JP3419151B2 - Manufacturing method of glass ceramic green sheet - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [0001] The present invention relates to a method for mounting electronic components.
Used in the manufacture of glass-ceramic wiring boards
The present invention relates to a method for manufacturing a lath ceramic green sheet. [0002] 2. Description of the Related Art In recent years, LSIs and various electronic components are mounted.
Wiring boards (printed wiring boards) are required for high density, reliability, etc.
From the demand, instead of the conventional plastic substrate, ceramic
Substrates, especially ceramic multilayer substrates, are rapidly spreading
are doing. As a method of manufacturing a ceramic multilayer substrate,
Conductor page on fired ceramic plate or green sheet
After printing alternately the paste and the insulating paste, firing the multilayer
Printing method and via holes filled with conductive paste if necessary
(Also referred to as through-holes) and conductive paste
Laminate multiple green sheets with turns
Green paste for simultaneous firing of body paste and green sheet
There is a sheet lamination method. Green sheet lamination method is higher
Easy multi-layering and excellent circuit precision
Therefore, the green sheet laminating method has become mainstream. [0003] Ceramic materials for ceramic substrates
In consideration of electrical insulation, high temperature heat resistance, and material cost,
Therefore, alumina has been mainly used conventionally. alumina
Has a high firing temperature of about 1550 ° C, so green sheet lamination
Method or multi-layer printing using green sheets.
High melting point as conductive powder (wiring material) used for body paste
You need to use W or Mo. But W and Mo
Finer wiring due to relatively high electrical resistivity metal
Then, the electric resistance value becomes excessive and the transmission loss increases.
There is a problem. [0004] From such a point, firing at a temperature of 1000 ° C or less.
It can be fired simultaneously with low-resistance wiring materials such as Ag and Cu.
Of low temperature fired ceramic multilayer wiring board
Departure has been advanced. Among them, the same as the conventional alumina substrate
Equipped with insulation and heat resistance, etc., and a lower dielectric constant than alumina
Transmission loss can be reduced, and the coefficient of thermal expansion is
Glass ceramic that can be mounted flip chip because it is close
Substrate is attracting attention. General glass ceramic
Substrate is made of borosilicate glass, MgO-Al_TwoO_Three-SiO_Two-B_TwoO_Three
Glass, CaO-Al_TwoO_Three-SiO_Two-B_TwoO_Three For glass such as base glass
Composite with ceramics such as alumina as aggregate
The material is the raw material. The production of this glass ceramic multilayer wiring board
To briefly explain the fabrication method, first,
Glass powder as raw material and ceramic powder as aggregate
Into a ball mill, suitable for forming green sheets
Until it reaches a predetermined particle size (eg, average particle size of about 1 to 5 μm)
Wet pulverization is performed to pulverize and mix the powder. Commercial glass
Both powder and ceramic powder have an average particle size of 5 to 5.
Since it is about 100 μm, it is necessary
It is important to perform this pulverization by wet ball milling in water.
Grinding has been employed. After this, the powder is collected, dried and
After removing water, the raw material powder pulverized to
Crushing, then binder, dispersant, plasticizer, organic
It is also called a slip by adding a solvent etc. and wet mixing
Prepare a slurry. Next, this slurry is
Molded into a sheet by the reed method, etc., dried and
When the organic solvent is removed,
Sheet is manufactured. The plurality of glass ceramics thus manufactured
Via holes etc. are formed in the green sheet if necessary
Print the conductor paste for wiring, and
Fill the conductor part with conductive paste and then
The stack is formed by laminating the components, usually in a degreasing process (low temperature
1000 ° C or less (through the process of removing organic substances by heat)
(Usually at 900 to 1000 ° C).
Simultaneous sintering of glass sheets
A layer wiring board is obtained. [0007] Alumina ceramics fired at high temperature
In the production of green sheets, the solution
Crushing process and subsequent mixing process with additives such as binders
By wet ball milling in an organic solvent
Is known, for example, from JP-A-59-195573.
It has also been commonly employed, especially in the mixing process. Only
However, these are not the steps of pulverizing the raw material powder. Of raw material powder
The pulverization process is performed on glass ceramic green sheets and
In any case of ordinary ceramic green sheet,
Conventionally, it is performed by wet ball milling using water as a medium.
Came. [0008] Recently, LSIs have become increasingly expensive.
Ceramics have been developed for integration and further miniaturization of multilayer wiring boards.
Higher density of via holes formed in substrate
Therefore, the fineness of the via hole formed in the green sheet
There is a demand for thinning and a reduction in the pitch between via holes. Generally, ceramic green sheet smell
In order to reduce the size of via holes,
It is important not to generate rags when
In order to reduce the pitch, cracks are generated between the via holes.
It is important that there is no
In order to obtain a mixed green sheet, the growth rate must be
It is advantageous to improve. [0010] The direction of elongation of the ceramic green sheet
Above is a binder for the surface of the raw material powder in the green sheet.
To improve the adhesion between the raw material powders.
Can be secured. However, it is manufactured by the conventional method described above.
Glass ceramic green sheet with binder
Unless the amount of addition is increased, the surface of the raw material powder becomes a binder
Glass ceramic which cannot be completely covered with
If you can't get a green sheet
Have been experienced for a while. Binder to improve elongation
Increasing the amount of addition increases the production cost, and
Sometimes the binder tends to remain as carbon and the substrate
It is said that not only is it colored, but also the insulation of the substrate decreases
There's a problem. The present invention relates to a via for a glass ceramic substrate.
To achieve finer holes and higher densities,
Glass ceramic with high elongation by adding indder
Glass ceramic that can manufacture sgreen sheets
The purpose is to provide a manufacturing method for black green sheets
And [0012] The above object is achieved by the present invention described below.
Achieved by light. (1) B_TwoO_ThreeRaw material powder containing glass powder to specified particle size
After wet pulverization, in an organic solvent containing at least a binder
Glass ceramic made from slurry and formed into sheet
A method for producing a mixed green sheet, comprising:
Milling the organic vine in an alcohol-free organic solvent
Gas in the presence or absence of
A method for manufacturing a lath ceramic green sheet. [0013] [0014] The operation of the present invention will be described below together with its operation.
You. Glass ceramic green sheets require a large amount of
Causes the elongation rate to not increase without adding solder
As a result of investigations by the present inventors, water was crushed from raw glass powder.
During wet grinding as a medium, some components of the raw material powder are dissolved.
To make it porous and its specific surface area is large.
I decided to become. The apparent particle size of the raw glass powder is
Even if the same, the powder is porous and the specific surface area increases
And completely cover the surface with binder to improve elongation
To do this, the amount of binder must be increased.
No. Therefore, if the amount of binder added is not increased,
Glass ceramic green sheet with high efficiency cannot be obtained.
It is thought that it was. The cause of the porosity of the raw glass powder is as follows.
Is guessed like. The glass ceramic substrate is
As mentioned, borosilicate glass, MgO-Al_TwoO_Three-SiO_Two-B_TwoO_Three
Glass, CaO-Al_TwoO_Three-SiO_Two-B_TwoO_ThreeB such as glass_TwoO_ThreeIncluding
The glass powder is used as a raw material. This B_TwoO_ThreeIs low temperature baking
Low-temperature baking as a softening point adjuster to enable
It is a necessary component for the target glass ceramic substrate.
You. B_TwoO_ThreeIt is water-soluble in itself, but soluble with other components.
B that has been melted and vitrified_TwoO_ThreeIs evenly mixed with other ingredients
If it is evenly distributed in the glass, it will dissolve in water
Absent. But in general B_TwoO_ThreeB in contained glass_TwoO_ThreeHaichi
Not distributed like_TwoO_ThreeForming a phase separation region with high concentration
You. And this B_TwoO_ThreeB exists in the phase separation region with high concentration_TwoO_Three
Has some water solubility and dissolves in water during wet grinding
You. Also, if a new surface is created by grinding,
Immediately came into contact with water, and B appeared on this surface_TwoO_ThreeHigh concentration
B in the phase splitter_TwoO_ThreeDissolves. These are repeated, powder
The surface of the glass powder obtained by crushing becomes porous,
The surface area increases significantly. In the present invention, the pulverization of the raw material powder is carried out using an organic solvent.
Of the glass powder by wet grinding using
Prevent porosity and increase in specific surface area, thereby reducing
Glass ceramic green sheet with high elongation rate
Sheet can be manufactured. Note that the organic solvent is
If it does not contain alcohol, wet milling will be a binder
Is preferably performed in the absence of an organic binder.
Can be performed in the presence of Organic solvent is Al
When containing coal, in the presence of an organic binder
Perform wet grinding. The glass ceramic green sheet of the present invention
The raw material powder used in the_TwoO_ThreeGlass powder
including. B_TwoO_ThreeAs glass containing, borosilicate glass,
MgO-Al_TwoO_Three-SiO_Two-B_TwoO_ThreeGlass, CaO-Al_TwoO_Three-SiO_Two-B_TwoO_Three
System glass and the like. These glasses are
Contains small amounts of additional oxide components such as potassium metal oxide
May be. Also, B_TwoO_ThreeGlass powder containing no_Two
O_ThreeIt can be used together with contained glass powder. material
B in glass powder_TwoO_ThreeThe content is usually about 5-30% by weight
You. The raw material powder is the above B_TwoO_ThreeContaining glass powder
In addition, ceramic powder is generally contained as an aggregate.
Alumina is a typical ceramic powder for aggregate.
But other cordierite, aluminum nitride, stone
Britain, mullite, etc. with alumina or alumina
Can be used instead. Glass powder and ceramic
The ratio of powdered glass is not particularly limited, but is usually glass powder.
End: 90: 10-30: 70 by weight of ceramic powder, preferred
Or between 80:20 and 50:50. As mentioned above, commonly obtained unmilled pulverized
Both glass powder and ceramic powder are coarse and have a particle size
First, glass powder and ceramic powder
Wet grinding together to make the powder finer to the specified particle size
At the same time, uniformly mix glass powder and ceramic powder
I do. In the present invention, as a medium for this wet grinding, a conventional medium is used.
Instead of using water, use an organic solvent. As the organic solvent for the wet pulverization,
As long as they do not adversely affect powders and ceramics.
Any organic solvent can be used. Preferred organic solvents are xy
Aromatic hydrocarbons such as len, toluene and ethylbenzene
, Ketones such as methyl ethyl ketone and diethyl ketone
, Ethyl acetate, isopropyl acetate, butyl acetate, etc.
Steals, ethanol, propanol, isopropanol
Alcohol, butanol, pentanol, hexanol, etc.
Calls and the like. Organic solvent alone
Or a mixture of two or more solvents. Of these organic solvents, alcohols are
B_TwoO_ThreeB present in the glass powder containing_TwoO_ThreeHigh concentration
B reacts with the phase separation zone_TwoO_ThreeMay cause dissolution in the solvent
There is. B dissolved_TwoO_ThreeIs combined with alcohol to
This organoboron compound tends to form elemental compounds
Organic boron is very strong
B as compound_TwoO_ThreeAlcohol combined with
Remaining in the glass-ceramic substrate
Element may increase. Thereby, as described above
In addition, gray coloration of the substrate and a decrease in insulating property occur. Therefore, in order to avoid this, wet pulverization
When using alcohol, add an organic binder
Dissolved in a solvent, and wet-powder in the presence of this binder.
Perform crushing. As a result, the glass powder is
B in coated and glass powder_TwoO_ThreePhase separation with high concentration
It is prevented from reacting with coal and dissolving in the solvent. Ma
Also, even during wet grinding, the new surface that appeared after grinding
Is protected by being coated with a binder, B_TwoO_ThreeDissolution of
Is prevented. As a result, the increase in residual carbon
Avoids graying of the substrate after firing and deterioration of insulation.
You. Add plasticizer and dispersant together with organic binder
Is also good. When alcohol is used for wet grinding,
In some cases, it is possible to use only alcohol as the solvent.
Wear. However, many resins useful as organic binders
Is not so soluble in alcohol
A mixed solvent of alcohol and a non-alcoholic solvent
It is preferable to use as. In that case, all organic solvents
The proportion of alcohol in the body is determined by the
Make sure that the binder used during formation can be sufficiently dissolved.
Set. For example, when the binder is acrylic resin
To reduce the proportion of alcohol in the mixed solvent to 50% by weight or less.
Preferably, the binder is butyral resin.
80% by weight of alcohol in the mixed solvent
It is preferable to set the following. When the organic solvent does not contain alcohol
Does not require wet grinding in the presence of a binder,
This is preferable in terms of the pulverization efficiency, but if desired, an organic
Plasticizer and / or indah or organic binder
Wet grinding may be performed after adding the dispersant to the organic solvent.
it can. The amount of the organic solvent used for the wet grinding may vary depending on the wet grinding.
It is sufficient if the amount is sufficient to carry out the pulverization smoothly.
Normally, 30 to 150 parts by weight for 100 parts by weight of raw material powder
Preferably, it is in the range of 30 to 100 parts by weight. This organic solvent
The slurry can be used as it is for slurry generation.
Used in excess of the amount of organic solvent needed to prepare
Is disadvantageous economically. Organic binder or organic binder
When performing wet grinding in the presence of a plasticizer,
Is based on 100 parts by weight of the raw material powder
 0.5 to 10 parts by weight, preferably 0.5 to 5.0 parts by weight,
0.1 to 4.0 parts by weight of plasticizer, preferably 0.5 to 3.0 parts by weight
Department. Organic binders and plasticizers are conventionally
Used for manufacturing glass ceramic green sheets
May be the same as As an organic binder,
Ril resin, butyral resin, vinyl acetate copolymer, poly
Organic resins such as vinyl alcohol and vinyl chloride resin are used.
Can be used. Preferred are acrylic resin and butyral
Resin. Dioctyl phthalate (DO
Phthalates such as P) and dibutyl phthalate (DBP)
Is preferred, but a polyalkyl such as triethylene glycol
Kilen glycols can also be used. The wet pulverization of the raw material powder should be performed with a ball mill.
However, other wet mills (e.g., attrition
Mill, bead mill, etc.) can also be used. Use a ball mill
Wet grinding can be carried out, for example, as follows:
You. Consists of a specified proportion of glass powder and ceramic powder
The unmilled coarse raw material powder is put into a ball mill and
Amount of organic solvent and organic binder as needed or desired
Or a plasticizer. In addition, ceramics such as alumina
200 balls per 100 parts by weight of raw material powder
~ 500 parts by weight, suitable for forming green sheets
Constant particle size (for example, 1 to 5 μm in average particle size, preferably 1.5
3.53.5 μm). The grinding time is one
Generally, it takes about 10 to 100 hours. After the wet pulverization, the raw material pulverized to a predetermined particle size is obtained.
Binder, plasticizer and dispersant
A slurry in which the raw material powder is dispersed in an organic solvent containing
Prepare. For manufacturing glass ceramic green sheets
The slurry used is generally a glass powder and aggregate ceramic.
Organic powder to 100 parts by weight of raw material powder
30 to 150 parts by weight of solvent, preferably 30 to 100 parts by weight, organic
5-30 parts by weight of binder, preferably 10-25 parts by weight, possible
Plasticizer 0.1 to 4.0 parts by weight, preferably 0.5 to 3.0 parts by weight,
And dispersant 0.1 to 3.0 parts by weight, preferably 0.5 to 2.0
Contains parts by weight. Plasticizer and dispersant added as needed
It is good and it is not an essential ingredient. The slurry was prepared by wet grinding.
It is preferable to use the mixture as it is. That is, wet
The mixture obtained by the milling may optionally contain an organic binder.
Or in an organic solvent containing an organic binder and a plasticizer
Raw material powder (glass powder and ceramic
Mixture with mixed powder)
Organic solvents and optionally organic binders and
A plasticizer is utilized in preparing the slurry. Specifically, first
If the amount of organic solvent is too large, dissolve it by means such as evaporation.
The volume of the medium is reduced to that used for preparing the slurry. So
After, wet grinding was performed in the absence of organic binder
If necessary, add organic binder, plasticizer and dispersant
In a range that is within the range of
, Attrition mill). Wet powder
Of organic binder or organic binder and plasticizer
If conducted in the presence of organic binders,
If necessary, add the insufficient amount of plasticizer together with the dispersant, and
Slurry. As for the organic binder and the plasticizer,
The above can be used. Acrylic acid as a dispersant
Oligomers, sorbitan monooleate, etc.
You. The resulting slurry is prepared in the usual manner (usually
The sheet is formed at room temperature or at room temperature.
Is dried under heating to remove the solvent,
A worksheet is obtained. The conventional method of performing wet grinding in water is disclosed in
As described in 59-195573, the preparation of slurry
Disintegration of the raw material powder after grinding (e.g., about 20 hours
Milling), but in the present invention, wet pulverization
After that, the pulverized raw material powder was not dried and used for wet pulverization.
Since the slurry is prepared using the organic solvent as it is,
Time crushing process is unnecessary, and the time required for production is
Shortened to width. According to the present invention, the raw material glass powder has a melting point
B as stabilizer_TwoO_ThreeDespite containing wet powder
B in the raw material powder as a grinding medium_TwoO_ThreeMay dissolve
Use an organic solvent instead of water
It is avoided that the raw material powder becomes porous. as a result,
The raw material powder is mixed so that the average particle size is about 1.5 to 3.5 μm.
1.5-5.0 m specific surface area when miniaturized^Two/ g raw
Powder is obtained. On the other hand, in the water according to the conventional method
When wet grinding is performed, the raw material powder becomes porous,
Specific surface area increases by 5 to 10 times when crushed to the same average particle size
I do. As a result, the raw material wet-pulverized by the conventional method
If the amount of organic binder is not increased, the elongation percentage of the powder will increase.
Manufacturing Kina glass ceramic green sheets
Could not be obtained, but wet-pulverized according to the method of the present invention.
With raw material powder, a smaller amount of binder
Fully covered surface and high elongation glass ceramic
A green sheet can be manufactured. The glass ceramics thus produced
Lean sheet has small elongation because of high elongation
Even if via holes are formed at a narrow pitch, rags occur
No cracking between via holes
No. As a result, the glass ceramic multilayer wiring board
It is possible to reduce the diameter and pitch of the hole,
The size of the substrate can be easily reduced. Also, the amount of organic binder
Because it requires less, the production cost is reduced and
Since the residual carbon content is low, the gray color of the fired substrate
Thus, a decrease in insulation and a decrease in insulation can be avoided. Glass ceramic produced by the method of the present invention
Mixed green sheets are produced by the green sheet lamination method.
Especially suitable for manufacturing glass ceramic multilayer wiring board
But with multi-layer printing using unfired glass-ceramics
Used for printing method or for manufacturing single-layer glass ceramic substrates
What you can do is obvious. [0037] The present invention will be illustrated below by way of examples. Implementation
In the examples, parts and percentages are by weight unless otherwise specified.
%. (Example 1) MgO-Al was used as a raw material powder._TwoO_Three-Si
O_Two-B_TwoO_Three-R_TwoO-based glass powder (R: alkali metal, B_TwoO_ThreeIncluding
18%, average particle size 12μm) and alumina powder (flat
Average particle size 10μm) and a small amount of cordierite powder (average particle size 1
0 μm) was used. This
Each of these powders was used without pulverizing a commercial product. 100 parts of the above glass powder were placed in a ball mill.
Cast together with 25 parts of mina powder and 7 parts of cordierite powder
And the organic solvent (or mixed organic solvent) shown in Table 1
After adding 150 parts by weight, alumina balls (diameter 15 mm)
About 400 hours after charging 400 parts until the average particle size becomes 2μm
Wet pulverized. The amount of the organic solvent added depends on the amount of the raw material powder.
The volume was made equal to the volume of water of the same weight as the total weight. After wet pulverization, the specific surface of the obtained pulverized powder
To measure the product by the BET method.
The medium was evaporated. The specific surface area was measured using a
Degas with 200 ° C, 60 ° C using Crotics Accusorp 2100
And the conditions of the adsorption gas Kr. The results are shown in Table 1.
I do. Next, 100 parts of the wet-pulverized raw material powder
40 parts xylene as plasticizer (and viscosity modifier) and plasticizer
2 parts of DOP, acrylic resin as organic binder
 (Polymethyl methacrylate) 17 parts, and as a dispersant
1 part of acrylic acid oligomer and wet mixing at 12:00
Slurry was carried out for a while. Using the obtained slurry,
Green with a thickness of 200 μm by the doctor blade method
A sheet was formed and dried at 80 ° C. The glass ceramics thus produced
Strength, elongation, pantin
The punching property was examined as follows. These test results
The results are also shown in Table 1. The breaking strength was measured using a tensile tester (load cell).
5 kg), tensile speed: 20 mm / min, sample shape: 10
It was measured under the condition of × 20 mm. The elongation is the
The amount of sheet stretching from the initial tension to the break
I asked. The punching and punching properties are as follows: NC puncher
And 400 punch holes with a diameter of 3.5 mm at a pitch of 4 mm.
Form them in 20 rows each, and press the button near the punch hole by microscopic observation.
No occurrence of cracks and cracks between punch holes
Goods that are not recognized are considered to be good and rags and cracks
Those which were recognized were evaluated as poor. For comparison, the raw material powder was used instead of the organic solvent.
Same as above except that the same weight of water as the powder was used
Wet pulverization, slurrying and green sheet production
Was done. [0046] [Table 1]As is apparent from Table 1, the present invention is related to the present invention.
In Test Nos. 1 to 10, the specific surface area of the raw material powder after wet pulverization was
Both are 4.0 m^Two/ g, small, strength and elongation
Balanced glass ceramic green sheet
And the punching and punching properties are also good. On the other hand, wet grinding is performed in water as in the prior art.
In the comparative example of Test No. 11, the ratio of the raw material powder after wet pulverization was
Surface area about 35 m^Two/ g, high strength
However, the elongation is extremely low, and punching
Poor performance and withstands the process of forming via holes in multilayer wiring boards
You can see that it cannot be done. In this example, the specific surface area was measured.
Was dried once after the wet pulverization.
If the used mixture is used for slurrying as it is,
Results are obtained. [0050](Reference example) The same glass powder and alumina powder as used in Example 1
And cordierite powder as raw material powder
Used. 100 parts of glass powder in a ball mill with alumina powder
Charged together with 25 parts and 7 parts of cordierite powder.
Next, alcohols (butanol, pro
(Panol or pentanol) mixed with xylene
A total of 70 parts, and at the same time an organic binder
Acrylic resin (polymethyl methacrylate) or
Butyral resin (polyvinyl butyral)
One part of DOP was added as a plasticizer. More alumina
400 parts of ball (15 mm diameter)
m for about 48 to 100 hours. In this example, the wet process was performed in the presence of an organic binder.
Because of the pulverization, the surface of the pulverized raw material powder
It is covered with an underlayer and can measure the specific surface area accurately.
Therefore, the specific surface area was not measured. From the pulverized raw material powder and the organic solvent,
Per 100 parts of the raw material powder
1.0 part of acrylate oligomer, wet type as organic binder
The same organic binder (acrylic resin) used for grinding
Or butyral resin) with the amount added during wet grinding.
And wet mixing for 12 hours.
It became Lee. Dr. shake using the obtained slurry
Green sheet with a thickness of 200 μm is formed by the loading method.
And dried at 80 ° C. This green sheet is shown in Table 1.
Elongation and punching performance comparable to those shown
Indicated. Then, the green sheet is heated at 900 ° C. in the atmosphere.
It was fired to produce a glass ceramic substrate. Made
Check the glass ceramic substrate for gray coloring.
It was visually determined. The result was used for wet grinding
Alcohol type and proportion in organic solvent (wt%), wet
Amount of organic binder added during grinding (100 parts of raw material powder
Table 2 (The binder is butyral tree)
Table 3 (When the binder is acrylic resin)
). For comparison, in the absence of an organic binder
Except for wet grinding in an organic solvent containing alcohol
Is the place where green sheet was made and fired as above.
The results of the case are also shown. [0055] [Table 2][0056] [Table 3]As is clear from Tables 2 and 3,
When wet grinding is performed in organic solvents containing coal
Is wet pulverized by adding an organic binder according to the present invention.
Then, it was obtained after firing the produced green sheet
Glass ceramic substrate is white, gray color is recognized
I couldn't. On the other hand, without adding an organic binder,
In a comparative example of wet mixing in an organic solvent containing coal
Is a glass ceramic obtained by firing green sheets.
Gray coloring was observed on the substrate. [0058] As described in detail above, the gas according to the present invention is
In the manufacturing method of the lath ceramic green sheet
Is a raw material powder that enables low-temperature firing at 1000 ° C or lower.
Is B_TwoO_ThreeContaining glass powder, but coarse
Wet grinding of raw material powder in organic solvent
In glass powder observed during wet grinding of water in water_Two
O_ThreeIncreases the specific surface area due to dissolution of
Glass ceramic green sheet with high elongation
Can be manufactured. As a result, a hole is formed in this green sheet.
Even if a small diameter via hole is formed at a narrow pitch during
B and cracks between via holes are less likely to occur
Via holes with small pitch and diameter
Easy production of glass ceramic multilayer wiring board
Enables high integration of LSI and one layer of multilayer wiring board
Is achieved. Also, the organic in the green sheet
Since the amount of binder is small, the
The amount of residual carbon on the glass substrate is low,
A reduction in electrical properties is avoided. Further, wet pulverization is performed by using an organic solvent containing alcohol.
When carried out in a medium, this wet grinding is performed using an organic binder.
Alcohol and glass powder by conducting in the presence
B inside_TwoO_ThreeReaction is prevented and the amount of binder is also small.
Green sheets with high elongation can be obtained by the amount
Top, alcohol and B_TwoO_ThreeReaction product remains after firing
On the glass-ceramic substrate after firing
Color can be prevented.

Continuation of the front page (72) Inventor Koichi Uno 2701-1, Higashibu, Omine-cho, Mine-shi, Yamaguchi Pref. Sumitomo Metal Ceramics Co., Ltd. (56) References JP-A-5-254863 (JP, A) JP-A-3-275532 ( JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) C04B 35/00-35/22 C03C 1/00-14/00

Claims (1)

(57) [Claims] [Claim 1] A raw material powder containing a B ₂ O ₃ -containing glass powder is wet-pulverized to a predetermined particle size, then slurried in an organic solvent containing at least a binder, and formed into a sheet. A method for producing a glass-ceramic green sheet, comprising: performing the wet pulverization in an alcohol-free organic solvent in the presence or absence of an organic binder.