JP3404140B2 - Storage case for mask protection device - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention comprises a case body to which a mask protection device is attached, and an upper lid which covers the body, and dust or the like adheres to a mask or reticle (hereinafter referred to as "mask"). The present invention relates to a storage case of a mask protection device used for the purpose of preventing the above.

[0002]

2. Description of the Related Art In the photolithography process in the manufacturing process of integrated circuits, if dust or the like adheres to a mask, it is projected onto a semiconductor wafer and tends to be a defective product. In order to solve this problem and prevent foreign matters from adhering to the mask, a transparent thin film is stretched on one side of the frame that is large enough to enclose the mask pattern, and double-sided with release paper on the other end. By adhering an adhesive tape, peeling off a release paper and adhering it on a mask, a mask protection device has been provided in which the mask is covered with a thin film at regular intervals.

Such a mask protection device is usually stored in a storage case so that dust or the like does not adhere to it until it is shipped and used. 1 and 2
Shows a conventional storage case of this type, which includes a frame 1, a thin film 2 stretched on one side of the frame 1,
The frame 4 is made of resin and has a pedestal 4 projectingly formed in the center thereof, on which a mask protection device 3 composed of a double-sided adhesive tape (not shown) with release paper attached to the other end face of the frame 1 is positioned and mounted. The case body 5 and the case body 5 are mounted on the case body,
An upper lid 6 made of resin having a holding portion 4 for holding the peripheral edge of the frame of the mask protection device, and a clip 7 for fixing the upper lid 6 to the case body 5 are provided.

[0004]

When the mask protection device taken out from the storage case is bonded onto the mask, even if the mask protection device is pressed onto the mask, the adhesive layer deforms to cause floating between the mask protection device and the mask. An air path through which air flows may occur. The present invention has been made for the purpose of eliminating an air path due to deformation of an adhesive layer.

[0005]

The invention for achieving the above object is to install a mask protection device comprising a frame, a thin film stretched on one side surface of the frame, and an adhesive material adhered to the other end surface of the frame. In a storage case of a mask protection device including a resin case main body having a table, a resin upper lid that covers the main body, and a clip that fixes the upper lid to the case main body, the maximum deformation of the mounting surface of the table is achieved. The amount is 200 μm or less, preferably 150 μm or less, and more preferably 80 μm or less.

[0006]

In contrast to the first invention, the present inventors consider that the distortion of the adhesive material is caused by the deformation of the table for mounting the mask protection device of the storage case, and the deformation of the table and the distortion amount of the adhesive material And various experiments were repeated about the relationship of the air path. Table 1 and FIG. 3 show
The results are shown.

[0007]

[Table 1]

Here, the amount of deformation of the table is measured by measuring the displacement of the stylus by using a coordinate measuring machine capable of measuring the length, width and height and running the stylus on the table with a stylus load of 3 g. It was determined by reading the maximum value-minimum value = maximum displacement of the table. Further, as shown in FIG. 4, the amount of strain of the adhesive material is measured by the non-contact optical sensor 42 on the guide 41 set on the orthogonal robot (not shown).
Then, the palpation needle 43 is set, and the mask protection device 3 with the mask mounting material 45 with the liner 46 mounted on the table 44 is set. Then, the robot 43 runs the needle 43 on the liner 46 with a stylus load of 5 g, and the optical sensor 4
In 2, the displacement of the needle 43 was measured by the reflected light from the reflection plate 47, and the maximum strain amount of the adhesive material was obtained from the difference between the maximum value and the minimum value.

The evaluation test of the adhesiveness of the mask protector was carried out as follows in a clean room at a temperature of 24 ° C. and a humidity of 48%. That is, using a strained adhesive material, a load of 30 kg was applied to the mask protection device for 3 minutes and visually observed 3 days after the adhesion.

As can be seen from Table 1, when the amount of deformation of the base of the case is 200 μm or less, distortion of the adhesive material is small, there is no air path, and there is almost no floating of the adhesive material, and the amount of deformation of the base is 150 μm or less. Then the adhesive did not float. As also shown in FIG. 3, the correlation of the deformation amount and adhesive distortion amount of base, unlike the above and below 80 [mu] m, 80 [mu] m in the following, the change in strain of the adhesive material to deformation of the platform was hardly observed. Therefore, it became clear that it is not necessary to strictly control the amount of deformation of the table above a certain level.

[0011]

The present invention is constructed as described above and has the following effects. Like the storage case according to claim 1, when the mask protection device mounting base is molded so that the maximum amount of deformation of the mounting surface is 200 μm or less, the distortion of the adhesive layer of the mask protection device is small, and the mask is used as a mask. The air path when attached can be eliminated, and if it is molded so as to have a thickness of 150 μm or less as described in claim 2, the floating can be eliminated. Further, as described in claim 3, 80
If the pressure-sensitive adhesive layer is molded so as to have a thickness of μm or less, the pressure-sensitive adhesive layer can be prevented from being deformed.

[Brief description of drawings]

FIG. 1 is a cross-sectional view of a storage case of a mask protection device.

FIG. 2 is a plan view of the device.

FIG. 3 is a graph showing the relationship between the deformation amount of the case and the strain amount of the adhesive material.

FIG. 4 is a front view of the measuring device.

[Explanation of symbols]

1 ... frame 2 ... Thin film 3 · Mask protector 4 ... 5 ... Case body 6 ... Top lid 7-clip

Continuation of the front page (56) References JP-A-6-208221 (JP, A) JP-A-63-22379 (JP, A) JP-A-4-19665 (JP, A) Actual Kaihei 1-120148 (JP , U) (58) Fields surveyed (Int.Cl. ⁷ , DB name) G03F 1/00-1/16

Claims (3)

(57) [Claims] 1. A case body made of resin, comprising a frame, a thin film stretched on one side surface of the frame, and a pedestal to which a mask protection device composed of an adhesive adhered to the other end surface of the frame is mounted. In a storage case of a mask protection device comprising a resin-made upper lid that covers the main body and a clip that fixes the upper lid to the case main body, the maximum deformation amount of the mounting surface of the base is molded to 200 μm or less. Storage case for mask protection device. 2. The maximum deformation of the mounting surface of the table is 150 μm.
The storage case of the mask protection device according to claim 1, wherein the storage case is molded to be m or less. 3. The maximum deformation of the mounting surface of the table is 80 μm.
The storage case of the mask protection device according to claim 1, which is molded as follows.