JP3379557B2 - Piezoelectric driver for inkjet recording device - Google Patents
Piezoelectric driver for inkjet recording deviceInfo
- Publication number
- JP3379557B2 JP3379557B2 JP35168693A JP35168693A JP3379557B2 JP 3379557 B2 JP3379557 B2 JP 3379557B2 JP 35168693 A JP35168693 A JP 35168693A JP 35168693 A JP35168693 A JP 35168693A JP 3379557 B2 JP3379557 B2 JP 3379557B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- end side
- vibrator
- fixed end
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/11—Printed elements for providing electric connections to or between printed circuits
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/36—Assembling printed circuits with other printed circuits
- H05K3/361—Assembling flexible printed circuits with other printed circuits
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Description
【0001】[0001]
【産業上の利用分野】本発明は、インクジェット記録装
置用の圧電駆動体に関し、より詳しくは圧電駆動体の表
面に形成する外部電極のパターンに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric driving body for an ink jet recording apparatus, and more particularly to a pattern of external electrodes formed on the surface of the piezoelectric driving body.
【0002】[0002]
【従来の技術】縦振動モードの変位を利用してノズルか
らインク滴を吐出するようにしたインクジェット記録装
置は、一般に特開平4−1052号公報に見られるよう
に、ノズルプレートの上に狭い間隙をおいて列設した各
ノズルに対応するよう分割形成した各圧電振動子の先端
を振動板に当接し、記録信号に応動するこれらの振動子
によりノズルプレートと振動板との間でインクを加圧し
て、これをノズルよりインク滴として飛翔させるように
したものである。2. Description of the Related Art An ink jet recording apparatus in which ink droplets are ejected from nozzles by utilizing displacement in a longitudinal vibration mode is generally disclosed in Japanese Unexamined Patent Publication (Kokai) No. 4-1052. The tip of each piezoelectric vibrator dividedly formed corresponding to each nozzle arranged in line is brought into contact with the vibrating plate, and ink is applied between the nozzle plate and the vibrating plate by these vibrating plates that respond to the recording signal. The pressure is applied so that the ink is ejected from the nozzle as an ink droplet.
【0003】この種のインクジェット記録装置に用いら
れる圧電駆動体は、各ノズルに合せて振動子を細かく分
割形成しなければならない関係上、その成形がきわめて
困難であるばかりでなく、圧電プレートの表面に形成し
た外部電極にフレキシブル回路基板を正しく対応させて
接合させなければならないといった組付け上の困難な問
題を有している。The piezoelectric driving body used in this type of ink jet recording apparatus is not only extremely difficult to mold because the vibrator must be finely divided and formed in accordance with each nozzle, but also the surface of the piezoelectric plate. There is a difficult problem in assembling that the flexible circuit board must be correctly aligned and bonded to the external electrode formed on the substrate.
【0004】[0004]
【発明が解決しようとする課題】本発明はこのような問
題に鑑みてなされたもので、その目的とするところは、
圧電プレートとフレキシブル回路基板との接続の自由度
を高めることによって、この種の組付け作業を大巾に改
善することのできる新たなインクジェット記録装置用の
圧電駆動体を提供することにある。SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and its object is to:
It is an object of the present invention to provide a new piezoelectric driving body for an inkjet recording apparatus, which can greatly improve this type of assembly work by increasing the degree of freedom in connecting the piezoelectric plate and the flexible circuit board.
【0005】[0005]
【課題を解決するための手段】すなわち、本発明はかか
る課題を達成するためのインクジェット記録装置用の圧
電駆動体として、自由端側を活性部、固定端側を非活性
部となした多数の振動子と、振動子の並び方向両側部に
位置させたダミー振動子とを固定端側に一体化させて櫛
歯状に形成するとともに、振動子には、少なくとも自由
端側端面から固定端の近傍にかけての部分に外部信号電
極を、ダミー振動子には、固定端側端面から外部信号電
極の固定端側端縁よりも自由端寄りに延在した部分に外
部共通電極をそれぞれ形成するようにしたものである。[ MEANS FOR SOLVING THE PROBLEMS] That is, the present invention
As a piezoelectric driving body for an inkjet recording apparatus for achieving the above-mentioned subject, a large number of vibrators having a free end side as an active part and a fixed end side as an inactive part
Comb by integrated with the dummy vibrator is located on the fixed end side
And forming the tooth shape, the vibrator, the external signal electrodes, the dummy vibrator in portion extending near the least even fixed end from the own Yoshitan side end face, the external signal electrodeposition from the fixed end side end surface
The outer common electrodes are formed on the portions of the poles that extend closer to the free ends than the edges of the fixed ends .
【0006】[0006]
【実施例】そこで以下に図示した実施例について説明す
る。図1は、本発明の一実施例をなす圧電駆動体とフレ
キシブル回路基板との接合状態を示したものであり、図
2は、この圧電駆動体の断面構成を示したものである。Embodiments Now, the embodiments shown in the drawings will be described. FIG. 1 shows a bonded state of a piezoelectric driving body and a flexible circuit board according to an embodiment of the present invention, and FIG. 2 shows a sectional structure of the piezoelectric driving body.
【0007】図において符号1は、圧電駆動体としての
圧電振動子組立体で、この組立体1は、自由端側の巾方
向中央部を櫛歯状に分割形成した圧電プレート2と、こ
の圧電プレート2をインクジェット記録装置に取付ける
べく、その後端背面に固定した支持プレート15とによ
って構成されている。In the drawings, reference numeral 1 is a piezoelectric vibrator assembly as a piezoelectric driving body. The assembly 1 is composed of a piezoelectric plate 2 formed by dividing the center portion in the width direction on the free end side into comb teeth and the piezoelectric plate 2. In order to attach the plate 2 to the ink jet recording apparatus, it is composed of a support plate 15 fixed to the rear surface of the rear end.
【0008】これをさらに詳細に説明すると、圧電プレ
ート2は、チタン酸ジルコン酸鉛やチタン酸バリウムの
ようなペースト状の圧電材料層3と、この圧電材料層3
に塗着もしくは蒸着した銀パラジウム等よりなる内部導
電層4とを積層することによって、自由端側を活性部
5、固定端側つまり基端側を非活性部6として構成し、
さらに、基端側の非活性部6の背面に、例えば圧電材料
と同一材料よりなるペースト状の快削性セラミックス材
によって形成した支持プレート15を積層した上、これ
ら全体を焼結により一体的に成形したものである。To explain this in more detail, the piezoelectric plate 2 comprises a piezoelectric material layer 3 in the form of a paste such as lead zirconate titanate or barium titanate, and this piezoelectric material layer 3.
By laminating the inner conductive layer 4 made of silver palladium or the like applied or vapor-deposited on the above, the free end side is constituted as the active part 5, and the fixed end side, that is, the base end side is constituted as the non-active part 6.
Further, a support plate 15 made of, for example, a paste-like free-cutting ceramic material made of the same material as the piezoelectric material is laminated on the back surface of the non-active portion 6 on the base end side, and the whole of them is integrally sintered by sintering. It is molded.
【0009】この圧電プレート2は、自由端側の巾方向
中央部分を振動子形成領域7となして、この部分を櫛歯
状に切割って多数の圧電振動子8‥‥を形成する一方、
その両側には切割りを設けないダミー振動子9、9を形
成して、この部分を図示しない圧電駆動体保持ブロック
の両側に設けた位置決め溝に挿入することにより、圧電
振動子組立体1を保持ブロックに位置決め固定するよう
に構成されている。In this piezoelectric plate 2, a central portion in the width direction on the free end side is made into a vibrator forming region 7, and this portion is cut into comb teeth to form a large number of piezoelectric vibrators 8 ...
Dummy vibrators 9 and 9 having no slits are formed on both sides thereof, and this portion is inserted into positioning grooves provided on both sides of a piezoelectric driving body holding block (not shown). It is configured to be positioned and fixed to the holding block.
【0010】この圧電プレート2には、図1に示したよ
うに、振動子形成領域7においてはその上面に、活性部
5の下面から自由端側端面を経て圧電プレート2の後端
近傍に達する外部信号電極10が内部導電層4と導通す
るようにして被覆形成され、また、左右のダミー振動子
9、9の上面には、基端側端面に設けた電極11と連通
する外部共通電極12が外部信号電極10との間に若干
の非導電面13を介在させるようにして不活性部6の前
縁近傍にわたって被覆形成されている。As shown in FIG. 1, the piezoelectric plate 2 reaches the upper surface of the vibrator forming region 7 from the lower surface of the active portion 5 to the vicinity of the rear end of the piezoelectric plate 2 via the end surface on the free end side. The external signal electrode 10 is formed so as to be electrically connected to the internal conductive layer 4, and the external common electrode 12 communicating with the electrode 11 provided on the end face on the base end side is formed on the upper surfaces of the left and right dummy vibrators 9, 9. Is formed over the vicinity of the front edge of the inactive portion 6 so that a small amount of non-conductive surface 13 is interposed between it and the external signal electrode 10.
【0011】ついで、この圧電振動子組立体1には、支
持プレート15との接合端縁Aから少なくとも圧電プレ
ート2の後端面上半部Bを結ぶ切割り線L−Lを境とし
て圧電プレート2の活性部5側の全ての部分と、基端側
の非活性部6のうち支持プレート15上の上半部分をワ
イヤーソーやダイシングソーによりノズルの配設ピッチ
に相当する間隙をもって櫛歯状に分割して多数の圧電振
動子8‥‥を形成する。Next, in the piezoelectric vibrator assembly 1, the piezoelectric plate 2 is separated by a dividing line L-L that connects at least the upper half B of the rear end face of the piezoelectric plate 2 from the joining edge A with the support plate 15. All parts on the active part 5 side and the upper half part of the non-active part 6 on the base end side on the support plate 15 are formed into a comb tooth shape with a gap corresponding to the arrangement pitch of the nozzles with a wire saw or a dicing saw. A large number of piezoelectric vibrators 8 ... Are formed by division.
【0012】一方、圧電プレート2上の上記した外部電
極10、12に接続するフレキシブル回路基板16は圧
電プレート2とほぼ同じ巾に形成され、その巾方向中央
部分には、各圧電振動子8‥‥とともに切割られた各外
部信号電極10‥‥のそれぞれに接続する多数のリード
線17‥‥が、またこの両側には、ダミー振動子9、9
の上面に形成された外部共通電極12に接続するリード
線18が、それぞれ回路基板16の前端縁に達するよう
にして形成されている。On the other hand, the flexible circuit board 16 connected to the external electrodes 10 and 12 on the piezoelectric plate 2 is formed to have substantially the same width as the piezoelectric plate 2, and the piezoelectric vibrators 8 ... A large number of lead wires 17 connected to each of the external signal electrodes 10 cut together with the dummy vibrators 9 and 9 are provided on both sides thereof.
The lead wires 18 connected to the external common electrode 12 formed on the upper surface of are respectively formed so as to reach the front edge of the circuit board 16.
【0013】なお、図中符号19は先端部を除いてフレ
キシブル回路基板16の下面に添設された絶縁材性のカ
バーシートを示している。Reference numeral 19 in the figure denotes an insulating cover sheet attached to the lower surface of the flexible circuit board 16 except for the tip.
【0014】このように構成されたフレキシブル回路基
板16を中央部の各リード線17‥‥が圧電振動子8‥
‥上の各外部信号電極10‥‥に対応するように巾方向
に位置決めしつつその先端縁16aを圧電プレート2の
非活性部6に位置させるように添着する。In the flexible circuit board 16 thus constructed, each lead wire 17 in the central portion is a piezoelectric vibrator 8.
.. are positioned in the width direction so as to correspond to the respective external signal electrodes 10 ..., And are attached so that their tip edges 16a are positioned at the inactive portion 6 of the piezoelectric plate 2.
【0015】これにより、フレキシブル回路基板16の
前端縁16aが、外部共通電極12の前端縁12aと外
部信号電極10の前端縁10aによって囲まれるゾーン
Zのいずれの位置にあるように添着されても、フレキシ
ブル回路基板16の中央部に設けた各リード線17‥‥
は圧電振動子8上の各外部信号電極10‥‥に接続し、
また回路基板16の左右に設けた各リード線18、18
はダミー振動子9、9上の外部共通電極12、12に接
続することになる。As a result, the front edge 16a of the flexible circuit board 16 may be attached to any position of the zone Z surrounded by the front edge 12a of the external common electrode 12 and the front edge 10a of the external signal electrode 10. , Each lead wire 17 provided in the central portion of the flexible circuit board 16 ...
Is connected to each external signal electrode 10 on the piezoelectric vibrator 8,
In addition, each lead wire 18, 18 provided on the left and right of the circuit board 16
Will be connected to the external common electrodes 12, 12 on the dummy oscillators 9, 9.
【0016】ところで図3は、この圧電振動子組立体1
の成形法について示したもので、はじめに圧電材料層3
と内部電極4とを積層することにより形成した大型の圧
電プレート形成板22に、マスクを用いて同図(a)に
示したパターンのような外部共通電極32と外部信号電
極30を形成する。By the way, FIG. 3 shows this piezoelectric vibrator assembly 1.
First, the piezoelectric material layer 3 is shown.
An external common electrode 32 and an external signal electrode 30 having the pattern shown in FIG. 7A are formed on a large-sized piezoelectric plate forming plate 22 formed by stacking the internal electrode 4 and the internal electrode 4.
【0017】すなわち、この圧電プレート形成板22に
は、その基端側からダミー振動子9の2倍の巾を有する
複数の外部共通電極32‥‥を、基端面に設けた電極3
1と連通するように、かつ圧電プレート2の巾に相当す
る間隔をおいて非活性部6の表面を覆うように突出形成
する一方、自由端側からは活性部5の下面から自由端側
端面を経て表面に達した外部信号電極30のうち、振動
子形成領域上の外部信号電極30aが圧電プレート形成
板22の後端縁近くに達するように、かつその他の部分
30bが非導電面33を介して外部共通電極32の外縁
を取囲むように歯車状に形成する。That is, the piezoelectric plate forming plate 22 is provided with a plurality of external common electrodes 32, ...
1 is formed so as to communicate with 1 and at a distance corresponding to the width of the piezoelectric plate 2 so as to cover the surface of the non-active portion 6, while from the free end side, the lower surface of the active portion 5 to the free end side end surface. Among the external signal electrodes 30 that have reached the surface via, the external signal electrode 30a on the vibrator formation region reaches near the rear end edge of the piezoelectric plate forming plate 22, and the other portion 30b forms the non-conductive surface 33. The outer common electrode 32 is formed in a gear shape so as to surround the outer edge thereof.
【0018】ついで、このように形成した圧電プレート
形成板22を、外部共通電極32の中心を通る線に沿っ
て切断し、複数の圧電プレート2‥‥として分離形成す
る(同図(B)。Then, the piezoelectric plate forming plate 22 thus formed is cut along a line passing through the center of the external common electrode 32 to form a plurality of piezoelectric plates 2 ...
【0019】そして最後に、分離形成した各圧電プレー
ト2の基端部下面に支持プレート15を接合するととも
に、支持プレート15との接合端縁Aから少なくとも圧
電プレート2の後端面上半部Bを結ぶ切割り線を境とし
て圧電プレート2の活性部5側の全ての部分と、基端側
の非活性部6のうち支持プレート15上の上半部分をワ
イヤーソーWやダイシングソーによりノズルの配設ピッ
チに相当する間隙をもって櫛歯状に分割して多数の圧電
振動子8‥‥を形成する。Finally, the supporting plate 15 is joined to the lower surface of the base end portion of each of the separated piezoelectric plates 2, and at least the upper half B of the rear end surface of the piezoelectric plate 2 is joined from the joining edge A with the supporting plate 15. All the parts on the active part 5 side of the piezoelectric plate 2 and the upper half part on the support plate 15 of the inactive part 6 on the base end side with the dividing line connecting them as a boundary are arranged with nozzles by a wire saw W or a dicing saw. A large number of piezoelectric vibrators 8 ... Are formed by division into comb teeth with a gap corresponding to the pitch.
【0020】[0020]
【発明の効果】以上述べたように本発明によれば、圧電
プレートの表面に、その巾方向中央の振動子形成領域に
は、自由端側端面から固定端近傍に達する外部信号電極
を形成し、その両側の延長部には、固定端側端面から非
活性部端縁近傍に達する外部共通電極を設けるようにし
たので、両外部電極が互いに噛合うように形成された長
手方向の領域の全てをフレキシブル回路基板との接続面
にすることができて、両者の組付け接合の自由度を大巾
に高めることができるとともに、圧電プレート側におい
ては、外部共通電極を接続するための別部品を不要と
し、またフレキシブル回路基板側では、両外部電極に接
続するリード線を一連に形成して任意の位置で切断して
使用し得るようにすることができるなど、部品点数を削
減させたり組付け性を改善したりすることができる。As described above, according to the present invention, the external signal electrode reaching from the end face on the free end side to the vicinity of the fixed end is formed on the surface of the piezoelectric plate in the vibrator forming region at the center in the width direction. , The external common electrodes reaching the vicinity of the edge of the non-active portion from the end surface on the fixed end side are provided on the extension portions on both sides of the extension portion, so that the entire lengthwise region formed so that both external electrodes mesh with each other. Can be used as a connection surface with the flexible circuit board, and the degree of freedom in assembling and joining the both can be greatly increased, and a separate component for connecting the external common electrode can be provided on the piezoelectric plate side. It is not necessary, and on the flexible circuit board side, it is possible to reduce the number of parts and to assemble by making it possible to form a series of lead wires connected to both external electrodes and cut it at any position to use it. sex It can be or improvement.
【図1】本発明の一実施例を示す圧電駆動体の全容を示
す斜視図である。FIG. 1 is a perspective view showing an overall view of a piezoelectric driving body showing an embodiment of the present invention.
【図2】圧電振動子組立体を断面で示した図である。FIG. 2 is a cross-sectional view of a piezoelectric vibrator assembly.
【図3】(a)乃至(c)は圧電振動子の一形成方法に
ついて示した図である。3A to 3C are diagrams showing a method of forming a piezoelectric vibrator.
1 圧電振動子組立体 2 圧電プレート 5 活性部 6 非活性部 8 圧電振動子 9 ダミー振動子 10 外部信号電極 12 外部共通電極 15 支持プレート 16 フレキシブル回路基板 1 Piezoelectric vibrator assembly 2 Piezoelectric plate 5 active section 6 Inactive part 8 Piezoelectric vibrator 9 Dummy oscillator 10 External signal electrode 12 External common electrode 15 Support plate 16 Flexible circuit board
Claims (4)
となした多数の振動子と、該振動子の並び方向両側部に
位置させたダミー振動子とを固定端側に一体化させて櫛
歯状に形成するとともに、前記振動子には、少なくとも
自由端側端面から固定端の近傍にかけての部分に外部信
号電極を、前記ダミー振動子には、固定端側端面から前
記外部信号電極の前記固定端側、端縁よりも自由端寄り
に延在した部分に外部共通電極をそれぞれ形成したこと
を特徴とするインクジェット記録装置用の圧電駆動体。1. A large number of vibrators each having a free end side as an active portion and a fixed end side as an inactive portion, and both side portions in a row direction of the vibrators.
Comb by integrated with the dummy vibrator is located on the fixed end side
And forming the tooth shape, the vibrator part to the external signal electrodes over the vicinity of the fixed end at least <br/> free end side end face, wherein the dummy vibrator, from the fixed end side end surface Previous
The fixed end side of the external signal electrode, closer to the free end than the edge.
A piezoelectric driving body for an ink jet recording apparatus , wherein an external common electrode is formed on each of the extended portions .
端面を経由して一方のダミー振動子から他方のダミー振
動子にかけて形成したことを特徴とする請求項1記載の
インクジェット記録装置用の圧電駆動体。2. The external signal electrode is routed from one dummy oscillator to the other dummy oscillator via the side end surface of the piezoelectric plate.
The piezoelectric driving body for an ink jet recording apparatus according to claim 1, wherein the piezoelectric driving body is formed on a moving element.
に分割形成し、かつ該振動子の並び方向両側部にダミー
振動子を形成してなる圧電プレートの前記固定端側に支
持プレートを一体的に積層したことを特徴とする請求項
1記載のインクジェット記録装置用の圧電駆動体。3. A plurality of transducers on the free end side central portion divided form in a comb shape, and the fixed end of the piezoelectric plate obtained by forming a dummy vibrator arrangement direction both sides of the vibrator Support
Claims, characterized in that laminated integrally with lifting plate
2. A piezoelectric driving body for an inkjet recording device according to 1 .
を添設して、該基板の巾方向中央部に切割り形成した多
数のリード線を前記外部信号電極のそれぞれに接続させ
るとともに、該基板の巾方向両端部に形成したリード線
を前記外部共通電極に接続させたことを特徴とする請求
項1記載のインクジェット記録装置用の圧電駆動体。4. With additionally provided a circuit board on the fixed end side of the piezoelectric plate, multi-and cut-split formed in the width direction central portion of the substrate
Claim, characterized in that each of the connected allowed <br/> Rutotomoni of the external signal electrodes the number of leads, a lead wire which is formed in the width direction both end portions of the base plate is connected to the external common electrode 1 A piezoelectric driver for the inkjet recording apparatus described in claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP35168693A JP3379557B2 (en) | 1993-12-28 | 1993-12-28 | Piezoelectric driver for inkjet recording device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP35168693A JP3379557B2 (en) | 1993-12-28 | 1993-12-28 | Piezoelectric driver for inkjet recording device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07195688A JPH07195688A (en) | 1995-08-01 |
| JP3379557B2 true JP3379557B2 (en) | 2003-02-24 |
Family
ID=18418940
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP35168693A Expired - Fee Related JP3379557B2 (en) | 1993-12-28 | 1993-12-28 | Piezoelectric driver for inkjet recording device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3379557B2 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3553972B2 (en) * | 1996-09-06 | 2004-08-11 | シチズン時計株式会社 | Method for manufacturing piezoelectric actuator for inkjet head and support frame for the actuator |
| US6338549B1 (en) | 1997-06-27 | 2002-01-15 | Seiko Epson Corporation | Piezoelectric vibrator unit, method for manufacturing the same, and ink-jet recording head |
| US6417600B2 (en) | 1998-09-17 | 2002-07-09 | Seiko Epson Corporation | Piezoelectric vibrator unit, method for manufacturing the same, and ink jet recording head comprising the same |
| JP3381779B2 (en) | 1998-09-17 | 2003-03-04 | セイコーエプソン株式会社 | Piezoelectric vibrator unit, method of manufacturing piezoelectric vibrator unit, and ink jet recording head |
| JP4670225B2 (en) * | 2003-04-04 | 2011-04-13 | セイコーエプソン株式会社 | Piezoelectric element forming member, manufacturing method thereof, piezoelectric element unit using the same, and liquid jet head |
-
1993
- 1993-12-28 JP JP35168693A patent/JP3379557B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07195688A (en) | 1995-08-01 |
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