacity of the cooling / cooling refrigerant constant temperature storage tank 62 is appropriately designed depending on the refrigerating capacity of the refrigerator, the purpose of use, and the like. For example, a capacity of about 10 to 20 liters is used. A stirring blade 65 for stirring the cryogenic refrigerant is rotatably provided in the cryogenic refrigerant constant temperature storage tank 62 by a motor 66, so that the liquid temperature of the cryogenic refrigerant in the cryogenic refrigerant constant temperature storage tank 62 is equalized.

The cold-cooled refrigerant constant-temperature storage tank 62 has a function of storing cold-cooled refrigerant and reducing temperature fluctuation of the cold-cooled refrigerant. Ethyl alcohol, HFE, P
FC, PFG, nitrogen, helium and the like are used, and an ultra-low temperature of -150 ° C. can be achieved at the temperature of the cold refrigerant.

In the thermostatic liquid circulation device 11 using a Stirling refrigerator of the present invention, a temperature control device is provided. This temperature control device 67 controls the operation of the Stirling refrigerator 3 and the electric heater 6 attached to the outer surface of the liquid storage tank wall 62.
8 and / or heating.

In FIG. 4, a cooling / cooling medium temperature sensor, a temperature setting panel for setting a temperature, and a temperature control device are provided in a cooling / cooling medium constant temperature storage tank. In a comparison circuit in a temperature control circuit (not shown) constituting the temperature control device, the temperature signal detected by the cold refrigerant temperature sensor is compared with a set value set by a temperature setting panel, and the set temperature is compared. Judging whether or not the temperature is within a central allowable temperature range, adjusting the cooling temperature by PID control of the motor 16 of the Stirling refrigerator 3 according to the result, and controlling the electric heater on / off or inverter pulse control. By adjusting the heating temperature, the temperature of the cold refrigerant can be adjusted. In some cases, the motor 16 can be rotated in the reverse direction to bring the cold head 59 into a high temperature state and perform a temperature adjustment operation.

The constant temperature liquid circulating apparatus 11 using a Stirling refrigerator according to the present invention comprises a
By using two pistons 4 and an expansion cylinder, the Stirling refrigerator 3 having a large refrigeration capacity can be provided by increasing the volume fluctuation of the space filled with the working gas in the Stirling refrigerator 3.

Next, the operation of the constant temperature liquid circulating apparatus 11 using a Stirling refrigerator according to the first embodiment of the present invention will be described. The motor 16 rotates the crankshaft 23 in the forward direction, and the crank 26 in the crank chamber 15 rotates out of phase with the crank 27. This crank 26, 2
Cross guide heads 30, 31 reciprocate in cross guide liners 32, 33 via connecting rods 28, 29 rotatably connected to. A compression piston 37 connected to each of the cross guide heads 30, 31 via a compression piston rod 39 and an expansion piston rod 43.
And the expansion piston 42 reciprocate with a phase difference from each other.

While the expansion piston 42 moves slowly near the top dead center ahead of about 90 degrees, the compression piston 37 moves rapidly toward the top dead center near the middle to perform the compression operation of the working gas. The compressed working gas flows into the heat-radiating heat exchanger 46 through the communication hole 49 and the manifold 45.
The working gas that has radiated heat to the cooling water in the radiating heat exchanger 46 is:
It is cooled by the regenerator 47 and flows into the low temperature chamber (expansion space) 50 through the passage.

When the compression piston 37 is slowly moving near the top dead center, the expansion piston 42 is rapidly moved toward the bottom dead center, and the working gas flowing into the low temperature chamber (expansion space) 50 is rapidly expanded. Cold heat is generated. Thus, the cold head 59 is cooled to a low temperature.

Then, in the cold head 59, the cold refrigerant circulating in the cold refrigerant pipe 5 is cooled. When the expansion piston 42 moves from the bottom dead center to the top dead center, the compression piston 37 moves from the intermediate position to the bottom dead center, and the working gas flows from the low-temperature chamber (expansion space) 50 to the regenerator 47 through the flow path 60. The inflow and the cold heat of the working gas are stored in the regenerator 47. The cold stored in the regenerator 47 is reused to cool the working gas sent from the high temperature chamber 38 through the heat radiating heat exchanger 46 again as described above.

The cryogen cooled in the cold head 59 is supplied to the cryogen pipe 5 and the cryogen outlet plug 7.
For example, the refrigerant is sent to a cold refrigerant pipe in a cold utilization device such as a freezer to perform freezing or cooling action in the cold utilization device. In the cold utilization equipment, the cold refrigerant absorbs heat and performs a cooling action, and is sent from the cold refrigerant pipe to the cold refrigerant inlet plug 7 of the cooling device, passes through the cold refrigerant pipe 5, and passes through the cold refrigerant constant temperature storage tank. It is returned into 62 and stored.

Then, the cold refrigerant in the cold refrigerant constant temperature storage tank 62 is returned to the cold head 59 of the Stirling refrigerator 3 by the pump P2. In the present invention, the cold / hot refrigerant line 5
A constant temperature storage tank 62 for cooling and cooling medium is disposed in the middle of the process, and the constant temperature storage tank 62 for cooling and cooling medium exhibits a function as a buffer for suppressing temperature fluctuation of the cooling medium.

On the other hand, the cooling water heat-exchanged in the heat-radiating heat exchanger 46 is sent from the cooling-water circulation pipe line 52 to the radiator 53 by the pump P1, where it is cooled by the cooling fan 54, and then again. Circulates to 46.

Then, in the comparison circuit in the temperature control circuit constituting the temperature control device 67, the temperature signal detected by the temperature sensor provided in the cold and constant temperature refrigerant storage tank and the temperature set by the temperature setting panel are compared. Then, it is determined whether or not the temperature is within an allowable temperature range centered on the set temperature, and the motor 16 of the Stirling refrigerator 3 is set to the PID according to the result.
By controlling, the temperature of the cold refrigerant is adjusted. And
Based on the result of the comparison circuit, it is possible to adjust the cooling temperature by turning on / off the electric heater or performing inverter pulse control, and to adjust the heating temperature of the electric heater to adjust the temperature of the cold refrigerant.

The motor 1 of these Stirling refrigerators 3
As the operation control 6 and the electric heater 68, both may be used, or one of them may be used to control the temperature of the cold refrigerant. When both the operation control of the motor 16 and the heating of the electric heater are used, more precise and precise temperature control can be achieved.

In the present invention, the heating operation by the reverse rotation of the motor 16 can be used. That is, when the motor 16 of the Stirling refrigerator 3 is rotated in the reverse direction, the compression piston 37 and the expansion piston 42 have a phase difference of about 90 degrees, Acting as 42, the expansion piston 42 acts as a compression piston 37.

As a result, the working gas in the expansion space of the expansion cylinder is compressed by the expansion piston 42 to generate heat, and the cold head 59 heats the cold refrigerant so that the cooling device of the present invention operates in the normal cooling mode. , The temperature of the thermostatic bath is measured, and the temperature control circuit of the temperature control device sequentially controls the motor 16 in reverse rotation to perform the heating operation, thereby maintaining the constant temperature.

When the defrosting of the frost generated in the cold head 59 or the cooling / heat exchanger of the cold heat utilizing equipment is not performed, the frost is detected by the frosting sensor, and the motor is controlled by the defrosting control circuit in the same manner as described above. , The cold head 59 is heated, and the cold refrigerant is heated and circulated to effectively defrost.

FIG. 5 is a diagram showing a second embodiment of the present invention. The configuration of the Stirling refrigerator 3 of the second embodiment is the same as that of the first embodiment, but the Stirling refrigerator-using constant temperature liquid circulating apparatus 11 ′ is cooled by the cold head 59 of the cooling heat exchanger 48. The secondary cold refrigerant is cooled by a cold refrigerant (hereinafter, referred to as “primary cold refrigerant”), and the secondary cold refrigerant is circulated to the cold utilization device to perform a cooling action. For that purpose, a secondary-side cold-cooled refrigerant constant-temperature storage tank 69 for storing the secondary-side cold-cooled refrigerant and a secondary-side cold-cooled refrigerant pipe 70 are provided.

As in the first embodiment, the secondary-side cold / hot refrigerant constant temperature storage tank 69 is formed by surrounding the liquid storage tank wall with a heat insulating wall.
The capacity is appropriately designed according to the refrigerating capacity of the refrigerator, the purpose of use, and the like. For example, a capacity of about 10 to 20 liters is used. Chilled refrigerant constant temperature storage tank 69
In such a case, a stirring blade (not shown) for stirring the cold refrigerant may be rotatably provided, so that the liquid temperature of the cold refrigerant in the cold refrigerant constant temperature storage tank 69 is made uniform.

The primary side cold refrigerant line 5 communicates with the heat exchanger 71 in the secondary cold refrigerant constant temperature storage tank 69 via the pump P 2, and the primary side cold refrigerant is used for cooling the cold head 59. Jacket 61 and secondary-side cryogenic refrigerant constant temperature storage tank 69
It is arranged to circulate between and. The secondary cold refrigerant line 70 is connected to each of the outlet plug 6 and the inlet plug 7 from the secondary cold refrigerant constant temperature storage tank 69, and the secondary cold refrigerant is supplied to the secondary cold refrigerant constant temperature storage tank 69. It is arranged so as to circulate between the heat exchanger and the heat exchange pipeline of the cold heat utilization equipment.

According to the second embodiment, the secondary-side cold refrigerant in the secondary-side cold refrigerant constant-temperature storage tank 69 is entirely cooled by the primary-side cold refrigerant, and a part of the secondary-side cold refrigerant is stored. Since the cooling operation is performed by being circulated to the cold heat utilization device by the secondary cold refrigerant pipe 70, the temperature fluctuation of the secondary cold refrigerant caused by the fluctuation of the operation state of the Stirling refrigerator 3 is suppressed. Also in the second embodiment, temperature control is performed by the same temperature adjusting device as in the first embodiment.

FIG. 6 is a diagram showing a third embodiment of the present invention. In this embodiment, the configuration of the Stirling refrigerator 3 itself is the same as that of the first embodiment. However, in this constant temperature liquid circulating apparatus 11 ″ using the Stirling refrigerator, the cold head 59 is placed in the cold / hot refrigerant constant temperature storage tank 72. It is designed to be directly installed in the office.

That is, the cryogen is stored in the cryogen constant temperature storage tank 72, the entire cryogen in the cryogen constant temperature storage tank 72 is directly cooled by the cold head 59, and the cryogen line 5 and The pump P2 is circulated to the cold heat utilization device side to perform a cooling action.

As in the first embodiment, the cooling / refrigerating constant temperature storage tank 72 is formed by surrounding the storage tank wall with a heat insulating wall, and its capacity is appropriately designed according to the refrigerating capacity of the refrigerator, the purpose of use, and the like. For example, those having a capacity of about 10 to 20 liters are used. Stirring blades (not shown) for stirring the cryogenic refrigerant are rotatably disposed in the cryogenic refrigerant constant temperature storage tank 72 so that the liquid temperature of the cryogenic refrigerant in the cryogenic refrigerant constant temperature storage tank 72 is equalized. It may be.

In the third embodiment, the cryogenic refrigerant constant temperature storage tank 7
2 has both functions of a heat exchanger for cooling the cold refrigerant and a buffer for suppressing the temperature fluctuation, and the structure is extremely simplified. In addition, since the refrigeration refrigerant is directly cooled, the cooling effect is excellent. In the third embodiment, temperature control is performed by the same temperature adjusting device as in the first embodiment.

In each of the above embodiments, the two-piston type Stirling refrigerator 3 is used, but it is needless to say that another type of Stirling refrigerator such as a displacer type may be used.

[0062]

According to the constant temperature liquid circulating apparatus using a Stirling refrigerator according to the present invention, the following effects can be obtained. (1) The constant-temperature liquid circulation device is configured using a Stirling refrigerator, and adapts to global environmental issues by using low-melting-point refrigerants such as ethyl alcohol, nitrogen, and helium as the working gas other than CFCs. A constant temperature liquid circulation device can be realized, and the operating temperature is wider than that of the conventional cooling device. In particular, an ultra-low temperature range of -100 to -150 ° C can be realized. Applicable.

(2) A cryogenic refrigerant constant temperature storage tank for storing the cryogenic refrigerant is provided, and the cryogenic refrigerant in the liquid tank is cooled and a part of the refrigerated refrigerant is circulated to the chilled heat utilization equipment. Suppress fluctuations and maintain constant temperature, enabling use at constant temperature.

(3) The operation of the Stirling refrigerating machine is controlled, and an electric heater is attached to the liquid tank of the cold refrigerant to enable accurate temperature control.

(4) A constant temperature liquid circulating apparatus using a Stirling refrigerator, which is compact and has a high coefficient of performance and good energy efficiency, can be realized by making the most of the characteristics of the Stirling refrigerator.

[Brief description of the drawings]

FIG. 1 is an overall conceptual diagram showing a utilization state of a conventional Stirling cooling device.

FIG. 2 is a view showing a first embodiment of a thermostatic liquid circulation device using a Stirling refrigerator according to the present invention.

FIG. 3 is a diagram illustrating an example of a cooling heat exchanger and a heat radiating heat exchanger of the thermostatic liquid circulation device using a Stirling refrigerator according to the present invention.

FIG. 4 is a diagram illustrating a temperature adjusting device according to the present invention.

FIG. 5 is a view showing a second embodiment of a constant temperature liquid circulating apparatus using a Stirling refrigerator according to the present invention.

FIG. 6 is a view showing a third embodiment of a thermostatic liquid circulation device using a Stirling refrigerator according to the present invention.

[Explanation of symbols]

Reference Signs List 3 Stirling refrigerating machine 5 Cooling refrigerant line 11, 11 ', 11 "Stirling refrigerating constant temperature liquid circulation device 16 Motor 34 Compression cylinder 35 Expansion cylinder 36 Compression piston 38 High temperature chamber (compression space) 46 Heat exchanger for heat radiation (high temperature) Side heat exchanger) 47 regenerator 48 cooling heat exchanger (low-temperature side heat exchanger) 50 low-temperature chamber (expansion space) 59 cold head 62 cold-cooled refrigerant constant temperature storage tank (first embodiment) 67 temperature controller 69 Secondary-side cold / cooled refrigerant constant temperature storage tank (second embodiment) 70 Secondary-side cold / cooled refrigerant circulation pipeline 72 Cold / cooled refrigerant constant temperature storage tank (third embodiment)

Continuation of the front page (58) Field surveyed (Int. Cl. ⁷ , DB name) F25B 9/14 520 F25D 17/02 303

Claims (8)

(57) [Claims] Claims: 1. A Stirling refrigerator having a working gas charged therein and having a cold head and a heat exchanger for heat dissipation, and connectable to equipment utilizing cold energy, wherein the cold refrigerant from the cold head is supplied to the Stirling refrigerator and the cold heat. A cooling / cooling refrigerant pipe for circulating between the equipment and the equipment; and a cooling / cooling refrigerant constant temperature storage tank for storing a cooling / cooling refrigerant in the middle of the cooling / cooling refrigerant pipe, depending on an operation state of the Stirling refrigerator. A constant-temperature liquid circulating apparatus using a Stirling refrigerator, wherein temperature fluctuation of the cold refrigerant does not directly affect the cooling temperature of the cold utilization equipment. 2. A Stirling refrigerator having a working gas filled therein and having a cold head and a heat exchanger for radiating heat; a heat source having both ends connected to the cold head and circulating a cold refrigerant cooled in the cold head; A refrigerant pipe, a secondary cold heat refrigerant is stored, and a secondary cold heat refrigerant constant temperature storage tank in which a heat exchange part of the cold refrigerant pipe is interposed so as to come into contact with the secondary cold refrigerant; Both ends are connected to the secondary refrigerant storage tank, and a secondary cryogenic refrigerant pipe is connected to the cold energy utilization equipment and circulates the secondary cryogen between the secondary cryogen constant temperature storage tank and the utilization equipment. A constant-temperature liquid circulation device using a Stirling refrigerator, wherein temperature fluctuations of the cold refrigerant due to the operation state of the Stirling refrigerator are not directly affected by the cooling temperature of the cold utilization device. 3. A Stirling refrigerator having a working gas filled therein and having a cold head and a heat exchanger for radiating heat, a cold refrigerant cooled in the cold head being flowed, connected to a cold utilization device, and a stirling of the cold refrigerant. A cold refrigerant pipe arranged to circulate between the refrigerator and the cold utilization device, and the cold refrigerant is stored, and the cold head is arranged to penetrate from the bottom thereof, and the cold head is stored. And a constant-temperature storage tank for cooling the cold refrigerant, so that the temperature fluctuation of the cold refrigerant due to the operation state of the Stirling refrigerator does not directly affect the cooling temperature of the cold utilization device. A thermostatic liquid circulation device using a Stirling refrigerator. 4. The Stirling refrigerator includes a compression cylinder having a compression piston, and an expansion cylinder having an expansion piston or displacer, wherein the compression piston and the expansion piston or displacer reciprocate with a phase difference. The constant temperature liquid circulating device using a Stirling refrigerator according to any one of claims 1 to 3. 5. The working gas of the Stirling refrigerator is nitrogen, helium or hydrogen, and the cryogenic refrigerant is selected from a group including ethyl alcohol, HFE, PFC, PFG, nitrogen and helium. The constant temperature liquid circulating apparatus using a Stirling refrigerator according to any one of claims 1 to 4. 6. A temperature control device for controlling the temperature by controlling the operation of the Stirling refrigerator and / or controlling an electric heater attached to the cold and constant temperature refrigerant storage tank. 5. The constant temperature liquid circulation device using the Stirling refrigerator according to any one of 5. 7. The Stirling refrigerating machine according to claim 1, wherein the motor of the Stirling refrigerating machine is controlled to rotate in the reverse direction to perform temperature adjustment, high-temperature heating or defrosting. Constant-temperature liquid circulation device using the machine. 8. The method according to claim 1, wherein a stirring blade is rotatably provided in the cold-cooled refrigerant constant-temperature storage tank to prevent a temperature difference between the cold refrigerant in the cold-cooled refrigerant constant-temperature storage tank. The constant temperature liquid circulation device using the Stirling refrigerator according to any one of claims 1 to 7.