JP3378641B2 - Ultra-high humidity detector and ultra-high humidity controller - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION This invention is, out ultra-high humidity test water droplet detecting the humidity of air in the state of being suspended in the saturated water vapor
It relates ultra high humidity control device capable of controlling the atmosphere in the equipment as well as the ultra-high humidity.

[0002]

2. Description of the Related Art For example, when growing mushrooms such as shimeji mushrooms, resuscitating vegetables, storing ice temperature of seafood, thawing ice temperature of fish and meat, and cultivating grafted seedlings, it is relatively low temperature and extremely high humidity. Need an atmosphere. Fields that require such an atmosphere are widely present in agriculture, industry, food industry and the like, and in such fields, it is often required to control the atmosphere to ultrahigh humidity.

To form and maintain such an atmosphere,
A humidity sensor for accurately detecting the humidity of the atmosphere is required, but conventionally there has been no sensor that is durable at high humidity of 90% RH or higher and has a good responsiveness. Therefore,
Conventionally, there has been one in which the responsiveness is improved by sending ventilation air to the humidity sensor.

[0004]

However, in a conventionally used polymer membrane type humidity sensor, at a high humidity of 90% RH or more at a low temperature, a swelling accompanied by a swelling different from a normal adsorption / desorption phenomenon occurs. There was a problem that the response of humidity detection and humidity stability could not be improved simply by causing adsorption and improving ventilation.

Further, there is a problem in that the use of such a detecting device makes it impossible to control an atmosphere of low temperature and high humidity with good responsiveness and linearity.

Therefore, in view of the above-mentioned conventional problems, the present invention is capable of detecting super-humidity in which water droplets float in saturated steam with good responsiveness, and has high humidity stability.
Is an object of the present invention to provide a DeSo location.

Another object of the present invention is to provide an ultra-high humidity controller capable of controlling an atmosphere of ultra-high humidity with good responsiveness and linearity.

[0008]

In order to achieve the above-mentioned object, an ultrahigh humidity detecting device made according to the present invention comprises a cylindrical body 11a.
Ventilation mechanisms 11d and 11e and heating means 11 provided inside
b, 11c, humidity sensitive element 11f and post-heating temperature sensitive element 11g
With the above ventilation mechanism, water droplets float in saturated steam.
And by suction the air of the state to which the air has intake pressure
It is heated to a higher temperature by a heating means and the space after heating is heated.
The temperature of the air is detected by the temperature sensing element after heating
Temperature signal after heating according to the temperature
The humidity of the heated air is detected by the humidity sensor to detect the humidity.
Sensor unit 11 that outputs a humidity signal according to the known humidity
And the post-heating temperature of the air after heating by the post-heating temperature signal
Post-heating temperature detecting means 15 for detecting the temperature, and the post-heating temperature
Degree and the humidity signal to calculate the humidity after heating
The post-heating humidity calculation means 14 and a predetermined value based on the post-heating temperature
Pre-heating temperature calculation means for subtracting temperature to obtain pre-heating temperature
13a, the post-heating temperature, the pre-heating temperature, and the heating temperature.
Before heating by calculating based on post-heating humidity to obtain pre-heating humidity
A humidity calculating means 16 is provided, and the upper end of the cylindrical body is provided with a canopy.
Use the suction port and the lower end as the discharge port, and
The fan of the ventilation mechanism from the fan inside the cylinder.
The post-heating temperature sensing element and the humidity sensing element are respectively provided on the upstream side.
And protect the temperature sensitive element and the moisture sensitive element after heating.
It is characterized by being covered with a drip cover 11i.

In order to achieve the above object, the ultra-high humidity detecting device according to the present invention has a communication device provided in the cylindrical body 11a.
Wind mechanisms 11d, 11e, heating means 11b, 11c, moisture sensitivity
The element 11f and the pre-heating temperature sensitive element 11h are provided, and the ventilation is provided.
The sky in which water droplets are suspended in saturated steam by the mechanism.
Intake air, and inhale the inhaled air by the heating means.
Heat to a high temperature and adjust the temperature of the air before heating
Pre-heating temperature detected by the temperature element and corresponding to the detected temperature
Output the temperature signal and control the humidity of the heated air.
Humidity according to the humidity detected by the humidity sensor
The sensor unit 11 that outputs a signal and the pre-heating temperature signal
Pre-heating temperature detection to detect the pre-heating temperature of air before heating
The output means 13 and a predetermined temperature are added to the pre-heating temperature and added.
A post-heating temperature calculating means 15a for obtaining a post-heating temperature, and
Humidity after heating calculated by the post-heating temperature and the humidity signal
The post-heating humidity calculating means 14 for obtaining the
And the temperature before heating and the humidity after heating.
A pre-heating humidity calculating means 16 for obtaining the pre-heating humidity,
The upper end of the cylinder is a suction inlet with a canopy, and the lower end is an outlet.
Along with the lower end of the cylinder, the fan of the ventilation mechanism
Install the moisture sensitive element upstream of the fan inside the cylinder.
In addition, the moisture-sensitive element is covered with a drip-proof cover 11i .

[0010]

[0011]

In order to achieve the above object, the ultra-high humidity detecting device according to the present invention is provided with a ventilation mechanism 11d, 11e, heating means 11b, 11c, a moisture sensing element 11f, a pre-heating feeling provided in the cylindrical body 11a. It has a temperature element 11h and a post-heating temperature sensing element 11g , and water drops in saturated steam by the ventilation mechanism.
Heating but which intakes the air in a state of floating, the air that has the intake and heated by the heating means, in accordance with the temperature as the detected temperature of the air before heating is detected by the heating before the temperature sensitive element A pre-temperature signal is output, the temperature of the heated air is detected by the post-heating temperature sensing element, a post-heating temperature signal is output according to the detected temperature, and the humidity of the heated air is detected by the humidity sensing. A sensor unit 11 that detects the humidity by a device and outputs a humidity signal corresponding to the detected humidity, a pre-heating temperature detection unit 13 that detects the pre-heating temperature of air before heating by the pre-heating temperature signal, and a temperature after heating. Post-heating temperature detecting means 15 for detecting the post-heating temperature of the air after heating based on the temperature signal.
A post-heating humidity calculating means 14 for calculating the post-heating humidity of air by calculating on the basis of the post-heating temperature and humidity signals, a post-heating humidity calculated by the post-heating humidity calculating means, the post-heating temperature and the heating And a pre-heating humidity calculating means 16 for calculating the pre-heating humidity of the air before being heated by the heating means by calculating based on the pre-temperature and the upper end of the cylindrical body.
The suction port with an indicator and the discharge port at the lower end are
Place the fan of the ventilation mechanism near the bottom end of the fan inside the cylinder.
The temperature-sensitive element and the humidity-sensitive element after heating on the upstream side of
Provided respectively, the temperature-sensitive element after heating and the moisture-sensitive element
The child is covered with a drip-proof cover 11i .

[0013]

In order to achieve the above object, the ultra-high humidity control apparatus according to the present invention controls by comparing the pre-heating humidity calculated by the pre-heating humidity calculating means of the ultra-high humidity detecting apparatus 1 with the set humidity. It is characterized by including a control means 21 for outputting a signal, and controlling a humidity in the atmosphere to a set humidity by starting and stopping a humidifier 24 provided in the atmosphere by a control signal output by the control means.

[0015]

In the ultra-high humidity detecting device having the above structure, the sensor unit 1
1 is a ventilation mechanism 11d, 11 provided in the cylindrical body 11a.
e, heating means 11b, 11c, moisture sensitive element 11f and heating
The rear temperature-sensing element 11g is provided, and the ventilation mechanisms 11d and 11e are used.
The intake air is heated to a predetermined temperature by the heating means 11b and 11c.
The temperature of the air after heating is raised to a temperature-sensitive element.
Temperature after heating detected by 11 g and corresponding to the detected temperature
The humidity sensor outputs the humidity signal and the humidity of the heated air.
The humidity signal corresponding to the detected humidity is detected by the child 11f.
No. is output. The post-heating temperature detecting means 15 detects the post-heating temperature signal.
Detects the post-heating temperature of the air after heating. After heating
Post-heating humidity calculating means 1 based on the temperature signal and the humidity signal
4 calculates and obtains the post-heating humidity of air having a predetermined temperature.
Then, the pre-heating temperature calculation means 13a calculates the temperature from the post-heating temperature.
Calculate the pre-heating temperature by subtracting the constant temperature. After heating temperature and
Pre-heating humidity calculation means based on pre-heating temperature and post-heating humidity
16 is calculated and heated by the heating means 11b, 11c
Since the humidity before heating of the air before it is heated is calculated, saturated steam
It is a very high humidity atmosphere with water droplets floating inside.
However, over-adsorption is unlikely to occur, and the temperature-sensitive element keeps the temperature after heating.
You only need to detect it. In addition, the upper end of the cylinder 11 is
Use the suction inlet with a disc, the lower end as the outlet, and the lower end near the inside of the cylinder.
The fan 11e of the ventilation mechanism is a fan inside the cylinder 11.
After heating, the temperature-sensitive element 11g and the humidity-sensitive element 11f are provided on the upstream side.
Each of them is provided and after heating, the temperature sensitive element 11g and the moisture sensitive element
Since 11f is covered with the drip-proof cover 11i,
Moisture-sensitive element 11f and feeling after heating even if there are water droplets that are not vaporized
Direct contact with the temperature element 11g is reliably prevented.

In the ultra-high humidity detecting device having the above structure, the sensor
The part 11 includes a ventilation mechanism 11d provided in the cylindrical body 11a,
11e, heating means 11b and 11c, a moisture sensitive element 11f, and
It has a pre- heating temperature sensitive element 11h, and ventilation mechanisms 11d and 11e.
The air taken in by the heating means 11b, 11c
Heating to a high constant temperature and sensing the temperature of the air before heating
The temperature of the heated air is sensed by the element 11h and a pre- heating temperature signal corresponding to the sensed temperature is output.
The humidity corresponding to the detected humidity is detected by the humidity element 11f.
Output a frequency signal. The pre-heating temperature detection means 13 sets the pre-heating temperature.
The temperature signal detects the post-heating temperature of air before heating. Addition
The post-heating temperature calculation means 15a adds a predetermined temperature to the pre-heating temperature.
After heating, obtain the temperature. After heating Based on temperature and humidity signal
After heating, the post-heating humidity calculating means 14 calculates to obtain the post-heating humidity.
Meru. And the temperature after heating and the temperature before heating and the humidity after heating
The pre-heating humidity calculating means 16 calculates based on
Humidity before heating of air before being heated by 11b and 11c
, So water droplets are floating in saturated steam
Even if the environment is extremely high humidity, over-adsorption does not occur.
In addition, the temperature sensitive element only needs to detect the temperature after heating.
Yes. Further, the upper end of the cylindrical body 11 is provided with a suction inlet, and the lower end is discharged.
A fan with a ventilation mechanism near the bottom of the cylinder as the outlet
11e on the upstream side of the fan inside the cylindrical body 11
1f is provided, and the moisture-sensitive element 11f is attached to the drip-proof cover 11i.
Because it covers more, even if there are water droplets that are not steamed
Direct contact with the humidity sensitive element 11f is reliably prevented.

[0017]

[0018]

In the ultra-high humidity detecting device having the above structure, the sensor unit 11 includes the ventilation mechanism 11d, which is provided in the cylindrical body 11a.
11e, heating means 11b and 11c, a humidity sensitive element 11f, a pre-heating temperature sensitive element 11h and a post-heating temperature sensitive element 11g,
The air taken in by the ventilation mechanisms 11d, 11e is heated by the heating means 11b, 11c, the temperature of the air before heating is detected by the pre-heating temperature sensing element 11h, and a pre-heating temperature signal corresponding to the detected temperature is output. , The temperature of the heated air is detected by the after-heating temperature sensing element 11g, and a post-heating temperature signal corresponding to the detected temperature is output, and the humidity of the heated air is detected by the humidity sensing element 11f. The humidity signal according to the selected humidity is output. The pre-heating temperature detection means 13 detects the post-heating temperature of the air after heating by the post-heating temperature signal, and the post-heating temperature detection means 15 detects the post-heating temperature of the air after heating by the post-heating temperature signal. The post-heating humidity calculating means 14 calculates the post-heating humidity of air by calculating based on the post-heating temperature and the humidity signal, and the pre-heating humidity calculating means 16 calculates the post-heating humidity and the post-heating temperature calculated by the post-heating humidity calculating means 14. And the heating means 11 by calculating based on the pre-heating temperature
Since the pre-heating humidity of the air before being heated by b and 11c is obtained, the temperature of the air before and after heating is detected, and the heating temperature of the air by the heating means 11b and 11c may be a temperature at which water drops are eliminated, The temperature does not have to be constant.
The upper end of the cylindrical body 11 serves as an eaves inlet with a canopy, and the lower end serves as an outlet.
Along with the lower end of the cylinder, a fan 11e having a ventilation mechanism is attached.
After heating to the upstream side of the fan in the cylindrical body 11 after heating, the temperature-sensitive element 11g
And the moisture-sensitive element 11f, respectively, and the temperature-sensitive element after heating
The child 11g and the moisture-sensitive element 11f are covered by the drip-proof cover 11i
Since it is covered, water droplets are suspended in saturated steam.
Moisture-sensitive element even if there are water droplets that are in a non-vaporized state
Direct contact with 11f is reliably prevented.

[0020]

In the ultra-high humidity controller having the above-mentioned structure, the pre-heating humidity calculated by the pre-heating humidity calculating means 16 of the ultra-high humidity detecting device 1 is compared with the set humidity, and the control means 21 outputs a control signal, Since the humidifier 24 provided in the atmosphere is started and stopped by this control signal to control the humidity in the atmosphere to the set humidity, it is possible to control the humidity in the ultra-high humidity atmosphere.

[0022]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows an embodiment of an apparatus for detecting ultra-high humidity by the ultra-high humidity detection method according to the present invention and an ultra-high humidity control apparatus using the apparatus. In FIG. It is composed of a detection device 1, a control unit 2, and a display device 3. The ultra-high humidity detection device 1 includes a sensor unit 11, a constant voltage or constant current power supply 12, a pre-heating temperature detection circuit 13, a post-heating humidity calculation circuit 14, a post-heating temperature detection circuit 15, and a pre-heating humidity calculation circuit 16. The control unit 2 is the control circuit 2
1, a humidity setter 22, a relay circuit 23, and a humidifier 24.

The sensor unit 11 of the ultra-high humidity detecting device 1 is installed in the atmosphere 4 in which the ultra-high humidity is to be controlled, and
a, a heat exchanger 11b provided near the upper opening in the tubular body 11a, a heater 11c for heating the heat exchanger 11b to a predetermined temperature, and a heater 11c provided near the lower end opening in the tubular body 11a. The fan 11e driven by the motor 11d, the heat exchanger 11b and the fan 11 in the tubular body 11a.
The humidity sensing element 11f and the temperature sensing element 11g such as a thermistor, which are provided in the middle of the heat exchanger 11e, and the heat exchanger 11b, which is provided near the upper opening in the tubular body 11a, are provided closer to the opening. Temperature sensitive element 11h like a thermistor
And a drip-proof cover 11i that covers the moisture-sensitive element 11f and the temperature-sensitive element 11g, and an eaves member 11j that is arranged above the upper end opening of the tubular body 11a and spaced apart from each other.

The fan 11e is a motor 11 for driving the fan 11e.
Together with d, a ventilation mechanism that exhausts the air sucked from the upper end opening of the cylindrical body 11a from the lower end opening is configured. The air sucked from the upper end opening by this ventilation mechanism is
It is heated to a temperature higher by a predetermined value by a heating device composed of c and a heat exchanger 11b heated by this.
The air before being heated by the heating device is the temperature sensitive element 11h.
The air that has passed therethrough reaches the heating device and is heated by the heating device, reaches the humidity sensing element 11f and the temperature sensing element 11g, and is discharged from the lower end opening.

As a result, the temperature sensitive element 11h detects the temperature of the high-humidity air in the atmosphere 4, and the pre-heating temperature detection circuit 13 detects the pre-heating temperature based on this detection signal and outputs the pre-heating temperature signal. The humidity sensing element 11f detects the humidity when the temperature is higher than the atmosphere 4 by a predetermined value and outputs a humidity signal, and the temperature sensing element 11g senses the temperature of the heated air passing through the tubular body 11a. The post-heating temperature detection circuit 15 detects the post-heating temperature based on this detection signal and outputs the post-heating temperature signal. The humidity signal is input to the after-heating humidity calculating circuit 14 together with the after-heating temperature signal, and this calculating circuit 14 calculates the after-heating humidity and outputs the after-heating humidity signal. The pre-heating temperature signal output from the pre-heating temperature detection circuit 13, the post-heating temperature signal output from the post-heating temperature detection circuit 15, and the post-heating humidity signal output from the post-heating humidity calculation circuit 14 are heated by the pre-heating humidity calculation circuit 16. Used to calculate pre-humidity.

The constant voltage or constant current power source 12 drives the heater 11c and the motor 11d by applying a constant voltage or constant current to them. It should be noted that the constant voltage or constant current applied by the constant voltage or constant current power source 12 to the heater 11c and the motor 11d is fixed by the fan 11e driven by the rotation of the motor 11d from the atmosphere 4 to a constant flow rate of air from the cylindrical body 11a. It is experimentally set that the heater 11c heats the sucked air to a temperature higher than the temperature in the atmosphere 4 by a predetermined value via the heat exchanger 11b.

The display 3 displays the humidity in the atmosphere 4 before heating, which is calculated by the above-mentioned pre-heating humidity calculating circuit 16.

In the above structure, when high-humidity air is sucked from the upper end opening of the cylinder by the ventilation mechanism provided at the outlet of the lower end opening of the cylinder 11a, the temperature of the high-humidity air before heating is increased by the temperature sensing element 11h. Detected. Since the heating fin 11b is heated by the constant voltage or constant current power supply 12 in which the voltage or current supplied to the heater 11c is set in advance so that the intake air can be heated to a predetermined temperature according to the flow rate thereof,
The high-humidity intake air passes through the heating fins 11b of the heating devices 11b and 11c of the ventilation mechanism and is heated to a predetermined temperature.

The air heated to a predetermined temperature has only the temperature increased without changing the absolute humidity and the atmospheric pressure, so that the relative humidity is decreased by the heated amount. When this humidity drop amount is heated to a temperature of, for example, 20% RH, for example, 4 ° C.,
Even if the atmospheric humidity becomes supersaturated, for example, 110%, the humidity acting on the humidity sensitive element is only 90% RH. Therefore, even when the humidity becomes extremely high, excessive adsorption or dew condensation accompanied by swelling peculiar to high humidity occurs. It does not occur and can control ultra-high humidity with high sensitivity and stability.

In the above-mentioned industrial field, an ultrasonic wave or a spray type is used as the humidifier 24. In such a humidifier, when the sucked air contains a relatively large amount of water droplets. Although the heating fin 11b alone cannot vaporize the water, the drip-proof cover 11i is useful for preventing the moisture-sensitive element 11f from being directly hit by a water droplet and deteriorating its characteristics. Further, since the drip-proof cover 11i completely surrounds the humidity sensitive element 11f and the temperature sensitive element 11g, in order to stabilize the air flow, equalize the temperatures of both elements, and accurately detect the humidity after heating. Also useful for.

Moisture sensitive element 11 obtained by changing the resistance value
The humidity after heating detected in f is not corrected for the temperature drift of the humidity sensing element by itself, so it is detected by the temperature sensing element 11g that detects the temperature after heating and converted to the temperature after heating. The signal is corrected by the post-heating humidity calculation circuit 14 to obtain the correct post-heating humidity.
The post-heating humidity detection signal is set in advance so that it will be heated to a predetermined temperature by matching the ventilation mechanism, the heating device and the power supply, so it is possible to easily obtain the temperature before heating by subtracting the heating amount by the arithmetic circuit. The temperature-sensitive element and circuit before heating can be omitted in the low-priced type.

From the post-heating humidity calculated by the post-heating humidity calculating circuit 14, the pre-heating humidity calculating circuit 16 calculates the humidity before heating by the following calculation. First, there is the following relationship between relative humidity and absolute humidity. RH = (D / Ds) × 100 (1) In the formula, D is absolute humidity and Ds is saturated absolute humidity.

The relative humidity after heating is given by the following equation under the condition that neither absolute humidity nor atmospheric pressure changes by heating, and becomes the state shown in the graph of FIG. RH _t2 = (D _t1 / D _st2 ) × 100 (2) where RH _t2 is the relative humidity after heating, D _t1 is the absolute humidity before heating, and D _st2 is the absolute temperature after heating. Humidity.

From the relationship of the above equation (1), D _t1 is given by the following equation (3)
Given in. D _t1 = RH _t1 × D _st1 / 100 (3) where RH _t1 is the relative humidity before heating. Further, Ds is obtained by the following equations (4) and (5). _{D st1 = 804e st1 / {P} 0 (1 + 0.00366t 1)} ...... (4) D st2 = 804e st2 / {P 0 (1 + 0.00366t 2)} ...... (5) wherein, D _st1 before heating Humidity at saturated temperature, e
_st2 saturated vapor pressure at the temperature after heating, P ₀ is the pressure of the atmosphere, t ₂ is the temperature (° C).

By substituting the equation (3) into the equation (2), the relationship between the relative humidity before and after heating and the absolute humidity in the saturated state can be obtained. The relative humidity before heating is the relative humidity after heating and the temperature before and after heating. If it is known, it can be calculated by the following equation.

[Equation 1] However, the equation (6) generally states that the atmospheric pressure P ₀ can be treated as unchanged.

Log ₁₀ e _sw = 10.79586 (1-T1
/T)-5.02808log ₁₀ (T1 / T) +1.504
74 x 10 ^-4 [1-10 ^{-8.29692 (T / T1)} ] +0.4287
3 x 10 ^-3 [10 ^{4.76955 (1-T / T1)} -1] + 0.7861
183 where e _sw is the saturated vapor pressure when coexisting with water, T is the absolute temperature (K) (T = t + 273.15), and T1 is the triple temperature absolute temperature of water (T1 = 273.16K).

In the above-mentioned embodiment, in consideration of the environment in which such a sensor is attached, it is necessary for the intake and discharge of air to have a structure in which water drops do not enter the cylinder.
Also, the intake and exhaust air must not cause a short circuit. Considering these conditions, it is preferable that the intake air is sucked from the bottom to the top so that large water droplets do not enter, and the discharge air is discharged to the bottom. And the arrangement is
The eaves with eaves at the top and the outlets at the bottom,
Ideally, it should be blown down. In the embodiment, the air flow inside the cylinder is from top to bottom, and the drip-proof cover 11
A sufficient effect can be exhibited since water drops are not caught from the open side of i. If the exhaust fan 11e is arranged at the lowermost part, it is not necessary to treat high humidity of 90% RH or more, and the durability of the exhaust fan 11e is no problem.

The heating temperature is set as follows.
In the embodiment, the required humidity display is 110%, the heating temperature is 4 ° C., and the amount of decrease in humidity caused by this heating is about 20% RH. However, the heating temperature depends on the humidity conditions used and the heating device. Depending on the efficiency, the presence or absence of a drip-proof cover, the durability of the humidity sensitive element, etc., we examined how much the humidity needs to be lowered, and decided on one point within the range of 5 to 30% RH.
The temperature required to reduce the humidity is calculated and determined.

The faster the air velocity of the ventilation mechanism, the better the responsiveness and thermal responsiveness of the sensor, and the ability to follow rapid changes in temperature, thus improving the performance of the sensor.
However, a large electric current is required to heat the air to the same temperature, and it becomes difficult to vaporize water droplets. This increases the size of the power supply device and deteriorates the durability of the humidity sensing element and the fan. On the contrary, the slower the vaporization becomes, the smaller the electric current is, but the responsiveness and thermal responsiveness of the sensor are deteriorated and the rapid temperature change cannot be followed.

In the embodiment, the heat exchange fin has a structure and size (m) as shown in FIG. 3 in consideration of mass productivity and performance.
m) The commercially available small heat sink for transistors is used. Since this fin has a relatively small blade interval of 4 mm, it has a low ability to vaporize water droplets. Therefore, the rotational speed of the fan is reduced and the flow velocity of the air passing through the fins is reduced as much as possible within a range in which the thermal response of the heating device and the response of the humidity sensitive element do not matter.

According to the experiment, the limit flow velocity at which the thermal responsiveness of the heating device is allowed is 0.5 m / s, and the limit flow velocity at which vaporization of 110% fog is 0.8 m / s is possible.
00. Therefore, in the embodiment, the diameter of the cylindrical body 11a is set to about 20 mm and the flow velocity is set to 0.6 m / s. In addition, a drip-proof cover was installed for safety in case of inhalation of large drops of water. The above conditions are the best values when the heat sink of FIG. 3 is used, but since it is possible to obtain a fin with a higher evaporation effect and a lighter weight, at that time, the flow velocity of air is 1 to 1.5 m / Can be raised to s position.

Generally, when the flow velocity is kept constant at 0.6 m / s, the ratio A / S of the cross-sectional area (passage area) S of the cylindrical body 11a and the surface area A of the heat sink is 8 or more, and the heat capacity H of the heating device is H.
The surface area ratio A / H of the heat sink is preferably 1.2 or more. If the length of the heat sink is too short, heat exchange will be insufficient, and if it is too long, the heat capacity with respect to passing air will be increased, which is not preferable. When the flow velocity is 0.6 m / s,
Good results are obtained when the length of the heat sink is 15 to 40 mm, but up to 50 mm is feasible. The relationship between the surface area per unit weight of the heat sink and the number of fins does not have a linear relationship, and in general, the fins having narrow intervals for heat exchange rate and steaming can obtain better results. In addition, in the above-described embodiment, the resistance change type is exemplified as the humidity sensing element, but a capacitance type humidity sensing element and a dry and wet bulb type humidity sensor can also be applied.

In the embodiment shown in FIG. 1, the post-heating temperature sensing element 11g which detects the temperature of air after heating and outputs a post-heating temperature signal corresponding to the detected temperature is used as the temperature sensing element.
And a pre-heating temperature sensitive element 11h that detects the temperature of air before heating and outputs a pre-heating temperature signal according to the detected temperature.
By controlling the heating by 11c to a constant temperature, as shown in FIG.
As shown in FIG. 3, the pre-heating temperature sensing element 11h is omitted and only the post-heating temperature sensing element 11g is provided.
Post-heating temperature detection circuit 1 based on post-heating temperature signal from 1 g
5 detects the post-heating temperature of the air after heating, and the pre-heating temperature calculation circuit 13a subtracts a predetermined temperature from the post-heating temperature to obtain the pre-heating temperature.
May calculate the temperature after heating and the humidity signal to obtain the humidity after heating, and reduce the number of temperature sensitive elements.

Contrary to the case of FIG. 4, as shown in FIG. 5, the after-heating temperature sensing element 11g is omitted and the after-heating temperature sensing element 1 is omitted.
Only the 1h is provided, the pre-heating temperature detection circuit 13 detects the pre-heating temperature of the air before heating by the pre-heating temperature signal from the pre-heating temperature sensing element 11h, and the post-heating temperature calculation circuit 15a is calculated from the pre-heating temperature. Reduces the number of temperature-sensitive elements by adding a predetermined temperature to obtain the post-heating temperature, and the post-heating humidity calculating circuit 14 calculates based on the post-heating temperature and the humidity signal to obtain the post-heating humidity. You may

The humidity setting device 22 of the control unit 2 is set in the atmosphere 4
The humidity set by the humidity setter 22 is compared with the detected and corrected humidity of the atmosphere 4 and the control circuit 21 outputs a control signal. The control signal output from the control circuit 21 controls on / off of the relay in the relay circuit 23 to start / stop the humidifier 24. The relay circuit 23 is not limited to a mechanical relay, and may be a contactless element such as a triac.

The heat capacity of the heating device (heater 11c and fin 11b) for setting the heating temperature is preferably as small as possible, and is preferably 10 cal / deg. If this heat capacity is large, the heating device cannot follow the temperature change of the atmosphere, and heating at a constant temperature higher than the ambient temperature cannot be performed, resulting in an error in control.

Furthermore, when a constant voltage or constant current is applied to the constant capacity heater 11c, at a temperature higher than the ambient temperature by a certain temperature, the error is not a problem in practice within the ambient temperature range of 0 to 20 ° C. Can be heated.

Furthermore, it is possible to control the temperature display by the outputs of the temperature detection circuits 13 and 15 as needed.

[0049]

As described above, according to the present invention, the humidity of the air to which the humidity sensitive element is exposed is lowered by heating, and overadsorption is less likely to occur even in an extremely high humidity atmosphere. Therefore, it is possible to detect ultra-high humidity particularly at low temperature with high responsiveness and high humidity stability.

Further, by heating the air exposed to the humidity sensing element to a predetermined temperature, the temperature of one side before and after heating can be detected to calculate the temperature of the other side. Since it is only necessary to detect the temperature of, the cost can be reduced by simplifying the configuration.

Furthermore, since the temperatures before and after heating are detected, the heating temperature of the air does not necessarily have to be the predetermined temperature, and the temperature control can be simplified by that amount. Good humidity detection can be performed.

Furthermore, the upper end of the cylinder 11 is inhaled with an eaves
Ventilation is made near the lower end inside the cylinder while using the mouth and the lower end as exhaust ports
A mechanism fan is installed, and the air flow is sucked in from below and discharged downward, and after heating, the temperature-sensitive element and moisture-sensitive element are covered with a drip-proof cover, and even if there are water droplets that are not vaporized, the moisture-sensitive element Since it is surely prevented from directly hitting against, the characteristics can be stabilized and the durability can be improved.

Further, since the sensor unit capable of detecting ultra-high humidity with high response and having high humidity stability is used to control the humidity of the atmosphere of low temperature and high humidity, It is possible to control an atmosphere of high humidity with good responsiveness and linearity.

[Brief description of drawings]

FIG. 1 is a diagram showing an embodiment of an ultra-high humidity detection method and device and an ultra-high humidity control device according to the present invention.

FIG. 2 is a graph showing how the relative humidity changes with temperature.

3 is a perspective view showing an example of fins in FIG. 1. FIG.

FIG. 4 is a diagram showing a modification of a part of the apparatus of FIG.

FIG. 5 is a diagram showing a modification of another part of the apparatus of FIG.

[Explanation of symbols]

1 Ultra-high humidity detector 11 Sensor part 11a cylinder 11b, 11c Heating means (fin, heater) 11d, 11e ventilation mechanism 11f Moisture sensitive element 11g Temperature sensor after heating 11h Temperature sensor before heating 11i drip-proof cover 11j eaves 13 Preheating temperature detection means (circuit) 13a Pre-heating temperature calculation means (circuit) 14 After-heating humidity calculation means (circuit) 15 Temperature detector after heating (circuit) 15a Temperature calculation means (circuit) after heating 16 Pre-heating humidity calculation means (circuit) 21 Control means (circuit) 24 Humidifier

─────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-6-281564 (JP, A) JP-A-61-11042 (JP, A) JP-A-53-23679 (JP, A) Jitsukaihei 3- 81585 (JP, U) (58) Fields surveyed (Int.Cl. ⁷ , DB name) G01N 27/12 G01N 25/64 G01N 27/04

Claims (4)

(57) [Claims] 1. A cylindrical ventilation mechanism provided in the body, the heating means comprises a moisture sensitive element and the heating after the temperature sensitive device, the air in a state where water droplets saturated water vapor is floating by the ventilation mechanism
The air is taken in and heated by the sucked heating means to a temperature higher by a predetermined temperature, and the temperature of the heated air is adjusted by the temperature sensing element.
Temperature signal after heating according to the detected temperature
And a sensor unit for detecting the humidity of the heated air by the humidity sensitive element and outputting a humidity signal according to the detected humidity, and the post-heating temperature of the air after heating by the post-heating temperature signal.
After-heating temperature detecting means for detecting, and heating by calculating based on the after-heating temperature and the humidity signal
A post-heating humidity calculating means for obtaining the post-humidity, and a pre-heating temperature is obtained by subtracting a predetermined temperature from the post-heating temperature.
Pre-heating temperature calculation means, the post-heating temperature and the pre-heating temperature and the post-heating humidity
Calculate the humidity before heating by calculating the humidity before heating
A step, and the upper end of the cylindrical body serves as a suction inlet with a canopy and the lower end serves as an outlet.
Along with the lower end of the cylinder, the fan of the ventilation mechanism
To the upstream side of the fan in the cylinder after the heating.
Child and the moisture sensitive element respectively, and the feeling after heating
The temperature element and the humidity sensitive element are covered with a drip-proof cover.
Ultra-high humidity detection device . 2. A ventilation mechanism and a heating hand provided in the cylinder.
The ventilation mechanism having a step, a humidity sensitive element and a temperature sensitive element before heating.
The air in a state in which water droplets are suspended in a saturated water vapor by
The intake air is taken in and the intake air is brought to a predetermined temperature by the heating means.
After heating to a high temperature, the temperature of the air before the heating is adjusted to the temperature-sensitive element.
The temperature signal before heating according to the temperature detected by the child
Output the signal and sense the humidity of the heated air.
Humidity signal detected by the humidity element and corresponding to the detected humidity
Sensor and the pre-heating temperature signal to output the pre-heating temperature of air before heating.
A pre-heating temperature detecting means for detecting and a post-heating temperature are obtained by adding a predetermined temperature to the pre-heating temperature.
That the post-heating temperature calculating means, the heating by calculating on the basis of the post-heating temperature and the humidity signal
A post-heating humidity calculating means for obtaining a post-humidity, and the post-heating temperature, the pre-heating temperature, and the post-heating humidity.
Calculate the humidity before heating by calculating the humidity before heating
A step, and the upper end of the cylindrical body serves as a suction inlet with a canopy and the lower end serves as an outlet.
Along with the lower end of the cylinder, the fan of the ventilation mechanism
Install the moisture sensitive element upstream of the fan inside the cylinder.
And an ultra-high humidity detecting device characterized in that the moisture sensitive element is covered with a drip-proof cover . 3. A ventilation mechanism and a heating hand provided in the cylinder.
Step, humidity sensitive element, pre-heating temperature sensing element and post-heating temperature sensing element
However, the ventilation mechanism causes water droplets to float in the saturated steam.
Inhaling the air in the state of
The temperature of the air before heating is heated by the steps
Pre-heating temperature detected by the element and corresponding to the detected temperature
A signal is output and the temperature of the air after heating is adjusted to
The temperature signal after heating according to the detected temperature is detected by the child.
Output the signal and sense the humidity of the heated air.
Humidity signal detected by the humidity element and corresponding to the detected humidity
Sensor and the pre-heating temperature signal to output the pre-heating temperature of air before heating.
The pre-heating temperature detecting means for detecting and the post-heating temperature of the air after heating are detected by the post-heating temperature signal.
A post-heating temperature detecting means for detecting, and an air temperature calculated by the post-heating temperature and humidity signals.
After-heating humidity calculating means for obtaining the after-heating humidity , and after-heating humidity calculated by the after-heating humidity calculating means
Calculated based on the post-heating temperature and the pre-heating temperature
Calculate the pre-heating humidity of the air before it is heated by the heating means
And a pre-heating humidity calculating means, wherein the upper end of the cylinder is a suction inlet with a canopy, and the lower end is an outlet.
Along with the lower end of the cylinder, the fan of the ventilation mechanism
To the upstream side of the fan in the cylinder after the heating.
Child and the moisture sensitive element respectively, and the feeling after heating
An ultra-high humidity detecting device, characterized in that the temperature element and the moisture sensitive element are covered with a drip-proof cover . 4. The ultra-high humidity according to claim 1.
Before heating calculated by the humidity before heating calculation means of the temperature detection device
Control means for comparing the temperature and the set humidity to output a control signal
And provided in the atmosphere by a control signal output from the control means.
Control the humidity in the atmosphere to the set humidity.
Ultra high humidity control apparatus characterized by that.