JP3295766B2 - Rotary cylinder of spindle mechanism and inspection method thereof - Google Patents
Rotary cylinder of spindle mechanism and inspection method thereofInfo
- Publication number
- JP3295766B2 JP3295766B2 JP19392993A JP19392993A JP3295766B2 JP 3295766 B2 JP3295766 B2 JP 3295766B2 JP 19392993 A JP19392993 A JP 19392993A JP 19392993 A JP19392993 A JP 19392993A JP 3295766 B2 JP3295766 B2 JP 3295766B2
- Authority
- JP
- Japan
- Prior art keywords
- mounting surface
- ring mounting
- rotary cylinder
- magnetic disk
- spindle mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000007689 inspection Methods 0.000 title claims description 16
- 230000007246 mechanism Effects 0.000 title claims description 15
- 238000000034 method Methods 0.000 title claims description 14
- 229910001220 stainless steel Inorganic materials 0.000 claims description 6
- 239000010935 stainless steel Substances 0.000 claims description 5
- 229910003460 diamond Inorganic materials 0.000 claims description 4
- 239000010432 diamond Substances 0.000 claims description 4
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 230000007547 defect Effects 0.000 description 3
- 238000003825 pressing Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 235000012489 doughnuts Nutrition 0.000 description 1
- 230000010365 information processing Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
- Holding Or Fastening Of Disk On Rotational Shaft (AREA)
Description
【0001】[0001]
【産業上の利用分野】この発明は磁気ディスク検査装置
における、スピンドル機構の回転シリンダと、そのディ
スク載置面の検査方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a rotating cylinder of a spindle mechanism in a magnetic disk inspection apparatus and a method for inspecting a disk mounting surface thereof.
【0002】[0002]
【従来の技術】情報処理装置の記憶媒体に使用される磁
気ディスク(以下単にディスクという)は、製造過程の
各段階で検査装置のスピンドル機構に装着されて回転
し、その欠陥や記憶性能などが検査される。スピンドル
機構には各種のものが考案されいるが、いずれもディス
クを装着して回転する回転シリンダと、その中心を貫通
し、装着されたディスクをクランプする中心軸よりな
る。2. Description of the Related Art A magnetic disk (hereinafter, simply referred to as a disk) used as a storage medium of an information processing apparatus is mounted on a spindle mechanism of an inspection apparatus and rotated at each stage of a manufacturing process, and its defects and storage performance are reduced. Will be inspected. Although various types of spindle mechanisms have been devised, each of the spindle mechanisms includes a rotary cylinder that rotates by mounting a disk, and a central shaft that penetrates the center of the cylinder and clamps the mounted disk.
【0003】図3はスピンドル機構の一例を示し、(a)
は垂直断面図、(b) はその部分拡大図である。図3(a),
(b)において、スピンドル機構は、ディスク1に対する
回転シリンダ2と、その中心を貫通し、上部に押圧ヘッ
ド3a を有する中心軸3、リング楔4a とスプリング
(図示省略)により内方に付勢されたクランプ具4b よ
りなるクランプ部4、および回転シリンダ2と中心軸3
の間に嵌挿されたスプリング5とにより構成されてい
る。ディスク1の装着においては、まず(a) の右側のよ
う中心軸3を上昇し、ディスク1の中心円の周辺の底面
1c を、回転シリンダ2の上端の載置面2a に載置す
る。ついで左側のように中心軸3を下降すると、リング
楔4a によりクランプ具4b が外方に押出され、その下
側の傾斜面4c が中心円のエッジ部に形成された、傾斜
角θが25°または45°のチャンファー1a を押圧し
てディスク1がクランプされる。FIG. 3 shows an example of a spindle mechanism.
Is a vertical sectional view, and (b) is a partially enlarged view thereof. Fig. 3 (a),
In (b), the spindle mechanism is urged inward by a rotating cylinder 2 for the disk 1, a center shaft 3 penetrating the center thereof, having a pressing head 3a at the top, a ring wedge 4a, and a spring (not shown). Clamp 4 composed of a clamp 4b, a rotary cylinder 2 and a central shaft 3
And a spring 5 inserted between them. When the disc 1 is mounted, the center shaft 3 is first raised as shown on the right side of (a), and the bottom surface 1c around the center circle of the disc 1 is mounted on the mounting surface 2a at the upper end of the rotary cylinder 2. Then, when the center shaft 3 is lowered as shown on the left side, the clamp 4b is pushed outward by the ring wedge 4a, and the lower inclined surface 4c is formed at the edge of the center circle. The inclination angle θ is 25 °. Alternatively, the disc 1 is clamped by pressing the 45 ° chamfer 1a.
【0004】[0004]
【発明が解決しようとする課題】前記のスピンドル機構
においては、回転シリンダ2の載置面2a は、これに載
置されてクランプされるディスク1が損傷しないよう
に、できるだけ円滑な平面に仕上げられている。しか
し、載置面2a には異物が付着することがあり、付着し
た異物により底面1c が損傷する。最近における高密度
化に対応して、ディスクに対する欠陥検査基準が厳しく
なっており、前記の底面1c の損傷は欠陥とされてディ
スクの品質ランクが低下するので、なんらかの方法によ
りこの損傷を排除することが必要とされている。この発
明は以上に鑑みてなされたもので、ディスクの底面の損
傷を排除できる載置面を有する回転シリンダを提供する
ことを目的とする。In the spindle mechanism described above, the mounting surface 2a of the rotary cylinder 2 is finished in a plane as smooth as possible so as not to damage the disk 1 mounted and clamped thereon. ing. However, foreign matter may adhere to the mounting surface 2a, and the attached foreign matter damages the bottom surface 1c. In response to the recent increase in density, stricter defect inspection standards have been adopted for disks, and the damage on the bottom surface 1c is regarded as a defect and the quality rank of the disk deteriorates. Therefore, it is necessary to eliminate the damage by any method. Is needed. The present invention has been made in view of the above, and an object of the present invention is to provide a rotary cylinder having a mounting surface capable of eliminating damage to a bottom surface of a disk.
【0005】[0005]
【課題を解決するための手段】この発明はスピンドル機
構の回転シリンダと、その検査方法である。回転シリン
ダは、ディスクの中心孔の直径より僅かに大きい内径
と、約1mmの厚さ、および、上端の円周面に形成さ
れ、ディスクのインチサイズに対応して、約1°〜3°
の範囲内の所定の傾斜角をなすリング載置面とを有す
る。ディスクの底面と、その中心孔のエッジに形成され
たチャンファーとが交わるリング状の交線を、リング載
置面に線接触させてディスクを載置し、クランプ具によ
りクランプする。上記の回転シリンダは、SUS440
系のステンレス鋼を素材とし、その上端面をダイヤモン
ド研磨して、リング載置面を高精度に形成したものであ
る。次に、回転シリンダの検査方法は、回転シリンダの
上端の円周面に形成され、約1°〜3°の範囲内の傾斜
角をなすリング載置面において、適当な平行光をリング
載置面に照射し、その反射光を適当な距離に設けたスク
リーンに投影し、投影されたドーナッツ形の映像の直径
を計測して、リング載置面の傾斜角の良否を検査するも
のである。SUMMARY OF THE INVENTION The present invention relates to a rotary cylinder of a spindle mechanism and an inspection method thereof. The rotating cylinder has an inner diameter slightly larger than the diameter of the center hole of the disk, a thickness of about 1 mm, and is formed on the circumferential surface at the upper end, and corresponds to about 1 ° to 3 ° corresponding to the inch size of the disk.
And a ring mounting surface having a predetermined inclination angle in the range of The disk is placed with the ring-shaped intersection line where the bottom surface of the disk and the chamfer formed at the edge of the center hole intersect with the ring mounting surface, and the disk is clamped by the clamp. The above rotating cylinder is SUS440
The ring mounting surface is formed with high precision by using a stainless steel material as a raw material and polishing the upper end surface with diamond. Next, a method of inspecting the rotary cylinder is to apply an appropriate parallel light to the ring mounting surface formed on the circumferential surface at the upper end of the rotary cylinder and having an inclination angle in a range of about 1 ° to 3 °. The reflected light is projected on a screen provided at an appropriate distance, the diameter of the projected donut-shaped image is measured, and the quality of the inclination angle of the ring mounting surface is inspected.
【0006】[0006]
【作用】上記の回転シリンダの素材のSUS440系の
ステンレス鋼は、ステンレス鋼中最も硬くて切削性が良
好なもので、リング載置面に対して好適なものである。
これにより形成された回転シリンダは、内径がディスク
の中心孔の直径より僅かに大きく、厚さが約1mmのも
ので、その上端の円周面にはディスクのインチサイズに
対応して、約1°〜3°の範囲内の所定の傾斜角をなす
リング載置面が、ダイヤモンドによりラップ研磨されて
高精度に形成される。装着されるディスクは、その底面
と、その中心孔のエッジ部のチャンファーとが交わるリ
ング状の交線が、リング載置面に線接触して載置され、
クランプ具によりクランプされる。ディスクの底面とリ
ング載置面の接触は、接触面積が非常に小さい線接触で
あるので、付着異物によりディスクの底面に損傷が生じ
る恐れは極めて少ない。また、リング載置面の傾斜角は
約1°〜3°の範囲内で高精度のため、ディスクが偏心
してリング状の交線の接触位置が変化しても、ディスク
の傾斜は極めて微小で検査に支障しないものである。次
に検査方法においては、リング載置面に対して適当な平
行光を照射し、その反射光を適当な距離に設けたスクリ
ーンに投影し、ドーナッツ形の映像の直径を計測し、リ
ング載置面の傾斜角が、円周上で約1°〜3°の範囲内
の所定の値で、かつ均一であるか否かが簡便正確に検査
される。The stainless steel of SUS440 series, which is the material of the above-mentioned rotary cylinder, is the hardest of stainless steels and has good machinability, and is suitable for the ring mounting surface.
The rotating cylinder thus formed has an inner diameter slightly larger than the diameter of the center hole of the disk and a thickness of about 1 mm, and a circumferential surface at the upper end thereof has a diameter of about 1 mm corresponding to the inch size of the disk. The ring mounting surface having a predetermined inclination angle in the range of 3 ° to 3 ° is lapped and polished with diamond to be formed with high precision. The disk to be mounted is placed with a ring-shaped intersection line where the bottom surface and the chamfer at the edge of the center hole intersect with the ring mounting surface,
It is clamped by the clamp tool. Since the contact between the bottom surface of the disk and the ring mounting surface is a line contact with a very small contact area, there is very little risk of damage to the bottom surface of the disk due to attached foreign matter. In addition, since the inclination angle of the ring mounting surface is high within the range of about 1 ° to 3 °, even if the disk is eccentric and the contact position of the ring-shaped intersection changes, the inclination of the disk is extremely small. It does not interfere with the inspection. Next, in the inspection method, appropriate parallel light is applied to the ring mounting surface, and the reflected light is projected onto a screen provided at an appropriate distance, the diameter of the donut-shaped image is measured, and the ring mounting surface is measured. It is easily and accurately inspected whether or not the inclination angle of the surface is a predetermined value in the range of about 1 ° to 3 ° on the circumference and is uniform.
【0007】[0007]
【実施例】図1はこの発明による回転シリンダ6の一実
施例を示し、(a) は回転シリンダ6の上部の外観および
断面図、(b) はディスク1のエッジ部と、これが載置さ
れたリング載置面6b の部分拡大図である。図1(a) に
おいて、回転シリンダ6は、SUS440系のステンレ
ス鋼の金属シリンダを素材とし、その外径φd がディス
ク1の中心孔の直径より僅かに大きく、約1mmの厚さ
tの上部シリンダ6a を形成する。ただしその下部は絞
り込んで、前記した図3(a) の従来の回転シリンダ2と
同一の直径とし、中心軸3、クランプ部4などが設けら
れる。上部シリンダ6a の上端の円周面を、ダイヤモン
ドによりラップ研磨して、傾斜角δθが約1°〜3°の
リング載置面6b を高精度に形成する。傾斜角δθはデ
ィスク1のインチサイズにより異なり、例えば2.5イ
ンチの場合はδθ=2°が適当とされ、その許容偏差を
±1′とする。許容偏差を微小な±1′とする理由は、
δθが円周上の位置により異なるとディスク1が傾斜す
るので、これを防止するためである。このように傾斜角
δθは高精度が必要であるため、リング載置面6b が研
磨された段階でこの発明の検査方法により検査される。
図1(b) において、ディスク1の中心円のエッジ部に
は、前記したように25°または45°の角度θで傾斜
したチャンファー1a,1b が設けてある。下側のチャン
ファー1b と底面1c との交線を1d とすると、交線1
d はリング状をなし、これがリング載置面6b に接触し
てディスク1が回転シリンダ6に載置される。この場
合、ディスク1が偏心すると交線1d の接触位置が、例
えば距離R移動して、ディスク1の左側では高さが低く
なり、右側では反対に高くなってディスク1は左方に傾
斜する。しかし、傾斜角δθが約1°〜3°と小さいの
で、接触位置が移動しても高さ変化は微小で、従ってデ
ィスクの傾斜は無視できる。1 shows an embodiment of a rotary cylinder 6 according to the present invention. FIG. 1 (a) is an external view and a sectional view of the upper part of the rotary cylinder 6, and FIG. It is the elements on larger scale of the ring mounting surface 6b. In FIG. 1 (a), the rotary cylinder 6 is made of a stainless steel metal cylinder of SUS440 series, and its outer diameter φ d is slightly larger than the diameter of the center hole of the disk 1 and has a thickness t of about 1 mm. The cylinder 6a is formed. However, the lower portion is narrowed down to have the same diameter as the conventional rotary cylinder 2 shown in FIG. 3 (a), and a center shaft 3, a clamp portion 4 and the like are provided. The circumferential surface at the upper end of the upper cylinder 6a is lapped and polished with diamond to form a ring mounting surface 6b having an inclination angle δθ of about 1 ° to 3 ° with high precision. The inclination angle δθ differs depending on the inch size of the disk 1. For example, in the case of 2.5 inches, δθ = 2 ° is appropriate, and the allowable deviation is ± 1 ′. The reason for setting the tolerance to a small ± 1 '
If δθ differs depending on the position on the circumference, the disk 1 is inclined, so that this is prevented. As described above, since the inclination angle δθ requires high accuracy, the ring mounting surface 6b is inspected by the inspection method of the present invention when the ring mounting surface 6b is polished.
In FIG. 1 (b), the chamfers 1a and 1b which are inclined at an angle θ of 25 ° or 45 ° are provided at the edge of the center circle of the disk 1 as described above. Assuming that the intersection line between the lower chamfer 1b and the bottom surface 1c is 1d, the intersection line 1
d has a ring shape, which comes into contact with the ring mounting surface 6b, and the disk 1 is mounted on the rotary cylinder 6. In this case, when the disk 1 is eccentric, the contact position of the intersection line 1d moves, for example, by a distance R, and the height decreases on the left side of the disk 1 and increases on the right side, and the disk 1 tilts to the left. However, since the inclination angle δθ is as small as about 1 ° to 3 °, the height change is small even if the contact position moves, so that the inclination of the disk can be ignored.
【0008】図2は、この発明の回転シリンダ6の検査
方法の実施例を示す。図2(a) において、回転シリンダ
6のリング載置面6b に対して、適当な平行光LT を照
射する。反射光はドーナッツ状をなし、その映像Qを適
当な距離Dに設けたスクリーンSに投影する。映像Qの
複数の方向の内径φ1 と外径φ2 を計測すれば、傾斜角
δθが円周上の全域について、所定の角度と偏差である
か否かが精密に検査される。図2(b) は簡便な検査方法
を示し、窓を通して太陽光をリング載置面6b に照射
し、反射光を壁に投影する。この場合、δθ=2°、距
離D≒1mとすると、太陽光には不平行成分があるの
で、映像Qの内径φ1 =155mm、外径φ2 =175
mmが正しい値とされる。FIG. 2 shows an embodiment of the method for inspecting the rotary cylinder 6 of the present invention. In FIG. 2 (a), the ring mounting surface 6b of the rotary cylinder 6 irradiates a suitable collimated light L T. The reflected light has a donut shape and projects the image Q on a screen S provided at an appropriate distance D. By measuring the inside diameter phi 1 and the outer diameter phi 2 of the plurality of directions of the image Q, the inclination angle δθ is the entire area of the circumference, whether it is a predetermined angle and the deviation is close inspection. FIG. 2 (b) shows a simple inspection method, in which sunlight is applied to the ring mounting surface 6b through a window, and reflected light is projected on a wall. In this case, assuming that δθ = 2 ° and the distance D 太 陽光 1 m, since there is a non-parallel component in sunlight, the inner diameter φ 1 of the image Q = 155 mm and the outer diameter φ 2 = 175
mm is a correct value.
【0009】[0009]
【発明の効果】以上の説明のとおり、この発明による回
転シリンダにおいては、その上端面に形成されたリング
載置面は、素材のSUS440系のステンレス鋼が非常
に硬いので、摩耗が非常に少ない。また、リング載置面
に対して、ディスクの底面とチャンファーの交るリング
状の交線が線接触するので、接触面積が非常に小さく
て、付着異物によるディスクの底面に損傷が生じる恐れ
は極めて少なく、さらにその傾斜角は約1°〜3°の範
囲内の所定値でかつ高精度のため、たとえディスクが偏
心しても、その傾斜は極めて微小で検査に支障しないな
ど利点が多く、磁気ディスク検査装置に大きく寄与する
ものである。検査方法においては、リング載置面に対し
て適当な平行光を照射し、その反射光をスクリーンに投
影し、ドーナッツ形の映像の直径を計測し、リング載置
面の傾斜角が、約1°〜3°の範囲内の所定の値である
か否かが検査されるもので、リング載置面の簡便かつ正
確な検査方法として有効なものである。As described above, in the rotary cylinder according to the present invention, the ring mounting surface formed on the upper end surface of the rotary cylinder is made of SUS440 stainless steel, which is very hard, so that it has very little wear. . Also, since the ring-shaped intersection line of the chamfer and the bottom surface of the disk makes line contact with the ring mounting surface, the contact area is very small, and there is no danger that the bottom surface of the disk may be damaged by foreign matter adhering. Since the inclination angle is extremely small, and the inclination angle is a predetermined value within a range of about 1 ° to 3 ° and has high accuracy, even if the disk is eccentric, the inclination is extremely small and does not hinder the inspection. This greatly contributes to the disk inspection device. In the inspection method, appropriate parallel light is applied to the ring mounting surface, the reflected light is projected on a screen, the diameter of the donut-shaped image is measured, and the inclination angle of the ring mounting surface is about 1 °. It is checked whether the value is a predetermined value in the range of ° to 3 °, and is effective as a simple and accurate inspection method of the ring mounting surface.
【図1】 この発明による回転シリンダ6の一実施例を
示し、(a) は回転シリンダ6の上部の外観および断面
図、(b) は磁気ディスク1の中心孔のエッジ部と、これ
が載置されたリング載置面6b の部分拡大図である。1A and 1B show an embodiment of a rotary cylinder 6 according to the present invention, wherein FIG. 1A is an external view and a sectional view of an upper portion of the rotary cylinder 6, and FIG. It is the elements on larger scale of the ring mounting surface 6b which was done.
【図2】 この発明の回転シリンダ6の検査方法の実施
例を示し、(a) は検査方法の原理説明図、(b) は簡便な
検査方法の説明図である。FIGS. 2A and 2B show an embodiment of a method for inspecting a rotary cylinder 6 according to the present invention, wherein FIG. 2A is a diagram illustrating the principle of the inspection method, and FIG.
【図3】 磁気ディスク用のスピンドル機構の一例を示
し、(a) は垂直断面図、(b) はその部分拡大図である。3A and 3B show an example of a spindle mechanism for a magnetic disk, wherein FIG. 3A is a vertical sectional view, and FIG. 3B is a partially enlarged view thereof.
1…磁気ディスク、単にディスク、1a,1b …チャンフ
ァー、1c …底面、2…従来の回転シリンダ、3…中心
軸、3a …押圧ヘッド、4…クランプ部、4a …リング
楔、4b …クランプ具、4c …傾斜面、5…スプリン
グ、6…この発明の回転シリンダ、6a …上部シリン
ダ、6b …リング載置面、φd …回転シリンダ6の外
径、t…上部シリンダの厚さ、θ…チャンファーの傾斜
角、δθ…リング載置面の傾斜角、R…ディスク1の偏
心距離、 LT …平行光、D…距離、S…スクリーン、
Q…映像、φ1 …映像の内径、φ2 …映像の外径。DESCRIPTION OF SYMBOLS 1 ... Magnetic disk, simply disk, 1a, 1b ... Chamfer, 1c ... Bottom surface, 2 ... Conventional rotary cylinder, 3 ... Center axis, 3a ... Pressing head, 4 ... Clamp part, 4a ... Ring wedge, 4b ... Clamping tool .., 4c: inclined surface, 5: spring, 6: rotating cylinder of the present invention, 6a: upper cylinder, 6b: ring mounting surface, φ d : outer diameter of rotating cylinder 6, t: thickness of upper cylinder, θ: inclination angle of the chamfer, the inclination angle of the .delta..theta ... ring mounting surface, R ... eccentricity of the disk 1, L T ... parallel light, D ... distance, S ... screen,
Q: image, φ 1 : inner diameter of image, φ 2 : outer diameter of image.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 坂野 修次 東京都千代田区大手町二丁目6番2号 日立電子エンジニアリング株式会社内 (56)参考文献 特開 平4−38752(JP,A) 特開 平4−38753(JP,A) 特開 平1−134773(JP,A) (58)調査した分野(Int.Cl.7,DB名) G11B 5/84 G11B 23/00 G11B 23/04 B23Q 3/12 B23B 31/02 ──────────────────────────────────────────────────続 き Continuation of the front page (72) Inventor Shuji Banno 2-6-2 Otemachi, Chiyoda-ku, Tokyo Inside Hitachi Electronics Engineering Co., Ltd. (56) References JP-A-4-38752 (JP, A) JP-A-4-38753 (JP, A) JP-A-1-134773 (JP, A) (58) Fields investigated (Int. Cl. 7 , DB name) G11B 5/84 G11B 23/00 G11B 23/04 B23Q 3/12 B23B 31/02
Claims (3)
有する回転シリンダと、該回転シリンダを貫通し、該磁
気ディスクに対するクランプ具を有する中心軸とよりな
るスピンドル機構において、前記回転シリンダは、前記
磁気ディスクの中心孔の直径より僅かに大きい内径と、
約1mmの厚さ、および、上端の円周面に形成され、前
記磁気ディスクのインチサイズに対応して、約1°〜3
°の範囲内の所定の傾斜角をなすリング載置面とを有
し、前記磁気ディスクの底面と、前記中心孔のエッジに
形成されたチャンファーとが交わるリング状の交線を、
該リング載置面に線接触させて該磁気ディスクを載置
し、前記クランプ具によりクランプすることを特徴とす
る、スピンドル機構の回転シリンダ。1. A spindle mechanism comprising: a rotary cylinder having a mounting surface for a magnetic disk to be inspected; and a central shaft penetrating through the rotary cylinder and having a clamp for the magnetic disk, wherein the rotary cylinder comprises: An inner diameter slightly larger than the diameter of the center hole of the magnetic disk;
A thickness of about 1 mm, formed on the circumferential surface at the upper end, and about 1 ° to 3 ° corresponding to the inch size of the magnetic disk.
A ring mounting surface having a predetermined inclination angle within the range of °, a bottom surface of the magnetic disk and a ring-shaped intersection line where a chamfer formed at an edge of the center hole intersects,
The rotating cylinder of a spindle mechanism, wherein the magnetic disk is mounted in line contact with the ring mounting surface and clamped by the clamp.
ステンレス鋼を素材とし、その上端面をダイヤモンド研
磨して、前記リング載置面を高精度に形成したことを特
徴とする、請求項1記載のスピンドル機構の回転シリン
ダ。2. The ring mounting surface according to claim 1, wherein the rotating cylinder is made of stainless steel of SUS440 series, and an upper end surface thereof is polished with diamond to form the ring mounting surface with high precision. Rotary cylinder of spindle mechanism.
円周面に形成され、約1°〜3°の範囲内の傾斜角をな
すリング載置面において、適当な平行光を該リング載置
面に照射し、その反射光を適当な距離に設けたスクリー
ンに投影し、該投影されたドーナッツ形の映像の直径を
計測して、該リング載置面の傾斜角の良否を検査するこ
とを特徴とする、スピンドル機構の回転シリンダの検査
方法。3. A ring mounting surface formed on a circumferential surface at an upper end of a rotary cylinder of a spindle mechanism and having an inclination angle in a range of about 1 ° to 3 °, and applies an appropriate parallel light to the ring mounting surface. And projecting the reflected light on a screen provided at an appropriate distance, measuring the diameter of the projected donut-shaped image, and inspecting the inclination angle of the ring mounting surface. Inspection method for rotating cylinder of spindle mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19392993A JP3295766B2 (en) | 1993-07-09 | 1993-07-09 | Rotary cylinder of spindle mechanism and inspection method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19392993A JP3295766B2 (en) | 1993-07-09 | 1993-07-09 | Rotary cylinder of spindle mechanism and inspection method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0729168A JPH0729168A (en) | 1995-01-31 |
| JP3295766B2 true JP3295766B2 (en) | 2002-06-24 |
Family
ID=16316097
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19392993A Expired - Fee Related JP3295766B2 (en) | 1993-07-09 | 1993-07-09 | Rotary cylinder of spindle mechanism and inspection method thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3295766B2 (en) |
-
1993
- 1993-07-09 JP JP19392993A patent/JP3295766B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0729168A (en) | 1995-01-31 |
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