JP3283000B2 - Clean room - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

TECHNICAL FIELD The present invention relates to clean room used to obtain a dust-free environment in the semiconductor manufacturing process, etc.
It relates to.

[0002]

2. Description of the Related Art In a semiconductor manufacturing process, it is necessary to sequentially supply a workpiece to each processing apparatus while maintaining a high degree of cleanliness. Therefore, a clean room is constructed and each processing apparatus is disposed therein.

[0003] A general clean room has a three-layer structure of a ceiling room, a processing room, and a lower floor, and a high-performance filter (HEPA filter or ULPA filter) is provided on the ceiling surface of the processing room.
The floor of the processing room is composed of a floor with a ventilation structure such as a grating floor.The underfloor room and the ceiling room communicate with each other via a return passage, and an air conditioner is arranged in the return passage. The temperature and humidity are adjusted by the machine, and the air cleaned by the high-performance filter is blown out from the ceiling of the processing chamber toward the floor to form a down flow.

Conventionally, as shown in FIG. 5, the clean room 21 is constructed by constructing an outdoor shell 23 on a foundation floor portion 22 and constructing a floor structure portion 24 having a common surface entirely below the inside thereof. A chamber 25 and an underfloor chamber 26 are formed and a ceiling room 27 is formed above the processing chamber 25.
After that, the processing apparatus 28 is loaded and installed in the processing chamber 25,
The auxiliary equipment 29 of the processing device 28 is arranged in the underfloor room 26 and connected to the processing device 28 via the connection pipe 30.
Motor lines 31 and 32 connected to the engine room according to the arrangement line 8 are appropriately arranged in the space in the underfloor room 26 and connected to the processing device 28 and the auxiliary machine 29 by the connection pipe 33. . In FIG. 5, reference numeral 34 denotes a support beam for the floor structure 24, which is provided so as to obtain a standard support load. Reference numeral 35 denotes a ceiling surface that partitions the processing chamber 25 and the ceiling chamber 27, and a high-performance filter 36 is appropriately disposed according to the required cleanliness for each area of the processing chamber 25.

[0005]

However, in the above-mentioned conventional structure, a common floor structure 24 is provided which can provide a standard supporting load, and after the clean room 21 is completed, a processing apparatus is mounted on the floor structure 24. 28, the portion where a large load does not act on the construction of the floor structure portion 24 becomes an excessive investment, while the portion where the processing device 28 is installed has the required load resistance and vibration resistance. On the other hand, there is a case where the performance becomes insufficient, and in the case where the performance is insufficient, it is necessary to reinforce it by matching the actual product.

[0006] Further, since the floor structure portion 24 is formed of a beam structure formed at the time of building, when the connecting pipe 30 connecting the processing device 28 and its auxiliary equipment 29 is piped, it will hang straight down. Would interfere with the beam 34,
In some cases, the pipes must be bypassed so as to avoid the problem.
There is a problem that a difference may occur in the characteristics of the processing device 28, which may adversely affect the performance and quality of the processing device 28, and the degree of freedom of the installation position is reduced in order to avoid the beam 34 as much as possible when installing the processing device 28. In addition, the layout may need to be corrected at the installation site, which has been a factor of lengthening the construction period until the equipment is started.

[0007] The driving lines 31 and 32 are
Since the piping is connected to the processing unit 28 and its auxiliary equipment 29 after the installation of the unit 8, the construction cost is increased and the construction period until the start-up of the equipment is long.

[0008] The present invention is the light of the conventional problems, and excessive investment by eliminating can build at low cost and aims to provide a clean room which can shorten the construction period until the equipment start-up.

[0009]

A clean room according to the present invention includes a ceiling room, a processing room on a floor structure, and a lower floor under a floor structure in a building outdoor shell on a base floor, and clean air is provided. In a clean room that is allowed to flow down from the ceiling room to the underfloor room through the processing room, a large number of pedestal-like floor structures are arranged on the foundation floor inside the outdoor shell of the building, and the floor structure is constructed. The first feature is that the floor structure on which the equipment is installed has a structure that meets the installation specifications of the processing equipment.
The floor structure can be created separately from the clean room construction, and the floor structure can be easily configured by arranging the floor structure. Has a structure that satisfies the required load resistance and vibration resistance required for its processing equipment, making it easy to construct floor structures that meet the required specifications without excess or shortage, with a short construction period and low cost. A clean room can be constructed, and furthermore, there is no danger that the connection pipes to the auxiliary equipment arranged at the lower part of the floor structure vary depending on the installation location of the processing apparatus, and the stability of the performance of the processing apparatus can be secured.

Further, installing the processor unit that integrates the processor and the floor structure of installing it on a base Ishizueyuka portion
The second feature is that the construction of the floor structure and the installation process of the processing device can be performed simultaneously, and the construction period can be further shortened.

Furthermore, this the auxiliary processing device to the floor structure of the processing apparatus unit is connected to the installed processing device
The third feature is that there is no need to install auxiliary equipment after installation of the processing equipment or to connect and connect auxiliary equipment, thereby further shortening the construction period and reducing construction costs. As much as possible, optimum performance can be obtained by standardization as a processing unit, and a start-up test of the processing unit before shipment is also possible, so that a start-up period on site can be further shortened.

Further, when the connection port for each driving line in the floor structure of the processing unit is set at a predetermined position at least in the height direction, the driving line can be piped in advance and the connection pipe can be easily connected. Can be.

Further, if a floor structure provided with each driving line connected to the motor room is provided, the piping of the driving line itself can be simplified simply by installing this floor structure.

[0014]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the clean room according to the present invention will be described below with reference to FIGS.

Reference numeral 1 denotes a clean room, in which a building outdoor shell 3 is constructed on a foundation floor 2 having an integrated foundation / floor structure. The foundation floor 2 is configured by installing a precast footing or a precast underground beam on the ground, for example, and can set a load point arbitrarily. In the lower part of the building outdoor shell 3, a plurality of pedestal-like floor structures 5 that can be individually installed on the base floor 2 are installed to form the floor structure 4, and the floor structure 4 is constructed. At 4, an underfloor chamber 6 is formed and a processing chamber 7 is formed on the floor structure 4. A ceiling room 8 is formed above the processing room 7,
A fan filter unit 9 having a high-performance filter such as a HEPA filter or an ULPA filter for cleaning air is disposed on a ceiling surface between the processing room 7 and the ceiling room 8. A large number of frames are formed in a matrix on the floor of the processing chamber 7, that is, the upper surface of the floor structure 4 or the floor structure 5, and aluminum die-cast gratings are provided in each of the frames. Thus, clean air that has passed through the fan filter unit 9 from the ceiling room 8 passes through the processing room 7 and the underfloor room 6
The air flowing down to the underfloor chamber 6 is further adjusted in temperature and humidity by an air conditioner (not shown) and returned to the ceiling chamber 7 through a return passage (not shown). Is configured.

Reference numeral 10 denotes a processing device installed in the processing chamber 7,
Each processing device 10 is installed and integrated on a dedicated floor structure 5a for installing it, and the processing device unit 11
Is composed. The floor structure 5a is designed so as to satisfy the installation specifications of the processing apparatus 10, such as load resistance and anti-vibration performance. The floor structure 5 of the processing unit 11
A is provided with an auxiliary machine 12 such as a vacuum pump and an excluding machine of the processing machine 10, and is connected to the processing machine 10 by a connection pipe 13, and further connects the auxiliary machine 12 and the processing machine 10 to a motor line. Pipes 14a and 14b for the motor lines are connected, and the connection ports of the connection pipes 14a and 14b to the motor line are located at predetermined positions appropriately set.

Reference numeral 16 denotes a driving line unit in which a driving line 15 connected to a driving room such as an exhaust system 15a for heat or acid, a high-pressure air system 15b, and a gas piping system 15c is piped inside a dedicated floor structure 5b. And each piping system 15a-1
5c are connection pipes 14a, 14 of the processing unit 11;
The pipe is installed at a height position corresponding to the arrangement position of the connection port b. The driving line unit 16 is disposed adjacent to the installation line of the processing device unit 11, and is connected to each connection pipe 14.
It is configured such that the piping systems 15a to 15c corresponding to a and 14b can be easily connected.

When constructing the clean room having the above structure, first, as shown in FIG. 2 (a), a building outdoor shell 3 is constructed on the base floor 2 and a ceiling room 8
Then, as shown in FIG. 2 (b), a driving line unit 16 is installed along the processing line on the basic floor 2 and then, as shown in FIG. Various processing unit 1 along the driving line unit 16 on the unit 2
1 and then, as shown in FIG.
The other floor structure 5 is installed on the floor to complete the entire floor structure 4, and the processing chamber 7 is partitioned by the partition 17 into an area corresponding to a difference in required cleanliness. A return passage (not shown) is formed at the location. After that, an air conditioner is arranged at a position facing the return passage of the underfloor chamber 6 constructed of a large number of floor structures 5 (5a, 5b), and the connection ports of the connection pipes 14a, 14b and the driving line 15 are arranged.
By connecting to each of the piping systems 15a to 15c, the construction of the clean room 1 and the installation of the processing apparatus 10 are completed.

According to the present embodiment, as described above, a large number of pedestal-shaped floor structures 5 are arranged on the foundation floor portion 2 in the building outdoor shell 3 to constitute the floor structure portion 4. Since only the floor structure 5 is created separately from the construction of the clean room, the floor structure 4 can be easily configured only by arranging the floor structure 5 when constructing the clean room. Further, since the floor structure 5a on which each processing device 10 is installed is dedicated to the processing device, the floor structure 5a can be designed so as to satisfy the load resistance and vibration resistance required for the processing device 11, and a plurality of types of floors can be designed. The use of the structure 5 makes it possible to easily configure the floor structure portion 4 that satisfies the required specifications without excess and deficiency, and to construct the clean room 1 in a short construction period and at low cost.

Further, since each processing apparatus 10 and its dedicated floor structure 5a are integrated into a processing apparatus unit 11, the processing apparatus unit 11 is installed on the base floor 2 to provide a floor. The construction of the structural part 4 and the installation process of the processing apparatus 10 can be performed simultaneously, the construction period can be further shortened, and the auxiliary equipment 12 of the processing apparatus 10 is installed on the floor structure 5a of the processing apparatus unit 11 so that the processing apparatus is installed. Since it is connected to the processing equipment 10, there is no need to install the auxiliary equipment 12 or to connect the auxiliary equipment 10 after the processing apparatus 10 is installed, so that the construction period can be further shortened and the construction cost can be reduced. In addition, there is no fear that the connection pipe to the auxiliary machine 12 arranged on the floor structure 5a may be different depending on the installation location of the processing apparatus 10, and the stability of the performance of the processing apparatus 10 can be ensured, and the processing apparatus unit 11 can be standardized. Optimum performance can be obtained. Further, the processing unit 1
The start-up test can be performed before shipment of the device 1, and the start-up period at the site can be further reduced.

Further, by simply installing the floor structure 5b, on which the respective driving lines 15 connected to the driving room are disposed, on the base floor 2, the piping of the driving lines can be simplified, and the processing unit 11 Since the connection port for each driving line 15 in the floor structure 5a is set at a predetermined position, the connection with the driving line 15 can be easily performed, the construction time can be shortened, and the generation of dust accompanying the construction can be achieved. And the startup up to the achievement of cleanliness can be completed in a short time.

Thus, the construction of the floor structure 4 and the processing apparatus 1
Installation of 0 and most of the connection piping can be done at the same time,
The construction period up to the start-up of the equipment can be greatly shortened, and the construction cost can be reduced.

Processing unit 1 shown in the above embodiment
In FIG. 1, the floor surface of the floor structure 5a is substantially equal to the installation area of the processing apparatus 10, but the floor structure 5a is larger than the installation area of the processing apparatus 10 as shown in FIG. May be configured.

In order to form a return passage for returning air from the underfloor room 6 to the ceiling room 8, as shown in FIG. 4, an air conditioner 18 is installed on the side surface of the floor structure 5, as shown in FIG. By closing the side surface of the processing chamber 7 with the partition 17, a return passage 18 communicating from the underfloor chamber 6 to the ceiling chamber 8 can be easily formed on the outside thereof.

[0025]

According to the clean room of the present invention, as is apparent from the above description, a large number of pedestal-like floor structures are arranged on the foundation floor in the outdoor shell of the building to constitute the floor structure. At the same time, the floor structure on which each processing unit was installed was designed to conform to the installation specifications of the processing unit.Therefore, a floor structure was created separately from the clean room construction, and the floor structure was placed. Parts can be easily configured, and the required specifications can be over- or under-established by using a floor structure that satisfies the load-bearing and vibration-proof performance required of the processing device as the floor structure on which the processing device is installed. A clean room can be constructed easily and at a low cost with a short construction period, and connection pipes for auxiliary equipment located below the floor structure can be installed processing equipment. Depending on the location Without fear that different Te, effect that can ensure the stability of the performance of the processor.

Further, installing the processor unit that integrates the processor and the floor structure of installing it on a base Ishizueyuka portion
Therefore , the construction of the floor structure and the installation process of the processing device can be performed simultaneously, and the construction period can be further shortened.

Furthermore, the auxiliary processing device to the floor structure of the processing apparatus unit is connected to the installed processing device
This eliminates the need to install auxiliary equipment after installation of the processing equipment, or to connect and connect auxiliary equipment, thus shortening the construction period, reducing construction costs, and standardizing as a processing equipment unit. Performance can be obtained, and a start-up test of the processing device unit can be performed before shipment, so that a start-up period on site can be further reduced.

Further, when the connection port for each driving line in the floor structure of the processing unit is set at a predetermined position at least in the height direction, the driving line can be piped in advance and the connection pipe can be easily connected. Can be.

Further, if a floor structure provided with each driving line connected to the motor room is provided, the piping of the driving line itself can be simplified simply by installing this floor structure.

[Brief description of the drawings]

FIG. 1 is a partial schematic longitudinal sectional view of a clean room according to an embodiment of the present invention.

FIG. 2 is a perspective view showing a construction process of a clean room of the embodiment.

FIG. 3 is a partial schematic longitudinal sectional view of another configuration example of the clean room of the embodiment.

FIG. 4 is a partial schematic longitudinal sectional view of another configuration example of the clean room of the embodiment.

FIG. 5 is a partial schematic longitudinal sectional view of a conventional clean room.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Clean room 2 Basic floor part 3 Building outdoor shell 4 Floor structure part 5, 5a, 5b Floor structure 6 Underfloor room 7 Processing room 8 Ceiling room 10 Processing device 11 Processing unit 12 Auxiliary equipment 13 Connection pipe 14a, 14b Connection pipe 15 Drive line 16 Drive line unit

──────────────────────────────────────────────────続 き Continuation of the front page (72) Inventor Seiji Ueda 1-1, Sachimachi, Takatsuki City, Osaka Prefecture Inside Matsushita Electronics Corporation (56) References JP-A-5-239905 (JP, A) JP-A Sho 63-14025 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) E04H 5/02 E04F 17/08 E04F 15/024 605 E04B 5/43 F24F 7/06 H01L 21/02 H01L 21/304

Claims (3)

(57) [Claims] 1. A ceiling room, a processing room on a floor structure, and a lower floor under a floor structure are provided in a building outdoor shell on a basic floor, and clean air is supplied from the ceiling room to the lower floor through the processing room. in clean room so as to flow down, by arranging a plurality of frame-like floor structure on the foundation floor of the building outside the shell constitutes the floor structure, the floor structure for installing the respective processing apparatus the processing device a structure adapted to the installation specifications, each processing unit and set it
The processing unit that integrates the floor structure
On the floor structure of the processing unit
It is noted that the auxiliary equipment is installed and connected to the processing equipment.
Clean room for the butterflies. 2. The clean room according to claim 1 , wherein a connection port for each driving line in the floor structure of the processing unit is set at a predetermined position at least in a height direction. 3. The vehicle according to claim 1, further comprising a floor structure provided with respective driving lines connected to the driving room.
Is the clean room described in 2 .