JP3385159B2 - Sol-gel film and method for forming the same - Google Patents

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention is excellent in that the shape and size of the uneven surface layer can be appropriately and stably controlled in various ways and can be obtained more easily by a short and simple preparation method. A sol-gel film with a fine uneven surface layer that can stabilize the surface shape and its expression with a coating solution and increase the specific surface area, and becomes an oxide film with high hardness and high mechanical strength and durability, and its formation Concerning the law.

Particularly when used as an underlayer film in a multi-layer film laminated on a glass substrate, the adhesion efficiency and adhesion of various functional films coated on the peculiar sol-gel film are enhanced, and the performance is remarkably improved. It is possible to obtain excellent wear resistance or durability with long-term stubborn adhesion without impairing the optical characteristics such as exhibiting
The present invention provides a sol-gel film and a method for forming the sol-gel film, which are useful in window materials for construction or automobiles, glass materials for various films such as window materials for ships and aircraft.

[0003]

2. Description of the Related Art Generally, as a method for forming irregularities on the surface of a metal oxide coating, for example, a method of etching the metal oxide coating with hydrofluoric acid, hydrofluoric nitric acid, or the like, or an organic material which is decomposed by combustion by heat treatment, is used. A method of adding a polymer to a metal alkoxide solution is known. Further, as a method for forming irregularities and the like in a simple process, the present applicant has found a method by mixing a sol solution obtained by hydrolyzing and dehydrating and condensing metal alkoxides having different starting materials.

However, in the method of etching a metal oxide film with hydrofluoric acid, nitric acid, etc., the etching solution, hydrofluoric acid, hydrofluoric acid, etc., is an extremely dangerous substance to the human body, and its handling is troublesome. In addition to being poor in productivity, there is a decrease in productivity due to the addition of an etching step, and in the method of adding an organic polymer that is decomposed by combustion by heat treatment to a metal alkoxide solution, for example, micropits formed once There is a constraint that it is necessary to control the heat treatment conditions variously because the coating becomes dense by heating and baking the surface at 400 ° C or higher. Due to this constraint, it is difficult to obtain a stubborn coating, It is hard to say easily.

Therefore, an oxide thin film having a micropit-like surface layer described in Japanese Patent Application Laid-Open No. 5-147976, a multilayer film using the thin film, and a method for forming the thin film, which have been already filed by the present applicant, for example, JP-A-6-298545, a sol-gel film described in JP-A-6-298545, and a method for forming the same, further JP-A-7-380
It has been proposed that the water-repellent oxide coating described in No. 50, its forming method, and the like are useful in solving the above problems.

Recently, various functional films have been put into practical use in window glass for automobiles, etc. In recent years, as a mixing method, it is simpler and does not take a long time without increasing the mixing temperature and time. It is a coating solution with an excellent life, does not require high humidity as a film forming environment, is more stable in surface shape development, and has excellent mechanical film strength or chemical resistance even under long-term harsh conditions. A sol-gel film having excellent properties, especially a sol-gel film as an underlayer, is being increasingly desired.

[0007]

DISCLOSURE OF THE INVENTION The present invention has been made in view of the above-mentioned problems in the prior art, and hydrolyzes a tetraalkoxysilane to which a specific metal alkoxide is added and a specific alkyltrialkoxysilane. A coating solution with excellent performance is prepared by mixing the decomposed and dehydrated condensed sol-gel solutions together with a specific solvent and diols, and the coating solution is formed on a glass substrate to obtain a coating solution. The obtained sol-gel film has high hardness and high adhesiveness, and has durability and wear resistance, and, for example, independently and firmly expresses a unique fine uneven surface layer with excellent controllability and extremely stable expression. By increasing the specific surface area, the coating efficiency and adhesion of the coating film are improved, resulting in a significantly superior underlayer, and it is highly safe and has no troublesome process. There is provided valence formation method of efficiently mechanical film strength and durability as well as the coating solution and gel film useful sol-gel film can be formed which can be obtained oxide thin film that exhibits various functions.

That is, according to the present invention, a sol solution A obtained by hydrolyzing and dehydrating and condensing a tetraalkoxysilane to which a metal alkoxide stabilized with acetylacetone is added, and one functional group is converted into an alkyl group on the surface of a glass substrate. A mixture of a sol solution B obtained by hydrolyzing and dehydrating and condensing the alkyltrialkoxysilane, a solvent containing isopropyl alcohol as a main component, and an addition amount of
The total solid content of all metal alkoxides in the coating solution.
It is characterized by comprising an oxide thin film having a fine uneven surface layer obtained by coating a coating solution consisting of 0.5 to 30 wt% of diols with respect to the shape and heating and baking. And a sol-gel film.

On the surface of the fine rugged surface layer of the sol-gel film
The average surface roughness Ra 'value in the range from 2.5 to 15.8 nm
The aforementioned sol-gel film, which is characterized in that

The sol-gel film is used as an underlayer of the functional multilayer film.
To use.

Further , the sol-gel film is coated with a water-repellent glass substrate.
Used as a layer.

Further, the sol-gel film is a low reflection film.
To use.

On the surface of a glass substrate, a sol solution A obtained by hydrolyzing and dehydrating and condensing a tetraalkoxysilane to which a metal alkoxide stabilized with acetylacetone is added, and an alkyltrialkoxysilane having one functional group alkylated. The sol solution B that has been hydrolyzed and dehydrated and condensed is mixed, and the amount of diols added is changed to the coating amount.
0.5 to the solid content of the metal alkoxide in the solution
Alcohol with diols added to 30 wt%
It is prepared by appropriately diluting with a solvent of a solvent and stirring the mixture at a holding temperature of 10 ° C to 50 ° C for 1 to 24 hours, and diluting the mixture with a solvent containing isopropyl alcohol as a main component. A method for forming a sol-gel film, which comprises coating a coating solution, drying and heating to form an oxide thin film having a fine uneven surface layer.

Also, the solid content in the coating solution
The concentration should be 0.2 to 5.0 wt% in terms of oxide.
Shape of the sol-gel film described above characterized by being prepared by dilution
Law.

[0015]

[0016]

[0017]

Furthermore, the above-mentioned methods for forming a sol-gel film are provided, wherein the coating solution is a coating solution prepared by adjusting the viscosity of the coating solution to 1 to 10 cP.

[0019]

BEST MODE FOR CARRYING OUT THE INVENTION Here, as described above, a sol solution A obtained by hydrolyzing and dehydrating and condensing a tetraalkoxysilane to which a metal alkoxide stabilized with acetylacetone is added, and one functional group is converted into an alkyl group. The reason why the mixture of the sol solution B obtained by hydrolyzing and dehydrating and condensing the alkyltrialkoxysilane is used is that the solution can be easily prepared, the pot life can be lengthened, and the fine irregularities formed as a film can be formed. It has a surface morphology of the surface layer, has excellent mechanical film strength and chemical resistance, and has high transparency and hardness of the oxide thin film, and also has excellent durability, which is relatively inexpensive and easily available. Therefore, it was decided to use the two sol solutions.

Further, one of the two sol solutions is a metal alkoxide compound which is a tetraalkoxysilane to which a metal alkoxide stabilized with acetylacetone is added. A sol solution B prepared by hydrolysis and dehydration condensation using a metal alkoxide compound, one of which is an alkyltrialkoxysilane in which one functional group is an alkyl group, is prepared in the sol solution A, for example, —Si—O—Si— (However, the lines in the vertical direction of Si are omitted.) Coexistence of a material in which a three-dimensional structure is easily developed and a material in which the skeleton is difficult to form. On the other hand, in the sol solution B, since an alkyl group that does not cause hydrolysis and dehydration condensation reaction is present, a skeleton such as a Si—O—Si bond having a three-dimensional structure is less likely to be generated. Therefore, when the sol solution A and the sol solution B are mixed, various surface layers are developed and a thin film made of the same metal element is densified by adding several% of different metal elements. A fine concavo-convex surface layer thin film having a function and excellent durability such as mechanical film strength and chemical resistance, and having a stable shape and performance which is controlled and reproducible.

Further, although the metal is not particularly specified, it is preferable to select Ti, Al or Zr. Specific examples thereof include titanium tetranormal butoxide [Ti (On-Bu) ₄ Bu. : C ₄ H ₉ ], aluminum trinormal butoxide [Al (0-n-Bu) ₃ ], zirconium tetranormal butoxide [Zr (On-Bu) ₄ ], or
Acetylacetonate salts of Ti, Al and Zr are suitable.

Further, as the alkyltrialkoxysilane in which the one functional group is alkylated, specifically, for example, methyltriethoxysilane [MeSi (OE
t) ₃ ], methyltrimethoxysilane [MeSi (OMe) ₃ ] and the like are preferable.

Regarding the shape of the fine uneven surface layer and its control, firstly, the functional groups and molecular weights of the sol solutions A and B, especially the different functional groups that exhibit the above-mentioned phenomenon, The functional groups of 4 and 3 are mainly used, and the molecular weight is, for example, in the range of 100 to 100,000. If it is less than 100, hydrolysis of the raw material is insufficient and film cissing is likely to occur during film formation. When it exceeds 100,000, the sol solution gels and the stability of the sol solution deteriorates. Preferably 1,000
~ 50,000 is recommended.

Alternatively, the type of the solvent used for preparing the sol solution is isopropyl alcohol, butanol, alcohol solvent of ethanol, acetylacetone, etc. Alcohol which is, among others, as the diluting solvent in the preparation of the coating solution, a diluting solvent in which butanol is added to isopropyl alcohol in an amount of about 10 wt% is preferable, and the diluting solvent of the surface profile of the fine uneven surface layer of the obtained thin film is obtained. It will help the stability of expression.

Alternatively, it is the mixing ratio of the solid content of the sol solution in terms of oxide. For example, the solid content of the sol solution B is about 2 to 6 g with respect to 1 g of the solid content of the sol solution A. The surface layer of the obtained thin film becomes flat, and when it exceeds 6 g, the surface layer of the obtained thin film becomes coarse, which is not what is expected. Preferably, the solid content of the sol solution B is about 2.5 to 5.5 g per 1 g of the solid content of the sol solution A.

Further, the dioles added [the general formula: R
(OH) ₂ , called DO. ], For example, the general formula: C _n H
_2n (OH) ₂ (n ≧ 2) ethylene glycol (methylene group: 2), 1,3-propane DO, 1,2-propane DO (above,
Methylene group: 3), 1,4-butane DO (1,4-BDO), 1,3-BDO
, 1,2-BDO (above, methylene group: 4), 1,5-pentane D
O, 1,4-pentane DO, 1,3-pentane DO, 1,2-pentane DO
(Above, methylene group: 5), 1,6-hexane DO (methylene group: 6), propylene glycol, 1,8-octane DO, 1,9-
Examples thereof include straight chain diols and chain diols such as nonane DO. Further, for example, the general formula: C _n H _2n-2 (OH) ₂ (n ≧ 3)
Cyclopentane-1,2-DO, cyclohexane-1,2-D
Examples thereof include cyclic diols such as O 2 and cyclohexane-1,4-DO.

Furthermore, the addition amount of the diols is
With respect to the total solid content of all the metal alkoxides in the coating solution, 0.5 to 30 wt% was prepared so that when the addition amount is less than 0.5 wt%, for example, the effect of increasing the specific surface area is suppressed. And it will be 30 wt%
Even if the amount of addition exceeds the above, it is not economical because the effect of increasing the specific surface area is not obtained instead of the amount added, but rather, for example, the denseness of the film falls from the highest state to some extent, and the mechanical film strength increases. This is because, for example, a tendency to decrease such as is exhibited. The addition amount of the above-mentioned dioles is preferably about 1 to 20 wt%, more preferably 2 to 15 wt%.
%.

Further, regarding the environment for coating, the stability of the coating solution is increased by the addition of the above-mentioned diols, and the coating solution is controlled more reliably and has extremely reproducible and stable shape and performance. Although it is possible to obtain an uneven surface thin film, it is not necessary to limit it in principle, but
By controlling the temperature and the relative humidity at room temperature to, for example, about 45 to 70%, various surface layer shapes and their diameters may be more reproducibly and stably and reliably controlled.

Further, the viscosity of the coating solution is 1
The reason for adjusting to 10 cP is that if it is less than 1 cP, the viscosity is too low to form a film, and if it exceeds 10 cP, the film is excessively coated when coated and cracks and the like occur in the film during the heating and drying process. .

Further, the solid content concentration of oxide of the coating solution is set to 0.2 to 5.0 wt% because it is 0.2 wt.
If it is less than%, it is too thin and it is difficult to form a film.
If it exceeds 0 wt%, the concentration will be too high and the film thickness will increase.
A crack is generated in the film, or white turbidity is generated during the film formation, so that a high quality thin film cannot be obtained.

Further, as a method for applying a film to a glass substrate, manual application such as brush application, nozzle flow coating method,
Various coating means such as a dipping method, a spray method, a flow coating method or a spin coating method, a known coating method such as a combination thereof, or a unique coating method proposed by the applicant of the present invention can be appropriately adopted.

Regarding the heating temperature after drying such as air drying when forming the sol-gel film as the underlayer,
0 ℃ or more and 700 ℃ or less, preferably about 500 ℃ or more
In order to make the thin film stronger at about 670 ° C or lower, for example, baking at a temperature of about 600 ° C or higher, specifically, the temperature in the bending or / and strengthening step of the glass plate, which disappears even at that temperature. Without doing so, various surface shape surface layers can be formed.

Further, the glass substrate is a transparent plate glass of various inorganic materials such as float glass, and is not particularly limited to colorless or colored, and its kind, color tone, shape, etc., and further as a bent plate glass. Of course, various tempered glass and strength up glass,
It goes without saying that it can be used as a flat plate or a single plate, and can also be used as a multilayer glass or a laminated glass.

As described above, according to the sol-gel film having the fine uneven surface layer of the present invention and the method for forming the sol-gel film, the tetraalkoxysilane which is a tetraalkoxysilane to which the metal alkoxide stabilized with acetylacetone is added, and 1 Two specific sol solutions obtained by hydrolyzing and dehydrating two specific compounds, one having an alkyltrialkoxysilane having three functional groups, which is an alkyl group having one functional group as an alkyl group, are diluted with a specific diluent solvent to obtain a specific amount. Geo-
A coating solution can be obtained by adding and selecting specific substances to prepare a coating solution, and a film can be formed in a relatively low humidity environment to obtain a higher Ra 'value, which causes cissing and cloudiness. Can be easily prepared and prepared as a coating solution, and can have markedly superior stability and its performance. By expressing a unique behavior in the coating, a unique shape and structure can be obtained, and it can be dried by heating or baking. By performing high-temperature baking and the like, it becomes a finely defined, firm and stable fine uneven surface layer that is independent and deeper than before and does not become dense and flat, and has higher film strength. It becomes an oxide thin film, and the surface layer with a larger specific surface area can be controlled significantly more reliably and reliably, and the adhesion can be improved to form a strong thin film. , Not to mention the interface with the glass substrate,
It has excellent mechanical strength, weather resistance, and durability, including functional thin films such as water-repellent thin films that have been impregnated by coating, by significantly improving the adhesion at the interface between the coating film and the film in a multilayer film. Since it has excellent durability over a long period of time compared to the past, it is transparent and has high hardness, and its optical characteristics can be sufficiently satisfied. Of course, it can be used outdoors and is highly safe. It can be obtained efficiently at low cost without any troublesome process, and is particularly useful as a window material for vehicles such as ships, aircrafts and automobiles as well as construction.

[0035]

EXAMPLES The present invention will be specifically described below with reference to examples. However, the present invention is not limited to the embodiment.

Example 1 A clear float glass substrate having a size of about 900 mm x 600 mm and a thickness of about 3.5 mm was sequentially washed with a neutral detergent, a water rinse, an alcohol, dried and then wiped with acetone to form a film. A glass substrate was used.

Tetraethoxysilane (Si (OC₂H_Five)_Four: TE
0S) polymerized sol (average molecular weight Mv = approximately 2000-3000)
Tetrabutoxytitanium (Ti (O
-Bu) _Four ) Mixed sol (stabilized with acetylacetone)
The content of tetrabutoxy titanium is SiO in terms of oxide.₂Against
Is about 0.25 wt% and the molar ratio is about 20 mol%).
Propyl alcohol (iPA), butanol, ethanol
Alcohol solvent is added to convert the solid content to oxide.
Sol solution A diluted to approximately 5 wt%
It was [For example, CG19-Ti-1 manufactured by Daihachi Chemical Industry Co., Ltd.] Methyltrimethoxysilane (CH₃Si (OCH₃)₃: MTMS)
Combined sol (average molecular weight Mv = about 1,000) with isopropyl alcohol
Call (iPA) was added, and the solid content concentration was converted to oxide.
The sol solution B was diluted to about 20 wt%.
[For example, MTS-2 manufactured by Daihachi Chemical Industry Co., Ltd.] 20 g of the above sol solution A and 20 g of sol solution B
And control the reaction rate of dehydration condensation reaction and coating
1,3-butanediol was added to facilitate phase separation in the solution.
(Hereinafter, referred to as 1,3-BDO.) 0.4 wt% contained and modified
Butanol for blending (hereinafter referred to as BuOH for blending.
g containing 0.2 g of 1,3-BDO, water content of 200 ppm,
The water content may be in the range of 0-3500ppm)
Mix and stir 50g at about 50 ℃ for about 3 hours in a tightly closed state.
Dilute with a mixed solvent of 90wt% iPA / 10wt% BuOH to coat
An ingot solution was obtained. The solid content concentration at this time is calculated as oxide.
It was about 1.0 to 1.2 wt%. Also, the amount of 1,3-BDO added
As all metal alkoxy in the coating solution
It is 4 wt% with respect to the total solid content of the glass.

In the same manner as described above, the amount of 1,3-BDO added was 0%, 2.5%, 5%, 7.5%, 10%, 15% by weight.
%, 20%, 30% and 0 to 30 wt% in the range of different preparation,
A coating solution was obtained in each case.

In the above description, the ratio of the sol solution A to the sol solution B is about 1: 4 by weight of the solid content, and the more preferred ratio is about 1: 3.5 to 5.5. The stirring time after mixing is, for example, preferably about 50.
If the temperature is ℃, it is about 1 to 6 hours (honey stopper) to about 25 ° C., it is about 3 to 6 hours (honey stopper). Furthermore, when the solution is used in a short period of time or depending on the grade of the film, it is not necessary to consider a minute change with time,
In some cases, stirring may not be necessary at room temperature.

Next, as a spin film forming condition, a glass substrate is set on a spin coater, and first, after 1 to 3 seconds from the start of spin rotation, the rotation speed is about 150 rpm (for example, about 50 to 250 rpm).
Spinning at high speed for about pm), about 100 ml of each coating solution (coating solution) described above was dropped, and the coating was performed while maintaining the rotation speed for about 19 to 17 seconds. Next, before the coating solution formed into a film starts to dry and loses its fluidity, the spin rotation is temporarily stopped and the leveling is performed by resting for about 60 seconds.
Re-start the spin rotation, about 50 rpm (for example, about 20 to 10
(0 rpm) at a low speed for about 40 seconds to accelerate the drying and setting of the coating film on the glass substrate surface by a temperature of about 25 ~ 26 ℃, relative humidity of about 58 ~ 60
The coating film was applied in an environment of% RH, and a gel film expressing a fine uneven surface layer was formed with good film forming properties.

Subsequently, after calcination by heating at about 250 ° C. for about 30 minutes, main calcination at ambient temperature of about 720 ° C. (glass temperature of about 640 ° C.) for about 4 minutes is performed to obtain an S film having a thickness of about 120 to 135 nm.
Thin films with iO ₂ -TiO ₂ thin films were obtained respectively. Note that the solvent or organic matter is evaporated or decomposed in the calcination stage to increase the hardness of the film, and further the main calcination progresses the decomposition of the organic matter, the alkyl group, the alkoxyl group, etc., and the film hardness is dramatically increased.
In some cases, the calcination step is not always necessary.

Each of the obtained sol-gel films (underlayer)
Was evaluated as follows. [Observation of Surface Surface Topography] As described above, the addition amounts of 1,3-BDO were 0 wt%, 2.5 wt%, 4 wt%, 5 wt%, 7.5 wt%,
AFM (atomic force electron microscope) mode (seiko-mode) of a scanning probe microscope was used for each sol-gel film obtained by coating with different coating solutions of 10 wt%, 15 wt%, 20 wt% and 30 wt%. Electron, SPI3700, 5 μm square scan or Olympus, NV2000, 5 μm square scan) to observe the surface shape condition and take a photograph.
The center line average roughness Ra defined by B 0601 is applied to the measurement surface and expanded three-dimensionally, and it can be expressed as "the value obtained by averaging the absolute values of the deviations from the reference surface to the specified surface". The average surface roughness Ra 'value (nm) given by the following formula was determined.

[0043]

[Equation 1]

In the equation, Ra ′ value: average surface roughness (nm), S ₀ : area where the measuring surface is ideally flat | X _R −
X _L ｜ × ｜ Y _T −Y _B ｜, F (X, Y): Height at measurement point (X, Y), _XL , X _R , Y _B , Y _T : X coordinate, Y coordinate measurement range , Z ₀ : Shows the average height in the measurement plane.

As a result, the addition amount of 1,3-BDO in the sol-gel film was 0 wt%, 2.5 wt%, 4 wt%, 5 wt%, 7.5 wt%,
Average surface roughness R for 10wt%, 15wt%, 20wt%, 30wt%
The relationship between the a'value (nm) is shown in Table 1 and FIG. In addition, the surface shape of the sol-gel film with the addition amount of 1,3-BDO of 4 wt% is AF
It is shown in FIG. 2, which is a photograph of M.

When the amount of 1,3-BDO added is 0 to 30 wt%, the average surface roughness Ra ′ of each sol-gel film is 2 to 15.8 nm, preferably Ra ′ is 0.5 to 30 wt%. value
Although it is 2.5 to 15.8 nm, it was clearly the desired fine uneven surface layer.

A more preferable Ra 'value is 4 to 15
nm, and the most preferable Ra 'value is about 6 to 10 nm. [Initial haze (haze value) value H%] As shown in Table 1, the initial haze value H% of each sol-gel film measured by a haze meter is about 0.1 to 0.3%, which is as good as that of a glass substrate. there were. [Abrasion resistance] As shown in Table 1, in the Taber abrasion test, the film strength of each sol-gel film was compared with that of the abrasion wheel CS-10F.
The increase in the haze value after 20 rotations was ΔH = 0.1 to 0.3%, and the film hardness was as good as that of a glass substrate and was very good.

From these facts, the sol-gel film does not necessarily require high humidity in the film forming environment and does not need to increase the temperature and time for preparation and preparation, and the shape of the uneven surface can be controlled with good control by a short and simple preparation. It can be stably and surely exhibited, and can be used as a low reflection film and as an underlayer of water-repellent glass while sufficiently enduring against automobile doors and front and back window glasses.

[0049]

[Table 1]

Example 2 A glass substrate similar to that of Example 1 was mixed with 1,3-BDO of Example 1 and
Solutions A and B were obtained in the same manner as in Example 1 except that 1,2-BDO and 1,4-BDO butanediols were added in an amount of 3 wt%.
Then, stirring conditions and the like were prepared in the same manner as in Example 1 to obtain a coating solution.

Next, a film was formed by the same film forming method as in Example 1. The obtained SiO ₂ —TiO ₂ thin film having a thickness of about 120 nm was evaluated for the surface shape of the sol-gel film in the same manner as in Example 1.

As a result, as shown in Table 2, the influence of the position of the OH group of butanediol is shown in Table 2. The average surface roughness Ra 'is about 4 to 6.2 nm and the initial haze value H is about 0.1%. The ΔH after the Taber abrasion test is about 0.2% and the film hardness is comparable to that of the glass substrate, and the fine uneven surface layer similar to that of Example 1 is shown, and the low-reflection film is also water-repellent glass. It can be used as a base layer, etc. while sufficiently enduring against automobile doors and front and back window glasses.

[0053]

[Table 2]

Example 3 On the same glass substrate as in Example 1, 1,3-BDO in Example 1 was replaced by ethylene glycol, 1,3-propanediol, 1,
4-BDO, 1,5-pentanediol diols added 3
Solution A and B were obtained in the same manner as in Example 1 except that wt% was used. Next, stirring conditions and the like were prepared in the same manner as in Example 1 to obtain a coating solution.

Then, a film was formed by the same film forming method as in Example 1. The obtained SiO ₂ —TiO ₂ thin film having a thickness of about 120 nm was evaluated for the surface shape of the sol-gel film in the same manner as in Example 1.

As a result, the effect of adding various diols is shown in Table 3, and the relationship between the number of methylene groups in the straight-chain diol and the average surface roughness Ra 'value is shown in FIG. The surface roughness Ra 'value is about 9.4 to 4.8 nm, the initial haze value H is about 0.1%, the ΔH after the Taber abrasion test is about 0.2%, and the film hardness is similar to that of the glass substrate. The same fine uneven surface layer as that of Example 1 is shown, and it can be used as a low reflection film and as an underlayer of water-repellent glass while being sufficiently resistant to automobile doors and front and back window glasses. .

[0057]

[Table 3]

[0058]Example 4 On the same glass substrate as in Example 1, the tetrabutane of Example 1 was added.
Xytitanium (Ti (O-Bu) _Four] In place of tributoxy aluminum
Nium (Al (O-Bu)₃], And the same as in Example 1 except that
Liquids A and B were obtained. Next, only stirring conditions at about 30 ℃ for about 6 hours
Preparation with the same procedure as in Example 1 except for (honey sealed)
Solution.

Then, only the ambient humidity was changed to about 53% RH, and a film was formed by the same film forming method as in Example 1. The obtained Al ₂ O ₃ .SiO ₂ thin film having a thickness of about 74 nm was evaluated for the surface shape of the sol-gel film in the same manner as in Example 1.

As a result, the same fine concavo-convex surface layer as in Example 1 was shown, the initial haze value H was about 0.1%, and ΔH after the Taber abrasion test was about 0.6, indicating that the film hardness was about 0.6%. Although somewhat inferior, it can be used as a low-reflection film and as an underlayer of water-repellent glass, with sufficient durability against automobile doors and front and back window glasses.

[0061]

As described above, according to the present invention,
By using a coating solution to which a specific amount of diols has been added, it is possible to easily formulate and prepare, and to exhibit dramatic stability and performance, and a unique thin film with a simple and easy film forming means. Can be obtained inexpensively and efficiently, and by skillfully combining the sol solution and the dilute solution selected from the two specific ones, the specific surface area can be increased and a strong fine uneven surface layer with a unique shape is stable and reliable. It is possible to obtain excellent controllability, and it exhibits its performance remarkably as an underlayer thin film of a multilayer film, and various functional thin films such as excellent water-repellent performance thin films are coated on the surface without impairing optical characteristics. In addition to excellent water repellency and other properties, it is also markedly superior in adhesion, especially in mechanical strength and durability such as weather resistance. Like a window material such as various glass articles, high utility value that can be widely adopted in a variety of coating, there is provided a sol-gel film and its forming method have useful finely uneven surface.

[Brief description of drawings]

FIG. 1 is a graph showing the relationship between the amount of 1,3-BDO added and the average surface roughness Ra ′ value of a sol-gel film in Example 1.

2] In Example 1, the amount of 1,3-BDO added was 4 wt%.
FIG. 3 is a photograph of the surface shape of the sol-gel film of the present invention, which is observed by an atomic force electron microscope (AFM), showing a state of a fine uneven surface layer.

FIG. 3 is a diagram showing the relationship between the number of methylene groups of linear diol and the average surface roughness Ra ′ value in Example 3.

Continuation of the front page (56) Reference JP-A-6-298545 (JP, A) (58) Fields investigated (Int.Cl. ⁷ , DB name) C03C 15/00-23/00 B32B 1/00-35 / 00 B60J 1/00

Claims (8)

(57) [Claims] 1. A sol solution A obtained by hydrolyzing and dehydrating and condensing a tetraalkoxysilane to which a metal alkoxide stabilized with acetylacetone is added on the surface of a glass substrate, and an alkyltrialkoxy in which one functional group is an alkyl group. The mixture of the sol solution B obtained by hydrolyzing and dehydrating and condensing silane, the solvent containing isopropyl alcohol as a main component, and the addition amount of the sol solution B in the coating solution are
0.5 to the total solid content of all metal alkoxides
A sol-gel film comprising an oxide thin film having a fine uneven surface layer obtained by coating a coating solution containing 30 wt% of diols and heating and baking. 2. The sol-gel film according to claim 1, wherein an average surface roughness Ra ′ value on the surface of the fine rugged surface layer of the sol-gel film is 2.5 to 15.8 nm. 3. Use as an underlayer of a functional multilayer film.
The sol-gel film according to 1 or 2. 4. Use as an underlayer of water-repellent glass.
The sol-gel film according to 1 or 2. 5. A contract characterized by being used as a low reflection film.
The sol-gel film according to claim 1 or 2. 6. A sol solution A obtained by hydrolyzing and dehydrating and condensing a tetraalkoxysilane containing a metal alkoxide stabilized with acetylacetone on the surface of a glass substrate, and an alkyltrialkoxy having one functional group alkylated. The sol solution B obtained by hydrolyzing and dehydrating and condensing silane was mixed, and the amount of diols added was changed to the coating amount.
0.5 to 3 based on the solid content of the metal alkoxide in the solution
The mixture was appropriately diluted with an alcohol solvent to which diols were added so as to be 0 wt% and stirred at a holding temperature of 10 ° C to 50 ° C for 1 to 24 hours to prepare a mixture, and the mixture was mixed with isopropyl alcohol. Of a sol-gel film, characterized by comprising coating a coating solution prepared by diluting with a solvent having a main component, and drying and heating to form an oxide thin film having a fine uneven surface layer. Forming method. 7. The method for forming a sol-gel film according to claim 6, wherein the coating solution is diluted to a solid content concentration of 0.2 to 5.0 wt% in terms of oxide. . 8. The viscosity of the coating solution is 1-10.
The method for forming a sol-gel film according to claim 6 or 7, wherein the coating solution is prepared by adjusting the viscosity of CP.