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JP3407236B2 - Mass flow meter - Google Patents
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JP3407236B2 - Mass flow meter - Google Patents

Mass flow meter

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Publication number
JP3407236B2
JP3407236B2 JP26564995A JP26564995A JP3407236B2 JP 3407236 B2 JP3407236 B2 JP 3407236B2 JP 26564995 A JP26564995 A JP 26564995A JP 26564995 A JP26564995 A JP 26564995A JP 3407236 B2 JP3407236 B2 JP 3407236B2
Authority
JP
Japan
Prior art keywords
vibration
measuring tube
ring
tube
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP26564995A
Other languages
Japanese (ja)
Other versions
JPH09113329A (en
Inventor
修 鹿志村
博信 矢尾
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP26564995A priority Critical patent/JP3407236B2/en
Publication of JPH09113329A publication Critical patent/JPH09113329A/en
Application granted granted Critical
Publication of JP3407236B2 publication Critical patent/JP3407236B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Description

【発明の詳細な説明】 【0001】 【発明の属する技術分野】この発明は、加振される少な
くとも1本の測定管内を流れる流体の質量流量にもとづ
き発生するコリオリ力を利用して質量流量を測定する質
量流量計、特に測定管の口径が大きくなったときに振動
発生器,振動検出センサの質量に依存して発生する測定
管の円周方向の振動モードを抑制し、軽量化を図りつつ
測定精度を向上させるようにしたコリオリ式質量流量計
に関する。 【0002】 【従来の技術】一般に、コリオリ式質量流量計は、振動
する測定管内を流れる流体の質量流量に比例して発生す
るコリオリ力にもとづき、流体の質量流量を直接測定す
るものであることから、高精度の測定が可能である。こ
の種の質量流量計は大別してU字型,S字型のような曲
線状の測定管を持つものと、直線状の測定管を持つもの
とに分けられる。そのうち、直線状の測定管を持つもの
として、振動する測定管を2本とし、測定流体を分流し
て2本の測定管に導くもの、その2本の測定管を共振さ
せる構造のもの(例えば、特公平5−69452号公報
参照)、または、測定管を1本にしたものなどがある。 【0003】また、測定管が1本のものとして、例えば
本発明者等の提案による図3に示すものがある(特願平
7−49371号参照:提案装置ともいう)。これは、
測定管2の両端を支持する支持機構(固定材3a,3b
および円筒ビーム4)と、測定管2に振動を与える振動
発生器5と、測定管2の振動を検出する2つの振動検出
センサ6a,6bと、測定流体を測定管2に導く入口導
管7aと、測定流体を測定管2より導出する出口導管7
bと、これらを内包するハウジング8とを設け、測定管
2に与えられるコリオリ振動の周波数を、上記支持機構
の固有振動数よりも高くするようにしたものである。 【0004】 【発明が解決しようとする課題】測定管の共振周波数
は、固定端と測定管の質量および流体の密度により1次
の共振周波数が決定されるが、U字型,S字型のような
曲線状の測定管を持つものは、例えば100Hzという
様に比較的低い共振周波数である。ところが、1本また
は2本の直管状の測定管を持つものは、1次モードの場
合で例えば1000Hz、特に主振動を3次モードとす
る場合は5400Hzと、比較的高い共振周波数を持つ
から、例えば図4(a)〜(c)に示すような各種の他
の共振モードに近づき易い。なお、図4(a)は振動発
生器の質量(磁石など)による共振モード、(b)は円
周方向の共振モード、(c)は振動検出センサによる共
振モードをそれぞれ示している。 【0005】円周方向の共振周波数は測定管の口径,肉
厚,固定端までの長さ、さらには振動発生器や振動セン
サの磁石のように集中的に付加される質量によって決定
される。質量流量計として考えた場合、小型軽量化と発
生する位相差の点から肉厚を薄くし長さを短くする方が
望ましい。小口径の場合は重量や大きさはあまり大きく
ならないが、大口径の場合は重量を軽くし大きさを小さ
くすべく、肉厚を薄くし長さを短くする。この場合、振
動発生器や振動センサは測定管上にロウ付け等により固
定されたピンのみを介して固定されており、その質量に
より円周方向の振動モードが横振動の、例えば、3次モ
ード(測定管の肉厚,長さ,振動発生器や振動センサ等
により異なる)付近に発生し、主振動と干渉することか
ら主振動の安定性が損なわれたり、零点のフラツキ特性
が悪くなり、高精度な測定ができないという問題が発生
する。つまり、円周方向の振動を抑制し、発生する位相
差を大きくするためには肉厚を厚くし、長さを長くしな
ければならず、小型軽量化が困難である。したがって、
この発明の課題は小型軽量化を図りつつ、主振動近辺の
振動を抑制することにある。 【0006】 【課題を解決するための手段】このような課題を解決す
べく、請求項1の発明では測定管上の振動発生器や振動
センサの設置位置にリング状部材を設置する。加えて、
振動発生器と振動検出センサ間,振動検出センサと支持
機構間の少なくとも一方に、振動発生器部と振動検出セ
ンサ部を固定端とする円周方向の振動を抑制するための
個以上のリング状部材を設置する。以上の如くするこ
とにより、大口径の測定管で、その肉厚が薄く長さが短
くても、横振動の1次,2次,3次付近の円周方向のモ
ードを抑制することが可能となる。 【0007】 【発明の実施の形態】図1はこの発明の第1の実施の形
態を示す断面図で、(a)は全体構成図、(b)は振動
発生部の部分拡大図である。同図の参照符号2は直管状
測定管、3a,3bはこの直管状測定管2の両端部にロ
ウ付けまたは溶接等の手法により固定される固定材、4
はこの固定材3a,3bの直管状測定管2の振動方向の
振動を打ち消すため、固定材3a,3bが溶接等により
結合されている円筒ビームである。この固定材3a,3
bと円筒ビーム4により、直管状測定管2の両端を連結
する支持機構を形成している。直管状測定管2の中央に
は、円周方向の振動モードを抑制するためのリング状部
材10aが、ロウ付けまたは溶接等の手段により固定さ
れている。リング状部材10a上には、磁石12aを位
置決めするピン11aがロウ付けまたは溶接等の手段に
より固定され、そのピン11aに磁石12aを挿入し、
ナット13aにて固定する。 【0008】5は直管状測定管2の中央に取り付けられ
た磁石12a、および円筒ビーム4に固定されたコイル
よりなり、測定管2を振動させるための振動発生器であ
る。測定管2上には、振動発生器5を中心とする対称な
位置に、円周方向の振動モードを抑制するためのリング
状部材10b,10cを、ロウ付けまたは溶接等の手段
により固定している。リング状部材10b,10c上に
は、磁石12b,12cを位置決めするピン11b,1
1cを挿入し、ナット13b,13cにより固定する。 【0009】6a,6bは磁石12b,12cおよび円
筒ビーム4に固定されたコイルよりなり、測定管2の振
動を検出する速度センサ(電磁ピックアップ)である。
7aは入口導管、7bは出口導管で、測定管2と一体的
に製造される。これらは、ハウジング8の端面部に接続
されて、測定流体を測定管2にそれぞれ導入,導出す
る。ハウジング8は上記の各要素を内包し、フランジ9
a,9bにネジ止めまたは溶接等の手段により結合され
る。なお、図1ではリング状部材を振動発生器5と、振
動センサ6a,6bの双方に設けたが、どちらか一方に
設けるようにしても良い。 【0010】このような構成において、例えば外径φ4
2.7,肉厚(t)2.3mm,長さ580mmとし、
リング状部材10aを設けない場合は、測定管横振動の
3次モードが2390Hzに対して、磁石12aの質量
による円周方向の振動は2600Hzで、210Hzの
差で発生する。そこで、振動発生器にはφ50×t3の
リング状部材10aを、また、振動検出センサにはφ5
0×t2のリング状部材10b,10cを付加すること
で、磁石12aの質量による円周方向の振動が3500
Hzと上昇し、主振動との干渉を減らすことができる。 【0011】図2はこの発明の第2の実施の形態を示す
断面図で、(a)は全体構成図、(b)は振動発生部の
部分拡大図である。同図からも明らかなように、この例
は測定管2上の振動発生器5と振動検出センサ6a,6
bとの間にリング状部材10d,10eを、ロウ付けま
たは溶接等の手段により固定するとともに、測定管2上
の振動検出センサ6a,6bと固定材3a,3bとの間
にリング状部材10f,10gをロウ付けまたは溶接等
の手段により固定した点が、図1と相違する。なお、リ
ング状部材は振動発生器と振動検出センサ間と振動検出
センサと支持機構間に2つ以上設けても良く、振動発生
器と振動検出センサ間、または振動検出センサと支持機
構間に2つ以上設けるようにしても良い。 【0012】 【発明の効果】この発明によれば、下記のような効果を
期待することができる。 (1)測定管上の振動発生器や振動センサの設置位置に
リング状部材を設置することで、大口径の測定管におい
て肉厚が薄く長さが短くても、横振動の1次,2次,3
次付近に発生する円周方向のモードを抑制することが可
能となる。 (2)上記に加えて、振動発生器と振動検出センサ間,
振動検出センサと支持機構間の少なくとも一方に、1個
以上のリング状部材を設置することで、振動発生器部と
振動検出センサ部を固定端とする円周方向の振動モード
を抑制することができる。 (3)その結果、主振動の付近に円周方向の振動モード
がないから、振動が安定に発生し零点の安定性や、零点
フラツキ等が改善される。
Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for measuring a mass flow rate using a Coriolis force generated based on a mass flow rate of a fluid flowing through at least one measurement pipe to be vibrated. The mass flowmeter to measure, especially the vibration mode in the circumferential direction of the measuring tube, which is generated depending on the mass of the vibration generator and vibration detecting sensor when the diameter of the measuring tube becomes large The present invention relates to a Coriolis-type mass flowmeter with improved measurement accuracy. 2. Description of the Related Art Generally, a Coriolis-type mass flow meter directly measures a mass flow rate of a fluid based on a Coriolis force generated in proportion to a mass flow rate of a fluid flowing in a vibrating measuring tube. Therefore, highly accurate measurement is possible. This type of mass flow meter is roughly classified into a type having a curved measuring tube such as a U-shaped or S-shaped type, and a type having a linear measuring tube. Among them, one having a linear measuring tube, two vibrating measuring tubes, and branching a measuring fluid to two measuring tubes, and a structure of resonating the two measuring tubes (for example, And Japanese Patent Publication No. 5-69452), or a single measuring tube. FIG. 3 shows a single measuring tube, for example, proposed by the present inventors (see Japanese Patent Application No. 7-49371: also referred to as a proposed device). this is,
A support mechanism (fixing members 3a, 3b) for supporting both ends of the measuring tube 2
And a cylindrical beam 4), a vibration generator 5 for applying vibration to the measurement tube 2, two vibration detection sensors 6a and 6b for detecting vibration of the measurement tube 2, and an inlet conduit 7a for guiding a measurement fluid to the measurement tube 2. , An outlet conduit 7 for taking out the measurement fluid from the measurement tube 2
b and a housing 8 containing them, so that the frequency of Coriolis vibration applied to the measuring tube 2 is higher than the natural frequency of the support mechanism. The primary resonance frequency of the resonance frequency of the measuring tube is determined by the mass of the fixed end and the measuring tube and the density of the fluid. Those having such a curved measurement tube have a relatively low resonance frequency, for example, 100 Hz. However, the one having one or two straight measuring tubes has a relatively high resonance frequency of, for example, 1000 Hz in the case of the first mode, and 5400 Hz particularly when the main vibration is set to the third mode. For example, it is easy to approach various other resonance modes as shown in FIGS. 4A shows a resonance mode based on the mass (magnet or the like) of the vibration generator, FIG. 4B shows a resonance mode in the circumferential direction, and FIG. 4C shows a resonance mode based on the vibration detection sensor. The resonance frequency in the circumferential direction is determined by the diameter, thickness, length to the fixed end of the measuring tube, and the mass added intensively such as a magnet of a vibration generator or a vibration sensor. When it is considered as a mass flow meter, it is desirable to reduce the thickness and the length in view of the reduction in size and weight and the generated phase difference. In the case of a small diameter, the weight and size are not so large, but in the case of a large diameter, the thickness is reduced and the length is shortened in order to reduce the weight and size. In this case, the vibration generator and the vibration sensor are fixed only via pins fixed on the measuring tube by brazing or the like. (Varies depending on the thickness and length of the measuring tube, vibration generator, vibration sensor, etc.) and interferes with the main vibration, so that the stability of the main vibration is impaired or the zero point fluctuation characteristics deteriorate. A problem arises in that high-precision measurement cannot be performed. That is, in order to suppress the vibration in the circumferential direction and increase the generated phase difference, the thickness must be increased and the length must be increased, and it is difficult to reduce the size and weight. Therefore,
An object of the present invention is to suppress vibration near the main vibration while reducing the size and weight. [0006] In order to solve such a problem, according to the first aspect of the present invention, a ring-shaped member is installed at the installation position of a vibration generator or a vibration sensor on a measuring tube . Addition forte,
At least one between the vibration generator and the vibration detection sensor and between the vibration detection sensor and the support mechanism ,
To suppress vibration in the circumferential direction with the sensor part as the fixed end.
At least one ring-shaped member is installed. As described above, in the large-diameter measuring tube, even in the case where the wall thickness is small and the length is short, it is possible to suppress the circumferential mode in the vicinity of the first, second and third-order transverse vibration. Becomes FIG. 1 is a sectional view showing a first embodiment of the present invention, in which (a) is an overall configuration diagram, and (b) is a partially enlarged view of a vibration generating section. In the figure, reference numeral 2 denotes a straight tube measuring tube, and 3a and 3b denote fixing members fixed to both ends of the straight tube measuring tube 2 by a technique such as brazing or welding.
Is a cylindrical beam to which the fixing members 3a and 3b are joined by welding or the like in order to cancel the vibration of the fixing members 3a and 3b in the vibration direction of the straight tubular measuring tube 2. The fixing members 3a, 3
The b and the cylindrical beam 4 form a support mechanism for connecting both ends of the straight measuring tube 2. A ring-shaped member 10a for suppressing a circumferential vibration mode is fixed to the center of the straight tubular measuring tube 2 by means such as brazing or welding. A pin 11a for positioning the magnet 12a is fixed on the ring-shaped member 10a by means such as brazing or welding, and the magnet 12a is inserted into the pin 11a.
It is fixed with a nut 13a. Reference numeral 5 denotes a vibration generator for vibrating the measuring tube 2 which comprises a magnet 12a attached to the center of the straight tubular measuring tube 2 and a coil fixed to the cylindrical beam 4. Ring-shaped members 10b and 10c for suppressing circumferential vibration modes are fixed on the measurement tube 2 at symmetrical positions around the vibration generator 5 by means such as brazing or welding. I have. Pins 11b, 1 for positioning the magnets 12b, 12c are provided on the ring-shaped members 10b, 10c.
1c is inserted and fixed with nuts 13b and 13c. Reference numerals 6a and 6b denote magnets 12b and 12c and coils fixed to the cylindrical beam 4, and are velocity sensors (electromagnetic pickups) for detecting the vibration of the measuring tube 2.
7a is an inlet conduit, 7b is an outlet conduit, which is manufactured integrally with the measuring tube 2. These are connected to the end surface of the housing 8 to introduce and discharge the measurement fluid to and from the measurement tube 2 respectively. The housing 8 includes the above-described elements, and includes a flange 9.
a, 9b are connected by means such as screwing or welding. In FIG. 1, the ring-shaped member is provided on both the vibration generator 5 and the vibration sensors 6a and 6b, but may be provided on either one of them. In such a configuration, for example, an outer diameter φ4
2.7, wall thickness (t) 2.3 mm, length 580 mm,
When the ring-shaped member 10a is not provided, the vibration in the circumferential direction due to the mass of the magnet 12a is 2600 Hz, whereas the third mode of the measurement tube lateral vibration is 2390 Hz, which is generated with a difference of 210 Hz. Therefore, a ring-shaped member 10a of φ50 × t3 is provided for the vibration generator, and a φ5 × t3 is provided for the vibration detection sensor.
By adding the ring members 10b and 10c of 0 × t2, the vibration in the circumferential direction due to the mass of the magnet 12a is 3500.
Hz and the interference with the main vibration can be reduced. FIGS. 2A and 2B are sectional views showing a second embodiment of the present invention, wherein FIG. 2A is an overall configuration diagram, and FIG. 2B is a partially enlarged view of a vibration generator. As is clear from the figure, this example shows that the vibration generator 5 on the measuring pipe 2 and the vibration detection sensors 6a, 6
b, the ring-shaped members 10d and 10e are fixed by means such as brazing or welding, and the ring-shaped members 10f are fixed between the vibration detection sensors 6a and 6b on the measuring tube 2 and the fixing members 3a and 3b. , 10g are fixed by means such as brazing or welding. Note that two or more ring-shaped members may be provided between the vibration generator and the vibration detection sensor and between the vibration detection sensor and the support mechanism, and between the vibration generator and the vibration detection sensor or between the vibration detection sensor and the support mechanism. More than one may be provided. According to the present invention, the following effects can be expected. (1) By installing a ring-shaped member at the installation position of the vibration generator or vibration sensor on the measurement tube, even if the wall thickness is small and the length is short in a large-diameter measurement tube, primary and secondary vibrations can be obtained. Next, 3
It is possible to suppress the circumferential mode generated near the next. (2) In addition to the above, between the vibration generator and the vibration detection sensor,
By installing one or more ring-shaped members on at least one of the vibration detection sensor and the support mechanism, it is possible to suppress a circumferential vibration mode in which the vibration generator unit and the vibration detection sensor unit are fixed ends. it can. (3) As a result, since there is no vibration mode in the circumferential direction near the main vibration, the vibration is generated stably, and the stability of the zero point and the zero point fluctuation are improved.

【図面の簡単な説明】 【図1】この発明による第1の実施の形態を示す断面図
である。 【図2】この発明による第2の実施の形態を示す断面図
である。 【図3】提案装置を示す断面図である。 【図4】図3における円周方向の変形を説明するための
説明図である。 【符号の説明】 1…測定装置、2…測定管、3a,3b…固定材、4…
円筒ビーム、5…振動発生器、6a,6b…センサ、7
a…入口導管、7b…出口導管、8…ハウジング、9
a,9b…フランジ、10a〜10e…リング状部材、
11a〜11c…ピン、12a〜12c…磁石、13a
〜13c…ナット、20…駆動回路、21…位相差検出
型信号処理回路。
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a cross-sectional view showing a first embodiment according to the present invention. FIG. 2 is a sectional view showing a second embodiment according to the present invention. FIG. 3 is a sectional view showing the proposed device. FIG. 4 is an explanatory diagram for explaining deformation in a circumferential direction in FIG. 3; [Description of Signs] 1 ... Measuring device, 2 ... Measuring tube, 3a, 3b ... Fixing material, 4 ...
Cylindrical beam, 5 ... vibration generator, 6a, 6b ... sensor, 7
a ... inlet conduit, 7b ... outlet conduit, 8 ... housing, 9
a, 9b: flange, 10a to 10e: ring-shaped member,
11a to 11c: pins, 12a to 12c: magnets, 13a
... 13c nut, 20 drive circuit, 21 phase difference detection type signal processing circuit.

───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平6−3174(JP,A) 特開 平2−42319(JP,A) 特開 平7−55525(JP,A) 特開 平5−248913(JP,A) 特公 平4−63326(JP,B2) (58)調査した分野(Int.Cl.7,DB名) G01F 1/84 ────────────────────────────────────────────────── ─── Continuation of front page (56) References JP-A-6-3174 (JP, A) JP-A-2-42319 (JP, A) JP-A-7-55525 (JP, A) JP-A-5-555 248913 (JP, A) JP 4-63326 (JP, B2) (58) Fields surveyed (Int. Cl. 7 , DB name) G01F 1/84

Claims (1)

(57)【特許請求の範囲】 【請求項1】 測定管と、この測定管に振動を印加する
振動発生器と、前記測定管の振動を検出する振動検出セ
ンサと、前記測定管を固定するとともに前記振動発生器
および前記センサを支持する支持機構とからなり、コリ
オリの原理にもとづき流体の質量流量を測定する質量流
量計において、 前記振動発生器,振動検出センサの少なくとも一方をリ
ング状部材を介して前記測定管に設置し、さらに、前記
振動発生器と振動検出センサ間,前記支持機構と振動検
出センサ間の少なくとも一方に、振動発生器部と振動検
出センサ部を固定端とする円周方向の振動を抑制するた
めの1個以上のリング状部材を設置するようにしたこと
を特徴とする質量流量計。
(57) Claims 1. A measuring tube, a vibration generator for applying vibration to the measuring tube, a vibration detecting sensor for detecting vibration of the measuring tube, and the measuring tube fixed. A mass flow meter for measuring a mass flow rate of a fluid based on the Coriolis principle, wherein at least one of the vibration generator and the vibration detection sensor includes a ring-shaped member. Installed in the measurement tube through , further,
Between the vibration generator and the vibration detection sensor, the support mechanism and the vibration detection
At least one of the output sensors has a vibration generator
In order to suppress circumferential vibration with the output sensor as the fixed end
A mass flowmeter , wherein one or more ring-shaped members are installed .
JP26564995A 1995-10-13 1995-10-13 Mass flow meter Expired - Fee Related JP3407236B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26564995A JP3407236B2 (en) 1995-10-13 1995-10-13 Mass flow meter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26564995A JP3407236B2 (en) 1995-10-13 1995-10-13 Mass flow meter

Publications (2)

Publication Number Publication Date
JPH09113329A JPH09113329A (en) 1997-05-02
JP3407236B2 true JP3407236B2 (en) 2003-05-19

Family

ID=17420077

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26564995A Expired - Fee Related JP3407236B2 (en) 1995-10-13 1995-10-13 Mass flow meter

Country Status (1)

Country Link
JP (1) JP3407236B2 (en)

Also Published As

Publication number Publication date
JPH09113329A (en) 1997-05-02

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