JP3394367B2 - Jig for aligning groove direction of groove of wafer support - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a groove alignment jig for a groove rod of a quartz glass wafer support that supports a semiconductor wafer such as a silicon wafer.

[0002]

[Related Art] Various types of heat treatment processes (eg, thermal diffusion, thermal oxidation processes, etc.) for silicon wafers (also called silicon substrates) are currently often supported by high-purity quartz glass wafers, which are usually called "vertical boats". The ingredients are used.

As shown in FIG. 4, this wafer support 2
Is a plurality (4 in the illustrated example) between the top plate 4 and the bottom plate 5.
Groove rods 6a, 6b, 6c and 6d are installed at designed intervals, and a large number of grooves 8a for mounting and locking dozens of wafers are mounted on these groove rods 6a to 6d. 8
b, 8c, 8d are formed.

Since the wafer W has a structure in which the four groove rods 6a to 6d are locked substantially horizontally by the grooves 8a to 8d of the same height, dozens of grooves provided on each of the groove rods 6a to 6d. 8a-8d must have high dimensional accuracy in common with the four groove rods 6a-6d. Further, in addition to this, it is necessary that the four groove rods 6a to 6d be welded and fixed to the top plate 4 and the bottom plate 5 made of quartz glass with extremely accurate orientation and with high accuracy.

It is extremely important to accurately determine the mutual positions of the groove rods 6a to 6d of the wafer support 2 and the positions of the grooves 8a to 8d. Therefore, a temporary welding step is performed before welding the upper and lower end portions of the groove rods 6a to 6d to the top plate 4 and the bottom plate 5, and before and after this temporary welding step, the respective grooves 8a to 8d are formed.
Work was being done to accurately determine the direction of d. In the conventional groove alignment work, each groove is positioned by using a carbon dummy wafer and a positioning thin thin plate.

Two inner groove rods 6b and 6c in FIG.
The positioning of the grooves 8b and 8c is performed using the tip portion of the dummy wafer. Also, the two outer groove bars 6 in FIG.
Positioning of the grooves 8a and 8d of a and 6d is performed by confirming that the heights of the grooves 8a and 8d of the two groove rods 6a and 6d are the same using a thin plate.

As described above, when two jigs are used as the groove alignment jig for the groove rod, the jigs need to be replaced each time, and the groove alignment work is also performed twice with a certain time. Since it is unavoidable, the position of the groove often changes and it is necessary to repeat the process (if a disagreement in groove direction is found after temporary welding, it is necessary to remove the temporary welding. However, there is a problem in that the work is time-consuming and the accurate groove direction alignment is difficult.

[0008]

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems of the prior art. One jig is used to set the groove positions of a plurality of groove rods once without any time delay. It is an object of the present invention to provide a novel jig for aligning the groove rod of a wafer support, which enables reliable and quick groove aligning work of the groove rod.

[0009]

In order to solve the above problems, the present invention provides a plurality of groove rods between a top plate and a bottom plate, and mounts and locks a wafer on the groove rods. Is a jig for aligning a groove rod of a wafer supporting tool in which a large number of grooves are formed, and a main plate having a peripheral portion having a thinness that can be inserted into the groove of the groove rod, and sliding on the main plate. It is characterized by comprising an elongated slide plate which is provided so that at least both ends thereof can be inserted into the groove of the groove rod.

The main plate has a thick flat portion provided in a central portion, a thin peripheral portion formed around the thick flat portion and having a plurality of thin side portions at a predetermined angle, and the thin flat portion. The slide plate has one or more guide grooves perforated in the base plate, and the slide plate has a long thin plate-shaped slide plate main body whose both ends in the longitudinal direction have a predetermined angle, a protrusion provided in the lower surface longitudinal direction, and an upper surface. A knob provided on the slide plate, and by slidably fitting the protrusion in the guide groove, the slide plate can slide on the upper surface of the thick flat portion of the main plate. Yes, the thin side portion or the end of the slide plate body in the longitudinal direction is inserted into the groove of the groove rod, and the groove of the groove rod is adjusted according to the angle of the thin side portion or the angle of the longitudinal end of the slide plate body. It is preferable to perform the alignment.

If the multi-sided main plate is a five-sided or six-sided main plate and has five or six thin side portions, a wafer support using four groove bars. It is suitably used in the groove direction alignment work of each groove rod in.
Examples of the material of the main plate and the slide plate include carbon, silicon carbide, silicon, and other ceramics.

[0012]

DETAILED DESCRIPTION OF THE INVENTION One embodiment of the present invention will be described with reference to the accompanying drawings.

In FIGS. 1 and 2, reference numeral 96 denotes a carbon groove alignment jig, which is a groove rod 6a to 6a of the wafer support 2.
The 6d grooves 8a to 8d are aligned. The groove direction aligning jig 96 is composed of a main plate 98 and a slide plate 100. The main plate 98 has a thick flat portion 102 provided in the central portion and a thin peripheral edge portion 104 formed around the thick flat portion 102.

The thin peripheral edge portion 104 has a polygonal shape (hexagonal shape in the illustrated example) having a plurality of (six in the illustrated example) thinned side portions 104a to 104f having a predetermined angle. Reference numeral 105 is a guide groove, which is thin side portions 104b and 104f.
And is formed in parallel with the thin side portion 104a.

The slide plate 100 is provided in the longitudinal direction of an elongated slide plate body 106 having both ends in the longitudinal direction at a predetermined angle and a length smaller than the width of the main plate 98, and the lower surface of the slide plate body 106. It has a protrusion 108 and a knob 110 provided on the upper surface. The slide plate 100 is slidably fitted into the guide groove 105 so that the slide plate 100 can be inserted into the thick flat portion 1 through the guide groove 105.
Slide on the upper surface of 02. The end of the slide plate 100 is
The thin side portions 104b and 104f of the main plate 98 are slidable further outward from the edge portions.

When the groove rods 6a to 6d are aligned in the groove direction, the groove alignment jig 96 allows the thin peripheral edge portion 104 of the main plate 98 to be inserted into the grooves 8a to 8d of the groove rods 6a to 6d. Must be located and placed.

Therefore, the thin peripheral portion 104 of the main plate 98
The distance between the edge of b and the edge of 104f is determined by the groove rod 6
It is necessary to be smaller than the distance between the groove bottoms of the grooves 8a and 8d of a and 6d and larger than the distance between the facing surfaces of the groove rods 6a and 6d.

The groove direction aligning jig 96 is used to align the groove directions of the two inner groove rods 6b and 6c as follows. Of the thin side portions 104a to 104f of the main plate 98, the thin side portions 104c and 104e at the tips are inserted so as to abut the groove bottoms of the grooves 8b and 8c of the two inner groove rods 6b and 6c, respectively. At the same time, the thin side portions 104b and 104f of the side end portions are inserted into the grooves 8a and 8d of the two outer groove bars 6a and 6d, respectively. In this state, the set angles of the thin side portions 104c and 104e and the groove 8
The groove rods 6b and 6b so that the angles of the groove bottoms of b and 8c are the same.
The groove direction is aligned by rotating c.

On the other hand, although the thin side portions 104b and 104f are located in the grooves 8a and 8d, the thin side portions 104 are
The tips of b and 104f are not in contact with the groove bottoms of the grooves 8a and 8d. Therefore, in this state, the two outer groove rods 6
The groove directions of a and 6d cannot be aligned.

Therefore, the slide plate 100 is attached to the thin side portion 1
04a slidable in parallel with the thin side parts 104b, 10
4f is provided so as to be able to extend outward from the edge portion, and one end portion of the slide plate 100 is inserted so as to abut on the groove bottom of the groove 8a of the groove rod 6a. The groove direction is adjusted by rotating the groove rod 6a so that the groove and the groove bottom of the groove 8a coincide with each other. Groove rod 6d
On the other hand, by sliding the slide plate 100 and inserting the other end into the groove 8d, the groove direction can be aligned by the same operation.

In this case, the grooves 8a, 8d of the groove bars 6a, 6d
The positions of the grooves 8a and 8d used for the groove direction alignment are set above the groove positions where the thin side portions 104c and 104e are inserted for the groove direction alignment of the grooves 8b and 8c of the groove rods 6b and 6c. However, depending on the set distance between the thin side portions 104a to 104f and the slide plate body 106, one row or two rows
~ Grooves located three rows above are utilized.

As is apparent from the above description, the groove direction aligning jig 96 having a predetermined shape can be used only for the groove rods 6a to 6d set at a predetermined position, but is set at another position. It cannot be used to align the groove direction of a grooved rod.
Therefore, it is necessary to prepare the groove direction alignment jig 96 for each set position of the wafer support of a predetermined product number, that is, the predetermined groove rod.

In the embodiment shown in FIGS. 1 and 2, an example in which one guide groove 105 is provided has been described, but a plurality of guide grooves may be provided. FIG. 3 shows an example in which two guide grooves 105 and 105a are provided. If a plurality of guide grooves are formed in this manner, the slide plate 10
Since 0 can be installed and slid in the two guide grooves 105 and 105a at different positions, it is possible to perform groove direction alignment of the groove rods set at different positions, and one groove direction alignment jig. In 96, a plurality of product numbers having different groove rod setting positions can be dealt with. The same effect is obtained when three or more guide grooves are provided.

[0024]

As described above, according to the present invention, it is possible to perform the groove positions of the plurality of groove rods of the wafer support at once with one jig without any time delay. Therefore, it becomes possible to surely and quickly perform the groove alignment work of the groove rod.

[Brief description of drawings]

FIG. 1 is a top view showing an embodiment of a groove direction aligning jig of the present invention.

2A and 2B are views separately showing each member of the groove alignment jig shown in FIG. 1, in which FIG. 2A is a top view of a main plate, FIG. 2B is a side view of the main plate, and FIG. A longitudinal direction side view and (d) are width direction side views of the slide plate.

FIG. 3 is a view showing another embodiment of the main plate of the groove orientation jig of the present invention, (a) is a top view and (b) is a side view of the main plate.

FIG. 4 is a perspective view of a wafer support.

[Explanation of symbols]

2 Wafer support 4 Top plate 5 bottom plate 6a to 6d groove rod 8a-8d groove 96 groove alignment jig 98 Main plate 100 slide plate 102 thick flat part 104 Thin peripheral part 104a to 104f Thin side part 105, 105a Guide groove 106 Slide plate body 108 ridges 110 picks W wafer

─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Masatoshi Takeda 1357-3 Fujidan, Kiyoike, Tendo City, Yamagata Prefecture Shinsuke Yamagata Co., Ltd. (56) Reference JP-A-7-130833 (JP, A) ( 58) Fields investigated (Int.Cl. ⁷ , DB name) H01L 21/22

Claims (4)

(57) [Claims] 1. A groove rod of a wafer support, comprising a plurality of groove rods provided between a top plate and a bottom plate, and a plurality of grooves for mounting and locking a wafer are formed on the groove rods. A jig for aligning grooves, which has a main plate having a thin peripheral portion that can be inserted into the groove of the groove rod, and is slidably provided on the main plate and at least both ends can be inserted into the groove of the groove rod. A groove alignment tool for a groove rod of a wafer support, comprising a long slide plate having a small thickness. 2. The main plate, a thick flat portion provided in a central portion, a thin peripheral portion formed around the thick flat portion and having a plurality of thin side portions at a predetermined angle, and the thick wall portion. The slide plate has one or more guide grooves bored in a flat portion, and the slide plate has a long thin plate-like slide plate body having both longitudinal ends at predetermined angles, and a ridge provided in a lower surface longitudinal direction. , And a knob provided on the upper surface, and by slidably fitting the ridge in the guide groove, the slide plate can slide on the upper surface of the thick flat portion of the main plate. The thin side portion or the end portion of the slide plate body in the longitudinal direction is inserted into the groove of the groove rod, and the groove rod is adjusted according to the angle of the thin side portion or the angle of the longitudinal end portion of the slide plate body. 2. The groove direction alignment of the groove rod of the wafer support according to claim 1, wherein the groove direction alignment is performed. Jig jig. 3. The wafer according to claim 2, wherein the polygonal main plate is a pentagonal or hexagonal main plate and has five or six thin side portions. A jig for aligning the groove direction of the groove rod of the support tool. 4. The groove alignment jig for a groove rod of a wafer support according to claim 1, wherein the main plate and the slide plate are made of carbon, silicon carbide or silicon. .