JP3338757B2 - Deposition prevention plate for vacuum melting equipment - Google Patents
Deposition prevention plate for vacuum melting equipmentInfo
- Publication number
- JP3338757B2 JP3338757B2 JP01036197A JP1036197A JP3338757B2 JP 3338757 B2 JP3338757 B2 JP 3338757B2 JP 01036197 A JP01036197 A JP 01036197A JP 1036197 A JP1036197 A JP 1036197A JP 3338757 B2 JP3338757 B2 JP 3338757B2
- Authority
- JP
- Japan
- Prior art keywords
- plate
- vacuum
- prevention plate
- melting
- deposition prevention
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/25—Process efficiency
Landscapes
- Physical Vapour Deposition (AREA)
- Furnace Details (AREA)
- Manufacture And Refinement Of Metals (AREA)
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、真空溶解装置内に
架空支持される蒸着防止板に関し、とくに超高真空中で
高純度の金属・合金、例えば、鉄やその合金を精製する
際に、溶解時に発生する不純な蒸着物を捕捉するのに用
いる蒸着防止板を提案する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a deposition prevention plate which is supported overhead in a vacuum melting apparatus, and particularly to a method for purifying a high-purity metal or alloy, for example, iron or its alloy in an ultra-high vacuum. We propose a deposition prevention plate used to capture impure deposits generated during melting.
【０００２】[0002]
【従来の技術】従来、金属の精製には、真空溶解法、浮
遊帯溶融法などが広く用いられており、これらはともに
電子ビームや高周波誘導エネルギー等を熱源とする方法
であり、特に後者の方法は溶融時に耐火物から不純物が
入るおそれがなく有利な方法として注目されている。2. Description of the Related Art Conventionally, vacuum melting, floating zone melting and the like have been widely used for refining metals. Both of these methods use an electron beam or high-frequency induction energy as a heat source. The method is attracting attention as an advantageous method because there is no possibility of impurities entering from the refractory during melting.
【０００３】その他に従来、図１に示すような、高真空
容器内に配設したるつぼ内被溶解金属を高周波誘導加熱
することにより、高純度の金属を精製するための真空溶
解装置がある。この装置は、真空容器１内にるつぼ２を
配設し、このるつぼ２のまわりに高周波誘導加熱用コイ
ル３を囲繞配置した構成を有し、前記コイルに通電する
ことにより、るつぼ２内被溶解金属を真空誘導加熱して
溶解するものである。[0003] In addition, as shown in Fig. 1, there is a vacuum melting apparatus for purifying a high-purity metal by high-frequency induction heating of a metal to be melted in a crucible disposed in a high vacuum vessel as shown in Fig. 1. This apparatus has a configuration in which a crucible 2 is disposed in a vacuum vessel 1 and a high-frequency induction heating coil 3 is disposed around the crucible 2. The metal is melted by vacuum induction heating.
【０００４】例えば、上記の装置によって、るつぼ２内
被溶解金属を加熱し真空溶解すると、溶融面からは被溶
解金属などの蒸気が発生し、真空容器１内面、および視
界確保のために設けた覗き窓４などに付着（蒸着）す
る。とくに覗き窓４への付着は、溶解中の対象物（被溶
解金属）の視野を遮ぎるという問題があり、また真空容
器１内面への蒸着は、溶解操業後の清掃に時間がかかる
という問題が起きる。このことを避けるため、一般に
は、るつぼ内溶融面の直上に蒸発物を遮蔽する蒸着防止
板５を設置するのが普通である。[0004] For example, when the metal to be melted in the crucible 2 is heated and melted in vacuum by the above-described apparatus, vapor of the metal to be melted is generated from the melted surface, and is provided for securing the inner surface of the vacuum vessel 1 and the visibility. It adheres (deposits) to the viewing window 4 and the like. In particular, the adhesion to the viewing window 4 has a problem that the field of view of the melting target (metal to be melted) is obstructed, and the vapor deposition on the inner surface of the vacuum vessel 1 requires a long time for cleaning after the melting operation. Happens. In order to avoid this, it is common to install a deposition prevention plate 5 for shielding evaporants immediately above the melting surface in the crucible.
【０００５】また、上記蒸着防止板５は、真空溶解時に
は、溶解中のるつぼ溶融面からの輻射熱およびコイル２
からの高周波誘導エネルギーのために、500 ℃程度に加
熱され、その結果として、板の表面よりさらなるガスの
放出が起こり、真空を乱す要因ともなっている。また、
この放出されたガスが溶融物にとりこまれ純度低下の原
因ともなった。[0005] Further, during the vacuum melting, the vapor deposition preventing plate 5 radiates heat from the melting surface of the melting crucible and the coil 2.
Due to the high frequency induction energy from the plate, it is heated to about 500 ° C., and as a result, more gas is released from the surface of the plate, which also disturbs the vacuum. Also,
The released gas was taken into the melt and caused a decrease in purity.
【０００６】[0006]
【発明が解決しようとする課題】従来装置では、上記蒸
着防止板５は、るつぼ２の直上にステンレス製円板を回
動する軸などの保持具６にて進退可能に架空保持し、る
つぼ２内の溶解状況を観察するときのみ、これを退避さ
せて覗き窓４から覗いて観察するようになっている。な
お、この蒸着防止板５は、溶解に先立って真空容器１を
ベーキング（脱ガス処理）する時、主として輻射熱によ
って加熱する結果、100 ℃程度に加熱される。In the conventional apparatus, the deposition preventing plate 5 is held overhead by a holding tool 6 such as a rotating shaft of a stainless steel disc directly above the crucible 2 so as to be able to advance and retreat. Only when observing the state of dissolution in the inside, it is retracted and observed through the observation window 4. When the vacuum vessel 1 is baked (degassed) prior to melting, it is heated to about 100 ° C. as a result of being heated mainly by radiant heat.
【０００７】しかしながら、実際の真空溶解時では、真
空容器１を超高真空（10-7〜10-11トール）にしている
こと、およびるつぼを高周波誘導加熱することから、る
つぼ２内溶融面からの輻射熱とコイル３による誘導加熱
の相乗作用によって500 ℃位に昇温する。従って、該蒸
着防止板 (SUS 304)に付着した水分やガス (N2, O2)あ
るいは清掃用エチルアルコールの分解ガス、さらにはそ
れらの反応ガスがこのときに発生することになる。その
結果、真空容器１内真空度の低下、溶解金属の純度の低
下が起こるのである。However, during the actual vacuum melting, since the vacuum vessel 1 is kept at an ultra-high vacuum (10 -7 to 10 -11 Torr) and the crucible is heated by high frequency induction, the melting surface inside the crucible 2 is reduced. The temperature rises to about 500 ° C. by the synergistic action of the radiant heat of the coil 3 and the induction heating by the coil 3. Therefore, water and gas (N 2 , O 2 ) or decomposition gas of ethyl alcohol for cleaning attached to the deposition prevention plate (SUS 304), and their reaction gas are generated at this time. As a result, a reduction in the degree of vacuum in the vacuum vessel 1 and a reduction in the purity of the molten metal occur.
【０００８】そこで上述した従来技術が抱えている問題
点を克明する技術の開発が必要となり、本発明に想到し
た。本発明の目的は、真空度の低下や発生不純ガスによ
る溶解金属の純度の低下がない蒸着防止板を提案するこ
とにある。Therefore, it is necessary to develop a technique for overcoming the problems of the prior art described above, and arrived at the present invention. SUMMARY OF THE INVENTION An object of the present invention is to propose a deposition preventing plate in which the degree of vacuum does not decrease and the purity of a molten metal does not decrease due to generated impurity gas.
【０００９】[0009]
【課題を解決するための手段】上掲の目的を実現するに
は、下記の要旨構成からなる蒸着防止板が有利であるこ
との結論に達して本発明を完成した。即ち、本発明は、
真空容器と、この容器内に配設される誘導溶解炉とから
主としてなる真空溶解装置の該誘導溶解炉直上に保持具
を介して進退可能に支持された蒸着防止板において、こ
の板が高い熱伝導率を有する金属板にて形成されると共
に、複数の鎖交磁束防止用スリットを有することを特徴
とする真空溶解装置の蒸着防止板である。本発明におい
て、板の表面または内部にベーキング用加熱手段をもう
けることが好ましい。また、本発明においては、ベーキ
ング用加熱手段を板の退避位置に配設してベーキングす
るように構成することが好ましい。SUMMARY OF THE INVENTION The present invention has been completed by the conclusion that a vapor deposition preventing plate having the following gist configuration is advantageous for realizing the above object. That is, the present invention
In a deposition prevention plate which is supported so as to be able to advance and retreat via a holder directly above the induction melting furnace of a vacuum melting apparatus mainly including a vacuum container and an induction melting furnace disposed in the container, the plate has a high heat. An evaporation prevention plate for a vacuum melting apparatus, which is formed of a metal plate having conductivity and has a plurality of slits for preventing interlinkage magnetic flux. In the present invention, it is preferable to provide a heating means for baking on the surface or inside of the plate. Further, in the present invention, it is preferable that the baking heating means is arranged at the retreat position of the plate to perform baking.
【００１０】[0010]
【発明の実施の形態】本発明において用いる真空溶解装
置は、図１に示すとおり、主として真空容器１と、その
内部に収容される誘導溶解炉、即ちるつぼ２とそのまわ
りに配設した誘導加熱用コイル３とで構成されたもので
あり、この真空容器１内のるつぼ２の直上の覗き窓４の
直下には、蒸着防止板５が進退可能に架空保持される。
即ち、真空容器１に回転可能に取付けた保持具６の下端
には、該蒸着防止板５が固定してあり、その蒸着防止板
５は前記保持具６の回転軸を介して旋回することによ
り、るつぼ２の直上に進み出たり退避位置まで退いたり
する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS As shown in FIG. 1, a vacuum melting apparatus used in the present invention mainly comprises a vacuum vessel 1, an induction melting furnace housed therein, that is, a crucible 2 and an induction heating apparatus arranged around the crucible. A vapor deposition preventing plate 5 is held overhead so as to be able to advance and retreat under the observation window 4 immediately above the crucible 2 in the vacuum vessel 1.
That is, the vapor deposition preventing plate 5 is fixed to the lower end of the holder 6 rotatably attached to the vacuum vessel 1, and the vapor deposition preventing plate 5 is rotated by the rotation axis of the holder 6. , Advance right above the crucible 2 or retreat to the retreat position.
【００１１】つまり、この蒸着防止板５は、高周波誘導
溶解時、覗き窓４から観察するときを除いてるつぼ２の
直上に位置し、るつぼ２から蒸発するガスや被溶解物か
らの蒸発物質を遮蔽し、これらの飛散を防止するために
用いられる。一方、覗き窓４からるつぼ２内を観察する
ときは、上記保持具６を作動させることにより、退避位
置まで旋回退避させる。なお、この退避位置において、
該蒸着防止板５は、必要に応じ、後述するように分離配
置した加熱手段７と接して加熱されるように構成しても
よい。That is, the vapor deposition preventing plate 5 is located immediately above the crucible 2 except when observing from the viewing window 4 during high-frequency induction melting, and prevents gas evaporated from the crucible 2 and vaporized substances from the substance to be dissolved. It is used to shield and prevent these from scattering. On the other hand, when observing the inside of the crucible 2 from the viewing window 4, the holder 6 is operated to be turned and retracted to the evacuation position. In this evacuation position,
If necessary, the deposition prevention plate 5 may be configured to be heated in contact with a separately arranged heating means 7 as described later.
【００１２】一般に、上述した真空溶解装置において重
要なことは、真空容器１内雰囲気を超高真空状態に維持
することである。そのためには、上記蒸着防止板５から
のガスの放出や蒸発物の発生を極力抑えることが必要で
ある。そのためには、溶解操業に先立つ真空容器１内の
乾燥 (ベーキング) 時に、いわゆる真空誘導加熱時に予
想される最高温度以上の温度に加熱することにより、付
着水やガスを発生させて予め排出しておくことが必要で
ある。In general, what is important in the above-described vacuum melting apparatus is to maintain the atmosphere in the vacuum vessel 1 in an ultra-high vacuum state. For this purpose, it is necessary to minimize the emission of gas from the deposition prevention plate 5 and the generation of evaporated substances. For this purpose, at the time of drying (baking) in the vacuum vessel 1 prior to the melting operation, by heating to a temperature higher than the maximum temperature expected during so-called vacuum induction heating, attached water and gas are generated and discharged in advance. It is necessary to put.
【００１３】このような要請に応えられる蒸着防止板５
の構成について鋭意研究した結果、本発明では、溶解
加熱時にこの蒸着防止板５が上記高周波誘導加熱コイル
３によって誘導加熱されにくい構造にすること、および
真空容器１の乾燥ベーキング時になるべく高い温度、
たとえば、200 ℃以上に加熱して付着水やガスを完全に
放出しておくために加熱手段を設けることが有効である
との結論に達した。An evaporation preventing plate 5 which can meet such a demand.
As a result of intensive research on the configuration of the present invention, in the present invention, the deposition prevention plate 5 has a structure that is hardly induction-heated by the high-frequency induction heating coil 3 during melting and heating, and a temperature as high as possible during dry baking of the vacuum vessel 1.
For example, it has been concluded that it is effective to provide a heating means in order to completely release attached water and gas by heating to 200 ° C. or more.
【００１４】このような考え方の下に開発した本発明の
蒸着防止板５の好適実施例を図２に示す。この例は、円
形の板の半径方向に、少なくとも４個、好ましくは８個
程度の複数のスリット５ａを入れることにより、鎖交磁
束による発熱を抑え、誘導加熱されにくい構造としたも
のである。また、蒸着防止板５を、ステンレス鋼などに
代えて熱伝導率の良好な、例えばアルミニウムや銅の如
き金属を素材とした場合に、冷却フィンのような作用を
伴って放熱を促進し、溶解加熱時のるつぼ２からの輻射
熱による昇温を抑制するという効果もある。FIG. 2 shows a preferred embodiment of the deposition preventing plate 5 of the present invention developed under such a concept. In this example, at least four, and preferably about eight slits 5a are provided in the radial direction of a circular plate to suppress heat generation due to interlinkage magnetic flux and to make it difficult for induction heating. When the evaporation preventing plate 5 is made of a metal having good thermal conductivity, such as aluminum or copper, instead of stainless steel or the like, heat dissipation is promoted with the action of a cooling fin, and There is also an effect of suppressing temperature rise due to radiant heat from the crucible 2 during heating.
【００１５】次に、付着水やガスの放出を促進するため
に、該蒸着防止板５の表面や内部表面に抵抗加熱式ヒー
ターの如き加熱手段７を直接にまたは間接的に配設す
る。前者の場合は、図２に示すように、該蒸着防止板５
にシーズヒーターなどを直接取付けた例であり、一方後
者の場合は、図１に示すように、該蒸着防止板５を保持
具６を介して退避させた位置において分離配置したヒー
ター７′にて、200 ℃以上に加熱し、ベーキングが終わ
ったらるつぼ２の直上に移す形式のものである。本発明
では、そのいずれの形式のものでも適用が可能である。Next, a heating means 7 such as a resistance heating type heater is directly or indirectly provided on the surface or the inner surface of the deposition preventing plate 5 in order to promote the release of adhering water and gas. In the former case, as shown in FIG.
In the latter case, as shown in FIG. 1, a heater 7 'which is separated and arranged at a position where the vapor deposition preventing plate 5 is retracted via the holder 6, as shown in FIG. , Heated to 200 ° C. or more, and transferred to a position just above the crucible 2 when the baking is completed. In the present invention, any of these types can be applied.
【００１６】[0016]
【発明の効果】以上説明したように、本発明において用
いられる蒸着防止板によれば、るつぼ内からの蒸発物を
効果的に遮蔽できると共に、溶解に先立ってガスの排出
が完全にできるから、真空容器内を超高真空に維持する
のに有効であり、ひいては高純度の金属を溶解精製する
ことができる。As described above, according to the vapor deposition preventing plate used in the present invention, the evaporant from the crucible can be effectively shielded and the gas can be completely discharged prior to melting. This is effective for maintaining the inside of the vacuum vessel at an ultra-high vacuum, and thus enables high-purity metal to be dissolved and refined.
【図１】真空溶解装置の略線図である。FIG. 1 is a schematic diagram of a vacuum melting apparatus.
【図２】本発明にかかる蒸着防止板の略線図である。FIG. 2 is a schematic diagram of a deposition prevention plate according to the present invention.
１ 真空容器 ２ るつぼ ３ 誘導加熱用コイル ４ 覗き窓 ５ 蒸着防止板 ５ａ 鎖交磁束防止用スリット ６ 支持具、 ７ 加熱手段 DESCRIPTION OF SYMBOLS 1 Vacuum container 2 Crucible 3 Induction heating coil 4 Viewing window 5 Deposition prevention plate 5a Slit for preventing interlinkage magnetic flux 6 Support, 7 Heating means
───────────────────────────────────────────────────── フロントページの続き (72)発明者 津田 正徳 三重県伊勢市竹ケ鼻町100番地 神鋼電 機株式会社伊勢製作所内 (72)発明者 中井 泰弘 三重県伊勢市竹ケ鼻町100番地 神鋼電 機株式会社伊勢製作所内 (72)発明者 中嶋 賢人 三重県伊勢市竹ケ鼻町100番地 神鋼電 機株式会社 伊勢製作所内 (72)発明者 原田 正信 東京都中央区日本橋３丁目12番２号 神 鋼電機株式会社内 (56)参考文献 特開 昭63−105969（ＪＰ，Ａ) 特開 昭62−263935（ＪＰ，Ａ) 特開 平10−110223（ＪＰ，Ａ) 特開 平５−70932（ＪＰ，Ａ) 特開 平５−70946（ＪＰ，Ａ) 特開 平７−102374（ＪＰ，Ａ) 実開 昭63−167167（ＪＰ，Ｕ) 実開 平４−25858（ＪＰ，Ｕ) 実公 平６−38112（ＪＰ，Ｙ２) (58)調査した分野(Int.Cl.7，ＤＢ名) F27D 11/06 F27D 7/06 C22B 9/16 C23C 14/52 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Masanori Tsuda 100 Takegahana-cho, Ise-city, Mie Prefecture Inside Ise Seisakusho Co., Ltd. Inside Ise Works (72) Inventor Kento Nakajima 100 Takegahana-cho, Ise City, Mie Prefecture Inside Shinko Electric Machinery Co., Ltd. (56) References JP-A-63-105969 (JP, A) JP-A-62-263935 (JP, A) JP-A-10-110223 (JP, A) JP-A-5-70932 (JP, A) JP-A-5-70946 (JP, A) JP-A-7-102374 (JP, A) JP-A-63-167167 (JP, U) JP-A-4-25858 (JP, U) JP 6-38112 ( JP, Y2) (58) Field surveyed (Int.Cl. 7 , DB name) F27D 11/06 F27D 7/06 C22B 9/16 C23C 14/52
Claims (3)
導溶解炉とから主としてなる真空溶解装置の該誘導溶解
炉直上に保持具を介して進退可能に支持された蒸着防止
板において、この板が高い熱伝導率を有する金属板にて
形成されると共に、複数の鎖交磁束防止用スリットを有
することを特徴とする真空溶解装置の蒸着防止板。1. A deposition prevention plate which is supported so as to be able to advance and retreat via a holder directly above the induction melting furnace of a vacuum melting apparatus mainly comprising a vacuum vessel and an induction melting furnace disposed in the vessel. A deposition prevention plate for a vacuum melting apparatus, wherein the plate is formed of a metal plate having a high thermal conductivity and has a plurality of interlinkage flux preventing slits.
手段を直接配設したことを特徴とする請求項１に記載の
蒸着防止板。2. The deposition preventing plate according to claim 1, wherein a heating means for baking is directly arranged on the surface or inside of the plate.
配設してベーキングするように構成されている請求項１
に記載の蒸着防止板。3. The apparatus according to claim 1, wherein the baking heating means is arranged at a retracted position of the plate to perform baking.
2. The deposition prevention plate according to 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP01036197A JP3338757B2 (en) | 1997-01-23 | 1997-01-23 | Deposition prevention plate for vacuum melting equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP01036197A JP3338757B2 (en) | 1997-01-23 | 1997-01-23 | Deposition prevention plate for vacuum melting equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH10206035A JPH10206035A (en) | 1998-08-07 |
| JP3338757B2 true JP3338757B2 (en) | 2002-10-28 |
Family
ID=11748036
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP01036197A Expired - Fee Related JP3338757B2 (en) | 1997-01-23 | 1997-01-23 | Deposition prevention plate for vacuum melting equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3338757B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20250144976A1 (en) * | 2023-11-02 | 2025-05-08 | Fca Us Llc | Vehicle having auxiliary fan to improve hvac performance |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001351823A (en) * | 2000-06-08 | 2001-12-21 | Mitsubishi Materials Corp | Material for evaporation, method for producing material for evaporation and method for evaporation |
| CN103740949B (en) * | 2013-12-31 | 2015-02-04 | 深圳市华星光电技术有限公司 | Device and method for pre-treating magnesium metal |
| JP6668708B2 (en) * | 2015-04-13 | 2020-03-18 | 富士電機機器制御株式会社 | Heat treatment equipment |
| CN105695763B (en) * | 2016-04-11 | 2017-08-25 | 湖南荣鹏环保科技股份有限公司 | A kind of silver-colored collection device of improved vacuum drying oven |
-
1997
- 1997-01-23 JP JP01036197A patent/JP3338757B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20250144976A1 (en) * | 2023-11-02 | 2025-05-08 | Fca Us Llc | Vehicle having auxiliary fan to improve hvac performance |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH10206035A (en) | 1998-08-07 |
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