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JP3339416B2 - Quality inspection equipment using epi-illumination - Google Patents
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JP3339416B2 - Quality inspection equipment using epi-illumination - Google Patents

Quality inspection equipment using epi-illumination

Info

Publication number
JP3339416B2
JP3339416B2 JP23700998A JP23700998A JP3339416B2 JP 3339416 B2 JP3339416 B2 JP 3339416B2 JP 23700998 A JP23700998 A JP 23700998A JP 23700998 A JP23700998 A JP 23700998A JP 3339416 B2 JP3339416 B2 JP 3339416B2
Authority
JP
Japan
Prior art keywords
inspection
light
epi
illumination
quality
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP23700998A
Other languages
Japanese (ja)
Other versions
JP2000065752A (en
Inventor
孝典 青木
銀会 李
好孝 氷上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dac Engineering Co Ltd
Original Assignee
Dac Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dac Engineering Co Ltd filed Critical Dac Engineering Co Ltd
Priority to JP23700998A priority Critical patent/JP3339416B2/en
Publication of JP2000065752A publication Critical patent/JP2000065752A/en
Application granted granted Critical
Publication of JP3339416B2 publication Critical patent/JP3339416B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Inking, Control Or Cleaning Of Printing Machines (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】本発明は、枚葉印刷物やフィルムなどの表
面傷、異物の混入などの有無を判定する品質検査装置に
関する。
[0001] The present invention relates to a quality inspection apparatus for judging the presence or absence of surface flaws on printed sheets or films, foreign substances, and the like.

【0002】[0002]

【従来の技術】従来から、被検査物の検査面に光を照射
し、その反射像の光強度分布を基にして、検査面の品質
を判定する品質検査装置が知られている。この種の品質
検査装置は、枚葉印刷物などの印刷面の印刷ミス、たと
えば、印刷箇所の濃淡の欠落、印刷箇所のピンホール、
髪の毛などの異物の混入の有無を検査し、また、フィル
ム面の傷、汚れなどの欠陥の有無を検査することができ
る。
2. Description of the Related Art Conventionally, there has been known a quality inspection apparatus which irradiates an inspection surface of an inspection object with light and determines the quality of the inspection surface based on a light intensity distribution of a reflected image. This type of quality inspection apparatus is capable of printing errors on a printing surface such as a sheet-fed printed material, for example, lack of shading of a printed portion, a pinhole of a printed portion,
It is possible to inspect the presence or absence of foreign matter such as hair, and to inspect the film surface for defects such as scratches and dirt.

【0003】図7に、このような品質検査装置40の従
来例の概略構成を示す。図7によれば、被検査物である
シート41は、バタツキや紙ハネなどを防ぐため、列設
する多数の搬送ローラ42a,…,42b,…により上
下面を挟持されつつ矢印方向43へ搬送されている。こ
のシート41の表面状態を検査するには、搬送ローラ間
の挟隙44を通して検査光をシート表面に照射する必要
がある。従って、品質検査装置40は、光源45と、こ
の光源45の出射光46を垂直落射させるハーフミラー
47と、シート41の表面像を撮像する撮像カメラ48
と、この表面像の光強度分布に基づきその表面状態を判
定する判定手段49とから構成されている。ハーフミラ
ー47は、シート41の搬送幅(図面奥行き方向の幅)
に亘るライン状領域の反射光50を撮像カメラ48へ与
えるため、その形状は、前記ライン状領域に対応したラ
イン形状でなければならない。従って、撮像カメラ48
としても、前記のライン状領域を撮像すべく、CCD
(電荷結合素子)などを配列したラインセンサを用いる
ことが多い。なお、シート41の具体例としては、例え
ば、厚みが0.2〜1.0mm程度の枚葉印刷紙が挙げ
られる。
FIG. 7 shows a schematic configuration of a conventional example of such a quality inspection device 40. According to FIG. 7, the sheet 41 to be inspected is conveyed in the direction indicated by the arrow 43 while the upper and lower surfaces are pinched by a number of conveying rollers 42a,. Have been. In order to inspect the surface state of the sheet 41, it is necessary to irradiate inspection light to the sheet surface through the gap 44 between the transport rollers. Therefore, the quality inspection device 40 includes a light source 45, a half mirror 47 for vertically emitting light 46 emitted from the light source 45, and an imaging camera 48 for capturing a surface image of the sheet 41.
And determination means 49 for determining the surface state based on the light intensity distribution of the surface image. The half mirror 47 is used to convey the sheet 41 (width in the depth direction of the drawing).
In order to provide the reflected light 50 of the linear region over the imaging camera 48, the shape must be a line shape corresponding to the linear region. Therefore, the imaging camera 48
In order to image the linear area,
(Charge-coupled devices) are often used as line sensors. In addition, as a specific example of the sheet 41, a sheet-fed printing paper having a thickness of about 0.2 to 1.0 mm is exemplified.

【0004】以下、この従来の品質検査装置40による
検査方法を簡単に説明する。先ず、光源45の出射光4
6は、所定の角度で傾斜したハーフミラー47において
反射し搬送ローラ間の挟隙44を通過して、この挟隙4
4の下にあるシート41の検査面に垂直落射する。この
検査面の反射光50は、前記挟隙44を通過しハーフミ
ラー47を透過して、撮像カメラ48により受光され検
査面の表面像を与える。次いで、撮像された表面像の画
像データは、判定手段49へ転送されて、多階調画像デ
ータとして画素単位で処理される。判定手段49におい
ては、この多階調画像データの各画素での濃度レベル
と、予め作成済みの表面状態の良好なマスタ画像データ
の各画素での濃度レベルとを比較・照合することによ
り、検査面の表面状態の良否が判定される。
Hereinafter, an inspection method using the conventional quality inspection apparatus 40 will be briefly described. First, the outgoing light 4 of the light source 45
6 is reflected by the half mirror 47 inclined at a predetermined angle, passes through the gap 44 between the conveying rollers, and
4 falls vertically onto the inspection surface of the sheet 41 underneath. The reflected light 50 on the inspection surface passes through the gap 44 and the half mirror 47, is received by the imaging camera 48, and gives a surface image of the inspection surface. Next, the image data of the picked-up surface image is transferred to the judging means 49, and is processed as multi-tone image data in pixel units. The determination means 49 compares the density level at each pixel of the multi-tone image data with the density level at each pixel of the master image data having a good surface condition that has been created in advance, thereby performing an inspection. The quality of the surface condition of the surface is determined.

【0005】[0005]

【発明が解決しようとする課題】上記のように、従来の
品質検査装置では、搬送ローラ間の挟隙の下にある検査
面の像を得るために、検査光を検査面へ垂直落射させて
いる。このような従来例に限らず、遮光物の存在などに
より、検査面に斜めから検査光を照射し難い状況では、
ハーフミラーによる垂直落射方式が常識的に採用されて
いた。しかしながら、ハーフミラーを用いるがための欠
点があった。
As described above, in the conventional quality inspection apparatus, in order to obtain an image of the inspection surface below the gap between the transport rollers, the inspection light is vertically projected onto the inspection surface. I have. Not limited to such conventional examples, in a situation where it is difficult to irradiate the inspection surface obliquely with the inspection light due to the presence of a light-shielding material,
The vertical epi-illumination method using a half mirror was commonly used. However, there is a disadvantage in using a half mirror.

【0006】ハーフミラーを用いるがための欠点として
は、以下(1)〜(3)が挙げられる。(1)検査面の
表面状態の良否を明確に判定し得る表面像を得るには、
表面像の光強度は一定レベル以上のものでなければなら
ない。しかし、ハーフミラーを用いると、光源の出射光
がハーフミラーに反射する際、および検査面の反射光が
ハーフミラーを透過する際に、これら光の強度が減少す
るため、撮像カメラに到達する光の強度が、前記の一定
レベル以下になることがある。(2)装置の長期使用な
どにより、ハーフミラーに塵埃が付着したときには、撮
像カメラに到達する光の強度はより弱くなる。(3)上
記のライン形状のハーフミラーは、一般に非常に高価か
つ製造が困難であり、品質検査装置の製造コストが大幅
に上昇する一因となる。例えば、枚葉印刷物の表面検査
では、その搬送幅(図面奥行き方向の幅)に亘る420
〜1,250mm程度のライン状領域を検査するため、
同サイズのハーフミラーを用意する必要があるが、この
種のハーフミラーは、製造が難しく高価である。
The disadvantages of using a half mirror include the following (1) to (3). (1) In order to obtain a surface image that can clearly determine the quality of the surface condition of the inspection surface,
The light intensity of the surface image must be above a certain level. However, when a half mirror is used, the intensity of the light emitted from the light source is reflected on the half mirror, and the intensity of the reflected light on the inspection surface is transmitted through the half mirror. May fall below the above-mentioned certain level. (2) When dust adheres to the half mirror due to long-term use of the device, the intensity of light reaching the imaging camera becomes weaker. (3) In general, the line-shaped half mirror is very expensive and difficult to manufacture, which causes a significant increase in the manufacturing cost of the quality inspection device. For example, in the surface inspection of a sheet-fed printed material, 420 over the transport width (width in the depth direction of the drawing) is used.
In order to inspect a linear area of about 1,250 mm,
It is necessary to prepare half mirrors of the same size, but this type of half mirror is difficult and expensive to manufacture.

【0007】本発明は、上記の欠点に鑑み、遮光物の存
在などにより、検査面へ斜めから検査光を照射し難い状
況下において、ハーフミラーによる垂直落射方式を用い
ずに、検査面の明瞭な像を得ることが可能な品質検査装
置を提供することを目的とする。
SUMMARY OF THE INVENTION In view of the above-mentioned disadvantages, the present invention provides a method for clarifying an inspection surface without using a vertical mirror system using a half mirror in a situation where it is difficult to irradiate inspection light obliquely to the inspection surface due to the presence of a light shielding object. It is an object of the present invention to provide a quality inspection device capable of obtaining a proper image.

【0008】[0008]

【課題を解決するための手段】上記目的を達成するた
め、本発明の品質検査装置は、撮像手段の画角の外に配
置され、被検査物の検査面を落射照明する単または複数
の光源と、落射照明された検査面のライン状領域の反射
光を受光し該ライン状領域を撮像する撮像手段と、前記
ライン状領域の反射像の光強度分布を基にして検査面の
品質を判定する判定手段とを備えている。
In order to achieve the above object, a quality inspection apparatus according to the present invention is arranged outside an angle of view of an imaging means, and illuminates one or a plurality of light sources on an inspection surface of an inspection object by epi-illumination. Imaging means for receiving reflected light of the linear area of the inspection surface illuminated by incident light and imaging the linear area; and determining the quality of the inspection plane based on the light intensity distribution of the reflected image of the linear area. It is Bei Ete and a determination means for.

【0009】そして、上記の光源が、遮光物間の挟隙を
通してライン状領域を落射照明するとともに、上記の撮
像手段が、該ライン状領域の反射像を撮像することを特
徴としている
[0009] Then, the above light source, a line-shaped region as well as incident illumination through Kyosuki between shaders, shooting the
Patent that the image means, for capturing a reflection image of the line-shaped region
It is a sign .

【0010】また、前記光源の出射光を屈折させ、前記
検査面のライン状領域を均一の照度で照射するレンズが
備わると、より好ましいものとなる。
[0010] It is more preferable that a lens for refracting the light emitted from the light source and irradiating the linear area of the inspection surface with uniform illuminance is provided.

【0011】このような品質検査装置の判定手段として
は、前記撮像手段によって撮像された反射像の強度分布
から得られる多階調画像データの濃度レベルをマスタ画
像データの基準濃度レベルと比較して検査面の品質を判
定するものを用いることができる。
As a determining means of such a quality inspection apparatus, the density level of the multi-tone image data obtained from the intensity distribution of the reflected image picked up by the image pick-up means is compared with the reference density level of the master image data. What determines the quality of the inspection surface can be used.

【0012】[0012]

【発明の実施の形態】以下、図面を参照しながら、本発
明に係る代表的な種々の実施の形態を説明する。図1お
よび図2は、本発明に係る品質検査装置の一実施例を示
す概略構成図であり、図2は、図1のC−C矢視図であ
る。図2によれば、被検査物であるシート1は、バタツ
キや紙ハネなどを防ぐため、列設する多数の搬送ローラ
2a,…,2b,…により上下面を挟持されつつ矢印方
向3へ搬送されている。搬送ローラ間の間隙距離(t)
は、5〜30mm程度である。また図1によれば、この
シート1は、搬送ローラ2a,2bによって上下面を挟
持されつつ、図面手前方向に搬送されている。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, various exemplary embodiments according to the present invention will be described with reference to the drawings. 1 and 2 are schematic configuration diagrams showing one embodiment of a quality inspection apparatus according to the present invention, and FIG. 2 is a view taken along the line CC of FIG. According to FIG. 2, the sheet 1 to be inspected is conveyed in the direction of the arrow 3 while holding the upper and lower surfaces thereof by a number of conveying rollers 2a,..., 2b,. Have been. Gap distance between transport rollers (t)
Is about 5 to 30 mm. Further, according to FIG. 1, the sheet 1 is conveyed toward the front of the drawing while the upper and lower surfaces are sandwiched by the conveying rollers 2a and 2b.

【0013】このようなシート1の表面状態を検査する
本実施例の品質検査装置4は、撮像カメラ5と、この撮
像カメラ5の画角の外に配置された照明器6a,6b
と、検査面の表面像に基づきその表面状態を判定する判
定手段7とから構成されている。また、照明器6a,6
bは、搬送ローラ間の挟隙8に光を落射照明すべく、挟
隙8の真上であって、図1に示す撮像カメラ5の両脇に
配置されている。かかる配置により、上述のハーフミラ
ーによる垂直落射方式と同様にして、遮光物間の挟隙下
にある被検査物を、5mm程度の挟隙を通して検査する
ことが可能となる。
The quality inspection apparatus 4 of this embodiment for inspecting the surface condition of the sheet 1 includes an imaging camera 5 and illuminators 6a and 6b arranged outside the angle of view of the imaging camera 5.
And determination means 7 for determining the surface state based on the surface image of the inspection surface. In addition, the illuminators 6a, 6
b is disposed directly above the gap 8 and on both sides of the imaging camera 5 shown in FIG. 1 to illuminate the gap 8 between the transport rollers with light. With this arrangement, it is possible to inspect the object under the gap between the light-shielding objects through a gap of about 5 mm in the same manner as in the above-described vertical epi-illumination method using the half mirror.

【0014】また、本実施例の照明器6a,6bの配置
は、主に検査面の散乱光成分による表面像(以下、暗視
野像と呼ぶ。)を撮像カメラに与えるものとなってい
る。しかしながら、本発明ではこれに限らず、照明器の
配置を、主に検査面の正反射光成分(入射光の入射角と
等しい反射角で表面から反射する光成分)による表面像
(以下、明視野像と呼ぶ。)を撮像カメラに与えるもの
としてよいし、また、散乱光成分と正反射光成分との双
方を適度に含む像を撮像カメラに与える配置でもよい。
The arrangement of the illuminators 6a and 6b in the present embodiment is such that a surface image (hereinafter, referred to as a dark-field image) mainly based on a scattered light component on the inspection surface is given to the imaging camera. However, in the present invention, the arrangement of the illuminator is not limited to this, and the arrangement of the illuminator is mainly determined by a surface image (hereinafter referred to as a bright image) of a specularly reflected light component (a light component reflected from the surface at a reflection angle equal to the incident angle of incident light). (Referred to as a field-of-view image) may be given to the imaging camera, or an arrangement in which the imaging camera appropriately contains both a scattered light component and a regular reflection light component may be given to the imaging camera.

【0015】前記照明器としては、光源の光を屈折さ
せ、検査面に均一な照度で照射させるための各種レンズ
を用いることができる。その一実施例を図3に示す。図
3に示す照明器10は、主な構成として、筒状の本体1
1と、この本体11の後端部に設けられ、ランプなどの
光源の光12を入射する光入射口13と、両面が凸形状
の第1コンデンサレンズ14と、両面が凸形状の第2コ
ンデンサレンズ15と、この第2コンデンサレンズ15
の凸形状に対応する凹形状を両面に有する第3コンデン
サレンズ16と、光出射口17とを備えている。
As the illuminator, various lenses for refracting light from a light source and irradiating an inspection surface with uniform illuminance can be used. One embodiment is shown in FIG. The illuminator 10 shown in FIG. 3 mainly has a cylindrical main body 1.
1, a light entrance 13 provided at the rear end of the main body 11 for receiving light 12 from a light source such as a lamp, a first condenser lens 14 having convex surfaces on both sides, and a second condenser lens having convex surfaces on both sides. The lens 15 and the second condenser lens 15
A third condenser lens 16 having a concave shape corresponding to the convex shape on both sides, and a light exit port 17 are provided.

【0016】また本発明に係る照明器としては、ライン
光源や直管状ランプを用いることができる。このような
光源の具体例としては、蛍光灯、ライトガイド式照明器
(光ファイバなどのライトガイドで光照射領域近辺まで
光源の光を案内する照明器)などが挙げられる。さら
に、前記のライン状領域を光照射する光源としては、レ
ーザ発振器などの光ビームをレンズを介してライン状に
照射するもの、もしくは、前記光ビームを回転するポリ
ゴンミラーを用いてライン状領域に順次照射するもので
あってもよい。
As the illuminator according to the present invention, a line light source or a straight tube lamp can be used. Specific examples of such a light source include a fluorescent lamp and a light guide type illuminator (an illuminator that guides the light of the light source to the vicinity of the light irradiation area with a light guide such as an optical fiber). Further, as a light source for irradiating the linear region with light, a light source such as a laser oscillator that linearly irradiates a light beam through a lens, or a linear mirror using a polygon mirror that rotates the light beam may be used. Irradiation may be performed sequentially.

【0017】これら照明器の中でもライトガイド式照明
器は、検査面の近辺に光源の光を案内してライン状、ス
ポット状などの様々の形状の均一な出射光を容易につく
り、かつ検査光の入射角度を容易に調整できるという観
点から、好ましい。図4〜図6に、ライトガイド式照明
器を用いた品質検査装置の実施例の概略構成を示す。図
5は、図4のD−D矢視図である。また図6は、図4お
よび図5に示す品質検査装置の変形例である。これら実
施例の照明器を除く各部の構成および仕組みは、上記の
図1および図2の実施例のものと略同じである。
Among these illuminators, the light guide type illuminator guides the light of the light source to the vicinity of the inspection surface to easily produce uniform outgoing light of various shapes such as a line shape and a spot shape, and to provide the inspection light. It is preferable from the viewpoint that the angle of incidence can be easily adjusted. 4 to 6 show a schematic configuration of an embodiment of a quality inspection apparatus using a light guide type illuminator. FIG. 5 is a view taken in the direction of arrows D-D in FIG. 4. FIG. 6 shows a modification of the quality inspection apparatus shown in FIGS. Except for the illuminator of these embodiments, the configuration and mechanism of each part are substantially the same as those of the embodiment of FIGS. 1 and 2 described above.

【0018】図4および図5によれば、ライトガイド2
2a,22bを備えたライトガイド式照明器21a,2
1bは、その本体23a,23bの下面24a,24b
にスリット状の多数の光出射口を備えている。また、こ
のライトガイド式照明器21a,21bは、これら下面
24a,24bを被検査物28の検査面の照射領域に向
けて、搬送ローラ間の挟隙25の真上であり、図5に示
す撮像カメラ26の左右両側の検査面近くに配置されて
いる。
According to FIG. 4 and FIG.
Light guide type illuminator 21a, 2 provided with 2a, 22b
1b is the lower surface 24a, 24b of the main body 23a, 23b.
Are provided with a large number of slit-shaped light emitting ports. The light guide type illuminators 21a and 21b have the lower surfaces 24a and 24b facing the irradiation area of the inspection surface of the inspection object 28, and are directly above the gap 25 between the transport rollers, and are shown in FIG. It is arranged near the inspection surface on both the left and right sides of the imaging camera 26.

【0019】図6においては、ライトガイド式照明器3
0a,30bを、撮像カメラ31の画角の外であって、
その最大画角に沿うように配置した実施例を示してい
る。本実施例のように、撮像カメラの最大画角に注目
し、照明器30a,30bをこの最大画角に沿う形で配
置すると、検査面を効率良く照射することができる。
In FIG. 6, a light guide type illuminator 3 is shown.
0a and 30b are outside the angle of view of the imaging camera 31,
An example is shown in which they are arranged along the maximum angle of view. By paying attention to the maximum angle of view of the imaging camera and arranging the illuminators 30a and 30b along this maximum angle of view as in the present embodiment, the inspection surface can be efficiently illuminated.

【0020】ところで、本発明に係る撮像カメラとして
は、被検査物の搬送幅のライン状領域を一度に撮像でき
るという観点からは、ラインセンサを用いることが好ま
しい。このラインセンサとしては、CCD(電荷結合素
子)やフォトダイオードなどの固体撮像素子を配列した
ものを用いることができる。たとえば、256画素,5
12画素,1024画素,2048画素,4096画
素,8192画素を有するラインセンサにより高精度の
像を得ることができる。また、ラインセンサとしては、
白黒面撮像用のものに限らず、カラー面撮像用のものを
用いることができる。
As the imaging camera according to the present invention, it is preferable to use a line sensor from the viewpoint that a linear area of the conveyance width of the inspection object can be imaged at a time. As this line sensor, an array of solid-state imaging devices such as a CCD (charge coupled device) and a photodiode can be used. For example, 256 pixels, 5
A high-precision image can be obtained by a line sensor having 12, 1024, 2048, 4096, and 8192 pixels. Also, as a line sensor,
It is not limited to a monochrome plane imaging apparatus, but a color plane imaging apparatus can be used.

【0021】また、本発明に係る被検査物としては枚葉
物や連続シートなどが挙げられる。本発明に係る品質検
査装置は、これら被検査物の表面性状(掻き傷、欠け、
材質不良、へこみ、皺、折れなど)を検査することがで
きる。また、これら被検査物の上にオフセット印刷、グ
ラビア印刷、フレキソ印刷、スクリーン印刷などを施
し、その印刷面の印刷状態をも同時に検査することもで
きる。上記の暗視野像に基づく検査に適した検査面とし
ては、カラーインクによる印刷面やアルミラミネート面
などが挙げられる。特にカラーインクによる印刷面の場
合、正反射光成分の反射像からはその光強度が強すぎて
色成分の識別が難しくなるので、主に散乱光成分を含む
反射像を得ることが望ましい。
In addition, examples of the inspection object according to the present invention include a sheet material and a continuous sheet. The quality inspection apparatus according to the present invention provides a surface property (scratch, chip,
Material defects, dents, wrinkles, breaks, etc.) can be inspected. Further, offset printing, gravure printing, flexo printing, screen printing, or the like may be performed on these inspection objects, and the printing state of the printing surface may be simultaneously inspected. The inspection surface suitable for the inspection based on the dark field image includes a surface printed with color ink and an aluminum laminate surface. In particular, in the case of a printing surface using color ink, since the light intensity is too strong from the reflection image of the specular reflection light component to make it difficult to identify the color component, it is desirable to obtain a reflection image mainly containing a scattered light component.

【0022】また、上記の明視野像に基づく検査に適し
た検査面・被検査物としては、透明・半透明のフィルム
やシート、コート紙、基材上にアルミニウムや銀などを
真空蒸着したもの、もしくはスパッタリングにより表面
に金属粒子を蒸着させて薄い皮膜を形成したものなどが
挙げられる。
Inspection surfaces and inspection objects suitable for the inspection based on the bright-field image include transparent and translucent films and sheets, coated paper, and substrates obtained by vacuum-depositing aluminum or silver on a substrate. Alternatively, a thin film formed by depositing metal particles on the surface by sputtering may be used.

【0023】このような被検査物の反射像は、撮像カメ
ラによって撮像され判定手段に転送されて、ここで処理
される。好ましい判定手段としては、光強度分布による
多階調画像データとして画素単位で処理し、この多階調
画像データの各画素の濃度レベルと、予め撮像された無
欠陥の表面のマスタ画像データの基準濃度レベルとを比
較・照合することにより、検査面の良否を判定するもの
が挙げられる。この判定結果は、スピーカーへ転送され
て警告音などとして出力してもよいし、また、CRTな
どの画像表示手段へ出力されて異常個所などを表示して
もよい。
Such a reflected image of the object to be inspected is picked up by an image pickup camera, transferred to the judgment means, and processed there. As a preferable judging means, processing is performed on a pixel-by-pixel basis as multi-tone image data based on a light intensity distribution, and a density level of each pixel of the multi-tone image data and a reference of master image data of a previously imaged defect-free surface. A method in which the quality of an inspection surface is determined by comparing and collating with a density level is exemplified. This determination result may be transferred to a speaker and output as a warning sound or the like, or may be output to image display means such as a CRT to display an abnormal portion or the like.

【0024】ところで、上記の各実施例は、片方の検査
面のみを検査するものであったが、本発明はこれに限ら
ず、被検査物の裏側もしくは両側に本発明に係る品質検
査装置を設けて、その裏面もしくは両面を検査するもの
であってよい。
In each of the above embodiments, only one inspection surface is inspected. However, the present invention is not limited to this, and the quality inspection apparatus according to the present invention may be installed on the back side or both sides of the inspection object. It may be provided to inspect the back surface or both surfaces.

【0025】また、上記の各実施例は、遮光物が存在す
る状況下のものであるが、本発明に係る遮光物は特に制
限されるものではなく、上記実施例で示したロール以外
のものでもよい。
In each of the embodiments described above, the light-shielding material is present, but the light-shielding material according to the present invention is not particularly limited. May be.

【0026】[0026]

【発明の効果】上述の如く、本発明の品質検査装置は、
撮像手段の画角の外に配置され、被検査物の検査面を落
射照明する単または複数の光源と、落射照明された検査
面のライン状領域の反射光を受光し該ライン状領域を撮
像する撮像手段とを備えているので、ハーフミラーなど
による垂直落射方式を採用することなく、高い検査精度
と低コスト化を可能とし、垂直落射方式による検査と同
等の検査を行うことが可能となった。
As described above, the quality inspection apparatus of the present invention
One or more light sources that are arranged outside the angle of view of the imaging means and illuminate the inspection surface of the inspection object with incident light, and receive the reflected light of the linear region of the illuminated inspection surface and image the linear region. Because it is equipped with an imaging means, it is possible to achieve high inspection accuracy and low cost without employing a vertical epi-illumination method using a half mirror or the like, and it is possible to perform an inspection equivalent to an inspection using the vertical epi-illumination method. Was.

【0027】そして、このような品質検査装置の光源
が、遮光物間の挟隙を通してライン状領域を落射照明す
とともに、撮像手段が、該ライン状領域の反射像を撮
像するので、遮光物間の挟隙下にある検査面を検査する
ことが可能となる。
[0027]And, Such a quality inspection deviceLight source
Illuminates the linear area through the gap between the shades.
ToWith the imaging means,Take a reflection image of the line-shaped area
ImageBecauseInspection of the inspection surface under the gap between the light shielding objects
It becomes possible.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明に係る品質検査装置の一実施例を示す概
略構成図である。
FIG. 1 is a schematic configuration diagram showing one embodiment of a quality inspection apparatus according to the present invention.

【図2】図1のC−C矢視図である。FIG. 2 is a view as viewed in the direction of arrows CC in FIG. 1;

【図3】本発明に係る照明器の断面を示す概略構成図で
ある。
FIG. 3 is a schematic configuration diagram showing a cross section of the illuminator according to the present invention.

【図4】本発明に係る品質検査装置であってライトガイ
ド式照明器を備えた実施例を示す概略構成図である。
FIG. 4 is a schematic configuration diagram showing an embodiment including a light guide type illuminator, which is a quality inspection apparatus according to the present invention.

【図5】図4のD−D矢視図である。FIG. 5 is a view as seen in the direction of the arrows D in FIG. 4;

【図6】図4および図5に示す実施例の変形例を示す図
である。
FIG. 6 is a diagram showing a modification of the embodiment shown in FIGS. 4 and 5;

【図7】従来の垂直落射方式の品質検査装置を示す概略
構成図である。
FIG. 7 is a schematic configuration diagram showing a conventional vertical-emission type quality inspection device.

【符号の説明】[Explanation of symbols]

1 シート 2a,2b 搬送ロ
ーラ 3 矢印方向 4 品質検査装置 5 撮像カメラ 6a,6b 照明器 7 判定手段 8 挟隙 10 照明器 11 本体 12 光源の光 13 光入射口 14 第1コンデンサレンズ 15 第2コンデン
サレンズ 16 第3コンデンサレンズ 17 光出射口 20 品質検査装置 21a,21b ライトガイド式照明器 22a,22b ライトガイド 23a,23b ライトガイド式照明器本体 24a,24b ライトガイド式照明器本体の下面 25 搬送ローラ間の挟隙 26 撮像カメラ 27a,27b 搬送ローラ 28 被検査物 30a,30b ライトガイド式照明器 31 撮像カメラ 40 品質検査装置 41 シート 42a,42b 搬
送ローラ 43 矢印方向 44 挟隙 45 光源 46 出射光 47 ハーフミラー 48 撮像カメラ 49 判定手段 50 反射光
DESCRIPTION OF SYMBOLS 1 Sheet 2a, 2b Conveyance roller 3 Arrow direction 4 Quality inspection apparatus 5 Imaging camera 6a, 6b Illuminator 7 Judgment means 8 Interspace 10 Illuminator 11 Main body 12 Light of light source 13 Light entrance 14 First condenser lens 15 Second condenser Lens 16 Third condenser lens 17 Light exit 20 Quality inspection device 21a, 21b Light guide illuminator 22a, 22b Light guide 23a, 23b Light guide illuminator main body 24a, 24b Lower surface of light guide illuminator main body 25 Transport roller Intermediate gap 26 Imaging camera 27a, 27b Transport roller 28 Inspection object 30a, 30b Light guide type illuminator 31 Imaging camera 40 Quality inspection device 41 Sheet 42a, 42b Transport roller 43 Arrow direction 44 Intersection 45 Light source 46 Emitting light 47 Half mirror 48 Imaging camera 9 determining unit 50 the reflected light

───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平3−282239(JP,A) 特開 平2−245644(JP,A) 実開 昭59−74354(JP,U) (58)調査した分野(Int.Cl.7,DB名) G01N 21/89 - 21/892 B41F 33/14 ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-3-282239 (JP, A) JP-A-2-245644 (JP, A) JP-A-59-74354 (JP, U) (58) Survey Field (Int.Cl. 7 , DB name) G01N 21/89-21/892 B41F 33/14

Claims (4)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 撮像手段の画角の外に配置され、被検査
物の検査面を落射照明する単または複数の光源と、落射
照明された検査面のライン状領域の反射光を受光し該ラ
イン状領域を撮像する撮像手段と、前記ライン状領域の
反射像の光強度分布を基にして検査面の品質を判定する
判定手段と、を備えた落射照明を用いた品質検査装置
あって、 前記光源が、遮光物間の挟隙を通して前記ライン状領域
を落射照明するとともに、 前記撮像手段が、前記ライン状領域の反射像を撮像して
なることを特徴とする落射照明を用いた品質検査装置。
A light source disposed outside the angle of view of the imaging means for illuminating the inspection surface of the inspection object, and receiving reflected light of a linear area of the illuminated inspection surface; in the inspection apparatus using an imaging means for imaging the linear region, the epi-illumination and a determination means for determining the quality of the inspection surface of the light intensity distribution based on the reflected image of the line-shaped region
And wherein the light source passes through the gap between the light-shielding objects to form the linear region.
And epi-illumination, and the imaging means captures a reflected image of the linear region.
A quality inspection apparatus using epi-illumination.
【請求項2】 前記光源の出射光を屈折させ、前記検査
面のライン状領域を均一の照度で照射するレンズを備え
た請求項1記載の落射照明を用いた品質検査装置。
2. The inspection method according to claim 1, wherein the light emitted from said light source is refracted.
Equipped with a lens that illuminates the linear area of the surface with uniform illuminance
A quality inspection device using the epi-illumination according to claim 1.
【請求項3】 前記光源がライトガイドを備えるもので
ある請求項1または請求項2記載の落射照明を用いた品
質検査装置。
3. The method according to claim 2, wherein the light source includes a light guide.
An article using the epi-illumination according to claim 1 or 2.
Quality inspection equipment.
【請求項4】 前記判定手段が、前記撮像手段によって
撮像された反射像の強度分布から得られる多階調画像デ
ータの濃度レベルをマスタ画像データの基準濃度レベル
と比較して検査面の品質を判定するものである請求項1
〜3の何れか1項に記載の落射照明を用いた品質検査装
置。
4. The apparatus according to claim 1 , wherein said determining means includes :
Multi-tone image data obtained from the intensity distribution of the captured reflected image
Data density level is the reference density level of the master image data.
2. The quality of the inspection surface is determined by comparing with
A quality inspection device using the epi-illumination according to any one of claims 1 to 3.
Place.
JP23700998A 1998-08-24 1998-08-24 Quality inspection equipment using epi-illumination Expired - Fee Related JP3339416B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23700998A JP3339416B2 (en) 1998-08-24 1998-08-24 Quality inspection equipment using epi-illumination

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23700998A JP3339416B2 (en) 1998-08-24 1998-08-24 Quality inspection equipment using epi-illumination

Publications (2)

Publication Number Publication Date
JP2000065752A JP2000065752A (en) 2000-03-03
JP3339416B2 true JP3339416B2 (en) 2002-10-28

Family

ID=17009043

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
JP (1) JP3339416B2 (en)

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KR100452317B1 (en) * 2001-07-11 2004-10-12 삼성전자주식회사 photo-lithography fabrication system and method there of
US7899573B2 (en) 2008-06-16 2011-03-01 GM Global Technology Operations LLC Non-contact method and system for inspecting a multi-faceted machine surface
CN107228864A (en) * 2016-03-24 2017-10-03 苍南县三维电子塑胶有限公司 The detecting system of panel surface defect

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Publication number Priority date Publication date Assignee Title
CN109016864A (en) * 2018-09-11 2018-12-18 大连理工大学 A kind of precise positioning static dump system and method
CN113820323A (en) * 2020-06-19 2021-12-21 财团法人纺织产业综合研究所 Fabric inspection system and fabric inspection method

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