JP3281238B2 - Ultrapure water supply device and sterilization method for its piping - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION The present invention relates to an ultrapure water producing apparatus for producing ultrapure water, an ultrapure water production system for manufacturing semiconductor integrated circuits and other electronic components, a biochemical industry, a pharmaceutical industry and the like. BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrapure water supply device provided with piping for supplying pure water to a device, and a method for sterilizing the piping.

[0002]

2. Description of the Related Art Ultrapure water used for various applications in the fields of the electronic component manufacturing industry and the pharmaceutical industry (in this specification, terms such as pure water, High-purity water, referred to as "ultra-pure water") must be supplied under aseptic conditions, and therefore, the piping equipment for supplying ultra-pure water from its manufacturing equipment to the equipment used is In order to maintain the aseptic condition by preventing the purity of feedwater from decreasing and the propagation of bacteria, etc., circulating water is returned from the ultrapure water production equipment to the ultrapure water production equipment through the circulation system. However, it is common to adopt a non-retentive circulation type configuration that supplies a plurality of devices as needed during the process (Japanese Utility Model Publication No. Sho 62-34061). Also, in order to keep the flow velocity in the middle of the pipe constant in the circulating water flow, a proposal is made to gradually reduce or increase the pipe diameter (Oya et al., “Pure Water / Ultra Pure Water Production Method”-Element Technology and Application System-, Page 179,
Fig. 2.5.5; Published on March 20, 1985: Koshobo, JP-B-6-49187), Synthetic resin material such as PVDF is used to prevent elution of impurities from piping into ultrapure water. There are also suggestions.

[0003] As described above, with regard to the piping equipment for supplying ultrapure water, ultrapure water purified to a high purity produced by an ultrapure water production apparatus is suitable for the intended use place (various use apparatuses). Various devices for supplying in a state have been conventionally proposed and implemented.

In conventional piping equipment for supplying ultrapure water, if continuous use is performed for a long period (one month to several months), it is inevitable that bacteria (bacteria) will propagate in the system. For this reason, industrial facilities generally stop the supply of ultrapure water periodically and perform sterilization and cleaning of the piping system.

[0005] However, in this conventional sterilization and cleaning system in the piping system, it is necessary to temporarily stop the supply of ultrapure water, and thus to temporarily stop the operation of a production line using ultrapure water. This has caused a problem of lowering the performance.

Therefore, some proposals for solving this problem have been conventionally made in industrial equipment in which equipment cost and running cost are also important. For example, the influence of stopping supply of ultrapure water is reduced as much as possible. For the purpose of shortening the downtime of the production line, the number of bacteria in ultrapure water is constantly monitored, and when the number of bacteria reaches a certain number, sterilization cleaning is considered.

[0007]

However, according to the above-mentioned method, the use of water that permits the presence of bacteria to a certain extent results in the use of water. Even in products in other fields where constant quality and safety are highly required, it is assumed that the number of bacteria in the water used before and after the sterilization treatment that stops and starts the production line fluctuates. There are many problems with the use of industrial equipment.

The present invention has been made to solve the above-mentioned problems of the prior art, and enables long-term continuous operation without stopping a production line or the like using ultrapure water. It is an object of the present invention to provide an ultrapure water supply apparatus and a method for sterilizing a pipe constituting the apparatus.

Another object of the present invention is to perform sterilization cleaning at high frequency without stopping a production line or the like. It is an object of the present invention to provide an ultrapure water supply device capable of supplying water suitable for water supply, and a method for sterilizing pipes constituting the device.

[0010]

A feature of the ultrapure water supply apparatus of the present invention that achieves the above object is that an ultrapure water supply pipe extending from a supply section of the ultrapure water production apparatus is provided. A return pipe for returning ultrapure water connected to the return section of the ultrapure water production device, a number of connection pipes connected in parallel between these outbound pipes and return pipes, and a branch in the middle of these connection pipes In the ultrapure water supply device equipped with a water supply pipe for supplying ultrapure water to the equipment using ultrapure water, a plurality of outgoing pipes are provided and connection of the water supply pipe from each connection pipe to the equipment to be used is performed. In the position on the upstream side of the section, a merging section where the water supply from the plurality of outgoing pipes is provided, and further, any one of these plurality of outgoing pipes is selected so that the sterilizing solution can be supplied instead of ultrapure water. The sterilizing solution supply device provided and the above piping Sterilizing solution, there is to forming a structure in which a water flow selecting means for switching the water flow of the ultrapure water.

In the present invention, the ultrapure water producing apparatus refers to ultrapure water of various constitutions conventionally known using various apparatuses for removing suspended substances, inorganic substances, ions and the like in raw water. Examples of the production apparatus include, but are not particularly limited to, a coagulation sedimentation apparatus, a pretreatment apparatus for turbidity treatment of raw water using a sand filtration apparatus, an activated carbon filtration apparatus, a reverse osmosis membrane, a microfiltration membrane, and the like. Membrane treatment equipment, desalination equipment such as two-bed three-column type, primary deionized water treatment equipment for removing impurities in pretreatment water by vacuum deaeration equipment, etc., ultraviolet oxidation equipment, mixed-bed polisher, ultrafiltration membrane, etc. A typical example is a membrane treatment apparatus having a secondary pure water treatment apparatus for further removing trace particles, colloidal substances, organic substances, metals, ions, and the like in primary pure water.

The "supply unit" of the ultrapure water production apparatus is not particularly limited. For example, the outflow of the water to be treated from the ultrafiltration membrane apparatus installed at the last stage of the secondary pure water treatment apparatus Department corresponds to this. In addition, the “outgoing pipe” for ultrapure water supply extending from this supply unit refers to a large number of ultrapure water use equipment that is often installed relatively far from the ultrapure water production equipment. It refers to a main water supply pipe provided to supply ultrapure water to the vicinity. One of the features of the present invention is to provide at least two outgoing pipes. By adopting this configuration, for example, 1
By passing ultrapure water through the outgoing pipes to ensure the supply of ultrapure water to the desired equipment, and at the same time, sterilizing predetermined pipes by flowing a sterilizing solution to the other outgoing pipes Is possible.

According to the present invention, in addition to the above-described structure, a plurality of return pipes (for example, two pipes) are provided, and a plurality of return pipes are connected to the respective return pipes from a downstream position of a water supply pipe. It is also possible to adopt a configuration in which a water supply branch pipe for dividing water supply is provided. In this way, even when a chemical solution is used as a sterilizing solution, the chemical solution is passed through one return pipe and discharged out of the system while the return pipe is sterilized while the other return pipe is superposed. By flowing ultrapure water so as to return to the pure water production apparatus, wasteful prevention can be achieved by effectively using ultrapure water produced at high cost. The control of the flow of the sterilizing solution and the ultrapure water to each of the water supply branch pipes can be controlled independently or by the second water flow selection means included in a part of the water flow control means.

In the above configuration, the "return pipe" is a circulation path for returning unused ultrapure water to the ultrapure water producing apparatus from the vicinity of the plurality of ultrapure water using apparatuses in order to minimize waste of the ultrapure water. Means a pipe for forming a return pipeline. The "return part" of the ultrapure water production device refers to a portion suitable for reprocessing the returned ultrapure water, and is generally used for the above-mentioned primary and secondary pure water treatment devices. In many cases, a return pipe is connected with a primary pure water storage tank (tank) provided therebetween as a return portion.

The "connection pipe" supplies the ultrapure water to a predetermined ultrapure water use device and supplies a surplus (unused portion) or an ultrapure water circulation state when the use device is stopped and not used. In order to ensure the state of not staying), it is connected so as to cross from the above-mentioned outgoing piping to the returning piping, and is not limited, but is generally provided for each used device and the number of used devices is generally equal to the number of used devices. In many cases, a large number are arranged in parallel between the outgoing pipe and the return pipe.

As in the present invention, by adopting a method in which a plurality of outgoing pipes are provided, and water supplied from the plurality of outgoing pipes is merged at a position upstream of a branch portion of each connecting pipe to a water supply pipe, For example, if sterilizing liquid is passed through one outgoing pipe and ultrapure water is passed through the other outgoing pipe, the state of flowing sterilizing liquid through each connecting pipe and the state of passing ultrapure water can be controlled by passing water through each pipe. It can be selected, so that the supply of ultrapure water to one use device and the sterilization and cleaning in the connection pipes connected to other use devices can be performed simultaneously in parallel, and continuous operation of the production line is realized.

The sterilizing liquid is supplied from a sterilizing liquid supply device provided as a storage tank for disinfecting chemicals or hot water to a pipe for sterilization, generally an ultrapure pipe at a most upstream position of each of a plurality of outgoing pipes. What is necessary is just to connect the apparatus which can supply a germicidal solution instead of water.

"Piping for water supply" refers to a pipe branched from a connection pipe. "Ultra-pure water using apparatus" refers to an apparatus that uses supplied ultra-pure water according to a predetermined purpose, for example, in a semiconductor cleaning apparatus, ultra-pure water is used as cleaning water.

The "flow selecting means" is generally provided at a predetermined position in order to feed or shut off ultrapure water in each pipe, or to feed or shut off a sterilizing solution instead of ultrapure water. It is constituted by the provided water flow control valve and a control means formed by a computer or the like for controlling the operation of the water flow control valve, but is not limited thereto.

According to the ultrapure water supply apparatus provided as described above, a sterilizing liquid is supplied to one of a plurality of outgoing pipes as required, and sterilization is performed by controlling the flow of water through each pipe. It is possible to maintain a state in which the used apparatus is continuously operated by flowing the ultrapure water from the outgoing pipe through which the ultrapure water is supplied to the other pipes while the sterilizing solution is supplied to the target pipe.

Further, in order to reduce the waste of the produced ultrapure water, the germicide is discharged out of the system, but the surplus (unused) ultrapure water can be circulated back to the ultrapure water producing apparatus. .
When the sterilizing solution is hot water, it can be returned to the return portion of the ultrapure water production device through a return pipe.

Furthermore, in the present invention, apart from the connection pipe connected to the apparatus for using ultrapure water via the water supply pipe, a bypass pipe irrelevant to the apparatus used is provided in parallel with the connection pipe in the outward path. It can also be provided between the pipe and the return pipe. In this way, a set of a plurality of outgoing pipes and a return pipe connected by a bypass pipe one by one (usually 2
(Set), which is preferable because it is possible to maintain a state in which ultrapure water or a sterilizing liquid is constantly passed without stagnation regardless of the operation state of a device using ultrapure water.

In a preferred embodiment of the present invention, as an example in which hot water is used as a sterilizing solution, two outgoing pipes for water supply of ultrapure water extended from a supply section of an ultrapure water production device, One return pipe for returning ultrapure water connected to the return section of the water production apparatus, and two one-side ends are connected to the two forward pipes, respectively , and merged on the way to be opposite to the merge path. A plurality of connection pipes whose side ends are connected to the one return pipe, and a water supply pipe that is branched at a position downstream of a junction of the connection pipes and supplies ultrapure water to a device using ultrapure water. And a bypass pipe that bypasses the connection pipe and connects two outgoing pipes to one return pipe, and selects one of the two outgoing pipes and supplies hot water for sterilization instead of ultrapure water. The hot water supply device to be supplied and the flow of hot water and ultrapure water from the outgoing pipe to each of the pipes are switched. Ultrapure water feeder configurations that have a water selection means can be exemplified.

In such an apparatus, the sterilization and cleaning of the piping equipment for supplying the ultrapure water can be performed by the following operations.

Hot water flows from one outgoing pipe connected to the bypass pipe to the return pipe, and water flow between the one outgoing pipe and each connecting pipe is cut off. The first step of passing ultrapure water through the connection pipe,
: At least one of the connection pipes and the other one of the outgoing pipes through which ultrapure water is passed, and the connection pipe from the one outgoing pipe through which hot water is passed. A second step of passing hot water through the second step: a third step of cutting off hot water flow from the one outgoing pipe to the connecting pipe in the second step and passing ultrapure water through the other outgoing pipe. , A fourth step of repeating the operations of the second step and the third step as necessary for the sterilization treatment of another connection pipe, and interrupting the supply of hot water to the one outgoing pipe to remove ultrapure water. The fifth step of passing water.

Also, a germicidal solution (for example, alcohol, aqueous hydrogen peroxide, aqueous hydrofluoric acid, aqueous peracetic acid, ozone water, etc.)
As an example of using as a sterilizing solution, two outgoing pipes for ultrapure water water supply extended from the supply unit of the ultrapure water production device,
Two return pipes for returning ultrapure water connected to a return portion of the ultrapure water production apparatus, drainage pipes to the outside provided at downstream positions of the two return pipes, A plurality of connection pipes, both sides of the merged flow path being branched, each branch end on one side being connected to the two outgoing pipes and each branch end on the opposite side being connected to the two return pipes, respectively. , A water supply pipe that is branched from the joint flow path of each connection pipe and supplies ultrapure water to a device using ultrapure water, and a forward pipe and a return pipe are connected to a set of one pipe each by bypassing the connection pipe. And a sterilizing solution supply device for selecting one of the two outgoing lines and supplying a sterilizing solution instead of ultrapure water, and a sterilizing solution and ultrapure water from the outgoing line to each of the above pipes. An example of an ultrapure water supply device having a water selection means for switching water flow Rukoto can.

In such an apparatus, the sterilization and cleaning of the piping equipment for supplying the ultrapure water can be performed by the following operations (1) to (4).

': While passing the sterilizing agent liquid from one outgoing pipe connected by the bypass pipe to the return pipe and further to the drain pipe, the flow between these outgoing pipes and return pipes and each connecting pipe is shut off. And a first step of passing ultrapure water from the other outbound pipe connected by the bypass pipe to the connection pipe and further to the return pipe and returning the ultrapure water to the ultrapure water producing apparatus, ': at least one of the above connection pipes And shut off the flow of water through the other outgoing pipe and the return pipe through which ultrapure water is passed, and connect the one outgoing pipe and the return pipe through which the germicide solution is passed with the connection pipe. The second step of passing the liquid, ': following the second step, while blocking the passage of the sterilizing agent solution from the one outgoing pipe to the connection pipe, and passing ultrapure water from the other outgoing pipe, Third step of replacing the connection pipe with ultrapure water ': A fourth step of interrupting the flow of water from the connection pipe whose inside of the pipe has been replaced with ultrapure water in the third step to the one return pipe, and allowing the connection pipe and the other return pipe to flow; ': The second to fourth steps
A fifth step in which the operation of the step is repeated as necessary for the sterilization treatment of another connecting pipe, ': shut off the supply of the sterilizing agent to the one of the outgoing pipes, and pass ultrapure water therethrough. Sixth step of replacing the inside of the pipe from one outgoing pipe to the return pipe with ultrapure water, ': Stopping drainage from the one return pipe replaced with ultrapure water and circulating it to the ultrapure water production device Seventh step of returning water.

[0029]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be further described below with reference to an embodiment shown in the drawings. In general, two outgoing pipes are used in a plurality, and the object of the present invention is sufficiently achieved. In general, two return pipes corresponding to the plurality of return pipes generally sufficiently satisfies the object of the present invention. Therefore, in the embodiment described below, the case where the number of these pipes is two will be described. However, the present invention is not limited to this configuration.

Embodiment 1 In the present embodiment shown in FIG. 1, reference numeral 1 denotes an ultrafiltration membrane (hereinafter, referred to as a supply section of an ultrapure water production apparatus (not shown)) installed at the last stage of the ultrapure water production apparatus. The first-stage supply pipe 2 connected thereto is connected to a branch valve 3.
Branched by branch pipes 4 ₁ and 4 ₂ having ₁ and 3 ₂ ,
Two outbound pipeline 5 _1, 5 ₂ are connected.

Also, a sterilizing solution supply device (in this example, a hot water supply device) installed in parallel with the ultrapure water production device.
6 is branched by the branch pipes 8 _1, 8 ₂ having a branching valve 7 _1, 7 ₂ are connected to the forward pipe 5 _1, 5 ₂ two above. The hot water supply device 6 of the present embodiment is configured as a device that exchanges heat with ultrapure water produced by the ultrapure water production device to produce hot water.

Reference numeral 9 denotes a return line. In this embodiment, the downstream end thereof is connected to a primary pure water storage tank (tank) 10 of the above ultrapure water producing apparatus.

Reference numerals 11, 12, and 13 denote two outgoing pipes 5
_1, 5 and ₂ from one return pipe 9 parallel to the connected connecting pipe number between each connection pipe, the two one end portion connected to two outgoing pipe 5 _1, 5 ₂ Continuous upstream branch pipes 11 ₁ , 11 ₂ (12 ₁ , 12 ₂ , 13 ₁ , 13 ₂
) And the downstream merging pipe 11 connected to one return pipe 9
₃ (12 ₃ , 13 ₃ ), and the upstream side branch pipes 11 ₁ , 11 ₂ (12 ₁ , 12 ₂ , 13 ₁ , 13 ₂ ) are provided with open / close switching control valves 14 ₁ , 14 ₂ ( 15 ₁ , 15
₂ , 16 ₁ , 16 ₂ ).

Reference numerals 17, 18, and 19 denote devices for using ultrapure water, which are branched off from the above-mentioned downstream merging pipes 11 ₃ , 12 ₃ , and 13 ₃ .
The water supply pipes 11 ₄ , 12 ₄ , and 13 ₄ in which 22 is provided are connected so that ultrapure water is supplied.

The above branch valves 3 ₁ , 3 ₂ and 7 ₁ ,
7 _2, and the on-off switching control valve 14 _1, 14 _2, 15 _1,
15 ₂ , 16 ₁ , 16 ₂ , 20, 21 and 22 are opened and closed by a water flow control device (not shown) to control the water flow state of a predetermined system path.

The operation of the ultrapure water supply apparatus having the above-described structure can sterilize and clean a predetermined pipe.

(A). Normal time (when ultrapure water flows) The branch valves 7 ₁ and 7 ₂ are closed, and the branch valves 3 ₁ and 3 ₂ from the UF ₁ and the open / close switching control valves 14 ₁ , 14 ₂ , 1
5 ₁ , 15 ₂ , 16 ₁ , 16 ₂ are all opened and associated open / close switching control valves 20, 21, 21, for supplying water to any use device 17, 18, 19 which needs to be operated further
Open 22.

As a result, the ultrapure water flows through each of the _two outgoing pipes 5 ₁ , 5 _2, and the state where the ultrapure water circulates through the return pipe 9 to the primary pure water storage tank 10 is ensured. Water is supplied.

(B). For one 5 ₁ sterilization during washing outbound pipeline, upstream branch pipe 11 ₁ of the connection pipe 11 to 13, 12 _1, 13 ₁ opening is interposed switching control valve 14 _1, 15 _1, 16 ₁ Close.

Next, it closes the branch valve 3 _1, by opening the branch valve _71, flowing hot water for sterilizing the hot water supply device 6 to the outgoing pipe 5 _1, further not running using apparatus (Therefore, the open / close switching control valves 20 to
Any opening and closing the switching valve to the connection pipe according to it are) closed 22 (14 _1, 15 _1, 16 ₁ either) the flow of hot water to open, perform sterilizing and washing in the pipe.

[0041] In this case, with respect to the equipment used for running, the ultrapure water is passed through from the other outbound pipeline 5 _2,
There is no need to stop operation. Incidentally, it is possible to shut off the water flow of the ultrapure water from the other outbound pipeline 5 ₂ to the connection pipe is flowing hot water.

(C). The hot water supply to the return outbound pipeline 5 ₁ to the normal state is stopped, it opens the branch valve 3 _1, closing the branch valve _71. Open / close switching control valve 1
Opening 4 _1, 15 _1, 16 ₁ all.

According to the structure of this embodiment, the inside of an appropriate pipe can be sterilized with hot water of ultrapure water as a sterilizing liquid. In addition, since hot water is used, the sterilized liquid can be returned to the primary pure water storage tank 10 without being discharged out of the system, and if necessary, the hot water can be cooled using a heat exchange device. You may.

Embodiment 2 The present embodiment shown in FIG. 2 is a device having the configuration shown in FIG. 1 and includes downstream merging pipes 11 ₃ , 12 ₃ and 13 _{3 of} connecting pipes 11 to 13.
In addition, an opening / closing switching control valve 23, 24, 25 is interposed, and between the branch of the water supply pipes 11 ₄ , 12 ₄ , 13 ₄ and the opening / closing switching control valve 23, 24, 25.
And characterized in that it has middle drain pipe 11 _5, 12 _5, 13 ₅ to branch connection of the opening and closing switching control valve 26, 27, 28 to the outside of the system interposed, other configurations are the same as FIG. 1 Therefore, the same reference numerals are given and the description is omitted.

In the present embodiment, at the time of the washing operation (b) in the washing operation of the first embodiment, for example, the open / close switching control valve 23 provided in the middle of the connection pipe 11 for washing is closed, and the sterilizing solution is washed. It is operated to drained out of the system from the discharge pipe 11 _5.

As described above, since the sterilizing solution is discharged out of the system without returning to the primary pure water storage tank 10, it is possible to use a chemical solution as well as hot water as the sterilizing solution. Note that when using a sterilizing chemical liquid, after draining the liquid medicine remaining in was sterilized connection in the pipe to the outside of the system from the discharge pipe 11 ₅ with ultrapure water, opening a connection to the return pipe of the connection piping system It is necessary to do so.

That is, when hot water is used as a germicidal solution, the germicidal washing operation can be performed as follows.

(B). From normal state that passed through the ultrapure water sterilization during washing two outbound pipeline 5 _1, 5 _2, passed through the hot water in one of the outgoing pipe connected in the bypass pipe (e.g., 5 ₁₎ Shikatsu's outbound piping 5 ₁
And the water flow between the respective connecting pipes 11 to 13 with blocking in the off switching control valve 14 _1, 15 ₁ and 16 ₁ closed, the connection pipe through the other outbound pipeline 5 ₂ 11-13
Through which ultrapure water is passed (first step).

Next, at least one of the connecting pipes (for example, 11) and the outgoing pipe 5 through which the ultrapure water is passed.
While blocking the water passing from _2, hot water sterilized washed by passing water hot water from outgoing pipe 5 _1, which is passed through (second
Process). The hot water used for sterilization is drain pipe 11 ₅ Through the system.

The blocking hot water through the water from the outbound pipeline 5 ₁ to the connection pipe 11 of the second step, passed through the ultrapure water from the outbound pipeline 5 ₂ (third step).

The operations of the second step and the third step are repeated as necessary for sterilizing another connecting pipe (fourth step).

(C). By blocking the hot water supply to return the forward pipe 5 ₁ a to the normal state passed through the ultra-pure water (step 5).

Embodiment 3 In the present embodiment shown in FIG. 3, two return pipes 9 (9 ₁ and 9 ₂ ) in the configuration of FIG.
The 3 downstream branch pipes 11 ₃ , 12 ₃ , and 13 ₃ are branched,
Opening / closing switching control valves 23 ₁ , 23 ₂ , 24 ₁ , 24
₂ , 25 ₁ , and 25 ₂ , the branch tip is connected to the _two return pipes 9 ₁ , 9 ₂ , and further, the return water is firstly purified to the tip of the two return pipes on the circulation return side. A switching valve 30 for switching between returning to the water storage tank 10 and discharging to the outside of the system
_1, 30 _2, 31 _1, 31 is characterized in ₂ that was provided, since the other configuration is the same as FIG. 2, is described with the same reference numerals will be omitted.

In the present embodiment, not only the sterilization and cleaning of the connection pipes 11 to 13 but also two return pipes, which are discharged to the outside of the system on the downstream side of the circulation, so that the return pipes 9 ₁ ,
There is an advantage that allows even sterilizing and washing in 9 _2.

Embodiment 4 The present embodiment shown in FIG. 4 is different from the configuration shown in FIG.
Downstream merging pipe 11 _3, 12 _3, 13 ₃ 1-13, as well as interposed closing switching control valves 23, 24, 25, the water supply pipe 11 ₄ to use device, 12 _4, 13 ₄ branches Section and the open / close switching control valve 23 ₁ , 23 ₂ , 24 ₁ , 24
_2, 25 _{1 2,} 25 between the _two, the drainage pipe 11 ₅ to the outside of the system which is interposed closing switching control valves 26, 27, 28 in the middle,
It is characterized by the fact that 12 ₅ and 13 ₅ are branched and connected, and the other configuration is the same as that of FIG. 3.

[0056] The examples shown in the embodiment 5 5, in the configuration of FIG. 4, a bypass pipe 33 _1, 33 ₂ water supply pipe for supplying water to the apparatus used is not branched and connected, outgoing pipe 5 ₁ And return line 9
Between ₁ and respectively connected between the outbound pipeline 5 ₂ and return pipe 9 _2, normally-closed-off switching control valve in this way 34
_1, 34 is characterized in _{that 2} is interposed.

According to such a configuration, while keeping the ultrapure water and the sterilizing solution in a water-passing state without stagnation,
It is possible to perform a sterilization and cleaning treatment of a predetermined pipe and supply of ultrapure water to a necessary use device.

That is, the following operation can be performed as a specific cleaning process.

(B). From outgoing pipe 5 ₁ connected by sterilizing and washing during bypass pipe 33 _1, while passed through sterilizing chemical liquid (or hot water) to reach the outside of the system through the return pipe 9 _1, these outbound pipeline 5 ₁ and return pipe 9 ₁ and the other outbound pipeline liquid passage is blocked, which is connected with bypass piping 33 ₂ between the connecting pipes 11 to 13 5
_2, the connection pipe 11 to 13, back to the primary pure water storage tank 10 and passed through the ultrapure water further to return pipe 9 ₂ (first step).

[0060] and at least one of the connection pipe 11 to 13 (e.g. 11), with ultra-pure water to block the water flow between the outbound pipeline 5 ₂ and return pipe 9 ₂ being passed through, sterilizing chemical There is passed through the connection pipe 11 of the outbound pipeline 5 ₁ and return pipe 9 ₁ Toko being passed through (second step).

[0061] Following the second step, together with blocking the liquid passage of the sterilizing liquid medicine from the forward pipe 5 ₁ to the connection pipe 11, the connection in the pipe and passed through an ultra-pure water from the outbound pipeline 5 ₂ Ultra Replace with pure water (third step).

[0062] with the pipe in the third step is to cut off the water flow to the return pipe 9 ₁ from the connecting pipe 11 which is substituted with ultrapure water, thereby passed through the return pipe 9 ₂ this connection pipe 11 (4th Process).

The operations of the second to fourth steps are repeated as necessary for the sterilization of the other connecting pipes 12 and 13 (fifth step).

(C). Cut off the supply of sterilizing chemical liquid to return outbound pipeline 5 ₁ to the normal state, and ultrapure water was passed through to replace the pipe from the outward pipe 5 ₁ to return pipe 9 ₁ ultrapure water ( Sixth step).

[0065] returning the circulating water to the ultrapure water production system to stop the waste water from return pipe 9 ₁ substituted in ultrapure water (seventh step).

The present invention is not limited to the configurations of Embodiments 1 to 5 described above, and it is obvious that the present invention can be carried out in various modified forms. it is also possible to omit the closing switching control valve 34 ₁ 34 ₂ which is interposed in the middle, also the bypass pipe, it is also possible to provide in the first to fourth embodiments.

[0067]

According to the ultrapure water supply apparatus of the present invention, the produced ultrapure water is supplied from the supply source to the place of use without stopping the operation of all the used apparatuses, that is, without stopping the production line or the like. A desired part of the piping equipment to be sterilized and cleaned can be appropriately cleaned as needed, and therefore, the production line can be continuously operated for a long period of time, which has a great effect on improving the productivity.

Further, since sterilization cleaning can be performed frequently without stopping the production line, etc., ultrapure water can be supplied as service water which is always kept in an aseptic state, which is extremely effective for producing high quality products. This has the effect.

[Brief description of the drawings]

FIG. 1 is a flowchart showing a configuration outline of an ultrapure water supply device according to a first embodiment of the present invention.

FIG. 2 is a flowchart showing a schematic configuration of an ultrapure water supply device according to a second embodiment of the present invention.

FIG. 3 is a flowchart showing a configuration outline of an ultrapure water supply device according to a third embodiment of the present invention.

FIG. 4 is a flowchart showing a schematic configuration of an ultrapure water supply device according to a fourth embodiment of the present invention.

FIG. 5 is a flowchart showing a schematic configuration of an ultrapure water supply device according to a fifth embodiment of the present invention.

[Explanation of symbols]

1 ... supply unit (UF) of ultrapure water production equipment, 2 ... first stage supply pipe, 3 ... branch valve, 4 ... branch pipe, 5 ...
Outgoing piping, 6: sterilizing liquid supply device (hot water supply device), 7: branch valve, 8: branch pipe, 9: return piping, 10: primary pure water storage tank, 11 ... 13 Connection piping, 11 ₁ , 11 ₂ , 12 ₁ , 12 ₂ , 13 ₁ , 13
₂・ ・ ・ Upstream branch pipe, 11 ₃・ ・ ・ Downstream merge pipe 1
1 ₄ ... water supply piping, 11 ₅ ... drainage pipe, 14
16 ··· Open / close switching control valve, 17-19 ··· Use device (ultra pure water), 23-28 ··· Open / close switching control valve,
30, 31 ... switching valve, 33 ... bypass piping,
34 ... Open / close switching control valve.

──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. ⁷ identification code FI A61L 2/18 A61L 2/18 (58) Investigated field (Int.Cl. ⁷ , DB name) C02F 1/50 A61L 2/00 C23G 3/00

Claims (9)

(57) [Claims] 1. An ultrapure water supply line extending from a supply section of an ultrapure water production apparatus, and an ultrapure water return path pipe connected to a return section of the ultrapure water production apparatus. A plurality of connection pipes connected in parallel between the forward pipe and the return pipe, and a water supply pipe that is branched in the middle of the connection pipe and supplies ultrapure water to a device using ultrapure water. In the ultrapure water supply device, a plurality of the outgoing pipes are provided and
Has the same number of one-side ends as the plurality of outgoing pipes, and the one-side end
The part is connected to each of the plurality of outgoing pipes and provided at a position upstream of the connecting portion of the water supply pipe, a junction where water from the plurality of outgoing pipes merges, and further, any one of these plurality of outgoing pipes is provided. A sterilizing solution supply device for selectively supplying a sterilizing solution in place of ultrapure water, and a water flow selecting means for switching the flow of the sterilizing solution and ultrapure water from these outgoing pipes to the respective pipes. Ultrapure water supply device. 2. The method according to claim 1, wherein a plurality of return pipes are provided, and water supply from the connection pipe to the plurality of return pipes is branched to a position downstream of a connection portion of the water supply pipe to each connection pipe. An ultrapure water supply device, comprising: a return branch pipe for supplying water; and a second water flow selection means for switching water flow to the return branch pipe. 3. The ultrapure water supply apparatus according to claim 1, wherein the number of outgoing pipes and the number of return pipes are two. 4. The drainage means according to claim 2 or 3, wherein a drainage means for draining the sterilizing liquid out of the system is provided at a position downstream of the connection part for supplying water from each connection pipe to the device to be used or at the return pipe. Ultrapure water supply device. 5. The method according to claim 1, wherein
An ultrapure water supply apparatus, wherein a bypass pipe, to which a water supply pipe to an ultrapure water using apparatus is not connected, is provided in parallel with the connection pipe between the outward pipe and the return pipe. 6. An ultrapure water supply apparatus, comprising two outgoing pipes extending from a supply section of the ultrapure water production apparatus for supplying ultrapure water, and an ultrapure water return pipe connected to a return section of the ultrapure water production apparatus. One return pipe,
A plurality of connection pipes each having two one-side ends connected to the two outgoing pipes and merging along the way, and having the opposite end of the merged flow path connected to the one return pipe; And a water supply pipe that is branched at a position downstream of the junction of the ultrapure water and supplies ultrapure water to a device using ultrapure water, and two outgoing pipes are connected to one return pipe bypassing the connection pipe. A bypass pipe, a hot water supply device for selecting one of two outgoing pipes and supplying hot water for sterilization instead of ultrapure water, and hot water and ultrapure water from the outgoing pipe to each of the above pipes An ultrapure water supply device, comprising: a water flow selecting means for switching water flow. 7. Two outgoing pipes for supplying ultrapure water extending from a supply section of the ultrapure water production apparatus and an ultrapure water return pipe connected to a return section of the ultrapure water production apparatus. Two return pipes,
A drainage pipe to the outside of the system provided at the downstream position of each of these two return pipes, and both sides of the intermediate junction flow path are branched, and each branch end on one side is connected to the two forward pipes, and A plurality of connection pipes whose opposite branch ends are respectively connected to the two return pipes, and a water supply for supplying ultrapure water to a device using ultrapure water which is branched from a junction of the connection pipes. A pipe, a bypass pipe connecting the outgoing pipe and the return pipe to each one set by bypassing the connecting pipe,
A disinfectant solution supply device for selecting one of the outgoing pipes and supplying a disinfectant solution instead of ultrapure water, and a water flow for switching the disinfectant solution and ultrapure water from the outgoing pipe to each of the pipes An ultrapure water supply device comprising: a selection unit. 8. A method of sterilizing a pipe in the ultrapure water supply apparatus according to claim 6, wherein sterilization and cleaning are performed by the following operations: heat is supplied from one outgoing pipe connected by a bypass pipe to a return pipe. A first step of passing water and interrupting water flow between the one outgoing pipe and each connecting pipe, and passing ultrapure water to each connecting pipe through the other outgoing pipe; Block the flow of water from at least one of the outgoing pipes, through which ultrapure water is passed, and the hot water from the one outgoing pipe, through which hot water is passed, to the connection pipe. A second step of blocking the hot water flow from the one outgoing pipe to the connecting pipe in the second step and a flow of ultrapure water from the other outgoing pipe to the connecting pipe in the second step; Perform the operations of the third step and the third step as necessary. The fourth step of repeating for the: fifth step of passing water ultrapure water was shut off hot water supply to one of the outbound pipeline above. 9. A method of sterilizing a pipe in the ultrapure water supply apparatus according to claim 7, wherein sterilization and washing are performed by the following operations (1) to (4):
While passing the sterilizing solution through the return pipe and the drain pipe, the liquid between the forward pipe and the return pipe and each connection pipe is shut off, and the connection pipe, Further, a first step of returning ultrapure water to the ultrapure water producing apparatus by passing ultrapure water through the return pipe, ′: at least one of the connection pipes, the other outward pipe through which ultrapure water is passed, and A second step of interrupting the water flow to the return pipe and passing the one of the outward pipe and the return pipe through which the germicide solution is passed and the connection pipe, ′: connection pipe following the second step A third step of interrupting the flow of the sterilizing agent solution from the one outgoing pipe to the above, and passing ultrapure water from the other outgoing pipe to replace the inside of the connecting pipe with ultrapure water. From the connection pipe whose inside was replaced with ultrapure water in 3 steps, A fourth step of interrupting the flow of water to the one return pipe and allowing the connection pipe and the other return pipe to flow, ′: performing the operations of the second to fourth steps as necessary. The fifth step which is repeated for the sterilization treatment of the pipes, 'the supply of the sterilizing agent liquid to the one outgoing pipe is cut off,
And a sixth step of passing the ultrapure water and replacing the inside of the pipe from the one outgoing pipe to the return pipe with ultrapure water, ′: draining water from the one return pipe replaced with the ultrapure water. The seventh step of stopping and returning the circulating water to the ultrapure water production apparatus.