JP3385176B2 - Laser apparatus bellows and laser beam irradiation detection apparatus and laser beam irradiation automatic countermeasure apparatus - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a bellows for a laser device and a laser beam irradiation detecting device and a laser beam irradiation automatic coping device, and more particularly to a bellows for a laser device and a laser beam irradiation detecting device and a laser used in a laser processing device. The present invention relates to a beam irradiation automatic coping device.

[0002]

2. Description of the Related Art In the transmission optical path of a laser beam in a laser processing apparatus, a transmission optical path which requires a variable optical path length for focusing or the like uses an expandable and contractible cylindrical bellows for transmission by a bellows. The laser beam is configured to surround the optical path and travel in the bellows.

Further, in order to protect the drive part and guide part of each shaft by the feed screw mechanism of the laser processing apparatus from the intrusion of dust and the like, these parts are covered with an expandable bellows. There is.

When the laser beam is irradiated onto the bellows surface due to a shift in the transmission optical path of the laser beam or deformation of the bellows for some reason, the bellows of the transmission optical path may be burnt and a hole may be formed in the bellows. is there.

Further, during laser processing, if the secondary reflected light of the laser beam is applied to the bellows of the guide part or the like, or if spatter or the like generated during laser processing scatters on the bellows, the bellows for the guide part or the like is burned. There may be holes in the bellows.

Therefore, conventionally, these bellows are made of a flame-retardant material or a material having a self-extinguishing property, or a laser beam reflector is attached to the inner surface of the bellows to diffuse the laser light radiated to the bellows. It is done to make the bellows difficult to burn.

Incidentally, in a laser beam duct having a rigid body structure whose optical path length is invariable, as shown in JP-A-61-88993 and JP-A-64-5689, a thin metal wire is provided inside the duct. It has already been proposed to detect the deviation of the transmission optical path of the laser beam by irradiating the metal thin wire with a laser beam when the deviation of the transmission optical path occurs and melting the thin metal wire.

[0008]

Even if it is difficult to burn the bellows by composing the bellows with a flame-retardant material or a material having a self-extinguishing property, the laser beam is continuously irradiated to the bellows surface without being stopped. Then, the bellows are burned and burned, resulting in a hole in the bellows.

Due to the structure of the bellows, it is difficult to form a thin metal wire in the internal space. Therefore, the transmission optical path deviation detecting device disclosed in JP-A-61-88993 and JP-A-64-5689 can be used. It cannot be converted to a bellows as it is.

The present invention has been made in order to solve the above-mentioned problems, and it is confirmed that the bellows surface is irradiated with a laser beam or reflected light and that the bellows surface is spattered. Improved bellows for laser equipment that can be automatically and reliably detected, and automatically and reliably that the bellows surface is irradiated with laser beams and reflected light, and that spatter etc. is scattered on the bellows surface. If the laser beam irradiation detection device that detects the laser beam is detected, and that the bellows surface is irradiated with laser beams or spatters are scattered on the bellows surface, take measures to avoid damage to the bellows. The purpose of the invention is to obtain an automatic laser beam irradiation coping device.

[0011]

To achieve the above object, a bellows for a laser device according to the present invention surrounds a transmission optical path of a laser beam output from a laser oscillator, or a drive unit for each axis of the laser device, in the laser device bellows for protecting covers the guide portion, the bellows surface, allowed retardant laser beam or that the reflected light of the laser beam is irradiated, or you burn <br/> by scattering of sputtering or the like generated during the laser processing A conductive conductor is provided.

In the bellows for laser device according to the present invention, when the bellows surface is irradiated with the laser beam or the reflected light of the laser beam, the flammable conductor is irradiated with the laser beam and its reflected light, and the flammable conductor is burned. The conductive conductor is burnt out (melted). Further, if spatter or the like is scattered on the bellows, the flammable conductor is melted and damaged. Therefore, by supplying an electric current to the combustible conductor, it is possible to detect that the bellows surface is irradiated with the laser beam from the change in the electric current value.

A bellows for a laser device according to the next invention is the bellows for a laser device according to the above-mentioned invention, wherein one or more flammable conductors are provided in parallel in the bellows expansion and contraction direction. .

In the bellows for a laser device according to the present invention, since the flammable conductor is provided in the bellows expansion / contraction direction, the flammable conductor is laser-irradiated regardless of which part of the bellows expansion / contraction direction the laser beam is irradiated to. The beam is irradiated, and the flammable conductor is burnt out. The number of flammable conductors is selected according to the size of the bellows, the required degree of laser beam irradiation detection, and the like.

A bellows for a laser device according to the next invention is the bellows for a laser device according to the above invention, wherein the flammable conductor is provided in a spiral shape that advances in a bellows expansion and contraction direction.

In the laser device bellows according to the present invention, the flammable conductor is provided in a spiral shape. Therefore, no matter which part of the bellows surface is irradiated with the laser beam, the flammable conductor is irradiated with the laser beam. , The flammable conductor is burnt out.

A bellows for a laser device according to the next invention is the bellows for a laser device according to the above invention, wherein the flammable conductor is provided on the inner surface of the bellows.

[0018] In the laser device bellows according to the present invention, will be lasers beams traveling within bellows when irradiated bellows inner surface from the inside of the bellows, the laser beam is irradiated to the flammable conductor combustible The conductive conductor is burnt out.

A bellows for a laser device according to the next invention is the bellows for a laser device according to the above invention, wherein the flammable conductor is provided on the outer surface of the bellows.

[0020] In the laser device bellows according to the present invention, the lasers beams traveling through other transmission optical path outside the bellows is irradiated from the outside of the bellows in the bellows outer surface, the laser beam is irradiated to the flammable conductor As a result, the flammable conductor is burnt out.

A bellows for a laser device according to the next invention is the bellows for a laser device according to the above invention, wherein the bellows is composed of a laminated structure of an outer sheet forming an outer surface layer and an inner sheet forming an inner surface layer, The flammable conductor is provided between the outer sheet and the inner sheet.

[0022] In the laser device bellows according to the present invention, will be les <br/> over The beam when irradiated bellows surface from inside or outside of the bellows, the laser beam is irradiated to the flammable conductor, The flammable conductor burns out. Since the combustible conductor is provided between the outer sheet and the inner sheet, it cannot be seen from the outside.

A bellows for a laser device according to the next invention is the bellows for a laser device according to the above-mentioned invention, wherein the flammable conductor is in the form of a sheet and is attached to the bellows surface.

In the bellows for laser device according to the present invention, the sheet-shaped combustible conductor is attached to the bellows surface,
A flammable conductor is provided on the bellows surface.

A laser device bellows according to the next invention is the laser device bellows according to the above invention, wherein a liquid coating material forming a flammable conductor is applied to the bellows surface, and the flammable conductor is formed by this coating layer. It has been done.

In the bellows for laser device according to the present invention, the flammable conductor is provided on the bellows surface by the coating layer of the liquid coating material applied on the bellows surface.

In order to achieve the above object, the laser beam irradiation detecting device according to the present invention uses the laser device bellows according to the above invention, and the flammable conductor provided on the laser device bellows. An electric current is passed through and the change in the electric current value is used to detect that the bellows is irradiated with the laser beam.

In the laser beam irradiation detecting device according to the present invention, when a current is applied to the flammable conductor provided on the bellows for the laser device and the bellows surface is irradiated with the laser beam,
When the flammable conductor is burned and the current value of the current flowing through the flammable conductor is reduced and changed, it is detected that the bellows is irradiated with the laser beam.

Further, in order to achieve the above object, the laser beam irradiation automatic coping device according to the present invention, if it is detected that the bellows is irradiated with the laser beam by the laser beam irradiation detection device according to the above invention, At least one of alarm output, laser beam output stop, and fire extinguishing device start-up is performed.

In the laser beam irradiation automatic coping device according to the present invention, when the laser beam irradiation detecting device detects that the bellows is irradiated with the laser beam, at least the alarm output, the laser beam output stop, and the fire extinguishing device start-up are performed. One is done. This coping operation is quantitatively measured by measuring the reduction degree of the current value of the current flowing through the combustible conductor to quantitatively detect the irradiation degree of the laser beam on the bellows surface, and is performed stepwise by this irradiation degree. You may

[0031]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of a bellows for a laser device, a laser beam irradiation detecting device and a laser beam irradiation automatic coping device according to the present invention will be described in detail below with reference to the accompanying drawings.

(Embodiment 1) FIGS. 1 to 3 show a bellows for a laser device, a laser beam irradiation detecting device according to the present invention,
1 shows Embodiment 1 of a laser beam irradiation automatic coping device. 1 to 3, reference numeral 1 indicates a quadrangular cylindrical bellows for a laser device. A bellows for a laser device (hereinafter, simply referred to as a bellows) 1 includes an outer sheet 2 made of a synthetic leather sheet material or the like constituting an outer surface layer and an inner sheet made of a flame-retardant sheet material or the like constituting a inner surface layer of polyphenylene isotharmide or the like. It is composed of a laminated structure with the sheet 3. The bellows 1 is arranged so as to surround the transmission optical path of the laser beam output from the laser oscillator 10, in particular, the transmission optical path of which the optical path length needs to be variable, in the transmission optical path of which the optical path length needs to be variable. The laser beam L passes through the inside.

A belt-like combustible conductor 4 is provided on the inner surface of the bellows 1 in the bellows expansion / contraction direction. The flammable conductor 4 is
A string, tape, or sheet made of flammable fibers such as cotton, nylon, or polyester is coated with and impregnated with a powder of a conductive substance such as carbon or silver that has been melted in a solvent. It has flexibility and is adhered to the inner surface of the bellows, and is irradiated with the laser beam L to melt and burn.

In this embodiment, one flammable conductor 4 is provided on each surface of the bellows 1 having a rectangular cylindrical shape. The number of the flammable conductors 4 may be selected according to the size of the bellows 1, the degree of request for laser beam irradiation detection, and the like.

At both ends of the flammable conductor 4, connection terminals 5 and 6 are provided.
Is provided, and the power supply 11 is connected to the connection terminals 5 and 6. A constant current is applied to the combustible conductor 4 by a power supply 11. Power source 1 for multiple flammable conductors 4
The connection to 1 may be either serial or parallel.

A current detector 12 for detecting the current value of the current flowing through the combustible conductor 4 is connected to the power supply circuit including the power supply 11. The current value detected by the current detector 12 is
It is output to the beam irradiation determination means 13.

The beam irradiation determination means 13 compares the preset comparison value with the current value detected by the current detector 12, and if the current value detected by the current detector 12 is less than or equal to the comparison value, Assuming that the bellows surface is irradiated with the laser beam L, an alarm signal is output to the alarm means 14, the laser oscillation controller 15, and the fire extinguisher 16.

In response to an alarm signal from the beam irradiation determination means 13, the alarm means 14 issues an alarm, the laser oscillation control section 15 carries out a laser output stop processing, and the fire extinguishing apparatus 16 carries out a fire extinguishing operation of spraying a fire extinguishing agent on the bellows 1. .

Incidentally, the comparison level of the current value by the beam irradiation judging means 13 is set in three stages. In the first stage of the decrease of the current value, an alarm signal is output only to the alarm means 14, and in the second stage an alarm is issued. Means 14 and laser oscillation controller 15
And an alarm signal is output to the alarm means 14, the laser oscillation controller 15 and the fire extinguisher 16 in the third step.

According to the above configuration, the lasers beams L traveling within the bellows 1 for some reason is in a state to be irradiated on the bellows inner surface from the inside of the bellows 1, the laser beam L is flammable conductor 4 Irradiation causes the flammable conductor 4 to burn out.

As a result, the current value of the current flowing through the combustible conductor 4 decreases, the current value detected by the current detector 12 becomes less than or equal to the comparison value, and the beam irradiation determination means 13 outputs an alarm signal.

When the alarm means 14 outputs an alarm by the output of this alarm signal and the current value further decreases, the laser oscillation control unit 15 performs a laser output stop process, and the fire extinguishing device 16 extinguishes the bellows 1. Fire extinguishing action is performed.

As a result, the continuous irradiation of the laser beam L on the bellows surface of the bellows 1 is automatically avoided, and the burnout of the bellows 1 is prevented by the fire extinguishing operation of the fire extinguishing device 16, and the bellows 1 is burned. Prevent or minimize it.

(Second Embodiment) FIG. 4 shows a second embodiment of a bellows for a laser device according to the present invention. In FIG. 4, the parts corresponding to those in FIG. 2 are denoted by the same reference numerals as those in FIG.

In this embodiment, the flammable conductor 4 is provided on the outer surface of the bellows 1.

[0046] In the bellows 1, when a state results in which the lasers beam traveling the other transmission path outside the bellows is irradiated to the bellows outer surface than the outer bellows 1, the laser beam flammable conductor 4 is irradiated As a result, the combustible conductor 4 is burnt out.

Therefore, also in this embodiment, the burnout of the bellows 1 can be prevented or minimized, as in the case of the first embodiment.

(Third Embodiment) FIG. 5 shows a third embodiment of a bellows for a laser device according to the present invention. In FIG. 5, the parts corresponding to those in FIG. 2 are indicated by the same reference numerals as those in FIG.

In this embodiment, the flammable conductor 4 is provided between the outer sheet 2 and the inner sheet 3 of the bellows 1.

[0050] In the bellows 1, the lasers beams are irradiated on the bellows surface from inside or outside of the bellows 1, will be laser beam flammable conductor 4 is illuminated, burning combustible conductor 4 To do.

Therefore, also in this embodiment, the burnout of the bellows 1 can be prevented or minimized, as in the case of the first embodiment.

Further, since the combustible conductor 4 is provided between the outer sheet 2 and the inner sheet 3, it is not visible from the outside, and the bellows 1 can be made to look good.

(Fourth Embodiment) FIG. 6 shows a fourth embodiment of a bellows for a laser device according to the present invention. Note that, in FIG. 6, portions corresponding to those in FIG. 3 are denoted by the same reference numerals as those in FIG.

In this embodiment, the flammable conductor 4 is provided in a U shape on the bellows surface of the bellows 1.

In this bellows 1, the extended area of the flammable conductor 4 is enlarged, and the laser beam irradiation detection degree is improved.

(Fifth Embodiment) FIG. 7 is a fifth embodiment of a bellows for a laser device according to the present invention.
Is shown. Note that, in FIG. 7 , portions corresponding to those in FIG. 3 are denoted by the same reference numerals as those in FIG.

In this embodiment, the flammable conductor 4 is provided in a spiral shape that advances in the bellows expansion / contraction direction.

In the bellows 1, since the flammable conductor 4 is provided in a spiral shape, the flammable conductor 4 is irradiated with the laser beam regardless of which part of the bellows surface is irradiated with the laser beam. Therefore, the degree of laser beam irradiation detection is improved.

(Sixth Embodiment) FIG. 8 shows a sixth embodiment of a bellows for a laser device according to the present invention. Note that, also in FIG. 8, portions corresponding to those in FIG. 3 are denoted by the same reference numerals as those in FIG.

In this embodiment, a liquid coating material which is a flammable conductor made by melting powder of a conductive substance such as carbon or silver in a solvent is applied to the bellows surface, and the flammable conductor 4 is formed by this coating layer. Are formed.

With this bellows 1, the same operational effect as in the case of the above-described embodiment can be obtained, and the bending durability of the bellows 1 does not deteriorate.

Further, by directly applying the conductive material to the bellows 1, the bellows 1 with the combustible conductor can be manufactured at a low cost.

In the bellows 1 of the second to sixth embodiments, as in the first embodiment, the combustible conductor 4 is energized, and the change in the current value of the flammable conductor 4 causes the laser beam to reach the bellows surface. Detecting irradiation remains the same.

(Embodiment 7) FIGS. 9 to 10 show Embodiment 7 of the bellows for a laser device according to the present invention.

In this embodiment, the bellows surfaces of the bellows 20, 21 and 22 for protecting and covering the driving portion and guide portion of each shaft by the feed screw mechanism of the laser processing apparatus and the like are similar to those in the above-mentioned embodiment. A strip-shaped combustible conductor 4 is provided.

The laser processing apparatus shown in FIGS. 9 and 10 is of a gate type and includes a bed 30, a table 31 movably provided on the bed 30 in the X-axis direction, and a table 31. Left and right columns 3 fixedly arranged to straddle
2 and a cross rail 33, a saddle 34 provided on the cross rail 33 so as to be movable in the Y direction, and a laser processing head 35 provided on the saddle 34 so as to be movable in the Z axis direction.
And have.

The bellows 20 is the feed screw portion of the table 31 in the X-axis direction, the bellows 21 is two linear guide portions in the X-axis direction of the table 31, and the bellows 22 is the feed screw portion and the linear guide of the saddle 34 in the Y-axis direction. Each part has a protective coating.

In the figure, the table 31 is representatively shown in FIG.
It is shown that the flammable conductor 4 is provided on the bellows surface of the bellows 20 for protecting and covering the feed screw portion in the X-axis direction. In FIG. 11, reference numeral 36 indicates a feed screw, and 37 indicates an X-axis servomotor that rotationally drives the feed screw.

In this embodiment, the bellows 20, 21, 2 are
When the secondary reflected light of the laser beam is irradiated to the bellows surface of 2 or the spatter or the like scatters, the secondary reflected light of the laser beam is reflected on the flammable conductors 4 provided on the bellows surfaces of the bellows 20, 21, and 22. Will be irradiated or spatters will be scattered and the flammable conductor 4 will be melted.

Therefore, also in this embodiment, as in the above-described embodiment, by supplying a current to the combustible conductor 4, the secondary reflected light of the laser beam is reflected on the bellows surface due to the change in the current value. It is possible to detect that the laser beam is irradiated or the spatter or the like is scattered, and the alarm output, the output stop of the laser beam, and the activation of the fire extinguisher can be performed stepwise by this detection.

In any of the embodiments, the laser beam irradiation or the like can be detected by changing the voltage applied to the combustible conductor 4, which is equivalent to the current detection.

[0072]

As can be understood from the above description, according to the bellows for a laser device according to the present invention, when the bellows surface is irradiated with a laser beam or reflected light thereof, or when spatter or the like scatters on the bellows surface, it becomes flammable. or the laser beam sexual conductor is irradiated with irradiation or its reflected light becomes Turkey <br/> and be scattered sputtering, because flammable conductor may burn a current to flow flammable conductor With this setting, it is possible to automatically and reliably detect that the bellows surface is irradiated with the laser beam based on the change in the current value.

In the bellows for a laser device according to the next invention, since the flammable conductor is provided in the bellows expansion / contraction direction, the flammable conductive material is irrespective of which part of the bellows surface in the bellows expansion / contraction direction is irradiated with the laser beam. By irradiating the body with a laser beam, by passing an electric current through the flammable conductor,
From the change in the current value, the irradiation of the laser beam on the bellows surface can be automatically and reliably detected.

According to the bellows for laser device according to the next invention, since the flammable conductor is provided in a spiral shape, the flammable conductor is irradiated with the laser beam regardless of which part of the bellows surface is irradiated with the laser beam. By irradiating the laser beam to the flammable conductor, it is possible to automatically and surely detect that the bellows surface is irradiated with the laser beam based on the change in the current value. .

[0075] According to the laser apparatus bellows according to another feature of the present invention, the lasers beams traveling within the bellows is irradiated on the bellows inner surface from the inside of the bellows, the combustible conductor that the laser beam is irradiated Since the flammable conductor is burnt out, by applying an electric current to the flammable conductor, it is possible to automatically and reliably detect that the laser beam is applied to the bellows surface due to the change in the current value. Like

[0076] According to the laser apparatus bellows according to another feature of the present invention, the lasers beams traveling through other transmission optical path outside the bellows is irradiated from the outside of the bellows in the bellows outer surface, the laser beam flammable conductor Since the flammable conductor will be burned out, the combustible conductor will be burned.Therefore, if a current is passed through the flammable conductor, the laser beam is automatically irradiated on the bellows surface due to the change in the current value, and It will be surely detected.

[0077] According to the laser apparatus bellows according to another feature of the present invention, the lasers beams are irradiated on the bellows surface from inside or outside of the bellows, will be a laser beam is irradiated to the flammable conductor, flammable Since the conductor is burnt out, by applying an electric current to the flammable conductor, it is possible to automatically and surely detect the irradiation of the laser beam on the bellows surface based on the change in the current value. Further, since the combustible conductor is provided between the outer sheet and the inner sheet, it is not visible from the outside, and it becomes possible to create a bellows with a good appearance.

According to the bellows for laser device according to the next invention, since the flammable conductor is provided on the bellows surface by adhering the sheet-like flammable conductor to the bellows surface, the flammable conductor can be easily formed. Can be equipped with a bellows.

According to the bellows for a laser device according to the next invention, since the flammable conductor is provided on the bellows surface by the coating layer of the liquid coating material applied on the bellows surface, the bellows surface can be manufactured at a low cost, and the bellows bending durability can be improved. There is no decrease in sex.

According to the laser beam irradiation detector of the next invention, when a current is applied to the flammable conductor provided on the bellows for the laser device and the bellows surface is irradiated with the laser beam, the flammable conductor is removed. It is detected that the bellows is irradiated with the laser beam by the change in the current value of the current flowing through the flammable conductor which is burned out, and it is automatically and automatically detected that the bellows surface is irradiated with the laser beam. It can be reliably detected.

According to the laser beam irradiation automatic coping device of the next invention, when the laser beam irradiation detecting device detects that the bellows is irradiated with the laser beam, an alarm output, a laser beam output stop, and a fire extinguishing device are activated. Since at least one of the activations is performed, burning of the bellows can be prevented or minimized.

[Brief description of drawings]

FIG. 1 is a schematic configuration diagram showing Embodiment 1 of a bellows for a laser device, a laser beam irradiation detection device, and a laser beam irradiation automatic coping device according to the present invention.

FIG. 2 is a sectional view showing a first embodiment of a bellows for a laser device according to the present invention.

FIG. 3 is a perspective view showing a first embodiment of a bellows for a laser device according to the present invention.

FIG. 4 is a sectional view showing a second embodiment of a bellows for a laser device according to the present invention.

FIG. 5 is a sectional view showing a third embodiment of a bellows for a laser device according to the present invention.

FIG. 6 is a perspective view showing a fourth embodiment of a bellows for a laser device according to the present invention.

FIG. 7 is a perspective view showing a fifth embodiment of a bellows for a laser device according to the present invention.

FIG. 8 is a perspective view showing a sixth embodiment of a bellows for a laser device according to the present invention.

FIG. 9 is a plan view showing the configuration of a gate-shaped laser processing device.

FIG. 10 is a front view showing the configuration of a gate-shaped laser processing device.

FIG. 11 is a perspective view showing a seventh embodiment of a bellows for a laser device according to the present invention.

[Explanation of symbols]

1 bellows, 2 outer sheet, 3 inner sheet, 4 combustible conductors, 5, 6 connection terminals, 10 laser oscillator, 1
1 power source, 12 current detector, 13 beam irradiation determination means, 14 alarm means, 15 laser oscillation control section, 16
Fire extinguisher, 20, 21, 21 bellows, 30 beds, 3
1 table, 32 columns, 33 cross rails, 3
4 saddle, 35 laser processing head, 36 feed screw, 37 X-axis servo motor.

Front page continued (72) Inventor Atsushi Ikemi 2-6-2 Otemachi, Chiyoda-ku, Tokyo Mitsubishi Electric Engineering Co., Ltd. (56) Reference JP-A-9-220691 (JP, A) (58) Field (Int.Cl. ⁷ , DB name) B23K 26/00-26/42

Claims (11)

(57) [Claims] 1. A transmission optical path for a laser beam output from a laser oscillator is surrounded, or a drive unit for each axis of a laser device,
In a bellows for a laser device that protects and covers the guide part, a belt- like flammable conductor that is burned by the laser beam or the reflected light of the laser beam is irradiated on the bellows surface, or by the scattering of spatter generated during laser processing. A bellows for a laser device, which is provided. 2. The flammable conductor is conductive to flammable fibers.
The powder of the volatile substance is melted in the solvent and applied and impregnated.
The laser according to claim 1, wherein the laser is
Bellows for equipment. Wherein said combustible conductors one or more present in the bellows contracting direction, the laser device bellows according to claim 1 or 2, characterized in that provided in parallel to each other. Wherein said combustible conductors also claim 1, characterized in that provided in a spiral shape that progresses in the bellows contracting direction
Is a bellows for a laser device described in 2 . Wherein said combustible conductor laser device bellows according to any one of claims 1-4, characterized in that provided on the bellows surface. Wherein said combustible conductor laser device bellows according to any one of claims 1-4, characterized in that provided in the bellows outer surface. 7. The bellows is composed of a laminated structure of an outer sheet constituting an outer surface layer and an inner sheet constituting an inner surface layer, and the flammable conductor is provided between the outer sheet and the inner sheet. the laser apparatus bellows according to any one of claims 1-4, characterized in that is. 8. The flammable conductor has a sheet shape,
Claim, characterized in that it is adhered to the bellows surface 1-7
The bellows for a laser device described in any one of 1. 9. The liquid coating material which forms a flammable conductors is applied to the bellows surface, claim 1-7, wherein the combustible conductor is formed by the coating layer A bellows for a laser device according to. 10. The laser device bellows according to any one of claims 1 to 9 is used, and a current is caused to flow through the flammable conductor provided in the laser device bellows. A laser beam irradiation detection device characterized by detecting that a laser beam has been irradiated. 11. If the laser beam irradiation detection device according to claim 10 detects that the bellows surface is irradiated with the laser beam, at least one of an alarm output, a laser beam output stop, and a fire extinguishing device start-up. A laser beam irradiation automatic coping device characterized by performing.