JP3386426B2 - Transportation tools such as photomask substrates - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a carrier for a photomask substrate or a material glass substrate.

[0002]

2. Description of the Related Art In a conventional photomask substrate, one side of a rectangular type has a size of about 100 to 250 (mm). However, as the size of a display panel has increased in recent years, a photomask substrate and a material substrate have become larger. 8 especially for photomask substrates
The number of items weighing 00 × 920 × 8 (mm) that exceeds 10 kg has increased, and it is becoming difficult for people to easily carry them. The photomask substrate is used for fine photo-etching, and it is extremely reluctant for a person to touch the substrate surface or the end face. Therefore, although the substrate is transported and stored with great care, the current situation is that the end face is pressed by hand during transportation.

The present inventor has proposed the invention of Japanese Patent Application No. 11-348364 in order to solve the problems of the prior art. The proposed invention is a transport tool suitable for transporting a large and heavy substrate or a substrate that does not weigh but is large and is flexible due to its own weight.

By the way, substrates are stored in a case. In this case, in order to take out the heavy substrates from the case or store them again, it is easier to handle the substrates by supporting them vertically.

[0005]

DISCLOSURE OF THE INVENTION The present invention is an improvement of the invention of the above-mentioned application proposed by the inventor of the present application, and is an optimal transfer method for supporting and transferring heavy substrates in a vertical direction. The purpose is to provide ingredients.

[0006]

The first of the solving means is a support frame which is rod-shaped and adjustable in length and has flexibility, and support members provided at both ends of the support frame. Is a fixed support member, one of which is fixed to the support frame, and the other is a movable support member that moves toward and away from the fixed support member, and joint plates are connected to both ends of the support frame. , The joint plate is bent at a right angle, and the side joint plates are formed in such a manner that the bent portions face each other at both ends of the support frame, and the fixed support is provided inside the one side joint plate. The member is fixed, the fixing lever is connected and fixed, and the movable lever is rotatably attached to the other side joint plate via a fulcrum shaft, and the movable lever projects into the side joint plate. The movable support member is axially attached to the The constant supporting member and the movable supporting member are provided at positions facing each other, and the distance when these two supporting members sandwich the substrates is set to be slightly shorter than the length of the substrates. . A second solution is that in the first solution, the support frame is a hollow prismatic body, and the sub-support frame is slidably inserted into the main support frame, and the main support frame is connected to the main support frame. And a set screw for fixing the sub-support frame.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows a state in which substrates are transported using the transport tool of the present invention, FIG. 2 is a detailed view showing the structure of the transport tool, and FIG. 3 supports the substrates. It is a figure explaining an effect.

The carrier is a rod-shaped support frame 10 having flexibility and length, and supporting members 20 and 30 for supporting substrates provided at both ends thereof.
One of the 0 and 30 is the fixed support member 20, and the other is the movable support member 30 that can move in the length direction of the support frame 10. A fixed lever 40 and a movable lever 50 are provided at both ends of the support frame 10, and in particular, the movable support member 30 is moved toward or away from the fixed support member 20 by the turning operation of the movable lever 50. Is able to.

The support frame 10 is a hollow prismatic body, a sub-support frame 12 inserted inside the main support frame 11 is slidable, and the length of the support frame 10 can be adjusted. , Both are fixed by a set screw 13. In the embodiment, the support frame 10 is provided with two materials in parallel, and the joint plates 14 and 15 are connected to both ends. In addition,
The joint plates 14 and 15 are formed by bending at right angles, and the bent portions are formed on the side joint plates 14a and 15a in the directions facing each other at both ends of the support frame 10.

The supporting members 20 and 30 are connected to the joint plate 14 and
15 is provided inside the fixed support member 2
0 is fixed to the side joint plate 14a of the joint plate 14. The above-mentioned fixed lever 40 is connected and fixed to the side joint plate 14a. On the other hand, the movable support member 30 is provided separately from the side joint plate 15 a of the joint plate 15. Further, the movable lever 50 is rotatably attached to the side joint plate 15a via a fulcrum shaft 51, and the movable lever 50 projects inward through the window hole 16 of the side joint plate 15a. The movable support member 30 is connected to the section by a connecting shaft 52.

As a result, when the movable lever 50 protruding toward the outside of the joint plate 15 is rotated about the fulcrum shaft 51,
The movable support member 30 approaches or moves away from the fixed support member 20 provided at the opposite position. In addition, as shown in FIG. 2B, the support members 20 and 30 are provided with support grooves 21 and 31 for fitting the substrates 60 in the vertical direction on opposite surfaces in a plan view.

In the embodiment, the support frame 10 is made of metal such as aluminum, and the support members 20 and 30 are made of resin such as Teflon.

The present invention has the above-described structure, and when the movable lever 50 is in the horizontal position, the movable support member 30 comes closest to the fixed support member 20. Now, in order to support the substrates 60 in the vertical direction by the carrier of the embodiment, as shown in FIG.
With the movable lever 50 lowered, the support grooves 21 and 31 of the fixed support member 20 and the movable support member 30 are fitted to the ends of the substrates 60. 2A, the movable lever 50
When the movable lever 50 is in the horizontal position, the movable support member 30 moves to the innermost side to press down the substrates 60 with a strong force when the movable lever 50 is in the horizontal position, and the automatic end moves beyond the fulcrum shaft 51. When tilted so as to be upward in the figure, the movable lever 50 is locked at this position.

That is, when the movable lever 50 is in the horizontal position, the movable support member 30 is pressed against the substrates 60 with the strongest force, but when the tip of the movable lever 50 passes the fulcrum shaft 51, the movable lever 50 moves. The side joint plate 15a comes into contact with the upper portion of the window hole 16 formed in the side joint plate 15a so that the side joint plate 15a cannot rotate at this position.

The fact that the movable lever 50 is locked means that when the movable frame 50 is in the horizontal state and the substrates 60 are pressed with the strongest force as shown in FIG. This is because it is bowed like a bow. At this time, a restoring force acts on the support frame 10,
As a result, the substrates 60 are sandwiched with a strong force, and at the same time, the movable lever 50 is fixed to the side joint plate 15a in a locked state.

As shown in FIGS. 2 and 3, when the substrates 60 are held by the carrier, the substrates 60 can be carried to any place by holding the fixed lever 40 and the movable lever 50.

What is important in the present invention is that the two support members 2
The distance is set to 0 or 30. That is, when the movable support member 30 is brought close to the fixed support member 20 and the substrates 60 are pressed with a strong force, the distance between the support members 20 and 30 is set to be slightly shorter than the length of the substrates 60 supporting them. By doing so, when the movable supporting member 30 is pressed against the substrates 60, it is possible to apply a bowing force to the supporting frame 10. The length of the supporting frame 10 is set by loosening the set screw 13 and changing the length of the sub supporting frame 12 protruding from the main supporting frame 11 to adjust the length of the entire supporting frame 10.

[0018]

The transport tool of the present invention is capable of vertically holding and transporting a large and heavy photo mask substrate or the like without touching it by hand. Further, since the supporting portion of the substrates is near the upper end, there is an effect that the work of housing and taking out the case is easy, for example.

[Brief description of drawings]

FIG. 1 is a perspective view showing a state in which substrates are supported and conveyed.

2A and 2B show a detailed structure of a carrier, in which A is a longitudinal sectional view and B is a lateral sectional view of a substrate supporting portion.

FIG. 3 is a cross-sectional plan view showing a state in which substrates are set on a supporting member, for explaining a supporting action of substrates.
B is a cross-sectional plan view showing a state of supporting substrates.

[Explanation of symbols]

10 Support frame 11 Main support frame 12 Sub-support frame 13 Set screw 14 plate 14a Side joint plate 15 joint plates 15a Side plate 16 windows 20 Fixed support member 21 Support groove 30 Movable support member 31 Support groove 40 fixed lever 50 movable lever 51 fulcrum axis 52 Connection shaft 60 substrates

─────────────────────────────────────────────────── ─── Continuation of front page (58) Fields surveyed (Int.Cl. ⁷ , DB name) G03F 1/14 B65G 49/06 C03B 35/00 H01L 21/027 H01L 21/68

Claims (2)

(57) [Claims] 1. A support frame (10) which is rod-shaped and adjustable in length and has flexibility, and support members (20, 30) provided at both ends of the support frame. Is a fixed support member (20) fixed to the support frame, and the other is a movable support member (30) that moves toward and away from the fixed support member (20), and both ends of the support frame (10). The joint plates (14, 15) are connected to the portions, and the joint plates are formed by bending at right angles, and the side joint plates (14a, 15a) in the direction in which the bent portions face each other at both ends of the support frame. Is formed, the fixing support member is fixed to the inside of the one side joint plate (14a), and the fixing lever (40) is connected and fixed, and the fulcrum shaft is attached to the other side joint plate (15a). The movable lever (50) can be freely rotated via (51) The movable support member is attached to the movable support member, and the movable support member is attached to the end portion of the side joint plate (15a) protruding inward, and the fixed support member (20) and the movable support member (30) face each other. A carrier for a photomask substrate or the like, which is provided at a position, and the distance when these two support members sandwich the substrates is set to be slightly shorter than the length of the substrates. 2. The support frame (10) is a hollow prismatic body,
The sub-support frame (12) is slidably inserted into the main support frame (11), and the main support frame is provided with a set screw (13) for fixing the main support frame and the sub-support frame. The carrier for a photomask substrate according to claim 1, wherein the carrier is a photomask substrate.