JP3390932B2 - Color filter inspection device - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a color filter inspection device for visually inspecting a color filter used in a color liquid crystal display device or the like.

[0002]

2. Description of the Related Art A transparent substrate such as glass or plastic is provided with a colored layer such as a resin or a vapor deposition film colored with a dye or a pigment,
A color filter with a transparent electrode formed on this is
A color liquid crystal display device in which a certain gap is provided with a substrate on which T or a transparent electrode is formed, and a twisted nematic liquid crystal or the like is enclosed in the gap is widely used in televisions, laptop personal computers, and the like.

The color filter used here has a light-shielding layer (black matrix) for partitioning adjacent pixels and improving the contrast of a display image on a transparent substrate, which is not formed on a resin or resin relief in which chrome or a black pigment is dispersed. A method in which a resin layer is formed by applying electrolytic plating, and then a colored layer is formed by exposing and developing a photosensitive resin, and the resin relief is sequentially dyed with dyes of each color (dyeing method). The resin is formed by patterning by photolithography (pigment dispersion method), the color ink is transferred by intaglio offset, and the ink layer is cured by heat (printing method). Provided with a transparent protective film that improves resistance, chemical resistance, etc.
In the case of the active matrix method by depositing or sputtering ITO etc., the common electrode, ST
In the case of the N method, a striped electrode is formed to obtain a color filter substrate on which a color filter for one surface or a multi-sided color filter is formed, and then cut into a desired size if necessary. Are manufactured.

As described above, the manufacture of the color filter requires a great number of steps, but various defects which adversely affect the subsequent cell assembling step and the quality of the final color liquid crystal display device occur. There is. For example, the following may be mentioned. (1) Protrusion defect: Caused by foreign substances mixed in the coloring material, ink, etc., or foreign substances mixed in when applying these materials, because the cell gap of the liquid crystal cell becomes uneven at the protrusions. Adversely affect the image. (2) Dirt: Adhesion such as reattachment of the removed portion of the photosensitive resin during development, stain due to poor cleaning, and uneven drying. (3) Scratches: There are scratches on the surface where the colored layer and the transparent electrode are formed (hereinafter referred to as the film surface) and scratches on the glass substrate on the back surface. (4) Unevenness: uneven application of coloring material or uneven dyeing. (5) White spots: Missing colored layer. For example, when the colored photosensitive resin is exposed and then developed, chipping may occur. (6) Defective light-shielding film: defective black matrix. For example, when a chrome film is formed on a substrate, a positive resist is applied and mask exposure is performed, and foreign matter adheres to the mask, the chrome remains in the portion where the chrome film should be removed as a black defect. It is also called a chrome defect. (7) ITO defect: crack or chip of transparent electrode. Or the film thickness is not uniform (it can be identified by looking at the interference color). It may cause cracks and cracks in the heating process of the cell assembly and the like.

[0005]

As a method for inspecting such defects, an operator holds each color filter substrate one by one and uses it for illumination of a floodlight or the like using a halogen lamp or a metal halide lamp. On the other hand, the present condition is to rely solely on the method of visually recognizing defects by using reflected light or transmitted light while changing the angle of the color filter substrate, and the defect inspection process is carried out by complicated manual work. Defects such as scratches and stains were generated.

As a device for performing visual inspection, there is an inspection device for a TFT (thin film transistor) substrate used in a liquid crystal display device, and dark field illumination using such a conventional projector for halogen light is used. When a visual inspection device is used to perform a reflection test on the film surface of a color filter provided with a colored layer formed of a resin in which a pigment is dispersed or a colored layer formed by electrodeposition of colored particles on a substrate, particularly on the colored layer. This is remarkable when the transparent protective film is not provided. However, since the pigment particles have fine irregularities of about 1 μm due to the coloring particles on the surface of the coloring layer, the coloring layer surface itself scatters the inspection light, resulting in defects. There was a problem that was difficult to extract.

Further, in such a conventional visual inspection apparatus, since it is an apparatus only for performing a reflection inspection only on the TFT formation surface by dark field illumination using a projector such as a halogen light, it is necessary to inspect the color filter substrate. When used for the above, there was a problem that it was impossible to detect defects such as scratches, stains, glass breakage, etc., which occur on the back surface of the color filter substrate, in addition to unevenness, white spots, defects in the light shielding layer, and the like.

Further, in such a visual inspection apparatus, for each inspection stage (that is, one operator), the inspection object is conveyed from the cassette storing the inspection object to the stage, and the inspection object is inspected after the inspection. There is a combination of a transfer robot that carries out the stage from the stage to the cassette, but the inspected object is taken out from the stage and placed in the cassette that stores the inspected object, and then the uninspected object is placed. There is a problem that a sequence of going to pick up, transporting it, and mounting it on a stage is required, and a waiting time when the object to be inspected is exchanged becomes very long, resulting in low inspection efficiency.

Further, since it takes a relatively long time to inspect many defects such as a color filter, allocating one transfer robot to one worker makes the robot play for a long time. Therefore, there is a problem that the efficiency in terms of cost and space is poor.

As another problem, whether the color filter is manually inspected or visually inspected, a line inspection is performed in each manufacturing process before such final inspection. Although a rough process inspection for common defects etc. is performed using a device etc., the means for transmitting the result of the process inspection to the final inspection process is to mark the position directly on the back surface of the color filter, etc. The method of is adopted. For this reason, even if the defect level of the color filter substrate as a whole clearly exceeds the allowable value, the operator must take out the color filter substrate and inspect it to confirm the defect. Even if the defect level of only some of the color filters in the multi-sided color filter substrate clearly exceeds the allowable value, the worker should check all the color filters multi-sided on the color filter substrate. It was necessary to confirm the defect level.

A first object of the present invention is to provide a color filter inspecting apparatus which is less likely to scatter the inspection light even if the colored layer of the color filter has fine irregularities and which can easily extract defects. A second object is to provide a color filter inspection device capable of detecting all the defects of the color filter described above in addition to the first object, and a third object is the first or second object. In addition to automating and speeding up the transportation of the color filter substrate, the fourth object is to realize space saving and cost reduction in addition to the first to third objects. The fifth object is to improve the inspection efficiency by automatically or easily identifying and omitting the inspection of the color filter to be removed as a defect obviously, in addition to the first to fourth objects. Further object of the sixth is that in addition to the first through fifth object to provide a color filter testing apparatus having a function of providing a failure information that facilitates defect screened at a later step.

[0012]

The first invention of the present application for solving the above-mentioned problems is a color filter inspection device for visually inspecting a defect of a color filter substrate having at least a colored layer formed on the substrate. A film that is linearly arranged on the outer periphery of at least one side of the held color filter substrate with respect to the stage that holds the color filter substrate, and irradiates the inspection light substantially parallel to the film surface of the colored layer. A color filter inspection device characterized in that a light source for surface reflection inspection is arranged.

A second invention of the present application is a color filter inspecting apparatus for visually inspecting a color filter substrate having at least a colored layer formed on the substrate for defects, wherein the color filter substrate can be turned upside down. With respect to the holding stage, when the color filter substrate is held so that the surface on which the colored layer is formed faces the operator side, the color filter substrate is arranged linearly on the outer periphery of at least one side and colored. A film surface reflection inspection light source that emits inspection light substantially parallel to the film surface of the layer, and a transmission inspection light source that emits light from the back surface side of the surface of the color filter substrate on which the colored layer is formed, and the colored layer. For backside reflection inspection, when the color filter substrate is held so that the backside of the surface where the marks are formed faces the worker side, light is radiated to the backside from above or from the worker side. Source and a color filter inspection apparatus characterized in that a.

According to a third aspect of the present invention, a first arm for transporting an uninspected color filter substrate from a cassette accommodating a plurality of uninspected color filter substrates to a stage, and a plurality of inspected color filter substrates can be accommodated from the stage. The second arm for transporting the inspected color filter substrate to a different cassette is equipped with a substrate transport robot mounted on a rotatable support, and the first arm holds the uninspected color filter substrate and stands by. 3. The color filter inspection device according to claim 1, wherein the second arm pulls out the inspected color filter substrate, and immediately after that, the first arm conveys the uninspected color filter substrate to the stage. .

A fourth invention of the present application comprises two sets of stages on which an inspection light source is arranged, the two sets of stages, a cassette containing the uninspected color filter substrate and a cassette capable of containing the inspected color filter substrate. and arranged around the substrate transfer robot, in two sets of stages in the color filter inspection apparatus according to the configuration to one of any claims 1 to 3, wherein to share the substrate transport robot is there.

According to a fifth aspect of the present invention, a substrate number corresponding to each color filter substrate in the cassette corresponding to optical reading information provided for each cassette containing a plurality of untested color filter substrates, Data storage means for storing defect level information up to the previous process corresponding to the board number, optical reading means for reading optical reading information provided in the cassette, and the board according to the read optical reading information The defect level information corresponding to the number is read, and the defect level of the entire color filter substrate in the defect level information for each color filter substrate and the defect level in each area obtained by dividing the color filter substrate into a predetermined area have a predetermined allowable value. If the overall defect level exceeds the allowable value, the If the number of the color filter substrate is not transferred to the stage, and if it is within the allowable value, the color filter substrate corresponding to the substrate number is transferred to the stage by the transfer robot, and the color filter substrate in the stage is transferred to the stage. When the defect level of any of the divided areas exceeds the allowable value, the control means for displaying the position of the divided area and the position of the divided area having the defective level exceeding the allowable value are displayed. of claims 1 to 4, characterized in that a display means for
It is the color filter inspection device described in any one of the above.

The sixth aspect of the present invention comprises means for inputting the defect level information and means for updating the defect level information up to the previous process stored in the data storage means by the input defect level information. The color filter inspection device according to claim 5.

According to a seventh aspect of the present invention, the cassette in which the untested color filter substrate is stored and the cassette in which the inspected color filter substrate can be stored are the same cassette . One of
It is the color filter inspection device described in No. 2.

[0019]

According to the first aspect of the present invention, the unevenness due to the pigment particles or the electrodeposited particles contained in the colored layer formed on the color filter substrate is present at approximately the same size (diameter, height) of about 1 μm at the maximum. On the other hand, the size of the defective projection, which is considered to be a defect, is 5 to 10 μm, and the coloring is linearly formed on the outer periphery of at least one side of the color filter substrate. Since the light source for the film surface reflection inspection that irradiates the inspection light is arranged almost parallel to the film surface of the layer, the inspection light is irradiated in a direction almost right beside the unevenness caused by the coloring layer. The inspection light is not radiated to the unevenness caused by the colored layer except for the outermost end of the, and can be substantially ignored, whereas the projections that are defects are large, so the side surface is irradiated with the inspection light. As it is scattered and scattered, defects are easily extracted. Can be issued.

Further, the above-mentioned defect of the color filter is
The present inventors have found that the following three types of inspection methods are necessary to detect all of them. (1) Defects on the film surface, dirt, scratches, defective ITO,
Broken glass → Reflection inspection on the film surface (film surface reflection inspection) (2) Scratches and dirt on the back surface, glass breakage → Reflection inspection on the back surface (back surface reflection inspection) (3) Unevenness, white spots, defective light shielding film, dirt , Scratch → transmitted light inspection with light incident from the back surface (transmission inspection) In the second invention of the present application, a stage that can hold the front and back of the color filter substrate in a reversible manner is provided, and the color filter substrate is provided with a coloring layer or Since the light source that irradiates the inspection light from the outer periphery of at least one side of the color filter substrate is approximately parallel to the film surface when the surface on which the transparent electrode is formed (film surface) is held toward the operator side, A film surface reflection inspection is possible, and since a light source that emits inspection light from the surface (rear surface) opposite to the film surface is arranged, transmission inspection becomes possible, and when the rear surface is held facing the operator side. , Above or Since using a light source which irradiates an inspection light from the trader on the back surface are possible back reflection inspection, visual inspection of all defects mentioned above it becomes possible.

In the third invention of the present application, two arms of the substrate transfer robot are provided, one is dedicated to the transfer of the uninspected color filter substrate and the other is dedicated to the transfer of the inspected substrate to hold the uninspected substrate. In this state, the inspected substrate can be unloaded from the stage in the standby state, and the uninspected substrate can be loaded into the stage immediately afterwards, so the waiting time associated with substrate exchange in automatic substrate transfer can be shortened. You can

In the fourth aspect of the present invention, since two sets of stages (two workers) share one substrate transfer robot, the play time of the substrate transfer robot is reduced,
It is possible to reduce the cost of the inspection device and save space.

In the fifth invention of the present application, the defect level information in the previous step is read to determine whether or not the defect level exceeds the allowable value. If the defect level exceeds the allowable value, it is transferred to the stage of the color filter substrate. By skipping the inspection without transporting the defective parts, or by displaying the defective part, the operator is notified that the defective part may be skipped. Can be improved.

In the sixth invention of the present application, the defect level information of the previous process can be updated based on the inspection result. Therefore, by using this information in the subsequent defect selection process, the efficiency of defect selection can be improved. Automation is possible.

In the seventh invention of the present application, the cassette in which the uninspected color filter substrate is stored and the cassette in which the inspected color filter substrate can be stored are the same cassette, and the uninspected color filter substrate in the cassette is extracted. By returning the inspected color filter substrate to the position, the inspection device can be made more compact.

[0026]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The details of the present invention will be described below with reference to the drawings. First Embodiment FIG. 1 is a perspective view conceptually showing a first embodiment of the present invention. In order to avoid a complicated description, a mechanism for holding the color filter substrate and a mechanism for finely adjusting the angle of the stage are omitted in FIG. 1, which will be described later in the second embodiment. It shall be. Figure 1
In the above, the color filter inspection apparatus 1 is provided with the stage 2 for holding the color filter substrate 10
When the colored layer 11 of the color filter substrate 10 is held toward the operator side, the colored layer 11 is linearly arranged over the entire width of the colored layer 11 on the outer periphery of one side of the upper end of the color filter substrate 10, and is formed on the film surface of the colored layer 11. A film surface reflection inspection light source 3 for irradiating inspection light is arranged substantially in parallel.

Stage 2 is, in this embodiment, xx '.
A substrate holding plate 15 rotatable about the yy ′ axis is attached to an arm 14 rotatable about an axis, and the color filter substrate 10 can be held by a substrate holder (not shown) provided on the substrate holding plate 15. Is configured as follows. If biaxial rotation is enabled as in this embodiment,
It is preferable that the angle of the color filter substrate can be adjusted to obtain the illumination condition in which the defect is most easily detected by the operator.

The film surface reflection inspection light source 3 guides the light from the metal halide lamp or the xenon lamp 16 through the optical fiber 17, and forms a linear illumination light source using a light guide path or the like. Further, a cylindrical lens 18 is provided at the emitting portion of the inspection light, and by this, the inspection light is condensed and collimated to improve the light use efficiency. The film surface reflection inspection light source 3 may be attached to the substrate holding plate 15 of the stage 2, or attached to an arm whose position and angle can be changed, and the inspection light is emitted substantially parallel to the colored layer film surface of the color filter substrate at the time of inspection. You may arrange | position so that it may irradiate. In this embodiment, the light source 3 for film surface reflection inspection is arranged only on the outer periphery of one side above the color filter substrate 10. However, if necessary, the opposite side, three sides, or four sides.
You may add to the side.

In this embodiment, when performing a reflection test on the film surface of the colored layer 11 and the transparent electrodes formed thereon, the color filter substrate 10 is placed by the stage 2 so that the film surface 12 of the operator faces up. The inspection light emitted from the film surface reflection inspection light source 3 is irradiated substantially parallel to the film surface of the colored layer 11 or the transparent electrode. In this state, the worker 20 observes the film surface on the color filter substrate 10 obliquely from above and inspects for defects. For example, when a colored layer in which a pigment is dispersed in a transparent resin is formed, conventionally, scattering of inspection light due to minute irregularities on the surface of the colored layer made it difficult to detect defects, but in the present invention, Since the inspection light is radiated almost parallel to the film surface, the inspection light due to the minute irregularities is unlikely to scatter, and even if scattering occurs, the scattered light is hard to be visually recognized by the operator. If there is 21,
The discovery becomes extremely easy.

Embodiment 2 FIG. 2 is a perspective view conceptually showing a second embodiment of the present invention. In order to avoid a complicated description, a mechanism for holding the color filter substrate and a mechanism for inverting the stage are omitted in FIG. 2, which will be described later. In FIG. 2, when the color filter inspection apparatus 1 holds the colored layer 11 of the color filter substrate 10 toward the operator side indicated by the arrow, with respect to the stage 2 for holding the color filter substrate 10, The color filter substrate 10 is linearly arranged over the entire width of the colored layer 11 on one side of the upper end of the colored layer 1.
1. A film surface reflection inspection light source 3 that irradiates inspection light substantially parallel to the film surface of No. 1 and a back surface 13 of a surface 12 (front side in the figure) on which the colored layer 11 of the color filter substrate 10 and transparent electrodes are formed. When the transmission inspection light source 4 for irradiating light from the side and the color filter substrate 10 are held with the back surface 13 of the surface 12 on which the colored layer 11 is formed facing toward the worker side, from above or from the worker side. The rear surface reflection inspection light source 5 for irradiating the rear surface with light is arranged and configured.

Stage 2 is, in this example, xx '.
A substrate holding plate 15 rotatable about the yy ′ axis is attached to an arm 14 rotatable about an axis, and the color filter substrate 10 can be held by a substrate holder (not shown) provided on the substrate holding plate 15. Is configured as follows. Therefore, the stage 2 is the color filter substrate 1
It has a biaxial rotation mechanism so that 0 can be rotated. In the present invention, it suffices if the front and back of the color filter substrate can be reversed, for example, it can rotate on either the xx ′ axis or the yy ′ axis. It is preferable to make it possible to adjust the angle of the color filter substrate and obtain the illumination condition in which the operator can most easily detect the defect. As the film surface reflection inspection light source 3, the same light source as that used in Example 1 can be used by the same installation method.

As the light source 4 for transmission inspection, it is preferable to irradiate light from a fluorescent lamp or the like through a white diffuser plate, and a so-called color viewer or a surface using a light guide path, a light guide plate or the like for the light of the fluorescent lamp. A light source, a surface light source using EL, or the like can be used. It is preferable to use an area of the transmission inspection light source 4 that is large enough to inspect the end portion of the color filter substrate 10. The transmission inspection light source 4 is used when the front and back of the color filter substrate are reversed.
If it is necessary to provide it at a position where it does not interfere with the stage 2, or if it is necessary to further improve the brightness of the illumination, it is necessary to provide a mechanism that retracts to the rear part when the stage rotates and approaches the color filter substrate 10 during the transmission inspection. There is.

A light projector using a halogen lamp or the like is used as the light source 5 for the back surface reflection inspection, and the back surface of the color filter substrate 10 with the back surface 13 turned to the operator with the color filter substrate 10 inverted. It is installed above the stage 2 so as to be able to illuminate 13 or near the position of the eyes (head) of the operator as necessary.

FIG. 3 is a diagram showing a mode of visual inspection of a color filter substrate using the color filter inspection apparatus of the second embodiment. FIG. 3 (a) shows a film surface reflection inspection, and FIG. 3) shows a transmission inspection, and FIG. 3C shows a back surface reflection inspection. In FIG. 3A, when the reflection layer 11 and the film surface of the transparent electrode or the like formed thereon are subjected to the reflection inspection, the color filter substrate 10 is moved by the stage 2 so that the film surface 12 is faced up to the operator. The inspection light emitted from the film-surface reflection inspection light source 3 is held in an inclined state, and is irradiated substantially parallel to the colored layer 11 or the film surface of the transparent electrode. In this state, the worker 20 observes the film surface on the color filter substrate 10 obliquely from above and inspects for defects. This is similar to the inspection described in the first embodiment.

Next, in FIG. 3B, when the transmission inspection of the color filter substrate 10 is performed, the color filter substrate 10 is held by the stage 2 in a state in which the film surface 12 is inclined with respect to the operator. The inspection light emitted from the transmission inspection light source 4 (color viewer) passes through the transparent substrate from the rear surface 13 of the color filter substrate 10, and further through the colored layer 11 and the transparent electrode of the film surface 12, It is visually recognized by an operator who is observing the color filter substrate 10 from obliquely above, and for example, when dirt 22 is attached to the film surface 12, it is recognized as a defect by weakening the transmitted light. Here, the transmission inspection light source 4
Is retracted rearward (on the left side in the drawing) so as not to hinder the rotation of the stage 2 when not in use, but is configured to move forward with respect to the color filter substrate 10 when a transmission inspection is performed.

Further, in FIG. 3C, when inspecting the back surface 13 of the color filter substrate 10 on which the colored layer is not formed, the color filter substrate 10 is subjected to the above-mentioned film surface reflection inspection or transmission inspection by the stage 2. The back surface 1 is reversed from the state and is held in a state of being inclined with the back surface 13 facing upward with respect to the operator, and the back surface 1 is generated by the inspection light emitted from the back surface inspection light source 5 arranged above the operator.
The whole 3 is illuminated. In this state, the worker 2
0 is the back surface 13 of the color filter substrate 10 from diagonally above.
And inspect for defects.

Switching of the light source used for these various inspections is performed by providing a "membrane surface reflection" switch, a "transmission" switch, and a "rear surface reflection" switch on the operation panel, and operating them by an operator. You can do this. Further, when performing the film surface reflection inspection, in addition to the film surface reflection inspection light source 3, the back surface reflection inspection light source 5 is also turned on to illuminate the film surface, thereby improving the efficiency of defect detection. In some cases, it is desirable to be able to select the combination of each light source.

FIG. 4 shows the stage 2 in the second embodiment.
It is a perspective view explaining the detail of. Stage 2 is x-
A substrate holding plate 15 rotatable about the y-y 'axis is attached to the arm 14 rotatable about the x'-axis, and the substrate holding plate 15 is provided with an opening so as to face the color filter substrate 10. In order to hold the two sides, two substrate holders 31 that are attachable to and detachable from the color filter substrate 10 are provided toward the inside of the opening, two groups per side. The tip of the substrate holder 31 has a V-groove shape, and the contact area with the color filter substrate 10 is made as small as possible to prevent the occurrence of contamination and the like. The substrate holding plate 15 is rotated by the power of the pulse motor 33 transmitted by a belt 35 that connects the gear 32 provided at one end of the rotation shaft to the gear 34 attached to the pulse motor 33, and the color filter substrate 10 is rotated. Is reversed and a small angle is adjusted. Also,
The arm 14 is also provided with a gear 36 at one end of its rotation shaft, and is rotated by transmitting power from a motor (not shown) through a belt 37. These rotations are performed by the operator operating a switch or joystick provided on the operation panel to transmit a control signal to the motor, and in particular, inversion of the color filter substrate 10 is performed.
If a reversing switch is provided so that the reversing switch is operated to automatically reverse the reversing switch, workability is improved. As the stage 2 in the first embodiment, the same one as the stage in this embodiment can be used. In the first embodiment, since the color filter substrate 10 is not inverted, the rotation range of the xx ′ axis or the yy ′ axis may be limited to a range sufficient for angle adjustment.

The transfer of the color filter substrate to the stage 2 is preferably performed by a substrate transfer robot. In FIG. 4, the substrate transfer robot 41 includes a substrate holding chuck 44,
A first arm 42 and a second arm 43, which are provided with 45 and are extendable and retractable in the front-rear direction, are attached vertically with a predetermined interval, and both the first arm 42 and the second arm can move up and down and can swivel. , Is mounted on a support base (not shown). Suction holes 46 for vacuum-sucking the color filter substrate 10 are provided on the upper surfaces of the substrate holding chucks 44 and 45. The operation of the substrate transfer robot will be described in detail in the third embodiment.

Embodiment 3 FIG. 5 is a plan view conceptually showing a third embodiment of the present invention. In FIG. 5, a color filter inspection device 101
Centering around the turning axis of the substrate transfer robot 141, a cassette 150 that can store a plurality of untested color filter substrates, a cassette 151 that stores inspected color filter substrates, and a stage 102 are arranged. In the transfer robot 141, two robot arms, which can be extended and retracted forward and backward, are mounted on a support base 147 that can be swung and can be raised and lowered at a predetermined interval with the first arm 142 as the upper side and the second arm 143 as the lower side. Each arm is provided with a substrate holding chuck 144, 145 at the tip thereof, and the color filter substrate 10 is attached by vacuum suction.
Is chucked and conveyed. On the stage 102, the light source for film surface reflection inspection is arranged as described in the first embodiment, or as described in the second embodiment, the light source for film surface reflection inspection, the light source for transmission inspection, and the back surface reflection inspection. A light source is arranged.

An example of the operation of the substrate transfer robot 141 when the color filter substrate 10 is transferred is shown below. Here, the position of the substrate holding chuck of each arm is
A: position of uninspected color filter substrate cassette 150, B: standby position retracted from uninspected color filter substrate cassette 150, C: position of inspected color filter substrate cassette 151, D: retracted from uninspected color filter substrate cassette 151 The standby position is indicated by E, the position of the stage 102 is indicated by E, and the standby position retracted from the stage 102 is indicated by F. Step 1st arm 2nd arm (1) Initial state B Initial state B (2) Ascending B Ascending B (3) Stopping B Forwarding A (4) Ascending B Ascending A (5) Stopping B Uninspected substrate chuck A (6) Ascending B Ascending A (7) Stopping B Retreating B (8) Descent B descending B (9) Turning F Turning F (10) Forward E Stopping F (11) Ascending E Ascending F (12) On-stage tested E Stopping F Chuck the board (13) Down E Down F (14) Backward F Forward E (15) Up F F Up E (16) Stop F Place the uninspected board on the stage E. (17) Down F Down E (18) Stop F Backward F (19) Swing D Swing D (20) Up D Swing D (21) Forward C Stop D (22) Down C Down D (23) C Stop D Enter (24) Ascend C Ascend D (25) Retreat D Stop D (26) Turn (to initial state) B Turn (to initial state) B In the above operation, from step 19 to the next step 9 Is performed during the inspection on the stage, and from step 10 to step 17, the inspection on the stage is stopped because the color filter substrate is replaced. The retreat of the inspected color filter substrate by the first arm from step 10 to step 14 is performed in a standby state with the uninspected color filter held by the second arm, so that it starts at the same time as the retreat of the first arm. Loading of the uninspected color filter on the stage by the second arm (steps 14 to 18) can be performed very quickly, and the time loss associated with substrate replacement can be reduced. In this embodiment, the first arm is exclusively used for exiting the inspected color filter substrate, and the second arm is exclusively used for mounting the uninspected color filter substrate, but it is of course possible to use these interchangeably. is there. Also,
The case where the uninspected color filter substrate cassette 150 and the inspected color filter substrate cassette 151 are separate bodies has been described, but these are regarded as the same cassette, and the same color filter substrate in the cassette is removed at the same position. If the color filter substrate is returned after the inspection is completed, the device can be made compact and it is effective in saving space.

Fourth Embodiment FIG. 6 is a diagram for explaining a fourth embodiment of the present invention. In FIG. 6, a color filter inspection device 201 includes a cassette 250 capable of accommodating a plurality of uninspected color filter substrates, centering around a turning axis of a substrate transfer robot 241.
Cassette 25 for storing the inspected color filter substrate
One or two sets of stages 202 and 202a are arranged. Since the configuration of the transfer robot 241 is the same as that of the second embodiment, its explanation is omitted. Transfer robot 241
Is basically the same as that of the second embodiment, but the color filter inspection device has two sets of stages 202, 202.
In addition, a "board exchange" switch is provided on the operation panel used by each worker so that the inspection can be performed by two workers, and the operator who has issued the signal for requesting the substrate exchange by pressing the switch first Substrate exchange is performed on the stage.
By thus sharing the transfer robot between the two sets of stages, even during the inspection of the color filter substrate, which takes a relatively long time, the transfer robot is less likely to play, and the space and cost of the device can be saved. Is also effective. Further, the uninspected color filter substrate cassette 250 and the inspected color filter substrate cassette 251 may be the same cassette.

Fifth Embodiment FIG. 7 is a block diagram of a transport control system for a color filter substrate, which illustrates a fifth embodiment of the present invention. In FIG. 7, the conveyance control system 300 includes an optical reading unit 360,
Data storage means 370, control means 380, display means 39
The control means 380 stores a program executed by a central control unit (hereinafter referred to as CPU) 381, an optical reading means control circuit 382, a transfer robot control circuit 383, a display means control circuit 384, and a CPU 381. The optical reading means 360 is connected to the CPU 31 via the optical reading means control circuit 382, and the display means 39 is included.
0 is connected to the CPU 381 via the display control circuit 384, and the external transfer robot 341 is connected to the CPU 381 via the transfer robot control circuit 383. FIG. 8 is a flowchart showing the procedure realized by executing the program stored in the program memory 385 by the CPU 381.

The optical reading means 360 is for optical reading of a bar code or the like provided in an uninspected color filter substrate cassette 350 that contains a plurality of uninspected color filter substrates conveyed to the color filter inspection device. The information 361 is read, and various line sensors and hologram scanners can be used.
The optical reading unit 360 is connected to a central controller 381 (hereinafter referred to as CPU) in the control unit 380 via an optical reading unit control circuit 382, and the uninspected color filter substrate cassette 350 is mounted at a predetermined position. Then, the reading of the optical reading information 361 attached to the cassette 350 is started. (S1) Further, the CPU 381 is connected to the data storage means 370, and the data storage means 370 includes a server 375 including a host computer that controls the color filter production line and a LAN (Local Area Ne).
The CPU 381 reads information (cassette information) about the cassette 350 corresponding to the read optical reading information 361 and stores the information in the data storage unit 370. (S2) The cassette information is information about each color filter substrate stored in the cassette 350, and the substrate number, the substrate size, and the product type that indicate which substrate in the cassette the color filter substrate is. ,Lot number,
The defect level information is related to the defects found in the previous process.The defect level information includes information such as the type, degree, and quantity of defects in the entire color filter substrate, and the color filter substrate divided into predetermined areas. Information such as the type, degree, and quantity of defects in the area is included. In this example,
When a plurality of color filters are attached to one substrate in a multi-faceted manner, it is divided into regions corresponding to the respective multi-faceted color filters, and the type, degree of defects in each region,
It contains a number of information.

Next, the CPU 381 first determines from the first color filter substrate (substrate number 1) whether or not the defect level information of the color filter substrate is within the range of the required specifications. Specifically, this determination process is performed in two stages. For example, taking the case of processing the n-th (filter number n) color filter substrate in the cassette 350 as an example, in the determination process of the first stage, the degree of defect or the defect of the entire color filter substrate of the substrate number n. Whether or not the number is within the range of a predetermined preset allowable value is determined according to the type of defect. (S3) In the first-stage determination, if the defect level is within the allowable range, then the second-stage determination processing is performed in S4. When the defect level exceeds the allowable value, the color filter substrate of the substrate number n is not transported to the stage, and the transport robot 341 is driven to transport the color filter substrate to the inspected color filter cassette and store it. Perform (S5), then the board number (n +
The procedure moves to the first-stage determination processing for 1).

In the second-stage judgment processing, for each area divided into a predetermined area in the color filter substrate of the board number n, the degree of defects contained in the area or the number of defects is within a predetermined allowable range. It is determined whether or not it is within the range according to the type of defect. (S6) Here, it is assumed that the color filter substrate of substrate number n has four color filters attached thereto and is divided into regions A, B, C, and D corresponding to the respective color filters. For each of A, B, C, and D, it is determined whether the degree of defects or the number of defects is within a range of a predetermined allowable value. (S7) When the defect levels in all the areas are within the allowable range, the CPU 381 drives the transfer robot 341 by the transfer robot control circuit 383 to drive the cassette 350.
The color filter substrate with the substrate number n in the inside is taken out from the cassette and made to stand by (S8), and the operator operates the operation panel 4
The color filter substrate is placed on the stage after waiting for a signal from 00 to request placing the substrate on the stage (S9). (S10) Further, for example, when only the number of defects in the area A exceeds the allowable value and the defects in the areas B, C, and D are within the allowable value range, the CPU 381 causes the transfer robot control circuit 383 to cause the transfer robot to operate. 341 is driven to take out the color filter substrate of the substrate number n in the cassette 350 from the cassette and make it stand by (S11).
Waiting for a signal requesting that the substrate be mounted on the stage from 0 (S12), the color filter substrate is mounted on the stage (S14), and the display means control circuit 384 displays a liquid crystal display or the like. The position corresponding to the area A on the means 390 is displayed. (S
13) With this, the operator can confirm that the area A of the color filter substrate is already defective and does not need to be inspected.

The color filter substrate placed on the stage was visually inspected as described above, and defect level information such as the type, degree, and quantity of defects newly found here was recorded on the operation panel. Input from the input device to add and update the cassette information in the data storage means 370. (S15, S16) Next, the board number (n +
The process shifts to 1). In this way, the cassette 35
When the processing is repeated for all the color filter substrates in 0 (S17), the updated cassette information is saved in the virtual disk of the server 375 or the information recording medium of the communication personal computer. (S18)

In this embodiment, all defective color filter substrates are also transported to the inspected cassette and sent from the inspection step to the next defect selection step. The non-defective product and the defective product in the defect selection process can be sorted without human intervention by using a sorting robot that operates based on the updated cassette information.

[0049]

According to the color filter inspection apparatus of the first invention of the present application, the scattering of the inspection light due to the unevenness of the colored layer can be suppressed, and the defect such as the protrusion can be easily extracted. In addition to the effect of the first invention, the color filter inspection device of the second invention of the present application enables visual inspection of all the defects occurring in the color filter without complicated manual work. In addition to the effects of the first or second invention, the color filter inspection device of the third invention of the present application can automate the transportation of the color filter substrate and can speed it up. The color filter inspection device of the fourth invention of the present application can realize space saving and cost reduction in addition to the effects of the first to third inventions. In addition to the effects of the first to fourth inventions, the color filter inspection apparatus of the fifth invention of the present application improves the inspection efficiency by automatically and easily identifying and omitting the inspection of the color filter to be removed as a defect obviously. can do. In addition to the effect of the fifth invention, the color filter inspection device of the sixth invention of the present application can provide defect information that facilitates defect selection in a subsequent process. The color filter inspection device of the seventh invention of the present application can realize space saving in addition to the effects of the third to sixth inventions.

[Brief description of drawings]

FIG. 1 is a perspective view conceptually showing a first embodiment of the present invention.

FIG. 2 is a perspective view conceptually showing a second embodiment of the present invention.

FIG. 3 is a diagram showing an aspect of a visual inspection using the inspection apparatus of the second embodiment.

FIG. 4 is a diagram illustrating details of a stage according to a second embodiment.

FIG. 5 is a plan view conceptually showing a third embodiment of the present invention.

FIG. 6 is a diagram illustrating a fourth embodiment of the present invention.

FIG. 7 is a block diagram of a transfer control system according to a fifth embodiment of the present invention.

FIG. 8 is a flow chart showing a procedure of a program executed in a fifth embodiment.

[Explanation of symbols]

1, 101, 201 Color filter inspection device 2, 102, 202, 202a Stage 3 Light source for film surface reflection inspection 4 Light source for transmission inspection 5 Light source for back surface reflection inspection 10 Color filter substrate 11 Colored layer 12 Film surface (formation of colored layer) 13) Rear surface (back surface of the surface on which the colored layer is formed) 14 Arm 15 Substrate holding plate 20 Worker 31 Substrate holders 41, 141, 241 Substrate transfer robot 42, 142 First arm 43, 143 Second arm 44, 45, 144, 145 Substrate holding chuck 147 Supports 150, 250, 350 Uninspected color filter substrate storage cassettes 151, 251 Inspected color filter substrate storage cassette 300 Conveyance control system 360 Optical reading means 361 Optical reading information 370 data Storage means 375 server (upper computer Tha) 376 LAN 380 control unit 381 CPU 382 optical reading means control circuit 383 carrying robot controller 384 display unit control circuit 385 program memory 390 display unit 400 operation panel

Continuation of front page (56) Reference JP-A-5-99787 (JP, A) JP-A-64-12211 (JP, A) JP-A-58-106444 (JP, A) Special table 63-503244 (JP , A) (58) Fields investigated (Int.Cl. ⁷ , DB name) G01N 21/84-21/958 G01M 11/00

Claims (7)

(57) [Claims] 1. A color filter inspecting apparatus for visually inspecting a color filter substrate, in which at least a colored layer is formed on the substrate, which is held by a stage holding the color filter substrate. A color filter inspection device, wherein a film surface reflection inspection light source is arranged linearly on the outer periphery of at least one side of the color filter substrate and irradiates inspection light substantially parallel to the film surface of the colored layer. 2. A color filter inspecting device for visually inspecting a color filter substrate having at least a colored layer formed on the substrate for defects, which comprises: Then, when the color filter substrate is held so that the surface on which the colored layer is formed faces the operator side, the color filter substrate is linearly arranged on the outer periphery of at least one side of the color filter substrate. A film surface reflection inspection light source that irradiates inspection light substantially in parallel, a transmission inspection light source that irradiates light from the back surface side of the surface of the color filter substrate on which the colored layer is formed, and a surface on which the colored layer is formed. And a rear surface reflection inspection light source that irradiates the rear surface with light from above or from the worker side when holding the color filter substrate so that the rear surface faces the worker side. Color filter inspection device characterized by 3. A first arm for transporting an uninspected color filter substrate from a cassette containing a plurality of uninspected color filter substrates to a stage, and an inspected cassette capable of accommodating a plurality of inspected color filter substrates from the stage. The second arm for transporting the color filter substrate is equipped with a substrate transport robot mounted on a swivelable support, and the first arm holds the uninspected color filter substrate and stands by while the second arm moves. 3. The color filter inspection device according to claim 1, wherein the inspected color filter substrate is taken out, and immediately after that, the first arm conveys the uninspected color filter substrate to the stage. 4. A substrate transfer system comprising two sets of stages on which the inspection light source is arranged, a cassette storing the two sets of stages, an untested color filter substrate, and a cassette capable of storing an inspected color filter substrate. 4. The substrate transfer robot is arranged around the robot, and the substrate transfer robot is shared by two sets of stages .
The color filter inspection device described in one . 5. A board number corresponding to each color filter board in the cassette corresponding to optical reading information provided for each cassette containing a plurality of untested color filter boards, and a board number corresponding to this board number. The data storage means for storing the defect level information up to the preceding step, the optical reading means for reading the optical reading information provided in the cassette, and the one corresponding to the substrate number according to the read optical reading information. Read the defect level information, and the defect level of the entire color filter substrate in the defect level information for each color filter substrate,
It is judged whether the defect level in each area where the color filter substrate is divided into a predetermined area exceeds a predetermined allowable value. If the overall defect level exceeds the allowable value, the color filter of the substrate number If the substrate is not transported to the stage and it is within the allowable value, the color filter substrate corresponding to that substrate number is transported to the stage by the transport robot, and one of the above-mentioned sections in the color filter substrate transported to the stage is transported. Control means for displaying the position of the divided area when the defective level of the area exceeds the allowable value, and display means for displaying the position of the divided area having the defective level exceeding the allowable value. color filter inspection apparatus according to one of any claims 1 to 4, further comprising a. 6. A means for inputting defect level information, and means for updating the defect level information up to the previous process stored in the data storage means by the inputted defect level information. Item 5. The color filter inspection device according to item 5. One any one of claims 7 to the claims 3, characterized in that the inspected color filter substrate and cassette uninspected color filter substrate is accommodated storable cassette is identical cassette 6 the color filter inspection apparatus according to.