JP3385667B2 - Iron-terbium-based magnetostrictive material and method for producing the same - Google Patents
Iron-terbium-based magnetostrictive material and method for producing the sameInfo
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- JP3385667B2 JP3385667B2 JP24544093A JP24544093A JP3385667B2 JP 3385667 B2 JP3385667 B2 JP 3385667B2 JP 24544093 A JP24544093 A JP 24544093A JP 24544093 A JP24544093 A JP 24544093A JP 3385667 B2 JP3385667 B2 JP 3385667B2
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- terbium
- alloy
- amorphous
- iron
- magnetostrictive material
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Description
【0001】[0001]
【産業上の利用分野】本発明は超音波振動子等のアクチ
ュエータ素子に係り、特に磁気エネルギーによって磁歪
を発生する磁歪合金及びその製造方法に関するものであ
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an actuator element such as an ultrasonic vibrator, and more particularly to a magnetostrictive alloy that produces magnetostriction by magnetic energy and a method for manufacturing the same.
【0002】[0002]
【従来の技術】従来、魚群探知機や加工切削具、洗浄機
の超音波振動子等の駆動素子としてはフェライトやNi
基合金等の磁歪材料が用いられていたが、一部特殊な用
途を除いて、現在ではこの磁歪材料にかわり、圧電材料
が主流となっている。すなわち、従来の磁歪材料の場
合、磁歪による変位量(λ)はせいぜい10-5と小さ
く、また、磁歪効果を得るために電磁駆動、すなわち磁
石とコイルの装着が必須条件である等の欠点を有してい
ることから装置が大型化してしまうのに対し、圧電材料
の場合、その変位量(λ)は10-3〜10-4と高く、ま
た、従来の電磁変換を応用した各種のモータやボイスコ
イル方式では追随できない応答性、発生応力、変位精度
に優れる上に、電磁方式に比べ装置が小型化が達成でき
る等の優位性を備えているからである。しかしながら、
このような優れた特性を有する圧電材料であっても作動
に対して高電圧が必要であるため、取扱いに注意を要す
る等の欠点も有している。2. Description of the Related Art Conventionally, ferrite or Ni has been used as a drive element for a fish finder, a processing / cutting tool, an ultrasonic vibrator of a washing machine, or the like.
Although a magnetostrictive material such as a base alloy has been used, except for some special applications, the magnetostrictive material is now replaced by a piezoelectric material as the mainstream. That is, in the case of the conventional magnetostrictive material, the displacement amount (λ) due to the magnetostriction is as small as 10 −5 at most, and electromagnetic driving, that is, mounting of the magnet and the coil is an essential condition for obtaining the magnetostrictive effect. Since the device has a large size because it has it, the displacement amount (λ) of the piezoelectric material is as high as 10 −3 to 10 −4, and various motors to which conventional electromagnetic conversion is applied. This is because it is superior in responsiveness, generated stress, and displacement accuracy, which cannot be followed by the voice coil system, and has an advantage that the device can be made smaller than the electromagnetic system. However,
Even a piezoelectric material having such excellent characteristics has a drawback that a high voltage is required for its operation, so that it requires careful handling.
【0003】ところが、最近では原子配列に規則性を持
たないアモルファス磁性材料からなるいわゆる超磁歪材
料が開発され、注目を浴びている。この超磁歪材料はF
e、Co、Ni等の遷移金属(TM)とY、Nd、S
m、Gd、Tb、Dy等の希土類金属(R)との金属間
化合物(TRM2 )をアモルファス化したものであり、
特に、鉄・テルビウム(Fe2 Tb)系のアモルファス
磁性材料は、圧電材料のような高電圧が不要な上に、結
晶磁気異方性がないため透磁率が大きく、なおかつ10
-2に近い大きな磁歪を発生することが可能となる。However, recently, a so-called giant magnetostrictive material made of an amorphous magnetic material having no regularity in atomic arrangement has been developed and attracted attention. This giant magnetostrictive material is F
e, Co, Ni and other transition metals (TM) and Y, Nd, S
An amorphous intermetallic compound (TRM 2 ) with a rare earth metal (R) such as m, Gd, Tb, or Dy,
In particular, an iron-terbium (Fe 2 Tb) -based amorphous magnetic material does not require a high voltage like a piezoelectric material and has no crystal magnetic anisotropy, and thus has a large magnetic permeability,
It is possible to generate a large magnetostriction close to -2 .
【0004】[0004]
【発明が解決しようとする課題】しかしながら、このア
モルファス磁性材料は等方性であるため、異方性の結晶
質に比べて、最大飽和磁界磁歪が低く、磁界が大きくな
らないと磁歪が発生しなかった。従って、弱い磁界では
磁歪の立ち上がりが小さく、応答性が充分ではなかっ
た。However, since this amorphous magnetic material is isotropic, the maximum saturation magnetic field magnetostriction is lower than that of anisotropic crystalline material, and magnetostriction does not occur unless the magnetic field becomes large. It was Therefore, in a weak magnetic field, the rise of magnetostriction was small and the response was not sufficient.
【0005】そこで、本発明は上記の問題点を有効に解
決するために案出されたものであり、その目的は磁歪の
立ち上がりによる応答性の向上を達成した新規な鉄・テ
ルビウム系磁歪材料及びその製造方法を提供するもので
ある。Therefore, the present invention has been devised to effectively solve the above problems, and its purpose is to provide a novel iron-terbium-based magnetostrictive material which achieves an improvement in response due to the rise of magnetostriction, and The manufacturing method is provided.
【0006】[0006]
【課題を解決するための手段】上記目的を達成するため
に第一及び第二の発明は、組成が(Fe2Tb)100-X-Y
MXCuYあるいは(Fe2Tb)100-X-YMXAuY(但
し、MはAlまたはSi、Xは2.5〜15原子%、Y
は0.5〜5原子%)であって、微結晶が析出されたア
モルファス合金からなることを特徴とする鉄・テルビウ
ム系磁歪材料であり、また、第三の発明は、これら鉄・
テルビウム系磁歪材料を溶解して合金溶湯を形成した
後、この合金溶湯を104 ℃/sec以上の温度勾配で
急冷してアモルファス合金化し、その後、このアモルフ
ァス合金を熱処理して微結晶化するものである。また、
第四の発明は、組成が(Fe2Tb)100-XMX(但し、
MはAlまたはSi、0<X≦15原子%)である鉄・
テルビウム系アモルファス粉体を母粒子とし、該母粒子
の周囲に、CuまたはCu系合金あるいはAuからなる
子粒子を付着させてカプセル粉体を形成し、該カプセル
粉体を集合させて加圧下で通電固化し、アモルファス合
金中にCuまたはCu系合金あるいはAu微結晶を略均
一に形成したものである。In order to achieve the above object, the first and second inventions have a composition of (Fe 2 Tb) 100-XY.
M X Cu Y or (Fe 2 Tb) 100-XY M X Au Y (where M is Al or Si, X is 2.5 to 15 atom%, Y
Is 0.5 to 5 atomic%), and is an iron-terbium-based magnetostrictive material characterized by comprising an amorphous alloy in which microcrystals are deposited, and the third invention is
A method in which a terbium-based magnetostrictive material is melted to form an alloy melt, the alloy melt is rapidly cooled at a temperature gradient of 10 4 ° C / sec or more to form an amorphous alloy, and then the amorphous alloy is heat-treated to be microcrystallized. Is. Also,
A fourth invention is that the composition is (Fe 2 Tb) 100-X M X (however,
M is Al or Si, 0 <X ≦ 15 atomic% )
Terbium-based amorphous powder is used as a mother particle, and child particles made of Cu or a Cu-based alloy or Au are attached to the periphery of the mother particle to form a capsule powder, and the capsule powder is aggregated under pressure . It is solidified by energization, and Cu or Cu-based alloy or Au microcrystals are formed substantially uniformly in an amorphous alloy.
【0007】以下、本発明の補足説明を行う。A supplementary explanation of the present invention will be given below.
【0008】第一及び第二の発明において、(Fe 2 T
b) 100-X-Y M X Cu Y あるいは(Fe 2 Tb) 100-X-Y M X
Au Y 中のAlまたはSiの配合量Xを2.5〜15原
子%の範囲に限定した理由としては、2.5原子%以下
では微結晶の効果が現れないからであり、また、15原
子%以上では、基材料であるFe2 Tbが希釈されて磁
歪合金としての機能が損なわれるからである。また、同
様にCuあるいはAuの添加量Yを0.5〜5原子%に
限定した理由としては0.5原子%以下では微結晶の均
一化が達成されず、また、5原子%以上では、反対に効
果が低下してしまう上に、製品のコストが上昇してしま
うからである。In the first and second inventions, (Fe 2 T
b) 100-XY M X Cu Y or (Fe 2 Tb) 100-XY M X
The reason why the compounding amount X of Al or Si in Au Y is limited to the range of 2.5 to 15 atom% is that the effect of microcrystals does not appear at 2.5 atom% or less. This is because if the content is at least%, Fe 2 Tb as the base material will be diluted and the function as a magnetostrictive alloy will be impaired. Similarly, the reason why the addition amount Y of Cu or Au is limited to 0.5 to 5 atom% is that the uniformization of fine crystals is not achieved at 0.5 atom% or less, and that at 5 atom% or more, On the other hand, the effect is reduced and the cost of the product is increased.
【0009】また、第三の発明において、104 ℃/s
ec以上の温度勾配で急冷する理由としては、104 ℃
/sec以下では、材料全体が結晶化してアモルファス
状態が得られないためである。また、このアモルファス
合金を熱処理するのは、アモルファス合金中に均一な微
結晶を生成させて等方性の性質と、結晶質と同様な異方
性の性質を具備させるためである。すなわち、アモルフ
ァスにするのは、結晶質の一軸性の特性が求められるの
に対し、小さな微結晶の集合であるアモルファス構造が
結晶質の異方性と比べ、等方性の性質になると予想され
るからである。異方性の強い結晶質材料では、異方性方
向の歪みに対し、最大磁界(飽和磁界)が支配的となる
が、アモルファスの状態では、特性に示すように結晶の
ような非常に高い飽和特性がない。しかし、低磁界に対
する反応は、微結晶集合多結晶化等方質の性質で速いも
のがある。低磁界の特性は結晶質のもので参考例がな
い。さらにアモルファスのものを所定の熱処理を行うと
飽和磁界磁歪が結晶質のように向上する。これは同時に
磁界が大きくならないと歪みが起こらないことを意味す
る。従って、磁気歪みの立ち上がりを大きくできること
を目的にアモルファス化の材料を適当に熱処理すること
で飽和磁化を大きくしながら磁気歪みも大きくするよう
にしたものである。Also, in the third invention, 10 4 ° C / s
The reason for quenching with a temperature gradient of ec or more is 10 4 ℃
This is because the entire material is crystallized and an amorphous state cannot be obtained at less than / sec. The reason why the amorphous alloy is heat-treated is to generate uniform microcrystals in the amorphous alloy so as to have an isotropic property and an anisotropic property similar to a crystalline property. That is, to make amorphous, it is expected that a crystalline uniaxial property will be required, whereas an amorphous structure, which is an aggregate of small crystallites, is expected to be an isotropic property as compared with crystalline anisotropy. This is because that. In crystalline materials with strong anisotropy, the maximum magnetic field (saturation magnetic field) is dominant for strain in the anisotropy direction, but in the amorphous state, as shown in the characteristics, it is very highly saturated like crystals. There is no characteristic. However, the reaction to a low magnetic field may be fast due to the isotropic nature of microcrystalline aggregates. The low magnetic field characteristics are crystalline and there is no reference example. Further, when an amorphous material is subjected to a predetermined heat treatment, the saturation magnetic field magnetostriction is improved like a crystalline material. This means that distortion will not occur unless the magnetic field becomes large at the same time. Therefore, in order to increase the rise of the magnetostriction, the amorphous material is appropriately heat-treated to increase the saturation magnetization and also increase the magnetostriction.
【0010】[0010]
【作用】第一〜第三に示す発明は上述したような組成と
製造方法であるため、得られたアモルファス材料中には
微結晶が均一に生成される。従って、アモルファスの等
方性の性質と、結晶質の異方性の性質を兼ね備え、飽和
磁化及び磁歪が大きくなることで弱磁界での立上がりが
可能となり、応答性が向上する。また、第四の発明は鉄
・テルビウム系アモルファス粉体をCuまたはCu系合
金あるいはAuでカプセル化した後、このカプセル粉体
を通電固化する方法であるため、アモルファスの性質と
微結晶の性質を兼ね備えることになり、上記発明と同様
な効果が得られる上に、その製造も第三の発明に比較し
て容易となる。Since the first to third inventions have the above-described composition and manufacturing method, fine crystals are uniformly formed in the obtained amorphous material. Therefore, the amorphous isotropic property and the crystalline anisotropy property are combined, and the saturation magnetization and the magnetostriction are increased, so that a rise in a weak magnetic field is possible and the response is improved. The fourth invention is a method of encapsulating iron / terbium-based amorphous powder with Cu or a Cu-based alloy or Au and then solidifying the encapsulation powder by applying current. In addition to providing the same effect as the above-mentioned invention, the manufacturing thereof becomes easier as compared with the third invention.
【0011】[0011]
【実施例】以下、本発明の一実施例を添付図面を参照し
ながら説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the accompanying drawings.
【0012】(実施例1)
先ず、鉄、テルビウム、シリコンあるいは鉄、テルビウ
ム、アルミニウムの母材中に、それぞれ銅あるいは金を
所定量添加し、これらをアーク溶解装置によってそれぞ
れ溶解させて4種類の母合金溶湯を作製した後、これら
母合金溶湯を単ロール法による液体急冷装置を用い、1
04 〜106 ℃/secの温度勾配で急冷してアモルフ
ァス化し、その後、これら4種類のアモルファス合金を
3.6Kgで真空封入して熱処理(575℃,1hアニ
ーリング)して微結晶化を行い、以下に示す組成の試料
A,B,C,Dを作製した。そして、これら各試料A,
B,C,Dの磁歪と磁界の関係を評価し、その結果を、
銅あるいは金を添加しない試料E、F及び上記のような
熱処理を行わないアモルファス状態(as−Q)の試料
A′、B′、C′、D′と共に図1〜図2に示す(縦軸
は磁歪の大きさ(magnetostriction)、横軸は磁界の強
さ(KA/m)を示す)。尚、磁歪の測定方法としては
図3に示すような従来周知の静電気容量法による測定装
置を用いて行った。また、各試料の成分単位は原子%で
ある、
試料A:(Fe2 Tb)96.5Si2.5 Cu1.0 (575℃,1hアニーリング)
試料B:(Fe2 Tb)96.5Si2.5 Au1.0 〃
試料C:(Fe2 Tb)96.5Al2.5 Cu1.0 〃
試料D:(Fe2 Tb)96.5Al2.5 Au1.0 〃
試料A′:(Fe2 Tb)96.5Si2.5 Cu1.0
試料B′:(Fe2 Tb)96.5Si2.5 Au1.0
試料C′:(Fe2 Tb)96.5Al2.5 Cu1.0
試料D′:(Fe2 Tb)96.5Al2.5 Au1.0
試料E:(Fe2 Tb)97.5Si2.5 (575℃,1hアニーリング)
試料F:(Fe2 Tb)97.5Al2.5 〃
この結果、図1及び図2に示すように、熱処理を行わな
いアモルファス状態の試料A′、B′、C′、D′及び
Cu、Auのいずれも添加していない試料E、Fの場合
では、100KA/mを越える高磁界では、いずれも高
い磁歪率を示したが、100KA/m以下の低磁界では
磁歪率が低いことがわかる。このことは、低い磁界では
殆ど磁歪効果が現れず、応答性が悪いことを示す。これ
に対し、Cu、Auを添加すると共に熱処理を行った試
料A、B、C、Dでは100KA/mを越える高磁界で
の磁歪の伸び率は上記各試料に比較して低かったが、1
00KA/m以下、特に50〜100KA/mの低磁界
においては磁歪が顕著に発生していることがわかる。こ
のことは、本発明に係る試料A、B、C、Dが低磁界に
おいて優れた応答性を発揮することを示すものである。
(実施例2)
先ず、アルミナルツボにFe2 TbとSiをそれぞれ9
7.5原子%、2.5原子%の割合で入れ、高周波溶解
して(Fe2 Tb)97.5Si2.5 合金溶湯を形成した
後、この(Fe2 Tb)97.5Si2.5 合金溶湯を、従来
周知のガスアトマイズ装置を用い、70Kg/cm2 の
ガス圧力で急冷噴霧して100メッシュ以下のアモルフ
ァス状の粉体を形成した(尚、本実施例ではガスアトマ
イズ法によって粉状のアモルファス粉体を得たが、他に
単ロール法を用いてリボン状のアモルファス粉体を形成
しても良い)。次に、このアモルファス粉体を母粒子と
し、その周囲に、粒径がこのアモルファス粉体の1/1
0程度のCuおよびAuまたはCuOさらにCuを含む
化合物合金からなる子粒子0.2wt%を付着させてカ
プセル化し、カプセル粉体を形成した。そして、このカ
プセル粉体をカーボン型(金型でも良い)に入れ、70
0℃、300Kg/cm2 の加圧下で通放電固化して1
0φ×2tの固化試料を形成した後、固化試料を加圧方
向(P方向)と加圧軸に対して横方向(S方向)で切り
出し、その特性を評価した。図1に、それらP方向およ
びS方向の特性を示す。Example 1 First, a predetermined amount of copper or gold was added to a base material of iron, terbium, silicon or iron, terbium, and aluminum, and these were melted by an arc melting device to obtain four types. After producing the mother alloy molten metal, the mother alloy molten metal was melted by a single-roll liquid quenching apparatus.
It is rapidly cooled at a temperature gradient of 0 4 to 10 6 ° C / sec to become amorphous, and then these 4 types of amorphous alloys are vacuum-sealed at 3.6 kg and heat-treated (575 ° C, 1 h annealing) to perform microcrystallization. Samples A, B, C and D having the following compositions were prepared. And each of these sample A,
The relationship between the magnetostriction of B, C, and D and the magnetic field is evaluated, and the result is
1 and 2 together with Samples E and F to which copper or gold is not added and Samples A ', B', C'and D'in the amorphous state (as-Q) not subjected to the heat treatment as described above (vertical axis). Is the magnitude of magnetostriction (magnetostriction), and the horizontal axis is the magnetic field strength (KA / m)). The magnetostriction was measured by using a conventionally known measuring device by the electrostatic capacitance method as shown in FIG. The component unit of each sample is atomic%. Sample A: (Fe 2 Tb) 96.5 Si 2.5 Cu 1.0 (575 ° C., 1 h annealing) Sample B: (Fe 2 Tb) 96.5 Si 2.5 Au 1.0 〃 Sample C: (Fe 2 Tb) 96.5 Al 2.5 Cu 1.0 〃 Sample D: (Fe 2 Tb) 96.5 Al 2.5 Au 1.0 〃 Sample A ': (Fe 2 Tb) 96.5 Si 2.5 Cu 1.0 Sample B': (Fe 2 Tb) 96.5 Si 2.5 Au 1.0 sample C ′: (Fe 2 Tb) 96.5 Al 2.5 Cu 1.0 sample D ′: (Fe 2 Tb) 96.5 Al 2.5 Au 1.0 sample E: (Fe 2 Tb) 97.5 Si 2.5 (575 ° C., 1 h annealing) sample F: (Fe 2 Tb) 97.5 Al 2.5 〃 As a result, as shown in FIGS. 1 and 2, all of the amorphous samples A ′, B ′, C ′, D ′ and Cu, Au, which were not heat-treated, In the case of samples E and F not added, 1 The high magnetic field exceeding 0 kA / m, but all exhibited high magnetostriction constant, it can be seen that a low magnetostriction constant is less low magnetic field 100 KA / m. This means that the magnetostriction effect hardly appears in a low magnetic field and the response is poor. On the other hand, in samples A, B, C, and D to which Cu and Au were added and heat-treated, the elongation rate of magnetostriction in a high magnetic field exceeding 100 KA / m was lower than that of each sample, but 1
It can be seen that magnetostriction is remarkably generated in a low magnetic field of 00 KA / m or less, particularly 50 to 100 KA / m. This shows that the samples A, B, C and D according to the present invention exhibit excellent responsiveness in a low magnetic field. (Example 2) First, Fe 2 Tb and Si were each added to an alumina crucible 9 times.
After being added at a ratio of 7.5 atomic% and 2.5 atomic%, and high-frequency melting to form (Fe 2 Tb) 97.5 Si 2.5 alloy molten metal, this (Fe 2 Tb) 97.5 Si 2.5 alloy molten metal has been conventionally known. By using the gas atomizing device of No. 1 to rapidly cool and spray at a gas pressure of 70 Kg / cm 2 to form an amorphous powder having a particle size of 100 mesh or less. (In this example, a powdery amorphous powder was obtained by the gas atomizing method. Alternatively, a ribbon-shaped amorphous powder may be formed by using a single roll method). Next, this amorphous powder is used as the mother particle, and the particle size is 1/1 times that of this amorphous powder.
0.2 wt% of child particles made of a compound alloy containing Cu and Au or CuO of about 0 and Cu were attached and encapsulated to form a capsule powder. Then, the capsule powder is put into a carbon mold (or a mold may be used), and 70
1 by solidifying through discharge under pressure of 0 ° C and 300 Kg / cm 2
After forming a solidified sample of 0φ × 2t, the solidified sample was cut out in the pressing direction (P direction) and in the lateral direction (S direction) with respect to the pressing axis, and its characteristics were evaluated. In Fig. 1, those P directions and
And characteristics in the S direction .
【0013】(実施例3)
実施例2で用いたSiの代りにAlを用いた他は、実施
例2と同様な製法によって固化試料を形成し、そのS方
向を切り出して特性を評価した。図2に、そのS方向の
特性を示す。(Example 3) A solidified sample was formed by the same manufacturing method as in Example 2 except that Al was used instead of Si used in Example 2, and its S
The direction was cut out and the characteristics were evaluated. Figure 2 shows the S direction
Show the characteristics .
【0014】この結果、図1及び図2に示すように、実
施例2及び3のいずれもS方向は実施例1で作製した試
料と同等の特性(575℃,1hアニーリング)を示
し、また、P方向はいずれもS方向の約8割の値を示し
た。As a result, as shown in FIGS. 1 and 2, in each of Examples 2 and 3, the S direction shows the same characteristics (575 ° C., 1 h annealing) as the sample prepared in Example 1, and The P direction shows a value of about 80% of the S direction.
【0015】[0015]
【発明の効果】以上要するに本発明によれば、アモルフ
ァス合金中に微結晶が均一に形成されているため、アモ
ルファスの等方性と結晶質の異方性を兼ね備えることに
より、低磁界において優れた応答性を発揮することがで
きるといった優れた効果を発揮する。In summary, according to the present invention, since fine crystals are uniformly formed in the amorphous alloy, it is excellent in a low magnetic field because it has both the isotropy of amorphous and the anisotropy of crystalline. It has an excellent effect that it can exhibit responsiveness.
【図1】Fe−Tb−Si系磁歪合金の磁界と磁歪の関
係を示すグラフ図である。FIG. 1 is a graph showing a relationship between a magnetic field and magnetostriction of a Fe—Tb—Si based magnetostrictive alloy.
【図2】Fe−Tb−Al系磁歪合金の磁界と磁歪の関
係を示すグラフ図である。FIG. 2 is a graph showing the relationship between the magnetic field and magnetostriction of an Fe—Tb—Al-based magnetostrictive alloy.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 滝田 茂生 神奈川県藤沢市土棚8番地 株式会社い すゞ中央研究所内 (72)発明者 奥村 英二 神奈川県藤沢市土棚8番地 株式会社い すゞ中央研究所内 (72)発明者 加藤 雅之 神奈川県藤沢市土棚8番地 株式会社い すゞ中央研究所内 (72)発明者 井上 明久 宮城県仙台市青葉区川内川内住宅11− 806 (56)参考文献 特開 平4−246150(JP,A) 特開 平4−272103(JP,A) 特開 平4−96203(JP,A) (58)調査した分野(Int.Cl.7,DB名) C22C 45/00 - 45/10 H01L 41/20 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Shigeo Takita 8 Tsutana, Fujisawa City Kanagawa Prefecture Isuzu Central Research Institute Co., Ltd. (72) Inventor Eiji Okumura 8th Tsuna shelf Fujisawa City Kanagawa Prefecture Isuzu Central Research Co., Ltd. In-house (72) Masayuki Kato 8 Tsutana, Fujisawa, Kanagawa Prefecture Isuzu Central Research Institute (72) Inventor Akihisa Inoue Kawauchi 11-806, Aoba-ku, Sendai, Miyagi Prefecture (56) References 4-246150 (JP, A) JP-A-4-272103 (JP, A) JP-A-4-96203 (JP, A) (58) Fields investigated (Int.Cl. 7 , DB name) C22C 45/00 -45/10 H01L 41/20
Claims (4)
Y(但し、MはAlまたはSi、Xは2.5〜15原子
%、Yは0.5〜5原子%)であって、微結晶が析出さ
れたアモルファス合金からなることを特徴とする鉄・テ
ルビウム系磁歪材料。1. A composition of (Fe 2 Tb) 100-XY M X Cu
Y (where, M is Al or Si, X is 2.5 to 15 atomic%, Y is 0.5 to 5 atomic%) an iron characterized in that it consists of crystallites is deposited amorphous alloy -Terbium-based magnetostrictive material.
Y(但し、MはAlまたはSi、Xは2.5〜15原子
%、Yは0.5〜5原子%)であって、微結晶が析出さ
れたアモルファス合金からなることを特徴とする鉄・テ
ルビウム系磁歪材料。2. The composition is (Fe 2 Tb) 100-XY M X Au.
Y (where, M is Al or Si, X is 2.5 to 15 atomic%, Y is 0.5 to 5 atomic%) an iron characterized in that it consists of crystallites is deposited amorphous alloy -Terbium-based magnetostrictive material.
又は(Fe2Tb)100-X-YMXAuY(但し、MはAlま
たはSi、Xは2.5〜15原子%、Yは0.5〜5原
子%)の鉄・テルビウム系磁歪材料を溶解して合金溶湯
を形成した後、この合金溶湯を104℃/sec以上の
温度勾配で急冷してアモルファス合金化し、その後、こ
のアモルファス合金を熱処理して微結晶を析出すること
を特徴とする鉄・テルビウム系磁歪材料の製造方法。3. The composition is (Fe 2 Tb) 100-XY M X Cu Y.
Alternatively, a (Fe 2 Tb) 100-XY M X Au Y (where M is Al or Si, X is 2.5 to 15 atom%, and Y is 0.5 to 5 atom%) iron-terbium-based magnetostrictive material is used. After melting to form an alloy melt, the alloy melt is rapidly cooled at a temperature gradient of 10 4 ° C / sec or more to form an amorphous alloy, and then the amorphous alloy is heat-treated to precipitate fine crystals. Method for manufacturing iron-terbium-based magnetostrictive material.
MはAlまたはSi、0<X≦15原子%)である鉄・
テルビウム系アモルファス粉体を母粒子とし、該母粒子
の周囲に、CuまたはCu系合金あるいはAuからなる
子粒子を付着させてカプセル粉体を形成し、該カプセル
粉体を集合させて加圧下で通電固化し、アモルファス合
金中にCuまたはCu系合金あるいはAu微結晶を略均
一に形成したことを特徴とする鉄・テルビウム系磁歪材
料の製造方法。4. A composition of (Fe 2 Tb) 100-X M X (provided that
M is Al or Si, 0 <X ≦ 15 atomic% )
Terbium-based amorphous powder is used as a mother particle, and child particles made of Cu or a Cu-based alloy or Au are attached to the periphery of the mother particle to form a capsule powder, and the capsule powder is aggregated under pressure . A method for producing an iron-terbium-based magnetostrictive material, characterized by solidifying by energization to form Cu or a Cu-based alloy or Au microcrystals in an amorphous alloy substantially uniformly.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24544093A JP3385667B2 (en) | 1993-08-31 | 1993-09-30 | Iron-terbium-based magnetostrictive material and method for producing the same |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5-216105 | 1993-08-31 | ||
| JP21610593 | 1993-08-31 | ||
| JP24544093A JP3385667B2 (en) | 1993-08-31 | 1993-09-30 | Iron-terbium-based magnetostrictive material and method for producing the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07118786A JPH07118786A (en) | 1995-05-09 |
| JP3385667B2 true JP3385667B2 (en) | 2003-03-10 |
Family
ID=26521240
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24544093A Expired - Fee Related JP3385667B2 (en) | 1993-08-31 | 1993-09-30 | Iron-terbium-based magnetostrictive material and method for producing the same |
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| Country | Link |
|---|---|
| JP (1) | JP3385667B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3230581B1 (en) * | 2000-09-12 | 2001-11-19 | 経済産業省産業技術総合研究所長 | Manufacturing method of giant magnetostrictive material under microgravity environment |
| JP3992177B2 (en) | 2001-11-29 | 2007-10-17 | 株式会社リコー | Image processing apparatus, image processing method, and computer program |
| KR101187138B1 (en) | 2009-08-03 | 2012-09-28 | 가부시키가이샤 토호쿠 테크노 아치 | Magnetostrictive film, magnetostrictive element, torque sensor, force sensor, pressure sensor, and process for production of magnetostrictive film |
-
1993
- 1993-09-30 JP JP24544093A patent/JP3385667B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07118786A (en) | 1995-05-09 |
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