JP3362891B2 - Adsorption / desorption type gas purifier - Google Patents

Description

Detailed Description of the Invention

[0001]

The present invention relates to a solvent (concentration of about 30 to 300 ppm in an organic solvent represented by toluene or xylene) discharged from a coating factory, a semiconductor manufacturing factory or the like.
This is a device used to process the exhaust gas contained, that is, to remove the solvent in the exhaust gas and concentrate the concentration of the solvent so as to reduce the final treatment amount. By using the adsorption belt provided, a gas to be treated containing an object to be removed such as a solvent is supplied so as to pass through the adsorption belt in the thickness direction, so that the object to be eliminated in the gas to be treated is an adsorption belt. The desorption gas is supplied to the adsorption belt so that the desorption gas is permeated in the thickness direction of the adsorption belt to remove the object to be removed from the adsorption belt while purifying the gas to be treated by adsorbing the desorption gas to the adsorption belt. The present invention relates to an adsorption / desorption type gas purification device that desorbs and updates an adsorption belt and concentrates an object to be removed.

[0002]

2. Description of the Related Art In an adsorption / desorption type gas purifying apparatus according to the present invention for purifying gas using an adsorption belt, for example, fibrous activated carbon is made into paper and is step-processed to be formed into a honeycomb shape having a large number of gas passages. , A block-shaped adsorbent supporting it in a frame is used, and the gas to be treated is allowed to permeate along the gas passage of the adsorbent to bring it into contact with the peripheral wall of the gas passage in which the fibrous activated carbon is dispersed. Compared with a honeycomb rotor type adsorption / desorption type gas purifying apparatus that adsorbs an object to be removed such as the following, there are the following advantages. That is, in the case of the honeycomb rotor type adsorption / desorption type gas purifying apparatus, the gas to be treated is adsorbed by flowing along the gas passage peripheral wall and contacting the adsorbent, so that the size of the adsorbent is reduced. Has a small contact area between the adsorbent and the gas to be treated,
The contact efficiency between the adsorbent and the gas to be treated is poor, and the treatment capacity is small and the cost is high for the size of the adsorbent. Moreover, when the adsorbent is heated and desorbed, the adsorbent is large, and in addition, a large amount of heat is required because the supporting frame takes heat, and the adsorbable state is renewed after desorption. Cooling may be required at the top, and the running cost is high. On the other hand, in the case of the above-described adsorption / desorption type gas purifying apparatus targeted by the present invention, the adsorption belt is made of a fibrous activated carbon felt,
Alternatively, it is possible to increase the contact area between the adsorption belt and the gas to be treated and to improve the contact efficiency by, for example, composing a felt in which activated carbon is dispersed. It can be made thin, and as a result, the adsorption belt can be easily heated and cooled, and the running cost required for heating for desorption is low, and no special equipment is required for adsorption after desorption. Can be cooled. As a conventional adsorption / desorption type gas purifying apparatus having such an advantage, as shown in FIG.
Is unwound from the first roll R1 and wound up by the second roll R2, and in the middle of moving from the first roll R1 to the second roll R2, the processing target gas G1 is supplied to remove the solvent and the like. The object is sucked onto the suction belt 3 and the second
There is known a technique for supplying heated air as a desorption gas G2 to a heating chamber H accommodating the roll R2 of the roller R2 to desorb the adsorbed removal object from the adsorption belt 3 (for example, Japanese Patent Publication No. 53- 9587).

[0003]

However, in the case of the above-mentioned prior art, the suction belt is moved by being unrolled from the first roll and taken up by the second roll so that the object to be removed is sucked onto the suction belt. by supplying in parallel heated air in the heating chamber in such a time of movement, but allows at the same time adsorption and desorption, the suction belt to the second roll that is taken either wound to the end, adsorbed on the first roll Since it is necessary to rewind the belt, the processing form must be a form in which adsorption / desorption and rewinding are alternately repeated.
As a result, in order to carry out a long-time treatment, one suction work time, in which the entire suction belt is unrolled from the first roll, is lengthened, or a plurality of devices are provided to absorb and desorb one. They need to be used alternately so that the other rewinds while they are doing. In the case of the former, not only the winding diameter of the suction belt becomes large and the device attached thereto becomes large and the cost increases, but also the suction belt sucks it in the heating chamber while being wound up on the second roll. If the belt is heated while adsorbing the object to be removed, it may cause an abnormal temperature rise of the adsorption belt, which requires a separate configuration to prevent it. Increasing size and increasing costs are inevitable. This is particularly remarkable when the moving speed of the adsorption belt is increased in order to process the high-concentration target gas. On the other hand, in the latter case, the number of devices increases, and it is inevitable that the devices will be large and the cost will be increased. An object of the present invention is to solve the above-mentioned drawback, that is, even if the gas to be treated has a higher concentration than the concentration in the main use region of the conventional example, it does not lead to an increase in the size and cost of the apparatus. The point is to enable continuous processing for a long time.

[0004]

The adsorption / desorption type gas purifying apparatus according to the first aspect of the present invention is characterized by a moving means for rotatively moving an adsorbing belt having air permeability by winding the adsorption belt along a circulation path. Adsorption means for supplying and exhausting the gas to be treated so as to pass through the adsorption belt in the thickness direction at the setting point of the circulation path, and in the adsorption belt in the thickness direction at another setting point different from the setting point. Desorption means for supplying and discharging desorption gas is provided so as to permeate, and the suction belt is provided with a plurality of belt width restricting bodies for preventing relative approach of both ends in the width direction of the suction belt at intervals in the rotational movement direction. Wear it in front
Of the suction belt,
For each, ventilation from the inner peripheral surface side toward the belt width regulation body
The point is that it is equipped with a ventilation-restricting strip .

A feature of the adsorption / desorption type gas purifying apparatus according to the second aspect of the present invention is that the adsorption belt according to the first aspect of the present invention.
On the outer peripheral surface of the
Spacing multiple notches across the width in the direction of belt rotation
The belt width regulating body, and the notch
Placed in each of the formation locations of the, the ventilation-limiting strip,
The passage at the location where the notch is formed in the suction belt
It is also used as a cut-out ventilation band to prevent air.
There to that point.

[0006]

According to the first aspect of the present invention described above, the adsorption belt is rotated along the circulation path, and the adsorption means and the desorption means are actuated, so that the supply point of the gas to be treated and the desorption gas are removed. Since the adsorption belt can be moved alternately to the supply location, the adsorption target can be adsorbed by the adsorption belt and the adsorbed removal object can be desorbed to the desorption gas. By continuously rotating the adsorption belt and supplying the target gas and the desorption gas in that state, adsorption / desorption can be continuously performed without interruption, and at the time of desorption. Does not overheat the suction belt.
In addition, the suction belt is tensioned in the rotational movement direction in order to reliably and smoothly rotate along the circulation path, and the weight itself acts as the tension especially in the ascending path portion and the descending path portion of the circulation path. However, such a tension acts as a force for narrowing the width of the suction belt, but since a belt width regulator is provided, deformation of the suction belt in the width reduction direction is prevented regardless of the tension or its own weight. be able to. As a result, in advancing the downsizing and downsizing of the equipment, the width of the adsorption target processing gas supply port / processing gas suction port and the desorption unit desorption gas supply port / concentrated gas suction port should be the width of the adsorption belt. Even if they are of a comparable size, their openings are surely positioned within the width of the suction belt so that the gas to be treated and the desorption gas supplied do not pass through the suction belt and the side of the suction belt causes the processing chamber to move. It can be prevented from leaking out. In other words, even if the suction belt has a minimum width,
By using almost the entire width of the suction belt for adsorption and desorption, it is possible to perform efficient adsorption and desorption.

Further , since the ventilation restricting belt prevents the ventilation of the belt width regulating member, the desired adsorption / desorption can be prevented even when the belt width regulating member is installed. In other words, when the belt width regulator passes through the desorption section and is heated by the high temperature desorption gas, the belt width regulation body heats the adsorption belt portion around it after passing through the desorption section. On the other hand, the suction performance of the suction belt is deteriorated, but the heating of the suction belt is deteriorated due to the loss of energy of the desorption gas due to unnecessary heating of the belt width regulator. However, in the first invention, since the desorption gas at the desorption portion is prevented from coming into contact with the belt width regulation body by the ventilation restriction strip, the desorption gas can heat the belt width regulation body unnecessarily. Therefore, it is possible to prevent the heating loss and the deterioration of the adsorption performance due to the belt width regulator. In the second aspect of the present invention, the belt width direction
The suction bell so that it covers the entire width of the belt.
By opening each of the notches formed on the outer peripheral surface of the
The bending of the suction belt due to the rotational movement along the circulation path.
Deformation is facilitated and the suction belt is rotated smoothly.
However, place the belt width regulator at each of the cut formation points.
To prevent ventilation from the inner peripheral surface toward the belt width regulator.
Ventilation-restricted strips for belt width control
Notch that prevents ventilation at the notch formation point
Since it is also used as a ventilation restriction strip,
Place it in a place different from the notch formation point and make a notch
Ventilation-restricting strips for belts
The number of required ventilation restrictors compared to installing them separately from the body
Can be reduced.

[0008]

Therefore, according to the present invention, the adsorption belt is continuously rotatably moved to continuously process the gas containing a high concentration of the object to be removed for a long time without increasing the size and cost of the apparatus. In addition, the desired adsorption / desorption performance can be improved at the same time. Particularly, according to claim 2, the cost can be further reduced.

[0009]

[Example] An example of application to a solvent treatment facility is shown. As shown in FIG. 1, the solvent treatment equipment includes a pretreatment adsorption / desorption gas purification device 1 for concentrating a treatment target gas G1 containing a solvent, which is an example of an object to be removed, and a concentrated gas g2 therefrom. And the final processing device 2 for removing the solvent. As shown in FIGS. 2 and 3, the adsorption / desorption type gas purification device 1 includes a breathable adsorption belt 3 formed in a ring shape (endless belt shape) and the adsorption belt 3 wound around along a circulation path. A moving means for rotating and moving is provided in the processing chamber 4, and an adsorbing means, a desorbing means, a separating means, and a position regulating means are provided. The circulation path includes an ascending path portion, a horizontal upper path portion connected to the upper end thereof, a descending path portion continuing to the end thereof, and a horizontal lower path portion from the descending path portion to the ascending path portion. . The adsorption belt 3 uses activated carbon as an adsorbent to adsorb the solvent in the gas G1 to be treated at room temperature,
It is desorbed by heating (100 to 130 degrees).
Specifically, as shown in FIG. 4, a breathable mat 3A obtained by processing fibrous activated carbon into a felt shape is provided, and the inner peripheral surface of the mat 3A has heat resistance (performance capable of withstanding about 130 ° C.) and An endless belt-like reinforcing base material 3B made of a breathable non-woven fabric is overlaid and fixed, and a protective layer 3C made of a non-woven fabric having heat resistance (performance up to about 130 ° C.) and breathable on the outer peripheral surface of the mat 3A. Are overlapped and fixed, and a belt width restricting body 3D and first and second ventilation limiting strips 3E and 3F are provided. To give an example of real numerical values of the mat 3A, the activated carbon fiber has a diameter of 10 to 20 μm and a thickness of 10 to
20 mm, and the basis weight is about 600 g / m ² . In addition, in order to make it easy to understand in the figure, the base material 3B and the protective layer 3C
Although it is shown thick, the actual thickness of the base material 3B and the protective layer 3C is very thin. Then, on the outer peripheral surface of the suction belt 3, a plurality of notches 5 having a width over the entire width of the belt and a depth reaching the outer peripheral surface of the base material 3B are arranged along the belt width direction at intervals in the rotational movement direction. It is formed separately. That is, the mat 3A is divided into a plurality of unit bodies 3a in the rotational movement direction, and the protective layer 3C is formed.
Is bent and formed so as to cover the end face of the unit body 3a in the rotational movement direction. Therefore, the suction belt 3 is separated from each other in the rotational movement direction so that the outer peripheral surface sides of the mats 3A adjacent to each other in the rotational movement direction open the notches 5 when the respective parts pass through the corner portions. It is configured to absorb the tensile force of. The belt width restricting body 3D is for preventing the widthwise ends of the suction belt 3 from relatively approaching each other, and is preferably made of a metal material or synthetic resin (having heat resistance and being resistant to thermal deformation and thermal expansion). .)
Etc., and is formed into a round bar shape, a square bar shape, or a plate shape. Incidentally, there is shown what the round bar in the drawing, the size
The shape and shape should be set so as not to obstruct the passage of gas as much as possible. Then, the suction belt 3 is arranged at each of the cut forming portions. The first ventilation limiting strip 3E
Is of a non-breathable, the is intended for the cut to prevent the venting of the inner peripheral surface thereof is mounted in a state over the entire width of the suction belt 3, each notch area where the cut area where the suction belt 3 , A heat-resistant synthetic resin sheet. The second ventilation limiting strip 3F
Is non-breathable, and is attached to each inner peripheral surface of the belt width regulating body installation portion of the adsorption belt 3 so as to cover the entire width of the adsorption belt 3, and the belt width regulating bodies 3D are attached from the inner peripheral surface side. For belt width regulators that prevent airflow toward
Is of, is also used configured with said first vent restriction strip 3E. The moving means is a net conveyor 6 that transfers the suction belt 3 along the circulation path by rotating and moving the suction belt 3 along the circulation path in a state where the suction belt 3 is overlapped on the outer peripheral surface thereof. When,
A guide mechanism for moving and guiding it, a drive roller 6B,
It consists of a tension mechanism. The conveyor net 6A
As shown in FIGS. 5 to 7, a net formed by weaving a flat belt-shaped vertical net member 6a in a posture along the rotational movement direction and a horizontal net member 6b in a posture along the width direction is provided. The reinforcing material 6c is attached to both ends of the. The vertical net member 6a is made of aramid resin having high tensile strength, and the horizontal net member 6b is made of Teflon resin. The thickness t of the conveyor net 6A is about 0.5 to 1 mm in order to obtain good flexibility, and the size of the mesh is 5
mm × 5 mm, the width of the net material is about 1 mm.
The guide mechanism includes guide rollers 7 arranged at the corners of the circulation path, and guide rails 8 arranged on the ascending path portion, the descending path portion, and the upper path portion. As shown in FIGS. 6 and 7, the guide rail 8 engages with the pin 9 fixed to the reinforcing belt 6c of the conveyor net 6A, thereby forming a guide groove 8a for restricting the positional deviation of the conveyor net 6A in the width direction. , A guide surface 8b that slides on the inner peripheral surface of the conveyor net 6A to prevent the conveyor net 6A from swinging in the thickness direction, and the end portion 8c of the guide surface 8b on the movable side is a guide rail. Pin 9 on the end face of 8
It is formed in an inclined posture so that it is not caught. The drive roller 6B is configured by interlocking one of the guide rollers 7 with an actuator such as a motor 10, and the peripheral surface thereof is made of a soft material such as rubber so that it enters the eye of the conveyor net 6A and engages with it. It is composed of a material 11. In the lower side path portion of the circulation path, the tension mechanism lifts the conveyor net 6A upward by the tension roller 12 to apply a tension to the conveyor net 6A. The suction belt 3 is separated upward from the suction belt 3 and the suction belt 3 is in a free state. That is, the tension mechanism constitutes the separating means that separates the conveyor net 6A from the suction belt 3 upward so that the suction belt 3 is in a free state. The adsorbing means is means for adsorbing and removing the solvent in the gas to be treated G1 by the adsorbing belt 3, and the ascending path portion and the descending path portion of the circulation path are arranged in the adsorbing belt 3 in the thickness direction. The processing target gas G1 is supplied from the outer peripheral surface side so as to permeate, and the processing gas g1 which has absorbed and removed the solvent by the adsorption belt 3 and has permeated to the inner peripheral surface side is discharged.
More specifically, as shown in FIG. 8, the processing chamber is provided via a processing target gas supply port 14a formed in a portion corresponding to an ascending path portion and a descending path portion in the outer case 13 forming the processing chamber 4. 4, a suction supply duct 14 for supplying the processing target gas G1 between the outer case 13 and the outer peripheral surface of the suction belt 3, and an inner peripheral surface of the suction belt 3 in a portion surrounded by the suction belt 3. Gas inlet 1 close to
Processing gas g1 that has permeated from the inside of the adsorption belt 3 via 5a
And a processing gas discharge duct 15 for sucking and discharging the processing gas to the outside of the processing chamber 4, and a supply fan F1 for supplying the processing target gas G1.
And an exhaust fan f1 for processing gas g1. In other words, the processing target gas supply port 14a and the processing gas suction port 15a form an adsorption unit located in the processing chamber 4 for supplying and discharging the processing target gas G1 to and from the adsorption belt 3. The desorption means is a means for desorbing the solvent adsorbed on the adsorption belt 3 with a high-temperature desorption gas G2, and permeates the adsorption belt 3 in the thickness direction at the upper side path portion of the circulation path. Desorption gas G2
Is supplied from the inner peripheral surface side, and the concentrated gas g2 that has desorbed the solvent from the adsorption belt 3 and has permeated to the outer peripheral surface side is discharged. More specifically, as shown in FIG. 8, suction is performed through a desorption gas supply port 16a located in the processing chamber 4 and surrounded by the suction belt 3 in the vicinity of the inner peripheral surface of the suction belt 3. Desorption supply duct 1 for supplying the desorption gas G2 to the belt 3 from the inner peripheral surface side
6 and the concentrated gas suction port 17a located near the outer peripheral surface of the adsorption belt 3 at a position facing the desorption gas supply port 16a of the desorption supply duct 16 in the processing chamber 4 with the adsorption belt 3 interposed therebetween. A concentrated gas discharge duct 17 for discharging the concentrated gas g2 that has passed through the adsorption belt 3 to the outside of the processing chamber 4, and a supply fan F2 for the desorption gas G2 and an exhaust fan f2 for the concentrated gas g2. Has been done. That is, the desorption gas supply port 16a and the concentrated gas suction port 17a constitute a desorption unit located in the processing chamber 4 for supplying and discharging the desorption gas G2 to and from the adsorption belt 3. The concentrated gas exhaust duct 17 is an exhaust duct for supplying the concentrated gas g2 to the final processing device 2. Then, the desorption gas supply port 16a is configured to have a size such that the outer contour thereof is located inside the concentrated gas suction port 17a, and the supply port 16a and the suction belt 3 adsorb the supply port with a gap d (about 2 mm to 3 mm). (A size not to contact the belt 3) and the pressure P3 in the detachable supply duct 16 is greater than the pressure in the outer case 13, that is, the pressure P1 in the suction supply duct 14 as shown in FIG. Also, the desorption gas G is slightly increased from the desorption supply duct 16 through the gap d.
By allowing 2 to be discharged into the processing chamber 4, the desorption gas G2 supplied to the adsorption belt 3 is configured so that the cold gas in the processing chamber 4 does not mix. As described above, the control for discharging the desorption gas G2 from the gap d detects the pressure P3 in the desorption supply duct 16 and the pressure P1 in the processing chamber 4, and the differential pressure thereof becomes the set value. Although the supply pressure of the desorption gas G2 and the suction pressure of the concentrated gas g2 may be controlled as described above, the desorption gas G2 is provided in the processing chamber 4 when the adsorption unit and the desorption unit are arranged as described above. When it is possible to correlate the temperature inside the processing chamber 4 with the discharge amount of the desorption gas G2, such as when the temperature stratification tends to be formed according to the discharge amount of the Is also good.
By the way, the pressure P1 of the adsorption supply duct 14, the pressure P2 of the processing gas discharge duct 15, the pressure P3 of the desorption supply duct 16 and the pressure P4 of the concentrated gas discharge duct 17 are P2 <
There is a relationship of P1 <P3 and P4 <P3. Further, the suction means and the desorption means are provided with suction deformation preventing means for preventing deformation of the suction belt 3 due to gas suction. As shown in FIGS. 9 and 10, the suction-deformation preventing means for suction includes a support plate 18 for sealing which supports the conveyor net 6A and the suction belt 3 against suction over the entire circumference of the processing gas suction port 15a. , Support 19. The support plate 1
8 are located at the front and rear ends of the processing gas suction port 15a in the rotational movement direction, and the front and rear support portions 18A having a set length L in the rotational movement direction and the processing gas suction port 15 are provided.
It is composed of left and right support portions 18B located at both ends in the left-right direction (width direction) of a and having a set length L in the left-right direction. The support body 19 includes rollers 19B for supporting the conveyor net 6A at a plurality of positions spaced apart in the rotational movement direction of the conveyor frame 19A, and the suction belt 3
It is configured to be freely rotatable around a horizontal axis along the width direction of the. That is, the plurality of rollers 19B are configured to support the conveyor net 6A without sliding resistance by rotating around the horizontal axis along with the rotational movement of the conveyor net 6A. As shown in FIGS. 11 and 12, the suction-deformation preventing means for detachment includes a support plate 20 for sealing which supports the suction belt 3 against the suction in the entire circumference of the concentrated gas suction port 17a, and a support member. 21 and. The support plates 20 are located at the front and rear ends of the concentrated gas suction port 17a in the rotational movement direction, and the front and rear support portions 20A having a set length L in the rotational movement direction and the left and right ends of the concentrated gas suction port 17a. And the left and right support portions 20B having a set length L in the left-right direction.
Consists of. The support 21 is a conveyor frame 21.
At each of a plurality of locations spaced in the rotational movement direction of A,
The roller 21B supporting the suction belt 3 is attached to the suction belt 3
It is configured to be freely rotatable around a horizontal axis along the width direction of the. That is, the plurality of rollers 21B are configured to support the suction belt 3 without sliding resistance by rotating around the horizontal axis along with the rotation movement of the suction belt 3. The roller 21B of the suction deformation preventing means for detachment is the roller 1B of the suction deformation preventing means for suction.
It has a larger diameter than 9B. In addition, as an example of the arrangement means of the suction roller 19B and the detaching roller 21B, as shown in FIGS. 9 and 11, a long object having a length corresponding to the width of the suction belt 3 is arranged in a line. Although the arrangement is shown, as shown in FIGS. 13A and 13B, the short objects may be provided in a plurality of rows in the width direction. in this case,
Whichever of the form shown in (a) is arranged in a state where adjacent ones in the width direction are located at the same position in the rotational movement direction and the form is arranged in zigzag as shown in (b) good. As shown in FIG. 14, the position regulating means is
On both the left and right sides of the lower path portion, the left and right edges of the suction belt 3 which is free from the conveyor net 6A,
More specifically, a regulation plate 22 that regulates the position of the suction belt 3 in the width direction by sliding on the end portion of the belt width regulation body 3D that projects outward in the width direction is provided. There is.

[Other Embodiments] In the above embodiment, the circulation path is provided with the ascending path portion, the descending path portion, the upper side path portion and the lower side path portion, but the shape of the circulation path is appropriately changed. You are free. In the above embodiment, the adsorption is performed at two points in the circulation path and the desorption is performed at one point, but the number of them is not critical. In the above-described embodiment, the belt width restricting body 3D is arranged at the cut forming portion, but as shown in FIG. 15, the belt width restricting body 3D may be arranged at a position different from the cut forming portion. In this case, the first ventilation limiting strip 3E and the second ventilation limiting strip 3F are installed separately. In the above example,
The mat 3A is composed of the unit bodies 3a in which adjacent ones are separated from each other in the rotational movement direction. As shown in FIG. 16, the notch 5 has a depth up to the middle of the mat 3A in the thickness direction. Then, the mat 3A may be integrated in series by itself. Although the suction belt 3 with the notch 5 is shown in the above embodiment, as shown in FIG. 17, the suction belt 3 is provided with the U-shaped reinforcing members 3G at both ends in the width direction of the mat 3A. A flat reinforcing member 3H is attached to the inner and outer circumferences of the middle so as to sandwich the mat 3A, thereby improving anti-pullability and protecting the widthwise end of the mat 3A. As shown in FIG. 18, a reinforcing glass fiber net 3J is formed on the inner peripheral surface of the mat 3A.
May be attached. The conveyor net 6A may be configured as follows. As shown in FIGS. 19 and 20, the net shown in the above embodiment is attached to a frame that is rotatable and movable along the circulation path. In the frame, two reinforcing driving belts 6d are arranged at intervals in the width direction, and the driving belts 6d are connected to each other at positions separated in the rotational movement direction to maintain the distance. The reinforcing member 6e is provided so as to prevent the drive belts 6d from being misaligned in the rotational direction. 6
f is a pair of inner and outer non-breathable sheets attached to the net while sandwiching the reinforcing member 6e and the net from the thickness direction. This is a sheet for fixing and connecting the reinforcing member 6e and the net, especially the vertical net member 6a. In addition to being integrated, ventilation is restricted to the reinforcing material 6e so that gas does not come into contact with the reinforcing material 6e. The drive belt 6d is a V-belt, a timing belt, or the like.
The one that drives and moves and guides A is a pulley with a V groove or a pulley with teeth. Also, the reinforcing material 6e
Is made of a metal material, a synthetic resin material, or the like, has a flat plate shape or a rod shape (shape such as a circle or a corner), and preferably has excellent bending rigidity. The above conveyor net 6A
In the case of, the nets are pulled by their respective reinforcing members 6e at their full widths when rotating, and as a result, the nets are easily rotated and moved uniformly over their entire widths, and only the tension between the reinforcing members 6e acts on the nets. However, the life of the net is extended. Further, the above conveyor net 6A may be configured as follows. That is, as shown in FIGS. 21 and 22,
Both ends of the reinforcing member 6e are extended outward. In this case, as a drive configuration of the conveyor net 6A, drive chains CH are provided on both sides of the conveyor net 6A.
In addition, it is possible to adopt a type in which a linking portion L that is connected to or engages with the extended end portion 6g of the reinforcing member 6e is provided and the conveyor net 6A is driven by chain drive. In the above embodiment, the support 19 of the suction deformation preventing means for suction is used.
A so-called roller conveyor including a conveyor frame 19A and rollers 19B is shown as the above.
As shown in FIG. 23, the reference numeral 9 indicates V at each of a plurality of positions in the processing gas suction port 15a spaced in the width direction.
A plurality of belt conveyors in which a belt B typified by a belt or a timing belt (a toothed belt for anti-slip) is wound between pulleys P are rotated by the suction belt 3 while following the rotation of the suction belt 3. It may be arranged so as to support the suction belt 3. In the above-described embodiment, the so-called roller conveyor including the conveyor frame 21A and the rollers 21B is shown as the support 21 of the suction-deformation preventing means for detachment.
As shown in FIG. 24, as shown in FIG.
The suction belt 3 may be arranged so as to be supported by the conveyor net N while following the rotation of the suction belt 3. The support 19 of the suction deformation preventing means for suction is used as the support 21 of the suction deformation preventing means for detachment, or conversely, the support 21 of the suction deformation preventing means for detachment is used for suction attraction deformation prevention. It is also used as the support 19 of In the above-described embodiment, the adsorption belt 3 is made of fibrous activated carbon processed into a felt shape. However, as the adsorption belt 3, as shown in (a) FIG. 25, a nonwoven fabric having air permeability and flexibility. Such as the one in which granular activated carbon c is carried on the surface of the base material B by adhesion,
(B) As shown in FIG. 26, a plurality of base materials B such as nonwoven fabric having air permeability and flexibility are stacked, and granular activated carbon or fiber activated carbon / powdered activated carbon c is sandwiched between the base materials B, (C) As shown in FIG. 27, a granular activated carbon c may be dispersed and held in a base material B such as a breathable and flexible nonwoven fabric. In the suction belt 3 of these structures is not required adsorption ability to the substrate B itself, because functions that can be used as a belt has only to come to the substrate B, high degree of freedom in material selection of the base material B, As a result, it is easy to obtain a product with excellent durability. In the figure, the activated carbon is greatly exaggerated for easy understanding. Although activated carbon was shown as the adsorbing material in the above-mentioned embodiment and another embodiment, the adsorbing material may be natural or synthetic zeolite. In this case, since the zeolite is nonflammable, it is not necessary to consider damage to the adsorbed substance due to heating by the desorption gas G2, and the degree of freedom in setting the temperature of the desorption gas G2 can be increased.

It should be noted that reference numerals are given in the claims for convenience of comparison with the drawings, but the present invention is not limited to the configuration of the accompanying drawings by the entry.

[Brief description of drawings]

FIG. 1 is a block diagram showing a conceptual configuration of a solvent treatment facility.

FIG. 2 is a cutaway front view of the adsorption / desorption type gas treatment device.

FIG. 3 is a cutaway side view of the adsorption / desorption type gas treatment device.

FIG. 4 is an enlarged sectional view of a main part.

FIG. 5 is a plan view of the main part of the conveyor net.

FIG. 6 is a cross-sectional front view of essential parts showing the relationship between the conveyor net and the guide mechanism.

FIG. 7 is a vertical cross-sectional front view of essential parts showing the relationship between the conveyor net and the guide mechanism.

FIG. 8 is a schematic configuration diagram of an adsorption / desorption gas treatment device.

FIG. 9 is a front view of a main portion showing a suction unit.

FIG. 10 is an enlarged vertical sectional front view of an essential part showing a suction part.

FIG. 11 is a plan view of an essential part showing a detachable part.

FIG. 12 is an enlarged vertical sectional front view of an essential part showing a detachable part.

FIG. 13 is a plan view showing another arrangement example of the support of the suction deformation preventing means for suction / desorption.

FIG. 14 is an enlarged side view of a main part showing a position regulating means.

FIG. 15 is a vertical cross-sectional view of a main part of a suction belt showing another embodiment.

FIG. 16 is a vertical cross-sectional view of a main part of a suction belt showing another embodiment.

FIG. 17 is a perspective view of a suction belt showing another embodiment.

FIG. 18 is a perspective view of a suction belt showing another embodiment.

FIG. 19 is a transverse cross-sectional view of the main part showing another embodiment.

FIG. 20 is a vertical cross-sectional view of a main part showing another embodiment.

FIG. 21 is a cross-sectional view of the main part showing another embodiment.

FIG. 22 is a vertical cross-sectional view of a main part showing another embodiment.

FIG. 23 is a perspective view of a suction unit showing another embodiment.

FIG. 24 is a perspective view of a detachable portion showing another embodiment.

FIG. 25 is a main part (mat) of a suction belt showing another embodiment.
Enlarged sectional view of

FIG. 26 is a main part (mat) of a suction belt showing another embodiment.
Enlarged sectional view of

FIG. 27 is a main part (mat) of a suction belt showing another embodiment.
Enlarged sectional view of

FIG. 28 is a sectional view showing a conventional example.

[Explanation of symbols]

3 Adsorption belt G1 Gas to be treated G2 Desorption gas 3D Belt width regulator 3F Ventilation limiting strip 5 Cut 3E Ventilation limiting strip

Front page continuation (72) Inventor Masao Hyodo 2-6-1, Nishishinjuku, Shinjuku-ku, Tokyo Incorporated company Oki (72) Innovator Shinpei Tanaka 2-6-1 Nishishinjuku, Shinjuku-ku, Tokyo Stock company In-house (56) Reference JP-A-51-32482 (JP, A) JP-A-50-147480 (JP, A) (58) Fields investigated (Int.Cl. ⁷ , DB name) B01D 53/06 B01D 53/34

Claims (2)

(57) [Claims] 1. A moving means for winding and rotating a suction belt (3) having air permeability along a circulation path, and a suction belt (3) inside the suction belt (3) in a thickness direction at a setting position of the circulation path. Adsorption means for supplying / discharging the gas to be treated (G1) so as to permeate through the adsorption belt (3) and a desorption gas (G2) so as to permeate through the adsorption belt (3) in the thickness direction at a different setting position from the setting position A plurality of belt width regulators (3) for preventing the suction belt (3) from relatively approaching each other in the width direction of the suction belt (3).
D) is mounted at intervals in the rotational movement direction, and is attached to the belt width regulating body (3D) of the suction belt (3).
The belt width regulation from the inner peripheral surface side
Ventilation-restricting strips that prevent ventilation toward the control body (3D)
Adsorption / desorption type gas purifier equipped with (3F) . 2. A bell is provided on the outer peripheral surface of the suction belt (3).
In the posture along the width direction,
Form notches (5) at intervals in the direction of belt rotation movement.
The belt width regulating body (3D) of the notch (5)
The ventilation limiting strips (3) are arranged at the respective formation locations.
F) the notch in the suction belt (3)
Ventilation for notches that prevent ventilation at the formation location of (5)
The adsorption / desorption gas purifier according to claim 1, which is also used as the restriction strip (3E) .