JP3425463B2 - Gauge, sheet with gauge, and method of using the same - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gauge having a measuring scale formed by a surface uneven pattern, a gauge-equipped sheet, and a method of using the gauge.

[0002]

2. Description of the Related Art Conventionally, a silver salt type film gauge has been widely used as a gauge for measurement. Also, a hologram scale in which a measuring scale is formed by a hologram has been proposed. For example, in the hologram scale disclosed in Japanese Patent Laid-Open No. 4-264214, a photosensitive layer is formed on a base material, an interference fringe is exposed and recorded on the photosensitive layer, and then a developing process is performed to form a hologram. Is a scale for measurement.

The line width and pitch of the scale of the hologram scale can be formed to be, for example, about several μm.
Therefore, a fine measuring object can be measured by mounting it on a loupe or a microscope.

[0004]

However, in the above-mentioned conventional silver salt type film gauge, wet development must be carried out after exposure, and due to the expansion and contraction of the film, the accuracy as a gauge is difficult to obtain. In addition, since the scale is black, there is a problem that the scale cannot shield the measurement target placed under the gauge, and the scale and the measurement target cannot be viewed at the same time. Furthermore, since it requires a process of exposure and development, it is not suitable for mass production, and there is a limit to cost reduction.

Further, in the hologram scale, interference fringes of the object light and the reference light must be recorded in order to form a scale, and a reproduced image is formed on the photosensitive material of the object light or the reference light. Since it is determined by the incident angle and the position of the object, strict shooting conditions are required, which is practically impossible. Even if it is possible, it will be useless because the image reproduction position changes depending on the incident angle of the reproduction illumination light. There was a problem.

Further, in both the silver salt type film gauge and the hologram scale, when the scales are densely packed with respect to the object to be measured, the light beams interfere with each other when shooting, There is a problem that it is difficult to record the precise scale and it becomes difficult to read the scale accurately.

The present invention has been made in order to solve the above-mentioned problems, and is fine and accurate, the scale does not shield the measuring object, and the measuring object is scaled. , Even if they are dense
The purpose is to be able to read the scale easily and accurately.

[0008]

In order to achieve the above object, a first solution of the gauge according to the present invention is a gauge having a gauge pattern forming layer on which desired scales are formed. The forming layer is transparent or semi-transparent, and the scale is a scale region that becomes a scale line.
Is formed by a plurality of surface uneven patterns.

In a second solving means according to the first solving means, the surface of the gauge pattern forming layer on which the scale is formed has a refractive index different from the refractive index of the gauge pattern forming layer. A transparent or semi-transparent reflective layer is provided.

A third solving means is the first or second solving means, wherein a transparent or semitransparent base material is provided on the surface of the gauge pattern forming layer opposite to the surface on which the scale is formed. It is characterized by being.

A fourth solving means is characterized in that, in the first to third solving means, the surface uneven pattern is a diffraction grating.

A fifth solving means is the fourth solving means, wherein the grating direction or grating pitch of the diffraction gratings forming a predetermined number of scales is the same as the grating direction or grating pitch of the diffraction gratings forming another scale. Characterized by being different.

A first solution means of the gauge-equipped sheet is characterized by comprising first to fifth solution means of the gauge and a support member for temporarily supporting the gauge.

A second solving means according to the first solving means is characterized in that the gauge is detachably attached to the supporting member.

A third solving means is characterized in that, in the second solving means, the gauge is detachably supported by the supporting member via an adhesive layer.

A fourth solving means is characterized in that, in the first to third solving means, a plurality of the gauges are provided.

A fifth solving means is characterized in that, in the fourth solving means, a plurality of gauges having different kinds or units of one scale are provided.

[0018]

[0019]

[0020]

[0021] A first solution to the use of the gauged sheet is to use the first to fifth solutions of the gauged sheet, wherein the gauge is separated from the support member and the gauge is used. It is characterized by doing.

A second solving means is a method of using the fifth solving means for a gauge-equipped sheet, wherein a gauge having a desired scale is selected from the plurality of gauges and used. To do.

[0023]

In the gauge solution means, since the scale is transparent or semi-transparent and is formed by the surface uneven pattern,
A fine and extremely accurate scale can be formed. In addition, the scale and the object can be visually recognized at the same time without the scale blocking the target object for observation and measurement. In the second solving means, since the transparent or semitransparent reflecting layer is formed, the scale can be visually recognized by the reflected light. In the third solution, since the transparent or translucent base material is provided, the handleability of the gauge is improved. In the fourth solving means, since the scale is a diffraction grating, diffracted light is generated and the visibility of the scale is improved. In the fifth solving means, since the color or intensity of the diffracted light on the scale changes every predetermined number, the size can be read very easily.

In the solution of the gauged sheet,
When the gauge is not used, it can be supported by the support member, so that the handleability is improved and the scale can be protected. In the second and third solving means, the gauge can be supported by the supporting member again after use, so that the gauge can be stored easily. In the fourth solution means, since a plurality of gauges are provided on the support member, one sheet is sufficient even when a plurality of people perform observation and measurement, and the gauge management and the like are simplified. In the fifth solving means, since a gauge having a plurality of types of scales is provided, it is possible to select an appropriate gauge according to the measurement location, measurement magnification, and the like.

In the solution of the method of using the gauge,
The surface concavo-convex pattern is arranged in the vicinity of the object as a scale for measurement, and the image is enlarged and observed and measured together with the object. Therefore, the object can be measured easily and accurately. In the second solution, the gauge can be moved to a desired position on the object, and the efficiency of observation and measurement is improved. In the third solution, since the scale and the object are adjacent to each other, defocusing and the like are eliminated, and the dimension can be measured more accurately.

In the solution to the method of using the gauged sheet, the gauge can be easily handled, so that the workability in observing and measuring an object can be improved. In the second solving means, a desired gauge can be selected according to the measurement location of the object and the measurement magnification, and the efficiency of observation and measurement can be improved.

[0027]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a gauge, a gauge-equipped sheet, and a method of using the gauge according to the present invention will be described below with reference to the drawings. FIG. 1 (a) is a perspective view showing the external configuration of a gauge according to a first embodiment of the present invention.
(B) is the sectional view. As shown in FIG. 1, the gauge 10 includes a base material 11, a gauge pattern forming layer 12 provided on the base material 11, and a reflective layer 13.

The substrate 11 is transparent or translucent glass,
The gauge pattern forming layer 12 is formed of a material having low expansion and contraction and moisture resistance such as polyethylene terephthalate and polycarbonate. The gauge pattern forming layer 12 is a layer in which a scale for measurement is displayed by a surface unevenness pattern. As a material forming the gauge pattern forming layer 12, a synthetic resin capable of providing a surface unevenness pattern on a scale can be used.

The synthetic resin may be a thermoplastic synthetic resin such as polyvinyl chloride, an acrylic resin (eg polymethylmethacrylate etc.), polycarbonate or polystyrene, or a thermosetting synthetic resin such as unsaturated polyester, melamine or epoxy. , Polyester (meth) acrylate (herein, (meth))
The term acrylate is meant to include both acrylate and methacrylate. ), Urethane (meth) acrylate, epoxy (meth) acrylate, polyether (meth) acrylate, polyol (meth) acrylate, melamine (meth) acrylate, or triazine (meth) acrylate. Alternatively, the thermoplastic synthetic resin and the thermosetting synthetic resin may be mixed and used.

Further, as the synthetic resin, it is particularly preferable to use a resin capable of embossing the surface unevenness pattern of the scale by hot pressing, and curing after embossing to give sufficient durability.
So-called UV curable resin, electron beam curable resin, heat curable, natural curable reactive resin and the like may be used. In the present invention, a resin that is cured by ultraviolet rays or electron beams is suitable. Specifically, for example, methyl (meth) acrylate, ethyl (meth) acrylate, propyl (meth) acrylate, butyl (meth) acrylate, isobutyl (meth) acrylate, t-butyl (meth) acrylate, isoamyl (meth) acrylate, Cyclohexyl (meth) acrylate, 2-ethylhexyl (meth) acrylate, ethylene glycol di (meth) acrylate, polyethylene glycol di (meth) acrylate, hexanediol di (meth) acrylate, trimethylolpropane tri (meth) acrylate, trimethylolpropane Di (meth) acrylate, pentaerythritol tetra (meth) acrylate, pentaerythritol tri (meth) acrylate, dipentaerythritol hexa (meth) acrylate , Ethylene glycol diglycidyl ether di (meth) acrylate, polyethylene glycol di (meth) acrylate, propylene glycol diglycidyl ether di (meth) acrylate, polypropylene glycol diglycidyl ether di (meth) acrylate, sorbitol tetraglycidyl ether tetra (meth) A monomer having a radically polymerizable unsaturated group such as acrylate may be used.

Further, as the thermosetting ultraviolet ray or electron beam curable resin, for the polymer obtained by polymerizing or copolymerizing the following compounds (1) to (8), the below-mentioned methods (a) to (). Those introduced with a radically polymerizable unsaturated group according to d) can be used. (1) Monomer having hydroxyl group: N-methylol (meth)
Acrylamide, 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, 2-hydroxybutyl (meth) acrylate, 2-
Hydroxy-3-phenoxypropyl (meth) acrylate and the like.

(2) Monomer having a carboxyl group:
(Meth) acrylic acid, (meth) acryloyloxyethyl monosuccinate, etc. (3) Epoxy group-containing monomer: glycidyl (meth)
Acrylate etc. (4) Monomers having an aziridinyl group: 2-aziridinylethyl (meth) acrylate, allyl 2-aziridinylpropionate and the like. (5) Amino group-containing monomer: (meth) acrylamide, diacetone (meth) acrylamide, dimethylaminoethyl (meth) acrylate, diethylaminoethyl (meth) acrylate and the like. (6) Sulfone group-containing monomer: 2- (meth) acrylamido-2-methylpropanesulfonic acid and the like. (7) Monomer having isocyanate group: 2,4-toluene diisocyanate and 2-hydroxyethyl (meth)
Diisocyanate such as 1 mol to 1 mol adduct of acrylate and adduct of radical polymerizable monomer having active hydrogen.

(8) Further, in order to control the glass transition point of the above-mentioned copolymer and the physical properties of the cured film, the above-mentioned compound and the following compound which can be copolymerized with this compound can be used. It can be copolymerized with a monomer. Examples of such copolymerizable monomers include methyl (meth)
Acrylate, ethyl (meth) acrylate, propyl (meth) acrylate, butyl (meth) acrylate,
Isobutyl (meth) acrylate, t-butyl (meth)
Examples thereof include acrylate, isoamyl (meth) acrylate, cyclohexyl (meth) acrylate, and 2-ethylhexyl (meth) acrylate.

Next, the polymer obtained as described above is reacted according to the following methods (a) to (d) to introduce a radical-polymerizable unsaturated group, whereby ultraviolet or electron beam curability is obtained. A resin is obtained. (A) In the case of a polymer or copolymer of a monomer having a hydroxyl group, a monomer having a carboxyl group such as (meth) acrylic acid is subjected to a condensation reaction. (B) In the case of a polymer or copolymer of a monomer having a carboxyl group or a sulfone group, the above-mentioned monomer having a hydroxyl group is subjected to a condensation reaction. (C) In the case of a polymer or copolymer of a monomer having an epoxy group, an isocyanate group or an aziridinyl group, the above-mentioned monomer having a hydroxyl group or a monomer having a carboxyl group is subjected to an addition reaction. (D) In the case of a polymer or copolymer of a monomer having a hydroxyl group or a carboxyl group, a monomer having an epoxy group, a monomer having an aziridinyl group or a diisocyanate compound and a hydroxyl group-containing acrylic acid ester unit amount The addition reaction of 1 mol to 1 mol of the body may be carried out. Further, the above-mentioned monomer and the thermoformable ultraviolet ray or electron beam curable resin may be mixed and used.

Further, although the above-mentioned ones can be sufficiently cured by electron beam irradiation, when they are cured by ultraviolet ray irradiation, as a sensitizer, benzoquinone, benzoin, benzoin ethers such as benzoin methyl ether, halogen, etc. Those that generate radicals by irradiation with ultraviolet rays such as derivatized acetophenones can also be used.

The gauge pattern forming layer 12 made of the above synthetic resin is formed by a gravure coating method, a die coating method,
By a conventional coating method such as a knife coating method and a roll coating method, and a general printing method such as an offset printing method, a silk printing method and a letterpress printing method, a thickness of 0.1 is formed on the substrate 11.
˜100 μm, preferably 0.5 to 50 μm.

As a method of forming the surface unevenness pattern for displaying the scale, the following method can be mentioned. The first method is a method in which a surface unevenness pattern is directly drawn on a photoresist coated on a substrate with a condensable radiation such as an electron beam, a laser beam or an ion beam, and then developed. The second method is to record the interference fringes of two beams of coherent light on the photoresist applied to the substrate, and then overlay a mask having the outer shape of the surface uneven pattern on the photoresist, and then reapply the ultraviolet light or the like. This is a method of developing after exposing with incoherent light. In the third method, a substrate having surface irregularities such as a diffraction grating is prepared in advance, a photoresist is applied so that the surface irregularities are filled, and then a mask having the contour of the surface irregularity pattern is formed by the photolithography. In this method, the resist is overlaid, exposed, and then developed.

From the substrate having the surface irregularity pattern produced by the above first to third methods, a die is produced by an electrocasting method or the like, and the synthetic resin is embossed or cast, A surface uneven pattern is provided. The scale formed from such a surface uneven pattern can display extremely accurate dimensions in units of microns. The first method is preferable because the direction and pitch of the surface concavo-convex pattern can be set freely and can be partially changed easily.

The reflective layer 13 is the gauge pattern forming layer 12
Although it is not necessary to provide the scale in particular when observing the scale only with the light passing through, it is desirable to provide the scale because the reflected light of the surface uneven pattern increases and the visibility of the scale is improved. The reflective layer 13 is a layer having reflective transparency, and examples of the material thereof include a continuous thin film of a substance having a refractive index different from that of the gauge pattern forming layer 12 and a metal thin film having a thickness of less than 200 Å.

The refractive index of the continuous thin film may be larger or smaller than that of the gauge pattern forming layer 12, but the difference in refractive index is preferably 0.3 or more, and the difference is 0.5 or more, and further 1. It is more preferably 0 or more. The thickness of the continuous thin film may be in the transparent region of the material forming the thin film, but is usually preferably 100 to 10,000 angstroms. Examples of the method for forming the continuous thin film on the uneven surface pattern of the gauge pattern forming layer 12 include thin film forming methods such as a vacuum deposition method, a sputtering method, and an ion plating method.

As a material having a refractive index larger than that of the gauge pattern forming layer 12 (hereinafter, the refractive index: n is added in parentheses to the right of the material name), Sb ₂ S ₃ (n = 3.0),
Fe ₂ O ₃ (n = 2.7), TiO ₂ (n = 2.6),
CdS (n = 2.6), CeO ₂ (n = 2.3), Zn
S (n = 2.3), PbCl ₂ (n = 2.3), CdO
(N = 2.2), Sb ₂ O ₃ (n = 2.0), WO ₃
(N = 2.0), SiO (n = 2.0), Bi ₂ O ₃
(N = 2.5), In ₂ O ₃ (n = 2.0), PbO
(N = 2.6), Ta ₂ O ₅ (n = 2.4), ZnO
(N = 2.1), ZrO ₂ (n = 2.0), Cd ₂ O ₃
(N = 1.8), Al ₂ O ₃ (n = 1.6), CaO
Examples thereof include SiO ₂ (n = 1.8).

As a continuous thin film having a refractive index smaller than that of the gauge pattern forming layer 12, LiF (n = 1.4), Mg
F ₂ (n = 1.4), 3NaF · AlF ₃ (n = 1.3
Or 1.2), AlF ₃ (n = 1.4), CaF ₂ (n
= 1.3 or 1.4), NaF (n = 1.3) and the like. Further, a transparent strong derivative having a refractive index larger than that of the gauge pattern forming layer 12 can be used as well, and CuCl (n
= 2.0), CuBr (n = 2.2), CaAs (n =
3.3-3.6), GaP (n = 3.3-3.5), N
₄ (CH ₂ ) ₆ (n = 1.6), Bi ₄ (GeO ₄ ) ₃
(N = 2.1), KH ₂ PO ₄ (KDP) (n = 1.
5), KD ₂ PO ₅ (n = 1.5), NH ₄ H ₂ PO ₄
(N = 1.5), KH ₂ AsO ₄ (n = 1.6), Rb
H ₂ AsO ₄ (n = 1.6), BaTiO ₃ (n = 2.
_{4), KTa 0. 6 5} Nb 0. 3 5 O 3 (n = 2.
_{3), K 0. 6 Li} 0. 4 NbO 3 (n = 2.3), K
_{Sr 2 Nb 5 O 1 5 (} n = 2.3), Sr x Ba 1 - x
_{Nb 2 O 6 (n = 2.3} ), Ba 2 NaNbO 1 5 (n
= 2.3), LiNbO ₃ (n = 2.3), LiTaO
₃ (n = 2.4), SrTiO ₃ (n = 2.4), KT
Examples include aO ₃ (n = 2.2).

When the thickness is 200 angstroms or less, the refractive index is the complex refractive index n ^* (n ^* = ni).
It is represented by k), and since it has a considerably low light transmittance, it can be used as the reflective layer 13 while being transparent. In particular,
Be (n = 2.7, k = 0.9; hereinafter described in the order of n and k), Mg (0.6, 0.1), Ca (0.3, 8.
1), Sr (0.6, 3.2), Ba (0.9, 1.
7), La (1.8, 1.9), Ce (1.7, 1.
4), Cr (3.3, 1.3), Mn (2.5, 1.
3), Cu (0.7, 2.4), Ag (0.1, 3.
3), Au (0.3, 2.4), Al (0.8, 5.
3), Sb (3.0, 1.6), Pd (1.9, 1.
3), Ni (1.8, 1.8), and Sn, I
n, Te, etc.

Furthermore, a transparent synthetic resin layer having a refractive index different from that of the gauge pattern forming layer 12 can be used as the reflecting layer 13, and the following concrete synthetic resins can be used. . Polytetrafluoroethylene (n = 1.35), U Polychlorotrifluoroethylene (n = 1.43), Polyvinyl acetate (n = 1.45)
1.47), polyethylene (n = 1.50 to 1.5)
4), polypropylene (n = 1.49), polymethylmethacrylate (n = 1.49), polystyrene (n =
1.60), polyvinylidene chloride (n = 1.60 to 1 ..
63), polyvinyl butyral (n = 1.48), polyvinyl formal (n = 1.50), polyvinyl chloride (n = 1.52 to 1.55), polyester (n = 1.
52-1.57). In this embodiment, the reflective layer 13
Is TiO ₂ vapor-deposited in a thickness of 450 angstrom by a vacuum vapor deposition method.

FIG. 2 shows the gauge pattern forming layer 12 of FIG.
It is a top view which expands and shows the surface unevenness pattern of. The surface unevenness pattern has a scale 12a (12a-1, 12a-
2, ...)). These scales 12a
The line width and pitch thereof are, for example, about several to several 100 μm.

FIG. 3 shows a perspective view ((a) in the figure) showing the construction of the first embodiment of the gauge-equipped sheet according to the present invention, and a second embodiment ((b) in the figure) of the gauge. It is a top view.

As shown in FIG. 3A, the gauge-equipped sheet 50 is composed of a support member 30 and a plurality of gauges 10A removably supported by the support member 30. These gauges 10A are transparent or translucent. Also, FIG.
As shown in (b), the gauge 10A is provided with fine graduations 12b in units of micron and submicron.

FIG. 4 is a view showing an AA cross section of FIG. 3 (a). As shown in FIG. 4, the gauge 10A includes a base material 11
A, a gauge pattern forming layer 12A provided on the base material 11A and having a scale 12b formed thereon, a reflective layer 13A provided on the gauge pattern forming layer 12A, and at least a region provided with the scale 12b. It is composed of a protective layer 16 and an adhesive layer 15 adhered to the support member 30.

Substrate 11A, gauge pattern forming layer 12
A and the reflective layer 13A are composed of the above-mentioned base material 11, gauge pattern forming layer 12, and reflective layer 13, respectively.
The same as can be used. The protective layer 16 is made of a film of polyethylene terephthalate, polyethylene or the like, and is peelable in order to protect the scale 12b.
It is provided on 3A and is peeled off at the time of use. Therefore, with this protective layer 16, the scale 1
It is prevented that 2b is damaged. The adhesive layer 15 is made of a transparent or translucent acrylic or rubber adhesive or the like, and adheres to the support member 30 in a peelable manner. After peeling the gauge 10A, the gauge 10A can be re-adhered to another object.

FIG. 5 is an enlarged plan view showing the scale 12b of the gauge 10A of FIG. 3 (b). In the figure, (a) is a diagram showing the scale 12b-1 according to the first embodiment, and (b) is a diagram showing the scale 12b-2 according to the second embodiment. The surface uneven pattern of the scale 12b is
It shall be a diffraction grating.

The scale 12b-1 shown in FIG.
The scales 121a to 121c for each book are formed so that the lattice direction is different from the lattice directions of the other scales. Further, the scale 12b-2 shown in (b) in the drawing is formed such that the lattice pitch of each of the five scales 122a to 122c is different from the lattice pitch of the other scales (the lattice pitch is dense).

In a general ruler, for example, when a scale of 1 mm is displayed, a display of 5 mm or 1 cm is made by changing the length of the scale, but the scale is formed as shown in FIG. By doing so, they are expressed as the intensity and color of the diffracted light. For example (a) in the figure
In the graduation 12b-1, when the light is irradiated from the X direction in the figure, the luminosity of the graduations 121a to 121c becomes larger than the luminosity of the other graduations. In addition, the scale 12 in FIG.
In b-2, the color of the diffracted light on the scales 122a to 122c is different from the color of the diffracted light on the other scales. Accordingly, when the scales are densely packed in the measurement area, it is possible to first measure the rough size in units of 5 scales and then to measure the fine size in units of 1 scale. Needless to say, the scales may be formed without changing the grid direction or the grid pitch of the scales.

FIG. 6 is a view showing a second embodiment of the gauge-equipped sheet according to the present invention, and FIG. 7 is a sectional view showing a gauge 10B which is a third embodiment of the gauge according to the present invention. In FIG. 6, the gauge-equipped sheet 50A includes a support member 30A and a plurality of gauges 10B supported by the support member 30A.
(10B-1 to 10B-6). Each of these gauges 10B has a grid-like scale 12
c (12c-1 to 12c-6) are formed, and the unit of each graduation 12c is 5 μm and 10
μm, 50 μm, 100 μm, 500 μm, 1 mm. The support member 30A is placed on a mount 40 made of paper or the like and housed in an envelope-shaped transparent polyester bag or the like. Further, on the mount 40, a value 41 of one scale unit of the scale 12c of the corresponding gauge 10B is printed at a portion overlapping the gauge 10B or in the vicinity thereof.
In this way, since the value 41 of the scale 12c of each gauge 10B is displayed on the mount 40, a plurality of different gauges 1
The gauge 10B having a scale of a desired unit can be easily selected from 0B. Note that such a value 41
The indication of may be directly provided on the support member 30A without providing the mount 40.

In FIG. 7, a gauge 10B is a base material 11
B, gauge pattern forming layer 12B, and reflecting layer 13B
And a peeling layer 18. The base material 11B, the gauge pattern forming layer 12B, and the reflective layer 13B are respectively the base material 11, the gauge pattern forming layer 12, and the reflective layer 1 described above.
The same as 3 can be used. In this embodiment, the base material 11B is formed of polyethylene terephthalate having a thickness of 50 μm. Gauge pattern forming layer 1
2B is an acrylic resin coated to a thickness of 2 to 3 μm. Scale 12c is 1μ on the above resin
This is an embossed diffraction grating with a pitch of m. The reflective layer 13B is formed by depositing titanium dioxide to a thickness of 500 angstrom.

An adhesive layer 17 is coated on the entire surface of the support member 30A. As a material for forming the adhesive layer 17, it is desirable to use a material that remains on the support member 30A (a material that does not remain on the gauge 10B) even if the gauge 10B is peeled from the support member 30A. The adhesive that can be used as the adhesive layer 17 is
Acrylic resin, acrylic ester resin, styrene-butadiene copolymer, natural rubber, casein, gelatin, rosin ester, terpene resin, phenol resin, styrene resin, xylene, aliphatic hydrocarbon, polyvinyl alcohol, polyethylene oxide, poly Examples thereof include methylene oxide, polyethylene sulfonic acid, vinyl chloride vinyl acetate copolymer, and the like. Further, in order to appropriately adjust the adhesive strength and tack, calcium carbonate, talc, china clay, kaolin, micro silica, TiO ₂ Inorganic fine powders such as glass flakes, asbestos, wax powder, silica powder, barium sulfate, schelben, and chamotte may be added. In this embodiment, the adhesive layer 17 is made of acrylic resin mixed with microsilica of 15 μm.
It is coated to a moderate thickness.

The peeling layer 18 supports the gauge 10B on the supporting member 3
When peeled off from 0A, the peeling layer 18 or the peeling layer 18
Gauge 10B by peeling at the interface between
(1) a mixture of polymethylmethacrylate and another thermoplastic resin such as vinyl chloride / vinyl acetate copolymer, nitrocellulose resin, and polyethylene wax, or (2) acetic acid. It can be formed from a mixture of a cellulose resin and a thermosetting acrylic resin, a melamine resin, or the like. In the present embodiment, the release layer 18 is a mixture of polymethyl methacrylate and nitrocellulose resin.

The support member 30A need only be transparent so that it can be laminated on the mount 40, and a synthetic resin sheet such as polyethylene terephthalate can be used.
In this embodiment, the supporting member 30A is made of polyethylene terephthalate having a thickness of 50 μm, and the side on which the adhesive layer 17 is not formed is matted to prevent static electricity.

FIG. 8 is a schematic enlarged view of the scale 12c of the gauge 10B, showing a case of 100 μm grid.
The scale 12c is composed of a 10 μm wide scale region 123 in which a diffraction grating is formed as a surface uneven pattern and a square smooth surface region 124 having a side of 90 μm. Here, the diffraction grating has a grating pitch of 1 μm.
m, and the lattice direction is the left-right direction with respect to the observer.

Considering the case of observing the first-order diffracted light due to the interference between adjacent gratings, the grating pitch needs to be longer than the wavelength of the diffracted light to be observed. In addition, at least two gratings are required in the width of the scale area 123 to cause light to interfere, and it is preferable that there are five or more gratings from the viewpoint of the intensity of diffracted light. In the case of the grid as shown in FIG. 8, the lattice direction is a direction parallel to the scale or a direction perpendicular to the scale, assuming that the length of the adjacent parallel lattice set is the effective diffracted light intensity. Is desirable. That is, if the observer observes in the state of FIG. 8, it is desirable that the observer observes in the horizontal direction or the vertical direction in the figure.

Further, when the scale regions 123 having a width narrower than the grating pitch are present in a plurality of directions, the middle direction of the plurality of directions is set as the grating direction to secure an effective grating set and diffracted light. The strength of can be secured. That is,
In the case of the grid as shown in FIG. 8, the direction of 45 ° in the drawing may be the lattice direction.

Next, the above-mentioned gauges 10, 10A, 10
A method of using B will be described. FIG. 9 is a diagram showing a first embodiment of the method of using the gauge according to the present invention, and shows a state in which the gauge 10 (FIG. 1) is attached to the loupe 20. Any method may be used to attach the gauge 10 to the loupe 20. In the embodiment, the adhesive layer 14 provided on the surface of the base material 11 opposite to the gauge pattern forming layer 12 is applied to the visual measurement area 20a of the loupe 20. The adhesive layer 14 is made of a transparent or translucent acrylic or rubber adhesive.

FIG. 10 is a plan view showing the scale 12a enlarged by the magnifying glass 20 and the object 50 to be measured.
As shown in FIG. 10, the measuring object 50 has a scale 12a.
However, since the base material 11, the gauge pattern forming layer 12, the reflective layer 13, and the adhesive layer 14 are formed transparent or semitransparent, the measurement object 50 is not shielded. . Therefore, as shown in FIG. 10, the position of the right end portion 50a of the measurement object 50 in the figure is the scale 12a-3.
It can be read that it is located approximately in the center.

The scale 12a is formed in the vicinity of the surface to be closely contacted with the object 50 to be measured. That is, FIG.
In, the measurement surface of the measurement object 50 and the scale 12a are substantially adjacent to each other. Therefore, the distance between the scale 12a and the measuring object 50 is substantially eliminated, and the measured value can be read extremely accurately.

FIG. 11 is a view showing a second embodiment of the method of using a gauge according to the present invention, which is a gauge-equipped seat 50.
And an example of a method of using the gauge 10A (FIGS. 3 and 4). The gauge 10A is peeled off from the support member 30 of the gauged sheet 50, the protective layer 16 thereof is peeled off, and the adhesive layer 15 is applied to the slide glass 61 made of a glass plate or the like. Next, gauge 1
An object 62 is placed on the 0A, and a cover glass 63 is placed on the object 62. By arranging the gauge 10A and the object 62 as described above and observing from above with a microscope 64, the object 62 and the scale 12b of the gauge 10A can be simultaneously enlarged and viewed. Thereby, the predetermined size of the object 62 can be measured.

Further, in this way, the object 62 and the gauge 10A are
When the and are arranged, the object 62 and the scale 12b are arranged on substantially the same plane, so that the distance between the object 62 and the scale 12b in the thickness direction can be substantially eliminated, and the object 62 and the scale 12b can be accurately focused and can be extremely focused. The scale can be read accurately.

FIG. 12 is a diagram showing a third embodiment of the method of using the gauge according to the present invention, showing another embodiment of the method of using the gauge 10A. In FIG. 12, the object 62 is directly placed on the upper surface of the slide glass 61, and the gauge 10A is attached to the lower surface of the slide glass 61. When the gauge 10A is used in this way, the object 62 and the gauge 10A do not come into contact with each other, and therefore the gauge 10A can be reused without being contaminated.

FIG. 13 is a diagram showing a fourth embodiment of the method of using a gauge according to the present invention, which is a gauge seat 50.
8 shows an embodiment of a method of using A and its gauge 10B (FIGS. 6 and 7). The gauge 10B is used as a cover glass of a slide for an optical microscope. Based on the size of the object 62 to be observed or measured, the magnification of the microscope, the content of the measurement, etc., the user can use the gauge-equipped sheet 50A shown in FIG. select. The gauge 10B is separated from the support member 30A, and the object 62
It is placed on the slide glass 61 via. here,
The object 62 is placed so that the side on which the surface unevenness pattern (scale 12c) is formed is the object 62 side.

In this observation and measurement, the gauge 10B was used.
Can be moved after being placed, so that the objective lens 6
While peeking from 4, the scale 12c is placed at the desired position on the object 62.
It is possible to move the gauge 10B so as to be arranged. The objective lens 64 of the microscope is attached to the object 62 from below.
Since both the light 65 that has passed through and the light 66 that has been reflected from the interface of the reflection layer 13B having the surface unevenness pattern from above are incident, the observer can see both the object 62 and the scale 12c of the surface unevenness pattern. You can see the statue. Moreover, since the object 62 and the surface concavo-convex pattern are adjacent to each other, the dimension can be accurately measured without defocusing. Furthermore, if the surface unevenness pattern is a diffraction grating, the scale 12c has a predetermined color component, which makes it very easy to observe and measure. Further, when the scale 12c is seen with the color components of the same system as the object 62, the scale 12c with different color components can be obtained only by changing the position of the microscope and changing the direction of the incident light to the diffraction grating. it can.

FIG. 14 is a diagram showing a case where the object 62 is observed at a high magnification in FIG. Object 62 at high magnification
When observing, the objective lens 64 of the microscope approaches the object 62 without limit. At this time, there is no room for light to be incident from above on the surface uneven pattern of the gauge 10B, and only the light 65 that has transmitted through the object 62 is observed only from below. In this case, the transmitted light is dispersed in each direction at the portion of the scale 12c where the surface uneven pattern is formed, and the transmitted light is not dispersed at the portion where the surface uneven pattern is not formed. Although it is in the form of, the object 62 and the scale 12c
And can be observed at the same time.

Although one embodiment of the present invention has been described above, the present invention is not limited to the above embodiment,
Various modifications are possible without departing from the spirit of the invention. FIG. 15 is a plan view showing another embodiment of the gauge 10A. As shown in FIG. 15, the gauge 10A includes
A grid-like scale like the gauge 10A-1 in (a),
An oblique scale like the gauge 10A-2 in (b),
It is possible to form various kinds of scales such as a scale having an angle like the gauge 10A-3 of (c) (the gauge 1
The same applies to 0 and 10B. ).

The gauges 10, 10A and 10B may be formed in any shape such as a square, a rectangle, a circle or an ellipse. The protective layer 16 of the gauge 10A is provided to protect the scale 12b before use,
It does not necessarily have to be provided.

16 and 17 are views showing the structures of the third and fourth embodiments of the gauged seat, respectively. Figure 1
6 gauge sheet 50B, gauge 10C
The base material 11C and the support member 30B are integrally formed from the same member. Further, a part corresponding to the outer peripheral portion of the gauge 10C of the support member 30B is partially connected to the connecting portion 31.
Slits 32 are formed leaving. The user cuts off the connecting portion 31 to separate the gauge 10C from the support member 30B for use. If formed in this way, there is no need to provide an adhesive layer or the like for supporting the gauge 10C on the support member 30B, and the manufacturing cost can be reduced. In the gauged sheet 50C of FIG. 17, a plurality of slits 33 are formed in the support member 30C ((a) in the figure). The outer edge of the gauge 10D is sandwiched between the slits 33, so that the support member 3
It is supported by 0C ((b) in the figure). If formed in this manner, the gauge 10D can be repeatedly attached to and detached from the support member 30C without providing an adhesive layer or the like.

In addition, as a method of supporting the gauge on the supporting member, there is a method of pseudo-adhering the two, that is, a method of closely adhering the two so that there is no tackiness after peeling. This method is the same method as the secret seal which has been widely used in postcards or the like, or the method in which the amount of the inorganic fine powder added to the adhesive of the adhesive layer 17 described in the examples is increased. In this method, in order to improve the proof stress of the scale of the gauge at the time of peeling, it is desirable to provide a protective layer on the contact surface side of the gauge with the supporting member.

As another method of using the gauges 10 to 10D according to the present invention, for example, if the gauges 10 to 10D are attached to the specimen, the area of the specimen is magnified even when the specimen is magnified and observed. You can know the rough dimensions. In such a usage method, the sample and the scale do not necessarily have to overlap with each other.

[0075]

According to the gauges of claims 1 to 5,
A fine and extremely accurate scale can be formed, and the scale and an object can be visually recognized at the same time. Thereby, the measurement can be performed easily and accurately. According to the second, fourth and fifth aspects, the visibility of the scale can be improved and the ease of measurement can be improved. According to the third aspect, the handleability of the gauge can be improved.

According to the gauged sheet of the sixth to tenth aspects, it is possible to improve the handleability of the gauge and prevent the scale from being damaged. According to claims 7 and 8, storage of the gauge after use is facilitated, and damage and loss can be prevented. According to the ninth aspect, one sheet can be used for observation and measurement by a plurality of people. Also, when using a plurality of gauges, management of the gauges and the like become simple. Furthermore, the productivity of the gauge can be increased and the cost of the gauge can be reduced. According to the tenth aspect, it is possible to select an appropriate gauge from one gauged sheet according to the measurement location, the measurement magnification, and the like.

According to the method of using the gauge described in claims 11 to 13, the object can be measured easily and accurately. According to the twelfth aspect, since the gauge can be freely moved, the efficiency of observation and measurement can be improved. According to the thirteenth aspect, it is possible to obtain a more accurate scale image without defocusing and the like, and it is possible to more accurately measure the object.

According to the method of using the gauge-equipped sheet of the fourteenth and fifteenth aspects, the gauge can be easily handled, so that the workability in observing and measuring an object can be improved. According to the fifteenth aspect, a desired gauge can be selected according to the measurement location of the object and the measurement magnification, and the efficiency of observation and measurement can be improved.

[Brief description of drawings]

FIG. 1 is a diagram showing a first embodiment of a gauge according to the present invention.

FIG. 2 is a plan view showing an enlarged surface concavo-convex pattern of a gauge pattern forming layer 12 of FIG.

FIG. 3 is a view showing a first embodiment of a gauged seat and a second embodiment of a gauge according to the present invention.

FIG. 4 is a diagram showing an AA cross section of FIG.

FIG. 5 is an enlarged plan view showing a scale 12b of the gauge 10A of FIG. 3 (b).

FIG. 6 is a view showing a second embodiment of the gauged seat according to the present invention.

FIG. 7 shows a gauge according to a third embodiment of the present invention.

FIG. 8 is a schematic enlarged view of a scale 12c of the gauge 10B.

FIG. 9 is a diagram showing a first embodiment of a method of using a gauge according to the present invention.

FIG. 10 is a scale 12a enlarged by a magnifying glass 20.
FIG. 3 is a plan view showing a measurement object 50.

FIG. 11 is a diagram showing a second embodiment of a method of using a gauge according to the present invention.

FIG. 12 is a diagram showing a third embodiment of a method of using a gauge according to the present invention.

FIG. 13 is a diagram showing a fourth embodiment of a method of using a gauge according to the present invention.

FIG. 14 is a diagram showing a case where an object 62 is observed at high magnification in FIG.

FIG. 15 is a plan view showing another embodiment of the gauge 10A.

FIG. 16 is a diagram showing a configuration of a gauge-equipped sheet according to a third embodiment.

FIG. 17 is a view showing a fourth example of the gauged sheet.

[Explanation of symbols]

10, 10A, 10B, 10C, 10D gauge 11, 11A, 11B, 11C Base material 12, 12A, 12B Gauge pattern forming layer 12a, 12b, 12c scale 13, 13A, 13B Reflective layer 14 Adhesive layer 15 Adhesive layer 16 Protective layer 17 Adhesive layer 18 Release layer 30, 30A, 30B, 30C Support member

─────────────────────────────────────────────────── ─── Continuation of the front page (72) Katsunori Hori 1-1-1, Ichigaya-Kagacho, Shinjuku-ku, Tokyo Dai Nippon Printing Co., Ltd. No. 1 in Dai Nippon Printing Co., Ltd. (56) Reference JP-A-4-81612 (JP, A) JP-A-63-180453 (JP, A) Actual development Shou 63-126801 (JP, U) Actual publication Sho 33-4119 (JP, Y1) (58) Fields investigated (Int.Cl. ⁷ , DB name) G01B 3/00-3/56 G01B 9/00-9/10 B43L 13/00

Claims (12)

(57) [Claims] 1. A gauge having a gauge pattern forming layer on which a desired scale is formed, wherein the gauge pattern forming layer is transparent or translucent, and the scale has a plurality of scale areas to be scale lines. A gauge characterized in that it is formed by a surface uneven pattern. 2. The gauge according to claim 1, wherein a transparent or semi-transparent material having a refractive index different from a refractive index of the gauge pattern forming layer is formed on a surface of the gauge pattern forming layer on which the scale is formed. A gauge having a transparent reflection layer. 3. The gauge according to claim 1, wherein a transparent or translucent base material is provided on a surface of the gauge pattern forming layer opposite to a surface on which the scale is formed. Gauge characterized by. 4. The gauge according to claim 1, wherein the surface concavo-convex pattern is a diffraction grating. 5. The gauge according to claim 4, wherein a grating direction or a grating pitch of the diffraction gratings forming a predetermined number of scales is different from a grating direction or a grating pitch of a diffraction grating forming another scale. Characteristic gauge. 6. A gauged seat, comprising: the gauge according to claim 1; and a support member that temporarily supports the gauge. 7. The gauge-equipped seat according to claim 6, wherein the gauge is detachably attached to the support member. 8. The gauged sheet according to claim 7, wherein the gauge is peelably supported by the support member via an adhesive layer. 9. The gauge-equipped seat according to claim 6, wherein a plurality of gauges are provided. 10. The gauge-equipped sheet according to claim 9, comprising a plurality of gauges having different types or units of one graduation. 11. A method of using the gauge-equipped sheet according to any one of claims 6 to 10, wherein the gauge is separated from the support member and the gauge is used. How to use the seat. 12. The method of using the gauge-equipped sheet according to claim 11 , wherein a gauge having a desired scale is selected from the plurality of gauges and used. how to use.