JP3339772B2 - Epoxy resin composition - Google Patents
Epoxy resin compositionInfo
- Publication number
- JP3339772B2 JP3339772B2 JP31179195A JP31179195A JP3339772B2 JP 3339772 B2 JP3339772 B2 JP 3339772B2 JP 31179195 A JP31179195 A JP 31179195A JP 31179195 A JP31179195 A JP 31179195A JP 3339772 B2 JP3339772 B2 JP 3339772B2
- Authority
- JP
- Japan
- Prior art keywords
- epoxy resin
- resin composition
- weight
- composition
- zinc borate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 239000003822 epoxy resin Substances 0.000 title claims description 26
- 229920000647 polyepoxide Polymers 0.000 title claims description 26
- 239000000203 mixture Substances 0.000 title claims description 23
- 239000005011 phenolic resin Substances 0.000 claims description 11
- BIKXLKXABVUSMH-UHFFFAOYSA-N trizinc;diborate Chemical compound [Zn+2].[Zn+2].[Zn+2].[O-]B([O-])[O-].[O-]B([O-])[O-] BIKXLKXABVUSMH-UHFFFAOYSA-N 0.000 claims description 11
- 239000011256 inorganic filler Substances 0.000 claims description 9
- 229910003475 inorganic filler Inorganic materials 0.000 claims description 9
- 239000003795 chemical substances by application Substances 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 7
- 229910052736 halogen Inorganic materials 0.000 claims description 6
- 150000002367 halogens Chemical class 0.000 claims description 6
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 claims description 4
- 238000005538 encapsulation Methods 0.000 claims description 4
- 229920001568 phenolic resin Polymers 0.000 claims description 4
- 229910052787 antimony Inorganic materials 0.000 claims description 2
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 16
- ADCOVFLJGNWWNZ-UHFFFAOYSA-N antimony trioxide Chemical compound O=[Sb]O[Sb]=O ADCOVFLJGNWWNZ-UHFFFAOYSA-N 0.000 description 10
- 239000002245 particle Substances 0.000 description 10
- 229920003986 novolac Polymers 0.000 description 9
- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical compound N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 description 8
- 239000004593 Epoxy Substances 0.000 description 8
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N diphenyl Chemical compound C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 8
- 239000003063 flame retardant Substances 0.000 description 8
- RIOQSEWOXXDEQQ-UHFFFAOYSA-N triphenylphosphine Chemical compound C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 RIOQSEWOXXDEQQ-UHFFFAOYSA-N 0.000 description 8
- 239000005350 fused silica glass Substances 0.000 description 7
- 239000000843 powder Substances 0.000 description 7
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 6
- 150000001875 compounds Chemical class 0.000 description 6
- 150000002989 phenols Chemical class 0.000 description 6
- 229920005989 resin Polymers 0.000 description 6
- 239000011347 resin Substances 0.000 description 6
- 235000010290 biphenyl Nutrition 0.000 description 4
- 239000004305 biphenyl Substances 0.000 description 4
- 239000006229 carbon black Substances 0.000 description 4
- 239000012778 molding material Substances 0.000 description 4
- 239000000654 additive Substances 0.000 description 3
- 235000013869 carnauba wax Nutrition 0.000 description 3
- 239000004203 carnauba wax Substances 0.000 description 3
- 229910002026 crystalline silica Inorganic materials 0.000 description 3
- 125000003700 epoxy group Chemical group 0.000 description 3
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 2
- 101100028952 Mus musculus Pdia2 gene Proteins 0.000 description 2
- AFCARXCZXQIEQB-UHFFFAOYSA-N N-[3-oxo-3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(CCNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 AFCARXCZXQIEQB-UHFFFAOYSA-N 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 229930003836 cresol Natural products 0.000 description 2
- 239000000945 filler Substances 0.000 description 2
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- QWVGKYWNOKOFNN-UHFFFAOYSA-N o-cresol Chemical compound CC1=CC=CC=C1O QWVGKYWNOKOFNN-UHFFFAOYSA-N 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 239000003566 sealing material Substances 0.000 description 2
- 238000001721 transfer moulding Methods 0.000 description 2
- 239000001993 wax Substances 0.000 description 2
- CQOZJDNCADWEKH-UHFFFAOYSA-N 2-[3,3-bis(2-hydroxyphenyl)propyl]phenol Chemical compound OC1=CC=CC=C1CCC(C=1C(=CC=CC=1)O)C1=CC=CC=C1O CQOZJDNCADWEKH-UHFFFAOYSA-N 0.000 description 1
- LXBGSDVWAMZHDD-UHFFFAOYSA-N 2-methyl-1h-imidazole Chemical compound CC1=NC=CN1 LXBGSDVWAMZHDD-UHFFFAOYSA-N 0.000 description 1
- 229930185605 Bisphenol Natural products 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 239000006087 Silane Coupling Agent Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- WNROFYMDJYEPJX-UHFFFAOYSA-K aluminium hydroxide Chemical compound [OH-].[OH-].[OH-].[Al+3] WNROFYMDJYEPJX-UHFFFAOYSA-K 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- XXBDWLFCJWSEKW-UHFFFAOYSA-N dimethylbenzylamine Chemical compound CN(C)CC1=CC=CC=C1 XXBDWLFCJWSEKW-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- VTHJTEIRLNZDEV-UHFFFAOYSA-L magnesium dihydroxide Chemical compound [OH-].[OH-].[Mg+2] VTHJTEIRLNZDEV-UHFFFAOYSA-L 0.000 description 1
- 239000000347 magnesium hydroxide Substances 0.000 description 1
- 229910001862 magnesium hydroxide Inorganic materials 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910000000 metal hydroxide Inorganic materials 0.000 description 1
- 150000004692 metal hydroxides Chemical class 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 150000003918 triazines Chemical class 0.000 description 1
Landscapes
- Epoxy Resins (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Compositions Of Macromolecular Compounds (AREA)
Description
【0001】[0001]
【発明の属する技術分野】本発明は、難燃性に優れた半
導体封止用エポキシ樹脂組成物に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an epoxy resin composition for semiconductor encapsulation having excellent flame retardancy.
【0002】[0002]
【従来の技術】従来、ダイオ−ド、トランジスタ、集積
回路等の電子部品は、エポキシ樹脂組成物で封止されて
いる。この組成物中には、難燃剤としてハロゲン系難燃
剤単独あるいはハロゲン系難燃剤と三酸化アンチモンと
の併用、充填材として溶融シリカ、結晶シリカ等の無機
充填材が配合されている。ところが、環境衛生の点から
ハロゲン系難燃剤、三酸化アンチモンを使用しない難燃
性エポキシ樹脂組成物が要求されている。この要求に対
して、水酸化アルミニウムや水酸化マグネシウムの様な
金属水酸化物等が検討されてきたが、不純物が多くかつ
多量に添加しないと効果が発現できないことから実用化
には至っていない。2. Description of the Related Art Conventionally, electronic components such as diodes, transistors, and integrated circuits have been sealed with an epoxy resin composition. In this composition, a halogen-based flame retardant alone or a combination of a halogen-based flame retardant and antimony trioxide is used as a flame retardant, and an inorganic filler such as fused silica or crystalline silica is blended as a filler. However, from the viewpoint of environmental hygiene, a flame-retardant epoxy resin composition that does not use a halogen-based flame retardant or antimony trioxide is required. In response to this requirement, metal hydroxides such as aluminum hydroxide and magnesium hydroxide have been studied, but they have not been put to practical use because their effects cannot be exhibited unless they are added in large amounts and in large amounts.
【0003】[0003]
【発明が解決しようとする課題】本発明は、この様な問
題に対して、ほう酸亜鉛を使用することにより、アンチ
モン及びハロゲンを含まない難燃性の半導体封止用エポ
キシ樹脂組成物を提供するところにある。SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention provides a flame-retardant epoxy resin composition for semiconductor encapsulation containing no antimony and halogen by using zinc borate. There.
【0004】[0004]
【課題を解決するための手段】本発明は、(A)エポキ
シ樹脂、(B)フェノール樹脂硬化剤、(C)硬化促進
剤、(D)ほう酸亜鉛(E)無機充填材からなる半導体
封止用エポキシ樹脂組成物である。SUMMARY OF THE INVENTION The present invention provides a semiconductor encapsulation comprising (A) an epoxy resin, (B) a phenolic resin curing agent, (C) a curing accelerator, (D) zinc borate, and (E) an inorganic filler. Epoxy resin composition for use.
【0005】本発明に用いるほう酸亜鉛は難燃性と耐湿
性との兼ね合いから4ZnO・B2O3・H2Oや2Zn
O・3B2O3・3.5H2Oが好ましく、成形性との兼
ね合いから4ZnO・B2O3・H2Oがより好ましい。
このほう酸亜鉛は市場より容易に入手することができ
る。ほう酸亜鉛は無機充填材量の含有量にもよるが、全
組成物中に1〜20重量%含有することが好ましい。1
重量%未満だと難燃性が不足し、20重量%を超えると
耐湿性及び成形性が低下するためである。[0005] Zinc borate used in the present invention is 4ZnO.B 2 O 3 .H 2 O or 2Zn because of its balance between flame retardancy and moisture resistance.
O · 3B 2 O 3 · 3.5H 2 O is preferred, 4ZnO · B 2 O 3 · H 2 O from consideration of the formability is more preferable.
This zinc borate is readily available from the market. Although it depends on the content of the inorganic filler, zinc borate is preferably contained in the entire composition at 1 to 20% by weight. 1
When the amount is less than 20% by weight, the flame retardancy is insufficient, and when the amount is more than 20% by weight, the moisture resistance and the moldability deteriorate.
【0006】本発明に用いるエポキシ樹脂は、1分子中
にエポキシ基を2個以上有するモノマー、オリゴマー、
ポリマー全般を言い、その分子量、分子構造を特に限定
するものではないが、例えばビフェニル型エポキシ化合
物、ビスフェノール型エポキシ化合物、フェノールノボ
ラック型エポキシ樹脂、クレゾールノボラック型エポキ
シ樹脂、トリフェノールメタン型エポキシ化合物、アル
キル変性トリフェノールメタン型エポキシ化合物及びト
リアジン核含有エポキシ樹脂等が挙げられ、単独でも混
合して用いても差し支えない。[0006] The epoxy resin used in the present invention is a monomer or oligomer having two or more epoxy groups in one molecule,
It refers to polymers in general, and its molecular weight and molecular structure are not particularly limited. For example, biphenyl type epoxy compounds, bisphenol type epoxy compounds, phenol novolak type epoxy resins, cresol novolak type epoxy resins, triphenol methane type epoxy compounds, alkyl compounds Examples include a modified triphenolmethane-type epoxy compound and a triazine nucleus-containing epoxy resin, which may be used alone or in combination.
【0007】本発明に用いるフェノール樹脂硬化剤は、
その分子量、分子構造を特に限定するものではないが、
例えばフェノールノボラック樹脂、クレゾールノボラッ
ク樹脂、ジシクロペンタジエン変性フェノール樹脂、パ
ラキシリレン変性フェノール樹脂、テルペン変性フェノ
ール樹脂、トリフェノールメタン化合物等が挙げられ、
特にフェノールノボラック樹脂、ジシクロペンタジエン
変性フェノール樹脂、パラキシリレン変性フェノール樹
脂、テルペン変性フェノール樹脂等が好ましく、単独で
も混合しても差し支えない。また、これらの硬化剤の配
合量としては、エポキシ化合物のエポキシ基数とフェノ
ール樹脂硬化剤の水酸基数の比は0.8〜1.2が好ま
しい。The phenolic resin curing agent used in the present invention comprises:
Although its molecular weight and molecular structure are not particularly limited,
For example, phenol novolak resin, cresol novolak resin, dicyclopentadiene-modified phenol resin, paraxylylene-modified phenol resin, terpene-modified phenol resin, triphenolmethane compound, and the like,
In particular, a phenol novolak resin, a dicyclopentadiene-modified phenol resin, a paraxylylene-modified phenol resin, a terpene-modified phenol resin and the like are preferable, and they may be used alone or in combination. Further, as a blending amount of these curing agents, the ratio of the number of epoxy groups of the epoxy compound to the number of hydroxyl groups of the phenol resin curing agent is preferably 0.8 to 1.2.
【0008】本発明に用いる硬化促進剤は、エポキシ基
と水酸基との硬化反応を促進させるものであればよく、
一般に封止材料に使用されているものを広く使用するこ
とができる。例えば1,8−ジアザビシクロウンデセ
ン、トリフェニルホスフィン、ベンジルジメチルアミン
や2−メチルイミダゾ−ル等が挙げられ、単独でも混合
して用いても差し支えない。無機充填材としては、溶融
シリカ粉末、結晶シリカ粉末、アルミナ、窒化珪素等が
挙げられるが、リードフレーム等との熱膨張係数の差や
不純物量の点から溶融シリカ粉末、結晶シリカ粉末が望
ましい。これら無機充填材の配合量は成形性と信頼性の
バランスから全組成物中に50〜95重量%含有するこ
とが好ましい。又、流動性、充填性の点から無機充填材
は、平均粒径が10〜20μmで、10μm以下の粒径
を20〜45重量%含み、70μm以上の粒径が10重
量%以下である粒度分布を持つものが好ましい。特に充
填材量の多い配合では、球状の溶融シリカを用いるのが
一般的である。The curing accelerator used in the present invention may be any one which promotes a curing reaction between an epoxy group and a hydroxyl group.
What is generally used for a sealing material can be widely used. For example, 1,8-diazabicycloundecene, triphenylphosphine, benzyldimethylamine, 2-methylimidazole and the like can be mentioned, and they can be used alone or in combination. Examples of the inorganic filler include a fused silica powder, a crystalline silica powder, alumina, silicon nitride and the like, and a fused silica powder and a crystalline silica powder are preferable in view of a difference in a thermal expansion coefficient from a lead frame or the like and an impurity amount. The amount of the inorganic filler is preferably 50 to 95% by weight in the whole composition in view of the balance between moldability and reliability. Further, from the viewpoint of fluidity and filling properties, the inorganic filler has an average particle size of 10 to 20 μm, a particle size of 10 μm or less including 20 to 45% by weight, and a particle size of 70 μm or more having a particle size of 10% by weight or less. Those having a distribution are preferred. In particular, in a composition having a large amount of filler, spherical fused silica is generally used.
【0009】本発明のエポキシ樹脂組成物はエポキシ樹
脂、フェノール樹脂硬化剤、硬化促進剤、ほう酸亜鉛及
び無機充填材を必須成分とするが、これ以外に必要に応
じてシランカップリング剤、カーボンブラック、ベンガ
ラ等の着色剤、天然ワックス、合成ワックス等の離型剤
及びシリコーンオイル、ゴム等の低応力添加剤等の種々
の添加剤を適宜配合しても差し支えない。また本発明の
封止用エポキシ樹脂組成物を成形材料として製造するに
は、必須成分である各成分、その他の添加剤をミキサ−
等によって充分に均一に混合した後、更に熱ロ−ルまた
はニーダー等で溶融混練し、冷却後粉砕して封止材料と
することができる。これらの成形材料は電気部品あるい
は電子部品であるトランジスタ、集積回路等の被覆、絶
縁、封止等に適用することができる。The epoxy resin composition of the present invention comprises an epoxy resin, a phenolic resin curing agent, a curing accelerator, zinc borate and an inorganic filler as essential components. In addition to this, a silane coupling agent, carbon black And various additives such as a releasing agent such as natural wax and synthetic wax, and a low stress additive such as silicone oil and rubber. Further, in order to produce the encapsulating epoxy resin composition of the present invention as a molding material, each of the essential components and other additives are mixed with a mixer.
After sufficiently mixing the mixture, the mixture is melted and kneaded with a hot roll or a kneader, cooled, and pulverized to obtain a sealing material. These molding materials can be applied to coating, insulation, sealing, and the like of transistors and integrated circuits, which are electric or electronic components.
【0010】[0010]
【実施例】以下本発明を実施例で具体的に説明する。 《実施例1〜5、比較例1〜5》表1及び表2に示した
組成物をミキサ−で常温で混合し、70〜100℃で2
軸ロ−ルにより混練し、冷却後粉砕して成形材料とし
た。更に得られた成形材料をタブレット化し、低圧トラ
ンスファ−成形機にて175℃、70Kg/cm2 、120
秒の条件で、耐燃テスト用試験片を成形し、また耐湿性
試験用として3mm×3.5mmのチップを16pDIPに
封止した。封止したテスト用素子について下記の耐湿性
試験を行なった。試験結果を表1及び表2に示す。The present invention will be specifically described below with reference to examples. << Examples 1 to 5, Comparative Examples 1 to 5 >> The compositions shown in Tables 1 and 2 were mixed at room temperature with a mixer, and mixed at 70 to 100 ° C.
The mixture was kneaded by a shaft roll, cooled and pulverized to obtain a molding material. Further, the obtained molding material was tableted, and was subjected to low pressure transfer molding at 175 ° C., 70 kg / cm 2 , 120 kg.
Under the condition of seconds, a test piece for a flame resistance test was molded, and a chip of 3 mm × 3.5 mm was sealed in 16 pDIP for a moisture resistance test. The following moisture resistance test was performed on the sealed test element. The test results are shown in Tables 1 and 2.
【0011】使用した原材料は下記のとおり。 ・オルソクレゾールノボラック型エポキシ樹脂:軟化点
65℃、エポキシ当量200 g/eq ・ビフェニル型エポキシ樹脂:融点110℃、エポキシ
当量195 g/eq ・ブロム化エポキシ樹脂:軟化点60℃、エポキシ当量
360 g/eq ・フェノールノボラック樹脂硬化剤:軟化点80℃、水
酸基当量104 g/eq ・溶融シリカ粉末:平均粒径15μm、比表面積2.2m
2/g 、粒径10μm以下35重量%、粒径70μm以上
8重量% ・球状シリカ:平均粒径17μm、比表面積5.0m2/g
、粒径10μm以下35重量%、粒径7 0μm以上6
重量% ・トリフェニルホスフィン ・カ−ボンブラック ・カルナバワックス ・ほう酸亜鉛(4ZnO・B2O3・H2O) ・ほう酸亜鉛(2ZnO・3B2O3・3.5H2O) ・三酸化アンチモンThe raw materials used are as follows. Orthocresol novolak epoxy resin: softening point 65 ° C, epoxy equivalent 200 g / eq Biphenyl epoxy resin: melting point 110 ° C, epoxy equivalent 195 g / eq Brominated epoxy resin: softening point 60 ° C, epoxy equivalent 360 g Phenol novolak resin curing agent: softening point 80 ° C, hydroxyl equivalent 104 g / eq fused silica powder: average particle size 15 μm, specific surface area 2.2 m
2 / g, particle size 10 μm or less 35% by weight, particle size 70 μm or more 8% by weight Spherical silica: average particle size 17 μm, specific surface area 5.0 m 2 / g
35% by weight with particle size of 10 μm or less, particle size of 70 μm or more with 6
Wt% triphenylphosphine Ka - carbon black, carnauba wax, zinc borate (4ZnO · B 2 O 3 · H 2 O) · zinc borate (2ZnO · 3B 2 O 3 · 3.5H 2 O) · antimony trioxide
【0012】評価方法は下記のとおり。 《スパイラルフロー》金型温度175℃、圧力70kg/
cm2 で測定した。 《耐燃テスト》UL−94垂直試験(試料厚さ1.0m
m)、難燃性で表した。 《耐湿性試験》封止したテスト用素子をプレッシャ−ク
ッカ−試験(125℃、100%RH)を行い、回路のオ
−プン不良を測定し、不良発生時間で表した。 《成形性》低圧トランスファー成形機を用い、金型温度
175℃、圧力70kg/cm2 の条件で16pDIPが成
形可能な硬化時間(秒)を成形性の目や苦とした。The evaluation method is as follows. << Spiral flow >> Mold temperature 175 ℃, pressure 70kg /
It was measured in cm 2 . << flammability test >> UL-94 vertical test (sample thickness 1.0m
m), represented by flame retardancy. << Moisture Resistance Test >> The sealed test element was subjected to a pressure cooker test (125 ° C., 100% RH), and the open defect of the circuit was measured and expressed as a failure occurrence time. << Moldability >> Using a low-pressure transfer molding machine, the curing time (second) at which 16 pDIP can be molded under the conditions of a mold temperature of 175 ° C. and a pressure of 70 kg / cm 2 was defined as moldability.
【0013】 表 1 実 施 例 1 2 3 4 5 配合(重量部) オルソクレソ゛-ルノホ゛ラック型エホ゜キシ樹脂 18.3 18.3 18.3 8.6 ビフェニル型エポキシ樹脂 4.4 フェノールノボラック樹脂 9.5 9.5 9.5 4.5 2.3 溶融シリカ粉末 61.0 51.0 51.0 球状シリカ 84.5 91.0 トリフェニルホスフィン 0.2 0.2 0.2 0.2 0.2 カ−ボンブラック 0.5 0.5 0.5 0.5 0.5 カルナバワックス 0.5 0.5 0.5 0.5 0.5 4ZnO・B2O3・H2O 10.0 20.0 3.0 1.1 2ZnO・3B2O3・3.5H2O 20.0 物性 スパイラルフロー(cm) 100 100 100 60 70 難燃性 V-0 V-0 V-0 V-0 V-0 耐湿性(Hr) 400 350 350 400 400 成形性(硬化時間:秒) 90 120 200 90 90 Table 1 Example 1 2 3 4 5 blend (parts by weight) Orthocreso-Lenopenac type epoxy resin 18.3 18.3 18.3 8.6 Biphenyl type epoxy resin 4.4 Phenol novolak resin 9.5 9.5 9.5 4.5 2.3 Fused silica powder 61.0 51.0 51.0 Spherical silica 84.5 91.0 Triphenylphosphine 0.2 0.2 0.2 0.2 0.2 Carbon black 0.5 0.5 0.5 0.5 0.5 Carnauba wax 0.5 0.5 0.5 0.5 0.5 4ZnO ・ B 2 O 3・ H 2 O 10.0 20.0 3.0 1.1 2ZnO ・ 3B 2 O 3・ 3.5H 2 O 20.0 Physical properties Spiral flow ( cm) 100 100 100 60 70 Flame retardancy V-0 V-0 V-0 V-0 V-0 Moisture resistance (Hr) 400 350 350 400 400 Moldability (curing time: seconds) 90 120 200 90 90
【0014】 表 2 比 較 例 1 2 3 4 5 配合(重量部) オルソクレソ゛-ルノホ゛ラック型エホ゜キシ樹脂 18.3 16.6 7.8 ビフェニル型エポキシ樹脂 4.4 4.3 ブロム化エポキシ樹脂 2.0 1.0 0.5 フェノールノボラック樹脂 9.5 2.3 9.2 4.3 2.5 溶融シリカ粉末 41.0 69.0 球状シリカ 91.3 84.7 91.0 トリフェニルホスフィン 0.2 0.2 0.2 0.2 0.2 カ−ボンブラック 0.5 0.5 0.5 0.5 0.5 カルナバワックス 0.5 0.5 0.5 0.5 0.5 4ZnO・B2O3・H2O 30.0 0.8 三酸化アンチモン 2.0 1.0 0.5 物性 スパイラルフロー(cm) 130 70 100 60 70 難燃性 V-0 V-1 V-0 V-0 V-0 耐湿性(Hr) 100 400 300 400 400 成形性(硬化時間:秒) 300 90 90 90 90 Table 2 Comparative Example 1 2 3 4 5 Blended (parts by weight) Orthocreso-Lenopenac type epoxy resin 18.3 16.6 7.8 Biphenyl type epoxy resin 4.4 4.3 Brominated epoxy resin 2.0 1.0 0.5 Phenol novolak resin 9.5 2.3 9.2 4.3 2.5 Fused silica powder 41.0 69.0 Spherical silica 91.3 84.7 91.0 Triphenylphosphine 0.2 0.2 0.2 0.2 0.2 Carbon black 0.5 0.5 0.5 0.5 0.5 Carnauba wax 0.5 0.5 0.5 0.5 0.5 4 ZnO ・ B 2 O 3・ H 2 O 30.0 0.8 Antimony trioxide 2.0 1.0 0.5 Physical properties Spiral flow (cm ) 130 70 100 60 70 Flame retardant V-0 V-1 V-0 V-0 V-0 Moisture resistance (Hr) 100 400 300 400 400 Moldability (curing time: seconds) 300 90 90 90 90
【0015】[0015]
【発明の効果】本発明の組成物により、半導体素子を封
止することにより、ハロゲン系難燃剤、三酸化アンチモ
ンを含まないの耐湿性及び難燃性に優れた半導体装置を
得ることができる。As described above, by encapsulating a semiconductor element with the composition of the present invention, a semiconductor device containing no halogen-based flame retardant and antimony trioxide and having excellent moisture resistance and flame retardancy can be obtained.
Claims (2)
樹脂硬化剤、(C)硬化促進剤、(D)ほう酸亜鉛及び
(E)無機充填材からなるエポキシ樹脂組成物であり、
該組成物中の該ほう酸亜鉛の含有量が1〜20重量%で
あり、該無機充填材の含有量が50〜95重量%であ
り、該組成物中にアンチモン及びハロゲンを含まないこ
とを特徴とする半導体封止用エポキシ樹脂組成物。1. An epoxy resin composition comprising (A) an epoxy resin, (B) a phenolic resin curing agent, (C) a curing accelerator, (D) zinc borate, and (E) an inorganic filler .
When the content of the zinc borate in the composition is 1 to 20% by weight.
And the content of the inorganic filler is 50 to 95% by weight.
An epoxy resin composition for semiconductor encapsulation , wherein the composition does not contain antimony and halogen .
・H2Oである請求項1記載の半導体封止用エポキシ樹
脂組成物。2. The structure of zinc borate is 4ZnO.B 2 O 3
· H 2 O in a claim 1 semiconductor encapsulating epoxy resin composition.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31179195A JP3339772B2 (en) | 1995-11-30 | 1995-11-30 | Epoxy resin composition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31179195A JP3339772B2 (en) | 1995-11-30 | 1995-11-30 | Epoxy resin composition |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH09151301A JPH09151301A (en) | 1997-06-10 |
| JP3339772B2 true JP3339772B2 (en) | 2002-10-28 |
Family
ID=18021503
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP31179195A Ceased JP3339772B2 (en) | 1995-11-30 | 1995-11-30 | Epoxy resin composition |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3339772B2 (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW345727B (en) * | 1996-08-22 | 1998-11-21 | Hitachi Ltd | Resin encapsulated semiconductor device and process for producing the same |
| JP4147030B2 (en) * | 1999-07-14 | 2008-09-10 | 株式会社日立製作所 | Epoxy resin composition for semiconductor encapsulation and semiconductor device |
| JP2001049084A (en) * | 1999-08-09 | 2001-02-20 | Sumitomo Bakelite Co Ltd | Epoxy resin composition and semiconductor apparatus |
| JP4568944B2 (en) * | 2000-03-21 | 2010-10-27 | 住友ベークライト株式会社 | Epoxy resin composition and semiconductor device |
| JP2001288338A (en) * | 2000-04-10 | 2001-10-16 | Sumitomo Bakelite Co Ltd | Epoxy resin composition and semiconductor device |
| EP3003043A2 (en) * | 2013-06-03 | 2016-04-13 | Yeditepe Universitesi | Boron added antimicrobial joint sealant |
| JP7354567B2 (en) * | 2019-03-27 | 2023-10-03 | 住友ベークライト株式会社 | Encapsulating resin composition and semiconductor device |
-
1995
- 1995-11-30 JP JP31179195A patent/JP3339772B2/en not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| JPH09151301A (en) | 1997-06-10 |
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