JP3398356B2 - Filtration dehydration apparatus and filtration dehydration method - Google Patents
Filtration dehydration apparatus and filtration dehydration methodInfo
- Publication number
- JP3398356B2 JP3398356B2 JP2000157634A JP2000157634A JP3398356B2 JP 3398356 B2 JP3398356 B2 JP 3398356B2 JP 2000157634 A JP2000157634 A JP 2000157634A JP 2000157634 A JP2000157634 A JP 2000157634A JP 3398356 B2 JP3398356 B2 JP 3398356B2
- Authority
- JP
- Japan
- Prior art keywords
- filter
- filtration
- filtered
- pipe
- water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000001914 filtration Methods 0.000 title claims description 164
- 238000000034 method Methods 0.000 title claims description 36
- 230000018044 dehydration Effects 0.000 title claims description 33
- 238000006297 dehydration reaction Methods 0.000 title claims description 33
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 62
- 238000002347 injection Methods 0.000 claims description 52
- 239000007924 injection Substances 0.000 claims description 52
- 239000007788 liquid Substances 0.000 claims description 34
- 238000004891 communication Methods 0.000 claims description 32
- 239000004744 fabric Substances 0.000 claims description 32
- 239000012065 filter cake Substances 0.000 claims description 31
- 230000008569 process Effects 0.000 claims description 15
- 238000005259 measurement Methods 0.000 claims description 8
- 239000000203 mixture Substances 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 64
- 238000005498 polishing Methods 0.000 description 40
- 208000005156 Dehydration Diseases 0.000 description 23
- 239000010419 fine particle Substances 0.000 description 21
- 239000002245 particle Substances 0.000 description 16
- 239000011362 coarse particle Substances 0.000 description 14
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 13
- 229910052802 copper Inorganic materials 0.000 description 13
- 239000010949 copper Substances 0.000 description 13
- 230000009471 action Effects 0.000 description 10
- 230000008021 deposition Effects 0.000 description 9
- 230000035699 permeability Effects 0.000 description 9
- 238000003756 stirring Methods 0.000 description 9
- 230000004931 aggregating effect Effects 0.000 description 5
- 230000002776 aggregation Effects 0.000 description 5
- 230000008901 benefit Effects 0.000 description 5
- 238000007664 blowing Methods 0.000 description 5
- 238000007517 polishing process Methods 0.000 description 4
- 238000011084 recovery Methods 0.000 description 4
- 238000000926 separation method Methods 0.000 description 4
- 239000002699 waste material Substances 0.000 description 4
- 238000004220 aggregation Methods 0.000 description 3
- 238000009530 blood pressure measurement Methods 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000013505 freshwater Substances 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 238000003825 pressing Methods 0.000 description 3
- 230000001737 promoting effect Effects 0.000 description 3
- 238000011110 re-filtration Methods 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 239000011550 stock solution Substances 0.000 description 3
- 239000005909 Kieselgur Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000006061 abrasive grain Substances 0.000 description 2
- 238000005054 agglomeration Methods 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000000701 coagulant Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 235000019362 perlite Nutrition 0.000 description 2
- 239000010451 perlite Substances 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- 230000005653 Brownian motion process Effects 0.000 description 1
- 238000013019 agitation Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005537 brownian motion Methods 0.000 description 1
- 239000000084 colloidal system Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 239000000706 filtrate Substances 0.000 description 1
- 238000005189 flocculation Methods 0.000 description 1
- 230000016615 flocculation Effects 0.000 description 1
- 239000002440 industrial waste Substances 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000009940 knitting Methods 0.000 description 1
- 239000002346 layers by function Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 150000003071 polychlorinated biphenyls Chemical class 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 238000010019 resist printing Methods 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 239000013049 sediment Substances 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
- 238000003911 water pollution Methods 0.000 description 1
Landscapes
- Filtration Of Liquid (AREA)
Description
【0001】[0001]
【発明の属する技術分野】本発明は濾過脱水装置及び濾
過脱水方法に係り、特にプリント配線基板(以下、「P
CB」という)の製造プロセスにおける整面研磨工程で
生じる排液に対する処理工程に好適であり、濾過脱水装
置の稼動効率や濾布の寿命の向上、及び濾過助剤の節減
を図るための改善に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a filtration / dehydration apparatus and a filtration / dehydration method, and more particularly to a printed wiring board (hereinafter, referred to as "P
(CB)), which is suitable for the treatment process for the waste liquid generated in the surface polishing process in the manufacturing process of "CB"), and to improve the operation efficiency of the filtration / dehydration device, the service life of the filter cloth, and the saving of the filter aid. .
【0002】[0002]
【従来の技術】PCBの製造プロセスにおいては、銅張
積層板に対して感光性レジスト塗布やスクリーン印刷を
行う前に整面研磨工程が介在する。この目的は、予め表
面の銅を研磨しておくことで感光性レジストや配線パタ
ーン印刷材の密着性を良好にし、正確なエッチングが実
行できるようにすることにある。2. Description of the Related Art In a PCB manufacturing process, a surface-polishing step is performed before applying a photosensitive resist or screen printing to a copper clad laminate. The purpose of this is to improve the adhesion of the photosensitive resist and the wiring pattern printing material by polishing the surface of the copper in advance so that accurate etching can be performed.
【0003】その場合、実際の研磨段階と研磨後の洗浄
には多量の清水を必要とし、当然にその使用後の排液に
は研磨された銅の微粒子が混濁している。また、研磨剤
として砥粒を使用するときには、砥粒が破砕された微粒
子も排液中に混濁する。そして、前記研磨工程での排液
に含まれる微粒子は0.1〜50(μm)程度であり、また
微粒子の濃度は50〜100(mg/l)程度で比較的低い
が、その排液の放流は水質汚濁防止法で禁じられてお
り、濾過等によって微粒子の濃度を一定の基準まで低下
させた後に放流することが義務付けられている。In this case, a large amount of fresh water is required for the actual polishing step and the cleaning after polishing, and naturally the polished copper fine particles are turbid in the drainage after use. Further, when using abrasive grains as an abrasive, fine particles obtained by crushing the abrasive grains also become turbid in the discharged liquid. The fine particles contained in the drainage liquid in the polishing step are about 0.1 to 50 (μm), and the concentration of the fine particles is about 50 to 100 (mg / l), which is relatively low. Discharge of water is prohibited by the Water Pollution Control Law, and it is obliged to reduce the concentration of fine particles to a certain standard by filtration and then discharge.
【0004】一方、パーソナルコンピュータや移動電話
機等の広範な普及に伴って、PCBの需要も飛躍的に増
大し、最近では前記の排液の濾過処理装置を24時間フ
ル稼動させる場合も珍しくなく、濾過脱水装置の濾過効
率の向上と自動化及び濾布の長寿命化が望まれている。On the other hand, with the widespread use of personal computers, mobile phones and the like, the demand for PCBs has dramatically increased, and recently, it is not uncommon to fully operate the drainage filtration apparatus for 24 hours. It is desired to improve the filtration efficiency of a filtration / dehydration device, to automate it, and to extend the life of the filter cloth.
【0005】従来から、整面研磨工程の排液処理に係る
濾過脱水装置にも各種の構造のものがあるが、一例とし
て、フィルタープレス式脱水装置の基本構造を濾過脱水
用に転用した装置が適用されている。その濾過脱水装置
は、図7に示されるような構成からなるものである。同
図において、先ず、1,2は側板であり、各側板1,2はそれ
らの間に横架された上下の各フレーム3,4と各ガイド棒5
a,5bによって固定されている。各ガイド棒5a,5bは左右
に横架配置されているが、それらの間には3枚の各濾過
板6,7,8がそれぞれの両側面に形成されたフック(9a,9
b),(10a,10b),(11a,11b)によって各ガイド棒5a,5bに係
止せしめられており、濾過板6は側板1に固定されている
が、他の濾過板7,8はガイド棒5a,5bに案内されて前後方
向へ移動可能になっている。Conventionally, there are various types of filter dehydrators for drainage treatment in the surface-polishing step, but one example is an apparatus in which the basic structure of a filter press type dehydrator is diverted for filter dehydration. Has been applied. The filtration / dehydration device has a structure as shown in FIG. In the figure, first, 1 and 2 are side plates, and each of the side plates 1 and 2 is an upper and lower frame 3 and 4 and a guide rod 5 which are horizontally mounted between them.
It is fixed by a and 5b. The guide rods 5a and 5b are laterally arranged on the left and right, and three filter plates 6, 7 and 8 are formed between them and hooks (9a and 9b) are formed on both side faces thereof.
b), (10a, 10b), (11a, 11b) are locked to the respective guide rods 5a, 5b, the filter plate 6 is fixed to the side plate 1, but the other filter plates 7, 8 are The guide rods 5a and 5b guide it so that it can move in the front-rear direction.
【0006】また、側板2の外側面には油圧シリンダ12
が取り付けられており、その作動ロッド12aは側板2を貫
通して濾過板8に接合された押圧板13に固定されてい
る。したがって、油圧シリンダ12を作動させると濾過板
8を前後に移動させることができるが、各濾過板6,7,8の
フック(9a,9b),(10a,10b),(11a,11b)の間はチェーン(14
a,14b),(15a,15b)で繋がれており、油圧シリンダ12が前
方へ作動ロッド12aを突き出すと各濾過板6,7,8が接合せ
しめられ、逆に、図7のように作動ロッド12aを引き込
むとチェーン(14a,14b),(15a,15b)の長さ相当の距離だ
け各濾過板6,7,8が離隔する。A hydraulic cylinder 12 is provided on the outer surface of the side plate 2.
Is attached, and its operating rod 12a is fixed to a pressing plate 13 which penetrates the side plate 2 and is joined to the filter plate 8. Therefore, when the hydraulic cylinder 12 is operated, the filter plate
8 can be moved back and forth, but between the hooks (9a, 9b), (10a, 10b), (11a, 11b) of each filter plate 6, 7, 8 a chain (14
a, 14b), (15a, 15b) are connected, and when the hydraulic cylinder 12 projects the operating rod 12a forward, the filter plates 6, 7, 8 are joined together, and conversely, they operate as shown in FIG. When the rod 12a is pulled in, the filter plates 6, 7, 8 are separated by a distance corresponding to the length of the chains (14a, 14b), (15a, 15b).
【0007】次に、押圧板13の下側には濾過板7,8の移
動区間側へ横設した容器16が取り付けられているが、こ
れは各濾過板6,7,8から排出される濾過水を受けるため
のものであり、後述のように濾過水は同容器16からプレ
コート槽へ導かれる。尚、17は各濾過板6,7,8から剥離
された濾過ケーキを受けるシューター、18はそのシュー
ター17から落下した濾過ケーキを受けて運搬する台車、
19は各濾過板6,7,8に展設された濾布(後述)に付着した
濾過ケーキを剥離する際に濾布を引張させた状態で振動
を与えるスタンパである。Next, a container 16 is installed below the pressing plate 13 so as to extend laterally to the moving section side of the filter plates 7 and 8. The container 16 is discharged from each of the filter plates 6, 7 and 8. It is for receiving filtered water, and the filtered water is introduced from the container 16 to the precoat tank as described later. In addition, 17 is a shooter for receiving the filter cake separated from each of the filter plates 6, 7, 8 and 18 is a carriage for receiving and carrying the filter cake dropped from the shooter 17,
Numeral 19 is a stamper for vibrating the filter cloth stretched on each of the filter plates 6, 7 and 8 when the filter cake attached to the filter cloth (described later) is peeled off.
【0008】ところで、各濾過板6,7,8は、図8に示す
ように、枠部6a,7a,8aと中央板部6b,7b,8bとからなり、
両側の濾過板6,8は中央の濾過板7との対向面側にのみ凹
部を構成し、中央の濾過板7は両側の濾過板6,8との対向
面側にそれぞれ凹部を構成している。そして、図9(各
濾過板6,7,8の枠部6a,7a,8a同士が接合せしめられた状
態の断面図)も参照して説明すると、各濾過板6,7,8の間
にはそれらの各凹部によって濾過室21,22が構成される
が、各濾過板6,7,8の中央板部6b,7b,8bにおける濾過室2
1,22側には金属製(又は樹脂製)のネット23,24,25,26を
介装させて濾布27,28,29,30が展設されている。ここ
に、ネット23,24,25,26は一定の厚みをもって金属線(又
は樹脂線)を編んだものが適用されるが、多数の孔を穿
設したパンチングボードをスペーサを介して中央板部6
b,7b,8bから離隔させた状態で取り付ける方式や、中央
板部6b,7b,8bに凹凸を施しておく方式等を採用してもよ
く、いずれにしても濾布27,28,29,30の背後に通水層を
構成する方式であればよい。By the way, as shown in FIG. 8, each filter plate 6, 7, 8 is composed of a frame portion 6a, 7a, 8a and a central plate portion 6b, 7b, 8b,
The filter plates 6 and 8 on both sides form recesses only on the surface facing the center filter plate 7, and the center filter plate 7 forms recesses on the surface facing the filter plates 6 and 8 on both sides. There is. Then, referring also to FIG. 9 (a cross-sectional view of the state in which the frame portions 6a, 7a, 8a of the respective filter plates 6, 7, 8 are joined together), a description will be given between the respective filter plates 6, 7, 8 The filter chambers 21 and 22 are formed by the respective concave portions, but the filter chambers 2 in the central plate portions 6b, 7b and 8b of the respective filter plates 6, 7 and 8 are
Filter cloths 27, 28, 29, 30 are spread on the 1, 22 side with metal (or resin) nets 23, 24, 25, 26 interposed. Here, the nets 23, 24, 25, 26 are applied by knitting metal wires (or resin wires) with a certain thickness, but a punching board having a large number of holes is used as a center plate part through a spacer. 6
b, 7b, 8b may be installed in a state of being separated from each other, or a method in which the central plate portions 6b, 7b, 8b are provided with irregularities, etc., and in any case, the filter cloth 27, 28, 29, Any method may be used as long as it forms a water passage behind 30.
【0009】図9に示す閉枠状態では、各濾過板6,7,8
の枠部6a,7a,8aが濾布27,28,29,30の周縁部をシール部
材を介して挟圧しており、濾過室21,22は内面を濾布27,
28,29,30で内張りされた空間となるが、濾過室21に対す
る研磨工程の排液の注入は濾過板6の中央板部6bとネッ
ト23と濾布27を貫通した注入管31を通じて行われ、また
濾過室21と濾過室22は中央板部7bと各ネット24,25と各
濾布28,29を貫通した連通管32によって通じている。
尚、注入管31と連通管32の開口部にはフランジナットが
嵌着され、そのフランジナットによってネットと濾布を
中央板部に狭着している。また、各濾過板6,7,8におけ
るネット23,24,25,26の最下部に対応する位置には排水
孔33,34,35,36が形成されており、ネット23,24,25,26で
構成された通水層に流入した水を下方へ排水させるよう
になっている。In the closed frame state shown in FIG. 9, each filter plate 6, 7, 8 is
The frame portions 6a, 7a, 8a of the filter cloths 27, 28, 29, 30 pinch the peripheral edges of the filter cloths via a seal member, and the filtration chambers 21, 22 have filter cloths 27,
Although the space is lined with 28, 29 and 30, the drainage of the polishing process into the filtration chamber 21 is injected through the center plate 6b of the filter plate 6, the net 23 and the injection pipe 31 that penetrates the filter cloth 27. The filtration chamber 21 and the filtration chamber 22 are communicated with each other by a communication pipe 32 that penetrates the central plate portion 7b, the nets 24 and 25, and the filter cloths 28 and 29.
A flange nut is fitted in the openings of the injection pipe 31 and the communication pipe 32, and the net and the filter cloth are tightly attached to the central plate portion by the flange nut. Further, drain holes 33, 34, 35, 36 are formed at the positions corresponding to the lowermost portions of the nets 23, 24, 25, 26 in each of the filter plates 6, 7, 8, and the nets 23, 24, 25, The water flowing into the aquifer composed of 26 is drained downward.
【0010】以上の構成において、濾過脱水装置のシス
テム全体は図10に示される。同システムにおいて、初
期稼動時にはプレコートプロセスが実行され、各濾過板
6,7,8を閉枠し、バルブ41,49を閉鎖した状態でバルブ4
2,43を開放し、ポンプ44を駆動させてプレコート槽45の
プレコート水を濾過室21,22へ供給する。ここで、プレ
コート水は濾過助剤(ケイソウ土やパーライト)を水に混
入させて撹拌したものであり、そのプレコート水は注入
管31から濾過室21へ流入し、同濾過室21を満たしながら
連通管32を通じて濾過室22へ流入し、同濾過室22も満た
すことになるが、プレコート水は濾布27,28,29,30によ
って濾過され、その濾過水がネット23,24,25,26で構成
された通水層から排水孔33,34,35,36を通じて受皿に相
当する容器16へ排出され、更に容器16の濾過水はプレコ
ート槽45へ戻される。The entire system of the filtration and dehydration apparatus having the above structure is shown in FIG. In this system, the pre-coating process is executed during the initial operation and each filter plate
Valve 4, with valves 6, 7 and 8 closed and valves 41 and 49 closed
2, 43 are opened, and the pump 44 is driven to supply the precoat water in the precoat tank 45 to the filtration chambers 21, 22. Here, the precoat water is obtained by mixing a filter aid (diatomaceous earth or perlite) with water and stirring, and the precoat water flows from the injection pipe 31 into the filtration chamber 21 and communicates while filling the filtration chamber 21. Although it flows into the filtration chamber 22 through the pipe 32 and fills the filtration chamber 22, the precoat water is filtered by the filter cloths 27, 28, 29, 30 and the filtered water is net 23, 24, 25, 26. From the constructed water-passing layer, the water is discharged through the drain holes 33, 34, 35, 36 into the container 16 corresponding to the tray, and the filtered water in the container 16 is returned to the precoat tank 45.
【0011】したがって、循環流路が構成されることに
なり、プレコート水に混入されている濾過助剤の微粒子
が濾布27,28,29,30の表面に付着してゆき、所謂プレコ
ート層を形成する。即ち、濾布27,28,29,30の目を整面
研磨工程での研磨排液に含まれている銅等の微粒子を捕
捉する程度に細かくしておくと、短期間の間に濾布27,2
8,29,30の目に前記微粒子が詰まり、濾過抵抗が大きく
なって濾過効率が極端に低下すると共に濾布の寿命が短
くなるが、プレコート水に含まれている濾過助剤の粒子
は比較的大きく、濾布27,28,29,30の目を大きくしてお
き、濾過助剤の粒子で構成されるプレコート層を濾過層
として利用することにより、低い濾過抵抗での濾過を継
続的に実行できるようにする。尚、プレコートプロセス
が完了した段階では、濾過助剤がプレコート層の生成に
消費されており、プレコート槽45の貯留水はほぼ清水に
近いものになっている。Therefore, the circulation channel is formed, and the fine particles of the filter aid mixed in the precoat water adhere to the surface of the filter cloths 27, 28, 29, 30 to form a so-called precoat layer. Form. That is, if the meshes of the filter cloths 27, 28, 29, 30 are made fine enough to capture fine particles such as copper contained in the polishing drainage liquid in the surface-polishing step, the filter cloths can be removed in a short period of time. 27,2
Although the fine particles are clogged in the 8,29,30 eyes, the filtration resistance becomes large and the filtration efficiency is extremely lowered and the life of the filter cloth is shortened, but the particles of the filter aid contained in the precoat water are compared. The size of the filter cloth 27, 28, 29, 30 is made large, and the precoat layer composed of particles of the filter aid is used as the filter layer to continuously filter with low filtration resistance. Allow it to run. Incidentally, at the stage where the precoat process is completed, the filter aid is consumed for forming the precoat layer, and the stored water in the precoat tank 45 is almost close to fresh water.
【0012】プレコートプロセスが完了すると本来の研
磨排液の濾過プロセスへ移行する。この濾過プロセスで
は、バルブ42を閉鎖してバルブ41を開放し、ポンプ44を
駆動させて原液層46の研磨排液を濾過室21,22へ導き、
予め濾布27,28,29,30の表面に構成されたプレコート層
によって研磨排液の微粒子を捕捉し、濾布27,28,29,30
→ネット23,24,25,26の通水層→排水孔33,34,35,36を通
じて流出した濾過水が容器16へ一旦貯留され、その濾過
水がプレコート槽45へ流入せしめられる。したがって、
研磨排液に対する実質的な濾過作用はプレコート層によ
ることになり、図12に示すように、濾過後の濾布27,2
8,29,30には予め形成されたプレコート層47の表面側に
研磨排液に含まれていた微粒子の堆積層48が付着した状
態となる。When the precoating process is completed, the process proceeds to the original polishing drainage filtering process. In this filtration process, the valve 42 is closed and the valve 41 is opened, and the pump 44 is driven to introduce the polishing effluent of the stock solution layer 46 into the filtration chambers 21 and 22,
The fine particles of the polishing effluent are captured by the precoat layer formed on the surface of the filter cloth 27, 28, 29, 30 in advance, and the filter cloth 27, 28, 29, 30
→ Water layer of the nets 23, 24, 25, 26 → The filtered water flowing out through the drainage holes 33, 34, 35, 36 is once stored in the container 16, and the filtered water is made to flow into the precoat tank 45. Therefore,
The substantial filtering action on the polishing effluent is due to the precoat layer, and as shown in FIG.
8, 29 and 30 are in a state in which a deposition layer 48 of the fine particles contained in the polishing effluent is attached to the surface side of the precoat layer 47 formed in advance.
【0013】そして、研磨排液に対する濾過が一定時間
行われると、図10において、ポンプ44を停止させると
共にバルブ43を閉鎖し、バルブ49を開放してエアー供給
系側から注入管31へエアーを供給する。これによって、
未濾過の研磨排液が強制的に濾過されながら追い出さ
れ、更なるエアーの供給によってプレコート層47と微粒
子の堆積層48が脱水されてケーキ化する。When the polishing drainage is filtered for a certain period of time, in FIG. 10, the pump 44 is stopped, the valve 43 is closed, and the valve 49 is opened to supply air from the air supply system side to the injection pipe 31. Supply. by this,
The unfiltered polishing effluent is expelled while being forcibly filtered, and by further supply of air, the precoat layer 47 and the particulate deposition layer 48 are dehydrated to form a cake.
【0014】その結果、一定時間のエアー供給が完了し
た後、油圧シリンダ12がその作動ロッド12aを引き込ん
で図11に示すように各濾過板6,7,8を開枠し、スタン
パ19で濾布27,28,29,30を上方へ引っ張りながら振動を
与えると濾布27,28,29,30に付着しているプレコート層4
7と微粒子の堆積層48が剥離し(一部は掻き出しが必
要)、図7(A)において容器16を移動させて各濾過板6,
7,8の下側から外しておけばケーキがシューター17を通
じて台車18へ落下することになり、濾過によって得られ
た銅の微粒子が回収されることになる。尚、濾過プロセ
スでは、図10に示すように、プレコート槽45には清水
となった濾過水が貯留されるが、プレコート槽45からオ
ーバーフローした水は別の循環利用槽50へ移され、その
水が研磨工程での洗浄水等として利用される。As a result, after the air supply for a certain period of time is completed, the hydraulic cylinder 12 draws in its operating rod 12a to open the filter plates 6, 7, 8 as shown in FIG. The precoat layer 4 attached to the filter cloths 27, 28, 29, 30 when vibration is applied while pulling the cloths 27, 28, 29, 30 upwards
7 and the deposited layer 48 of fine particles are peeled off (a part needs to be scraped out), and the container 16 is moved in FIG.
If removed from the lower side of 7,8, the cake will fall through the shooter 17 to the trolley 18, and the fine particles of copper obtained by filtration will be collected. Note that in the filtration process, as shown in FIG. 10, the filtered water that has become fresh water is stored in the precoat tank 45, but the water that overflows from the precoat tank 45 is transferred to another circulation utilization tank 50, Is used as cleaning water in the polishing process.
【0015】[0015]
【発明が解決しようとする課題】ところで、前記の濾過
脱水装置において濾過効率の向上と濾布の長寿命化が望
まれていることは上記したとおりであるが、この課題は
濾布とプレコート層と微粒子の堆積層がなす濾過媒体を
常に濾過抵抗の小さい状態に維持しながら濾過を継続的
に実行できるかの問題に帰着する。濾布については、ケ
ーキ回収時の剥離性等も考慮して、目の粗さや材質や織
り方等についての各種改良が施されているが、濾布に係
る条件だけで前記の問題を解決することはできない。As described above, it has been desired to improve the filtration efficiency and prolong the service life of the filter cloth in the above-described filtration / dehydration apparatus. The problem is whether the filtration can be continuously performed while keeping the filtration medium formed by the deposited layer of the fine particles at a state where the filtration resistance is always small. Regarding the filter cloth, various improvements have been made in terms of the roughness of the mesh, the material, the weave, etc. in consideration of the peelability at the time of collecting the cake, but the above problems are solved only by the conditions related to the filter cloth. It is not possible.
【0016】一方、図12に示したプレコート層47と微
粒子の堆積層48との関係に着目してみると、目の粗い濾
布27を用いながら濾過助剤の比較的大きな粒子でプレコ
ート層47を形成し、それを実質的な濾過機能層として研
磨排液の濾過を実行させており、研磨排液の微粒子を凝
集させて大きな凝集粒子とすれば前記の堆積層48での濾
過抵抗が小さくなり、濾過効率を向上させることが可能
になる。On the other hand, paying attention to the relationship between the precoat layer 47 and the particulate deposition layer 48 shown in FIG. 12, the precoat layer 47 with relatively large particles of the filter aid is used while using the coarse filter cloth 27. Is formed, and the polishing drainage is filtered by using it as a substantial filtration function layer. If the fine particles of the polishing drainage are aggregated into large aggregated particles, the filtration resistance in the deposition layer 48 becomes small. Therefore, it becomes possible to improve the filtration efficiency.
【0017】一般に、懸濁液のコロイド粒子を凝集させ
る方法としては、コロイド粒子のゼータ電位を低下させ
て分子相互を凝集させる無機凝集剤や、コロイド粒子を
架橋作用によって凝集させる機能を有する高分子凝集剤
を用いる方法がある。しかし、凝集剤が溶解した濾過液
であると、それを整面研磨工程で循環・再利用するには
適さない。In general, as a method of aggregating colloidal particles of a suspension, an inorganic aggregating agent that lowers the zeta potential of the colloidal particles to agglomerate the molecules with each other, or a polymer having a function of aggregating the colloidal particles by a crosslinking action. There is a method using a flocculant. However, a filtered solution in which a coagulant is dissolved is not suitable for circulation and reuse in the surface polishing process.
【0018】更に、プレコートに用いられる濾過助剤は
微粒子の堆積層と共に回収され、前記の整面研磨等では
濾過助剤と銅微粒子を分離して銅が再利用される。した
がって、濾過助剤は消耗品であり、その使用量を可能な
限り抑制することが望ましい。また、濾過後に銅微粒子
のみが得られて前記分離プロセスを不必要にするのが理
想的である。Further, the filter aid used in the precoat is collected together with the deposited layer of fine particles, and the copper is reused by separating the filter aid and the copper fine particles in the above surface polishing and the like. Therefore, the filter aid is a consumable item, and it is desirable to suppress the amount of use as much as possible. Also, ideally, only fine copper particles are obtained after filtration, making the separation process unnecessary.
【0019】そこで、本発明は、凝集剤を用いることな
くコロイド粒子の凝集を促進させて濾過効率を向上させ
ることが可能な濾過体の構造を提供し、また濾過プロセ
スにおいて濾過体を開枠せずに逐次的に濾過機能層の回
復を図りながら長時間に亘る作業を可能にする濾過方法
を提供し、更に濾過助剤の使用量を抑制又はその使用を
不要とする濾過方法を提供することを目的として創作さ
れた。Therefore, the present invention provides a structure of a filter body capable of promoting the agglomeration of colloidal particles to improve the filtration efficiency without using a flocculant, and also to open the filter body in the filtration process. To provide a filtration method that enables a work for a long time while sequentially attempting to recover the filtration functional layer without further providing a filtration method that suppresses the use amount of a filter aid or eliminates the use thereof. It was created for the purpose.
【0020】[0020]
【課題を解決するための手段】第1の発明は、中央板部
と枠部とからなる濾過板の中央板部に通水層を介在させ
て濾布を展着しておき、複数の濾過板の枠部同士を接合
させて1又は2以上の濾過室を構成する濾過体を具備
し、濾過体を構成する一端の濾過板には中央板部と濾過
室側にのみ施されている通水層と濾布とを貫通した注入
管が、また濾過室が複数構成される場合にあっては中間
に位置する濾過板の中央板部とその両側面に施されてい
る通水層と濾布とを貫通した連通管が設けられており、
注入管を通じて外部から濾過室へ濾過対象液を注入し、
各濾過板の通水層の最下部に設けられた排水孔を通じて
濾過水を外部に排出させる濾過脱水装置において、注入
管と連通管を濾過室の下部領域に設けると共に、注入管
の濾過室側及び連通管の流出側に濾過対象液を濾過室の
底面近傍へ導く導水部材を連設したことを特徴とする濾
過脱水装置に係る。According to a first aspect of the present invention, a filter cloth is spread on a central plate portion of a filter plate composed of a central plate portion and a frame portion with a water-permeable layer interposed therebetween, and a plurality of filters are filtered. The filter body is provided with one or more filtration chambers by joining the frame portions of the plates together, and the filter plate at one end of the filter body is provided only on the central plate portion and the filtration chamber side. In the case where a plurality of filtration chambers are provided with an injection pipe penetrating the water layer and the filter cloth, the central plate portion of the filter plate located in the middle and the water-permeable layer and the filter layer provided on both side surfaces of the center plate portion. A communication pipe that penetrates the cloth is provided,
Inject the liquid to be filtered into the filtration chamber from the outside through the injection pipe,
In a filtration / dehydration device that discharges filtered water to the outside through a drain hole provided at the bottom of the water flow layer of each filter plate, an injection pipe and a communication pipe are provided in the lower region of the filtration chamber, and the filtration pipe side of the injection pipe is provided. Also, the present invention relates to a filtration / dehydration device characterized in that a water guiding member for guiding the liquid to be filtered to the vicinity of the bottom surface of the filtration chamber is continuously provided on the outflow side of the communication pipe.
【0021】この発明によれば、注入管や連通管から濾
過室へ流入せしめられる濾過対象液は常に濾過室の底部
に当たり、濾過室内の濾過対象液を下側から巻上げる態
様で撹拌する。濾過対象液に含まれるコロイド粒子はブ
ラウン運動によって衝突してフロックを形成するが、コ
ロイド粒子よりも大きい粗粒子の場合には緩速撹拌によ
って衝突機会が多くなり、凝集が効率的に促進されてよ
り大きな粗粒子が迅速に生成される。この発明における
注入管や連通管の位置と導水部材とからなる構成は、濾
過対象液を注入するだけで濾過室内での前記緩速撹拌を
生じさせるため、凝集作用の促進によってフロックの継
続的な粗大化が生じ、その粗大化した粒子によるプレコ
ート層や堆積層での濾過抵抗は小さくなって濾過効率を
向上できる。尚、導水部材としては、例えば、エルボ状
に形成された管部材や、濾過室の厚みに相当する長さを
有し、注入管及び連通管の軸方向に中空部が形成されて
いると共に、その下方側に開放部が形成された成形部材
を適用することができる。According to the present invention, the liquid to be filtered, which is caused to flow into the filtration chamber from the injection pipe or the communication pipe, always contacts the bottom of the filtration chamber, and the liquid to be filtered in the filtration chamber is agitated in such a manner that the liquid to be filtered is rolled up from below. The colloidal particles contained in the liquid to be filtered collide due to Brownian motion to form flocs, but in the case of coarse particles larger than the colloidal particles, slow agitation increases the chances of collision and efficient aggregation is promoted. Larger coarse particles are produced rapidly. The configuration of the injection pipe or the position of the communication pipe and the water guide member in the present invention causes the slow stirring in the filtration chamber only by injecting the liquid to be filtered, and thus the flocculation is continuously performed by promoting the aggregation action. Coarsening occurs, and the filtration resistance in the precoat layer and the deposition layer due to the coarsening particles is reduced, and the filtration efficiency can be improved. As the water guide member, for example, a tube member formed in an elbow shape or having a length corresponding to the thickness of the filtration chamber, a hollow portion is formed in the axial direction of the injection pipe and the communication pipe, It is possible to apply a molding member having an opening formed on the lower side thereof.
【0022】第2の発明は、前記の濾過脱水装置におい
て、注入管へ濾過対象液を供給する管経路にその管内の
圧力を計測する圧力計を設けると共に、前記管経路にエ
アーを供給するエアー供給系を設け、圧力計の計測値が
所定以上になった場合に、濾過対象液の注入を一端停止
し、エアー供給系から前記管経路にエアーを供給する正
ブローを行い、その後に濾過対象液の注入を再開するプ
ロセスを実行することを特徴とした濾過脱水方法に係
る。According to a second aspect of the present invention, in the above filtration dehydration apparatus, a pressure gauge for measuring the pressure inside the pipe is provided in the pipe passage for supplying the liquid to be filtered to the injection pipe, and the air for supplying air to the pipe passage is provided. When a supply system is installed and the measured value of the pressure gauge exceeds a predetermined value, the injection of the liquid to be filtered is temporarily stopped, the air is blown from the air supply system to the pipe path, and then the object to be filtered The present invention relates to a method for filtering and dehydrating, which comprises performing a process of restarting liquid injection.
【0023】前記の濾過脱水装置においても、濾過の進
行によって堆積層が厚くなると、濾過抵抗が増大する。
これは、堆積層の大きな粗粒子間にゲル状の小さな粗粒
子が詰まるためと考えられるが、濾過対象液の注入を一
旦停止させて、正ブローを行うことによりゲル状の粗粒
子が凝縮して再び通水性が確保でき、濾過媒体(濾布と
プレコート層と堆積層)の濾過作用を回復させることが
できる。Also in the above filter dehydrator, the filtration resistance increases as the deposition layer becomes thicker as the filtration progresses.
This is probably because small gel-like coarse particles are clogged between the large coarse particles in the deposited layer, but once the injection of the liquid to be filtered is stopped and the positive blow is performed, the gel-like coarse particles are condensed. As a result, water permeability can be secured again, and the filtering action of the filter medium (filter cloth, precoat layer, and deposited layer) can be restored.
【0024】第3の発明は、第2の発明で圧力計の計測
値に基づいた前記プロセスが複数回連続して実行されて
いる状態において、注入管への濾過対象液の供給開始時
から圧力計の計測値が所定以上になるまでの時間を計測
し、その計測時間が所定以下になった段階で、濾過対象
液の注入を停止し、エアー供給系から前記管経路にエア
ーを供給して濾布に付着している濾過ケーキの脱水を行
うための正ブローと、各濾過板の排水孔にエアーを供給
して濾過ケーキに剥離性を与えるための逆ブローとを実
行し、その後に各濾過板の接合状態を開放して濾過ケー
キを濾布から剥離させることを特徴とした濾過脱水方法
に係る。[0024] A third aspect of the present invention, in the state in which the process based on the measurement value of the pressure gauge in the second aspect of the invention is continuously executed a plurality of times, the pressure is applied from the start of supplying the liquid to be filtered to the injection pipe. Measure the time until the measured value of the meter exceeds a predetermined value, and when the measured time becomes less than the predetermined value, stop the injection of the liquid to be filtered and supply air from the air supply system to the pipe path. A forward blow for dewatering the filter cake adhering to the filter cloth and a reverse blow for supplying air to the drain holes of each filter plate to give peelability to the filter cake are performed, and then each blow is performed. The present invention relates to a filtration / dehydration method, characterized in that the bonded state of a filter plate is opened to separate a filter cake from a filter cloth.
【0025】第2の発明の濾過媒体を逐次回復させて濾
過を継続的に実行するプロセスにおいても、堆積層が厚
くなると濾過抵抗が大きくなり、当然に濾過媒体の濾過
作用の回復にも限度がある。この発明では、濾過対象液
の供給開始時から圧力計の計測値が所定以上になるまで
の時間を目安として前記限度を判断する。その判断基準
を目安としたことにより、リアルタイムな濾過状況に応
じて濾過脱水装置の最も効率的な稼動運用が可能になる
タイミングで開枠と濾過ケーキの回収を実行させること
ができる。Even in the process of continuously recovering the filtration medium of the second invention to continuously carry out the filtration, the thicker the deposited layer becomes, the higher the filtration resistance becomes, and the recovery of the filtration action of the filtration medium is naturally limited. is there. In the present invention, the above limit is determined by using the time from the start of the supply of the liquid to be filtered until the measured value of the pressure gauge becomes a predetermined value or more as a guide. By using the judgment standard as a guide, it is possible to execute the open frame and the collection of the filter cake at the timing when the most efficient operation and operation of the filtration and dehydration device can be performed according to the real-time filtration status.
【0026】第4の発明は、第1の発明の濾過脱水装置
において、プレコートの実行の際に、通常の濾過助剤に
対して事前に剥離・回収した濾過ケーキの一部を混合し
たものを、又は通常の濾過助剤に代えて回収ケーキの一
部を濾過助剤として適用することとした濾過脱水方法に
係る。A fourth aspect of the present invention is the filtration and dehydration apparatus of the first aspect, wherein a part of the filter cake that has been peeled and collected in advance is mixed with a normal filter aid when precoating is performed. , Or a filter dehydration method in which a part of the recovered cake is applied as a filter aid instead of the usual filter aid.
【0027】第1の発明における濾過脱水装置では、初
期の濾過プロセスの開始に際しては通常の濾過助剤を用
いるが、その濾過プロセスにおいて得られた濾過ケーキ
の堆積層は凝集して粗大化した粒子によって構成されて
おり、銅等の微粒子に係る懸濁液では凝集力が強く、通
水性も極めてよい。したがって、回収された濾過ケーキ
の一部を濾過助剤と混合して使用すると良好なプレコー
ト層が形成でき、濾過助剤の使用量を減じることができ
る。また、濾過プロセスの繰り返しによって濾過ケーキ
の混合比率を大きくしてゆくと、濾過ケーキにおける濾
過対象溶液側の凝集した粗大粒子の割合が大きくなり、
次第に前記粗大粒子の純度が極めて高いプレコート層及
びその成分が同一である堆積層とからなる濾過ケーキが
得られることになる。その結果、最終的には通常の濾過
助剤を用いずに、事前に回収されている濾過ケーキを濾
過助剤とした極めて濾過抵抗の低い濾過媒体を構成で
き、且つ回収した濾過ケーキに対して何等の分離処理を
施すことなく、濾過対象液に含まれている成分を濾過助
剤に代えてそのまま再利用することが可能になる。In the filtration and dehydration apparatus of the first invention, a usual filter aid is used at the start of the initial filtration process, but the deposited layer of the filter cake obtained in the filtration process is agglomerated and coarsened particles. The suspension of fine particles such as copper has a strong cohesive force and extremely excellent water permeability. Therefore, when a part of the collected filter cake is mixed with a filter aid to be used, a good precoat layer can be formed, and the amount of the filter aid used can be reduced. In addition, when the mixing ratio of the filter cake is increased by repeating the filtration process, the ratio of aggregated coarse particles on the solution side to be filtered in the filter cake increases,
Gradually, a filter cake composed of a precoat layer in which the coarse particles are extremely high in purity and a deposition layer in which the components are the same is obtained. As a result, finally, without using a normal filter aid, it is possible to construct a filter medium having extremely low filtration resistance using the filter cake collected in advance as a filter aid, and to the collected filter cake. The component contained in the liquid to be filtered can be reused as it is, instead of the filter aid, without any separation treatment.
【0028】[0028]
【発明の実施の形態】以下、本発明の「濾過脱水装置及
び濾過脱水方法」の実施形態を図1から図6を用いて詳
細に説明する。先ず、図1はこの実施形態において濾過
板が閉枠された状態の断面図であり、上記の従来技術に
おける図9に相当するものである。ここで、図1におい
て符号「X」又は「X’」で示されている要素は、図9
において符号「X」で示されている要素と基本的構成が
同一であるが、符号「X’」に係る要素は注入管31’と
連通管32’の位置が異なることに基づいて、それら管3
1’,32’のための貫通孔の位置が異なっているため、そ
の相違を示すために「X’」としてある。したがって、
濾過体自体の全体的構成と各要素については図9で説明
した内容とほぼ同様であり、ここではそれらの説明を省
略し、特徴点についてのみ詳細に説明する。BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the "filtration dehydration apparatus and filtration dehydration method" of the present invention will be described in detail below with reference to Figs. First, FIG. 1 is a cross-sectional view of a state in which a filter plate is closed in this embodiment, and corresponds to FIG. 9 in the above-mentioned conventional technique. Here, the elements indicated by reference numeral “X” or “X ′” in FIG.
Although the basic configuration is the same as the element indicated by reference numeral “X” in FIG. 3, the element related to the reference numeral “X ′” is based on the fact that the positions of the injection pipe 31 ′ and the communication pipe 32 ′ are different. 3
Since the positions of the through holes for 1'and 32 'are different, they are shown as "X'" to show the difference. Therefore,
The overall structure of the filter body itself and each element are almost the same as those described with reference to FIG. 9. Therefore, the description thereof will be omitted and only the characteristic points will be described in detail.
【0029】この濾過体の特徴は、図1と図9とを比較
すれば明らかなように、;図9の注入管31と連通管32
が各濾過板6,7の中央板部6b,7bの略中央に設けられてい
るのに対し、注入管31’と連通管32’の配設位置が各濾
過室21’,22’の底部近傍になっている点、及び;そ
れらの注入管31’と連通管32’の各濾過室21’,22’へ
の流入孔に下向管51,52が連設されており、各下向管51,
52の端部が各濾過室21’,22’の底部に対向せしめられ
ている点にある。The characteristics of this filter are as will be apparent from a comparison of FIGS. 1 and 9; the injection pipe 31 and the communication pipe 32 in FIG.
Is provided substantially in the center of the central plate portion 6b, 7b of each filtration plate 6, 7, while the placement position of the injection pipe 31 'and the communication pipe 32' is the bottom of each filtration chamber 21 ', 22'. Downward pipes 51, 52 are connected in series to the inlets of the injection pipe 31 ′ and the communication pipe 32 ′ into the respective filtration chambers 21 ′, 22 ′, which are close to each other, Pipe 51,
The end of 52 is located at a point facing the bottom of each filtration chamber 21 ', 22'.
【0030】この特徴的構成においても、注入管31’か
ら流入した研磨排液は濾過室21’を満たして連通管32’
を通じて濾過室22’へ流入し、各濾過室21’,22’にお
いて濾布27’,28’,29’,30とそれらの表面に予め形成
されたプレコート層によって継続的な濾過が実行され、
濾過液はネット23’,24’,25’,26が構成する通水層を
通じて排水孔33’,34’,35’,36から外部へ排出され
る。しかし、前記の及びの特徴に基づいて、注入管
31’と連通管32’から各濾過室21’,22’へ流入した研
磨排液は直ちに各濾過室21’,22’の底部へ衝突し、底
部から渦乱流を構成しながら上方へ押し出される。した
がって、図2に示すように、各濾過室21’,22’へ流入
した研磨排液は先に流入している研磨排液を巻上げる態
様で上方へ移動し、それによって各濾過室21’,22’内
の研磨排液が定常的に緩速撹拌された状態となり、銅の
微粒子の凝集作用が飛躍的に促進される。Also in this characteristic structure, the polishing effluent flowing from the injection pipe 31 'fills the filtration chamber 21' and the communication pipe 32 '.
Through the filter chamber 22 ', the filter cloth 27', 28 ', 29', 30 and the precoat layer preformed on their surfaces in each of the filter chambers 21 ', 22' is used for continuous filtration,
The filtrate is discharged to the outside from the drain holes 33 ', 34', 35 ', 36 through the water-permeable layer formed by the nets 23', 24 ', 25', 26. However, based on the above and
The polishing effluent flowing into the filtration chambers 21 ', 22' from the 31 'and the communication pipe 32' immediately collides with the bottom of the filtration chambers 21 ', 22' and is pushed upward while forming a vortex turbulent flow from the bottom. Be done. Therefore, as shown in FIG. 2, the polishing effluent that has flowed into each of the filtration chambers 21 ′ and 22 ′ moves upward in a manner that winds up the polishing effluent that has flowed in first, thereby causing each of the filtration chambers 21 ′ to be rotated. The polishing effluent in 22,22 'is constantly agitated slowly, and the aggregating action of copper fine particles is dramatically accelerated.
【0031】その結果、銅の微粒子が凝集した粗粒子が
定常的に成長・生成されてプレコート層に堆積すること
になり、その粗粒子は凝集力が強く、極めて通水性の良
い性質を有しているために、長時間に亘る濾過プロセス
の実行状態でも濾過抵抗の増大を抑制でき、濾過効率を
向上させることができる。これに対して、図9の構成に
よれば、注入管31と連通管32から各濾過室21,22へ流入
した研磨排液は対向する濾布28,30の壁面に当たって各
濾過室21,22内を漂うだけであり、殆ど撹拌作用は持た
ないために凝集は促進されない。即ち、この実施形態の
濾過体では、前記のとに係る機構的改良を行うだけ
で濾過室21’,22’内での合理的な撹拌作用を誘起さ
せ、粗粒子間の衝突による更なる粗粒子化を助長し、継
続的に目詰まりの生じない堆積層を生成させる。As a result, the coarse particles in which the copper fine particles are agglomerated are constantly grown and generated and deposited on the precoat layer, and the coarse particles have a strong cohesive force and have an extremely good water permeability. Therefore, it is possible to suppress an increase in filtration resistance even when the filtration process is performed for a long time, and it is possible to improve filtration efficiency. On the other hand, according to the configuration of FIG. 9, the polishing effluent flowing from the injection pipe 31 and the communication pipe 32 into the filtration chambers 21 and 22 hits the wall surfaces of the filter cloths 28 and 30 which face each other, and the filtration chambers 21 and 22 respectively. It does not promote aggregation because it only drifts inside and has little stirring action. That is, in the filter body of this embodiment, a rational stirring action in the filter chambers 21 ′, 22 ′ is induced only by performing the mechanical improvement related to the above, and further coarseness due to collision between coarse particles is caused. It promotes particle formation and continuously produces a clogging-free deposited layer.
【0032】次に、この濾過体を適用した濾過脱水装置
のシステム構成は図3に示される。同図においても、従
来技術に係る図7及び図10に示したシステムと比較し
て、その基本的構成はほぼ同様である。相違する点は、
前記の濾過体が適用されていることに加えて、注入管3
1’への研磨排液の供給流路(正ブロー時のエアー供給流
路も兼用)53に圧力計54が設けられており、エアー供給
系が連結された以降の管経路の途中に切換え弁55が設け
られていると共に、各濾過板6’,7’,8の各排水孔33’,
34’,35’,36に着脱される逆ブロー用の管経路56が設け
られ、切換え弁55によって正ブロー時には注入管31’側
へエアーを供給し、逆ブロー時には各排水孔33’,34’,
35’,36側へエアーを供給するようになっている構成に
ある。Next, FIG. 3 shows the system configuration of a filtration / dehydration apparatus to which this filter is applied. Also in this figure, the basic configuration is almost the same as that of the system shown in FIGS. 7 and 10 according to the related art. The difference is that
In addition to the filter body being applied, the injection tube 3
A pressure gauge 54 is provided in the flow path for polishing wastewater to 1 '(also used as the air supply flow path for forward blow) 53, and a switching valve is provided in the middle of the pipe path after the air supply system is connected. 55 is provided, and each drainage hole 33 'of each filter plate 6', 7 ', 8
34 ', 35', 36 is provided with a reverse blow pipe path 56 for attachment / detachment, and a switching valve 55 supplies air to the injection pipe 31 'side at the time of forward blow, and each drain hole 33', 34 at the time of reverse blow. ',
It is configured to supply air to the 35 'and 36 sides.
【0033】そして、このシステムの動作手順は図4の
フローチャートに示される。先ず、各濾過板6’,7’,8
に濾布27’,28’,29’,30が展着された状態で各濾過板
6’,7’,8が閉枠され、プレコートプロセスが実行され
る(S1,S2)。この場合、プレコート槽45にはケイソウ土
やパーライト等の通常の濾過助剤を混入して撹拌してお
いてもよいが、もし先に濾過プロセスを実行して台車18
に濾過ケーキが回収されていれば、その一部を、又はそ
の一部と通常の濾過助剤を混合したものを用いてもよ
く、その有利性は後述する。The operation procedure of this system is shown in the flowchart of FIG. First, each filter plate 6 ', 7', 8
Filter plates 27 ', 28', 29 'and 30 are spread on the filter plates
6 ′, 7 ′, 8 are closed, and the precoat process is executed (S1, S2). In this case, the precoat tank 45 may be mixed with an ordinary filter aid such as diatomaceous earth or perlite and stirred, but if the filtration process is performed first, the carriage 18
If the filter cake has been collected in 1, a part of it or a mixture of the part and a usual filter aid may be used, and its advantages will be described later.
【0034】プレコートプロセスでは、逆ブロー用の管
経路56は各濾過板6’,7’,8の各排水孔33’,34’,35’,
36から外されており、濾過体の下側には容器16がセット
されている。その状態で、バルブ41,49を閉鎖すると共
にバルブ42,43を開放し、且つ切換え弁55を注入管31’
側への流路を構成するように設定しておいて、ポンプ44
を駆動させる。したがって、プレコート槽45の液は濾過
体の濾過室21’,22’へ流入し、濾布27’,28’,29’,30
で濾過された後の濾過水が排水孔33’,34’,35’,36か
ら容器16へ排出され、その濾過水がプレコート槽45に戻
って再びポンプ44で濾過室21’,22’へ送られるという
循環路が構成されるため、各濾過板6’,7’,8の濾布2
7’,28’,29’,30にはプレコート層が形成される。この
プレコートプロセスの時間は濾過室21’,22’の容積や
ポンプ44の圧送量によって異なるが、2〜3分間程度の
比較的短時間の循環動作でプレコート層が生成される。In the pre-coating process, the reverse blow pipe path 56 has the drain holes 33 ', 34', 35 ', of the filter plates 6', 7 ', 8'.
It is removed from 36, and the container 16 is set under the filter. In that state, the valves 41 and 49 are closed, the valves 42 and 43 are opened, and the switching valve 55 is connected to the injection pipe 31 '.
The pump 44 so that the flow path to the
Drive. Therefore, the liquid in the precoat tank 45 flows into the filter chambers 21 ', 22' of the filter body, and the filter cloths 27 ', 28', 29 ', 30
The filtered water after being filtered by is discharged from the drain holes 33 ', 34', 35 ', 36 to the container 16, and the filtered water returns to the precoat tank 45 and again pumped to the filtering chambers 21', 22 '. Since the circulation path that is sent is constructed, the filter cloth 2 of each filter plate 6 ', 7', 8
A precoat layer is formed on 7 ', 28', 29 'and 30. Although the time of this precoat process varies depending on the volumes of the filtration chambers 21 'and 22' and the pumping amount of the pump 44, the precoat layer is formed by a relatively short circulation operation of about 2 to 3 minutes.
【0035】プレコートプロセスが完了すると、研磨排
液の濾過プロセスへ移行するが、その段階では、バルブ
42を閉鎖してバルブ41を開放し、他の設定はそのままに
して原液層46の研磨排液を濾過室21,22へ連続的に注入
する(S3)。また、この実施形態では、研磨排液の注入開
始時点から時間の計測を開始する(S4)。そして、この研
磨排液の注入によって、濾過体の濾過室21’,22’内で
は注入管31’と連通管32’の位置と各下向管51,52に基
づいて前記の定常的な緩速撹拌状態が生じ、銅の微粒子
の迅速な粗大化が促進されて、その粗大化した粒子がプ
レコート層の表面に付着して堆積層を形成してゆくこと
は図1及び図2で説明したとおりである。When the precoating process is completed, the polishing effluent filtration process is started.
42 is closed and the valve 41 is opened, and the polishing waste liquid of the stock solution layer 46 is continuously injected into the filtration chambers 21 and 22 while keeping the other settings (S3). Further, in this embodiment, the time measurement is started from the time when the injection of the polishing waste liquid is started (S4). Then, by the injection of the polishing drainage liquid, the stationary relaxation is performed based on the positions of the injection pipe 31 'and the communication pipe 32' and the downward pipes 51, 52 in the filtration chambers 21 ', 22' of the filter body. The rapid stirring state occurs, the rapid coarsening of the copper fine particles is promoted, and the coarsened particles adhere to the surface of the precoat layer to form a deposited layer, which has been described with reference to FIGS. 1 and 2. It is as follows.
【0036】ところで、濾過プロセスが進行し、堆積層
の厚みが増してゆくと濾過抵抗が大きくなり濾過効率が
低下する。この実施形態では、濾過時における研磨排液
の注入圧力を圧力計54によって常時計測しており、その
圧力計測値が所定値以上になった時点で前記の計測時間
Tを読取り、その計測時間Tが所定時間ΔTs(例え
ば、40sec)以内であるかどうかを確認する(S5,S6)。By the way, as the filtration process progresses and the thickness of the deposited layer increases, the filtration resistance increases and the filtration efficiency decreases. In this embodiment, the injection pressure of the polishing effluent at the time of filtration is constantly measured by the pressure gauge 54, and when the pressure measurement value exceeds a predetermined value, the measurement time T is read and the measurement time T It is confirmed whether or not is within a predetermined time ΔTs (for example, 40 seconds) (S5, S6).
【0037】そして、圧力計測値が所定値以上になった
が、T>ΔTsの時間条件であれば、ポンプ54の駆動を
一旦停止させ(S7)、一定時間だけ濾過室21’,22’に対
する正ブローを実行する(S8)。即ち、切換え弁55はその
ままとするが、バルブ43を閉鎖すると共にバルブ49を開
放し、エアーを流路53から注入管31’を通じて濾過室2
1’,22’へ吹き込むことにより濾過室21’,22’内の研
磨排液をエアーで押し出して通気性を持たせる。この正
ブローにより、濾布27’,28’,29’,30や堆積層におい
て目詰まり状態になっているゲル状の粗粒子が凝縮して
通水性が回復し、その回復度合いは濾過媒体の構成によ
って異なるが、例えば、圧力計54の計測値が3.2(kg/c
m2)となって、約20sec間の正ブローを行うと、再濾過
の開始時には0.6〜0.8(kg/cm2)となり、濾過抵抗が
大幅に低下する。If the pressure measurement value exceeds the predetermined value but the time condition is T> ΔTs, the drive of the pump 54 is temporarily stopped (S7), and the filtration chambers 21 'and 22' are operated for a certain time. Forward blow is executed (S8). That is, the switching valve 55 is left as it is, but the valve 43 is closed and the valve 49 is opened, and the air is passed from the flow path 53 through the injection pipe 31 ′ to the filtration chamber 2.
By blowing into 1 ', 22', the polishing effluent in the filtration chambers 21 ', 22' is pushed out by air to give air permeability. By this forward blow, gel-like coarse particles that are clogged in the filter cloths 27 ', 28', 29 ', 30 and the sedimentary layer are condensed to restore the water permeability, and the degree of recovery depends on the filtration medium. Although it depends on the configuration, for example, the measured value of the pressure gauge 54 is 3.2 (kg / c
m 2 ), when the positive blow is performed for about 20 seconds, the re-filtration starts at 0.6 to 0.8 (kg / cm 2 ), significantly reducing the filtration resistance.
【0038】前記の正ブローによって濾布27’,28’,2
9’,30と堆積層の通水性を回復させると、各バルブを元
の設定状態へ戻し、ポンプ44を起動させて濾過室21,22
に対する研磨排液の注入を再開すると共に、前記と同様
に再び時間計測を開始する(S8→S3,S4)。以降、同様に
して、圧力計測値が所定値以上になった時点でT>ΔT
sの時間条件が成立していれば正ブローと排液濾過を繰
り返すことになり(S5,S6→S7〜S4)、適応的に通水性を
回復させながら高効率な濾過を継続的に実行させる。Filter cloths 27 ', 28', 2 by the above-mentioned positive blow
When the water permeability of 9 ', 30 and the sediment layer is restored, each valve is returned to the original setting state and the pump 44 is activated to start the filtration chamber 21,22.
The injection of the polishing effluent is restarted and the time measurement is started again in the same manner as described above (S8 → S3, S4). After that, similarly, when the pressure measurement value becomes equal to or higher than a predetermined value, T> ΔT
If the time condition of s is satisfied, forward blowing and drainage filtration will be repeated (S5, S6 → S7 to S4), and highly efficient filtration will be continuously executed while adaptively restoring water permeability. .
【0039】ところで、前記ステップの繰り返しによっ
ても堆積層の厚みは増大してゆき、必然的に正ブローに
よって十分な回復が図れなくなる状態となる。具体的に
は、例えば、圧力計54の計測しきい値を3.2(kg/c
m2)、正ブロー時間を20sec間とし、時間:ΔTsを40
secとした場合に、前記の時間条件:T>ΔTsは少なく
とも10回程度は成立し、その間は正ブローと再濾過が
繰り返されることになるが、約20回程度になると再濾
過開始後に比較的短時間で圧力計54が一定圧力に達して
しまい、前記時間条件が成立しなくなる状態になる。こ
れは、濾過を停止させて正ブローをかける頻度が多くな
り、結果的に濾過効率が維持できなくなったことを意味
する。By the way, the thickness of the deposited layer increases as the above steps are repeated, and it is inevitable that the forward blow cannot achieve sufficient recovery. Specifically, for example, the measurement threshold value of the pressure gauge 54 is set to 3.2 (kg / c).
m 2 ), the forward blow time is 20 sec, and the time: ΔTs is 40
In the case of sec, the above time condition: T> ΔTs is satisfied at least about 10 times, and during that time, the positive blow and the re-filtration are repeated, but when it becomes about 20 times, the re-filtration is relatively started. The pressure gauge 54 reaches a constant pressure in a short time, and the time condition is not satisfied. This means that the frequency of stopping the filtration and applying the positive blow increases, and as a result, the filtration efficiency cannot be maintained.
【0040】そこで、圧力計測値が所定値以上になった
時点でT≦ΔTsとなった場合には、ポンプ44を停止さ
せると共にバルブ43を閉鎖し、脱水処理用の正ブローと
堆積層の剥離性をよくするための逆ブローを実行する(S
6→S9,S10)。ここで、逆ブローは、濾過体の各排水孔3
3’,34’,35’,36に対して管経路56を接続し、切換え弁
55を管経路56側へ切換えてネット23’,24’,25’,26側
(通水層側)からエアーを吹き込むことによって行われ、
例えば、正ブローを約20sec間行った後に逆ブローを
約10sec間行うというような手順となる。Therefore, when T ≦ ΔTs is reached at the time when the measured pressure value exceeds the predetermined value, the pump 44 is stopped and the valve 43 is closed, and the normal blow for dehydration treatment and the separation of the deposited layer are performed. Perform reverse blow to improve sex (S
6 → S9, S10). Here, reverse blow means that each drain hole 3 of the filter body is
Connect pipe path 56 to 3 ', 34', 35 ', 36, and switch valve
Switch the 55 to the pipe path 56 side and net 23 ', 24', 25 ', 26 side
It is done by blowing air from (water passage layer side),
For example, the procedure is such that the forward blow is performed for about 20 seconds and then the reverse blow is performed for about 10 seconds.
【0041】その後、油圧シリンダ12の作動ロッド12a
を引き込ませて濾過体を開枠し、分離された各濾過板
6’,7’,8の濾布27’,28’,29’,30をスタンパ19で引張
して振動を与え、堆積層を濾布27’,28’,29’,30から
剥離させることにより濾過ケーキとして台車18に回収す
る(S11,S12)。この場合、図9に示した従来技術の濾過
体では注入管31と連通管32がそれぞれ濾過板6,7の中央
板部6b,7bの中央位置に設けられているため、図11に
示すように濾布27,28,29の引張は前記中央位置より上側
の領域だけしか行えず、それより下側の領域に付着して
いる堆積層に関しては手作業で掻き出す必要があるが、
この実施形態によれば、図1に示すように注入管31’と
連通管32’が濾過板6’,7’の中央板部6b’,7b’の下部
に設けられているため、濾布27’,28’,29’,30’のほ
ぼ全領域を引張させることができ、濾過ケーキの手作業
による掻き出しが不要になるという利点がある。尚、以
上のシーケンスは手動操作によっても行えるが、全てを
自動化することもでき、前記の利点は24時間フル稼働
に対応するシステムを構築する上で都合が良い。After that, the operating rod 12a of the hydraulic cylinder 12
Filter to open the filter body and separate each filter plate
6 ', 7', 8 filter cloths 27 ', 28', 29 ', 30 are pulled by the stamper 19 to give vibration to separate the deposited layers from the filter cloths 27', 28 ', 29', 30. Is collected as a filter cake on the carriage 18 (S11, S12). In this case, in the conventional filter body shown in FIG. 9, since the injection pipe 31 and the communication pipe 32 are provided at the central positions of the central plate portions 6b, 7b of the filter plates 6, 7, respectively, as shown in FIG. In addition, the tension of the filter cloths 27, 28, 29 can be performed only in the area above the central position, and the deposited layer adhering to the area below the center position needs to be manually scraped,
According to this embodiment, as shown in FIG. 1, since the injection pipe 31 'and the communication pipe 32' are provided under the central plate portions 6b ', 7b' of the filter plates 6 ', 7', the filter cloth There is an advantage that almost all regions of 27 ', 28', 29 'and 30' can be pulled, and manual scraping of the filter cake is unnecessary. The above sequence can be performed by manual operation, but it is also possible to automate all of them, and the above advantages are convenient for constructing a system that can be fully operated for 24 hours.
【0042】次に、以上の実施形態では、図1及び図2
に示すように、各濾過室21’,22’に対する研磨排液の
導水部材として下向管51,52を用いているが、その機能
は研磨排液を各濾過室21’,22’の底部へ導いて緩速撹
拌を誘起させることにあり、同機能を実現できるもので
あれば必ずしも下向管51,52を用いる必要はなく、例え
ば、図5に示すような成形品からなる導水部材61であっ
てもよい。その導水部材61は、ゴム製又は樹脂製の筒状
成形品であって、各濾過室21’,22’の厚みに相当する
長さを有し、注入管31’や連通管32’に連設された場合
にその各管軸方向に対応する部分に中空部61aが形成さ
れており、且つその中空部61aの下側には扇状に切り欠
かれた開放部61bが形成されている。また、注入管31’
や連通管32’と接合せしめられる端面には3個の孔61c
が形成されている。Next, in the above embodiment, FIG. 1 and FIG.
As shown in, the downward pipes 51, 52 are used as the water guiding members for the polishing effluent to the respective filtration chambers 21 ', 22', but the function is to remove the polishing effluent at the bottom of each filtration chamber 21 ', 22'. The downward pipes 51 and 52 are not necessarily used as long as the same function can be realized by introducing the downward guide tubes 51 and 52. For example, a water guide member 61 formed of a molded product as shown in FIG. May be The water guide member 61 is a tubular molded product made of rubber or resin, has a length corresponding to the thickness of each filtration chamber 21 ', 22', and is connected to the injection pipe 31 'and the communication pipe 32'. When provided, a hollow portion 61a is formed in a portion corresponding to each tube axis direction, and a fan-shaped open portion 61b is formed below the hollow portion 61a. Also, the injection tube 31 '
3 holes 61c on the end face to be joined with the communication pipe 32 '
Are formed.
【0043】そして、前記の導水部材61は図6に示す態
様で注入管31’や連通管32’に連設される。尚、同図で
は濾過室21’内で注入管31’に連設されている状態のみ
を示しているが、濾過室22’においても同様の構成で連
通管32’に連列される。この実施形態では、注入管31’
に螺着するフランジナット62に3本の棒63が立設されて
おり、導水部材61の各孔61cに各棒63を圧入することに
よって、その中空部61aと注入管31’とが対応するよう
に位置決めして導水部材61が取り付けられるようになっ
ている。また、導水部材61が取り付けられた状態で濾過
板6’,7’が閉枠されると、図6に示すように導水部材6
1の先端側面は連通管32’側のフランジナット64に接合
し、注入管31’と導水部材61の中空部61aと連通管32’
とが一軸上に整列する。The water guide member 61 is connected to the injection pipe 31 'and the communication pipe 32' in the manner shown in FIG. It should be noted that, although the drawing shows only a state in which it is connected to the injection pipe 31 ′ in the filtration chamber 21 ′, the filtration chamber 22 ′ is also connected to the communication pipe 32 ′ with the same configuration. In this embodiment, the injection tube 31 '
Three rods 63 are erected on a flange nut 62 that is screwed to the. The hollow portion 61a and the injection pipe 31 'correspond by press-fitting each rod 63 into each hole 61c of the water guide member 61. The water guide member 61 is attached with such positioning. When the filtration plates 6'and 7'are closed with the water guiding member 61 attached, as shown in FIG.
The tip side surface of 1 is joined to the flange nut 64 on the side of the communication pipe 32 ', and the injection pipe 31' and the hollow portion 61a of the water guide member 61 and the communication pipe 32 '.
And are aligned on one axis.
【0044】図6の構成に基づき、濾過時において研磨
排液が注入管31’から濾過室21’へ流入せしめられる
と、導水部材61の中空部61aから開放部61bを通じて研磨
排液が濾過室21’の底部へ導かれ、底部に当たった液が
濾過室21’内の研磨排液を下側から巻上げながら緩速撹
拌する。また、濾過室21’を満たした研磨排液の一部は
導水部材61の中空部61aから連通管32’を通じて濾過室2
2’側へ流入するが、濾過室22’においても同様の導水
部材61が連通管32’に連設されているためにその室内で
も緩速撹拌作用が生じる。したがって、上記の実施形態
における下向管51,52に代えて導水部材61を適用しても
同様の効果が得られる。また、導水部材61の着脱は比較
的容易であることから濾布27’,28’,29’,30の取り替
え作業が簡単になる等の利点がある。Based on the configuration of FIG. 6, when the polishing drainage is made to flow from the injection pipe 31 'into the filtration chamber 21' during filtration, the polishing drainage is passed from the hollow portion 61a of the water guiding member 61 to the opening 61b. It is guided to the bottom of 21 ', and the liquid hitting the bottom slowly agitates the polishing effluent in the filtration chamber 21' from below. Further, a part of the polishing effluent that has filled the filtration chamber 21 'is filtered from the hollow portion 61a of the water guide member 61 through the communication pipe 32' to the filtration chamber 2 '.
Although it flows into the 2'side, since a similar water guiding member 61 is connected to the communication pipe 32 'also in the filtration chamber 22', a slow stirring action occurs in that chamber as well. Therefore, the same effect can be obtained by applying the water guide member 61 instead of the downward pipes 51 and 52 in the above-described embodiment. Further, since the water guide member 61 is relatively easily attached and detached, there is an advantage that the replacement work of the filter cloths 27 ', 28', 29 ', 30 is simplified.
【0045】ところで、濾過ケーキの回収が行われた後
の濾布27’,28’,29’,30’は再び濾過板6’,7’,8にセ
ットされ、初期状態とほぼ同様の状態で図4の手順を繰
り返すことができるが、その2回目以降の手順において
は回収した濾過ケーキの一部を通常の濾過助剤と混合し
てプレコート槽45に投入する。即ち、本実施形態の装置
によれば、濾過ケーキとして、プレコート層(濾過助剤)
と共に凝集力が強く通水性の良い粗大化粒子からなる堆
積層が得られており、それを新たな濾過助剤と混合して
用いれば濾過助剤の使用量を節減できる。By the way, the filter cloths 27 ', 28', 29 'and 30' after the collection of the filter cake are set on the filter plates 6 ', 7'and 8 again, and are in a state similar to the initial state. The procedure of FIG. 4 can be repeated with the procedure of FIG. 4, but in the second and subsequent procedures, a part of the collected filter cake is mixed with a normal filter aid and charged into the precoat tank 45. That is, according to the apparatus of the present embodiment, as a filter cake, a precoat layer (filter aid)
At the same time, a deposited layer composed of coarse particles having a strong cohesive force and good water permeability is obtained, and the amount of the filter aid used can be reduced by mixing it with a new filter aid.
【0046】更に、図4の手順を繰り返す度に濾過助剤
に対する濾過ケーキの比率を増してゆくと、プレコート
槽45における粗大化粒子の純度が徐々に大きくなり、数
次の前記手順の繰り返しによって濾過助剤に代えて濾過
ケーキをそのまま適用したプレコート処理を行えるよう
になる。これにより、消耗品である濾過助剤の使用量を
大幅に節減させると共に、濾過ケーキだけを用いた濾過
では回収ケーキから濾過助剤の分離処理を施す必要がな
くなり、そのまま研磨排液に含まれていた銅成分を回収
して再利用することが可能になる。Further, as the ratio of the filter cake to the filter aid is increased each time the procedure of FIG. 4 is repeated, the purity of the coarse particles in the precoat tank 45 gradually increases, and the above-mentioned procedure is repeated several times. It becomes possible to perform the pre-coating process in which the filter cake is directly applied instead of the filter aid. This greatly reduces the amount of consumable filter aid used, and the filtration using only the filter cake eliminates the need to separate the filter aid from the recovered cake, which is included in the polishing effluent as it is. It becomes possible to recover and reuse the copper component that had been used.
【0047】[0047]
【発明の効果】本発明は以上の構成を有していることに
より、次のような効果を奏する。請求項1から請求項3
の発明は、濾過板に対する注入管や連通管の配設位置と
下向管の連設を施すという機械的な構成により濾過室内
で定常的な緩速撹拌作用を生じさせ、濾過対象液のコロ
イド粒子の凝集を促進して凝集力が強く通水性の良い粗
大化粒子を生成させることで、濾過抵抗の低減による濾
過効率の大幅な向上を実現する。また、この発明によれ
ば凝集剤を用いる必要がないため、濾過水の循環再利用
を容易にする。請求項4の発明は、濾過媒体(濾布とプ
レコート層と堆積層)の濾過作用を逐次回復させながら
濾過プロセスを実行することを可能にし、濾過効率の大
幅な向上を実現する。請求項5の発明は、請求項2の発
明において、各回の回復プロセス実行に係るインターバ
ル時間を目安としてリアルタイムな濾過状況を判断し、
濾過体の開枠と濾過ケーキの回収を最も効率的な稼動ス
ケジュールで実行させることを可能にする。請求項6の
発明は、濾過助剤の使用量を大幅に節減させて産業廃棄
物の量を少なくし、また濾過助剤に代えて回収された濾
過ケーキを適用する場合にあっては濾過助剤が不要にな
る。更に、数次のプレコート・濾過プロセスの実行によ
って濾過ケーキに濾過助剤が含まれていない状態になる
と、分離処理を施すことなく濾過対象液に含まれていた
微粒子成分を回収して再利用することが可能になり、資
源の有効利用を図るための工程を簡素化できるという利
点がある。EFFECTS OF THE INVENTION The present invention having the above-mentioned constitution has the following effects. Claims 1 to 3
Of the invention, the mechanical structure of connecting the downward position of the injection pipe and the communication pipe to the filtration plate and connecting the downward pipe to each other causes a steady slow stirring action in the filtration chamber to colloid the liquid to be filtered. By promoting agglomeration of particles to generate coarse particles having a strong aggregating force and good water permeability, it is possible to significantly improve the filtration efficiency by reducing the filtration resistance. Further, according to the present invention, since it is not necessary to use a coagulant, the circulation and reuse of filtered water is facilitated. The invention of claim 4 makes it possible to perform the filtration process while sequentially recovering the filtration action of the filtration medium (the filter cloth, the precoat layer and the deposition layer), and realizes a great improvement in the filtration efficiency. According to a fifth aspect of the present invention, in the second aspect of the present invention, the real-time filtration status is determined by using the interval time for each recovery process execution as a guide.
The open frame of the filter body and the collection of the filter cake can be performed with the most efficient operation schedule. The invention according to claim 6 significantly reduces the amount of the filter aid used to reduce the amount of industrial waste, and when the recovered filter cake is applied instead of the filter aid, the filter aid is used. No need for agents. Furthermore, when the filter cake becomes a state in which the filter aid is not contained by the execution of several precoating / filtering processes, the fine particle component contained in the liquid to be filtered is recovered and reused without performing the separation treatment. Therefore, there is an advantage that the process for achieving effective use of resources can be simplified.
【図1】本発明の濾過脱水装置における濾過体(濾過板
が閉枠された状態)の断面図である。FIG. 1 is a cross-sectional view of a filter body (in a state where a filter plate is closed) in a filtration and dehydration apparatus of the present invention.
【図2】濾過室の下部付近の拡大断面図(濾過室の緩速
撹拌状態も示す)である。FIG. 2 is an enlarged cross-sectional view of the lower part of the filtration chamber (also showing a slow stirring state of the filtration chamber).
【図3】濾過脱水装置のシステム構成図である。FIG. 3 is a system configuration diagram of a filtration / dehydration device.
【図4】濾過脱水装置のシステムの動作手順を示すフロ
ーチャートである。FIG. 4 is a flowchart showing an operation procedure of the system of the filtration and dehydration apparatus.
【図5】導水部材の外観斜視図である。FIG. 5 is an external perspective view of a water guide member.
【図6】下向管に代えて図5の導水部材を適用した場合
における濾過室の下部付近の拡大断面図(濾過室の緩速
撹拌状態も示す)である。FIG. 6 is an enlarged cross-sectional view of the vicinity of the lower part of the filtration chamber when the water guide member of FIG. 5 is applied instead of the downward tube (also showing a slow stirring state of the filtration chamber).
【図7】従来技術に係る濾過脱水装置の正面図(A)及び
そのY-Y矢視断面図(B)である。FIG. 7 is a front view (A) and a cross-sectional view (B) taken along the line YY of the filter dehydrator according to the related art.
【図8】濾過体の開枠状態を示す斜視図である。FIG. 8 is a perspective view showing an open frame state of a filter body.
【図9】濾過体(濾過板が閉枠された状態)の断面図であ
る。FIG. 9 is a cross-sectional view of a filter body (state in which a filter plate is closed).
【図10】濾過脱水装置のシステム構成図である。FIG. 10 is a system configuration diagram of a filter dehydrator.
【図11】開枠状態における濾過体の断面図である。FIG. 11 is a cross-sectional view of the filter body in an open frame state.
【図12】濾過後の濾過媒体部分にプレコート層と堆積
層が形成されている状態を示す拡大断面図である。FIG. 12 is an enlarged cross-sectional view showing a state in which a precoat layer and a deposition layer are formed on the filtration medium portion after filtration.
1,2…側板、3,4…フレーム、5a,5b…ガイド棒、6,6’,
7,7’,8…濾過板、6a,6a’,7a,7a’,8a…枠部、6b,6
b’,7b,7b’,8b…中央板部、9a,9b,10a,10b,11a,11b…
フック、12…油圧シリンダ、12a…作動ロッド、13…押
圧板、14a,14b,15a,15b…チェーン、16…容器、17…シ
ューター、18…台車、19…スタンパ、21,21’,22,22’
…濾過室、23,23’,24,24’,25,25’,26…ネット(通水
層)、27,27’,28,28’,29,29’,30…濾布、31,31’…注
入管、32,32’…連通管、33,33’,34,34’,35,35’,36
…排水孔、41,42,43,49…バルブ、44…ポンプ、45…プ
レコート槽、46…原液槽、47…プレコート層、48…堆積
層、50…循環利用槽、51,52…下向管、53…研磨排液の
供給流路(正ブロー時のエアー供給流路も兼用)、54…圧
力計、55…切換え弁、56…逆ブロー用の管経路、61…導
水部材、61a…中空部、61b…開放部、61c…孔、62,64…
フランジナット、63…棒。1,2… side plate, 3,4… frame, 5a, 5b… guide rod, 6,6 ′,
7,7 ', 8 ... filter plate, 6a, 6a', 7a, 7a ', 8a ... frame part, 6b, 6
b ', 7b, 7b', 8b ... central plate part, 9a, 9b, 10a, 10b, 11a, 11b ...
Hook, 12 ... Hydraulic cylinder, 12a ... Actuating rod, 13 ... Pressing plate, 14a, 14b, 15a, 15b ... Chain, 16 ... Container, 17 ... Shooter, 18 ... Cart, 19 ... Stamper, 21, 21 ', 22, twenty two'
… Filtration room, 23,23 ', 24,24', 25,25 ', 26… net (water passage layer), 27,27', 28,28 ', 29,29', 30… filter cloth, 31, 31 '... injection pipe, 32,32' ... communication pipe, 33,33 ', 34,34', 35,35 ', 36
… Drainage holes, 41, 42, 43, 49… Valves, 44… Pumps, 45… Precoat tanks, 46… Stock solution tanks, 47… Precoat layers, 48… Sedimentation layers, 50… Circulation utilization tanks, 51, 52… Downward Pipe, 53 ... Supply channel for polishing waste liquid (also used as air supply channel at the time of forward blowing), 54 ... Pressure gauge, 55 ... Switching valve, 56 ... Pipe path for reverse blowing, 61 ... Water guiding member, 61a ... Hollow part, 61b ... Open part, 61c ... Hole, 62, 64 ...
Flange nut, 63… rod.
Claims (6)
板部に通水層を介在させて濾布を展着しておき、複数の
濾過板の枠部同士を接合させて1又は2以上の濾過室を
構成する濾過体を具備し、濾過体を構成する一端の濾過
板には中央板部と濾過室側にのみ施されている通水層と
濾布とを貫通した注入管が、また濾過室が複数構成され
る場合にあっては中間に位置する濾過板の中央板部とそ
の両側面に施されている通水層と濾布とを貫通した連通
管が設けられており、注入管を通じて外部から濾過室へ
濾過対象液を注入し、各濾過板の通水層の最下部に設け
られた排水孔を通じて濾過水を外部に排出させる濾過脱
水装置において、注入管と連通管を濾過室の下部領域に
設けると共に、注入管の濾過室側及び連通管の流出側に
濾過対象液を濾過室の底面近傍へ導く導水部材を連設し
たことを特徴とする濾過脱水装置。1. A filter cloth is spread on a central plate part of a filter plate composed of a central plate part and a frame part with a water-permeable layer interposed therebetween, and the frame parts of the plurality of filter plates are joined together to form a filter cloth. Or, it is equipped with a filter body that constitutes two or more filtration chambers, and the filter plate at one end that constitutes the filter body is injected through the central plate portion and the water-permeable layer provided only on the filter chamber side and the filter cloth. In the case where a plurality of pipes or a plurality of filtration chambers are configured, a communication pipe is provided which penetrates the central plate portion of the filter plate located in the middle and the water passage layer and the filter cloth provided on both side surfaces thereof. In the filtration and dehydration device that injects the liquid to be filtered into the filtration chamber from the outside through the injection pipe and discharges the filtered water to the outside through the drain hole provided at the bottom of the water passage layer of each filter plate, The communication pipe is provided in the lower region of the filtration chamber, and the liquid to be filtered is filtered on the filtration chamber side of the injection pipe and the outflow side of the communication pipe. A filtration / dehydration device characterized in that a water-conducting member leading to the vicinity of the bottom surface is continuously provided.
管部材である請求項1に記載の濾過脱水装置。2. The filtration / dehydration apparatus according to claim 1, wherein the water guiding member is a pipe member formed in an elbow shape.
る長さを有し、注入管及び連通管の軸方向に中空部が形
成されていると共に、その下方側に開放部が形成された
成形部材である請求項1に記載の濾過脱水装置。3. The water guide member has a length corresponding to the thickness of the filtration chamber, a hollow portion is formed in the axial direction of the injection pipe and the communication pipe, and an open portion is formed on the lower side thereof. The filtration and dehydration apparatus according to claim 1, which is a molded member.
載の濾過脱水装置において、注入管へ濾過対象液を供給
する管経路にその管内の圧力を計測する圧力計を設ける
と共に、前記管経路にエアーを供給するエアー供給系を
設け、圧力計の計測値が所定以上になった場合に、濾過
対象液の注入を一端停止し、エアー供給系から前記管経
路にエアーを供給する正ブローを行い、その後に濾過対
象液の注入を再開するプロセスを実行することを特徴と
した濾過脱水方法。4. The filtration / dehydration device according to claim 1, 2, or 3, wherein a pressure gauge for measuring the pressure in the pipe is provided in a pipe path for supplying the liquid to be filtered to the injection pipe, An air supply system for supplying air to the pipe path is provided, and when the measured value of the pressure gauge exceeds a predetermined value, the injection of the liquid to be filtered is once stopped and the air is supplied from the air supply system to the pipe path. A method for filtering and dehydrating, which comprises performing a forward blow and then performing a process of restarting the injection of the liquid to be filtered.
が複数回連続して実行されている状態において、注入管
への濾過対象液の供給開始時から圧力計の計測値が所定
以上になるまでの時間を計測し、その計測時間が所定以
下になった段階で、濾過対象液の注入を停止し、エアー
供給系から前記管経路にエアーを供給して濾布に付着し
ている濾過ケーキの脱水を行うための正ブローと、各濾
過板の排水孔にエアーを供給して濾過ケーキに剥離性を
与えるための逆ブローとを実行し、その後に各濾過板の
接合状態を開放して濾過ケーキを濾布から剥離させるこ
とを特徴とした請求項4に記載の濾過脱水方法。5. The measurement value of the pressure gauge becomes a predetermined value or more from the start of supplying the liquid to be filtered to the injection pipe in a state where the process based on the measurement value of the pressure gauge is continuously executed a plurality of times. Up to a predetermined time, the injection of the liquid to be filtered is stopped, and air is supplied from the air supply system to the pipe path to attach the filter cake to the filter cloth. To perform dewatering, and reverse blow to supply air to the drain holes of each filter plate to give peelability to the filter cake, and then open the joined state of each filter plate. The filtration dehydration method according to claim 4, wherein the filter cake is peeled from the filter cloth.
載の濾過脱水装置において、プレコートの実行の際に、
通常の濾過助剤に対して事前に剥離・回収した濾過ケー
キの一部を混合したものを、又は通常の濾過助剤に代え
て回収ケーキの一部を濾過助剤として適用することとし
た濾過脱水方法。6. The filtration / dehydration apparatus according to claim 1, 2, or 3, wherein precoating is performed.
Filtration by applying a mixture of a part of the filter cake that was peeled and collected in advance to a normal filter aid, or by applying a part of the recovered cake as a filter aid instead of the normal filter aid. Dehydration method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000157634A JP3398356B2 (en) | 2000-05-29 | 2000-05-29 | Filtration dehydration apparatus and filtration dehydration method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000157634A JP3398356B2 (en) | 2000-05-29 | 2000-05-29 | Filtration dehydration apparatus and filtration dehydration method |
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| Publication Number | Publication Date |
|---|---|
| JP2001334110A JP2001334110A (en) | 2001-12-04 |
| JP3398356B2 true JP3398356B2 (en) | 2003-04-21 |
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ID=18662231
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| JP6221579B2 (en) * | 2013-09-30 | 2017-11-01 | 日立金属株式会社 | Method of barrel polishing rare earth sintered magnet |
| CN111592147A (en) * | 2020-06-04 | 2020-08-28 | 双福源(天津)环境科技发展有限公司 | Organic waste liquid treatment and recovery method |
| CN111635034A (en) * | 2020-06-04 | 2020-09-08 | 双福源(天津)环境科技发展有限公司 | Organic waste liquid filtration device and organic waste liquid treatment and recovery system |
| JP7449467B2 (en) | 2021-01-06 | 2024-03-14 | 株式会社石垣 | Filter press cake blowing method |
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2000
- 2000-05-29 JP JP2000157634A patent/JP3398356B2/en not_active Expired - Fee Related
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