JP3314038B2 - Compound processing equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a combined processing apparatus, and more particularly to a semiconductor manufacturing apparatus using a vacuum processing apparatus in which a plurality of processing apparatuses are connected to a transfer processing apparatus.

[0002]

2. Description of the Related Art A semiconductor manufacturing apparatus capable of flexibly executing semiconductor wafer processing using a vacuum processing apparatus in which a plurality of processing apparatuses are connected to one transfer processing apparatus is disclosed in Japanese Patent Application Laid-Open No. No. 12,9641, and the like.

[0003] In these semiconductor manufacturing apparatuses, when the operation of the vacuum processing apparatus is continued while the processing apparatus unnecessary for the wafer processing or the inoperable processing apparatus is connected to the transfer processing apparatus, the processing processing is not performed. The wafer processing control procedure is set excluding the apparatus.

On the other hand, in such a vacuum processing apparatus, since the apparatus tends to be large and expensive with the increase in the size of the semiconductor wafer, the apparatus is miniaturized as much as possible and manufactured at low cost. With the same device configuration
Changes in the wafer processing process and various types of wafer processing.
Can easily add or remove process
It is hoped that it can be obtained .

[0005]

However, in a conventional vacuum processing apparatus, when a semiconductor wafer to be processed is loaded into the apparatus, the load cassette itself is directly loaded into a load lock chamber connected to the transfer processing apparatus. The semiconductor wafers loaded on the load cassette are carried into the respective processing units via the carry-in processing unit to perform arbitrary processing such as film formation, CVD, etching, etc., and the processed semiconductor wafers are carried out of the apparatus. Before loading, the original load cassette or another load cassette is loaded in advance into the unload lock chamber connected to the transfer processing device, and the processed semiconductor wafer is directly loaded from the process processing device via the loading processing device. After returning to the cassette, the load cassette is carried out of the unload lock chamber to the outside. As described above, in the conventional vacuum processing apparatus, when loading and unloading semiconductor wafers, the load cassette is directly loaded into the load lock chamber or the unload lock chamber. However, the device becomes expensive. Such a problem is becoming more and more remarkable as the size of the semiconductor wafer is increased. In addition, the conventional vacuum processing equipment is
Arrangements for coordination between process
Insufficient consideration, if there is a mismatch between the two, the vacuum processing
The entire system has become inoperable, and the cause has been determined and repaired
Spends a lot of time to reduce the operation rate of the device.
Problem. That is, the vacuum processing apparatus
The control unit cooperates with the control unit
Execute, but add, delete or maintain
If the process for this coordination is incorrect during maintenance work,
Can perform the target wafer transfer and process processing set by
Therefore, the operation of the device is stopped. further,
Conventional vacuum processing equipment includes unused processing equipment
Since the main circuit power is turned on, wasteful power is consumed.
Since the main circuit power is turned on, the vacuum processing operation is performed.
Perform maintenance work on process processing equipment not used during transfer
And the operation rate of the equipment cannot be improved.
won.

Accordingly, it is an object of the present invention to reduce the size of the device,
It is possible to inexpensively manufacture, versus the transport processor
Easily and reliably add or remove additional processing equipment
It is an object of the present invention to provide a multifunction device that can perform the above processing.

[0007]

In order to achieve this object, the present invention provides a transfer processing apparatus, a plurality of process processing apparatuses connected to the transfer processing apparatus, a control apparatus for controlling these processing apparatuses, A load lock chamber and an unload lock chamber connected to a transfer processing device, an atmospheric transfer device, and a load cassette, wherein an object to be processed is taken out of the load cassette by the atmospheric transfer device and the load lock chamber is removed. The carried-in processing object is carried in through the carrying-in processing device to any one of the process processing devices to perform any processing, and the processed processed object is carried out through the transfer processing device. unloaded to the unload lock chamber, while configured to return to the original loading cassette or separate load cassette by the atmospheric transfer device, process
Indicates that the transfer processing device is connected to the transfer processing device.
Connection information signal generating means for generating a connection information signal;
Register the connection of the processing equipment to the transport processing equipment
Switching means for generating a registration information signal, and connection information and registration
Refer to the information, registered with the linked processing equipment
Control processing by logically judging the matching status of process
And control means for performing the following .

The atmospheric transfer apparatus takes out an object to be processed, for example, a semiconductor wafer, from a load cassette outside the apparatus and carries it into a load lock chamber, and also transfers a processed object from an unload lock chamber to the apparatus. Since the object is carried out to a load cassette outside, it is not necessary to carry the load cassette itself directly into the load lock chamber when carrying in and carrying out the object. Further, the control means includes a process processing device.
Refer to the connection information of the device and the registration information of the process processing device,
Actually connected process equipment and registered process
Logically determine the consistency of the processing unit and execute control.
Starts process processing control with the equipment in an inconsistent state
Will not be done.

[0009]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a semiconductor vacuum processing apparatus according to one embodiment of the present invention will be described with reference to the drawings. FIG.
Is a semiconductor vacuum processing apparatus in which three transfer processing apparatuses are connected to one transfer processing apparatus. A load lock chamber 21 and an unload lock chamber 22 are connected to one side of the transfer processing apparatus 10 having a rectangular cross section, and process processing apparatuses 30, 40, 50 for processing semiconductor wafers are respectively connected to the other three sides.
Are connected. The transfer processing chamber 1 of the transfer processing device 10
1 and the processing chambers 31, 41, 51 of the respective processing apparatuses 30, 40, 50 are gate valves 6 respectively.
The transfer of the semiconductor wafer by the arm 12 of the transfer processing chamber 11 is performed through the gate valve 6.
1, 62 and 63 are opened. Each process chamber 3
Electrodes 32, 42, 52 for mounting a semiconductor wafer and a discharge device (not shown) for processing the semiconductor wafer are provided in 1, 41, 51, respectively. A vacuum exhaust device for exhausting the chamber is connected to 41 and 51.

A control device for controlling these components includes a transport control device 13 for controlling the transport processing device 10, a process control device 33 for controlling the process processing device 30, and a process control device 43 for controlling the process processing device 40. And a process control device 53 for controlling the process processing device 50.

In this semiconductor vacuum processing apparatus, a semiconductor wafer to be processed is taken out of a load cassette (not shown) by an atmospheric transfer device (not shown), and is loaded into a load lock chamber 2.
The semiconductor wafer loaded into the semiconductor wafer 1 is transferred to the arm 12.
The semiconductor wafer is transported into any one of the processing chambers 31, 41, 51 for processing, and the processed semiconductor wafer is unloaded to the unloading lock chamber 22, and is returned to the original cassette or another cassette by the atmospheric transfer device. It is systemized to return to.

The processing performed by the processing units 30, 40, and 50 includes film formation, CVD, etching, and the like. Each of the processing units 30, 40, and 50 includes a process control unit 33, 43, and 53, respectively. Independently executes the process under the control of.

FIG. 1 shows the configuration of the control device in detail. The transport control device 13 includes a main control unit 13a
And an abnormal history information table 13b, a processor connection information table 13c, a processor status information table 13d, a recognition information holding unit 13e, and a communication unit 13f connected to the main control unit 13a. 1
3e is provided with a switching means 13g connected to 3e.

The main control means 13a of the transport control device 13 comprises:
A semiconductor wafer to be processed is loaded from the load lock chamber 21 into any one of the processing devices 30, 40, 50, and the processed semiconductor wafer is transferred to the processing devices 30, 40, 50.
The arm 12 and the gate valves 61, 62 and 63 are controlled so as to be carried out from the chamber 50 to the unloading lock chamber 22, and the process control is performed so that each of the processing units 30, 40 and 50 independently executes a predetermined process. Device 33,
A process for controlling 43 and 53 is executed.

The abnormal history information table 13b is a table for storing the contents of abnormalities (for example, abnormal discharge, abnormal pressure, abnormal power supply, etc.) occurring in each of the processing devices 30, 40, 50.

The processing device connection information table 13c is shown in FIG.
As shown in the figure, the transport processing device 10 and the process processing device 3
It is a table which stores the information which shows the connection relationship of 0, 40, 50.

The processing device status information table 13d is shown in FIG.
As shown in (1), the processing state of each of the processing apparatuses 10, 30, 40, and 50 (the transfer control apparatus 13 and the process control apparatuses 33 to 33).
53 is a table for storing information for recognizing the control state of the control unit 53.

The recognition information holding means 13 e
g, and the connection information signal from the connection signal generating means described later is stored and logically determined as shown in FIG.
40 and 50 are held as information for recognizing whether or not the links are effectively connected.

The communication means 13f has a two-way communication function. A CSMA / CD communication device or a talk ring communication device is used, and each process is performed via a communication medium 71 such as a stranded wire or a coaxial cable. Control devices 33, 4
Communicate with 3,53.

The switching means 13g is provided for each of the processing units 30, 40, 5 to be connected to the transporting unit 10.
0, which generates a registration information signal for registering that the process processors 30, 40, 50 have been connected to the signal lines assigned to the respective 0s. A dip switch or the like operated by an operator is used. .

As another means, the registration information may be stored in the switching means 13g. For example, an electrically erasable memory (EEPROM) is switched to the switching unit 13g.
And the registration information may be stored in advance.

Each of the process control devices 33, 43 and 53 is installed independently of the transport control device 13, and
1 so as to transmit and receive signals. Each of the process control devices 33, 43, 53 includes a communication unit 33a, 43a, 53a connected to the communication unit 13f via the communication medium 71, a sub-control unit 33b, 43b, 53b, and a processing unit. Consolidation information table 3
3c, 43c, 53c and the processing device status information table 33
d, 43d, and 53d, and connected signal generating means 33e, 43 connected to the recognition information holding means 13e.
e, 53e.

The communication means 33a, 43a, 53a, the processing unit connection information tables 33c, 43c, 53c and the processing unit state information tables 33d, 43d, 53d are provided with the communication unit 13f of the transport control unit 13 and the processing unit connection information. The configuration is the same as the table 13c and the processing device status information table 13d.

Each of the sub-control means 33b, 43b, 53b
In response to the control signal received from the transport control device 13, each of the control units performs a preset control process independently, and returns a control result and a control state.

Each connection signal generating means 33e, 43e, 53
e is the corresponding process processing device 30, 40, 5
0 is a means for generating a connection information signal indicating that the process control device 3 is connected to the transport processing device 10.
A signal (for example, a breaker ON signal) indicating that 3, 43, and 53 are connected to the power supply circuit and other digital signals are used.

Further, as another method of recognizing the connection information by the transport processing apparatus 10, (i) each process processing apparatus may transmit the connection information to the transport processing apparatus by communication means, or (i)
i) It is also conceivable to request and confirm connection information by a communication means from a process processing apparatus connected to the transport processing apparatus.

The terminal means 81 is controlled by the main control means 13a to display guidance to an operator, and to execute a processing procedure or the like to be executed by each process processing apparatus or the like by associating the process processing apparatus with a process recipe number. Used to enter into.

Next, the control processing executed by the main control means 13a when operating the semiconductor vacuum processing apparatus will be described with reference to FIGS. When a main power switch (not shown) of the semiconductor vacuum processing apparatus is turned on in process 110, the main control means 13a shifts to process 120, and only the control power of each process control device 33, 43, 53 is enabled (turned on). ). Then, the process proceeds to step 130 where the recognition information holding unit 13e is operated.
In step 140, a process is performed to determine whether there is a connection-disabled process processing device in order to display a connection state and display a guidance for a repair process in process 140. If there is, the process proceeds to the process 150 shown in FIG. 7, and if there is no process device with invalid connection, the process proceeds to the process 220 shown in FIG.

The process 150 is a process of branching the control according to the cause of the connection invalidation. The information held in the recognition information holding means 13e is logically judged, and the registration information corresponding to the process invalidation unit of the connection invalidation is "unknown". The registration information is “consolidated” in “Register”
If it is, the process proceeds to step 160, and the registration information is “registered”.
If the connection information is "unconnected", the process proceeds to step 170, and if the registration information is "unregistered" and the connection information is "unconnected", the process proceeds to step 220 shown in FIG.

The state where the registration information is "unregistered" and the connection information is "connection" is a case where the registration operation by the switching means is neglected after the connection of the process processing apparatus. A process for displaying guidance for prompting the switching unit 13g to “register” for the process processing device on the terminal unit 81 is performed.
At step 80, the registration information signal input confirmation processing of the switching means 13g is performed, and the routine proceeds to processing 220 shown in FIG.

The state in which the registration information is "registered" and the connection information is "unconnected" means that the processing signal processing unit has been disconnected for maintenance, or because of a malfunction in the control power supply or signal circuit, etc. This is a case where the information signal of “connection” is not input. Therefore, in the process 170, the terminal means 81 displays a guidance requesting an input for selecting whether to treat (ignore) the process processing device as not connected or to repair (repair) the device to a valid state. Perform the following processing. In the process 190, the selection input inputted from the terminal means 81 is checked.
Then, a process of displaying guidance for prompting the user to operate the switching unit 13g so that the process processing apparatus becomes “unregistered” is displayed on the terminal unit 81, and the process proceeds to the process 220 shown in FIG. In a process 210, a process of displaying guidance for prompting the user to repair the process processing device on the terminal unit 81 is performed.

After executing such control processing, FIG.
In the processing 220 shown in (1), the connection information and the registration information stored in the recognition information storage
A process processing device that is effectively linked to 0 is checked and registered, and in process 230, the presence or absence of an abnormality is checked by referring to the abnormality log information table 13 d with respect to the “connection enabled” process processing device. Check for the presence of a processing unit.

If there is no abnormal processing device, the process proceeds to step 250 and the main circuit power of the normal processing device is turned on.

When there is an abnormal processing device,
The process proceeds to a process 260 to perform a process of displaying the corresponding process processing device and the content of the abnormality on the terminal means 81.
At 0, it is determined whether or not the semiconductor vacuum processing apparatus can be operated with the abnormal processing apparatus connected to the transfer processing apparatus. If "operable", the terminal unit 81 performs a process 280 to display a guidance prompting the user to operate the switching unit 13g so that the registration information corresponding to the process processing apparatus is set to "unregistered". In step 250, if the operation is not possible, step 290 is performed to display on the terminal 81 guidance for prompting the user to repair the process apparatus.

Then, the process proceeds to the process 300, where the connection state determination and the setting process of the processing apparatus are performed, and then the vacuum processing operation is started.

As shown in FIG. 9, the process 300 reads the recognition information held in the recognition information holding means 13e in the process 301 and determines whether or not each of the process processors 30, 40, 50 is in a valid connection state. Is determined, and the result is stored in the processing device connection information table 13c. In this example,
The transport processing device 10 includes three process processing devices 30 and 4
Since 0 and 50 are effectively connected, the storage content of the processing device connection information table 13c is “00001”.
111 ”(valid connection: 1, unconnected or connection disabled: 0)
Becomes

Thereafter, in the process 302, the connection information is transmitted to the process control device 33, and the connection information is stored in the processing device connection information table 33c of the process control device 33.

Similarly, in step 303, the connection information is transmitted to the process control device 43, and the connection information is stored in the processing device connection information table 43c of the process control device 43.

In the same manner, in step 304, the connection information is transmitted to the process control device 53, and the connection information is stored in the processing device connection information table 53c of the process control device 53.

During the vacuum processing operation, each processing apparatus 1
The statuses of 0, 30, 40, and 50 are checked at any time, and the processing device status information tables 13d, 33d, and 43 are used as the status information.
A process for updating the storage contents of d and 53d is executed. Each processing device holding the connection information and the status information can execute the process while transmitting and receiving the control signal after recognizing each information of the other processing devices.

[0041]

As described above, according to the present invention, an atmosphere transfer device is provided, and an object to be processed, for example, a semiconductor wafer, is taken out of the load cassette and loaded into the load lock chamber, and is loaded. It is carried into each process processing device via the device, and any process such as film formation, CVD,
Etching is performed, and the processed object is carried out to the unload lock chamber via the transfer processing device, and returned to the original load cassette or another load cassette by the atmospheric transfer device. When loading and unloading,
It is not necessary to carry the load cassette itself directly into the load lock chamber and the unload lock chamber, and the load lock chamber and the unload lock chamber can be reduced in size, so that the apparatus can be provided at low cost.

Further, since a plurality of processing apparatuses are connected to the transport processing apparatus, a plurality of types of processing can be consistently performed in a vacuum atmosphere, thus improving processing efficiency and reducing manufacturing costs. You can also lower it. Sa
In addition, the connection information of the process
Refer to the registration information of the
Logical judgment of the matching status between the device and the registered processing device
Process control is started in the inconsistent state.
Such inconvenience disappears.

[Brief description of the drawings]

FIG. 1 is a block diagram of a control device of a semiconductor vacuum processing apparatus according to an embodiment of the present invention.

FIG. 2 is an overall configuration diagram of a semiconductor vacuum processing apparatus according to an embodiment of the present invention.

FIG. 3 is a configuration diagram of a processing device connection information table.

FIG. 4 is a configuration diagram of a processing device information table.

FIG. 5 is a configuration diagram of a processing device connection state logic determination table.

FIG. 6 is a control processing flowchart executed by a main control unit.

FIG. 7 is a control process flowchart executed by a main control unit.

FIG. 8 is a control process flowchart executed by a main control unit.

FIG. 9 is a control processing flowchart executed by the main control means.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Transport processing apparatus 13 Transport control apparatus 21 Load lock room 22 Unload lock chamber 30 Process processing apparatus 33 Process control apparatus 40 Process processing apparatus 43 Process control apparatus 50 Process processing apparatus 53 Process control apparatus

──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Atsushi Ito 794, Higashi-Toyoi, Kazamatsu, Kudamatsu-shi, Yamaguchi Prefecture Inside the Hitachi, Ltd.Kasato Plant In the Kasado Factory (56) References JP-A-3-14253 (JP, A) JP-A-62-242326 (JP, A) JP-A-63-252439 (JP, A) JP-A-3-88634 ( JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) H01L 21/68 H01L 21/02

Claims (1)

(57) [Claims] 1. A transfer processing device, a plurality of process processing devices connected to the transfer processing device, a control device for controlling these, a load lock chamber and an unload lock chamber connected to the transfer processing device. , An atmosphere transfer device, and a load cassette, wherein an object to be processed is taken out of the load cassette by the atmosphere transfer device and is loaded into the load lock chamber, and the loaded workpiece is transferred to the transfer processing device. And carried out to any of the above-mentioned process processing apparatuses, perform any processing, and carry out the processed object to the unload lock chamber through the above-mentioned transfer processing apparatus, and carry out the original loading by the atmospheric transfer apparatus. It is configured to return to the cassette or another load cassette, and generates a connection information signal indicating that the processing apparatus is connected to the transport processing apparatus. Connection information signal generating means, switching means for generating a registration information signal for registering the connection of the process processing apparatus to the transport processing apparatus, and reference to the connection information and the registration information, whereby the connected processing processing apparatus is registered. Logically determine the consistency of the process processor ,
And a control unit for controlling the transport process based on a result of the determination .