JP3356415B2 - Film evaluation test method - Google Patents
Film evaluation test methodInfo
- Publication number
- JP3356415B2 JP3356415B2 JP36525799A JP36525799A JP3356415B2 JP 3356415 B2 JP3356415 B2 JP 3356415B2 JP 36525799 A JP36525799 A JP 36525799A JP 36525799 A JP36525799 A JP 36525799A JP 3356415 B2 JP3356415 B2 JP 3356415B2
- Authority
- JP
- Japan
- Prior art keywords
- subject
- film
- injection
- fixing
- abrasive grains
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000011156 evaluation Methods 0.000 title claims description 30
- 238000010998 test method Methods 0.000 title claims description 14
- 239000000463 material Substances 0.000 claims description 99
- 239000006061 abrasive grain Substances 0.000 claims description 48
- 238000002347 injection Methods 0.000 claims description 43
- 239000007924 injection Substances 0.000 claims description 43
- 238000012360 testing method Methods 0.000 claims description 35
- 238000000576 coating method Methods 0.000 claims description 27
- 239000007921 spray Substances 0.000 claims description 27
- 239000011248 coating agent Substances 0.000 claims description 26
- 238000000034 method Methods 0.000 claims description 23
- 238000005422 blasting Methods 0.000 claims description 17
- 239000002585 base Substances 0.000 claims description 15
- 239000007788 liquid Substances 0.000 claims description 13
- 239000002245 particle Substances 0.000 claims description 12
- 238000011084 recovery Methods 0.000 claims description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 12
- 238000003756 stirring Methods 0.000 claims description 11
- 229920003002 synthetic resin Polymers 0.000 claims description 10
- 239000000057 synthetic resin Substances 0.000 claims description 10
- 239000003380 propellant Substances 0.000 claims description 8
- 239000007769 metal material Substances 0.000 claims description 7
- 230000001364 causal effect Effects 0.000 claims description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 3
- 239000003513 alkali Substances 0.000 claims description 3
- 239000007864 aqueous solution Substances 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 229920005989 resin Polymers 0.000 claims description 3
- 239000011347 resin Substances 0.000 claims description 3
- 239000002904 solvent Substances 0.000 claims description 3
- 239000000243 solution Substances 0.000 claims 1
- 239000010408 film Substances 0.000 description 68
- 230000004580 weight loss Effects 0.000 description 17
- 239000010409 thin film Substances 0.000 description 12
- 238000005299 abrasion Methods 0.000 description 10
- 238000005507 spraying Methods 0.000 description 10
- 230000003628 erosive effect Effects 0.000 description 8
- 238000005259 measurement Methods 0.000 description 7
- 239000003082 abrasive agent Substances 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 239000000428 dust Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000007779 soft material Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000005238 degreasing Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000001764 infiltration Methods 0.000 description 1
- 230000008595 infiltration Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000002195 synergetic effect Effects 0.000 description 1
- 238000007751 thermal spraying Methods 0.000 description 1
Landscapes
- Testing Resistance To Weather, Investigating Materials By Mechanical Methods (AREA)
Description
【0001】[0001]
【発明の属する技術分野】本発明は、金属材や合成樹脂
材などの表面に形成されている皮膜の特性を測定評価す
る皮膜評価試験方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a film evaluation test method for measuring and evaluating characteristics of a film formed on a surface of a metal material, a synthetic resin material or the like.
【0002】[0002]
【従来の技術及び発明が解決しようとする課題】歯車な
どの金属材や合成樹脂材において、表面強度の向上や耐
摩耗性の向上や耐食性の向上などの表面改質の為、該金
属材や合成樹脂材の表面にメッキやコーティングや拡散
浸透や蒸着や溶射などの方法により皮膜を設ける技術が
種々提案されている。2. Description of the Related Art Metal materials such as gears and synthetic resin materials are used for improving the surface strength, abrasion resistance, corrosion resistance, and other surface modification. Various techniques have been proposed for providing a film on the surface of a synthetic resin material by a method such as plating, coating, diffusion infiltration, vapor deposition, or thermal spraying.
【0003】ところで、この皮膜は、元々強度の向上や
耐摩耗性の向上や耐食性の向上の為に設けられているも
のである為、この皮膜を擦ったり腐食させたりして、実
際の膜厚,強度や摩耗性などの機械的特性,耐食性など
科学的な種々の特性を評価することは困難である。[0003] Incidentally, since this film is originally provided for the purpose of improving strength, abrasion resistance and corrosion resistance, the film is rubbed or corroded so that the actual film thickness is reduced. It is difficult to evaluate various mechanical properties such as mechanical properties such as strength, abrasion, and corrosion resistance.
【0004】例えば、この皮膜の特性を測定する方法と
してブラスト・エロージョン法が提案されている。[0004] For example, a blast erosion method has been proposed as a method for measuring the characteristics of this film.
【0005】このブラスト・エロージョン法は、被験体
に砥粒を圧搾空気とを共に吹き付けて該被検体の単位時
間当たりの重量減量を測定するもので、この減量を皮膜
のかさ比重で割って体積減量を求めた際、この単位時間
と体積減量とが直線グラフで表される比例関係となり、
この直線の勾配(エロージョン特性といわれる)が引っ
張り強さや伸びや硬さや破壊靭性値と良い対応関係を示
す為、前記重量減量の測定により、特性の評価が難しい
皮膜の評価を短時間で簡単に行うことができるというメ
リットがある。In the blast erosion method, weight loss per unit time of a test object is measured by blowing abrasive grains together with compressed air, and the weight loss is divided by the bulk specific gravity of the film. When determining the weight loss, this unit time and volume loss are in a proportional relationship represented by a linear graph,
Since the gradient of this straight line (called erosion characteristic) shows a good relationship with the tensile strength, elongation, hardness, and fracture toughness value, by measuring the weight loss, it is easy to evaluate the film whose characteristics are difficult to evaluate in a short time. There is an advantage that it can be performed.
【0006】しかし、このブラスト・エロージョン法で
は、砥粒が飛散し易い為、扱える砥粒は数百μm以上の
径のものとなり、蒸着やスパッタリング法などで形成さ
れた数十μm以下の薄い皮膜の特性を評価することがで
きないという問題点がある。However, in the blast erosion method, since abrasive grains are easily scattered, the abrasive grains that can be handled have a diameter of several hundred μm or more, and a thin film of several tens μm or less formed by vapor deposition or sputtering. However, there is a problem that the characteristics cannot be evaluated.
【0007】更に、ブラスト・エロージョン法に使用す
る装置は、砥粒や被験体の削り粒が空中に飛散して舞い
易い為、該砥粒などが噴射室の外に漏れないように該噴
射室の気密性を高めなければならないし、また、砥粒な
どを集める為の集塵フィルタやサイクロンなどの装置を
取り付ける必要も生じ、装置全体が大型且つ複雑で高コ
ストになってしまうという問題点がある。Further, since the apparatus used for the blast erosion method is apt to cause the abrasive grains and the shavings of the subject to scatter in the air and flutter, the abrasive chamber and the like are prevented from leaking out of the injector chamber. In addition, it is necessary to increase the airtightness of the filter, and it is also necessary to attach a device such as a dust collecting filter or a cyclone for collecting abrasives, etc., which leads to a problem that the entire device is large, complicated, and expensive. is there.
【0008】また、噴射材を噴射した後も砥粒がしばら
く舞い続ける為、試験終了後にすぐに噴射室を開放して
試験片を取り出そうとすると砥粒が外に飛散してしまう
おそれがある。従って、試験終了後の試験片を取り出す
場合、噴射室内に舞っている砥粒が完全に除去されるま
で待たなければならない為、一回の測定に長時間を要す
るという問題点もある。In addition, since the abrasive grains continue to fly for a while after the injection material is injected, the abrasive grains may be scattered outside when the injection chamber is opened immediately after the test is completed to take out the test piece. Therefore, when removing the test piece after the test, it is necessary to wait until the abrasive grains flowing in the injection chamber are completely removed, so that there is a problem that one measurement takes a long time.
【0009】また、圧搾空気中に砥粒を混入させる方法
では砥粒が被験体に衝突する衝撃力は湿度によって左右
され、しかも湿度が高いほど誤差が大きくなるから、測
定誤差を小さくするために噴射室内を毎回一定の湿度に
設定しなければならず、極めて試験操作が繁雑で厄介で
あるという問題点もある。Further, in the method of mixing abrasive grains into compressed air, the impact force at which the abrasive grains collide with the test subject is affected by humidity, and the higher the humidity, the greater the error. There is also a problem that the spray chamber must be set to a constant humidity every time, and the test operation is extremely complicated and troublesome.
【0010】本発明は、上記問題点に鑑みてなされたも
ので、数十μm以下の薄い皮膜の特性でも評価すること
ができ、被験体に噴射された噴射材が飛散したりせず、
極めて簡易な操作手順で短時間に摩耗性を測定すること
ができ、測定誤差が小さくて再現性に秀れ、しかも、装
置を小型化し得ることもできる極めて画期的な皮膜評価
試験方法を提供するものである。The present invention has been made in view of the above-mentioned problems, and can evaluate the characteristics of a thin film having a thickness of several tens μm or less.
Extremely innovative film evaluation that can measure abrasion in a very short time in a very simple operation procedure, has a small measurement error and is excellent in reproducibility, and can also reduce the size of the device.
It provides a test method .
【0011】[0011]
【課題を解決するための手段】添付図面を参照して本発
明の要旨を説明する。The gist of the present invention will be described with reference to the accompanying drawings.
【0012】金属材や合成樹脂材などの被験体1の表面
に形成されている皮膜の特性を評価する方法であって、
被験体1を固定する固定機構3と、固定機構3に固定さ
れた被験体1に液体に砥粒が混入された噴射材4を圧搾
空気と共に噴射して該被験体1を減量させる噴射機構5
とを有する皮膜評価試験機2を採用し、前記砥粒として
最大粒径が25μm以下の砥粒を採用し、噴射機構5か
ら噴射材4を圧搾空気と共に噴射して被験体1を減量
し、被験体1の減量と該減量に要した時間との因果関係
を測定して該披験体1の表面に形成されている皮膜と母
材との界面の密着性や接着強度等の境界特性を評価する
ことを特徴とする皮膜評価試験方法に係るものである。 A method for evaluating the characteristics of a film formed on the surface of a subject 1 such as a metal material or a synthetic resin material ,
A fixing mechanism 3 for fixing the subject 1, and an injection mechanism 5 for reducing the amount of the subject 1 by jetting an blasting material 4 in which abrasive grains are mixed with liquid to the subject 1 fixed to the fixing mechanism 3 together with compressed air.
The film evaluation tester 2 having the following formula is adopted, and the abrasive having a maximum particle size of 25 μm or less is used as the abrasive, and the spray mechanism 5
The injection material 4 together with the compressed air to reduce the weight of the subject 1
Causal relationship between the weight loss of subject 1 and the time required for the weight loss
And the film formed on the surface of the specimen 1 and the mother
Evaluate boundary characteristics such as adhesion and bonding strength at the interface with the material
The present invention relates to a film evaluation test method characterized in that:
【0013】また、金属材や合成樹脂材などの被験体1
の表面に形成されている皮膜の特性を評価する方法であ
って、被験体1を固定する固定機構3と、固定機構3に
固定された被験体1に液体に砥粒が混入された噴射材4
を圧搾空気と共に噴射して該被験体1を減量させる噴射
機構5とを有する皮膜評価試験機2を採用し、前記砥粒
として最大粒径が25μm以下の砥粒を採用し、噴射機
構5から噴射材4を圧搾空気と共に噴射して被験体1を
減量し、被験体1の減量と該減量に要した時間との因果
関係を測定して該披験体1の表面に形成されている多層
膜の該膜同志の界面若しくは膜と母材の界面の密着性や
接着強度等の境界特性を評価することを特徴とする皮膜
評価試験方法に係るものである。In addition, a test object 1 such as a metal material or a synthetic resin material is used.
This is a method to evaluate the characteristics of the film formed on the surface of
Thus , a fixing mechanism 3 for fixing the subject 1, and the blasting material 4 in which abrasive particles are mixed with the liquid in the subject 1 fixed to the fixing mechanism 3
And a spraying mechanism 5 having a spraying mechanism 5 for spraying together with compressed air to reduce the amount of the subject 1, employing a maximum grain size of 25 μm or less as the abrasive grain, Injection machine
The injection material 4 is ejected from the structure 5 together with the compressed air, and the subject 1 is ejected.
Causal relationship between the weight loss of the subject 1 and the time required for the weight loss
Measuring the relationship, the multilayer formed on the surface of the specimen 1
The adhesiveness of the interface between the films or between the film and the base material
Coating characterized by evaluating boundary properties such as adhesive strength
It relates to an evaluation test method .
【0014】また、請求項1,2いずれか1項に記載の
皮膜評価試験方法において、噴射材4は、樹脂粒,金属
粒,セラミックス粒若しくはガラス粒から成る砥粒が
水,アルカリなどの水溶液若しくはアルコールなどの溶
剤に混入されてなるものであり、固定機構3には、該固
定機構3に固定された被験体1を回動して噴射材4と被
験体1との当接角度を調節できる回動機構6が設けら
れ、この回動機構6の回動軸線に固定機構3に固定され
た被験体1が位置するように設定して該被験体1を回動
しても該被験体1に噴射される噴射材4の噴射移動距離
が変わらないように構成し、この固定機構3に固定され
た被験体1の下方には、噴射機構5から被験体1に噴射
された噴射材4を回収する回収機構7が設けられ、この
回収機構7には、回収機構7内の噴射材4の液体と砥粒
とを略一定の比率で且つ均一となるように混合する撹拌
機構9が設けられ、この回収機構7と噴射機構5とは噴
射材4を送流する送流機構8により連結され、被験体1
に噴射された噴射材4が、回収機構7と送流機構8とを
経由して再度噴射機構5から圧搾空気と共に被験体1に
噴射されるように設定され、この噴射材4と圧搾空気と
の噴射圧力を調節する圧力調節機構16が設けられている
ことを特徴とする皮膜評価試験方法に係るものである。Further, according to any one of claims 1 and 2,
In the coating evaluation test method, the spraying material 4 is obtained by mixing abrasive grains made of resin grains, metal grains, ceramic grains, or glass grains into an aqueous solution such as water or alkali, or a solvent such as alcohol. Is provided with a turning mechanism 6 which can turn the subject 1 fixed to the fixing mechanism 3 to adjust the contact angle between the spray material 4 and the subject 1. Even if the subject 1 fixed to the fixing mechanism 3 is positioned on the axis line and the subject 1 is rotated, the ejection moving distance of the ejection material 4 ejected to the subject 1 does not change even if the subject 1 is rotated. A collection mechanism 7 is provided below the subject 1 fixed to the fixing mechanism 3 to collect the sprayed material 4 sprayed from the spray mechanism 5 to the subject 1. The collection mechanism 7 includes: The liquid of the blast material 4 and the abrasive grains in the collection mechanism 7 are mixed at a substantially constant ratio. Stirring mechanism 9 for mixing so that uniform is provided, the ejection mechanism 5 and the recovery mechanism 7 is connected by Ryusuru flow sending mechanism 8 feeding the injection material 4, subject 1
Is set so as to be injected again to the subject 1 together with the compressed air from the injection mechanism 5 via the recovery mechanism 7 and the flow sending mechanism 8, and the injection material 4, the compressed air, The present invention relates to a coating evaluation test method , characterized in that a pressure adjusting mechanism 16 for adjusting the spray pressure is provided.
【0015】[0015]
【発明の実施の形態】好適と考える本発明の実施の形態
(発明をどのように実施するか)を、図面に基づいてそ
の作用効果を示して説明する。BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of the present invention (how to implement the invention) which is considered to be preferable will be described with reference to the drawings, showing its operation and effects.
【0016】圧搾空気とともに高速で噴射される噴射材
4が被験体1の表面に衝突し、該被験体1の表面に形成
されている皮膜や被験体1そのもの(母材)が減量され
る。The spray material 4 which is jetted at high speed together with the compressed air collides with the surface of the test object 1, and the film formed on the surface of the test object 1 and the test object 1 itself (base material) are reduced.
【0017】この際、被験体1に噴射される噴射材4は
液体に砥粒が混入されてなるものであるから、空中に散
乱したりするおそれがなく、25μm以下の小さな砥粒
でも使用できることになり、数十μm以下の薄い皮膜で
あっても該皮膜を少しずつ減量して特性を評価すること
ができる。At this time, since the abrasive 4 injected to the subject 1 is a mixture of abrasives in a liquid, there is no danger of scattering into the air, and small abrasives of 25 μm or less can be used. Thus, even for a thin film having a thickness of several tens μm or less, the characteristics can be evaluated by gradually reducing the amount of the film.
【0018】また、液体に砥粒が混入された噴射材4と
圧搾空気とを一緒に被験体1に噴射すると、短時間で被
験体1の皮膜を減量させることができ、湿気などの影響
も受けないため制御し易く、測定誤差が少なくて再現性
も良好となる。Further, when the propellant 4 in which the abrasive grains are mixed with the liquid and the compressed air are jetted together to the subject 1, the coating of the subject 1 can be reduced in a short time, and the influence of moisture and the like can be reduced. Since it is not received, it is easy to control, the measurement error is small, and the reproducibility is good.
【0019】また、実際に皮膜評価試験を行ったとこ
ろ、減量時間と減量体積(実施例では摩耗深さで測定)
との相関は、皮膜部分と母材部分で異なった勾配の直線
グラフを描き、更に、皮膜や母材の材質によっては、両
直線グラフの接続部分では垂直勾配が現れたり、この直
線勾配が、皮膜部分と母材部分との境界部に現れたり、
皮膜側側に現れたりし、皮膜の特性や材質や界面の密着
性や接着強度などを評価できることが確認された。Further, when a film evaluation test was actually performed, the weight loss time and the weight loss volume (measured by wear depth in the example)
Correlation with draw a straight line graph of different gradients in the coating part and the base material part, furthermore, depending on the material of the coating and the base material, a vertical gradient appears at the connection part of both linear graphs, or this linear gradient, Appearing at the boundary between the coating and the base material,
It appeared on the side of the film, and it was confirmed that the properties, material, interface adhesion and adhesive strength of the film could be evaluated.
【0020】[0020]
【実施例】本発明の具体的な実施例について図面に基づ
いて説明する。DESCRIPTION OF THE PREFERRED EMBODIMENTS Specific embodiments of the present invention will be described with reference to the drawings.
【0021】本実施例は、金属材や合成樹脂材などの被
験体1の表面に形成されている皮膜の特性を測定する皮
膜評価試験機2であって、被験体1を固定する固定機構
3と、固定機構3に固定された被験体1に液体に砥粒が
混入された噴射材4を圧搾空気と共に噴射して該被験体
1を減量させる噴射機構5とを有しているものである。The present embodiment is a film evaluation tester 2 for measuring characteristics of a film formed on the surface of a test object 1 such as a metal material or a synthetic resin material, and a fixing mechanism 3 for fixing the test object 1. And an injection mechanism 5 for injecting, along with compressed air, an injection material 4 in which abrasive grains are mixed with the test object 1 fixed to the fixing mechanism 3 to reduce the amount of the test object 1. .
【0022】砥粒は、最大粒径が25μm以下の砥粒が
採用されている。また、最大粒径が1μm以下の砥粒を
採用して厚さ数μm以下の薄い皮膜でも再現性良く減量
できるように構成しても良い。Abrasive grains having a maximum grain size of 25 μm or less are employed. Further, the abrasive grains having a maximum particle size of 1 μm or less may be adopted so that even a thin film having a thickness of several μm or less can be reduced with good reproducibility.
【0023】また、この砥粒は、合成樹脂,金属,セラ
ミックス,ガラスなどの微粒子が採用されている。この
砥粒は、皮膜や被験体1の母材の種類によって適宜選択
すると良い。例えば、皮膜や母材が軟らかい素材である
場合には、硬い砥粒を使用すると前記減量が早く進行し
て誤差が大きくなる為、合成樹脂などの軟らかい素材の
砥粒を採用し、皮膜がダイヤモンドコーティングなどの
硬い素材である場合には、軟らかい砥粒では減量に時間
がかかり過ぎる為、アルミナなどの硬い素材の砥粒を採
用すると良い。Further, as the abrasive grains, fine particles of synthetic resin, metal, ceramics, glass and the like are employed. The abrasive grains may be appropriately selected depending on the type of the film and the base material of the subject 1. For example, if the coating or the base material is a soft material, the use of hard abrasive grains causes the weight loss to proceed quickly and the error increases, so employ abrasive grains of a soft material such as synthetic resin, and use a diamond coating. In the case of a hard material such as a coating, soft abrasive grains take too much time to reduce the weight, so it is preferable to use abrasive grains of a hard material such as alumina.
【0024】また、この砥粒を水に分散させてスラリー
とし、噴射材4を構成している。また、水以外に目的に
応じて、例えば、脱脂用としてアルカリなどの水溶液を
使用したり、アルコール類などの溶剤を使用したりして
も良い。The abrasives are dispersed in water to form a slurry, which constitutes the spray material 4. In addition to water, depending on the purpose, for example, an aqueous solution of an alkali or the like may be used for degreasing, or a solvent such as an alcohol may be used.
【0025】噴射機構5は、噴射材4を噴射する噴射ノ
ズル18と、該噴射ノズル18から噴射材4を圧搾空気と共
に噴射するためのミキシングチャンバ19とから構成され
ている。The spraying mechanism 5 comprises a spray nozzle 18 for spraying the spray material 4, and a mixing chamber 19 for spraying the spray material 4 from the spray nozzle 18 together with compressed air.
【0026】固定機構3には締具17が設けられており、
該締具17で前記被験体1の両端部を締め付け固定するよ
うに構成されている。The fixing mechanism 3 is provided with a fastener 17.
The fastener 17 is configured to fasten and fix both ends of the subject 1.
【0027】また、固定機構3には回動機構6が設けら
れている。この回動機構6は、固定機構3の両端部に締
具17を回動せしめることができる回動軸10を設け、皮膜
評価試験機2の適所に設けた回動ノブ11を操作すること
により該回動軸10を回動せしめた際、噴射機構5から噴
射される噴射材4に対して該噴射材4に面する被験体1
表面の角度を変化させることができるように構成されて
いる。The rotating mechanism 6 is provided in the fixing mechanism 3. The turning mechanism 6 is provided with a turning shaft 10 at each end of the fixing mechanism 3 for turning the fastener 17 and operating a turning knob 11 provided at an appropriate position of the film evaluation test machine 2. When the rotating shaft 10 is rotated, the subject 1 facing the spray 4 against the spray 4 injected from the spray mechanism 5
It is configured such that the angle of the surface can be changed.
【0028】また、この回動機構6は、固定機構3を回
動する回動軸10と、該固定機構3に固定される被験体1
の被験面とが略一直線上になるように構成され、被験体
1を回動させても該被験体1に噴射される噴射材4の噴
射移動距離が変わらないように設定されている。尚、図
中、符号3aは固定機構3の左右に設けられた突出部で
あり、該突出部3aにおいて固定機構3と回動軸10とが
連設されることで、前記被験体1を回動した際、該被験
体1に噴射される噴射材4の噴射移動距離が変わらない
位置関係となるように構成している。The turning mechanism 6 includes a turning shaft 10 for turning the fixing mechanism 3 and a subject 1 fixed to the fixing mechanism 3.
Are arranged so as to be substantially in line with the test surface, so that even if the test object 1 is rotated, the jetting movement distance of the jetting material 4 jetted to the test object 1 does not change. In the drawing, reference numeral 3a denotes projections provided on the left and right sides of the fixing mechanism 3, and the fixing mechanism 3 and the rotating shaft 10 are connected to each other at the projections 3a to rotate the subject 1. The configuration is such that, when moved, the ejection movement distance of the ejection material 4 ejected to the subject 1 does not change.
【0029】固定機構3に固定された被験体1の下方に
は被験体1に当たって落下する噴射材4を回収する回収
機構7が設けられている。Below the subject 1 fixed to the fixing mechanism 3, there is provided a collecting mechanism 7 for collecting the blasting material 4 falling on the subject 1.
【0030】回収機構7は下方先細り形状の水槽に構成
され、噴射機構5から噴射され落下してきた噴射材4を
溜めて回収できるように設定されている。この回収機構
7の内部には噴射機構5に連通する送流機構8が連結さ
れ、噴射機構5から噴射される噴射材4は装置内で循環
されるように構成されている。The collecting mechanism 7 is configured as a water tank having a downward tapered shape, and is set so as to collect and collect the sprayed material 4 which has been sprayed and dropped from the spraying mechanism 5. A feed mechanism 8 communicating with the injection mechanism 5 is connected to the inside of the recovery mechanism 7, and the injection material 4 injected from the injection mechanism 5 is configured to be circulated in the apparatus.
【0031】また、回収機構7には撹拌翼により構成さ
れた撹拌機構9が設けられており、回収機構7内に溜ま
った噴射材4を撹拌し、噴射材4を構成する水と砥粒と
を均一且つ一定の濃度配分となる分散状態に保つように
構成されている。Further, the recovery mechanism 7 is provided with a stirring mechanism 9 composed of stirring blades, which stirs the propellant 4 accumulated in the recovery mechanism 7 and mixes the water and the abrasive grains constituting the propellant 4 with each other. Is maintained in a dispersed state in which the concentration distribution is uniform and constant.
【0032】また、回収機構7の最下端位置には、噴射
材4が摩耗粉等によって汚れてきた際等に該噴射材4を
排出する為の排出部20が設けられている。At the lowermost position of the collecting mechanism 7, there is provided a discharge section 20 for discharging the blasting material 4 when the blasting material 4 is contaminated by abrasion powder or the like.
【0033】図中符号12は噴射材4が外に飛散すること
を防ぐ樹脂製の透明な蓋体(該蓋体12が透明であること
により、装置内の各部の様子が良く見える。)、13は噴
射材4を噴射するスタートボタン、14はタイマー、15は
圧力計、16は噴射材4を噴射ノズル18から噴射する圧搾
空気の圧力を調整する圧力調整操作部である。In the drawing, reference numeral 12 denotes a transparent cover made of resin for preventing the blasting material 4 from scattering outside (the appearance of each part in the apparatus can be seen well because the cover 12 is transparent). 13 is a start button for injecting the spray material 4, 14 is a timer, 15 is a pressure gauge, and 16 is a pressure adjusting operation unit for adjusting the pressure of compressed air for spraying the spray material 4 from the spray nozzle 18.
【0034】以下、本実施例の具体的な使用方法につい
て詳述する。Hereinafter, a specific method of using the present embodiment will be described in detail.
【0035】被験体1を予め所定形状(固定機構3に着
脱できる形状)に加工し、この被験体1の皮膜の表面形
状を測定しておく。尚、この表面形状を測定する手段と
しては、触針式粗さ計を使用すると良い。The subject 1 is previously processed into a predetermined shape (a shape that can be attached to and detached from the fixing mechanism 3), and the surface shape of the coating of the subject 1 is measured. As a means for measuring the surface shape, a stylus roughness meter is preferably used.
【0036】一方、皮膜評価試験機2は、蓋体12を開け
て回収機構7である水槽内に噴射材4として所定量の水
及び砥粒を入れる。On the other hand, the coating evaluation tester 2 opens the lid 12 and puts predetermined amounts of water and abrasive grains as the blasting material 4 into the water tank as the recovery mechanism 7.
【0037】続いて、蓋体12を閉じてタイマー14を適当
な時間にセットし、スタートボタン13を操作して噴射機
構5から圧搾空気と共に噴射材4を噴射する。また、こ
の際、噴射材4は回収機構7において撹拌機構9により
撹拌されている。Subsequently, the lid 12 is closed, the timer 14 is set at an appropriate time, and the start button 13 is operated to inject the injection material 4 together with the compressed air from the injection mechanism 5. At this time, the jetting material 4 is stirred by the stirring mechanism 9 in the collection mechanism 7.
【0038】続いて、噴射材4の噴射が安定化するまで
待ち、圧力調整操作部16を操作して所定の噴射圧に調整
する。また、噴射されている噴射材4を回収して該噴射
材4の濃度を測定し、噴射ノズル18から噴射されている
噴射材4が所定の濃度(砥粒/水)か否かを確認してお
く。Subsequently, the apparatus waits until the injection of the injection material 4 is stabilized, and operates the pressure adjustment operation section 16 to adjust the injection pressure to a predetermined injection pressure. Further, the sprayed material 4 is collected, the concentration of the sprayed material 4 is measured, and it is confirmed whether or not the sprayed material 4 being sprayed from the spray nozzle 18 has a predetermined concentration (abrasive / water). Keep it.
【0039】続いて、スタートボタン13を操作して噴射
を停止させる。Subsequently, the start button 13 is operated to stop the injection.
【0040】続いて、蓋体12を開け、固定機構3に被験
体1を固定する。Subsequently, the lid 12 is opened, and the subject 1 is fixed to the fixing mechanism 3.
【0041】続いて、蓋体12を閉じ、所定の噴射時間に
タイマー14をセットし、撹拌機構9により噴射材4の濃
度が一定化されていることを確認した後、スタートボタ
ン13を操作して試験を開始する。Subsequently, the cover 12 is closed, a timer 14 is set at a predetermined injection time, and after confirming that the concentration of the injection material 4 is constant by the stirring mechanism 9, the start button 13 is operated. To start the test.
【0042】試験中においては、噴射機構5から被験体
1に向けて噴射材4と圧搾空気とが一緒に噴射され、所
定時間、被験体1の表面(皮膜若しくは母材)が水と砥
粒と圧搾空気との相乗効果によって少しずつ摩耗され、
減量される。また、この際、噴射材4は噴射機構5から
噴射されて被験体1の表面に衝突し、皮膜若しくは母材
の一部を削り取って回収機構7に落下する。噴射材4を
構成する水と砥粒とは、回収機構7内の撹拌機構9によ
り撹拌されて砥粒が回収機構7下部に沈殿しないように
保たれ均一且つ所定の比率濃度に保たれる。また、この
噴射材4は回収機構7に設けられた送流機構8により再
び噴射機構5に送流されて装置内を循環する。During the test, the blasting material 4 and the compressed air are blasted together from the blasting mechanism 5 toward the test subject 1, and the surface (film or base material) of the test subject 1 is exposed to water and abrasive grains for a predetermined time. And a little by the synergistic effect of compressed air
Weight loss. At this time, the blast material 4 is blasted from the blast mechanism 5 and collides with the surface of the subject 1, scrapes off a part of the film or the base material and falls into the collection mechanism 7. The water and the abrasive grains constituting the blasting material 4 are stirred by the stirring mechanism 9 in the collecting mechanism 7 so that the abrasive grains are kept from settling under the collecting mechanism 7 and are kept at a uniform and predetermined concentration. The spray material 4 is again sent to the spray mechanism 5 by the flow mechanism 8 provided in the recovery mechanism 7 and circulates in the apparatus.
【0043】所定時間が経過して噴射材4の噴射が終了
したら、蓋体12を開けて被験体1を取り出し、被験体1
に付着した噴射材4を洗い流し、該被験体1を乾燥す
る。When the injection of the injection material 4 is completed after a predetermined time has elapsed, the lid 12 is opened and the subject 1 is taken out.
The propellant 4 attached to the sample 1 is washed away, and the subject 1 is dried.
【0044】続いて、再度被験体1の皮膜の表面形状を
測定して最大摩耗深さを測定し、摩耗時間と摩耗深さの
関係をグラフ化する(例えば、図3〜6参照)。また、
被験体1の表面形状なども評価すると良い。Subsequently, the surface shape of the film of the subject 1 is measured again to measure the maximum wear depth, and the relationship between the wear time and the wear depth is graphed (for example, see FIGS. 3 to 6). Also,
The surface shape of the subject 1 may be evaluated.
【0045】上記方法により様々な試料について皮膜評
価試験を行ったところ、グラフは皮膜部分においてはゆ
るやかな勾配の直線となったが、母材部分においては急
勾配の直線となった。これは、皮膜部分が硬質である
為、噴射材によってなかなか削れないからであるものと
考えられる。When a film evaluation test was performed on various samples by the above method, the graph showed a straight line having a gentle gradient in the film portion, but a steep straight line in the base material portion. It is considered that this is because the coating portion is hard and cannot be easily cut by the spray material.
【0046】また、このゆるやかな勾配と急勾配との接
続部分においては垂直直線部分が存在するものがあった
(図3,4,5)。これは、噴射材による摩耗によって
該皮膜が薄くなってくると、皮膜が一気に脱落すること
によるものと考えられる。従って、この垂直直線部分の
長さが短ければ、このような一気に脱落させられる部分
の層厚が薄いと考えられ、皮膜と母材との密着性が高い
ものと考えられる。更に、垂直直線部分が存在しなけれ
ば(図6)、皮膜と母材との密着性が極めて強固か若し
くは明瞭な界面が存在しないものと考えられる。In some cases, a vertical straight line exists at the connection between the gentle gradient and the steep gradient (FIGS. 3, 4, and 5). This is considered to be due to the film falling off at a stretch when the film becomes thinner due to abrasion by the spray material. Therefore, if the length of the vertical straight portion is short, it is considered that the layer thickness of such a portion which is dropped at a stretch is thin, and it is considered that the adhesion between the film and the base material is high. Further, if there is no vertical straight line portion (FIG. 6), it is considered that the adhesion between the coating and the base material is extremely strong or there is no clear interface.
【0047】また、垂直直線部分が皮膜側に存在する場
合には、皮膜の実際の厚さに比して皮膜としての特性を
発揮する層厚が薄いことを示すものと考えられる。Further, when the vertical straight portion exists on the film side, it is considered that the layer thickness exhibiting the characteristics as the film is smaller than the actual thickness of the film.
【0048】このように、本実施例によれば、皮膜の様
々な特性が明らかになることが確認された。As described above, according to this example, it was confirmed that various characteristics of the film became clear.
【0049】また、この実験結果は極めて再現性に秀れ
ていることも確認されており、予めデータを集めておけ
ば、未知の皮膜であっても簡単に特性を評価して分析,
特定を行えることになる。It has also been confirmed that the results of this experiment are extremely excellent in reproducibility. If data is collected in advance, the characteristics of an unknown film can be easily evaluated and analyzed.
It will be possible to specify.
【0050】また、このような実験結果は、半導体素材
に設けられる多層皮膜についても確認されており、各層
間の界面状態や密着性などを評価できることになる。Such experimental results have also been confirmed for a multilayer film provided on a semiconductor material, and it is possible to evaluate the interface state and adhesion between the respective layers.
【0051】尚、回動機構6によって被験体1の表面に
対する噴射材4の投射角度を変化させて試験を行うこと
により、各被験体1の皮膜ごとの特徴的な特性(角度依
存性)も簡単且つ明確に判断できることが確認された。
即ち、このようなサンプルデータを多数集めることによ
り、皮膜ごとの機械的特性や化学的特性の判定を試験デ
ータの比較によって簡単に行え、また、素材不明の皮膜
でも本実施例により簡単に材質を特定したりできること
になる。By changing the projection angle of the blasting material 4 on the surface of the subject 1 by the rotating mechanism 6 and performing the test, the characteristic characteristic (angle dependency) of each film of each subject 1 is also improved. It was confirmed that the judgment could be made easily and clearly.
That is, by collecting a large number of such sample data, it is possible to easily determine the mechanical properties and chemical properties of each film by comparing the test data, and even in the case of a film whose material is unknown, the material can be easily determined by this embodiment. And can be identified.
【0052】本実施例の作用効果は下記の通りである。The operation and effect of this embodiment are as follows.
【0053】噴射材4中の液体によって砥粒や摩耗粉
(脱落粉)が被験体1の表面から良好に除去されるた
め、噴射機構5から噴射された噴射材4が皮膜や母材に
常に良好に衝突されることになり、皮膜や母材の減量が
安定的且つ良好に進むことになる。Since the abrasive grains and abrasion powder (falling powder) are satisfactorily removed from the surface of the test subject 1 by the liquid in the spray material 4, the spray material 4 sprayed from the spray mechanism 5 is always applied to the film or the base material. Collisions are satisfactorily performed, and the weight loss of the film and the base material proceeds stably and well.
【0054】噴射材4中の砥粒は液体と一緒に扱われる
為、粒径の小さい砥粒、例えば、数十乃至数μmの砥粒
や1μm以下の砥粒でも良好に扱えることになり、数十
乃至数μm程度の極めて薄い皮膜でも少しずつ削って再
現性良く実験することができ、皮膜の特性を正確に導き
出して評価できることになる。Since the abrasive grains in the blast material 4 are handled together with the liquid, even abrasive grains having a small particle size, for example, abrasive grains of several tens to several μm or abrasive grains of 1 μm or less can be handled well. Even an extremely thin film having a thickness of about several tens to several μm can be removed little by little and an experiment can be performed with good reproducibility, and the characteristics of the film can be accurately derived and evaluated.
【0055】この点、ブラスト・エロージョン法では、
粒径の大きい砥粒しか使用できない為、数μm程度の極
めて薄い皮膜を試験しようとすると皮膜が一気に脱落し
てしまい、再現性良く実験することができない。また、
粒径の大きい砥粒を使用し且つ噴射速度を遅くすると、
皮膜は元々摩耗性が高いことが多い為、皮膜を摩耗する
ことができない。本実施例では、粒径の小さい砥粒を使
用し且つ噴射速度は速いままとすることができる為、薄
い皮膜でも少しずつ削ることができる。In this respect, in the blast erosion method,
Since only abrasive grains having a large particle size can be used, when an extremely thin film having a thickness of about several μm is tested, the film falls off at a stretch, and the experiment cannot be performed with good reproducibility. Also,
When using large abrasive grains and slowing down the injection speed,
Since the film often has high abrasion by nature, the film cannot be abraded. In the present embodiment, since abrasive grains having a small particle diameter are used and the injection speed can be kept high, even a thin film can be cut little by little.
【0056】また、ブラスト・エロージョン法では、減
量重量から減量体積を測定する方法を採用しているが、
薄い皮膜の場合、減量する重量が微量となる為、精度良
く測定することは困難である。本実施例は、摩耗深さを
測定する方法を採用している為、僅かな摩耗であっても
測定することができ、精度の良い測定が可能となる。In the blast erosion method, a method of measuring the weight loss volume from the weight loss is adopted.
In the case of a thin film, the weight to be reduced is very small, and it is difficult to measure accurately. In the present embodiment, since a method of measuring the wear depth is employed, even a small amount of wear can be measured, and accurate measurement can be performed.
【0057】また、スクラッチ試験法やすべり摩耗試験
法を応用することも考えられるが、前者は、皮膜の界面
の接着強度を測定することはできるが、他の特性(実質
の皮膜の耐摩耗性など)を正確に測定することができ
ず、後者は、小さな荷重では摩耗が進行せず、必然的に
大きな荷重を作用させたりすべり速度を速くしたりする
ことによって摩耗を行わなければならないが、この場
合、皮膜に作用する荷重が大きい為、短時間で皮膜が脱
落してしまい、皮膜の様々な特性を評価することは極め
て困難である。本実施例は、薄い皮膜でも少しずつ削る
ことができる為、短時間で再現性良く皮膜の特性(アブ
レシブ摩耗強度,切削強度など)を評価することができ
る。It is also conceivable to apply a scratch test method or a sliding wear test method. The former method can measure the adhesive strength at the interface of the film, but the other characteristics (abrasion resistance of the actual film) ) Cannot be measured accurately, and the latter does not progress with small loads, and must inevitably wear by applying a large load or increasing the sliding speed, In this case, since the load acting on the film is large, the film falls off in a short time, and it is extremely difficult to evaluate various characteristics of the film. In the present embodiment, even a thin film can be cut little by little, so that the characteristics (abrasive wear strength, cutting strength, etc.) of the film can be evaluated in a short time and with good reproducibility.
【0058】噴射材4中の液体によって被験体1表面の
摩耗時に発生する熱が良好に除去されるため、皮膜や被
験体1が一定条件の温度で削られ、減量されることにな
る。The heat generated when the surface of the subject 1 is worn by the liquid in the propellant 4 is removed well, so that the coating and the subject 1 are shaved at a certain temperature and reduced in weight.
【0059】また、噴射材4中の砥粒に液体の膜が形成
されるため、該砥粒の表面積が大きくなり、噴射圧が損
失しにくい。Further, since a liquid film is formed on the abrasive grains in the blast material 4, the surface area of the abrasive grains increases, and the injection pressure is hardly lost.
【0060】噴射材4中の液体及び砥粒が圧搾空気の膨
張により粒子状になって皮膜や被験体1に衝突するた
め、従来のブラスト・エロージョン法と比較した場合、
低い噴射力で高い摩耗力を発揮することができる。Since the liquid and abrasive grains in the propellant 4 are formed into particles by the expansion of the compressed air and collide with the coating or the test object 1, when compared with the conventional blast erosion method,
High wear force can be exhibited with low injection force.
【0061】以上のような作用により、本実施例は、極
めて薄い皮膜でも良好に減量させることができ、しか
も、測定誤差が小さくて再現性良く短時間で皮膜評価試
験を行うことができるのである。According to the above-described operation, the present embodiment can satisfactorily reduce the weight of an extremely thin film, and can perform a film evaluation test in a short time with a small measurement error and good reproducibility. .
【0062】本実施例は上述のように構成したから、極
めて簡易な操作手順で極めて薄い皮膜でも簡単に皮膜特
性を評価することができ、また、測定誤差が小さくて再
現性にも秀れた極めて実用性に秀れた皮膜評価試験機と
なる。Since the present embodiment is constructed as described above, it is possible to easily evaluate the film characteristics even with an extremely thin film by an extremely simple operation procedure, and has a small measurement error and excellent reproducibility. It is a coating evaluation tester with excellent practicality.
【0063】また、噴射された噴射材4は被験体1の表
面に衝突した後速やかに落下するため微粒子の砥粒や摩
耗粉が空中に長時間散乱したりせず、従来のエロージョ
ン試験機のように噴射する噴射室内の密閉性を高めた
り、砥粒を回収する集塵フィルタやサイクロンなどの装
置を取り付ける必要がなく、装置の小型化が容易となる
実用性に秀れた皮膜評価試験機となる。The sprayed material 4 collides with the surface of the subject 1 and falls immediately after the collision, so that the abrasive particles and abrasion powder of fine particles are not scattered in the air for a long time. It is not necessary to improve the airtightness of the spray chamber for spraying, and it is not necessary to install a device such as a dust collection filter or cyclone that collects abrasive particles, and it is easy to miniaturize the device. Becomes
【0064】また、砥粒を含んだ水滴は固定機構3に固
定された被験体1の下方に設けられた回収機構7に溜ま
り、更に、この噴射材4は回収機構7と噴射機構5とを
連結する送流機構8により再び噴射機構5から噴射し得
るように構成したから、噴射材容器や回収容器が不要で
装置を小型化できるし、噴射材4はそのまま再利用する
ことができるより一層実用性に秀れた皮膜評価試験機と
なる。Further, water droplets containing abrasive grains accumulate in a collecting mechanism 7 provided below the subject 1 fixed to the fixing mechanism 3. Since the jetting mechanism 5 is configured so that the jetting mechanism 5 can inject the jetting material again, the jetting material container and the collection container are not required, the apparatus can be downsized, and the jetting material 4 can be reused as it is. The film evaluation tester excels in practicality.
【0065】また、回収機構7には撹拌機構9が設けら
れているから、噴射材4中の砥粒は均一に分散され、常
に一定の砥粒濃度で噴射機構5に噴射材4が送流されて
砥粒濃度のむらによる誤差がなく、しかも噴射機構5の
ノズルや送流機構8を詰まらせにくいより一層実用性に
秀れた皮膜評価試験機となる。Since the recovery mechanism 7 is provided with the stirring mechanism 9, the abrasive grains in the blasting material 4 are uniformly dispersed, and the blasting material 4 is always sent to the blasting mechanism 5 at a constant abrasive grain concentration. As a result, there is no error due to unevenness in the abrasive grain concentration, and the coating evaluation tester is more practical because it hardly clogs the nozzles of the injection mechanism 5 and the feed mechanism 8.
【0066】また、固定機構3には回動機構6が設けら
れているから、噴射する噴射材4に対する被験体1の表
面の角度を色々と変えて試験を行うことにより皮膜の特
性ををより一層正確に把握することができるより一層実
用性に秀れた皮膜評価試験機となる。Further, since the rotating mechanism 6 is provided in the fixing mechanism 3, the characteristics of the film can be further improved by performing tests by changing the angle of the surface of the test object 1 with respect to the jetting material 4 to be jetted in various ways. It is a coating evaluation tester that is more practical and can be grasped more accurately.
【0067】また、回動機構6により被験体1を回動し
ても該被験体1に噴射される噴射材4の噴射移動距離が
変わらないように設定されているから、様々な角度で測
定を行っても皮膜の評価の比較を簡単に行うことができ
るより一層実用性に秀れた皮膜評価試験機となる。Further, since the moving distance of the blast material 4 sprayed onto the subject 1 is not changed even when the subject 1 is rotated by the rotating mechanism 6, the measurement is performed at various angles. This makes it possible to easily compare the evaluations of the coatings even when the coating is performed.
【0068】[0068]
【発明の効果】本発明によれば、径の小さい砥粒であっ
ても使用することができる為、従来評価が難しかった非
常に薄い皮膜であっても、極めて再現性良く,精度良
く,短時間にその特性を評価することができる実用性に
秀れた皮膜評価試験機となる。 According to the present invention, even abrasive grains having a small diameter can be used. Therefore, even a very thin film, which has been difficult to evaluate in the past, has extremely good reproducibility, high accuracy, and short length. It is a film evaluation tester with excellent practicality that can evaluate its characteristics in time.
【0069】また、噴射材中の砥粒の径が非常に小さい
為、数十乃至数μm程度の皮膜であっても良好に少しず
つ摩耗させてその特性を評価することができる。 Further , since the diameter of the abrasive grains in the sprayed material is very small, even if the coating has a thickness of about several tens to several μm, it can be satisfactorily abraded little by little and its characteristics can be evaluated .
【0070】また、被験体の減量と該減量に要した時間
の関係をグラフ化することにより、皮膜や、皮膜と母材
との密着性や界面状態や、多層膜の場合には皮膜同志の
密着性や界面状態と評価して、皮膜の持つ特性を確実に
評価することができる実用性に秀れた画期的な皮膜評価
試験方法となる。 The weight loss of the subject and the time required for the weight loss
By plotting the relationship between
And the state of the interface with the
Evaluate the adhesion and interface state to ensure the properties of the film
Innovative film evaluation with excellent practicality that can be evaluated
Test method.
【0071】また、半導体などに形成される多層の皮膜
であっても簡単にその特性を評価することができる実用
性に秀れた画期的な皮膜評価試験方法となる。 Also, a multilayer film formed on a semiconductor or the like.
Practicality that can easily evaluate its characteristics
This is a revolutionary film evaluation test method with excellent properties.
【0072】請求項3記載の発明においては、回動機構
により被験体を回動させて皮膜を傾斜面とした際の特性
も簡単に評価することができる。 According to the third aspect of the present invention, it is possible to easily evaluate the characteristics when the subject is turned by the turning mechanism to make the film an inclined surface .
【0073】また、回収機構により繰り返し噴射材を使
用することができ、この噴射材も撹拌機構によって常に
一定の状態とされる為、常に再現性良く皮膜の特性を評
価することができる。 Further, the jetting material can be repeatedly used by the collecting mechanism, and the jetting material is always kept in a constant state by the stirring mechanism, so that the characteristics of the film can be evaluated with good reproducibility .
【0074】また、圧力調節機構によって噴射圧を変え
た場合の特性評価も簡単に行うことができる。 Further, the characteristic evaluation when the injection pressure is changed by the pressure adjusting mechanism can be easily performed .
【図1】本実施例の説明側断面図である。FIG. 1 is an explanatory side sectional view of this embodiment.
【図2】本実施例の説明平断面図である。FIG. 2 is an explanatory plan sectional view of the present embodiment.
【図3】実験例の一例を示すグラフである。FIG. 3 is a graph showing an example of an experimental example.
【図4】実験例の一例を示すグラフである。FIG. 4 is a graph showing an example of an experimental example.
【図5】実験例の一例を示すグラフである。FIG. 5 is a graph showing an example of an experimental example.
【図6】実験例の一例を示すグラフである。FIG. 6 is a graph showing an example of an experimental example.
1 被験体 2 皮膜評価試験機 3 固定機構 4 噴射材 5 噴射機構 6 回動機構 7 回収機構 8 送流機構 9 撹拌機構 16 圧力調節機構 DESCRIPTION OF SYMBOLS 1 Subject 2 Film evaluation test machine 3 Fixing mechanism 4 Injection material 5 Injection mechanism 6 Rotating mechanism 7 Recovery mechanism 8 Sending mechanism 9 Stirring mechanism 16 Pressure adjustment mechanism
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平4−366747(JP,A) 特開 平8−62113(JP,A) 特開 昭58−211628(JP,A) (58)調査した分野(Int.Cl.7,DB名) G01N 3/56 JICSTファイル(JOIS)────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-4-366747 (JP, A) JP-A-8-62113 (JP, A) JP-A-58-211628 (JP, A) (58) Survey Field (Int.Cl. 7 , DB name) G01N 3/56 JICST file (JOIS)
Claims (3)
に形成されている皮膜の特性を評価する方法であって、
被験体を固定する固定機構と、固定機構に固定された被
験体に液体に砥粒が混入された噴射材を圧搾空気と共に
噴射して該被験体を減量させる噴射機構とを有する皮膜
評価試験機を採用し、前記砥粒として最大粒径が25μ
m以下の砥粒を採用し、噴射機構から噴射材を圧搾空気
と共に噴射して被験体を減量し、被験体の減量と該減量
に要した時間との因果関係を測定して該披験体の表面に
形成されている皮膜と母材との界面の密着性や接着強度
等の境界特性を評価することを特徴とする皮膜評価試験
方法。 1. A method for evaluating characteristics of a film formed on a surface of a subject such as a metal material or a synthetic resin material ,
A coating having a fixing mechanism for fixing a subject, and a jetting mechanism for reducing the quantity of the subject by jetting an blasting material in which abrasive grains are mixed with a liquid to the subject fixed to the fixing mechanism together with compressed air.
Adopted an evaluation tester , the maximum particle size of the abrasive was 25μ
m or less, and pressurized air from the injection mechanism
To reduce the weight of the subject,
The causal relationship with the time required for
Adhesion and adhesion strength at the interface between the formed film and the base material
Film evaluation test characterized by evaluating boundary characteristics such as
Method.
に形成されている皮膜の特性を評価する方法であって、
被験体を固定する固定機構と、固定機構に固定された被
験体に液体に砥粒が混入された噴射材を圧搾空気と共に
噴射して該被験体を減量させる噴射機構とを有する皮膜
評価試験機を採用し、前記砥粒として最大粒径が25μ
m以下の砥粒を採用し、噴射機構から噴射材を圧搾空気
と共に噴射して被験体を減量し、被験体の減量と該減量
に要した時間との因果関係を測定して該披験体の表面に
形成されている多層膜の該膜同志の界面若しくは膜と母
材の界面の密着性や接着強度等の境界特性を評価するこ
とを特徴とする皮膜評価試験方法。 2. A method for evaluating characteristics of a film formed on a surface of a subject, such as a metal material or a synthetic resin material ,
A coating having a fixing mechanism for fixing a subject, and a jetting mechanism for reducing the quantity of the subject by jetting an blasting material in which abrasive grains are mixed with a liquid to the subject fixed to the fixing mechanism together with compressed air.
Adopted an evaluation tester , the maximum particle size of the abrasive was 25μ
m or less, and pressurized air from the injection mechanism
To reduce the weight of the subject,
The causal relationship with the time required for
The interface between the layers of the formed multilayer film or the film and the mother
Evaluate the boundary characteristics such as adhesion and bonding strength at the interface of the material.
And a coating evaluation test method.
評価試験方法において、噴射材は、樹脂粒,金属粒,セ
ラミックス粒若しくはガラス粒から成る砥粒が水,アル
カリなどの水溶液若しくはアルコールなどの溶剤に混入
されてなるものであり、固定機構には、該固定機構に固
定された被験体を回動して噴射材と被験体との当接角度
を調節できる回動機構が設けられ、この回動機構の回動
軸線に固定機構に固定された被験体が位置するように設
定して該被験体を回動しても該被験体に噴射される噴射
材の噴射移動距離が変わらないように構成し、この固定
機構に固定された被験体の下方には、噴射機構から被験
体に噴射された噴射材を回収する回収機構が設けられ、
この回収機構には、回収機構内の噴射材の液体と砥粒と
を略一定の比率で且つ均一となるように混合する撹拌機
構が設けられ、この回収機構と噴射機構とは噴射材を送
流する送流機構により連結され、被験体に噴射された噴
射材が、回収機構と送流機構とを経由して再度噴射機構
から圧搾空気と共に被験体に噴射されるように設定さ
れ、この噴射材と圧搾空気との噴射圧力を調節する圧力
調節機構が設けられていることを特徴とする皮膜評価試
験方法。3. The film according to claim 1, wherein
In the evaluation test method, the blasting material is obtained by mixing abrasive grains composed of resin grains, metal grains, ceramic grains or glass grains into a solution such as an aqueous solution such as water or alkali or a solvent such as alcohol. A rotating mechanism is provided that can rotate the subject fixed to the fixing mechanism to adjust the contact angle between the spray material and the subject, and the subject fixed to the fixing mechanism on the rotating axis of the rotating mechanism. Even if the body is set and the subject is rotated, the ejection movement distance of the injection material ejected to the subject is not changed even if the subject is rotated, and the body is positioned below the subject fixed to the fixing mechanism. The is provided with a collection mechanism for collecting the injection material injected from the injection mechanism to the subject,
The recovery mechanism is provided with a stirring mechanism that mixes the liquid of the propellant and the abrasive particles in the recovery mechanism at a substantially constant ratio and is uniform, and the recovery mechanism and the injection mechanism feed the propellant. It is connected by the flow sending mechanism that flows and is set so that the injection material injected to the subject is again injected from the injection mechanism to the subject together with the compressed air via the collection mechanism and the flow sending mechanism, The coating evaluation test , characterized in that a pressure adjustment mechanism for adjusting the injection pressure between the material and compressed air is provided.
Test method .
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|---|---|---|---|
| JP36525799A JP3356415B2 (en) | 1999-12-22 | 1999-12-22 | Film evaluation test method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP36525799A JP3356415B2 (en) | 1999-12-22 | 1999-12-22 | Film evaluation test method |
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| Publication Number | Publication Date |
|---|---|
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| JP3356415B2 true JP3356415B2 (en) | 2002-12-16 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010237073A (en) * | 2009-03-31 | 2010-10-21 | Univ Of Fukui | Film evaluation method |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4510612B2 (en) * | 2004-12-28 | 2010-07-28 | マコー株式会社 | Film evaluation tester |
| JP2010237071A (en) * | 2009-03-31 | 2010-10-21 | Macoho Co Ltd | Coating evaluation device |
| JP5881097B2 (en) * | 2011-08-31 | 2016-03-09 | 株式会社パルメソ | Slurry injection device used for subject evaluation |
| JP7007563B2 (en) * | 2017-10-24 | 2022-02-10 | 国立大学法人福井大学 | Evaluation method for 3D objects |
| JP7084579B2 (en) * | 2018-10-26 | 2022-06-15 | 株式会社神戸製鋼所 | Material adhesion evaluation method |
| CN109900578B (en) * | 2019-03-28 | 2024-06-04 | 北京金轮坤天特种机械有限公司 | Particle abrasion test device and test method |
-
1999
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010237073A (en) * | 2009-03-31 | 2010-10-21 | Univ Of Fukui | Film evaluation method |
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