JP3378152B2 - Liquid resin volume measuring and discharging mechanism and liquid resin casting machine - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid resin volume measuring / discharging mechanism used for filling a liquid resin into a resin-filled recess in which a semiconductor element is inserted, when the semiconductor element is sealed with resin. Relates to a liquid resin casting machine using.

[0002]

2. Description of the Related Art An LED semiconductor element is usually commercialized by being sealed with a transparent resin. When an LED semiconductor element is sealed with resin to form an LED lamp, a mold case provided with a resin-filled recess is used, and after the liquid resin is filled in the mold case, the LED is put in the mold case. The lead frame on which the semiconductor element is mounted is inserted, and the resin is heated and cured.

For filling the liquid resin into the resin filling concave portion, for example, a liquid ejecting device disclosed in Japanese Patent Publication No. 3-26946 is used. This liquid ejection device is
The storage tank for storing the liquid resin and the nozzle are connected by an elastic tube, and the liquid resin in the storage tank is supplied to the nozzle via the elastic tube. Then, by pressing the elastic tube, the liquid resin is extruded from the nozzle, and the liquid resin is filled in the resin filling concave portion arranged below the nozzle.

However, in such a liquid ejecting apparatus, in order to fill a certain amount of liquid resin in the resin filling concave portion,
It is necessary to constantly adjust the pressing force of the elastic pipe and the like, and there is a problem that the adjustment is troublesome. Further, when the elastic tube deteriorates or the viscosity of the liquid resin in the storage tank changes, the discharge amount of the liquid resin discharged from the nozzle changes, so that a fixed amount of the liquid resin is filled in the resin filling recess. Therefore, it is necessary to readjust the pressing force of the elastic tube.

Instead of such an apparatus, a method has been developed in which the liquid resin filled in the tank is supplied to the nozzle by compressed air and the liquid resin discharged from the nozzle is filled in the resin filling concave portion. . However, even with such a method, the pressure of compressed air, the pressurizing time, and the like must be adjusted due to changes in the viscosity of the resin, etc., and there is a problem in that the adjustment is troublesome. Further, in such a method, it is not easy to supply a predetermined amount of liquid resin to a large number of nozzles, so that it is not possible to provide a large number of nozzles, and the resin can be efficiently filled in a large number of resin-filled recesses. There is also a problem that it cannot be filled.

Further, by sliding the piston upward with respect to the cylinder, liquid resin is sucked into the cylinder, and by sliding the piston downward, the liquid resin in the cylinder is discharged, so that the liquid resin is arranged below the cylinder. A method of filling a liquid resin into the formed resin-filled recess has also been developed. In this case, since a fixed amount of liquid resin can be sucked and discharged into the cylinder, a fixed amount of liquid resin can be filled in the resin filling recess.

[0007]

However, since the nozzle portion for sucking the liquid resin by the sliding of the piston and the nozzle portion for discharging the liquid resin are the same as described above, the liquid resin is accommodated. It is necessary to move the casting pump onto the liquid resin tank, suck the liquid resin from the nozzle portion, and then move the casting pump onto the resin-filled recess to discharge the liquid resin. Therefore, a mechanism for moving the cylinder between the liquid resin tank and the resin-filled recess is required, which causes a problem that the device becomes large.

A casting machine having a large number of cylinders may be considered in order to simultaneously fill the liquid resin into the large number of resin-filled recesses. In this case, however, a mechanism for moving a large number of cylinders is required. In addition, a complicated mechanism for sucking a fixed amount of liquid resin into each cylinder is required. In such a case, it is impossible to centrally arrange the cylinders within a certain size.

The present invention is intended to solve such a problem, and the object thereof is not to require one drive system for one cylinder, but for multiple cylinders to form one drive system. By operating with the use of multiple cylinders in the drive system, it is possible to
For example, by using an O-ring at the contact portion between the cylinder and the plunger, the O-ring can be multi-connected to reliably discharge a predetermined amount of liquid resin, and moreover, the liquid resin can be efficiently filled into the resin filling recess. An object of the present invention is to provide a liquid resin volume measuring and discharging mechanism and a liquid resin casting machine.

[0010]

In the liquid resin volume measuring / discharging mechanism of the present invention, an upper end surface is opened inside a liquid resin tank for storing the liquid resin, and the liquid resin is filled from the upper end surface to the inside. while it is a tubular cylinder liquid resin from a through hole provided at its lower end surface to flow out, in the cylinder, Ru is arranged to be slid in an airtight state
With this, a plunger that can be pulled out to the liquid resin tank, and a check valve provided under the cylinder so that the liquid resin flows only so that the liquid resin flows out from the through hole of the cylinder, The liquid resin flowing out from the check valve is provided with a discharge part provided on the lower side of the cylinder so as to be discharged from a discharge port provided on a lower end surface thereof.

An O-ring, which is brought into pressure contact with the inner peripheral surface of the cylinder in an airtight state, is fitted to the plunger.

The check valve has a pair of tapered surfaces that are closer to each other as they go downward, and the outlets formed at the lower ends of the tapered surfaces are located at the lower ends of the tapered surfaces. It is a duckbill shape that comes to be blocked by the contact of.

The liquid resin casting machine of the present invention is a liquid resin casting machine using a plurality of such liquid resin volume measuring / discharging mechanisms, and the cylinders of each liquid resin volume measuring / discharging mechanism arranged in a matrix state. Are arranged so as to accommodate the liquid resin above the cylinder support, and the upper end of each cylinder so that the liquid resin flows into each cylinder. And the liquid resin tank in which the plunger of each liquid resin volume measuring and discharging mechanism is vertically inserted,
A slide plate, which is arranged above the liquid resin tank so as to be slidable in the vertical direction, is attached so that the plungers are integrally moved up and down, and an elevating mechanism for elevating the slide plate. It is characterized by having.

[0014]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below in detail with reference to the drawings.

FIG. 1 is a vertical sectional view showing an example of a liquid resin volume measuring and discharging mechanism of the present invention. The liquid resin volume measuring / discharging mechanism 10 is used, for example, for resin-sealing an LED semiconductor element, and has a cylindrical cylinder 11 filled with liquid resin and a slidable inside the cylinder 11. And the inserted cylindrical plunger 12.

The cylinder 11 has an open upper end surface and a closed lower end surface, and a through hole 11a is provided at the center of the lower end surface. The upper end surface of the cylinder 11 is open to the inside of the liquid resin tank 20 in which the liquid resin is stored.
1 is from the opening of the upper end surface of the cylinder 11 to the cylinder 11
It is designed to flow in.

The cylindrical plunger 12 inserted into the cylinder 11 has an outer diameter slightly smaller than the inner diameter of the cylinder 11, and the lower portion thereof is inserted into the cylinder 11. There is a gap between the inner peripheral surface of the cylinder 11 and the outer peripheral surface of the plunger 12, which can absorb a machining error of the cylinder 11 and the plunger 12, and for example, a plunger of 4 mm with respect to the inner diameter of the cylinder 11 of 5 mm. The outer diameter. The plunger 12 can slide smoothly in the cylinder 11. A concave groove 12a is provided at the lower end of the plunger 12 over the entire circumference thereof, and an O-ring 13 which is in liquid-tight contact with the inner peripheral surface of the cylinder 11 is fitted in the concave groove 12a. .
The upper portion of the plunger 12 extends above the cylinder 11, and penetrates the liquid resin 21 contained in the liquid resin tank 20 containing the liquid resin to reach the upper side of the liquid resin tank 20.

Below the cylinder 11, a check valve 14 for letting out the liquid resin from the cylinder 11 is provided, and the check valve 14 is provided.
And a cylindrical discharge portion 15 that covers the above are continuously provided. The check valve 14 has a duck bill shape in which the upper end thereof is abutted against the lower end surface of the cylinder 11 and has a pair of tapered surfaces 14b inclined so that the lower end portions approach each other. It is in a state of having entered the discharge portion 15. An outlet 14a is provided between the lower end portions of the respective tapered surfaces 14 which face each other,
The lower ends of the tapered surfaces 14b are in close contact with each other, so that the outlet 14a is closed.

The discharge portion 15 arranged so as to cover the check valve 14 has a cylindrical shape in which an upper portion 15a thereof is slightly smaller than the inner diameter of the cylinder 11, and a lower portion 15b thereof has a smaller diameter smaller than the upper portion 15a. It has a cylindrical shape. Bottom 1
5b protrudes downward in a concentric state with the upper portion 15a,
A discharge port 15c is provided on the lower end surface thereof.

In the liquid resin volume measuring / discharging mechanism 10 of the present invention having such a configuration, when the LED semiconductor element is resin-sealed, for example, a mold provided with a resin-filled recess is arranged below the LED-semiconductor element. In the resin filled concave part of the mold,
The LED semiconductor element to be sealed is inserted.

When the liquid resin volume measuring / discharging mechanism 10 is filled with the liquid resin in the resin filling concave portion, first, as shown in FIG.
As shown in (a), the plunger 12 is slid upward so that the plunger 12 is pulled out from the cylinder 11. At this time, as the plunger 12 moves upward in the cylinder 11, the lower region of the plunger 12 becomes negative pressure, and the outlet 14a of the check valve 14 attached to the lower side of the cylinder 11 becomes The tapered surfaces 14b are pressed against each other and are hermetically closed. Then, by sliding the plunger 12 upward, the inside of the cylinder 11 becomes a vacuum state. In such a state, the plunger 12 becomes the cylinder 1
When the cylinder 11 is pulled out, the opening of the upper end surface of the cylinder 11 is opened in the liquid resin, and the liquid resin 21 in the liquid resin tank 20 flows into the cylinder 11 in a vacuum state. Since the inside of the cylinder 11 is in a vacuum state, the liquid resin flows in quickly.

In this case, since the inside of the cylinder 11 is in a vacuum state, even if the liquid resin 21 flows into the cylinder 11, there is no possibility that the outlet port 14b of the check valve 14 will be opened, so that The liquid resin 21 does not drip from the discharge port 15c of the discharge unit 15.

When the cylinder 11 is filled with the liquid resin 21, the plunger 12 is lowered and the plunger 12 is inserted into the cylinder 11. As a result, as shown in FIG. 2B, the liquid resin 21 filled in the cylinder 11 flows into the check valve 14 through the through hole 11 a provided in the lower end surface of the cylinder 11. Then, by further lowering the plunger 12, the outflow port 14a provided at the lower end of the check valve 14 becomes
It is opened by the pressure of the liquid resin 21 compressed by the plunger 12, passes through the outlet 14a, and the discharge unit 1
Liquid resin 21 flows into 5. The liquid resin 21 that has flowed into the discharge unit 15 is further lowered by the plunger 12, and the discharge port 15c provided on the lower end surface of the discharge unit 15
Is discharged downward from.

As a result, the liquid resin volume measuring and discharging mechanism 1
The liquid resin 21 is filled in the resin filling concave portion of the mold arranged below 0. Then, when the liquid resin is filled in the resin-filled recess, the lowering of the plunger 12 is stopped and the discharge of the liquid resin 21 is completed. Then, again, the plunger 12 is raised to fill the liquid resin 21 in the resin filling concave portion.

At this time, in the discharge part 15, the check valve 14,
The liquid resin remains in the lower part of the plunger 12, and when the plunger 12 is slid upward in such a state, as shown in FIG. A negative pressure is generated in a region below the O-ring 13 inside, and the outlet 14b provided at the lower end of the check valve 14 is closed. Then, the plunger 12 is slid upward while the outlet 14b of the check valve 14 is closed, so that the inside of the cylinder 11 becomes a vacuum state.
After that, the O-ring 13 fitted to the plunger 12 is pulled out upward from the cylinder 11, and the liquid resin 21 in the liquid resin tank 20 flows into the cylinder 11 as described above. Hereinafter, by repeating the same operation as described above, the liquid resin is discharged,
The liquid resin 21 is filled in the resin filling concave portion.

FIG. 3 is a front view showing an example of an embodiment of a liquid resin casting machine of the present invention using such a liquid resin volume measuring and discharging mechanism 10, and FIG. 4 is a plan view of the casting machine. ,
FIG. 5 is a side view thereof. This liquid resin casting machine is used, for example, to inject the liquid resin into the mold 30 shown in FIG. 6 when resin-sealing an LED semiconductor element. On the bottom surface 31 of the mold 30, 125 resin-filled recesses 31a are arranged in a matrix of 25 rows × 5 columns, and each resin-filled recess 31a has a liquid state in which LED semiconductor elements are inserted. It is designed to be filled with resin. Such a mold 30 is placed on a lift table that can be moved up and down, which is arranged below the liquid resin casting machine.

The liquid resin casting machine of the present invention includes a mold 3
The 125 liquid resin volume measuring / discharging mechanisms 10 are provided corresponding to the 125 resin-filled recessed portions 31 a of No. 0. The cylinders 11 of the liquid resin volume measuring / discharging mechanisms 10 are each supported in a vertical state on a cylinder support base 41 arranged horizontally in the lower part of the liquid resin casting machine. Mold 30 provided with resin-filled recess 31a
Is mounted on a lift table arranged below the liquid resin casting machine.
The cylinders 11 supported by are arranged in a matrix of 25 rows × 5 columns corresponding to the arrangement state of the resin-filled concave portions 31a of the mold 30 placed on the lift table. Cylinder 1 of each liquid resin volume measuring and discharging mechanism 10
1 penetrates the cylinder support base 41 in a vertical state,
The check valve 14 and the discharge part 15 are located below the cylinder support base 41.

A liquid resin tank 20 is provided on the nozzle support base 41.
Is provided. The liquid resin is supplied and stored inside the liquid resin tank 20. Each of the resin nozzles 10 supported by the cylinder support base 41 has an opening at the upper end surface of each cylinder 11 that opens inside from the bottom surface of the liquid resin tank 20. The plunger 12 inserted into each cylinder 11 is inserted vertically through the liquid resin tank 20.
The upper end portion of is located above the liquid resin tank 20.

A slide plate 4 is provided above the liquid resin tank 20.
2 are arranged horizontally. Each side portion of the slide plate 42 is slidably supported by a pair of support rods 43 which are vertically supported on each side portion of the cylinder support base 41. Therefore, the slide plate 42 slides vertically with respect to the cylinder support base 41. Further, the upper ends of the plungers 12 inserted through the liquid resin tank 20 are attached to the slide plate 42, respectively.
By sliding in the vertical direction, the plunger 12 of each liquid resin volume measuring and discharging mechanism 10 is slid in the vertical direction with respect to the corresponding cylinder 11.

The cylinder support base 41, the liquid resin tank 20, and the slide plate 42 are housed in the lower end portion of the housing 44 except for the respective side portions where the pair of support rods 43 are provided. At the upper end of the housing 44, the drive pulley 45 and the driven pulley 4 which are horizontal are respectively provided.
6 are arranged side by side in the horizontal direction, and drive pulley 4
A drive belt 47 is wound around the pulley 5 and the driven pulley 46. Below the drive pulley 45, the housing 4
A support plate 48 that is horizontally installed inside is provided inside the motor 4, and a servo motor 49 that is capable of normal rotation and reverse rotation is attached to the lower surface of the support plate 48. The drive pulley 45 is configured to be normally rotated and reversely rotated by a servo motor 49.

The driven pulley 46 is attached to the upper end of a rotary shaft 51 which penetrates the support plate 48, and the rotation of the servo motor 49 is controlled by the drive pulley 45, the drive belt 47 and the driven pulley 46. It is transmitted to 51. The rotating shaft 51 is connected to a ball screw 54 rotatably supported in a vertical state between a pair of mounting plates 52 and 53 which are horizontally installed in the housing 44 at appropriate intervals in the vertical direction. .

A slide block 55 is fitted to the ball screw 54 located between the pair of upper and lower mounting plates 52 and 53. Guide rods 56 and 57, which are vertically supported between the mounting plates 52 and 53, are slidably inserted into the respective sides of the slide block 55. The slide block 55 is slid upward and downward by the normal rotation and reverse rotation of the ball screw 54.

The upper ends of a pair of connecting rods 58 and 59 are attached to the lower portion of the slide block 55. Each pair of connecting rods 58 and 59 includes
The lower mounting plate 53 is slidably pierced and is mounted on the slide plate 42 to which the plunger 12 of each liquid resin volume measuring and discharging mechanism 10 is mounted. Therefore, when the slide block 55 slides in the vertical direction, the slide plate 42 slides in the vertical direction.

FIG. 7 is a schematic view of a mechanism for supplying the liquid resin 21 to the liquid resin tank 20 provided in the liquid resin casting machine. The liquid resin tank 20 is provided on a cylinder support base 41 to which the cylinders 11 of each liquid resin volume measuring and discharging mechanism 10 are attached in a matrix, and inside thereof,
The liquid resin supplied by the resin supply pipe 22 is accommodated. The resin supply pipe 22 penetrates the slide plate 42 on which the plunger 12 is supported, and is connected to the bottom surface of the resin tank 23 in which the liquid resin is stored.
The liquid resin 21 stored in the resin tank 23 is supplied into the resin supply pipe 22 by the compressed air blown from the air nozzle 24, and passes through the resin supply pipe 22.
It is supplied into the liquid resin tank 20. In the liquid resin tank 20, a liquid level sensor 2 for detecting the supplied liquid resin 21.
5 is provided, and when the liquid level sensor 25 does not detect the liquid resin 21, the liquid resin 21 is supplied into the liquid resin tank 20 through the resin supply pipe 22.

In such a liquid resin casting machine, the mold 30 is placed on a lift table which can be moved up and down, and the resin filling concave portions 31a are formed in the liquid resin volume measuring and discharging mechanism 1.
It is arranged to face 0. In such a state, the slide plate 42 is raised with respect to the cylinder support base 41. As a result, the plungers 12 of the liquid resin volume measuring / discharging mechanisms 10 supported by the slide plate 42 are integrally lifted, and the plungers 12 are moved relative to the cylinders 11 supported by the cylinder support base 11. , Each slid upwards. Then, as shown in FIG. 2A, when each plunger 12 is pulled out from the corresponding cylinder 11, the liquid resin 21 in the liquid resin tank 20 flows into each cylinder 11 in a vacuum state. .

In this state, when the slide plate 42 is lowered, each plunger 12 is integrally lowered, and as shown in FIG. 2 (b), each plunger 12 is lowered.
Is inserted into the corresponding cylinder 11, and the liquid resin filled in each cylinder 11 passes through the outlet port 14a of the check valve 14 provided on the lower side of each cylinder 11 to discharge the liquid from the discharge portion 15. Each is discharged from the discharge port 15c provided on the lower end surface. As a result, the liquid resin 21 is filled in the resin filling recesses 31a of the mold 30 provided below the liquid resin casting machine.

In this case, the lift table on which the mold 30 is placed is moved up and down based on the time chart shown in FIG.
As shown in (g), the liquid resins are respectively filled. First, in the lift table, after the mold 30 is placed at the lowest limit position, the lift table is raised to the upper limit position (see FIG. 8A). As a result, as shown in FIG. 9A, the discharge portion 1 of each liquid resin volume measuring / discharging mechanism 10 is inserted into each resin filling recess 31 a of the mold 30.
5, the lower part 15b is inserted, and the discharge port 15a at the lower end thereof is inserted.
However, the state becomes close to the bottom surface of the resin-filled recess 31a.
In this state, the slide plate 42 is lowered and the resin is discharged from the discharge port 15c of each liquid resin volume measuring and discharging mechanism 10.

The lift table at the upper limit position is shown in FIG.
As shown in (b) to (b), the position is maintained for a predetermined time, and liquid resin is filled in each resin filling concave portion 31a during that time. Then, as shown in FIG. 9B, when the lower end portion of the discharge portion 15 of each liquid resin volume measuring and discharging mechanism 10 is immersed in the liquid resin 21 filled in each resin filling recess 31a, As shown in FIG. 8, the lift table is sequentially lowered at a constant speed.

In this case, each liquid resin volume measuring and discharging mechanism 1
The liquid resin 21 is discharged from the discharge unit 15 of 0, and as shown in FIGS. 9B to 9E, the liquid resin 21 is discharged at a constant speed in each resin filling recess 31a. It is filled sequentially. The lift table is shown in FIG.
As shown in (e), the liquid resin 21 is lowered at a constant speed until the liquid resin 21 is fully filled in each resin filling concave portion 31a. Then, when the liquid resin 21 is filled almost completely into the resin filling recesses 31a, the lowering of the slide plate 42 is stopped, and as shown in FIG. The discharge of the liquid resin from the discharge unit 15 is stopped. At this time, the lift table is shown in FIG.
As shown in (f), it is continuously descending at a constant speed.

After that, when the lift table is lowered to an intermediate position between the upper limit position and the lower limit position, FIG.
As shown in (f) to (g), the lift table is lowered to the lower limit position at a higher speed.

As described above, instead of the method of continuously discharging the liquid resin 21 by the liquid resin volume measuring and discharging mechanism 10, as shown in FIGS. 10 and 11, the discharge of the liquid resin 21 is temporarily stopped. You may do it. In this case, when the lift table is raised to the upper limit position (see FIG. 10A), the slide plate 42 is lowered,
Liquid resin is discharged from each liquid resin volume measuring / discharging mechanism 10 (see FIG. 11A).
The descent of 2 is temporarily stopped. As a result, the discharge of the liquid resin 21 from the discharge portion 15 of each liquid resin volume measuring and discharging mechanism 10 is stopped. Then, when the liquid resin 21 from each liquid resin volume measuring / discharging mechanism 10 is stopped for a certain period of time (see FIG. 10 (b) and FIG. 11 (b)), the slide plate 42 is lowered again and each liquid liquid is discharged. The liquid resin 21 is discharged from the resin volume measuring and discharging mechanism 10 (see FIG. 10).
(C) and FIG. 11 (c)). After that, as described above, while lowering the lift table at a constant speed,
The liquid resin 21 is discharged from the discharge port 15 of each liquid nozzle 10, and the liquid resin 21 is filled in each resin filling recess 31a (FIGS. 10D to 10G and FIG. 11).
(See (d) to (g)).

In this way, by discharging a small amount of the liquid resin 21 for the first time and spreading the liquid resin 21 over the entire surface, the liquid resin 21 has completely reached the edge of the corner of each resin-filled recess 31a. become. And
Until the discharged liquid resin 21 reaches the corner edge of each resin-filled recess 31a, the discharge of the liquid resin 21 is stopped and the liquid resin 21 is completely discharged to the corner edge.
After reaching, the remaining liquid resin 21 is discharged. Therefore, when the liquid resin 21 is continuously filled in the case where the corners of the resin-filled recesses 31a are edge-shaped, the liquid resin is not sufficiently filled up to the edges of the corners of the resin-filled recesses 31a, and Bubbles may be caught in the resin 21 to cause defective molding after the resin is cured. However, by discharging the liquid resin 21 in two steps,
Such molding defects are reliably prevented.

When the liquid resin 21 is fully filled in the resin-filled recesses 31a, the slide plate 42 is stopped from being lowered, and all the plungers 12 are stopped from being lowered. Then, the slide plate 42 is raised and all the plungers 12 are raised. In this case, the liquid resin remains in the discharge portion 15 of each liquid resin volume measuring / discharging mechanism 10, the check valve 14, and the lower portion of each cylinder 11, but as shown in FIG. As the plunger 12 is slid upward, a negative pressure is generated in the region below the O-ring 13 in the cylinder 11, and the outlet port 14b provided at the lower end of the check valve 14 is closed.

In this way, the outlet 14 of the check valve 14
When the plunger 12 is slid upward while b is closed, the inside of each cylinder 11 is in a vacuum state, and the plunger 12 is pulled out upward from the cylinder 11, so that the cylinder is in a vacuum state. The liquid resin 21 in the liquid resin tank 20 flows into the inside 11. In this case, since the inside of each cylinder 11 is in a vacuum state, even if the liquid resin 21 flows into the cylinder 11, there is no possibility that the outlet port 14b of each check valve 14 will be opened.
Therefore, the liquid resin 21 is discharged from the discharge port 15c of each discharge unit 15.
There is no risk of liquid dripping.

When each cylinder 11 is filled with the liquid resin, the same operation as described above is repeated, and the liquid resin is filled in each resin filling recess 31a of the new mold 30.

When the amount of liquid resin discharged from each discharge portion 15 varies by simultaneously moving up and down all the plungers 12 by the slide plate 42, the plungers 12 of the respective plungers 12 corresponding to the respective slide plates 42 are changed. The slide stroke of each plunger 12 may be changed by changing the vertical position.

As described above, in the liquid resin casting machine of the present invention, the liquid resin volume measuring / discharging mechanisms 10 arranged in a matrix of 25 rows × 5 columns are arranged in a matrix of 25 rows × 5 columns. Each resin-filled recess 3 of the mold 30
Liquid resin 21 can be simultaneously filled in 1a.
Moreover, since the plunger 12 of each liquid resin volume measuring / discharging mechanism 10 is slid vertically, the liquid resin 21 is filled from the upper end of each cylinder 11 into each vacuumed cylinder 11. Moreover, it is not necessary to move each liquid resin volume measuring and discharging mechanism 10 in the horizontal direction, and the working efficiency is remarkably improved. In the liquid resin casting machine of the present invention, the time required to fill the 125 resin-filled recesses 31a with the resin was about 8 seconds.

Since the check valve 14 is provided between the cylinder 11 and the discharge portion 15 of each liquid resin volume measuring / discharging mechanism 10, even when the liquid resin is filled from the upper end of the cylinder 11, The liquid resin 2 is discharged from the discharge port 15c of the discharge unit 15.
There is no danger of 1 dropping. Further, since the check valve 14 is of the duck bill type, it is not necessary to increase the inner diameter of the cylinder 11 in each liquid resin volume measuring and discharging mechanism 10, and therefore each liquid resin volume measuring and discharging mechanism 10 is not required.
Can be arranged in a matrix in a state of being close to each other.

Further, since each plunger 12 is provided with the O-ring 13 which is in sliding contact with the inner peripheral surface of the cylinder 11, the inside of the cylinder 11 can be surely maintained in an airtight state and all of them can be maintained. It is also possible to raise and lower the plunger 12 of the above together and repeatedly pull out and insert it into each cylinder 11. Furthermore, since each plunger 12 is provided with an O-ring 13,
Even when the liquid resin volume measuring / discharging mechanisms 10 are arranged close to each other, a manufacturing error of each cylinder 11 and the plunger 12,
Even if an arrangement error or the like occurs, the error can be absorbed by the O-ring 13, and the manufacturing can be easily performed.

[0050]

The liquid resin volume measuring and discharging mechanism of the present invention is
In this way, since the check valve is provided in the cylinder ,
Sillin until the plunger is pulled out to the liquid resin tank
The inside of the cylinder is in a vacuum state, so the liquid inside the cylinder
The resin flows in quickly. Further , since the liquid resin is vacuum-sucked into the cylinder from the upper end of the cylinder, it is not necessary to move the cylinder when filling the liquid resin into the cylinder, and the liquid resin is filled into the resin filling concave portion. Work is significantly improved. Further, since the plunger is provided with the O-ring, the space between the cylinder and the plunger can be reliably maintained in the airtight state. further,
By using the duck bill type as the check valve, it is possible to reliably prevent the liquid resin from dripping.

The liquid resin casting machine of the present invention can efficiently fill a large number of resin-filled recesses with liquid resin, and moreover, reliably fills a predetermined amount of liquid resin into each resin-filled recess. be able to. Furthermore, it has a simple structure, is compact, and is easy to manufacture.

[Brief description of drawings]

FIG. 1 is a vertical sectional view showing an example of an embodiment of a liquid resin volume measuring and discharging mechanism of the present invention.

2A to 2C are vertical cross-sectional views for explaining the operation of the liquid resin volume measuring and discharging mechanism.

FIG. 3 is a front view showing an example of an embodiment of a liquid resin casting machine of the present invention.

FIG. 4 is a plan view of the liquid resin casting machine.

FIG. 5 is a side view of the liquid resin casting machine.

FIG. 6 is a perspective view of a mold having a resin filling recess filled with a liquid resin by the liquid resin casting machine.

FIG. 7 is a schematic view of a main part of the liquid resin casting machine.

FIG. 8 is a time chart showing an example of the operation of a lift table used with the liquid resin casting machine.

9 (a) to 9 (f) are cross-sectional views of a main part of a mold showing a liquid resin filling operation during the operation of the lift table together with a discharge portion of a liquid resin volume measuring / discharging mechanism.

FIG. 10 is a time chart showing another example of the operation of the lift table used with the liquid resin casting machine.

11A to 11G are cross-sectional views of a main part of a mold showing a liquid resin filling operation at the time of operation of the lift table together with a discharge part of a liquid resin volume measuring and discharging mechanism.

[Explanation of symbols]

10 Liquid resin volume measuring and discharging mechanism 11 cylinders 12 Plunger 13 O-ring 14 Check valve 14a Outlet 14b Tapered surface 15 Discharge part 15c outlet 20 Liquid resin tank 21 Liquid resin 30 mold 31a Resin-filled recess 41 Cylinder support 42 slide plate

Front page continuation (58) Fields surveyed (Int.Cl. ⁷ , DB name) B05C 5/00 H01L 21/56

Claims (4)

(57) [Claims] 1. An upper end surface is opened inside a liquid resin tank for storing the liquid resin, and the liquid resin is filled from the upper end surface into the liquid resin through a through hole provided in the lower end surface. a tubular cylinder resin flows out, in the cylinder, and <br/> plunger being arranged to be slid can be withdrawn until Rutotomoni liquid resin tank in an airtight state, the liquid from the through hole of the cylinder The check valve provided on the lower side of the cylinder so that the liquid resin flows only so that the resin flows out, and the liquid resin flowing out from the check valve is discharged from the discharge port provided at the lower end surface of the check valve. A liquid resin volume measuring / discharging mechanism comprising: a discharging unit provided below the cylinder so as to discharge the liquid resin. 2. The liquid resin volume measuring / discharging mechanism according to claim 1, wherein an O-ring, which is pressed against the inner peripheral surface of the cylinder in an airtight state, is fitted to the plunger. 3. The check valve has a pair of taper surfaces that come closer to each other toward the lower side, and an outlet formed at the lower end of each taper surface has a lower end of each taper surface. The liquid resin volume measuring / discharging mechanism according to claim 1, wherein the liquid resin volume measuring / discharging mechanism has a duck bill shape that is closed by the contact between the parts. 4. A liquid resin casting machine using a plurality of liquid resin volume measuring / discharging mechanisms according to claim 1, wherein the cylinders of each liquid resin volume measuring / discharging mechanism arranged in a matrix state are in a vertical state. Is arranged so that liquid resin can be stored above the cylinder support table, and the upper end of each cylinder is opened inside so that the liquid resin flows into each cylinder. At the same time, the plungers of the liquid resin volume measuring / discharging mechanisms are inserted vertically and the liquid resin tanks are arranged above the liquid resin tanks so as to be slidable in the vertical direction. A liquid resin casting machine comprising: a slide plate mounted so as to integrally move up and down; and a lift mechanism for moving the slide plate up and down.