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JP3339114B2 - High voltage electrode structure of ozone generator - Google Patents
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JP3339114B2 - High voltage electrode structure of ozone generator - Google Patents

High voltage electrode structure of ozone generator

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Publication number
JP3339114B2
JP3339114B2 JP16947993A JP16947993A JP3339114B2 JP 3339114 B2 JP3339114 B2 JP 3339114B2 JP 16947993 A JP16947993 A JP 16947993A JP 16947993 A JP16947993 A JP 16947993A JP 3339114 B2 JP3339114 B2 JP 3339114B2
Authority
JP
Japan
Prior art keywords
high voltage
voltage electrode
electrode
ozone generator
ozone
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP16947993A
Other languages
Japanese (ja)
Other versions
JPH072501A (en
Inventor
久 諏訪原
雅子 田中
民智夫 西野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Meidensha Corp
Original Assignee
Meidensha Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Meidensha Corp filed Critical Meidensha Corp
Priority to JP16947993A priority Critical patent/JP3339114B2/en
Publication of JPH072501A publication Critical patent/JPH072501A/en
Application granted granted Critical
Publication of JP3339114B2 publication Critical patent/JP3339114B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Oxygen, Ozone, And Oxides In General (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、水処理や屎尿処理等に
利用される無声放電式のオゾン発生装置の高電圧電極構
造に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a high-voltage electrode structure of a silent discharge type ozone generator used for water treatment or human waste treatment.

【0002】[0002]

【従来の技術】オゾンは極めて強い酸化力を有し、水の
殺菌、脱臭、脱色等の上下水処理や屎尿処理及び食品関
連における殺菌などの多くの用途に使われている。オゾ
ンの生成法には、紫外線照射法、放射線照射法、プラズ
マ放電法、無声放電法及び水の電気分解法等があるが、
工業的には無声放電法が主体である。図2に無声放電法
によるオゾン発生装置の原理を示す。図2において高電
圧電極1と接地電極2は、両者間に空隙部3が形成され
るように誘電体4を介在させて並設されている。両電極
1,2間に例えばAC電圧を印加して空隙部3で無声放
電を発生させ原料となるガス(乾燥空気もしくは酸素)
をこの空隙部3に通すことによりオゾンを発生させてい
る。
2. Description of the Related Art Ozone has an extremely strong oxidizing power and is used for many purposes such as water and sewage treatment such as sterilization, deodorization and decolorization of water, human waste treatment and sterilization in foods. Ozone generation methods include ultraviolet irradiation, radiation irradiation, plasma discharge, silent discharge, and water electrolysis.
Industrially, the silent discharge method is mainly used. FIG. 2 shows the principle of an ozone generator using a silent discharge method. In FIG. 2, the high-voltage electrode 1 and the ground electrode 2 are juxtaposed with a dielectric 4 interposed therebetween so that a gap 3 is formed therebetween. For example, a gas (dry air or oxygen) is generated by applying an AC voltage between the two electrodes 1 and 2 to generate a silent discharge in the gap 3 and serve as a raw material.
Is passed through the gap 3 to generate ozone.

【0003】オゾンO3の理論収率は、 O2→O+O−118Kcal(吸熱反応) O+O2→O3+25Kcal(発熱反応) より、 3O2→2O3−68Kcal となり、O3を1mol生成するために34Kcal必
要となる。従って理論上の収率は1.2kgO3/KW
hとなる。しかし、消費電力に対するオゾンの生成効率
は理論収率に比べて極めて低く数%に過ぎず、残りの9
0数%の電力は熱となってオゾン生成に寄与していない
というのがオゾン発生装置の現状である。
The theoretical yield of ozone O 3 is as follows: O 2 → O + O-118 Kcal (endothermic reaction) O + O 2 → O 3 +25 Kcal (exothermic reaction) 3O 2 → 2O 3 -68 Kcal, and 1 mol of O 3 Requires 34 Kcal. Therefore, the theoretical yield is 1.2 kg O 3 / KW
h. However, the efficiency of ozone generation with respect to power consumption is extremely low compared to the theoretical yield, and is only a few percent.
It is the current state of the ozone generator that 0% or more of the electric power does not contribute to ozone generation as heat.

【0004】[0004]

【発明が解決しようとする課題】オゾンの生成量に影響
を及ぼす主な因子としては、電極の形状、電極間ギャッ
プの大きさ、誘電体の形状及び材質、電極の冷却方法、
原料ガスの除湿や冷却方法、印加電圧の波形等が挙げら
れる。
The main factors affecting the amount of ozone generated include the shape of the electrode, the size of the gap between the electrodes, the shape and material of the dielectric, the method of cooling the electrode,
Examples include the method of dehumidifying and cooling the source gas, the waveform of the applied voltage, and the like.

【0005】現在のオゾン発生装置は図2で示したよう
に、電極間に空隙が形成されるように誘電体を介在させ
て、その空隙部分で放電を起こさせる無声放電を応用す
る構造などが主となっている。安定な無声放電を発生さ
せるためには電極間ギャップ長を数mm以下にするとと
もにギャップ長を均一にして、放電をギャップ部分で一
様に発生させる必要がある。実際のオゾン発生装置の電
極部分の構造の一例を図1に示す。
As shown in FIG. 2, the current ozone generator has a structure in which a dielectric is interposed so that a gap is formed between the electrodes, and a silent discharge in which a discharge is generated in the gap is applied. Has become the Lord. In order to generate a stable silent discharge, it is necessary to reduce the gap length between the electrodes to several mm or less and make the gap length uniform so that the discharge is generated uniformly in the gap portion. FIG. 1 shows an example of the structure of the electrode portion of an actual ozone generator.

【0006】図1において(a)は放電管の断面、
(b)は誘電体管の構造を示している。14は一端が閉
塞され他端が開放された円筒の誘電体管であり、例えば
ガラス管で構造されている。誘電体管14の内壁面には
高電圧電極1が設けられている。誘電体管14の同心円
外周には空隙部(無声放電部)3を介して接地電極2が
並設されている。5は高電圧電極1と接地電極2の間に
所定の高電圧を印加する高電圧電源である。
In FIG. 1, (a) is a cross section of the discharge tube,
(B) shows the structure of the dielectric tube. Reference numeral 14 denotes a cylindrical dielectric tube having one end closed and the other end open , and is formed of, for example, a glass tube. The high voltage electrode 1 is provided on the inner wall surface of the dielectric tube 14. The ground electrode 2 is juxtaposed around a concentric outer circumference of the dielectric tube 14 via a gap (silent discharge portion) 3. Reference numeral 5 denotes a high voltage power supply for applying a predetermined high voltage between the high voltage electrode 1 and the ground electrode 2.

【0007】図1の構造において、放電を安定且つ一様
に発生させるためには、高圧電極となる誘電体管14の
内側に設ける高電圧電極1の信頼性が重要となる。図1
のようなオゾン放電管の高電圧電極膜作製には、一般に
カーボンの混入した塗料を塗布したり、アルミ粉末を溶
射したりする方法が用いられている。
In the structure shown in FIG. 1, the reliability of the high-voltage electrode 1 provided inside the dielectric tube 14 serving as a high-voltage electrode is important in order to generate a stable and uniform discharge. FIG.
For producing a high-voltage electrode film for an ozone discharge tube as described above, a method of applying a paint mixed with carbon or spraying aluminum powder is generally used.

【0008】これらの電極被膜は乾燥した原料空気ガス
が接触している時は問題はないが、湿った外気と接触す
ると、電極被膜の劣化が起こる(なぜならば、図1の構
造は、誘電体管14の他端が開放されているため、空隙
部3を通流する原料空気ガスおよび外気が電極被膜に接
触し得る構造であるため)。すなわち放電によって窒素
分子N2から励起された窒素分子N2*(活性種)が発生
し、N2O,NO………などの窒素酸化物が生成され
る。その中でもN25は液体となり、装置の運転停止時
にタンクの扉を開けたときなどに侵入してくる湿った外
気の中の水分と反応して硝酸ができてしまう。この硝酸
がアルミの溶射被膜電極に付着するとアルミが腐食され
て高電圧電極被膜の劣化が起こり、最終的にガラス放電
管が破壊に至ってしまうという問題点がある。
There is no problem when these electrode films are in contact with the dry raw material air gas, but when they come into contact with moist outside air, the electrode films are deteriorated (because of the structure shown in FIG. 1).
Since the other end of the dielectric tube 14 is open,
The raw material air gas and outside air flowing through the part 3 contact the electrode coating.
Touchable structure) . That is, nitrogen molecules N 2 * (active species) excited from the nitrogen molecules N 2 by the discharge are generated, and nitrogen oxides such as N 2 O, NO... Among them, N 2 O 5 becomes liquid and reacts with the moisture in the humid outside air which enters when the operation of the apparatus is stopped and the tank door is opened, to form nitric acid. When this nitric acid adheres to the sprayed aluminum coating electrode, the aluminum is corroded and the high-voltage electrode coating is deteriorated, resulting in a problem that the glass discharge tube is finally broken.

【0009】本発明は上記の点に鑑みてなされたもので
その目的は、誘電体管との密着性を損なうことなく耐腐
食性に優れたオゾン発生装置の高電圧電極構造を提供す
ることにある。
The present invention has been made in view of the above points, and an object of the present invention is to provide a high-voltage electrode structure of an ozone generator having excellent corrosion resistance without impairing adhesion to a dielectric tube. is there.

【0010】[0010]

【課題を解決するための手段】本発明は、高電圧電極が
設けられた誘電体と、該誘電体に空隙部を介して対向配
設された接地電極とを備え、前記高電圧電極と接地電極
間に電圧を印加して前記空隙部内に流通させた原料ガス
中にオゾンを発生させる無声放電式のオゾン発生装置に
おいて、前記誘電体にアルミ被膜を溶射して高電圧電極
を形成した後、該高電圧電極上にNi−Cr被膜を所定
の手段(例えば溶射)によって形成したことを特徴とし
ている。
SUMMARY OF THE INVENTION The present invention comprises a dielectric provided with a high voltage electrode, and a ground electrode provided opposite the dielectric via a gap, wherein the high voltage electrode is connected to a ground. and by applying a voltage between the electrodes kept <br/> ozone generator of the silent discharge type ozone is generated in the raw material gas was passed through inside the gap portion, the thermal spraying of aluminum film on the dielectric to high voltage after forming the electrodes, characterized in that formed by a predetermined means Ni-Cr coating (e.g. spray) on the high voltage electrode
ing.

【0011】[0011]

【作用】[Action]

(1)高電圧電極上にNi−Cr被膜を形成しているの
で、誘電体に用いられるガラス管との密着性が良いアル
ミ溶射被膜は直接硝酸と接触することはない。Ni−C
rは耐オゾン性や耐硝酸性などの耐腐食性に優れてい
る。このため誘電体との密着性をアルミ溶射被膜で保持
しつつ、耐腐食性に優れた高電圧電極を形成することが
できる。
(1) Since the Ni-Cr film is formed on the high voltage electrode, the aluminum sprayed film having good adhesion to the glass tube used for the dielectric does not come into direct contact with nitric acid. Ni-C
r has excellent corrosion resistance such as ozone resistance and nitric acid resistance. Therefore, a high-voltage electrode having excellent corrosion resistance can be formed while maintaining the adhesion with the dielectric by the aluminum spray coating.

【0012】[0012]

【0013】[0013]

【実施例】以下図面を参照しながら本発明の一実施例を
説明する。本発明では前述の問題点を解決するために誘
電体に用いられるガラス管との密着性が良いアルミ溶射
被膜が直接硝酸と接触しないような構造を採用した。
An embodiment of the present invention will be described below with reference to the drawings. In the present invention, in order to solve the above-mentioned problem, a structure is adopted in which an aluminum sprayed coating having good adhesion to a glass tube used as a dielectric does not come into direct contact with nitric acid.

【0014】すなわち請求項1、2に記載の発明では、
耐オゾン性や耐硝酸性などの耐腐食性に優れたNi−C
rを図1(b)に示すアルミ溶射被膜の高電圧電極1の
上から溶射する。Ni−Crの溶射条件は次のとおりで
ある。
That is, in the first and second aspects of the present invention,
Ni-C with excellent corrosion resistance such as ozone resistance and nitric acid resistance
r is sprayed from above the aluminum sprayed coating high voltage electrode 1 shown in FIG. The thermal spraying conditions of Ni-Cr are as follows.

【0015】Ni−Cr粒子の粒度分布…44μm以下 Ni−Crの溶射厚さ…50μm程度 これにより下地のガラス管との密着性をアルミ溶射被膜
で保持しつつ、Ni−Cr溶射被膜により、耐腐食性に
も優れた高電圧電極を形成することができるようになっ
た。尚Ni−Crを直接ガラスに溶射した場合、アルミ
ほど被膜の密着性は良くない。
Particle size distribution of Ni—Cr particles: 44 μm or less Sprayed thickness of Ni—Cr: about 50 μm While maintaining the adhesion to the underlying glass tube by the aluminum spray coating, the Ni—Cr spray coating provides It has become possible to form a high-voltage electrode excellent in corrosiveness. When Ni-Cr is directly sprayed on glass, the adhesion of the coating is not as good as that of aluminum.

【0016】[0016]

【0017】[0017]

【0018】[0018]

【発明の効果】以上のように請求項1、2に記載の発明
によれば、誘電体にアルミ被膜を溶射して高電圧電極を
形成した後、該高電圧電極上にNi−Cr被膜を溶射に
よって形成したので、次のような優れた効果が得られ
る。 (1)従来のアルミ溶射被膜電極上にNi−Cr溶射被
膜を施すことにより、耐オゾン性や耐硝酸性などの耐腐
食性を向上することができた。
As described above, according to the first and second aspects of the present invention, after a high voltage electrode is formed by spraying an aluminum film on a dielectric, a Ni-Cr film is formed on the high voltage electrode. Since it is formed by thermal spraying, the following excellent effects can be obtained. (1) Corrosion resistance such as ozone resistance and nitric acid resistance could be improved by applying a Ni-Cr sprayed coating on a conventional aluminum sprayed coating electrode.

【0019】[0019]

【0020】(2)本発明の高電圧電極と下地の誘電体
管(例えばガラス管)とはアルミ溶射膜で接触してお
り、密着性が良い。この密着性を損なうことなく、耐腐
食性にも優れたオゾン発生用の放電電極を製作できるよ
うになった。(3) 誘電体管の高圧電極部の信頼性が向上したため、
大容量のオゾン発生装置を安全に運転でき、オゾン化ガ
スを安定に供給することができるようになった。
(2) The high-voltage electrode of the present invention and the underlying dielectric tube (eg, a glass tube) are in contact with each other by an aluminum sprayed film, and have good adhesion. It has become possible to manufacture a discharge electrode for generating ozone having excellent corrosion resistance without impairing the adhesion. (3) Because the reliability of the high-voltage electrode part of the dielectric tube has been improved,
The large-capacity ozone generator can be operated safely, and the ozonized gas can be supplied stably.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明のオゾン発生装置で用いる放電管の概略
を示し、(a)は放電管断面図、(b)は誘電体管構造
図。
1A and 1B schematically show a discharge tube used in an ozone generator of the present invention, wherein FIG. 1A is a sectional view of a discharge tube, and FIG. 1B is a structural diagram of a dielectric tube.

【図2】無声放電法によるオゾン生成の原理を示す説明
図。
FIG. 2 is an explanatory diagram showing the principle of ozone generation by a silent discharge method.

【符号の説明】[Explanation of symbols]

1…高電圧電極 2…接地電極 3…空隙部 4…誘電体 5…高電圧電源 14…誘電体管 DESCRIPTION OF SYMBOLS 1 ... High voltage electrode 2 ... Ground electrode 3 ... Void part 4 ... Dielectric 5 ... High voltage power supply 14 ... Dielectric tube

───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平3−88702(JP,A) 特開 平3−269980(JP,A) 実開 昭56−3242(JP,U) (58)調査した分野(Int.Cl.7,DB名) C01B 13/11 ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-3-88702 (JP, A) JP-A-3-269980 (JP, A) JP-A-56-3242 (JP, U) (58) Survey Field (Int.Cl. 7 , DB name) C01B 13/11

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 一端が閉塞され他端が開放され、且つ内
壁に高電圧電極が設けられた誘電体管と、該誘電体管
空隙部を介して対向配設された接地電極とを備え、前記
高電圧電極と接地電極間に電圧を印加して前記空隙部内
に流通させた原料ガス中にオゾンを発生させる無声放電
式のオゾン発生装置において、 前記誘電体管の内壁にアルミ被膜を溶射して高電圧電極
を形成した後、該高電圧電極上にNi−Cr被膜を所定
の手段によって形成したことを特徴とするオゾン発生装
置の高電圧電極構造。
1. One end is closed and the other end is open, and
A dielectric tube high voltage electrode is provided in the wall, and a ground electrode which is arranged facing with a gap portion in the dielectric tube, wherein a voltage is applied between the high voltage electrode and the ground electrode In a silent discharge type ozone generator that generates ozone in the raw material gas circulated in the gap, a high voltage electrode is formed by spraying an aluminum film on the inner wall of the dielectric tube, and then forming the high voltage electrode on the high voltage electrode. A high voltage electrode structure for an ozone generator, wherein a Ni-Cr coating is formed by a predetermined means.
【請求項2】 前記所定の手段は溶射によるものである
ことを特徴とする請求項1に記載のオゾン発生装置の高
電圧電極構造。
2. The high voltage electrode structure of an ozone generator according to claim 1, wherein said predetermined means is formed by thermal spraying.
JP16947993A 1993-04-23 1993-07-09 High voltage electrode structure of ozone generator Expired - Fee Related JP3339114B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16947993A JP3339114B2 (en) 1993-04-23 1993-07-09 High voltage electrode structure of ozone generator

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP5-97315 1993-04-23
JP9731593 1993-04-23
JP16947993A JP3339114B2 (en) 1993-04-23 1993-07-09 High voltage electrode structure of ozone generator

Publications (2)

Publication Number Publication Date
JPH072501A JPH072501A (en) 1995-01-06
JP3339114B2 true JP3339114B2 (en) 2002-10-28

Family

ID=26438504

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16947993A Expired - Fee Related JP3339114B2 (en) 1993-04-23 1993-07-09 High voltage electrode structure of ozone generator

Country Status (1)

Country Link
JP (1) JP3339114B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7922979B2 (en) 2005-03-28 2011-04-12 Mitsubishi Denki Kabushiki Kaisha Silent discharge plasma apparatus
JP4634928B2 (en) * 2005-12-26 2011-02-16 株式会社東芝 Ozone generator
JP7203295B1 (en) * 2022-04-15 2023-01-12 三菱電機株式会社 Discharge device manufacturing method and discharge device

Also Published As

Publication number Publication date
JPH072501A (en) 1995-01-06

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