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JP3346991B2 - Metal filter and method for manufacturing the same - Google Patents
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JP3346991B2 - Metal filter and method for manufacturing the same - Google Patents

Metal filter and method for manufacturing the same

Info

Publication number
JP3346991B2
JP3346991B2 JP23776696A JP23776696A JP3346991B2 JP 3346991 B2 JP3346991 B2 JP 3346991B2 JP 23776696 A JP23776696 A JP 23776696A JP 23776696 A JP23776696 A JP 23776696A JP 3346991 B2 JP3346991 B2 JP 3346991B2
Authority
JP
Japan
Prior art keywords
metal
particles
filtration
diameter
filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP23776696A
Other languages
Japanese (ja)
Other versions
JPH1080613A (en
Inventor
龍太郎 元木
喬重 石田
茂 田中
淳 船越
隆 西
晃 小阪
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kubota Corp
Original Assignee
Kubota Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kubota Corp filed Critical Kubota Corp
Priority to JP23776696A priority Critical patent/JP3346991B2/en
Priority to CA002190238A priority patent/CA2190238A1/en
Priority to EP96118296A priority patent/EP0819459A1/en
Priority to US08/749,237 priority patent/US5925156A/en
Publication of JPH1080613A publication Critical patent/JPH1080613A/en
Priority to US09/272,569 priority patent/US5993502A/en
Application granted granted Critical
Publication of JP3346991B2 publication Critical patent/JP3346991B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Filtering Materials (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、金属フィルタ及び
その製造方法に関し、詳しくは、金属粒子を筒状に形成
して焼結形成された金属フィルタ及びその製造方法に関
する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a metal filter and a method of manufacturing the same, and more particularly, to a metal filter formed by sintering metal particles into a cylindrical shape and a method of manufacturing the same.

【0002】[0002]

【従来の技術】従来、金属フィルタにおいては、その肉
厚全体を全域に一様の透過孔径分布を有する濾過層で形
成したものを用いていた。そして、その製造に当たって
その透過孔径分布を制御するのに、焼結する金属粒子の
粒度分布の調整と、焼結度(つまり、焼き締めの程度)
の調整が行われていた。
2. Description of the Related Art Conventionally, a metal filter has been used in which the entire wall thickness is formed by a filtration layer having a uniform distribution of pore diameters over the entire area. Then, in controlling the diameter distribution of the perforated holes in the production, adjustment of the particle size distribution of the metal particles to be sintered and the degree of sintering (that is, the degree of baking) are performed.
Had been adjusted.

【0003】[0003]

【発明が解決しようとする課題】しかし、前記焼結度
は、被焼結体である金属フィルタの加熱処理される焼結
温度と、その焼結温度下での保持時間に依存し、同時に
多数の被焼結体を焼結する場合、個々の被焼結体の温度
を正確に把握することは困難であることから、その調整
も困難であり、その結果、金属フィルタの焼結度の調整
は極めて困難となり、透過孔径分布が前記焼結度によっ
て左右されるので、透過孔径の精度を高めようとすれ
ば、歩留りが極端に悪くなるという問題があった。つま
り、焼結のために金属粒子の仮成形体を高温度に維持す
ると、前記金属粒子間の焼結の進行に伴って、前記金属
粒子間の間隙は次第に縮小し、例えば微細孔径の金属フ
ィルタを焼結形成するために小粒径の金属粒子を焼結す
る場合には、過度の焼結によって、透過孔径が小さくな
り、或いは、透過孔が潰れて通気度の低下を招き、通気
度の維持のために焼結温度を下げ、或いは焼結時間を短
縮して焼結度を低下させると、焼結不足から金属フィル
タの強度不足を招くという問題も有している。そこで、
この強度不足を補うために、充分な強度を金属フィルタ
に付与するために、小粒径の金属粒子で形成された濾過
層を厚くすれば、通気抵抗が高くなり、通気圧損を適度
に維持するために濾過面積を大きくしなければならなく
なるという問題を生ずる。本発明は、上記の問題点を解
決し、焼結体としての強度を維持しながら、透過孔径分
布の制御が可能で、除塵設備等の設備の小型化を可能と
する、製造が容易な金属フィルタ及びその製造方法を提
供することを目的とする。
However, the degree of sintering depends on the sintering temperature at which the metal filter to be sintered is heated and the holding time at the sintering temperature. When sintering the sintering body, it is difficult to accurately grasp the temperature of the individual sintering body, so that the adjustment is also difficult, and as a result, the sintering degree of the metal filter is adjusted. Is extremely difficult, and the distribution of the through-hole diameters is affected by the sintering degree. Therefore, there is a problem that the yield is extremely deteriorated if the accuracy of the through-hole diameter is to be improved. That is, when the preformed body of metal particles is maintained at a high temperature for sintering, the gap between the metal particles gradually decreases with the progress of sintering between the metal particles, for example, a metal filter having a fine pore diameter. When sintering metal particles having a small particle size in order to form a sintered body, excessive sintering reduces the diameter of the permeation hole, or causes the permeation hole to be crushed, resulting in a decrease in the air permeability, and a decrease in the air permeability. If the sintering temperature is lowered for maintenance or the sintering time is shortened to lower the sintering degree, there is also a problem that insufficient sintering leads to insufficient strength of the metal filter. Therefore,
In order to compensate for the insufficient strength, if the thickness of the filtration layer formed of metal particles having a small particle diameter is increased in order to impart sufficient strength to the metal filter, the ventilation resistance increases, and the ventilation pressure loss is appropriately maintained. Therefore, there is a problem that the filtration area must be increased. The present invention solves the above-mentioned problems, and can control the distribution of the transmission hole diameter while maintaining the strength as a sintered body, and can reduce the size of equipment such as dust removal equipment. An object of the present invention is to provide a filter and a manufacturing method thereof.

【0004】[0004]

〔第1特徴構成の作用効果〕[Operation and effect of first characteristic configuration]

上記第1特徴構成によれば、濾過部の透過孔径(最小阻
止子粒径を決定する。)を容易に制御できて、同時に充
分な強度を有し、濾過面積を大きくすることなく通気圧
損を低く維持できる金属フィルタを容易に製造できる。
さらに、耐熱性を有するので、可燃性の粉塵による目詰
まりは、加熱することによって内部で燃焼させることに
より除去することが可能である。つまり、金属フィルタ
を、濾過部と支持部とを表裏一体に焼結して形成してあ
るので、前記濾過部を透過孔径に対応する小径の濾過部
形成材料粒子で形成して透過孔径の制御を容易とし、前
記支持部を専ら強度を維持するように、前記濾過部の透
過孔径よりも大きな透過孔径に対応する前記濾過部形成
材料粒子よりも大径の支持部形成金属粒子で形成するこ
とで、前記支持部の通気抵抗を低くしながら、充分な強
度を金属フィルタに付与することができる。例えば、前
記濾過部形成材料粒子に焼結温度の高い材料を用いて焼
結度を高めないで焼結するようにすれば、前記濾過部の
透過孔径の制御が容易となり、前記支持部形成金属粒子
に前記濾過部形成材料粒子の材料に比して焼結温度の低
い材料を用いて充分な焼結度を維持するようにすれば、
前記支持部の強度は充分に確保でき、同時に、前記濾過
部を充分に支持できる。殊に、前記濾過部と前記支持部
とを一体的に等方圧加圧下で焼結して形成してあり、高
圧下で焼結すれば、比較的低い温度で充分に焼結するの
で、金属フィルタの強度は充分に維持できる。従って、
前記濾過部の厚さを薄くして、且つ、前記支持部の通気
抵抗を低く抑えることができるから、濾過面積を大きく
しないでも金属フィルタの通気圧損を低く維持すること
が可能になる。従って、除塵設備等の金属フィルタを使
用する設備の小型化が可能となる。また、支持部形成金
属粒子を、濾過部形成材料粒子の平均粒子径の3倍以下
の平均粒子径のものとしてあることによって、後述する
第4特徴構成と同様に、濾過部と支持部に異なる役割分
担をさせながら、通気圧損を低く維持しつつ、目的に応
じた濾過精度を備え、しかも、高強度を有する一体形成
した金属フィルタを容易に製造することが可能になる。
つまり、濾過部の平均粒子径の3倍以下の平均粒子径の
金属粒子で支持部を構成すれば、濾過部形成粒子が支持
部形成金属粒子の間に入り込むことを防止しながら、支
持部の強度を好適に維持することが可能となる。その結
果、金属フィルタの強度を維持しながら、透過孔径分布
の制御を可能とし、設備の小型化を可能とする金属フィ
ルタの製造を容易とした。また、金属フィルタの強度を
適度に維持しながら、金属フィルタの濾過面積を大きく
しないでも通気圧損の増大を抑制できるようになった。 〔第2特徴構成及び作用効果〕 尚、本発明の金属フィルタ第2特徴構成は、請求項2
に記載の如く、前記第1特徴構成における濾過部と、支
持部との間に、目開きが濾過部形成材料粒子の最小粒子
径以下である網状金属体を介在させた状態で一体に焼結
形成された点にあり、濾過部を薄く形成しても焼結前の
成形体の取扱いが容易で、通気抵抗を低く抑えた金属フ
ィルタを製造できる。つまり、前記濾過部と支持部との
間に網状金属体を介在させることにより、濾過部形成材
料粒子の支持部形成金属粒子中への混入が前記網状金属
体によって阻止されるので、前記濾過部と前記支持部と
を容易に層分けできる。殊に、前記網状金属体を金網で
構成すれば、金網の織り目によって隙間が確保できるの
で、通気性は一層良好になる。しかも、焼結前の予備成
形後に、前記網状金属体が予備成形体の保形材として機
能するので、前記予備焼結体の取扱が容易になる。前記
濾過部の粒子径を所定の最小阻止粒径に適合させてお
き、前記支持部を焼結後に充分な通気性を維持できる粒
径にしておけば、前記網状金属体に支持される前記濾過
部は薄いものとしても焼結成形可能であり、通気抵抗を
低く抑えた金属フィルタを製造できる。さらに、前記網
状金属体の材料を選択することによって、前記支持部と
前記濾過部とを異なる材料からなる金属粒子で形成する
ことも容易となる。この場合、前記網状金属体を前記濾
過部と前記支持部の両部に共に接合性のよい材料で構成
すれば、前記両部の一体化はさらに強固なものとなる。
つまり、透過孔径を制御しやすい材料から成る金属粒子
で前記濾過部を形成し、焼結性の良好な材料から成る金
属粒子を前記支持部に用いることが容易となる。その結
果、金属フィルタの強度を好適に維持しながら、透過孔
径分布の制御を可能とし、濾過面積を大きくすることな
く通気圧損を低く維持できる金属フィルタの製造が容易
となる。 〔第3特徴構成及び作用効果〕 また、本発明の金属フィルタ第3特徴構成は、請求項
3に記載の如く、前記第1又は第2特徴構成における濾
過部を、透過孔径の分布幅の平均透過孔径に対する比、
即ち、透過孔径の体積基準積算分布曲線における累積頻
度95%の透過孔径D95と累積頻度5%の気透過孔径D
5 との差の、累積頻度50%の透過孔径D50(平均透過
孔径に相当する。)に対する比(以下、透過孔径分布比
率という。)が、 (D95−D5 )/D50≦1.5 の関係を満たす透過孔径分布を示すものとしてある点に
あり、最小阻止粒径にを小さくしても通気抵抗を必要以
上に高めないようにできる。つまり、濾過部の透過孔径
の分布を狭くして、最小阻止粒径に対して必要以上に小
さい透過孔径の透過孔が形成されることを防止できる。
即ち、前記濾過部における最小阻止粒径は、累積頻度1
00%の透過孔径に相当し、微小孔径の透過孔の形成を
防止することによって、フィルタの特性を発揮させなが
ら、通気抵抗を高めないようにすることができる。上記
透過孔径分布比率は、焼結前の粒子の、上記と同様に求
める焼結する粒子の体積基準積算分布曲線における累積
頻度95%の粒径R95と累積頻度5%の粒径R5 との差
の、累積頻度50%の粒径R50(平均粒子径に相当す
る。)に対する、(R95−R5 )/R50で表される粒径
分布比率に強い相関を示すもので、平均粒子径と前記粒
径分布比率を制御することによって容易に透過孔径分布
を制御できる。これは、発明者らの新たな知見に基づく
ものである。尚、前記透過孔径分布比率は、1以下に抑
えることが好ましく、分級の手間を省くには、0.8〜
1の範囲内にあることが好ましい。その結果、金属フィ
ルタの通気圧損を一層容易に低く維持しながら、濾過精
度を高くすることができる。 〔第4特徴構成及び作用効果〕 また、本発明の金属フィルタ第4特徴構成は、請求項
4に記載の如く、前記第2又は第3特徴構成における網
状金属体の目開きを、前記濾過部形成材料粒子の平均粒
子径の30%以上としてある点にあり、このようにすれ
ば、網状金属体を介在させても金属フィルタの通気抵抗
は高くならない。つまり、焼結体に形成される透過孔径
は、焼結する粒子の平均粒径の30%以下であるのが通
常で、前記網状金属体の目開きを、前記濾過部の粒子径
の30%以上すれば前記濾過部の透過孔径以下になるこ
とがなく、通気度はさらに良好なものとなる。その結
果、通気圧損を低く維持できる金属フィルタが得られ
る。 〔第特徴構成及び作用効果〕 そして、本発明の金属フィルタの第特徴構成は、請求
に記載の如く、前記第1特徴構成〜第特徴構成の
何れかにおける濾過部形成材料粒子及び記支持部形成金
属粒子が共に耐高温腐食性金属からなるものである点に
あり、このようにすることによって、高温腐食生ガスの
濾過にも使用可能な金属フィルタを容易に製造すること
ができるようになった。つまり、金属フィルタを、例え
ばインコネル、ハステロイ等の耐高温腐食性金属で形成
することによって、充分な高温耐食性を有するフィルタ
とすることが可能になる。因みに、前記インコネル、ハ
ステロイ等の焼結は極めて困難なものであるとされてい
るが、等方圧加圧下で焼結することによりこのような金
属フィルタの焼結が可能になる。その結果、例えば、廃
棄物焼却処理炉の高温排ガスを冷却することなく除塵す
ることも可能な金属フィルタとすることができた。
According to the first characteristic configuration, the diameter of the permeation hole (determining the minimum inhibitor particle size) of the filtration section can be easily controlled, and at the same time, the filter has sufficient strength and can reduce the ventilation pressure loss without increasing the filtration area. A metal filter that can be kept low can be easily manufactured.
Further, since it has heat resistance, clogging due to combustible dust can be removed by burning inside by heating. In other words, since the metal filter is formed by sintering the filtration part and the support part integrally on the front and back, the filtration part is formed of small-diameter filtration part forming material particles corresponding to the diameter of the transmission hole to control the diameter of the transmission hole. In order to easily maintain the strength of the supporting portion, the supporting portion is formed of metal particles having a larger diameter than the filtering portion forming material particles corresponding to the transmitting hole diameter larger than the transmitting hole diameter of the filtering portion. Thus, sufficient strength can be imparted to the metal filter while lowering the ventilation resistance of the support portion. For example, if a material having a high sintering temperature is used for the filtration portion forming material particles and sintering is performed without increasing the sintering degree, the diameter of the permeation hole of the filtration portion can be easily controlled, and the support portion forming metal can be easily formed. If a sufficient sintering degree is maintained by using a material having a lower sintering temperature as compared to the material of the filtration part forming material particles,
The strength of the supporting portion can be sufficiently ensured, and at the same time, the filtering portion can be sufficiently supported. In particular, the filtration unit and the support unit are integrally formed by sintering under isostatic pressure, and when sintering under high pressure, it sinters sufficiently at a relatively low temperature. The strength of the metal filter can be sufficiently maintained. Therefore,
Since the thickness of the filtration section can be reduced and the ventilation resistance of the support section can be kept low, it is possible to keep the ventilation pressure loss of the metal filter low without increasing the filtration area. Therefore, it is possible to reduce the size of equipment using a metal filter, such as dust removal equipment. Also, the support part forming gold
Genus particles, 3 times or less of the average particle diameter of the filtration part forming material particles
By having an average particle diameter of
Similar to the fourth feature configuration, different roles are assigned to the filtration unit and the support unit.
While maintaining low ventilation pressure loss,
Integrated with high filtration accuracy and high strength
It is possible to easily manufacture a metal filter that has been manufactured.
In other words, the average particle diameter of three times or less the average particle diameter
If the supporting part is composed of metal particles, the filtering part forming particles are supported
While preventing it from entering between the part forming metal particles.
It is possible to maintain the strength of the holding portion suitably. As a result, it is possible to control the transmission hole diameter distribution while maintaining the strength of the metal filter, thereby facilitating the manufacture of a metal filter capable of downsizing equipment. Also, increase the strength of the metal filter.
Increase the filtration area of the metal filter while maintaining an appropriate level
Without this, the increase in the ventilation pressure loss can be suppressed. [Second characteristic configuration and operation and effect] The second characteristic configuration of the metal filter of the present invention is described in claim 2.
As described in the above, the sintering is performed integrally in a state where a mesh-like metal body having an opening of not more than the minimum particle diameter of the filtration part forming material particles is interposed between the filtration part and the support part in the first characteristic configuration. This is because the formed body before sintering is easy to handle even if the filtration part is formed thin, and a metal filter with low airflow resistance can be manufactured. That is, by interposing a mesh-like metal body between the filtration unit and the support unit, mixing of the filtration-section-forming material particles into the support-section-forming metal particles is prevented by the mesh-like metal body. And the support portion can be easily separated into layers. In particular, if the mesh metal body is formed of a wire mesh, a gap can be ensured by the weave of the wire mesh, so that the air permeability is further improved. In addition, after the preforming before sintering, the reticulated metal body functions as a shape retainer for the preformed body, so that the presintered body is easily handled. If the particle size of the filtration unit is adjusted to a predetermined minimum blocking particle size and the support unit is set to a particle size that can maintain sufficient air permeability after sintering, the filtration supported by the mesh metal body Even if the portion is thin, it can be formed by sintering, and a metal filter with low airflow resistance can be manufactured. Further, by selecting the material of the net-like metal body, it becomes easy to form the support portion and the filtration portion with metal particles made of different materials. In this case, if the reticulated metal body is formed of a material having good bonding properties to both the filtering part and the support part, the integration of the two parts is further strengthened.
That is, the filtering section is formed of metal particles made of a material whose transmission hole diameter can be easily controlled, and metal particles made of a material having good sinterability can be easily used for the support section. As a result, it is possible to control the distribution of the permeation pores while maintaining the strength of the metal filter suitably, and it becomes easy to manufacture a metal filter capable of maintaining a low ventilation pressure loss without increasing the filtration area. [Third characteristic configuration and operation and effect] In the third characteristic configuration of the metal filter according to the present invention, as described in claim 3, the filtering unit in the first or second characteristic configuration is provided with a distribution width of a transmission hole diameter. The ratio to the average transmission pore size,
That is, in the volume-based cumulative distribution curve of the through-hole diameter, the through-hole diameter D 95 at the cumulative frequency of 95 % and the air-through hole diameter D at the cumulative frequency of 5%.
The ratio of the difference from 5 to the permeation pore diameter D 50 (corresponding to the average permeation pore diameter) at a cumulative frequency of 50% (hereinafter referred to as the permeation pore diameter distribution ratio) is (D 95 −D 5 ) / D 50 ≦ 1. In this respect, it is possible to prevent the ventilation resistance from increasing more than necessary even if the minimum blocking particle size is reduced. In other words, it is possible to narrow the distribution of the diameters of the permeation holes in the filtration unit, thereby preventing the formation of permeation holes having a permeation hole diameter smaller than necessary with respect to the minimum blocking particle diameter.
That is, the minimum blocking particle diameter in the filtration section is the cumulative frequency 1
By preventing formation of a transmission hole having a small diameter, which corresponds to a transmission hole diameter of 00%, it is possible to prevent the airflow resistance from being increased while exhibiting the characteristics of the filter. The distribution ratio of the permeation pore diameters is the particle size R 95 of the cumulative frequency of 95% and the particle size R 5 of the cumulative frequency of 5% in the volume-based cumulative distribution curve of the particles to be sintered obtained in the same manner as described above. difference, relative cumulative frequency of 50% particle size R 50 (corresponding to the average particle diameter.), shows a strong correlation particle size distribution ratio expressed by (R 95 -R 5) / R 50, By controlling the average particle size and the particle size distribution ratio, the distribution of the permeation pore size can be easily controlled. This is based on the inventors' new knowledge. In addition, it is preferable that the transmission hole diameter distribution ratio is suppressed to 1 or less.
It is preferably within the range of 1. As a result, the filtration accuracy can be increased while maintaining the ventilation pressure loss of the metal filter low more easily. [Fourth characteristic configuration and operation and effect] According to a fourth characteristic configuration of the metal filter of the present invention, as described in claim 4, the mesh of the mesh-like metal body in the second or third characteristic configuration is removed by the filtration. This is at least 30% of the average particle diameter of the part forming material particles. In this case, the ventilation resistance of the metal filter does not increase even if the mesh metal body is interposed. That is, the diameter of the permeation hole formed in the sintered body is usually 30% or less of the average particle diameter of the particles to be sintered. If it does above, it will not become smaller than the diameter of the permeation hole of the said filtration part, and the air permeability will be better. As a result, a metal filter that can maintain low ventilation pressure loss is obtained. Fifth characterizing feature and advantages] The fifth characterizing feature of the metal filter of the present invention, as described in claim 5, the filtration section-forming material particles in any of the first characterizing feature to the fourth characterizing feature And the supporting portion forming metal particles are both made of a high-temperature corrosion-resistant metal. By doing so, it is possible to easily manufacture a metal filter that can also be used for filtering hot corrosive raw gas. Now you can. That is, by forming the metal filter with a high-temperature corrosion-resistant metal such as Inconel or Hastelloy, for example, a filter having sufficient high-temperature corrosion resistance can be obtained. Incidentally, sintering of Inconel, Hastelloy, and the like is considered to be extremely difficult, but sintering under isostatic pressure enables sintering of such a metal filter. As a result, for example, it was possible to obtain a metal filter capable of removing high-temperature exhaust gas from a waste incineration furnace without cooling it without cooling.

【0005】〔第特徴構成〕 本発明の金属フィルタの製造方法は、請求項に記載の
如く、円筒状の成形型内面上に濾過部形成材料粒子で濾
過部形成粒子層を形成し、前記濾過部形成粒子層の内側
に前記濾過部形成材料粒子の平均粒子径の30%以上
で、かつ、前記濾過部形成材料粒子の最小粒子径以下の
目開きの網状金属体を配置し、前記網状金属体の内側
に、前記濾過部形成材料粒子の平均粒子径に対して、2
倍以上の平均粒子径の支持部形成金属粒子で支持部形成
粒子層を形成し、前記濾過部形成粒子層と、前記網状金
属体と、前記支持部形成粒子層とを一体に仮成形して筒
状成形体を形成し、前記筒状成形体を等方圧加圧下で焼
結する点にある。 〔第特徴構成の作用効果〕 上記第特徴構成によれば、金属フィルタを容易に製造
できるようになる。即ち、濾過部と支持部に異なる役割
分担をさせながら、一体形成した金属フィルタを容易に
製造することが可能になる。つまり、濾過部と支持部と
に異なる役割分担をさせながら、支持部の透過孔径を十
分に大きくして、前記支持部の厚さに関りなく通気圧損
を低く維持しつつ、目的に応じた濾過精度を備え、しか
も、高強度を有する一体成形した金属フィルタを容易に
製造することが可能になる。従って、通気抵抗を充分に
低く抑えながら、金属フィルタの強度を充分に維持する
ことが可能となる。その結果、金属フィルタの通気圧損
を一層低く維持できるようになる。
[0005] Sixth, characterized Configuration of producing how the metal filter of the present invention, as described in claim 6, to form a filtered portion formed particle layer in the filtration section-forming material particles in a cylindrical mold on the inner surface A mesh metal body having an aperture of 30% or more of the average particle diameter of the filtration part forming material particles and not more than the minimum particle diameter of the filtration part formation material particles is arranged inside the filtration part formation particle layer; On the inside of the reticulated metal body, 2 to the average particle diameter of the filtration portion forming material particles
Forming a support part forming particle layer with a support part forming metal particle having an average particle diameter of twice or more, temporarily forming the filtration part forming particle layer, the reticulated metal body, and the support part forming particle layer integrally. A point is that a cylindrical molded body is formed, and the cylindrical molded body is sintered under isotropic pressure. According to the sixth characterizing feature [effects of the sixth characterizing feature], so the metallic filter can be easily manufactured. That is, it is possible to easily manufacture an integrally formed metal filter while assigning different roles to the filtering unit and the supporting unit. In other words, while the different roles in the a support section Filtration section, the transmission hole diameter of the support portion is sufficiently large, while maintaining a low Sekiri without ventilation pressure loss in the thickness of the support portion, depending on the purpose It is possible to easily manufacture an integrally molded metal filter having high filtration accuracy and high strength. Therefore, it is possible to sufficiently maintain the strength of the metal filter while keeping the ventilation resistance sufficiently low. As a result, the ventilation pressure loss of the metal filter can be kept lower.

【0006】[0006]

【発明の実施の形態】上記本発明の金属フィルタの実施
の形態の一例について、以下に、図面を参照しながら説
明する。廃棄物焼却炉の排ガス除塵に用いられる本発明
の金属フィルタの一例を図1に示し、その要部の断面を
図2に示す。図1に示したように、金属フィルタFは金
属粒子を筒状に形成して焼結形成されたフィルタ本体1
と、前記フィルタ本体1の一端部を閉止するインコネル
製の底板2と、他端部に取り付けられた同じくインコネ
ル製のフランジ3とを、ニッケルロウ付けして一体に構
成されている。この金属フィルタFは、廃棄物焼却炉の
排ガスを外側から内側に向けて流通させるものである。
このように構成することによって、バグフィルタのバグ
に代えて用いることができ、高温排ガス中の煤塵除去及
び高圧ガスによる逆圧洗浄が可能である。しかも、後述
のように、通気圧損が低いので、従来のバグフィルタに
比して濾過面積を小さくすることが可能で、逆圧洗浄に
よって目開きに変化を生ずるおそれもないので、長期安
定的に除塵手段として使用できる。
DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the above-described metal filter of the present invention will be described below with reference to the drawings. FIG. 1 shows an example of the metal filter of the present invention used for exhaust gas dust removal of a waste incinerator, and FIG. 2 shows a cross section of a main part thereof. As shown in FIG. 1, a metal filter F is a filter body 1 formed by sintering metal particles into a cylindrical shape.
And a bottom plate 2 made of Inconel for closing one end of the filter body 1 and a flange 3 also made of Inconel attached to the other end, are integrally formed by nickel brazing. The metal filter F distributes exhaust gas from the waste incinerator from the outside to the inside.
With this configuration, the bag filter can be used in place of the bag of the bag filter, so that dust removal in high-temperature exhaust gas and back-pressure cleaning with high-pressure gas can be performed. Moreover, as described later, since the ventilation pressure loss is low, the filtration area can be reduced as compared with the conventional bag filter, and there is no possibility that the aperture will be changed by back pressure cleaning, so that the filter can be stably used for a long time. Can be used as dust removing means.

【0007】前記フィルタ本体1は、図2に示すよう
に、厚さ約0.6mmの濾過部1aと、その内側に配置
された厚さ約1.4mmの支持部1bとを、その間の境
界部1cに厚さ約0.1mmの網状金属体7が介在した
状態で表裏一体に等方圧加圧下で焼結形成した外径約1
00mmの円筒である。
As shown in FIG. 2, the filter body 1 has a filtering part 1a having a thickness of about 0.6 mm and a supporting part 1b having a thickness of about 1.4 mm disposed inside the filtering part 1a. An outer diameter of about 1 mm formed by sintering under pressure under isotropic pressure integrally with the front and back sides in a state where a mesh metal body 7 having a thickness of about 0.1 mm is interposed in the portion 1c.
It is a 00 mm cylinder.

【0008】前記濾過部1aは、小径の濾過部形成材料
粒子5としてのハステロイ粒子5Aを成層して形成して
あり、前記支持部1bは、前記ハステロイ粒子5Aより
も大径の支持部形成金属粒子6としてのインコネル粒子
6Aを、前記網状金属体7の内側に成層して形成してあ
る。前記網状金属体7はニッケル金網7Aで形成してあ
る。前記ハステロイ、前記インコネル共にニッケル基の
耐高温腐食性金属であり、前記間に介在するニッケル金
網7Aから成る網状金属体7を中間金属として良好に焼
結される。
The filtering portion 1a is formed by layering Hastelloy particles 5A as small-diameter filtering portion forming material particles 5, and the supporting portion 1b is formed of a supporting portion forming metal particle having a larger diameter than the Hastelloy particles 5A. Inconel particles 6 </ b> A serving as particles 6 are formed by laminating inside the reticulated metal body 7. The reticulated metal body 7 is formed of a nickel wire mesh 7A. Both Hastelloy and Inconel are nickel-based high-temperature corrosion-resistant metals, and are favorably sintered using the reticulated metal body 7 composed of a nickel wire mesh 7A interposed therebetween as an intermediate metal.

【0009】前記濾過部1aを形成する前記ハステロイ
粒子5Aは、ガスアトマイズ法で製造したもので、分級
してその粒子径を90〜100μmの範囲に収まる粒径
(−145+170メッシュ)とし、焼結された後の透
過孔径を17〜20μmとして、最小阻止粒径が17μ
mとなるようにしてある。そして、その内側に介在させ
たニッケル金網7Aは、線径0.053mmのニッケル
線を編成して形成してあり、前記ハステロイ粒子5Aの
最小粒子径である90μmよりも小さく、且つ、前記濾
過部1aの透過孔径よりも大きい74μmの目開きのも
の(JIS規格200メッシュ標準篩相当)を用いてい
る。さらに、その内側に形成する前記支持部1bを形成
する前記インコネル粒子6Aもガスアトマイズ法で製造
したもので、篩分級してその粒子径を300〜420μ
mの範囲に収まる粒径(−36+48メッシュ)とし、
焼結された後の透過孔径を50〜100μmとして、前
記支持部1bの厚さを大にしても通気抵抗が高まらない
ようにしてある。
The Hastelloy particles 5A forming the filtration part 1a are manufactured by a gas atomizing method, and are classified to have a particle diameter (-145 + 170 mesh) within a range of 90 to 100 μm, and are sintered. The diameter of the transmission hole after the etching is 17 to 20 μm, and the minimum blocking particle size is 17 μm.
m. The nickel wire mesh 7A interposed inside is formed by knitting a nickel wire having a wire diameter of 0.053 mm, is smaller than 90 μm which is the minimum particle diameter of the Hastelloy particles 5A, and A mesh having a mesh size of 74 μm, which is larger than the transmission hole diameter of 1a (equivalent to JIS standard 200 mesh standard sieve) is used. Further, the Inconel particles 6A forming the support portion 1b formed inside thereof are also manufactured by a gas atomization method, and are classified by sieve to have a particle diameter of 300 to 420 μm.
m (-36 + 48 mesh).
The diameter of the through-hole after sintering is set to 50 to 100 μm so that the ventilation resistance does not increase even if the thickness of the support portion 1 b is increased.

【0010】因みに、透過孔径が100μmであれば、
ニッケル金網7Aを介在させていなければその透過孔の
中にハステロイ粒子5Aが入り込んで、前記透過孔を閉
塞させることがある。つまり、網状金属体7であるニッ
ケル金網7Aを用いない場合には、支持部1bを形成す
るインコネル粒子6Aの粒径範囲は、濾過部1aを形成
するハステロイ粒子5Aが前記インコネル粒子6Aの間
に充填されないように設定する必要がある。例えば、濾
過部形成材料粒子6の平均粒子径が100μmで、その
粒径分布比率(濾過部形成材料粒子5の粒径の体積基準
積算分布曲線における累積頻度95%の粒径と累積頻度
5%の粒径との差を平均粒径で除した値)を1程度とし
たハステロイ粒子5Aを焼結する場合には、支持部形成
金属粒子6の平均粒子径が300μmを超えないように
することが望ましい。尚、上述の濾過部1aに形成され
た透過孔径は27μmで、その透過孔径分布比率は約
0.1であった。このようにすることによって、最小阻
止粒径が約30μmの充分な強度を有し、且つ、通気抵
抗も低く、高温腐食のおそれのない金属フィルタを容易
に製造できるようになる。
By the way, if the diameter of the transmission hole is 100 μm,
If the nickel wire mesh 7A is not interposed, the Hastelloy particles 5A may enter the through-holes and close the through-holes. That is, when the nickel metal net 7A, which is the reticulated metal body 7, is not used, the particle size range of the Inconel particles 6A forming the support portion 1b is such that the Hastelloy particles 5A forming the filtration portion 1a are located between the Inconel particles 6A. It must be set so that it is not filled. For example, the average particle size of the filtration part forming material particles 6 is 100 μm, and the particle size distribution ratio (the particle size of the cumulative frequency 95% and the cumulative frequency 5% in the volume-based cumulative distribution curve of the particle size of the filtration part forming material particles 5) In the case of sintering Hastelloy particles 5A having a value obtained by dividing the difference from the average particle size by an average particle size) of about 1, the average particle diameter of the support-forming metal particles 6 should not exceed 300 μm. Is desirable. In addition, the diameter of the permeation hole formed in the above-mentioned filtration part 1a was 27 μm, and the distribution ratio of the permeation hole diameter was about 0.1. This makes it possible to easily produce a metal filter having a sufficient strength with a minimum blocking particle size of about 30 μm, low airflow resistance, and no risk of high-temperature corrosion.

【0011】上記本発明の金属フィルタの製造方法の一
例について以下に図3〜7に沿って説明する。先ず、図
3に示すように、円筒状の成形型としての内径100m
mの遠心成形用金型20を高速回転させながら、その内
面上に、予め網篩を用いて145メッシュ篩下、170
メッシュ篩上(約90〜100μmの粒径範囲)に分級
した濾過部形成材料粒子5としてのハステロイ粒子5A
を、水を分散媒Lとして分散剤とバインダを配合した濾
過部形成用スラリ12として注入する。前記遠心成形用
金型20の回転数は、注入される前記濾過部形成材料粒
子5に及ぼされる遠心場が充分になる程度にする。前記
遠心成形用金型20は回転枠体20bに金型本体20a
を内嵌し、その両端に堰21を配置し、両堰21,21
の両側に固定材20cを配置して、両固定材20c,2
0cの両側から端板22を前記回転枠体20bに締め付
け固定することによって、前記金型本体20aを前記回
転枠体20bに固定してある。前記遠心成形用金型20
はは両端部寄りに各一対のローラ23で支持してあり、
前記ローラ23の駆動回転によって回転駆動される。前
記遠心成形用金型20の前記金型本体20a取付け位置
を覆うヒータブロックHが備えられており、前記ヒータ
ブロックHは周方向に二分割構成されたヒータカバー2
4の内側にヒータ25を配置してある。所定量の前記濾
過部形成用スラリ12を、注入樋30のホッパ30bに
供給して、懸濁状態を維持しながら注入口30aを前記
堰21の材料注入口21aから差し込んで、前記金型本
体20aの内側に注入し、前記濾過部形成用スラリ12
の注入が終わると、前記注入樋30を引退させ、そのま
ま前記遠心成形用金型20の回転を維持し、前記濾過部
形成用スラリ12を重力分離し、濾過部形成材料粒子5
を分散媒Lから分離して、前記金型本体20aの内面上
に沈積させ、沈降層Dを形成する(図4参照)。前記沈
降層Dが形成され始めると、前記ヒータ25により過熱
すると同時に、前記遠心成形用金型20の端部の端板2
2の開口部から空気吹込管26を挿入し、前記堰21の
内部に乾燥用空気を吹き込み(図4参照)、前記濾過部
形成用スラリ12の分散媒Lを蒸発させて、前記金型本
体20aの内面に濾過部形成粒子層8を形成する(図5
参照)。前記濾過部形成粒子層8の形成を終わると、前
記空気吹込管26を引き抜き、図5に示すように、細く
巻いた網状金属体7としてのJIS規定の200メッシ
ュ標準篩相当のニッケル金網7Aを前記端板22の開口
から前記材料注入口21aを経て前記堰21の内部に挿
入し、前記遠心成形用金型20と共に回転させて遠心力
で展開させ、前記濾過部形成粒子層8の内側に前記網状
金属体7として、ニッケル金網7Aを配置する。前記ニ
ッケル金網7Aの配置が終わると、図6に示すように、
ホッパ30bに前記濾過部形成用スラリ12と同様に、
36メッシュ篩下、48メッシュ篩上に分級(約300
〜400μm)して調製した所定量の支持部形成用スラ
リ13を供給して、懸濁状態を維持しながら注入樋30
の注入口30aを前記堰21の材料注入口21aから差
し込んで、前記ニッケル金網7Aの内側に前記支持部形
成用スラリ13を注入し、そのまま前記遠心成形用金型
20の回転を維持し、前記支持部形成用スラリ13を重
力分離し、支持部形成金属粒子6を分散媒Lから分離し
て、前記ニッケル金網7Aの内面上に沈積させ、前記濾
過部形成用スラリ12と同様にして乾燥させ、支持部形
成金属粒子層9を形成する。尚、前記濾過部形成粒子層
8の内部に前記支持部形成用スラリ13を注入する際
に、前記濾過部形成粒子層8の内面に前記ニッケル金網
7Aが存在するので、前記濾過部形成粒子層8は洗われ
ることなく、確実に層の厚さを均一に維持した分離した
層が形成される。前記濾過部形成用スラリ12及び支持
部形成用スラリ13に配合する分散剤は、分散媒Lを蒸
発させる際に容易に蒸散するものが好ましく、バインダ
は、等方圧加圧焼結に際して前記濾過部形成材料粒子
5、前記支持部形成金属粒子6、網状金属体7の焼結に
障害を及ぼさないものであることが必要であるが、水溶
性粘結剤、水溶性樹脂等が使用可能である。
An example of a method for manufacturing the metal filter of the present invention will be described below with reference to FIGS. First, as shown in FIG.
m, while rotating the centrifugal molding die 20 at a high speed, a 145 mesh sieve was previously placed on the inner surface of the
Hastelloy particles 5A as filtration part forming material particles 5 classified on a mesh sieve (particle size range of about 90 to 100 μm)
Is injected as a slurry 12 for forming a filtration part in which a dispersant and a binder are blended using water as a dispersion medium L. The rotation speed of the centrifugal molding die 20 is set to such an extent that the centrifugal field exerted on the filtration part forming material particles 5 to be injected is sufficient. The centrifugal molding die 20 is attached to the rotating frame 20b by the die main body 20a.
And weirs 21 are arranged at both ends thereof,
The fixing members 20c are disposed on both sides of the fixing members 20c, 2c.
The mold body 20a is fixed to the rotary frame 20b by fastening the end plate 22 to the rotary frame 20b from both sides of the rotary frame 20b. The centrifugal molding die 20
Are supported by a pair of rollers 23 near both ends,
The roller 23 is driven to rotate by the driving rotation of the roller 23. A heater block H is provided to cover the mounting position of the mold main body 20a of the centrifugal mold 20. The heater block H is divided into two in the circumferential direction.
4, a heater 25 is arranged inside. A predetermined amount of the slurry 12 for forming a filtration part is supplied to a hopper 30b of an injection trough 30, and an injection port 30a is inserted from a material injection port 21a of the weir 21 while maintaining a suspension state. 20a, and the slurry 12 for forming the filtration section is injected.
When the injection is completed, the injection trough 30 is retired, the rotation of the centrifugal molding die 20 is maintained as it is, and the slurry 12 for forming the filtration portion is gravity-separated.
Is separated from the dispersion medium L and is deposited on the inner surface of the mold body 20a to form a settling layer D (see FIG. 4). When the sedimentation layer D starts to be formed, it is overheated by the heater 25 and at the same time the end plate 2 at the end of the centrifugal molding die 20.
2, an air blowing pipe 26 is inserted through the opening, and drying air is blown into the weir 21 (see FIG. 4) to evaporate the dispersion medium L of the filtration part forming slurry 12, thereby forming the die body. A filtration part forming particle layer 8 is formed on the inner surface of the substrate 20a (FIG. 5).
reference). When the formation of the filtration portion forming particle layer 8 is completed, the air blowing tube 26 is pulled out, and as shown in FIG. 5, a nickel wire mesh 7A equivalent to a JIS standard 200 mesh standard sieve as a finely wound mesh metal body 7 is formed. The end plate 22 is inserted into the weir 21 through the material injection port 21a through the opening, and rotated with the centrifugal molding die 20 to be developed by centrifugal force. A nickel wire mesh 7A is arranged as the mesh metal body 7. When the arrangement of the nickel wire mesh 7A is completed, as shown in FIG.
In the hopper 30b, similarly to the filtration part forming slurry 12,
Classification under 36 mesh sieve and 48 mesh sieve (about 300
400400 μm) and a predetermined amount of the slurry 13 for forming the support portion is supplied, and the suspension trough 30 is maintained.
Is inserted from the material injection port 21a of the weir 21, and the support forming slurry 13 is injected into the nickel wire mesh 7A, and the centrifugal molding die 20 is kept rotating as it is. The support portion forming slurry 13 is gravity-separated, the support portion forming metal particles 6 are separated from the dispersion medium L, deposited on the inner surface of the nickel wire mesh 7A, and dried in the same manner as the filtration portion forming slurry 12. Then, the support portion forming metal particle layer 9 is formed. When the slurry 13 for forming the support portion is injected into the filter portion forming particle layer 8, the nickel wire mesh 7 </ b> A is present on the inner surface of the filter portion forming particle layer 8. No. 8 is not washed and a separated layer is surely formed with the layer thickness kept uniform. It is preferable that the dispersing agent to be blended in the slurry 12 for forming the filtering portion and the slurry 13 for forming the supporting portion is one which easily evaporates when the dispersion medium L is evaporated. It is necessary that the sintering of the part-forming material particles 5, the support part-forming metal particles 6, and the reticulated metal body 7 is not hindered, but a water-soluble binder, a water-soluble resin, or the like can be used. is there.

【0012】前記支持部形成金属粒子層9の形成が終わ
ると、前記遠心成形用金型20の回転を停止し、一端側
の端板22を取外し、さらに、前記一端側の固定材20
cと堰21を抜き出して、成形後の前記濾過部形成粒子
層8、前記網状金属体7、前記支持部形成粒子層9から
なる筒状成形体10を前記遠心成形用金型20から取り
出して等方圧加圧焼結装置に装入し、フィルタ本体1と
して焼結して、フランジ3、底板2をロウ付けして一体
に結合し、金属フィルタFを製作する。
When the formation of the support-forming metal particle layer 9 is completed, the rotation of the centrifugal molding die 20 is stopped, the end plate 22 at one end is removed, and the fixing material 20 at the one end is further removed.
c and the weir 21 are extracted, and the cylindrical molded body 10 including the filtered part forming particle layer 8, the reticulated metal body 7, and the support part forming particle layer 9 after molding is taken out from the centrifugal molding die 20. The metal filter F is manufactured by charging into an isotropic pressure sintering apparatus, sintering the filter body 1 and brazing the flange 3 and the bottom plate 2 together.

【0013】次に、本発明の他の実施の形態について説
明する。 〈1〉上記実施の形態に於いては、濾過部形成材料粒子
5としてハステロイ粒子を用い、支持部形成金属粒子6
としてインコネル粒子を用いた例を示したが、前記濾過
部形成材料粒子が目的に応じて、SUS304,SUS
316,SUS316L等のステンレス鋼、チタン、チ
タン合金、クロム、クロム合金等の耐食性金属材料又は
耐熱性金属材料或いは耐高温腐食性金属材料の内から選
択された1種又は複数種の金属からなるものであっても
よく、また、コージライト等のセラミック材料の内から
選択された1種又は複数種のセラミックからなるもので
あってもよく、さらに、セラミック粒子と適合性のよい
金属粒子とを配合したものであってもよい。さらに、前
記支持部形成材料粒子6が前記濾過部形成材料粒子5と
同様に選択された材料で構成してあってもよい。 〈2〉上記実施の形態に於いては、網状金属体7として
ニッケル金網7Aを用いた例を示したが、前記網状金属
体7を形成する金属材料として目的に応じて、SUS3
04,SUS316,SUS316L等のステンレス
鋼、チタン、チタン合金、クロム、クロム合金等の耐食
性金属材料又は耐熱性金属材料或いは耐高温腐食性金属
材料の内から選択された1種又は複数種の金属材料を用
いるようにしてもよい。 〈3〉上記実施の形態に於いては、濾過部形成材料粒子
5の粒径を、90〜100μmの範囲に収まる粒径とし
た例を示したが、前記粒径は、任意に設定するものであ
って、所要の最小阻止粒径に応じて平均粒径或いは最大
粒径及び粒径範囲を設定すればよく、さらに、上記の透
過孔径分布比率を目的に応じて設定して、これに対応す
る濾過部形成材料粒子5の粒径分布比率を設定すればよ
い。尚、前述のように、前記透過孔径分布比率は前記粒
径分布比率に強い相関を示し、実測結果によれば、粒径
分布比率の透過孔径分布比率に対する回帰係数は約0.
87であり、寄与率は約0.04で、回帰直線と透過孔
径測定値とは非常によく一致していた。 〈4〉上記実施の形態に於いては、前記網状金属体7と
してニッケル金網7Aを用いた例を示したが、前記網状
金属体7を省略してもよい。また、前記網状金属体7の
目開き、線径等は、主として濾過部形成材料粒子の粒度
分布によって設定される。 〈5〉上記実施の形態に於いては、支持部形成金属粒子
6の粒子径を300〜450μmの範囲に収まる粒径と
した例を示したが、網状金属体7を省略を省略した場合
には、上記粒径範囲は、上記実施の形態に示したと同様
に、支持部形成金属粒子6の平均粒子径は、濾過部形成
材料粒子5の平均粒子径の3倍以下の平均粒子径のもの
とするのが好ましく、前記濾過部形成材料粒子5の最小
粒子径の2倍よりも小径で、1.2倍よりも大径である
ことがさらに好ましい。この粒径範囲であれば、前記支
持部形成金属粒子6の粒子間に前記濾過部形成材料粒子
5の粒子が入り込むことがなく、支持部1bの形成によ
って金属フィルタの通気度を損なうおそれがなく、且
つ、前記支持部1bを備えることによって、金属フィル
タの通気抵抗を高めることを回避できる。 〈6〉上記実施の形態に於いては、支持部1bを濾過部
1aの内側に配置して円筒状に形成した例を示したが、
前記支持部1bが前記濾過部1aの外側に形成されてい
てもよい。また、前記濾過部1aが前記支持部1bと共
に平面的に形成されたフィルタであってもよい。 〈7〉上記実施の形態に於いては、濾過部形成粒子層8
及び支持部形成粒子層9を遠心成形する例を示したが、
両者共に或いは一方を形成粒子のペーストを塗布して形
成するようにしてもよく、また、乾式の遠心成形によっ
て焼結型の成形面上に形成するようにしてもよい。 〈8〉上記実施の形態に於いては、濾過部形成粒子層8
の内面に金網から成る網状金属体7を回転に伴う遠心力
により貼り付ける例を示したが、前記網状金属体7は網
状に形成された多孔の金属板又は金属膜であってもよ
く、前記濾過部形成粒子層8の内面への配置も、上述の
遠心成形の場合においても、静止している前記濾過部形
成粒子層8の内面に貼り付けるようにしてもよい。この
場合、前記濾過部形成粒子層8に用いると同質の粘結剤
或いは異質の粘着物質を用いて貼り付けるようにしても
よい。 〈9〉遠心成形用金型20の回転数によって注入される
濾過部形成材料粒子5に及ぼされる遠心場の加速度の設
定は任意で、濾過部形成材料粒子5及び分散媒Lの性状
に応じて定められるべきものである。例えば、前記濾過
部形成材料粒子5と前記分散媒Lとの比重差が小さい場
合、或いは前記分散媒Lの動粘度が高い場合には高い回
転数を用いるのが成形時間短縮のためには得策である。
Next, another embodiment of the present invention will be described. <1> In the above-described embodiment, Hastelloy particles are used as the filtration part forming material particles 5 and the support part forming metal particles 6 are used.
As an example, inconel particles were used, but the material of the filtration portion forming material was SUS304 or SUS304 depending on the purpose.
316, 316L stainless steel, titanium, titanium alloy, chromium, chromium alloy and other corrosion-resistant metal materials, heat-resistant metal materials, or one or more metals selected from high-temperature corrosion-resistant metal materials Or may be made of one or more kinds of ceramics selected from ceramic materials such as cordierite, and further, a mixture of ceramic particles and metal particles having good compatibility. May be done. Further, the support portion forming material particles 6 may be made of the same material as the filtration portion forming material particles 5. <2> In the above-described embodiment, an example in which the nickel metal mesh 7A is used as the mesh metal body 7 has been described, but SUS3 is used as the metal material forming the mesh metal body 7 according to the purpose.
04, SUS316, SUS316L, etc., one or more metal materials selected from corrosion-resistant metal materials such as titanium, titanium alloys, chromium, chromium alloys, heat-resistant metal materials, and high-temperature corrosion-resistant metal materials May be used. <3> In the above-described embodiment, an example has been described in which the particle size of the filtration portion forming material particles 5 is set to a particle size falling within a range of 90 to 100 μm, but the particle size is set arbitrarily. Therefore, the average particle size or the maximum particle size and the particle size range may be set according to the required minimum blocking particle size, and the above-mentioned permeation hole size distribution ratio is set according to the purpose, and corresponding thereto. What is necessary is just to set the particle size distribution ratio of the filtration part forming material particles 5 to be performed. As described above, the transmission pore size distribution ratio shows a strong correlation with the particle size distribution ratio. According to the measurement results, the regression coefficient of the particle size distribution ratio with respect to the transmission pore size distribution ratio is about 0.5.
The contribution ratio was about 0.04, and the regression line and the measured permeation hole diameter were in very good agreement. <4> In the above embodiment, an example was described in which the nickel metal mesh 7A was used as the mesh metal member 7, but the mesh metal member 7 may be omitted. The aperture, the wire diameter, and the like of the reticulated metal body 7 are set mainly by the particle size distribution of the filtration portion forming material particles. <5> In the above-described embodiment, an example has been described in which the particle diameter of the support portion forming metal particles 6 is set to a particle diameter falling within the range of 300 to 450 μm. The average particle diameter of the support-portion-forming metal particles 6 is equal to or less than three times the average particle diameter of the filtration-portion-forming material particles 5 as in the above embodiment. The diameter is preferably smaller than twice the minimum particle diameter of the filtration portion forming material particles 5, and more preferably larger than 1.2 times. Within this particle size range, the particles of the filtering portion forming material particles 5 do not enter between the particles of the supporting portion forming metal particles 6, and the formation of the supporting portion 1b does not impair the air permeability of the metal filter. In addition, by providing the support portion 1b, it is possible to avoid increasing the ventilation resistance of the metal filter. <6> In the above embodiment, an example is shown in which the support portion 1b is disposed inside the filtration portion 1a and formed in a cylindrical shape.
The support part 1b may be formed outside the filtration part 1a. Further, the filter 1a may be a filter formed in a plane with the support 1b. <7> In the above embodiment, the filtration part forming particle layer 8
And an example in which the support-forming particle layer 9 is formed by centrifugal molding,
Both or one of them may be formed by applying a paste of forming particles, or may be formed on a molding surface of a sintered mold by dry centrifugal molding. <8> In the above embodiment, the filtration part forming particle layer 8
Although an example in which the mesh-like metal body 7 made of a wire mesh is attached to the inner surface of the mesh by centrifugal force accompanying rotation, the mesh-like metal body 7 may be a porous metal plate or a metal film formed in a mesh shape, The arrangement of the filtration section forming particle layer 8 on the inner surface may be applied to the stationary inner surface of the filtration section forming particle layer 8 even in the above-described centrifugal molding. In this case, when used for the filtration part forming particle layer 8, it may be attached using a binder of the same quality or a different adhesive substance. <9> The setting of the acceleration of the centrifugal field exerted on the filtration part forming material particles 5 injected by the rotation speed of the centrifugal molding die 20 is arbitrary, and depends on the properties of the filtration part forming material particles 5 and the dispersion medium L. It must be determined. For example, when the specific gravity difference between the filtration part forming material particles 5 and the dispersion medium L is small, or when the kinematic viscosity of the dispersion medium L is high, it is advisable to use a high rotation speed in order to shorten the molding time. It is.

【0014】尚、特許請求の範囲の項に図面との対照を
便利にするために符号を記すが、該記入により本発明は
添付図面の構成に限定されるものではない。
In the claims, reference numerals are provided for convenience of comparison with the drawings, but the present invention is not limited to the configuration shown in the attached drawings.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明に係る金属フィルタの要部切欠き斜視図FIG. 1 is a cutaway perspective view of a main part of a metal filter according to the present invention.

【図2】本発明の金属フィルタの構成の一例を説明する
要部断面図
FIG. 2 is a sectional view of an essential part for explaining an example of a configuration of a metal filter of the present invention.

【図3】金属フィルタの製造方法の予備成形工程の一例
を示す成形装置の模式縦断面図
FIG. 3 is a schematic longitudinal sectional view of a forming apparatus showing an example of a preforming step of a method for manufacturing a metal filter.

【図4】図3に示す工程に続く予備成形工程を説明する
成形装置の模式縦断面図
FIG. 4 is a schematic longitudinal sectional view of a molding apparatus illustrating a preforming step following the step shown in FIG. 3;

【図5】図4に示す工程に続く予備成形工程を説明する
成形装置の模式縦断面図
FIG. 5 is a schematic vertical sectional view of a molding apparatus for explaining a preforming step following the step shown in FIG. 4;

【図6】図5に示す工程に続く予備成形工程を説明する
成形装置の模式縦断面図
FIG. 6 is a schematic vertical sectional view of a molding apparatus for explaining a preforming step following the step shown in FIG. 5;

【図7】本発明の予備成形後の工程の概略説明図FIG. 7 is a schematic explanatory view of a step after preforming of the present invention.

【符号の説明】[Explanation of symbols]

1a 濾過部 1b 支持部 7 網状金属体 8 濾過部形成粒子層 9 支持部形成粒子層 10 筒状成形体 D5 透過孔径の体積基準分布曲線における累積頻度
5%の透過孔径 D50 透過孔径の体積基準分布曲線における累積頻度
50%の透過孔径 D95 透過孔径の体積基準分布曲線における累積頻度
95%の透過孔径
The volume of transmission hole diameter D 50 transmission aperture diameter of the cumulative frequency 5% in volume-based distribution curve of 1a filtering portion 1b supports 7 mesh metal body 8 filtration unit forming particle layer 9 supporting part particle layer 10 cylindrical molded body D 5 permeation pore diameter Permeation pore diameter with a cumulative frequency of 50% in the reference distribution curve D 95 Permeation pore diameter with a cumulative frequency of 95% in the volume-based distribution curve of the permeation pore diameter

───────────────────────────────────────────────────── フロントページの続き (72)発明者 船越 淳 大阪府枚方市中宮大池1丁目1番1号 株式会社クボタ 枚方製造所内 (72)発明者 西 隆 大阪府枚方市中宮大池1丁目1番1号 株式会社クボタ 枚方製造所内 (72)発明者 小阪 晃 大阪府枚方市中宮大池1丁目1番1号 株式会社クボタ 枚方製造所内 (56)参考文献 特開 平6−327920(JP,A) (58)調査した分野(Int.Cl.7,DB名) B01D 39/00 - 39/20 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Atsushi Funakoshi 1-1-1, Nakamiya Oike, Hirakata City, Osaka Prefecture Inside Kubota Hirakata Plant (72) Inventor Takashi Nishi 1-1-1, Nakamiya Oike, Hirakata City, Osaka Prefecture No. Kubota Corporation, Hirakata Factory (72) Inventor Akira Kosaka 1-1-1, Nakamiya Oike, Hirakata City, Osaka Prefecture Inside Kubota Corporation, Hirakata Factory (56) References JP-A-6-327920 (JP, A) (58) ) Surveyed field (Int.Cl. 7 , DB name) B01D 39/00-39/20

Claims (6)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 金属粒子を筒状に形成して焼結形成され
た金属フィルタであって、 小径の濾過部形成材料粒子から成る濾過部(1a)と、
前記濾過部形成材料粒子よりも大径の支持部形成金属粒
子から成る支持部(1b)とを、表裏一体に等方圧加圧
下で焼結して形成し、前記支持部形成金属粒子を、前記
濾過部形成材料粒子の平均粒子径の3倍以下の平均粒子
径のものとしてある金属フィルタ。
1. A metal filter formed by sintering metal particles in a cylindrical shape, the filter comprising a filter member forming material having a small diameter;
A support part (1b) made of support part formation metal particles having a diameter larger than that of the filtration part formation material particles is formed by sintering the front and back parts integrally under isostatic pressure, and the support part formation metal particles are Said
Average particles less than 3 times the average particle size of the filtration part forming material particles
Metal filters are assumed diameter.
【請求項2】 前記濾過部(1a)と、前記支持部(1
b)との間に、目開きが前記濾過部形成材料粒子の最小
粒子径以下である網状金属体(7)を介在させた状態で
一体に焼結形成された請求項1記載の金属フィルタ。
2. The filter (1a) and the support (1)
2. The metal filter according to claim 1, wherein the metal filter is integrally formed by sintering with a mesh metal body (7) having an opening of not more than the minimum particle diameter of the filtration portion forming material particles between the filter member and b).
【請求項3】 前記濾過部(1a)を、透過孔径の体積
基準積算分布曲線における累積頻度5%の透過孔径D5
と、累積頻度50%の透過孔径D50と、累積頻度95%
の透過孔径D95とが、 (D95−D5 )/D50≦1.5 の関係を満たす透過孔分布を示すものとしてある請求項
1又は2に記載の金属フィルタ。
3. The method according to claim 1, wherein the filtering section (1a) is provided with a transmission hole diameter D 5 having a cumulative frequency of 5% in a volume-based cumulative distribution curve of the transmission hole diameter.
When a cumulative frequency of 50% of the transmission hole diameter D 50, the cumulative frequency 95%
Transmission hole diameter D 95 and is, (D 95 -D 5) / D metal filter according to claim 1 or 2 is as an indication of the transmission hole distribution satisfying the relationship of 50 ≦ 1.5 in.
【請求項4】 前記網状金属体(7)の目開きを、前記
濾過部形成材料粒子の平均粒子径の30%以上としてあ
る請求項2又は3に記載の金属フィルタ。
4. The metal filter according to claim 2, wherein the openings of the mesh-like metal body (7) are set to 30% or more of the average particle diameter of the filtration part forming material particles.
【請求項5】 前記濾過部形成材料粒子及び前記支持部
形成金属粒子が共に耐高温腐食性金属からなるものであ
る請求項1〜の何れかに記載の金属フィルタ。
Wherein said filtration unit forming material particles and the metal filter according to any one of claims 1-4 wherein the support portion forming metal particles in which both consist of high temperature corrosion resistant metal.
【請求項6】 円筒状の成形型内面上に濾過部形成材料
粒子で濾過部形成粒子層(8)を形成し、前記濾過部形
成粒子層(8)の内側に前記濾過部形成材料粒子の粒子
径の30%以上で、かつ、前記濾過部形成材料粒子の最
小粒子径以下の目開きの網状金属体(7)を配置し、前
記網状金属体(7)の内側に、前記濾過部形成材料粒子
の平均粒子径に対して、2倍以上の平均粒子径の支持部
形成金属粒子で支持部形成粒子層(9)を形成し、前記
濾過部形成粒子層(8)と、前記網状金属体(7)と、
前記支持部形成粒子層(9)とを一体に仮成形して筒状
成形体(10)を形成し、前記筒状成形体(10)を等
方圧加圧下で焼結する金属フィルタの製造方法。
6. A filtration part forming material layer (8) is formed from the filtration part forming material particles on the inner surface of a cylindrical mold, and the filtration part forming material particles are formed inside the filtration part formation particle layer (8). A mesh metal body (7) having an opening of 30% or more of the particle diameter and equal to or less than the minimum particle diameter of the filtration part forming material particles is disposed, and the filtration part formation is formed inside the mesh metal body (7). The support-forming particle layer (9) is formed of the support-forming metal particles having an average particle diameter that is twice or more the average particle diameter of the material particles, and the filtration unit-forming particle layer (8) and the reticulated metal Body (7),
Manufacture of a metal filter in which a cylindrical molded body (10) is formed by temporarily forming the support-forming particle layer (9) integrally, and the cylindrical molded body (10) is sintered under isotropic pressure. Method.
JP23776696A 1996-07-15 1996-09-09 Metal filter and method for manufacturing the same Expired - Fee Related JP3346991B2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP23776696A JP3346991B2 (en) 1996-09-09 1996-09-09 Metal filter and method for manufacturing the same
CA002190238A CA2190238A1 (en) 1996-07-15 1996-11-13 Sintered metal filters
EP96118296A EP0819459A1 (en) 1996-07-15 1996-11-14 Sintered metal filters
US08/749,237 US5925156A (en) 1996-07-15 1996-11-14 Sintered metal filters
US09/272,569 US5993502A (en) 1996-07-15 1999-03-19 Sintered metal filters

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23776696A JP3346991B2 (en) 1996-09-09 1996-09-09 Metal filter and method for manufacturing the same

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JP3346991B2 true JP3346991B2 (en) 2002-11-18

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JP4900989B2 (en) * 2000-04-06 2012-03-21 富士フィルター工業株式会社 Backwashable gas dust collector
DE10164480A1 (en) * 2001-12-29 2003-07-17 Schumacher Umwelt Trenntech filter element
JP5223503B2 (en) * 2008-07-03 2013-06-26 栗田工業株式会社 Liquid chromatography device
JP2010023464A (en) * 2008-07-24 2010-02-04 Sumitomo Chemical Co Ltd Manufacturing method of polyolefinic resin composition and filter used therein
JP2010131912A (en) * 2008-12-05 2010-06-17 Sumitomo Chemical Co Ltd Filtration device, and method of manufacturing polyolefin-based resin composition using the same
JP2011177661A (en) * 2010-03-02 2011-09-15 Seiko Epson Corp Filter made of metal, and method for manufacturing the same

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