JP3420199B2 - Charged particle beam drawing apparatus and drawing method - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a charged particle beam drawing technique, and more particularly to a variable shaped beam type charged particle beam drawing apparatus and a drawing method.

[0002]

2. Description of the Related Art In recent years, in an electron beam drawing apparatus for drawing a semiconductor pattern or the like, a variable shaped beam system having a rectangle or a triangle as a shape and capable of varying the dimensions thereof has been used. Although this variable shaped beam electron beam drawing apparatus can improve drawing throughput, it has the following problems.

That is, this type of apparatus can form not only a rectangular beam but also several kinds of triangular beams corresponding to oblique line drawing, and when the shape of a shot changes, the time until the beam irradiation of the next shot (settling time). ) Needs to be long. Further, when drawing is performed in the same order as the graphic data is input in this type of apparatus, the shape of the shot changes randomly. Therefore, a long settling time is frequently used, and the settling time of the entire drawing becomes large.

As a method of suppressing the increase in the settling time, a method of dividing shots into respective shapes and sequentially drawing the shots has been proposed (Registered No. 2504434, J.Vac.Sci.Technol.B8). (6), Nov / Dec 1990 pp.187
7). However, these documents do not describe a specific method capable of realizing shot shape division in real time (at the same time as drawing). For example, the above JVST
Although there is a description of a circuit that performs real-time processing in the above document, there is no specific description for realizing this.

Actually, depending on the method for realizing such processing, wasteful time may occur due to "performing rearrangement". Moreover, the dead time may be more than the effect of reducing the drawing time due to the rearrangement. In such a case, the entire drawing time is shortened if the rearrangement is not performed. In this way, it is not easy to obtain the effect of shortening the drawing time comprehensively by rearranging the shot order.

[0006]

As described above, in the variable shaped beam electron beam drawing apparatus, it has been conventionally considered to draw the shots separately for each shape of the shots, but the shots are rearranged in real time. I couldn't do it. In addition, the rearrangement of shots causes dead time, which is a factor that hinders the effect of shortening the drawing time.

The present invention has been made in view of the above circumstances, and an object thereof is to be able to rearrange shots in real time, and to waste the waste caused by rearranging shots. It is an object of the present invention to provide a charged particle beam drawing apparatus and a drawing method that can suppress the time and improve the drawing throughput.

[0008]

(Structure) In order to solve the above problems, the present invention adopts the following structure.

That is, according to the present invention, in a charged particle beam drawing apparatus of a variable shaped beam system, shot data generating means for generating shot data for dividing a figure to be drawn for each predetermined set, and output of the shot data generating means. In response to the result, a shot shape allocating means for repeating the operation of allocating the shot data for each shot shape for each set, and the shot data for each shape of the shots allocated by this shot shape allocating means are temporarily stored in different memory areas. Recording means for temporarily storing the information, means for removing information indicating the last shot data of the set in the recording means, and the last shot in the set for each shot shape in the recording means. Means for adding information indicating that the same set from the recording means in a predetermined order The operation of reading the shot data for each shape of the shots will be and means for repeating for each of the set, characterized by drawing a pattern according shot sequence read for each of the shot shape.

According to the present invention, in the charged particle beam drawing method of the variable shaped beam system, a step of generating shot data for dividing a figure to be drawn for each predetermined set, and the last shot data of the set. The step of removing the information indicating, the step of repeating the operation of allocating the shot data for each shot shape, and the step of repeating the operation for each shot shape, showing that the shot is the last shot in the set Adding information, temporarily storing the shot data in different memory areas for each shot shape, and reading shot data for each shot shape in the same set from the memory area in a predetermined order. A pattern is drawn according to the step of repeating the operation for each set and the shot order read for each shot shape. Characterized in that it comprises a degree.

The following are preferred embodiments of the present invention. (1) The recording means shall be a dual port memory that allows simultaneous input / output access.

(2) The recording means is a memory which can be accessed by time division. More specifically, by using a memory capable of operating at a speed double that of the operation clock of the peripheral circuit, writing and reading can be performed in one clock, and effective simultaneous input / output access is possible. To do.

(3) The recording means is physically separated into at least two. More specifically, two memories are connected so that banks can be switched, and while writing to one memory, reading from the other memory effectively enables simultaneous input / output access.

(4) Reading from the recording means is performed on a set in which all shot data has been written to the recording means.

(5) means for dividing a set of shot data into a virtual set having a predetermined size smaller than the recording means,
And means for adding information indicating the last shot data of the divided virtual set.

(6) A main deflector for determining the beam position and a sub-deflector for drawing a small area at the position determined by the main deflector are provided. The subfield is a small area that can be drawn by the deflector.

(7) The recording means is such that the access address is in a ring state, data is written and read in the order of addresses, and the area once read is made data writable.

(8) As a means for adding information indicating that it is the last shot in the set for each shot shape, delimiter data is added after the final shot data for each shot shape.

(Operation) According to the present invention, by adopting the above configuration, the drawing unit defined by a predetermined set, for example, the area (called a subfield) that can be drawn by the sub-deflector is used as a unit. Then, the drawing order is rearranged according to the shot shape. This is achieved as follows.

In the subfield, the original figure is divided into a plurality of shots, and the information (shot data) of each shot is sorted according to its shape and written in different areas of the recording means. At this time, after setting the final shot of the subfield to the recording means, information indicating the end of the subfield is written in each recording area for each shot shape. By setting this information in each recording area, the normal operation of the subsequent output control is guaranteed.

The recording means having a different recording area for each shot shape is provided with the following reading means in addition to the above-mentioned writing means. This reading means reads the information of the shots written in the recording area until the information of the end of the subfield is recognized in one "shot shape (for example, rectangular shot) recording area", Send to the next circuit. When the information of the end of the subfield is recognized, the reading of the "shot shape recording area" is completed, and the next "shot shape recording area" (eg, right-angled isosceles triangle with a right angle at the lower right) is read. Then, reading is started. And
The above process is repeated. Such a process is repeated for each recording area of each shot shape. Also, with respect to the shot output at the end of this subfield, information indicating that it is the final shot is added.

By performing the above procedure, for example, all the rectangular shots, and then all the isosceles right triangle shots having a right angle in the lower right corner are shot. All are guaranteed to be sorted by (graphic code).

Further, since this operation is normally performed,
The number of shots that can be stored in the recording unit is set to be larger than the maximum number of shots drawn in the subfield area. If the maximum number of shots drawn in the subfield area becomes larger than the number of shots that can be stored in the recording unit, the above operation becomes abnormal. In this case, the following processing is performed.

That is, in the processing of each subfield area, the number of shots processed at the time of writing is counted, and when the number of shots reaches a predetermined number, the processing of the subfield area is virtually ended. Is performed, and at that time, the processing end information of the subfield area written in the storage unit for each shot shape is virtual end information different from the true end information. Then, in the reading means, when the virtual end information is read in the reading processing for each shot shape, the reading control is transferred to the recording means of the next shot shape. However, at this time, the end information of the subfield area is not added to the final shot of the virtual subfield area.

The same processing is performed on the subfield areas remaining after the setting of the virtual subfield areas. This makes it possible to divide the set of shot data into a virtual set of a predetermined size smaller than the recording means.

Further, by making the recording means for each shot shape simultaneous access of input / output by time division, or by physically dividing into at least two or more, the input / output access can be performed simultaneously effectively. It can be done (with one clock of hardware). As a result, it is possible to suppress the generation of dead time due to the rearrangement of shots and reduce the drawing time due to rearrangement for each shot shape. Needless to say, the same is true even if a dual port memory capable of simultaneous input / output access is used as the recording means.

A system realized by the above system is schematically shown in FIG.

For example, five shot data storage memories for each shot shape are prepared as a shot data recording section. Shot data in one subfield or one virtual subfield can be stored in one storage memory. Data (indicated by hatching in the figure) of subfield delimiters or virtual delimiters is inserted in each storage memory.
This is performed by the memory control circuit unit for shot data and the like.

In front of the recording unit, there is provided a distribution unit for inputting shot data output for each subfield and distributing shot data for each shot shape. The distribution unit repeats the distribution operation for each subfield. Also, as the processing of the final shot information,
Information indicating that it is the last shot data of the subfield is removed.

An output unit for sequentially reading shot data from the five storage memories is provided at the subsequent stage of the recording unit.
In this output unit, the data in one storage memory is read out, and when the delimiter or virtual delimiter data is read out, the reading out of the memory is ended, and the data is read out to the next storage memory. In other words, it is possible to switch the storage memory for shot data at the time of output depending on the delimiter or virtual delimiter data.

This guarantees that shot data is output for each shot shape, such as a rectangle, an isosceles right triangle having a right angle at the lower right. Further, by making the address of the shot data ring-shaped in the storage memory, a fixed-size and finite-size memory area can be continuously used.

[0032]

DETAILED DESCRIPTION OF THE INVENTION The details of the present invention will be described below with reference to the illustrated embodiments.

(First Embodiment) FIG. 2 shows a first embodiment of the present invention.
It is a schematic block diagram which shows the electron beam drawing apparatus used for the embodiment.

In the figure, 10 is a sample chamber, 11 is a target (sample), 12 is a sample stand, 20 is an electron optical lens barrel, 21 is an electron gun, 22a to 22e are various lens systems, 23 is a blanking plate, and 24 to. 26 is various deflection systems, 27a, 27b, 27
Reference numeral c indicates an aperture mask for beam shaping. Further, 31 is a sample table drive circuit section, 32 is a laser measuring system, 3
3 is a deflection control circuit unit, 34 is a blanking control circuit unit,
Reference numeral 35 is a variable shaped beam size control circuit, 36 is a rearrangement circuit and drawing control circuit section, 37 is a control computer, 38 is a data conversion computer, and 39 is a CAD system.

The electron beam drawing apparatus of this embodiment adopts a stage continuous movement system. That is, while moving the stage continuously, the beam is deflected and the beam position is controlled to draw a graphic pattern. A band-shaped region having a width of several mm, which is drawn by the continuous movement of the stage once, is called a frame. The target graphic pattern is all drawn by repeating such drawing in the continuous movement direction (X direction) in the vertical direction (Y direction). During continuous movement, beam position control is performed by the main deflector 25 and the sub deflector 26.

The sub-deflector 26 controls the beam position in an area of about 60 μm □ (this is called a subfield). The sub-field is positioned by the main deflector 25, and the range in which the main deflection can be positioned determines the width (or in other words, the height) of the frame. In other words, the main deflector 25 positions the subfield, and the subdeflector 26 draws the subfield.

The electron beam emitted from the electron gun 21 is turned on and off by the blanking deflector 23. The present apparatus makes it possible to change the irradiation amount according to the irradiation position by adjusting the irradiation time at this time. The beam that has passed through the blanking plate 27 a is deflected by the beam forming deflector 24 and the beam forming aperture mask 27.
A rectangular beam and a triangular beam are formed by b and 27c, and the dimensions of the rectangular and triangular beams are variable. The shaped beam is used for the main deflector 25 and the sub-deflector 2.
Deflection scanning is performed on the target 11 by 6, and a desired pattern is drawn on the target 11 by this beam scanning.

The accelerating voltage of the electron beam in this apparatus is 50 kV, and the maximum size of the variable shaped beam that can be generated is a rectangle having a height of 2 μm and a width of 2 μm.

FIG. 3 shows a block diagram of the rearrangement circuit and drawing control circuit section 36. In the figure, 40 is a shot data generation circuit section, 41 is a final shot data processing circuit section,
42 is a memory control circuit unit, 43 is five recording memories 43
The recording unit includes a to 43e. The input / output operation of each circuit unit operates at 10 MHz, that is, the shots are received every 1 clock = 100 nsec, and the shots rearranged are output from each circuit unit every 100 nsec per clock by the pipeline method. However, writing / reading to / from the recording unit (memory in this embodiment) for each shot shape is effectively 1
Since it is realized by a clock, the memory access circuit has the above 1
It is operated at 20 MHz, which is double the speed of 0 MHz.

The operation of each circuit unit will be described below from the flow of graphic data. The LSI pattern data created by the CAD system 39 is input to the data conversion computer 38 to convert the data into graphic data. The created graphic data is transferred to the control computer 37. Next, the graphic data is sent from the control computer 37 to the shot data generating circuit unit 40.
Transfer to.

In the shot generation circuit section 40, a figure code corresponding to shots of a rectangle 50 and four types of triangles 51 to 54 as shown in FIG.
Shot data having dimension data (X, Y) of each shot and position data (X, Y) for irradiating the shot is generated. The size of the shot generated at this time is limited by the maximum size of the variable shaped beam. Here, the width is X
And the height corresponds to Y.

The shot data constitutes a group grouped for each sub-field, and a code of information which is the final shot is added to the final shot of the sub-field. As a result, it is possible to prevent the order in which shot data belonging to different subfields flow from being mixed. Next, the shot data is sent to the final shot data processing circuit unit 41.

The processing performed by the final shot data processing circuit section 41 is two types of processing, that is, processing relating to final shot data of subfields and virtual subfield division processing. The processing for the final shot data of the subfield is as follows.

(1) Determine the final shot data in the subfield. (2) In the case of the final shot, the "code of information indicating the final shot" added to the shot is deleted.

(3) Subfield delimiter data (dummy data) is set to 5 after receiving the final shot data.
Create them one by one and send them to the next circuit. The subfield delimiter data is data for indicating the end of the subfield in the recording memory for each shot shape. The above 5 pieces correspond to 5 kinds of shot shapes to be rearranged, and 5 pieces of the recording memory for each shot shape.
It corresponds to the type. Here, each of the five types of subfield delimiter data has a rectangular shot shape code and four right isosceles triangle four types of shot shape codes. However, the information indicating the delimiter data is written as "10" as a control code different from the shot shape code in the shot data.

Further, the virtual subfield division processing is as follows. (1) Count the number of shots input to the final shot data processing circuit unit 41 for the subfield currently being processed.

(2) When the count number reaches 8000, the input to the final shot data processing circuit unit 41 is stopped, and virtual subfield delimiter data (virtual dummy data) is created in order of five, Send to the next circuit. Here, the virtual subfield delimiter data has five types of shot codes similarly to the subfield delimiter data, and the control code indicating the “virtual subfield delimiter” set in each is “11”. Is written,
Control code "1" for "actual subfield delimiter"
A value different from 0 "is set.

Here, a value (= 80) which is a virtual delimiter
00) is set in the register of the final shot data processing circuit unit 41 from the control computer 37. This value (= 8000) is set as a value smaller than the upper limit (= 10000) of the number of shots that can be recorded in the recording memory for each shot shape. Next, the output of the final shot data processing circuit unit 41 is set in the register AAA.

The memory control circuit section 42 has a register A in which the output from the final shot data processing circuit section 41 is stored.
Access AA and output register BBB. The memory control circuit unit 42 includes a recording memory 43 for each shot shape.
It is a control circuit for a to 43e and performs the following.

(1) The shot data in the register AAA is fetched, and the shot data is sorted and stored in the recording memory for each shot shape. At this time, the code of the shot shape in the shot data is read and the recording memory to be stored is calculated. It also controls how much shot data is recorded in each recording memory.
The shot data stored in the register AAA is stored at the address next to the address at which the shot data was stored until immediately before.

(2) On the other hand, the following is performed on the output register BBB.

(B) The data in the recording memory for each shot shape is sequentially read, and if it is ordinary shot data, it is written in the register CCC inside the circuit 42.
This control holds a read address calculation circuit for the “shot data recording memory for each shot shape” and a memory for storing the calculation result inside the circuit 42, and a “recording memory for each shot shape” for each shape. It is realized by having a switching function. The data primarily recorded in the register CCC is output to the external register BBB if the next data is shot data instead of subfield delimiter data.

(B) If the shot data in the recording memory for each shot shape is the subfield delimiter data, the reading of the recording memory is ended and the reading of the next recording memory is started. If the recording memory being processed at that time is the last recording memory 43e, the shot data stored in the internal register CCC of the circuit 42 is the last shot of this subfield. A control code representing the last shot of the subfield is added and written to the output register BBB. After that, in order to start the processing of the next subfield data, the first recording memory 43a is restarted.
Start reading from.

(C) If the shot data in the recording memory is the delimiter data of the virtual subfield, the reading of the recording memory is ended and the reading of the next recording memory is started. If the recording memory being processed at that time is the last recording memory 43e, reading of the recording memory 43a is started in order to process the remaining part of the subfield currently being processed.

In the control of the address to each recording memory, the address is expressed by 15 bits for both reading and writing. 32k-which is the upper limit of the address
When the address exceeds 1 (k = 1024), the address 0 is accessed. This allows the 32k memory to be used repeatedly as a ring buffer. Here, since the memory control circuit unit 42 may write and read simultaneously to and from the same recording memory in response to one clock (100 nsec), the operating clock of the peripheral circuit (10 MHz)
It operates at double speed (20 MHz). The data stored in the output register BBB is sent to the next circuit.

The shot data sent in this manner is, for each sub-field, initially a rectangular shot only, and then a right isosceles triangle having a right angle at the lower right, ...
The shot shapes are collected and flowed in order.

The shot data passes through various circuits of the drawing control circuit and is finally received by the circuit which controls drawing. In this circuit, for example, the waiting time between shots is controlled while memorizing the shape of the shot. (1) If the shape of the immediately preceding shot data and the shape of the current shot data are the same, the waiting time T1 (for example, 50n
Sec), if different, T2 (200 nsec). (2) From the difference (δx) between the position of the previous shot and the position of the current shot, a temporary waiting time is determined by f (δx) using a certain function f. (3) The time (T1 or T2) obtained in (1) and (2)
The f (δx) obtained in step 1 is compared and the larger one is set as the shot waiting time.

The flow of shot data is rearranged for each shape of the shot by the above-described processing, and is continuous for each shape. Therefore, in (1) above, T1 (50
n seconds) will be selected. Therefore, effectively 1
The minimum value of the waiting time for forming shots is 5
Can be 0 nsec. However, as shown in (3), f (δx)
The larger the value, the smaller the waiting time for the shot, and thus the minimum value is not necessarily 50 ns. However, on the contrary, the number of times of setting the long T2 time is minimized, so that the time is necessarily shortened.

When the above processing is realized, the processing time when the shot data is distributed by the graphic code is compared with the processing time when the shot data is not distributed, and the ratio of the shortened time is shown in FIG. . Here, the shorter waiting time for one shot molding is T1 = 50 ns, the longer waiting time is T2 = 200 ns, and the irradiation dose is 10 μC / cm ² . The horizontal axis represents the proportion of rectangular shot data included in the subfield, and the vertical axis represents the proportion of the shortened time. At this time, the number of four types of triangles is the same.

As shown in the drawing, there is a reduction effect of about 15% up to a rectangle ratio of 50%, and the feature is that the reduction effect decreases as the rectangle ratio increases. When the rectangular ratio is 100%, the shot shapes are all the same, so that the waiting time for molding is all T1 hours and the time reduction is 0. That is, it can be said that the present embodiment is particularly effective when the ratio of the rectangle is 50% or less.

As described above, according to this embodiment, the drawing order of the shot data can be rearranged by the graphic code in real time before the drawing. Therefore, the number of times of switching to a different type of figure code that has a longer settling time than when shots with the same figure code are arranged is reduced (since there is no change in the total number of shots, it is possible to switch to a figure code of the same type relatively. It is possible to reduce the total settling time for the entire drawing. Thereby, the drawing time can be shortened and the productivity of the electron beam drawing apparatus can be improved.

(Second Embodiment) FIG. 6 shows a second embodiment of the present invention.
FIG. 3 is a block diagram illustrating a rearrangement circuit and a drawing control circuit unit for explaining the main configuration of the electron beam drawing apparatus according to the embodiment. The same parts as those in FIG. 3 are designated by the same reference numerals, and detailed description thereof will be omitted.

In the figure, reference numeral 45 is a distribution circuit section, 46 is a recording section composed of five recording memories 46a to 46e, and 47 is an output switching circuit section. As a difference from the first embodiment, dual port memories are used as the recording memories 46a to 46e. The distribution circuit unit 45 distributes the shot data to the corresponding recording memory based on the shot shape (graphic code) of the shot data. The output switching circuit unit 47 has registers B and C therein, performs switching from a subfield delimiter in reading from the recording memory, and resets information indicating the end of the subfield using the registers B and C. It is processing.

With such a configuration, since the dual port memory is used as the recording unit 46, even if the memory access operation is the same as the input / output operation of each other circuit unit, the recording means for each shot shape is used. Writing and reading to (memory in this embodiment) can be effectively realized in one clock. Therefore, the same effect as that of the first embodiment can be obtained.

(Third Embodiment) FIG. 7 shows a third embodiment of the present invention.
FIG. 3 is a block diagram illustrating a rearrangement circuit and a drawing control circuit unit for explaining the main configuration of the electron beam drawing apparatus according to the embodiment. The same parts as those in FIG. 3 are designated by the same reference numerals, and detailed description thereof will be omitted.

In the figure, reference numerals 48 and 49 are recording sections, and the respective recording sections 48 and 49 are composed of recording memories 48a to 48e and recording memories 49a to 49e, respectively. The difference from the second embodiment is that the two recording units 48 and 49 are accessed by bank switching.

With such a configuration, the two recording units 48 and 49 as the recording means are switched between banks, so that when data is read from one recording unit, data can be written to the other recording unit. Therefore, writing and reading to / from the recording unit (memory in this embodiment) for each shot shape can be effectively realized in one clock. In other words, by accessing the recording memory by bank switching, even a memory that cannot perform simultaneous I / O access can be accessed at the same operation speed as the peripheral circuit portion.

The present invention is not limited to the above embodiments. In the embodiment, the example applied to the electron beam writing apparatus has been described, but the present invention is not limited to this and can be applied to the ion beam writing apparatus. Further, the number of recording memories is not limited to five at all, and can be appropriately changed according to the number of graphic types to be formed. In addition, various modifications can be made without departing from the scope of the present invention.

[0069]

As described above in detail, according to the present invention, in the charged particle beam drawing apparatus of the variable shaped beam system,
A means for allocating shot data for each shot shape in a predetermined set unit, a recording means for storing shot data in different memory areas for each shot shape, and a shot shape for each shot shape in the same set from the recording means. By providing a means for reading the shot data, etc., the drawing order of the shot data can be rearranged by the graphic code in real time prior to drawing. In addition, it is possible to minimize the dead time generated by rearranging the shots. Therefore, it is possible to improve the drawing throughput when the variable shaped beam is used.

[Brief description of drawings]

FIG. 1 is a schematic diagram showing a processing system of the present invention.

FIG. 2 is a schematic configuration diagram showing an electron beam drawing apparatus used in the first embodiment.

FIG. 3 is a block diagram showing a specific configuration of a rearrangement circuit and a drawing control circuit unit according to the first embodiment.

FIG. 4 is a diagram showing an example of various shot data that can be formed by the apparatus of FIG.

FIG. 5 is a diagram showing a rate of reduction in processing time in the first embodiment.

FIG. 6 is a block diagram showing a specific configuration of a rearrangement circuit and a drawing control circuit unit according to the second embodiment.

FIG. 7 is a block diagram showing a specific configuration of a rearrangement circuit and a drawing control circuit unit according to the third embodiment.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 10 ... Sample chamber 11 ... Target (sample) 12 ... Sample stand 20 ... Electron optical lens barrel 21 ... Electron guns 22a-22e ... Lens system 23 ... Blanking plates 24-26 ... Deflection systems 27a-27c ... Beam shaping aperture mask 31 ... Sample stage drive circuit unit 32 ... Laser length measurement system 33 ... Deflection control circuit unit 34 ... Blanking control circuit unit 35 ... Variable shaping beam size control circuit unit 36 ... Sorting circuit and drawing control circuit unit 37 ... Control computer 38 ... Data conversion computer 39 ... CAD system 40 ... Shot data generation circuit section 41 ... Final shot data processing circuit section 42 ... Memory control circuit sections 43, 46, 48, 49 ... Recording sections 43a-e, 46a-e, 48a -E, 49a-e ... Recording memory 45 ... Distribution circuit section 47 ... Output switching circuit section

─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Yoshiaki Hattori 1 Komukai Toshiba-cho, Sachi-ku, Kawasaki-shi, Kanagawa Toshiba Research & Development Center Co., Ltd. (72) Inventor Tomohiro Iijima Komukai-Toshiba, Kawasaki-shi, Kanagawa No. 1 in Toshiba Research and Development Center Co., Ltd. (56) Reference JP 63-133525 (JP, A) JP 61-43419 (JP, A) JP 5-343304 (JP, A) JP 4-162710 (JP, A) (58) Fields investigated (Int.Cl. ⁷ , DB name) H01L 21/027 G03F 7/20 504

Claims (5)

(57) [Claims] 1. Shot data generating means for generating shot data obtained by dividing a figure to be drawn for each predetermined set,
In response to the output result of the shot data generating means, a shot shape allocating means for repeating the operation of allocating the shot data for each shot shape for each set, and a shot for each shape of the shots allocated by this shot shape allocating means. Recording means for temporarily storing data in different memory areas, means for removing information indicating the last shot data of the set in the recording means, and for each shot shape in the recording means Means for adding information indicating that the shot is the last shot in the set, and means for repeating, for each set, an operation of reading shot data for each shot shape in a predetermined order from the recording means to the same set. And a pattern is drawn according to the shot order read for each shot shape. Characterized charged particle beam drawing device. 2. The recording means is physically divided into a dual port memory capable of input / output access at the same time, a memory capable of input / output access by time division, or at least two, and is effectively capable of input / output access at the same time. 2. The charged particle beam drawing apparatus according to claim 1, which is a different memory. 3. The charged particle beam drawing apparatus according to claim 1, wherein the reading from the recording means is performed for a set in which all the shot data has been written to the recording means. 4. A means for dividing the set of shot data into a virtual set of a predetermined size smaller than the recording means, and information indicating the last shot data of the divided virtual set. The charged particle beam drawing apparatus according to claim 1, further comprising: 5. A step of generating shot data in which a figure to be drawn is divided for each predetermined set, a step of removing information indicating that the shot data is the last shot data of the set, A step of repeating the operation of distributing for each shape for each set, a step of adding information indicating that it is the last shot in the set for each of the allocated shot shapes, and the shot data for each shape of the shot In a different memory area, and repeatedly reading shot data for each shot shape in the same set from the memory area in a predetermined order, for each set, and for each shot shape. And a step of drawing a pattern in accordance with the read shot order.