JP3403339B2 - How to raise the temperature of a pulse tube refrigerator - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heating method for a pulse tube refrigerator.

[0002]

2. Description of the Related Art In recent years, a cryopump is one of the devices for which the use of a pulse tube refrigerator has been researched and developed. This cryopump realizes a high vacuum by adsorbing gas molecules on an adsorption panel attached to a cold head (cold end) of a refrigerator. In such a cryopump, the performance deteriorates when a certain amount or more of gas molecules are adsorbed on the adsorption panel and the layer of gas molecules becomes thicker. Therefore, the adsorption panel is heated to remove the gas molecules adsorbed on the adsorption panel to the outside. Need to be released. Further, during this period, gas molecules cannot be adsorbed on the adsorption panel, so that the actual operating time of the cryopump is lengthened by shortening the temperature rising time.

Usually, the temperature of the adsorption panel is raised by stopping the operation of the refrigerator and conducting natural heat conduction and radiation of the structure (natural temperature rise). It is also performed by attaching a heater to a cold head or the like to supply electric energy.

However, there is a problem that it takes time to raise the temperature when the temperature is raised naturally. The reason is that the components are designed to reduce heat conduction and radiation in order to reduce loss as a refrigerator. On the other hand, in the case of heating with a heater, although the temperature rise time is faster than the natural temperature rise, deterioration occurs because the heater and the lead wire are in the portion exposed to extremely low temperature and vacuum. Moreover, vacuum leakage is likely to occur at the part where the lead wire is taken in and out from the vacuum part to the atmosphere. In addition, it requires electric energy and requires a power supply and a controller, which complicates the system and causes price increase and failure.

Therefore, in the double inlet type pulse tube refrigerator, there has been proposed a temperature raising operation method utilizing a bypass valve which is a structural feature of the refrigerator (Japanese Patent Laid-Open No. 8-152).
No. 212). This temperature rising operation method is performed using a double inlet type pulse tube refrigerator as shown in FIG. That is, the compressor 41 is connected to the regenerator high temperature end 43h of the regenerator 43 (in which wire mesh or the like is filled) via the pressure switching valve 42 of high pressure and low pressure, and the regenerator low temperature end 4 is connected.
3c is connected to the pulse tube low temperature end 44c of the pulse tube 44. Further, the high temperature end 44h of the pulse tube 44 is connected to the buffer container 46 via the orifice 45 whose degree of opening and closing is variable. On the other hand, a bypass passage 47 is provided for a passage passing through the regenerator 43 and the pulse tube 44, and a bypass valve 48 is arranged in the bypass passage 47. The pulse tube low temperature end 44c of the pulse tube 44 is thermally connected to the adsorption panel (not shown) of the cryopump.

In the above double-inlet type pulse tube refrigerator, the orifice 45 and the bypass valve 48 are set to the proper openings during normal operation (cooling operation). When the pressure switching valve 42 is on the high pressure side, the working gas compressed by the compressor 41 flows into the regenerator 43 from the regenerator high temperature end 43h, and then from the regenerator low temperature end 43c to the pulse tube low temperature end 44c. Through the pulse tube 44. At the same time, a part of the working gas compressed by the compressor 41 passes from the high temperature end 44h of the pulse tube 44 to the pulse tube 44 via the bypass valve 48.
Flows in. As a result, the pressure of the pulse tube 44 becomes higher than the pressure of the buffer container 46, and the working gas flows into the buffer container 46 from the high temperature end 44h of the pulse tube via the orifice 45.

When the pressure switching valve 42 is switched to the low pressure side,
The working gas in the pulse tube 44 flows from the pulse tube low temperature end 44c toward the regenerator 43, and flows into the compressor 41 via the regenerator low temperature end 43c and the regenerator high temperature end 43h. At the same time, a part of the working gas in the pulse tube 44 flows into the compressor 41 from the high temperature end 44h of the pulse tube via the bypass valve 48. As a result, the pressure of the pulse tube 44 becomes lower than the pressure of the buffer container 46, and the working gas in the buffer container 46 flows into the pulse tube 44 through the orifice 45. At the same time, a part of the working gas in the buffer container 46 flows into the compressor 41 via the bypass valve 48.

On the other hand, when the temperature is raised, the compressor 41 is operated with the orifice 45 fully closed and the opening of the bypass valve 48 larger than the proper opening. This eliminates the working gas passing through the orifice 45. Further, when the pressure switching valve 42 is on the high pressure side, the working gas compressed by the compressor 41 flows into the pulse tube 44 via the bypass valve 48, and the pulse tube low temperature end 44 is heated while being compressed and heated.
It reaches c and emits heat. Further, when the pressure switching valve 42 is on the low pressure side, the working gas in the pulse tube 44 expands from the low temperature end 44c of the pulse tube and the temperature decreases, while the high temperature end 44 of the pulse tube is reduced.
It reaches h and absorbs heat. Then, by repeating this cycle, the heat carried from the high temperature side to the low temperature side in the pulse tube 44 increases, and the temperature of the pulse tube low temperature end 44c rises.

[0009]

However, in the above temperature rising operation method, the working gas is put in to warm it and then to be taken out (that is, when the pressure switching valve 42 is on the high pressure side, the compressor 4
The working gas discharged from the regenerator 1 and the pulse tube 4
4 is introduced, and when it is on the low-pressure side, the temperature is raised by repeating the operation of deriving the cooled working gas from the regenerator 43 and the pulse tube 44 and returning it to the compressor 41. Although the temperature rising time can be shortened as compared with the natural temperature rising, there still remains a problem that the temperature rising takes time.

The present invention has been made in view of the above circumstances, and has a highly reliable pulse which has a short temperature rising time, does not require additional energy from the outside, and has no risk of leakage or failure. It is an object of the present invention to provide a method for raising the temperature of a tube refrigerator.

[0011]

In order to achieve the above-mentioned object, the present invention is provided with a compressor, a pulse tube, and a first flow path that connects the compressor discharge port and the pulse tube low temperature end. Second high-pressure valve that connects the compressor suction port and the low temperature end of the pulse tube
A method for raising the temperature of a pulse tube refrigerator equipped with a low-pressure valve arranged in a flow path, wherein the compressor is operated with the high-pressure valve closed and the low-pressure valve opened, and discharged from the compressor discharge port. After introducing the working gas into the high temperature port of the pulse tube and passing through the low temperature end of the pulse tube through the inside of the pulse tube, it is returned to the compressor suction port through the low pressure valve, and the working gas discharged from the compressor discharge port is discharged.
A means to introduce into the high temperature port of the pulse tube is provided with an on-off valve in the middle.
And a conduit with a throttle valve in series with this on-off valve.
Yes, one end of this conduit is connected to the compressor discharge
Connect the part between the outlet and the high pressure valve, and
Communicate with the high temperature port of the pipe, close the on-off valve during freezing operation,
The first gist is a method for raising the temperature of a pulse tube refrigerator in which the on-off valve is opened when the temperature is raised, and a compressor, a pulse tube, and
A high pressure valve disposed in a first flow passage that connects the compressor discharge port and the low temperature end of the pulse tube, and a low pressure valve disposed in a second flow path that communicates the compressor suction port and the low temperature end of the pulse tube. A method for increasing the temperature of a pulse tube refrigerator comprising a high pressure valve closed and a low pressure valve opened, the compressor is operated, and the working gas discharged from the compressor discharge port is supplied to the pulse tube high temperature port . After having passed through the through and pulse tube cold end of the pulse tube <br/> introduced, then returned to the compressor inlet via the low-pressure valve, the discharge from the compressor discharge port
The means for introducing the working gas into the high temperature port of the pulse tube
It is a conduit with an on-off valve provided at the end of the conduit.
Communicates between the compressor discharge port and the high pressure valve in one flow path
Then, connect the other end of the above conduit to the high temperature port of the pulse tube and
When switching, the on-off valve is closed, and when the temperature rises, the on-off valve is opened.
The on-off valve is an on-off valve that opens and closes intermittently.
A second aspect of the method for raising the temperature of a pulse tube refrigerator is a compressor, a pulse tube, and a high pressure valve arranged in a first flow path that connects the compressor discharge port and the pulse tube low temperature end. A method for raising the temperature of a pulse tube refrigerator , comprising: a low pressure valve provided in a second flow path that connects the compressor suction port and the low temperature end of the pulse tube; Te, close the high-pressure valve,
And operating the compressor in a state of opening the low pressure valve, the working gas discharged from the compressor discharge port is introduced to the phase control device the phase
After passing through the control device , from the high temperature port of the pulse tube to the pulse tube
Introduced into the low pressure valve via the low temperature end of the pulse tube and then the low pressure valve
Back to the compressor inlet through the compressor outlet.
The means for introducing the working gas discharged from the
An on-off valve was installed on the way and throttled in series with this on-off valve.
A conduit provided with a valve, and one end of the conduit is connected to the first flow
Connect the part of the path between the compressor outlet and the high pressure valve,
Connect the other end of the conduit to the phase control device and
A third aspect of the invention is a method of raising the temperature of a pulse tube refrigerator in which the on-off valve is closed and the on-off valve is opened when the temperature rises. The compressor, the pulse tube, the compressor discharge port, and the pulse a low-pressure valve which is disposed a high-pressure valve which is disposed a tube low temperature end to the first flow path communicating the compressor inlet and the pulse tube low temperature end to the second flow path communicating the pulse tube a heating method of the pulse tube refrigerator comprising a phase controller in communication with the hot port, closing the high pressure valve,
And operating the compressor in a state of opening the low pressure valve, the working gas discharged from the compressor discharge port is introduced to the phase control device the phase
After passing through the control device , from the high temperature port of the pulse tube to the pulse tube
Introduced into the low pressure valve via the low temperature end of the pulse tube and then the low pressure valve
Back to the compressor inlet through the compressor outlet.
The means for introducing the working gas discharged from the
A conduit with an on-off valve in the middle.
Note In the first flow path, it is connected to the part between the compressor discharge port and the high pressure valve.
The other end of the above-mentioned conduit to the phase control device,
When switching, the on-off valve is closed, and when the temperature rises, the on-off valve is opened.
The on-off valve is an on-off valve that opens and closes intermittently.
That the pulse tube refrigerator Atsushi Nobori process and the fourth aspect, the compressor
Connect the pulse tube, the compressor discharge port and the low temperature end of the pulse tube.
A high-pressure valve arranged in the first flow path, and a compressor suction port
Low pressure disposed in the second flow path communicating with the low temperature end of the pulse tube
A method for heating a pulse tube refrigerator equipped with a valve, comprising:
Operate the compressor with the valve closed and the high pressure valve open,
The working gas discharged from the compressor discharge port is discharged through the high pressure valve.
The high temperature of the pulse tube introduced through the low temperature end of the loose tube
After drawing out from the mouth, return it to the compressor suction port,
The working gas derived from the high temperature port of the loose tube is returned to the compressor inlet.
The opening and closing valve is installed on the way and
It is a conduit with a throttle valve in series, and one end of this conduit is
In the portion between the compressor suction port and the low pressure valve in the second flow path,
Communication, the other end is connected to the high temperature port of the pulse tube,
Close the on-off valve and open it when the temperature rises
The method of raising the temperature of the pulse tube refrigerator described above is the fifth gist, and compression is performed.
Machine, pulse tube, compressor discharge port and pulse tube low temperature end
High pressure valve provided in the first flow path communicating with the compressor suction port
And the low temperature disposed in the second flow path that communicates the low temperature end with the pulse tube.
A method for increasing the temperature of a pulse tube refrigerator equipped with a pressure valve, comprising:
Operate the compressor with the pressure valve closed and the high pressure valve open
The working gas discharged from the compressor discharge port through the high pressure valve.
Pulse tube introduced into the low temperature end and passed through the pulse tube
After drawing out from the high temperature port, return it to the compressor intake port
Then, the working gas derived from the high temperature port of the pulse tube is sucked into the compressor.
The means for returning to the mouth is a conduit with an on-off valve
One end of the conduit of the
It communicates with the part between the pressure valves, and the other end communicates with the high temperature port of the pulse tube.
The above-mentioned on-off valve is closed during freezing operation, and the above-mentioned on-off valve is opened during temperature increase.
Open the valve so that the on-off valve opens and closes intermittently.
The sixth summary of the method for raising the temperature of the pulse tube refrigerator, which is an on-off valve,
The compressor, the pulse tube, the compressor outlet and the pulse tube
A high pressure valve arranged in the first flow path communicating with the warm end, and a compression
Arranged in the second flow path that connects the machine inlet and the low temperature end of the pulse tube
Phase control device that communicates with the low pressure valve and the high temperature port of the pulse tube.
And a low temperature method for a pulse tube refrigerator equipped with
Operate the compressor with the valve closed and the high pressure valve open,
The working gas discharged from the compressor discharge port is discharged through the high pressure valve.
The high temperature of the pulse tube introduced through the low temperature end of the loose tube
After deriving it from the mouth, it was introduced into the phase control device and
Return to the compressor suction port through the
For introducing the working gas derived from the compressor into the compressor inlet
However, an on-off valve was installed in the middle and it was in series with this on-off valve.
A conduit provided with a throttle valve at one end of the conduit.
Communicates between the compressor suction port and the low pressure valve in the two flow paths
And connect the other end to the phase controller to open the above during freezing operation.
A valve that closes the valve so that the on-off valve can be opened when the temperature rises.
The 7th gist is the method of raising the temperature of the loose tube refrigerator, and the compressor,
Connect the pulse tube with the compressor discharge port and the low temperature end of the pulse tube.
High pressure valve installed in the first flow path, the compressor suction port and the
Low pressure valve provided in the second flow path communicating with the low temperature end of the pipe
And a phase control device communicating with the high temperature port of the pulse tube.
How to raise the temperature of the pulse tube refrigerator ,
Operation of the compressor with the high pressure valve open
The working gas discharged from the pulse tube is passed through the high pressure valve to the low temperature end of the pulse tube.
Of the pulse tube through the high temperature port of the pulse tube
After that, introduce it into the phase controller and through the phase controller
Return it to the compressor suction port and lead it out from the phase control device.
The means for introducing the working gas into the compressor inlet opens
A conduit provided with a valve, and one end of the conduit is connected to the second flow
In the passage, connect to the part between the compressor inlet and the low pressure valve, etc.
Connect the end to the phase control device and open the on-off valve during freezing operation.
When the temperature is raised, the on-off valve should be opened when the temperature rises.
The valve is an open / close valve that opens and closes intermittently.
The eighth method is the temperature raising method .

That is, according to the method of raising the temperature of the pulse tube refrigerator of the present invention, when the temperature is raised, the refrigerating operation is temporarily stopped and each valve is opened and closed so that the warm working gas discharged from the compressor flows in one direction. Then, operate the compressor in that state. As a result, the warm working gas discharged from the compressor circulates in one direction inside the pulse tube refrigerator, and is introduced into the cold end inside the pulse tube refrigerator in the middle of this flow. Quickly heat up the ends. Therefore, in the present invention, the temperature of the pulse tube refrigerator can be raised more quickly than in the conventional temperature raising operation method. Moreover, it does not require additional energy from the outside, and there is no risk of leakage or failure.

In the present invention , the means for introducing the working gas discharged from the compressor discharge port into the pulse tube or the phase control device is a conduit having an opening / closing valve in the middle thereof, so that it has a simple structure and has the above excellent effects. It is possible to realize the temperature raising method having.

In the present invention, when the throttle valve is arranged in series with the on-off valve in the conduit, the flow rate of the working gas introduced into the pulse tube or the phase control device can be adjusted at the time of temperature rise. The temperature rising time can be adjusted. Also, when the flow rate of the working gas is very large, the cold working gas may rapidly cool the room temperature part to cause dew condensation on the suction side of the compressor or damage to components. By adjusting the flow rate of the compressor, it is possible to prevent dew condensation on the suction side of the compressor and damage to the components.

Further, in the present invention, even when the on-off valve is an on-off valve which opens and closes intermittently, it is introduced into the pulse tube or the phase control device by changing the ratio of the open time and the closed time of the on-off valve. The flow rate of the working gas can be adjusted. Therefore, the same effect as when the throttle valve is arranged in series with the on-off valve is provided in the conduit. Moreover, there is an effect that only one valve is required.

[0016]

BEST MODE FOR CARRYING OUT THE INVENTION Next, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 shows an embodiment of a pulse tube refrigerator used in the present invention. In the figure, 1 is a compressor,
Reference numeral 2 is a regenerator, 3 is a cold head, 4 is a pulse tube, and a compressor suction port and an inlet pipe 9 extending from the regenerator high temperature port of the regenerator 2 are conduits with a low-pressure valve 5 (second flow path). 6, the compressor discharge port and the inlet pipe 9 are connected via a conduit (first flow path) 8 with a high pressure valve 7. In contrast to such a basic structure of a normal pulse tube refrigerator, in this embodiment, an opening / closing valve is provided in the conduit 8 with the high pressure valve 7 at a portion between the compressor discharge port and the high pressure valve 7. One end of the temperature raising conduit 11 provided with 10 is connected, and the other end is connected to the pulse tube high temperature port of the pulse tube 4. In addition, in this embodiment
Connects a throttle valve 22 to the conduit 11 in series with the on-off valve 10.
It is installed in.

In the above structure, in normal time (during freezing operation)
The high pressure valve 7 and the low pressure valve 5 with the on-off valve 10 closed.
Are opened and closed in a predetermined procedure to cool the cold head 3. When the temperature rises, the refrigerating operation is temporarily stopped, the low pressure valve 5 and the open / close valve 10 are opened, and the high pressure valve 7 is closed.
The compressor 1 is operated in that state. As a result, the working gas circulates inside the pulse tube refrigerator. That is,
High-pressure, room-temperature working gas compressed by the compressor 1 (for example,
Helium gas) flows through the conduit 8 , the throttle valve 22 , and the conduit 11 with the on-off valve 10 into the pulse tube 4 from the high temperature port of the pulse tube, then passes through the cold head 3, the regenerator 2, and the hot port of the regenerator. It is collected in the compressor 1 via the pipe 9 and the conduit 6 with the low pressure valve 5 (see the arrow in FIG. 2). Then, in the middle of this circulating flow, the working gas at room temperature exchanges heat with the cold head 3 and a low temperature portion in the vicinity thereof, and the temperature of the cold head 3 rises.

As described above, in this embodiment, when the temperature is raised, the refrigerating operation is temporarily stopped and the valves 5, 7, 10 are opened and closed so that the working gas discharged from the compressor 1 flows in one direction. The compressor 1 is operated in that state. As a result, the working gas at room temperature circulates inside the pulse tube refrigerator, is introduced into the cold head 3, and quickly raises the temperature of the cold head 3. Also, the structure does not require a heater,
There is no risk of leakage or breakdown. Moreover, the conduit 11 has a throttle valve.
Since 22 is provided, it is introduced into the pulse tube 4 when the temperature is raised.
The flow rate of the working gas can be adjusted, which
The temperature rise time can be adjusted and the compressor suction side
It can also prevent condensation and damage to components.

FIG. 3 shows another embodiment of the pulse tube refrigerator used in the present invention. In this embodiment, FIG.
In contrast to the basic structure in the embodiment of the above, in the portion of the conduit 6 with the low pressure valve 5 between the compressor suction port and the low pressure valve 5,
One end of a temperature raising conduit 14 provided with an on-off valve 13 on the way is connected, and the other end is connected to the pulse tube high temperature port of the pulse tube 4. Also in this embodiment, the throttle valve is provided in the conduit 14.
22 is arranged in series with the on-off valve 13. Therefore, in this embodiment, the diaphragm in the embodiment of FIG.
The return valve 22 and the conduit 11 with the on- off valve 10 are not provided. The other parts are the same as those in the embodiment of FIG. 1, and the same parts are denoted by the same reference numerals.

In the above structure, in normal time (during freezing operation)
The high pressure valve 7 and the low pressure valve 5 with the on-off valve 13 closed.
Is opened and closed by a predetermined procedure (a procedure similar to the embodiment of FIG. 1) to cool the cold head 3. When the temperature rises, the refrigerating operation is temporarily stopped, the high pressure valve 7 and the open / close valve 13 are opened, and the low pressure valve 5 is closed, and the compressor 1 is operated in that state. As a result, the working gas circulates inside the pulse tube refrigerator. That is, the high-pressure, room-temperature working gas compressed by the compressor 1 passes through the conduit 8 with the high-pressure valve 7 and the inlet pipe 9 and flows into the regenerator 2 from the high temperature port of the regenerator, and then the cold head 3 and the pulse pipe 4 Through the high temperature port of the pulse tube, the throttle valve 22, the conduit 14 with the on- off valve 13, the conduit 6
It is recovered by the compressor 1 via (see the arrow in FIG. 4).
Then, in the middle of this circulating flow, the working gas at room temperature exchanges heat with the cold head 3 and a low temperature portion in the vicinity thereof, and the temperature of the cold head 3 rises.

As described above, in this embodiment as well, FIG.
The same operation and the same effect as those of the embodiment described above.

FIG. 5 shows still another embodiment of the pulse tube refrigerator used in the present invention. In this embodiment, a pair of buffer tanks 16a and 16b and open / close valves 17a and 17 are used as an active buffer type phase control device.
The connecting pipes 18a and 18b with b are used to connect the buffer tanks 16a and 16b to the connecting pipes 1 with the on-off valves 17a and 17b.
It is connected to the high temperature port of the pulse tube via 8a and 18b (see Japanese Patent No. 2553822). Then, in the conduit 8 with the high pressure valve 7, one end of a temperature raising conduit 20 provided with an opening / closing valve 19 in the middle is connected to a portion between the compressor discharge port and the high pressure valve 7, and the other end is connected. One buffer tank 16a
Connection to the high temperature port of the pulse tube via the buffer tank 16a and the connecting tube 18a with the opening / closing valve 17a. Also in this embodiment, the conduit 20 is
A throttle valve 22 is arranged in series with the opening / closing valve 19. The other parts are the same as those in the embodiment of FIG. 1, and the same parts are denoted by the same reference numerals.

In the above structure, in normal time (during freezing operation)
First, with the on-off valve 19 closed, the high pressure valve 7, the low pressure valve 5, the on-off valves 17a and 17b are opened and closed in a predetermined procedure to cool the cold head 3. When the temperature is raised, the refrigerating operation is temporarily stopped, the low pressure valve 5 and the open / close valves 17a and 19 are opened, and the high pressure valve 7 and the open / close valve 17b are closed.
The compressor 1 is operated in that state. As a result, the working gas circulates inside the pulse tube refrigerator. That is,
The high-pressure, room-temperature working gas compressed by the compressor 1 is supplied to the conduit 8 ,
After passing through the throttle valve 22 and the conduit 20 with the opening / closing valve 19 into the buffer tank 16a, and passing through the buffer tank 16a and the connecting pipe 18a with the opening / closing valve 17a, it flows into the pulse pipe 4 from the high temperature port of the pulse pipe, and is cold. Pass through the head 3 and the regenerator 2. After that, it is recovered from the high temperature port of the regenerator to the compressor 1 via the inlet pipe 9 and the conduit 6 with the low pressure valve 5 (Fig. 6).
See the arrow). Then, in the middle of this circulating flow, the working gas at room temperature exchanges heat with the cold head 3 and a low temperature portion in the vicinity thereof, and the temperature of the cold head 3 rises.

Also in this embodiment, when the temperature is raised, the same operation and the same effect as those of the embodiment of FIG. 1 are obtained.

FIG. 7 shows still another embodiment of the pulse tube refrigerator used in the present invention. In this embodiment, in the embodiment of FIG. 1, the conduit 11, intermittently
Close valve 1 0 for opening and closing are disposed. In the conduit 11
The throttle valve 22 is not provided. The other parts are the same as those in the embodiment of FIG. 1, and the same parts are denoted by the same reference numerals.

Also in this embodiment, the same operation and the same effect as the embodiment of FIG. 1 are achieved. That is, when the temperature is raised
Then, the refrigeration operation is temporarily stopped and the operation discharged from the compressor 1
The valves 5, 7, and 10 are opened and closed so that the gas flows in one direction.
The compressor 1 is operated in that state. This allows room temperature
Working gas circulates inside the pulse tube refrigerator,
Introduced into the cold head 3 to quickly move the cold head 3
Raise the temperature. Also, the structure does not require a heater,
There is no risk of leakage or breakdown. Moreover, the conduit 11 has intermittent
Since the on-off valve 10 that opens and closes automatically is provided,
The flow rate of the working gas introduced into the pulse tube 4 can be adjusted by changing the ratio of the opening time and the closing time of the on-off valve 10 , whereby the temperature rising time can be adjusted and the compressor suction It is also possible to prevent condensation on the side and damage to the components. Further, there is an effect that only one valve is required.

In the embodiment shown in FIG. 5, the other end of the conduit 20 may be connected to the connecting pipe 18a with the opening / closing valve 17a, or the buffer tank 16b or the opening / closing valve 17 may be connected.
You may connect to the connecting pipe 18b with b.

In addition, the temperature raising method of the present invention is an orifice type,
It may be used for a pulse tube refrigerator with a phase control device such as a double inlet type.

Further, in the embodiment shown in FIGS. 3 and 5, the conduits 14 and 20 are different from those in the embodiment shown in FIG.
Removed al throttle valve 22, and, as an open close valve 1 3 and 19, it is also possible to use an on-off valve for intermittently opening and closing.

Further, in the embodiment shown in FIG. 5, an on-off valve 19 and a throttle valve 22 are provided in the middle of a portion of the conduit 6 with the low pressure valve 5 between the compressor suction port and the low pressure valve 5. One end of the temperature raising conduit 20 is connected and the other end is connected to the buffer tank 1
It may be connected to 6b. In this case, the compressor 1 is operated with the high pressure valve 7 and the on-off valves 17b and 19 opened and the low pressure valve 5 and the on-off valve 17a closed at the time of temperature increase.

In each of the above embodiments, instead of the compressor 1, gas may be introduced from the outside into the conduit 8 and recovered (released) from the conduit 6.

[0033]

As described above, according to the temperature raising method of the pulse tube refrigerator of the present invention, the temperature of the pulse tube refrigerator can be raised more quickly than the conventional temperature raising operation method. Moreover,
It does not require additional energy from the outside and there is no risk of leakage or failure.

[0034] In the present invention, since means for introducing the working gas discharged from the compressor discharge to the pulse tube or phase control device is a conduit provided with a closing valve in the middle, with a simple structure, the excellent effect It is possible to realize the temperature raising method having.

In the present invention, when the throttle valve is arranged in series with the on-off valve in the conduit, the flow rate of the working gas introduced into the pulse tube or the phase control device can be adjusted at the time of temperature rise. The temperature rising time can be adjusted. Also, when the flow rate of the working gas is very large, the cold working gas may rapidly cool the room temperature part to cause dew condensation on the suction side of the compressor or damage to components. By adjusting the flow rate of the compressor, it is possible to prevent dew condensation on the suction side of the compressor and damage to the components.

Further, in the present invention, even when the open / close valve is an open / close valve which is opened / closed intermittently, it is introduced into the pulse tube or the phase control device by changing the ratio of the open / close time of the open / close valve. The flow rate of the working gas can be adjusted. Therefore, the same effect as when the throttle valve is arranged in series with the on-off valve is provided in the conduit. Moreover, there is an effect that only one valve is required.

[Brief description of drawings]

FIG. 1 is a configuration diagram showing an embodiment of a pulse tube refrigerator used in the present invention.

FIG. 2 is an explanatory diagram showing a flow of working gas of the pulse tube refrigerator.

FIG. 3 is a configuration diagram showing another embodiment of a pulse tube refrigerator used in the present invention.

FIG. 4 is an explanatory diagram showing a flow of a working gas of the pulse tube refrigerator.

FIG. 5 is a configuration diagram showing still another embodiment of a pulse tube refrigerator used in the present invention.

FIG. 6 is an explanatory diagram showing a flow of working gas of the pulse tube refrigerator.

FIG. 7 is a configuration diagram showing still another embodiment of a pulse tube refrigerator used in the present invention.

FIG. 8 is a configuration diagram showing a conventional example.

[Explanation of symbols]

1 compressor 4 pulse tubes 5 Low pressure valve 6,8 conduit 7 High pressure valve

─────────────────────────────────────────────────── ─── Continuation of front page (56) References JP-A-10-232057 (JP, A) JP-A-8-271074 (JP, A) JP-A-8-152212 (JP, A) (58) Field (Int.Cl. ⁷ , DB name) F25B 9/00 311

Claims (8)

(57) [Claims] 1. A compressor, a pulse tube, a high-pressure valve arranged in a first flow path communicating the compressor discharge port and a low temperature end of the pulse tube, a compressor suction port and a low temperature end of the pulse tube. Second communicating
A method for raising the temperature of a pulse tube refrigerator equipped with a low-pressure valve arranged in a flow path, wherein the compressor is operated with the high-pressure valve closed and the low-pressure valve opened, and discharged from the compressor discharge port. After introducing the working gas into the high temperature port of the pulse tube and passing through the low temperature end of the pulse tube through the inside of the pulse tube, it is returned to the compressor inlet through the low pressure valve, and the working gas discharged from the compressor outlet is
A means to introduce into the high temperature port of the pulse tube is provided with an on-off valve in the middle.
And a conduit with a throttle valve in series with this on-off valve.
Yes, one end of this conduit is connected to the compressor discharge
Connect the part between the outlet and the high pressure valve, and
Communicate with the high temperature port of the pipe, close the on-off valve during freezing operation,
A method for raising the temperature of a pulse tube refrigerator , wherein the on-off valve is opened when the temperature is raised. 2. A compressor , a pulse tube, and a compressor discharge port
High pressure disposed in the first flow path communicating with the low temperature end of the pulse tube
A second valve that connects the valve, the compressor inlet, and the low temperature end of the pulse tube
Riser of a pulse tube refrigerator with a low pressure valve arranged in the flow path
It is a warm method in which the high pressure valve is closed and the low pressure valve is opened.
The compressor is operated in the state and the operating gas discharged from the compressor discharge port is
Pulse into the high temperature port of the pulse tube and pulse through the pulse tube
After passing through the low temperature end of the pipe, the suction port of the compressor through the low pressure valve
The means for introducing the working gas discharged from the compressor discharge port into the high temperature port of the pulse tube is a conduit provided with an on-off valve in the middle, and one end of this conduit is one of the first flow paths.
It communicates with the portion between the compressor discharge port and the high pressure valve, communicates the other end of the above-mentioned conduit with the high temperature port of the pulse tube, closes the on-off valve during freezing operation, and opens the on-off valve when the temperature rises.
The closing valve is an opening / closing valve that opens and closes intermittently.
Heating method that the pulse tube refrigerator. 3. A compressor, a pulse tube, a high-pressure valve arranged in a first flow path communicating the compressor discharge port and the low temperature end of the pulse tube, a compressor suction port and a low temperature end of the pulse tube. Second communicating
A method of raising the temperature of a pulse tube refrigerator provided with a low pressure valve arranged in a flow path and a phase control device communicating with the high temperature port of the pulse tube, wherein the high pressure valve is closed and the low pressure valve is opened. After operating the compressor, introducing the working gas discharged from the compressor discharge port into the phase control device and passing it through the phase control device, then introducing it from the high temperature port of the pulse tube into the pulse tube and passing through the low temperature end of the pulse tube. After that , the working gas discharged from the compressor discharge port is returned to the compressor suction port via the low pressure valve, and the phase control device
The means for introducing the
It is a conduit with a throttle valve in series with the on-off valve of
One end of the pipe is connected to the compressor discharge port and the high pressure valve in the first flow path.
The other end of the above-mentioned conduit to the phase control device.
Through, the above-mentioned on-off valve is closed during the freezing operation, and the above-mentioned open valve is opened when the temperature rises.
A method for raising the temperature of a pulse tube refrigerator, characterized in that the valve is opened . 4. A compressor , a pulse tube, and a compressor discharge port
High pressure disposed in the first flow path communicating with the low temperature end of the pulse tube
A second valve that connects the valve, the compressor inlet, and the low temperature end of the pulse tube
Communicates with the low pressure valve installed in the flow path and the high temperature port of the pulse tube
A method for raising the temperature of a pulse tube refrigerator provided with a phase control device.
The compressor with the high pressure valve closed and the low pressure valve opened.
To control the phase of the working gas discharged from the compressor discharge port.
After introducing it to the control device and passing it through the phase control device, pulse
It is introduced into the pulse tube from the high temperature end of the tube and passes through the low temperature end of the pulse tube.
After that, return it to the compressor inlet through the low pressure valve.
The means for introducing the working gas discharged from the compressor discharge port to the phase control device is a conduit provided with an on-off valve in the middle, and one end of this conduit is connected to the compressor discharge port of the first flow path. It communicates with the part between the high pressure valves, communicates the other end of the conduit with the phase control device, closes the opening / closing valve during freezing operation, and opens the opening / closing valve during temperature increase.
A method for raising the temperature of a pulse tube refrigerator, which is an on-off valve that opens and closes selectively . 5. A compressor, a pulse tube, a high pressure valve provided in a first flow path communicating the compressor discharge port and the pulse tube low temperature end, a compressor suction port and the pulse tube low temperature end. Second communicating
A method for raising the temperature of a pulse tube refrigerator equipped with a low-pressure valve arranged in a flow path, wherein the compressor is operated with the low-pressure valve closed and the high-pressure valve opened, and the discharge from the compressor discharge port is performed. After derived from the pulse tube hot opening through the pulse tube by introducing the working gas in the pulse tube cold end via a high-pressure valve, then returned to the compressor inlet, working gas derived from the pulse tube hot port
The means for returning the compressor to the compressor suction port has an on-off valve in the middle.
Along with this on-off valve, a conduit provided with a throttle valve in series
One end of this conduit is connected to the compressor suction of the second flow path.
Communicate with the part between the mouth and the low pressure valve, and the other end to the high temperature port of the pulse tube.
The above on-off valve is closed during communication and freezing operation, and
A method for raising the temperature of a pulse tube refrigerator, characterized in that the on- off valve is opened . 6. A compressor, a pulse tube, and a compressor discharge port.
High pressure disposed in the first flow path communicating with the low temperature end of the pulse tube
A second valve that connects the valve, the compressor inlet, and the low temperature end of the pulse tube
Riser of a pulse tube refrigerator with a low pressure valve arranged in the flow path
It is a warm method, with the low pressure valve closed and the high pressure valve opened.
The compressor is operated in the state and the operating gas discharged from the compressor discharge port is
Gas into the low temperature end of the pulse tube via the high pressure valve
Through the high temperature port of the pulse tube through the
The means for returning the working gas discharged from the high-temperature port of the pulse tube to the compressor suction port is a conduit provided with an on-off valve in the middle, and one end of this conduit is compressed in the second flow path. It communicates with the part between the machine suction port and the low pressure valve, communicates the other end with the high temperature port of the pulse tube, closes the open / close valve during freezing operation , and opens the open / close valve during temperature increase.
A method for raising the temperature of a pulse tube refrigerator, which is an on-off valve that opens and closes selectively . 7. A compressor, a pulse tube, the compressor discharge and the high-pressure valve disposed in the first flow path for communicating the pulse tube low temperature end, compressor inlet and the pulse tube low temperature end Second communicating with
A method for raising the temperature of a pulse tube refrigerator provided with a low pressure valve arranged in a flow path and a phase control device communicating with the high temperature port of the pulse tube, wherein the low pressure valve is closed and the high pressure valve is opened. Operate the compressor, introduce the working gas discharged from the compressor discharge port to the low temperature end of the pulse tube through the high pressure valve, and lead it out from the high temperature port of the pulse tube through the inside of the pulse tube, then introduce it to the phase controller and introduce it into the phase controller. then returned to the compressor inlet through,
Guide the working gas derived from the phase controller to the compressor inlet.
The means to enter is to install an on-off valve in the middle and
A conduit provided with a throttle valve in series with the valve.
The end is a part of the second flow path between the compressor suction port and the low pressure valve.
During freezing operation
To close the on-off valve and open the on-off valve when the temperature rises
A method for raising the temperature of a pulse tube refrigerator, comprising: 8. A compressor, a pulse tube, and a compressor discharge port
High pressure disposed in the first flow path communicating with the low temperature end of the pulse tube
Second communicating with the valve, a compressor inlet and a pulse tube cold end
Communicates with the low pressure valve installed in the flow path and the high temperature port of the pulse tube
A method for raising the temperature of a pulse tube refrigerator provided with a phase control device.
The compressor with the low pressure valve closed and the high pressure valve open.
The high pressure valve that operates the working gas discharged from the compressor discharge port.
Through the pulse tube to the low temperature end and through the pulse tube
After introducing it from the high temperature mouth of the loose tube, it was introduced into the phase controller.
Return to the compressor inlet through the phase controller,
The means for introducing the working gas derived from the phase control device into the compressor suction port is a conduit provided with an opening / closing valve in the middle, and one end of this conduit is the compressor suction port and the low pressure valve in the second flow path. The other end is connected to the phase control device, the on-off valve is closed during freezing operation, and the on-off valve is opened during temperature increase.
The above-mentioned on-off valve opens and closes intermittently.
The method for raising the temperature of a pulse tube refrigerator, comprising: