JP3374149B2 - Pattern imaging device - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pattern image pickup device used in a TAB tape automatic inspection device for picking up an image of a pattern formed on a tape carrier and inspecting the pattern from this screen.

[0002]

2. Description of the Related Art Generally, as a method for miniaturizing electronic equipment, a copper lead formed on a polyimide tape carrier (hereinafter referred to as a TAB tape) is directly bonded to an electrode of an IC chip to form an external lead. There is a way. The thickness of the copper lead is 20 to 30 μm, and the width is about 25 to 50 μm at the inner lead part to be bonded to the IC. Thus, the very fine lead pattern is TA
It is formed on the B tape.

Since such a fine pattern is formed by an etching process, a plating process, or the like, defects such as thickening, disconnection, short-circuiting, and thinning occur in the pattern during the manufacturing process. Therefore, in the past, the presence or absence of these defects was checked by a continuity test or a visual inspection by hand, but the inspection of the TAB tape was automated due to a finer pattern, a shortage of inspection personnel, an increase in the number of products manufactured, etc. TAB
An automatic tape inspection device has been developed and is becoming popular.

The TAB tape automatic inspection device is equipped with a TAB tape moving on the aperture gate.
A CCD camera located directly above the B tape picks up the image, recognizes the image, and displays it on a monitor to show the pattern's thickening, disconnection, short-circuiting, thinning, etc. A pattern image pickup device for inspecting defects is incorporated.

In this conventional pattern image pickup device, as shown in FIG. 8, a TAB moving on an pedestal 101 of the pattern image pickup device 100 and on an aperture gate 102.
A tape camera 60 and a CCD camera 103 for covering the surface of the TAB tape 60 and covering the TAB tape 60, and a Z-axis drive device for adjusting the focus of the CCD camera 103. 104
And S for changing the pitch between the CCD cameras 103
The axis drive device 105 is used for the X-axis and Y-axis table 10.
It is arranged on the gantry 101 via the support columns 108 supported by 6, 107.

The TAB tape 60 is wound and fixed from the winding side reel to the winding side reel. When the inspection start command is issued from the sequencer control unit, the TAB tape 6
0 is transported. When the TAB tape 60 comes to a predetermined position on the aperture gate 102, the TAB tape 6
The transport of 0 is stopped and the CCD camera 103 takes an image.

[0007]

Since the CCD camera 103 for picking up the image of the TAB tape 60 is arranged in an overhang structure so as to be located right above the TAB tape 60, the structure is strong. is necessary. For that purpose, there was a problem that the device itself had to be enlarged. Further, since the image picked up by the CCD camera 103 is image-processed and displayed on a monitor (not shown) for inspection, the accuracy of the pattern is judged by the resolution of the CCD camera 103 when judging whether the pattern is good or bad. There was also a problem that it was decided and the accuracy could not be improved any further.

Further, the CCD camera 103 has a support column 1 through an S-axis driving device 105 and a Z-axis driving device 104.
Since it is arranged at the tip of 08, it is easily affected by vibration and the like. Therefore, there is a problem that an out-of-focus image or the like occurs and an accurate pattern image cannot be obtained.

The present invention has been made for the purpose of eliminating the above-mentioned conventional problems, and provides a pattern image pickup apparatus which has a high inspection accuracy and a CCD camera which is less affected by vibration or the like. .

[0010]

According to a first aspect of the invention, a pair of Y-axis driving means arranged in a horizontal plane of a housing and a Y-axis driving means arranged between the Y-axis driving means are engaged with the Y-axis driving means. A first frame body that slides in the Y-axis direction, a pair of X-axis drive means disposed on the inner surface of the first frame body that is orthogonal to the Y-axis drive means, and between the X-axis drive means. First and second camera mounting mounts that are arranged and that slide in the X-axis direction by engaging with the X-axis driving means, and facing the inner surfaces of the pair of camera mounting bases that are orthogonal to the X-axis driving means. A pair of vertically arranged Zs
The shaft driving means, a pair of camera mounting plates which are arranged so as to face the Z axis driving means, and which engage with the Z axis driving means and slide in the Z axis direction, respectively. A pair of line sensor cameras arranged vertically with their imaging lenses facing upward, and a pair of line sensor cameras mounted on the first and second camera mounting bases in parallel with the X-axis direction near both ends of the first and second camera mounting bases, respectively. Erected, this first
And a pair of detaching means for detaching the second camera mounting base from each other.

According to a second aspect of the present invention, a solid-state image pickup device is arranged on one side of a pair of camera mounting plates vertically with the objective lens facing upward and the eyepiece side of a microscope to which illumination light is supplied on the optical axis. The microscope means is provided.

According to a third aspect of the invention, the separating means transmits the driving force of the driving source provided in one separating means to the other separating means via the timing belt.

[0013]

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of the present invention is shown in FIGS.
It will be described in detail based on. FIG. 1 is an embodiment of the present invention, and is a plan view of a main part including a notch part, and FIG.
FIG. 3 is a left side view of the main part of FIG. 1, including a front view of the main part including a line sectional view. FIG. 4 is a perspective view of a main part showing a mounting mechanism of the line sensor cameras 39 and 40, and FIG. 5 is a block diagram of a main part of a TAB automatic inspection device using the pattern imaging device 79 of the present invention.
Is a configuration diagram of a main part of the microscope means 41, and FIG. 7 is an explanatory diagram of an imaging trajectory. The same parts as those of the conventional example are designated by the same names and reference numerals, and the description thereof will be omitted.

In FIGS. 1 to 3, reference numeral 1 denotes a housing, and a pair of Y-axis driving means 2 are arranged opposite to each other at both ends in a horizontal plane. The Y-axis driving means 2 is a ball screw 3
And a nut 5, which rotatably supports both ends of the ball screw 3, a bearing 5, and a motor 7 which rotationally drives the ball screw 3 via a coupling 6 on the bearing 5. Reference numeral 9 denotes a pair of first frame bodies, which are arranged so as to be mounted between the pair of Y-axis drive means 2, and both ends of the first frame body 9 have Y-axis drive means. 2 respectively engaged. Therefore, when the motor 7 of the Y-axis drive means 2 is rotationally driven, this rotation is transmitted to the ball screw 3 via the coupling 6, so that the first frame body 9 is arranged on the upper surface of the housing 1. It is slidable in the Y-axis direction along the existing rail 8.

Reference numeral 10 denotes a pair of X-axis driving means, which are arranged on the inner surface (that is, the X-axis direction) orthogonal to the Y-axis driving means 2 with which the first frame 9 is engaged. Drive means 1
0 is a ball screw 11, a nut 12 for rotatably supporting both ends of the ball screw 11, a bearing 13 and a coupling 1 for the bearing 13 like the Y-axis driving means 2.
4 and a motor 15 that drives the ball screw 11 to rotate.

A pair of rails 16 are laid in the X-axis direction at both ends of the first frame 9 in the Y-axis direction.
6 includes first and second camera mounts 17, 18
Are mounted between the X-axis driving means 10 and are engaged with the X-axis driving means 10. Therefore, when the motor 15 is driven to rotate, this rotation is transmitted to the ball screw 11 via the coupling 14, so that the first and second camera mounts 17 and 18 are mounted on the first frame 9. X along the placed rail 16
It is slidable in the axial direction.

First and second camera mounts 17 and 1
8 are all formed in the same U-shaped cross section, and the ball screw 1 is attached to one end 17a, 18a in the Y-axis direction.
9, a nut 20 for supporting both ends of the ball screw 19,
Bearing 21, pulley 2 joined to one bearing 21
2. A bearing 23 joined to the other end of the pulley 22 is arranged along the X axis. On the other hand, the other end 1 in the Y-axis direction
7b and 18b include a ball screw 24 and the ball screw 2
A nut 25 for supporting both ends of 4, a bearing 26, a pulley 27 joined to one bearing 26, and a motor 28 fixed to the other end of the pulley 27 are similarly arranged along the X axis, Further, between the pulleys 22 and 27, a timing belt 29 is mounted along the back surface of the central portions 17c and 18c of the camera mounting bases, which connect the first and second camera mounting bases 17 and 18 to each other. A pair of separating means 30 for separating and combining one frame is configured.

As described above, the first and second camera mounts 17 and 18 are provided at both ends 17a, 18a and 17 thereof.
The separating means 30 is arranged at b and 18b, and the central portion 1
Z-axis drive means 31, which will be described later, is arranged at 7c and 18c. Therefore, the first and second camera mounts 1
When the motors 28 are driven to rotate, the rotation of the timing belts 29 mounted on the pulleys 22 and 27 is increased by the timing belts 29, 7 and 18, which are largely moved along the rails 16 in the X-axis direction by the X-axis driving means 10. The first and second camera mounts 17 and 18 are transmitted to the ball screws 19 and 24 via the so as to finely move along the rail 16 in the X-axis direction. Further, a pair of camera mounting plates 32 and 32a, which are arranged so as to face the Z-axis driving means 31, respectively, are engaged with the Z-axis driving means 31 and slide in the Z-axis direction, respectively. The camera mounts 17 and 18 are configured to move up and down along the Z-axis direction.

First and second camera mounts 17 and 1
As described above, the Z-axis driving means 31 arranged in the vertical direction so as to face the inner surface orthogonal to the X-axis driving means 10 is disposed in the central portions 17c and 18c of the Z axis driving means 8. 31 is a ball screw 33 and this ball screw 3 like the X-axis and Y-axis driving means 10 and 2.
A nut 34 that rotatably supports both ends of the bearing 3, a bearing 35, and a motor 37 that rotationally drives the ball screw 33 via a bearing 36 on the bearing 35.

Further, the first and second camera mounts 17,
At the center portions 17c and 18c of the pair 18, the rear end portions of the pair of camera mounts 32 and 32a, which slide in the Z-axis direction as engaging means of the Z-axis driving means 31, respectively (first and second camera mounting mounts). A pair of rails 38 are provided on the surfaces of the central portions 17 and 18 facing the central portions 17c and 18c). Further, line sensor cameras 39 and 40 are vertically mounted on the front surfaces of the pair of camera mounts 32 and 32a so as to face each other with the imaging lenses 39a and 40a (FIG. 4) facing upward. As the line sensor cameras 39 and 40,
For example, a 5000-element CCD camera is used. Then, between the line sensor camera 39 and the line sensor camera 40, at the time of executing the inspection, as shown in FIG. 7, an interval of one frame of the TAB tape 60 is arranged.

Further, on the front surface of the one camera mounting plate 32a, a microscope means 41 is provided near the line sensor camera 40.
Are arranged vertically with the objective lens 42a of the microscope 42 facing upward. The microscope means 41 includes a microscope 42,
An illumination device 43 arranged so that the illumination light is irradiated on the optical axis of the microscope 42, a half mirror 44 that reflects the light from the illumination device 43 in one direction, and an eyepiece 42b side of the microscope 42. And a solid-state image pickup device 45 that operates. In the case of this embodiment, a color area camera 49 is used as the solid-state imaging device 45.

As shown in FIG. 6, the microscope 42 is equipped with a color area camera 49 and a color monitor (50), and the work judged to be defective from the images input by the line sensor cameras 39 and 40. Color area camera 4
The image actually captured in 9 is displayed on the color monitor 50 and visually observed to confirm again whether the product is good or defective.
A camera controller 51 controls the color area camera 49. As the lighting device 43, a metal halide lamp or the like is used as a light source.

The line sensor cameras 39 and 40 and the microscope 42 are all fixed to a predetermined position on the front surface of the camera mounting plate 32a as shown in FIG. It is sandwiched between 46 and a flat plate locking portion 47 having a concave portion 47a facing the concave portion 46a, and the L-shaped locking portion 46 and the flat plate locking portion 47 are screwed and fixed by a screw 48.

In FIG. 5, the TAB tape 60 has a width of 35 mm, 48 mm, 70 in this embodiment.
It is configured so that three types of tapes of mm can be inspected. Reference numerals 61 and 62 respectively denote a tape unwinding portion (supply side) and a tape winding portion (drive side) of the TAB tape 60.
TAB tape reels, 63 are back tension sprockets, and 64 and 65 are back tension rollers, all of which are arranged on the unwinding side of the TAB tape 60. Reference numeral 66 is a drive sprocket, and 67 and 68 are tension rollers, both of which are arranged on the winding portion side of the TAB tape 60. TAB by back tension sprocket 63 and drive sprocket 66
Tension is applied to the tape 60.

Reference numeral 69 is an auto stop sensor, 70 is a TA
TAB tape 6 on the operation panel on the B tape unwinding side
A back tension adjusting button 71 for adjusting the back tension of 0, a reel shaft torque adjusting button 72 for adjusting the torque of the reel shaft of the TAB tape reel 61 on the tape unwinding side, and the like are arranged.

Reference numeral 73 is an operation panel on the side of the TAB tape winding section, which is a pitch set button 74 for setting the winding pitch of the TAB tape 60, a speed control button 75 for adjusting the winding speed of the TAB tape 60, and a tape winding section. Reel shaft torque adjustment button 76 and power switch 77 for adjusting the torque of the reel shaft of the TAB tape reel 62 on the side
Etc. are arranged. Reference numeral 78 is an electric puncher for making a hole in a defective product. Reference numeral 79 is a pattern image pickup device according to the present invention, and 80 is an electromagnetic brake of the Z-axis drive means 31.

Next, the operation and operation will be described in detail with reference to FIGS. First, as shown in FIG. 5, the TAB tape 60 to be inspected is set on the TAB tape reel 61 on the unwinding side, the leader tape (TAB tape 60) and the spacer 81 are separated, and the aperture gate and the electric motor are separated. It is passed through the puncher 78 and set on the TAB tape reel 62 on the winding section side.

After turning on the power switch 77, the back tension adjusting button 71 and the reel shaft torque adjusting button 7
2, 76, speed control button 75, pitch set button 7
4 are respectively adjusted, and the TAB tape 60 is initialized so that the TAB tape 60 is fed according to the set value.

Next, the inspection is started, the motor 28 constituting the separating means 30 is driven by the command of the sequencer control section (not shown), and the TAB tape between the line sensor camera 39 and the line sensor camera 40 is driven. The first and second camera mounting bases 17 and 18 are moved and positioned in a direction in which they are separated from each other in the X-axis direction so as to have an interval of 60 frames.

Then, as shown in FIG. 7, the TAB tape reel 62 on the drive side rotates and TA in the direction of arrow A.
TAB tape 60 sent from B tape reel 61
Is conveyed and the line sensor cameras 39 and 40 are set every 4 frames.
Are intermittently sent to the image pickup area. At this time, between the line sensor camera 39 and the line sensor camera 40,
Since the TAB tape 60 is arranged at intervals of one frame, the TAB tape 60 can be imaged by two line sensor cameras 39 and 40 for two frames at the same time.

Then, when the TAB tape 60 stops in the image pickup area, the switches of the line sensor cameras 39 and 40 are turned on and the image pickup is started. At this time, the Y-axis drive means 2
The first frame 9 driven by the X-axis driving means 10 and the first and second camera mounts 17 and 18 driven by the X-axis driving means 10 are driven, respectively, and the line sensor cameras 39 and 40 are driven.
Takes an image of the TAB tape 60 while moving in the X and Y axis directions. Therefore, the image pickup locus of the line sensor 39 is divided into three and drawn as A1 area → A2 area → A3 area. On the other hand, the imaging trajectory of the line sensor camera 40 is B1
A locus as shown in FIG. 7 is drawn for each area from area → B2 area → B3 area.

At this time, the frames judged to be defective by the line sensor cameras 39 and 40 are picked up by the color area camera 49 of the microscope means 41, and this visible image is displayed on the color monitor 50 and visually observed. It is reconfirmed whether it is a good product or a defective product.

When the inspection of the two frames is completed in this way, the first and second camera mounts 17 and 18 are moved by one frame in the direction of arrow B by the X-axis drive means 10 in a predetermined image pickup area. Stop. Then, the switches of the line sensor cameras 39 and 40 are turned on again to start capturing the next two frames. At this time, similarly to the above, the first frame body 9 driven by the Y drive means 2 and the first and second camera mounts 17 and 18 driven by the X drive means 10 are respectively driven, The image pickup trajectory of the line sensor 39 is A
4 area → A5 area → A6 area, while the imaging locus of the line sensor camera 40 is B4 area → B5 area →
It is drawn in the B6 area. In this way, an image is taken while drawing the imaging locus as shown in FIG. 7 for each region.

The frames determined to be defective are picked up by the color area camera 49 in the same manner as above, and this visible image is displayed on the color monitor 50 to confirm that they are defective by visual observation. Done.

In this way, the frame finally determined as a defective product is perforated by the electric puncher 78, and is wound together with the good product on the TAB tape reel 62 on the winding portion side together with the spacer 81.

When the inspection of four frames is completed, the pattern image pickup device 79 returns to the initial position and waits until the next four frames of TAB tape 60 are conveyed to the image pickup area. When the next four frames of TAB tape 60 are conveyed and stopped in the imaging area, the same inspection as above is repeated, and the TAB tape 60 to be inspected wound around the TAB tape reel 61 is repeatedly inspected. It

[0037]

According to the present invention, a pair of Y-axis driving means arranged in the horizontal plane of the housing and a Y-axis driving means are disposed between the Y-axis driving means and engaged with the Y-axis driving means in the Y-axis direction. A sliding first frame body, a pair of X-axis drive means arranged on the inner surface of the first frame body orthogonal to the Y-axis drive means, and a pair of X-axis drive means arranged between the X-axis drive means. First and second camera mounting pedestals that engage with the driving means and slide in the X-axis direction, and a pair vertically arranged so as to face the inner surfaces of the pair of camera mounting pedestals orthogonal to the X-axis driving means. Z-axis driving means, a pair of camera mounting plates that are arranged to face the Z-axis driving means, respectively, and that engage with the Z-axis driving means and slide in the Z-axis direction, respectively, and a pair of camera mountings. A pair of line sensor cameras vertically arranged on the plate with the imaging lenses facing upward, A pair of detaching members that are installed near the both ends of the first and second camera mounting bases in parallel to the X-axis direction on the first and second camera mounting bases, respectively, and that separate the first and second camera mounting bases from each other. Since the line sensor camera does not need to have the conventional overhang structure, it is structurally robust and can be downsized, and the inspection accuracy and inspection speed can be improved. .

Further, the present invention is arranged vertically on one of the pair of camera mounting plates with the objective lens facing upward,
Since the microscope means in which the solid-state imaging device is arranged is provided on the eyepiece side of the microscope to which the illumination light is supplied on the optical axis, the inspection accuracy can be further improved.

Further, according to the present invention, since the separating means transmits the driving force of the drive source provided in one separating means to the other separating means through the timing belt, the vibration of the line sensor camera is reduced. You can do it.

[Brief description of drawings]

FIG. 1 shows an embodiment of the present invention and is a plan view of an essential part including a notched part.

FIG. 2 shows an embodiment of the present invention, and is shown in FIG.
It is a principal part front view containing a line sectional view.

FIG. 3 shows an embodiment of the present invention and is a left side view of a main part including a partly cutaway part.

FIG. 4 shows an embodiment of the present invention and is a perspective view of relevant parts for explaining a mounting mechanism of the line sensor cameras 39, 40 and the microscope means 41.

FIG. 5 shows an embodiment of the present invention, and is a main part configuration diagram of a pattern imaging device 79.

FIG. 6 shows an embodiment of the present invention, in which the microscope means 4
It is a principal part block diagram of 1.

FIG. 7 illustrates an embodiment of the present invention and is an explanatory diagram of an image pickup locus by the line sensor cameras 39 and 40.

FIG. 8 is a main part configuration diagram showing a conventional example.

[Explanation of symbols]

1 case 2 Y-axis drive means 9 First frame 10 X-axis drive means 17 First camera mount 18 Second camera mount 29 Timing belt 30 Separation means 31 Z-axis drive means 32 Camera mounting plate 32a camera mounting plate 39 line sensor camera 40 line sensor camera 41 Microscope means 42 microscope 42a Objective lens of microscope 42 42b Eyepiece of the microscope 42 45 Solid-state imaging device 60 TAB tape 79 Pattern imaging device

─────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-6-34332 (JP, A) JP-A-3-46544 (JP, A) JP-A-6-265324 (JP, A) (58) Field (Int.Cl. ⁷ , DB name) G01N 21/84-21/958

Claims (3)

(57) [Claims] 1. A pair of Y-axis driving means arranged in a horizontal plane of a housing, and a pair of Y-axis driving means arranged between the Y-axis driving means and engaging with the Y-axis driving means and sliding in the Y-axis direction. 1 frame,
A pair of X-axis driving means arranged on an inner surface of the first frame member orthogonal to the Y-axis driving means, and a pair of X-axis driving means arranged between the X-axis driving means and engaging with the X-axis driving means. First and second camera mounting mounts that slide in the direction, and a pair of Z-axis driving units that are vertically arranged so as to face the inner surfaces of the pair of camera mounting mounts that are orthogonal to the X-axis driving unit. Z
A pair of camera mounting plates, which are arranged so as to face the shaft driving means, are engaged with the Z axis driving means, and slide in the Z axis direction, respectively. A pair of line sensor cameras arranged vertically and the first and second camera mounting bases are installed in the vicinity of both ends of the first and second camera mounting bases in parallel with the X-axis direction. A pattern imaging apparatus comprising: a pair of detaching means for detaching the first and second camera-mounted frames from each other. 2. A microscope in which a solid-state imaging device is arranged on one of the pair of camera mounting plates vertically with an objective lens facing upward, and an eyepiece side of the microscope to which illumination light is supplied on an optical axis. The pattern imaging device according to claim 1, further comprising means. 3. The detaching means transmits the driving force of a drive source provided on one detaching means to the other detaching means via a timing belt, respectively. Pattern imaging device.