JP3333308B2 - Vacuum degreasing cleaning apparatus and its vacuum degreasing cleaning method - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus and a method for degrease and cleaning industrial products such as semiconductor devices and precision equipment in a vacuum system using a cleaning agent.

[0002]

2. Description of the Related Art FIG. 5 shows a piping system diagram of a vacuum degreasing / cleaning apparatus 20 as a first conventional example for vacuum degreasing cleaning of this kind of industrial product. This apparatus 20 is of a so-called two-chamber type. A drying chamber 21 and a cleaning chamber 22 are vertically defined by a partition A in a tank T, and the partition A
A gate valve 24 is provided so that the opening Aa can be vacuum-sealed. Through an opening Ta formed on one side wall of the drying chamber 21 door 23 so as to out the object to be cleaned W is provided, the drying chamber 21 traps 15 of a vacuum exhaust device via the valve 9 and the vacuum pump 16 are connected.
Note that, outside the door 23, a loading device 29 for the article W to be cleaned is provided. Further, the cleaning agent 22 is accommodated in the cleaning chamber 22, and a distillation regeneration device 64 for regenerating the cleaning agent S is connected via valves 25 and 26. That is, the cleaning agent S is sent from the bottom of the cleaning chamber 22 to the distillation / regeneration device 64 through the line of the valve 25, and the regenerated cleaning agent S from which the oils and fats are separated is passed through the line of the valve 26.
2 to be returned to the top. Further, the lifting / lowering device 27 provided with a lifting / lowering table 28 for lowering the received article W to be washed from the drying chamber 21 to the cleaning chamber 22 so as to bathe the cleaning agent S in the cleaning chamber 21 , and then moving the cleaning object S into the drying chamber 21 . The drying room is provided mainly with
The N 21 is provided with an N ₂ gas pipe for sending N ₂ gas into the system.

To explain the operation of the first conventional example, first, it is assumed that all valves are in a closed state, and the inside of the cleaning chamber 22 is in an N ₂ gas atmosphere. With the door 23 opened, the loading device 2
The cleaning object W is pushed into the drying chamber 21 by 9 and placed on the elevating table 28 of the elevating device 27 to seal the door 23. The drying chamber with N ₂ gas from the N ₂ gas pipe (not shown) 2
After the air in 1 is replaced, the gate valve 24 is opened, and the object to be cleaned W is lowered into the cleaning chamber 22 by the elevating device 27, so that the cleaning agent S is bathed with the liquid. After a predetermined time, it is lifted to the drying chamber 21 and the gate valve 24 is closed.

Then, the valve 9 is opened, and the vacuum pump 1
The inside of the drying chamber 21 is evacuated by 6 to vacuum-dry the cleaning agent S adhering to the object W to be cleaned. After a predetermined time, the valve 9 is closed, N ₂ gas is introduced into the drying chamber 21 to make it atmospheric pressure, the door 23 is opened, and the article W to be cleaned is taken out. Thus, one cycle of vacuum degreasing and washing is completed, and this cycle is thereafter repeated.

During this time, if necessary, the cleaning agent S is regenerated. That is, the valves 25 and 26 are opened, and the cleaning agent S is sent from the cleaning chamber 22 to the distillation regeneration device 64 by the liquid pump attached to the distillation regeneration device 64, and the regenerated cleaning agent S is attached to the distillation regeneration device 64. The liquid is returned to the cleaning chamber 22 by the liquid sending pump. Note that, as the cleaning agent S, a hydrocarbon-based cleaning agent corresponding to the third petroleum based on the Fire Service Law is usually used.

The two-chamber vacuum degreasing / cleaning apparatus 20 has a high degreasing efficiency in a liquid bath system. In addition, when the cleaning agent S is heated, the vacuum degreasing / cleaning cycle is shortened to about 20 minutes. Provide the shortest vacuum degreasing cleaning cycle in the cleaning equipment. Further, since the cleaning agent S in the cleaning chamber 22 is operated so as not to always contact the atmosphere, the
High safety against explosion.

However, this device 20 has a drawback due to its two-chamber type. In other words, the large gate valve 24 and the elevating device 27 which are vacuum-sealed greatly increase the overall device cost.

Next, as a second conventional example, a vacuum degreasing cleaning device 30 called a one-chamber type will be described. FIG.
The washing / drying chamber 31 in the tank T ′ containing the cleaning agent S is sealed by a lid 32, and the article W to be washed is placed on a gantry 33 in the washing / drying chamber 31 . In the upper part of the washing / drying chamber 31 , the trap 1 is connected via a valve 9.
5 and a vacuum pump 16 subsequent thereto are connected, and an N ₂ gas pipe (not shown) is also provided. Further, a receiver 34 for the cleaning agent S is connected to the cleaning / drying chamber 31 via valves 35 and 36. This is the washing and drying room 3
The cleaning agent S is temporarily stored and evacuated while vacuum drying is performed in the cleaning chamber 1, and then, when degreasing is performed in the cleaning and drying chamber 31 , the cleaning agent S is again transferred from the receiver 34 to the cleaning and drying chamber 3.
There is to return to 1 . Further, a distillation regenerating device 64 is connected to the receiver 34 via a valve 37, and the cleaning agent S in the receiver 34 is sent to the distillation regenerating device 64 via the valve 37 line, and the regenerated cleaning agent S is The cleaning and drying chamber 31 is returned via the valve 38 line.

The device 30 of the second conventional example operates as follows. It is assumed that all the valves are in a closed state, and the cleaning agent S in the cleaning and drying chamber 31 is stored in the receiver 34. The lid 32 is opened, and the object to be cleaned W is placed on the gantry 33 in the cleaning / drying chamber 31 . Then, the air in the cleaning / drying chamber 31 is converted into N ₂ gas from an N ₂ gas pipe (not shown).
Replace with ₂ gases. Next, the valve 36 is opened and the receiver 3
The cleaning agent S is returned from the receiver 34 to the cleaning / drying chamber 31 by the liquid feed pump attached to 4, and the object W to be cleaned is bathed.
FIG. 6 shows the liquid bath state. After a predetermined time, the valve 35 is opened, the cleaning agent S in the cleaning / drying chamber 31 is transferred to the receiver 34 by the liquid feed pump attached to the receiver 34, and the valves 35 and 36 are closed.

Next, the valve 9 is opened, and the vacuum pump 1
6, the cleaning / drying chamber 31 is evacuated to vacuum and the cleaning agent S adhering to the object to be cleaned W is vacuum dried. When the drying is completed, the valve 9 is closed, N ₂ gas is introduced into the cleaning / drying chamber 31 to bring the pressure to the atmospheric pressure, the lid 32 is opened, the object W to be cleaned is taken out, and one cycle of vacuum degreasing cleaning is completed. Then, this cycle is repeated.

During this time, if the cleaning agent S becomes contaminated with oils and fats, the cleaning agent S is regenerated. That is, the valve 3
7 is opened, and the cleaning agent S in the receiver 34 is sent to the distillation and regeneration unit 64 by the liquid feed pump attached to the distillation and regeneration unit 64, and the regenerated cleaning agent S is opened by the valve 38. After returning to the washing / drying chamber 31 by the liquid feed pump attached to the valve, the valves 37 and 38 are closed.

The one-chamber vacuum degreasing / cleaning apparatus 30 of the second conventional example comprises a gate valve 12 and a lifting / lowering apparatus 2 as in the first conventional example.
7, the apparatus cost is greatly reduced. However, since degreasing and vacuum drying are performed in the cleaning / drying chamber 31 , the cleaning agent S is reciprocated between the cleaning / drying chamber 31 and the receiver 34. As a result, play takes place in the cleaning / drying chamber 31 because of the time required, and the time of the degreasing cleaning cycle is about 2 times that of the first conventional example.
Doubled. Therefore, the apparatus cost per processing capacity of the second conventional example is not so much lower than that of the first conventional example.

[0013]

DISCLOSURE OF THE INVENTION The present invention has been made in view of the above-mentioned problems, and has a low apparatus cost and a vacuum degreasing / cleaning apparatus having a processing capacity equal to or higher than that of a two-chamber vacuum degreasing / cleaning apparatus, and a vacuum degreasing apparatus therefor. It is intended to provide a cleaning method.

[0014] The above object is to accommodate an object to be cleaned.
A washing / drying chamber forming a pair and connected to the washing / drying chamber
Cleaning with a common vacuum pump and built-in bypass line
Cleaning and drying room and vacuum exhaust system.
Is connected to the cleaning and drying chamber and the distillation and regeneration equipment.
Is the recovery cleaning agent path from the cleaning and drying room to the distillation regeneration device.
And the regenerating cleaning agent path from the distillation regenerator to the cleaning drying room
Connected and dried by one side of the cleaning agent
When transferring from one room to the other washing and drying room,
It is installed in the recovery cleaning agent channel and distillation regeneration device from the cleaning and drying room.
Regeneration through the bypass line to the other washing and drying room
This is achieved by a vacuum degreasing / cleaning apparatus characterized in that the cleaning agent path is a transfer path .

[0015] Further, the above object is to accommodate the object to be cleaned.
And a washing / drying chamber forming a pair.
Built-in common vacuum pumping device and bypass line
It consists of a cleaning agent distillation and regeneration unit.
The vacuum system is connected to the vacuum system by a vacuum exhaust path.
The raw equipment is the recovery and washing from the washing and drying room to the distillation and regeneration unit.
Recycled cleaning agent from the agent path and distillation / regeneration unit to the washing / drying room
The cleaning agent is connected by one of the two
When transferring from the drying room to the other washing and drying room,
From the washing / drying chamber of the
To the other washing and drying room via the bypass line
The object to be cleaned is degreased and cleaned with a cleaning agent using a vacuum degreasing cleaning device in which the regenerated cleaning agent path is a transfer path , and then, when the cleaning agent attached to the object to be cleaned is vacuum-dried, one of the <br> When the cleaning / drying chamber is in the degreasing cleaning step, the other cleaning / drying chamber is in the vacuum drying step.

[0016]

When one of the cleaning / drying chambers is in the degreasing / cleaning step, the other cleaning / drying chamber is in the vacuum drying step. The processing can be performed almost twice as much as the apparatus, that is, the same processing as or more than the conventional two-chamber vacuum degreasing / cleaning apparatus, and the apparatus costs are not greatly increased because the vacuum exhaust apparatus and the distillation regeneration apparatus are shared. . Further, since the cleaning agent is transferred by the pressure difference, the operation cost can be reduced, and further, the degreasing cleaning with the regenerated cleaning agent is always possible.

[0017]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a vacuum degreasing and cleaning apparatus according to an embodiment of the present invention will be described with reference to the drawings.

FIG. 1 is a piping diagram of a vacuum degreasing / cleaning apparatus 10A according to a first embodiment. The device 10A of the present embodiment includes:
A trap 61 as a vacuum exhaust device, a vacuum pump 62,
And the first regenerating and drying chamber 41 by sharing the
A tank T ₁ defining a tank T ₂ defining a second washing and drying chamber 51 is provided to face each other.

That is, the first cleaning / drying chamber 41 is sealed by the lid 42 via the sealing material 43,
The washing / drying chamber 51 is closed by a lid 52 via a sealing material 53. The first cleaning / drying chamber 41 is connected via a valve 1, and the second cleaning / drying chamber 51 is connected via a valve 2 to a common trap 61 and a vacuum pump 6
2 and an exhaust path. Further, the bottom of the first washing / drying chamber 41 is provided with the valve 3, the cheese 66, and the filter 6.
3, a valve 5, a bypass line 64 '(shown by a broken line) incorporated in the distillation regeneration device 64, and a valve 8 connected to the second cleaning / drying chamber 51 to serve as a transfer path for the cleaning agent S. The bottom of the drying chamber 51 is connected to the first cleaning / drying chamber 41 via the valve 4, the cheese 66, the filter 63, the valve 5, the bypass line 64 ′ built in the distillation regeneration device 64, and the valve 7 for cleaning. This is the other transfer path for the agent S.

Further, from the bottom of the first washing and drying chamber 41 , the valve 3, the cheese 66, the filter 63, the valve 5, the distillation regenerating device 64, or the bottom of the second washing and drying chamber 51 , the valve 4, the cheese 66, The lines leading to the filter 63, the valve 5, and the distillation regeneration device 64 are each a collection cleaning agent circuit. The distillation / regeneration device 64 is connected to the first cleaning / drying chamber 41 via the valve 7 and to the second cleaning / drying chamber 51 via the valve 8 to provide a regenerating cleaning agent path to each. . Although not shown, N ₂ gas pipes are provided above the first cleaning / drying chamber 41 and the second cleaning / drying chamber 51 , respectively.

The vacuum degreasing / cleaning apparatus 10A according to the present embodiment is constructed as described above. Next, the operation thereof will be described.

The apparatus 10A of the present embodiment includes a first cleaning and drying chamber.
Regarding 41 and the second cleaning / drying chamber 51 , when one of them is in a degreasing cleaning step in which the cleaning object S is bathed in the cleaning agent S, the other is for drying the cleaning agent S attached to the cleaning object W. is actuated to be in the process of vacuum drying, detergent S is the first washing and drying chamber 41 which is a degreasing cleaning step alternately second washing and drying chamber 5
It is reciprocated between 1 .

That is, referring to FIG. 1, an object to be cleaned W ₂ to be degreased and cleaned is accommodated in a first cleaning and drying chamber 41 , and is sealed with a lid 42 via a sealing material 43.
It is assumed that the pressure has already been reduced by evacuation,
The cleaning and drying chamber 51, it is assumed that the object to be cleaned W ₁ is degreasing step is a liquid bath in the detergent S is completed. Further, it is assumed that the vacuum pump 62 is constantly operated and all valves are in a closed state.

By opening valves 4, 5, and 7,
The cleaning agent S in the second cleaning / drying chamber 51 moves into the first cleaning / drying chamber 41 through the cheese 66, the filter 63, and the bypass line 64 ′ built in the distillation / regeneration device 64 due to the pressure difference. At this time, if the solid content is contained in the cleaning agent S, this is filtered out by the filter 63. After the transfer of the cleaning agent S, the valves 4, 5, and 7 are closed and the valve 2 is opened to connect the second cleaning and drying chamber 51 to the vacuum pump 62. With these operations, the degreasing cleaning of the object to be cleaned W2 is started in the first cleaning / drying chamber 41 , and the second cleaning / drying chamber is started.
At 51 , the vacuum drying of the cleaning agent S attached to the article to be cleaned W1 is started.

After a lapse of a predetermined time, the valve 2 is closed in the second cleaning / drying chamber 51 and N ₂ gas piping (not shown) is connected to the N ₂ gas pipe.
After the atmospheric pressure by introducing _two gases, taking out the article to be cleaned W ₁ opens the lid 52. Then, to accommodate the next object to be cleaned W ₃ (not shown), via the sealing material 53 is sealed by a lid 52. Next, the second washing and drying room
After replacing the air in 51 with N ₂ gas, the valve 2 is opened, the second cleaning / drying chamber 51 is evacuated by the vacuum pump 16, the pressure is reduced, and the valve 2 is closed. Meanwhile, the first
It was washing and drying chamber 41, degreasing of the object to be cleaned W ₂ is completed during this time.

[0026] This state is the first washing and drying chamber 41 was under vacuum reduced pressure and accommodates the cleaning object W ₂ at the beginning is in complete state of degreasing, to complete the degreasing of the object to be cleaned W ₁ the second washing and drying chamber 51 has been located under vacuum reduced pressure to accommodate the object to be cleaned W _3, just a state in which the washing and drying chamber 41 and 51 is replaced with the original process. Thereafter, such an operation is repeated.

When the cleaning agent S is contaminated by repeating the above vacuum degreasing cleaning, the cleaning agent S is regenerated in order to remove the oils and fats contained in the cleaning agent S by means of the distillation and regeneration device 64. That is, if explained by Figure 1, to interrupt the vacuum degreasing, first washing and drying chamber 41 is a vacuum without accommodating the object to be cleaned W _n, the second washing and drying chamber 51 to be washed W _m Degreasing cleaning has been completed.

The detergent S of the second washing and drying chamber 51 is transferred to the first washing and drying chamber 41 by a pressure difference as described above, the second washing and drying chamber 51, the vacuum drying of the object to be cleaned W _m , taken out, followed by accommodating the object to be cleaned W _n is is carried out normal operations as not performed under reduced pressure only.

The cleaning agent S transferred to the first cleaning / drying chamber 41 is sent to the distillation and regeneration unit 64 by opening the valve 3 and the valve 5 and using a liquid feed pump attached to the distillation and regeneration unit 64. The cleaning agent S whose fats and oils have been removed and regenerated by the distillation regeneration device 64 is opened to the valve 8, sent to the second cleaning and drying chamber 51 by the liquid feed pump attached to the distillation regeneration device 64, and is already stored. used in degreasing of the object to be cleaned W _n are. The first cleaning / drying chamber 41 that has been emptied contains the next object _Wo to be cleaned and is depressurized to prepare for the resumption of vacuum degreasing cleaning.

The regeneration of the cleaning agent S is performed in the middle of the vacuum degreasing cleaning process as described above, and after the completion of the vacuum degreasing cleaning process, only the distillation regeneration is performed separately from the process without the object W to be cleaned. Is also good.

The above-mentioned regeneration is a regeneration method in which the distillation regeneration device 64 is operated intermittently for the regeneration when the cleaning agent S becomes contaminated.
It is also possible to perform degreasing cleaning with the regenerated cleaning agent S at all times.

That is, FIG. 2 is a piping system diagram of the apparatus 10A of the present embodiment as in FIG. 1, but as shown in FIG.
When the second cleaning / drying chamber 51 is in the degreasing cleaning step, the valve 4, the valve 5, and the valve 8 are opened, and the detergent S is supplied between the second cleaning / drying chamber 51 and the distillation regeneration device 64 as indicated by an arrow M. It is a method of circulating and reproducing. By doing so, the regenerated cleaning agent S is always stored in the second cleaning and drying chamber 51.
Is supplied, so that the degreasing and cleaning efficiency is improved. Next, when the first cleaning / drying chamber 41 enters the degreasing cleaning step, the cleaning agent S
Is naturally circulated between the first washing / drying chamber 41 and the distillation / regeneration device 64 as shown by the arrow N. In addition, only the distillation regeneration may be performed in the state where there is no cleaning object W while circulating these.

In the above embodiment, it is assumed that the two washing and drying chambers have the same shape. For example, as shown in the perspective view of FIG. If the washing and drying chamber 51 ′ is formed in a rectangular parallelepiped and has substantially the same volume, the objects to be washed having different shapes can be vacuum-degreased and cleaned.

[0034] Further, when the ability of the vacuum pump 62 and the distillation reproducing apparatus 64 is large, the washing and drying chamber 4 or more rooms cleaning dry
It can be composed of a drying chamber . Figure 4 shows such a second embodiment, the washing and drying chamber is a piping diagram of a vacuum degreasing cleaning apparatus 10B consisting of washing and drying chamber of the n pairs. That is, the washing / drying chamber has n washings in the first group.
Kiyoshi drying chamber _{G 11, G 12, G 13} , ··· G 1n and, n pieces of the washing and drying chamber G ₂₁ of the second _{group, G 22, G 23, ···} G
Has become the n pairs of _2n, for example, G ₁₁ is within them
Constitute a pair and G _21. When the washing and drying chamber of the first group is in the process of degreasing cleaning, washing and drying chamber of the second group is actuated to be in the process of vacuum drying. Each washing and drying chamber, the trap 61, a vacuum pump 62
Are connected via respective valves 1 'or 2' to form an exhaust path. Washing and drying chamber of the first group G _11, G
_12, G _13, the bottom of the · · · G _1n, each valve 3 second through ', cheese 66, filter 63, valve 5, the distillation reproducing apparatus 64 bypass line 64 which is incorporated in'
Washing and drying chamber G _{21 groups, G 22, G 23, ···} G 2n
Is the transfer Kawaro of connected detergent S and, washing and drying chamber of the second group _{G 21, G 22, G 23} , the bottom of the · · · G _2n is
Each valve 4, cheese 66, filter 63, valve 5, and bypass line 6 built in the distillation regeneration device 64
The first group of cleaning and drying chamber G ₁₁ through the 4 ', G _12, G
₁₃ ,... G _1n are connected to the other transfer path of the cleaning agent S. The valves 1 ', 2', 3 'or 4' correspond to the valves 1, 2, 3 or 4 in the first embodiment. Furthermore, the washing / drying chamber section G _{11 of} the first group,
From the bottom of G ₁₂ , G ₁₃ ,... G _1n , the respective valves 3 ′, cheese 66, filter 63, valve 5, distillation regeneration device 64, or washing and drying chamber part G _{21 of} the second group,
Lines from the bottom of G ₂₂ , G ₂₃ ,... G _2n to each valve 4 ′, cheese 66, filter 63, valve 5, and distillation / regeneration device 64 form respective recovery cleaning agent paths. The lines connecting the distillation regeneration device 64 and the upper part of each washing / drying chamber section are respective regeneration cleaning agent passages.

Although the embodiments of the present invention have been described above, the present invention is, of course, not limited thereto, and various modifications can be made based on the technical concept of the present invention.

For example, in the above-described embodiment, the heating device for the cleaning agent S during the degreasing cleaning is not provided. However, a heating steam pipe is wound around each cleaning and drying chamber to supply the cleaning agent S. You may make it heat.

In the above embodiment, for example, when the cleaning agent S is transferred from the first cleaning / drying chamber 41 to the distillation / regeneration apparatus 64 through the recovered cleaning agent path, the first cleaning / drying chamber 41 and the distillation / regeneration apparatus 64 are connected to each other. It is preferable to provide a pressure equalizing line separately to make the transfer smoother. Alternatively, sending N ₂ gas to the first cleaning / drying chamber 41 also facilitates the transfer of the cleaning agent S.

In the above embodiment, two washing / drying chambers are used as a pair. However, if the time required for the degreasing cleaning step and the time required for the vacuum drying step are not equal, a long time step is carried out in two chambers. A configuration may be adopted in which three units are shared, in which the sharing and the short process are performed in one room.

[0039]

EFFECT OF THE INVENTION degreasing one of the washing and drying chamber <br/> provided as pairs similar washing and drying chamber as in the conventional room vacuum degreasing cleaning apparatus, used in vacuum drying of the other washing and drying chamber As a result, there is no play in the washing / drying chamber, the processing capacity is almost twice that of the conventional single-chamber type, and the vacuum exhaust unit and the distillation regeneration unit are shared, so that the equipment cost increases significantly. do not do. Therefore, the equipment cost per processing capacity is greatly reduced.

Further, since the cleaning agent is transferred and used between the cleaning / drying chamber in the degreasing cleaning step and the cleaning / drying chamber in the vacuum drying step, no separate cleaning agent tank or piping is required. Furthermore, since the transfer is performed with a pressure difference, the operating cost can be reduced.

Further, the washing and drying chambers are formed as pairs of different shapes,
Objects of different shapes can be vacuum degreased and cleaned.

Further, the degreasing and cleaning of the object to be cleaned and the regeneration of the cleaning agent are simultaneously performed, and the degreasing and cleaning can be performed with the regenerated cleaning agent at all times, so that the degreasing and cleaning efficiency can be improved.

[Brief description of the drawings]

FIG. 1 is a piping diagram of a vacuum degreasing / cleaning apparatus according to a first embodiment of the present invention.

FIG. 2 is the same view as FIG. 1, but shows a flow of a cleaning agent in a vacuum degreasing cleaning method for simultaneously performing degreasing and cleaning of an object to be cleaned and regeneration of the cleaning agent.

FIG. 3 is a perspective view showing another example of the cleaning and drying chamber.

FIG. 4 is a piping system diagram of a vacuum degreasing / cleaning apparatus including n pairs of cleaning / drying chambers in a second embodiment.

FIG. 5 is a piping diagram of a vacuum degreasing and cleaning apparatus according to a first conventional example.

FIG. 6 is a piping diagram of a vacuum degreasing / cleaning apparatus according to a second conventional example.

[Description of Signs] 41 First Washing / Drying Room 51 Second Washing / Drying Room 61 Trap 62 Vacuum Pump 63 Filter 64 Distillation / Regeneration Apparatus S Cleaning Agent W Cleaning Object

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int. Cl. ⁷ , DB name) C23G 5/04 B08B 3/08 C23G 5/00

Claims (9)

(57) [Claims] A pair for accommodating an object to be cleaned is provided.
A washing and drying chamber and a common vacuum exhaust connected to the washing and drying chamber
Regeneration of cleaning agent with built-in gas and bypass line
The cleaning and drying chamber and the vacuum exhaust device are connected by a vacuum exhaust path.
The washing / drying chamber and the distillation / regeneration apparatus are connected to the washing / drying chamber.
A recovery cleaning agent path from the distillation and regeneration apparatus to the distillation and regeneration apparatus;
A regenerating cleaning agent path from the regenerating device to the cleaning / drying chamber.
The cleaning agent is supplied from one of the washing and drying chambers of the pair to the other.
When transferring to the washing and drying room, the one of the washing and drying
From the drying chamber to the recovery cleaning agent passage and the distillation regeneration device.
Washing and drying of the other through the stored bypass line
The reclaimed cleaning agent path leading to the chamber is a transfer path . 2. The washing and drying chambers constituting the pair are substantially the same.
2. The vacuum of claim 1, wherein the vacuum is shaped differently.
Degreasing cleaning equipment. 3. The cleaning and drying chamber of one of the pair includes a plurality of cleaning and drying chambers.
The same number of washings in the other washing and drying chamber
The drying chambers are formed so as to be paired with each other.
The plurality of washing and drying constituting the one washing and drying chamber
The same number of washings constituting a chamber and the other washing and drying chamber
A drying chamber is provided with the common evacuation device and the bypass line.
The contractor connected to the distillation and regeneration device
The vacuum degreasing and drying apparatus according to claim 1. 4. A pair for accommodating an object to be cleaned is provided.
A washing and drying chamber and a common vacuum exhaust connected to the washing and drying chamber
Regeneration of cleaning agent with built-in gas and bypass line
The cleaning and drying chamber and the evacuation device
Are connected by a vacuum exhaust path, and the washing and drying chamber and the distillation
The raw equipment is from the washing and drying chamber to the distillation and regeneration unit
A recovery cleaning agent passage, and the cleaning and drying chamber
Connected to the regenerating cleaning agent path leading to
Cleaning agent from one of the washing and drying chambers of the pair
When transferring to a cleaning / drying room, use
Built into the recovered cleaning agent path and the distillation regeneration device.
Before reaching the other washing and drying room via the bypass line
Using a vacuum degreasing cleaning device in which the regenerated cleaning agent path is a transfer path, the object to be cleaned is degreased and washed with the cleaning agent, and then the cleaning agent attached to the object to be cleaned is vacuum dried. Wherein the one cleaning and drying chamber is in a degreasing cleaning step, and the other cleaning and drying chamber is in a vacuum drying step. 5. The washing and drying chambers constituting the pair are substantially the same.
Use vacuum degreasing and cleaning equipment that has different shapes in volume.
In use, the object to be cleaned is degreased and washed with the cleaning agent, and then
When vacuum-drying the cleaning agent attached to the object to be cleaned,
And when the one of the cleaning and drying chambers is in a degreasing cleaning process.
The other washing and drying chamber is in a vacuum drying process.
The vacuum degreasing method according to claim 4, wherein 6. The cleaning and drying chamber of one of the pair includes a plurality of cleaning and drying chambers.
The same number of washings in the other washing and drying chamber
The drying chambers are provided so as to form a pair.
And the plurality of washings constituting the one washing and drying chamber.
The same number constituting the cleaning and drying chamber and the other cleaning and drying chamber
The washing and drying chamber is provided with the common vacuum exhaust device and the bypass.
Connected to a cleaning and distillation apparatus with built-in sling
Using a vacuum degreasing and drying apparatus, the object to be cleaned is degreased and cleaned with the cleaning agent, and then
When vacuum-drying the cleaning agent attached to the object to be cleaned,
And when the one of the cleaning and drying chambers is in a degreasing cleaning process.
The other washing and drying chamber is in a vacuum drying process.
The vacuum degreasing method according to claim 4, wherein 7. The one which has completed the degreasing and washing step.
From the washing and drying chamber of the other, and then enter the degreasing washing process
Transfer of the cleaning agent to the washing and drying room by the transfer path
The vacuum degreasing cleaning method according to claim 4, wherein the cleaning is performed. 8. The method according to claim 8 , wherein the transfer of the cleaning agent is performed by the cleaning of the one side.
The drying chamber is at normal pressure, and the other washing and drying chamber is at reduced pressure.
The vacuum degreasing according to claim 5, which is performed by a pressure difference.
Purification method. 9. The cleaning and drying chamber according to claim 1 , wherein the cleaning and drying chamber is a degreasing cleaning step.
When it is in the process, the recovered cleaning agent path from the cleaning and drying chamber;
The distillation and regeneration apparatus, and
Continuous circulation of detergent to return to distillation regeneration unit
The degreasing and cleaning of the object to be cleaned and the regeneration of the cleaning agent are performed at the same time.
The vacuum degreasing method according to claim 4, which is performed at any time.