JP3426016B2 - Optical stage - Google Patents

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical stage capable of fixing and supporting an optical element on a base by adsorbing the base using a magnet and sliding the optical element. It is about. 2. Description of the Related Art An optical stage generally has a structure as shown in FIG. The optical stage 1 includes a magnet base 2 and a stage 3. The magnet base 2 includes a bottom plate 6 directly in contact with a base 5 made of a magnetic material, a magnet plate 7 in contact with the bottom plate 6 and adsorbed to the base 5 through the bottom plate 6. And a cover plate 8 which covers the magnet plate 7 with the bottom plate 6 interposed therebetween. The stage unit 3 includes a substrate 10 fixedly supported on the cover plate 8 of the magnet base unit 2, a slide plate 11 slidably mounted on the substrate 10, a substrate 10 and a slide plate 11 And a roller guide 12 which guides and supports the sliding of the sliding plate 11. [0005] The cover plate 8 of the magnet base 2 and the substrate 10 of the stage 3 are fixed to each other with screws or the like. However, in the optical stage 1 having the above structure, the magnet base 2 and the stage 3 are formed as separate members, respectively. There is a problem of being bulky. Furthermore, when the position of the optical axis at the position where the optical element is installed is low, there is a problem that the optical stage 1 cannot be used. The present invention has been made in view of the above circumstances, and has as its object to provide an optical stage in which the overall height is kept low and the apparatus is made compact. [0009] In order to solve the above problems, an optical stage according to the present invention comprises a magnet base portion which is attracted to a base made of a magnetic material by an attraction force of a magnet; An optical stage comprising a stage portion slidably supporting the optical element provided in the
A bottom plate in which the magnet base portion is in direct contact with the base; a magnet plate provided in contact with the bottom plate; and a cover between the bottom plate and the bottom plate or between the bottom plate and the base. And a lid plate forming a magnetic path, wherein the stage portion is a substrate supported on the magnet base portion side,
A sliding plate slidably attached to the substrate, wherein the lid plate of the magnet base portion and the substrate of the stage portion are shared by the same member. According to the above construction, since the same member is used for the lid plate and the substrate, the thickness of one of the lid plate and the substrate can be reduced, and the overall height of the optical stage can be reduced. Will be able to An embodiment of an optical stage according to the present invention will be described below with reference to the drawings. FIG. 1 is a perspective view showing the optical stage according to the present embodiment, and FIG. 2 is an exploded perspective view showing the main parts of the optical stage in FIG. 1 in an exploded state. The optical stage 21 of the present embodiment is roughly constituted by a magnet base 22 and a stage 23. The magnet base portion 22 includes a bottom plate 24 made of a magnetic material that is directly in contact with a base (not shown) made of a magnetic material.
And a magnet plate 25 provided in contact with the bottom plate 24;
The magnet plate 25 is covered with a cover plate 26 serving as a substrate of the stage unit 23. As shown in FIG. 2, the bottom plate 24 is formed as an integrated plate having a non-magnetic material 24A at the center and magnetic materials 24B and 24C on both sides. The magnet plate 25 includes a circular support plate portion 30 that supports four magnets 29 and a rotation support plate portion 3 that fits the circular support plate portion 30 and rotatably supports the same.
And 1. The circular support plate portion 30 is provided with four magnet fitting holes 30A at each square vertex position, and each magnet 29 is fitted and supported in each magnet fitting hole 30A. Reference numeral 30B in the figure is a lever for rotating the circular support plate 30. The arrangement of the N pole and the S pole of the four magnets 29 is adjusted, and the bottom plate 2
4, the magnetic bodies 24B and 24C, the cover plate 26, and the base form a closed magnetic path so that the magnet base 22 is attracted to the base. Furthermore, by rotating the circular support plate portion 30, a closed magnetic path is formed by the magnetic bodies 24B and 24C of the bottom plate 24 and the cover plate 26, and the magnet base portion 22 can be removed from the base. . The rotation of the circular support plate portion 30 is performed by a lever 30B, and the optical stage 21 is attached to and detached from the base by being turned ON and OFF by the lever 30B. The rotation support plate portion 31 is entirely formed in a quadrangular shape similar to the bottom plate 24, and has a circular fitting hole 31A for fitting the circular support plate portion 30 therein, and a part thereof. Notched for mounting lever 30B. The lower surface of the cover plate 26 is formed as a flat surface. The lid plate 26 covers the upper side in a state where the circular support plate portion 30 and the rotation support plate portion 31 are combined with each other and placed on the bottom plate 24, and the circular support plate portion 30 and the rotation plate It is rotatably supported in cooperation with the support plate 31. The bottom plate 24, the cover plate 26, and the rotation support plate 31 are fixed to each other by screws (not shown) via the screw holes 26A, 31B, 24D. Furthermore, this lid plate 2
Reference numeral 6 denotes a substrate of the stage unit 23. The stage section 23 is provided on the magnet base section 22, as shown in FIG. 1, and slidably supports an optical element (not shown). The stage portion 23 is mainly composed of a substrate and a sliding plate that slides on the substrate. Here, the lid plate 26 of the magnet base portion 22 is used as a substrate as it is. A sliding plate 33 is slidably supported on the lid plate 26. As shown in FIG. 2, a ridge 34 for guiding the sliding of the sliding plate 33 is formed on the upper side surface of the lid plate 26. A sliding concave groove 35 is formed on the lower surface of the sliding plate 33 so as to cover the protrusion 34. The sliding groove 35 is formed to have a width larger than that of the ridge 34. Cross roller guides 36 and 37 (see FIG. 1) are provided in the space between the sliding groove 33 formed on both sides of the ridge 34 by attaching the sliding plate 33 to the cover plate 26. This cross roller guide 36,
37 has a sliding groove 35 on one side and a sliding groove 35 on the other side.
, And can slide the sliding plate 33 accurately on the X axis. In the sliding plate 33, the sliding groove 3
5 is provided with a spring groove 38 for mounting a spring (not shown) on the side (the right side in FIG. 2). In the spring groove 38, one end of the spring is connected to the lid plate 26, and the other end is connected to the slide plate 33. This spring biases the sliding plate 33 to only one side of the lid plate 26. A screw hole 39 in the cover plate 26 is for connecting one end of this spring. The upper surface of the slide plate 33 is provided with a screw hole 33A for attaching an optical element. Reference numeral 41 in FIG. 1 denotes a fixing screw for fixing the sliding plate 33 to the cover plate 26 at a predetermined position.
Reference numeral 42 denotes a fine adjustment screw (micrometer) for fine adjustment of the position, which moves the sliding plate 33 urged to one side by a spring with respect to the cover plate 26 by a small amount. The optical stage 21 having the above configuration is mounted on a base with the optical element mounted on the slide plate 33 through the screw hole 33A. The lever 30B of the magnet base 22 is turned on to turn it on, and the respective magnetic bodies 24B, 24B are turned on.
A closed magnetic path is formed by C, the cover plate 26, and the base, and the optical stage 21 is suction-fixed to the base. When the optical stage 21 is to be removed from the base, the lever 30B is turned off to turn off each magnetic body 24.
A closed magnetic path is formed by B, 24C and the cover plate 26, and the optical stage 21 is removed from the base. The optical element attached to the slide plate 33 is X
For fine adjustment in the axial direction, the fine adjustment screw 42 is turned. When the adjustment is completed, the sliding plate 3 is fixed by the fixing screw 41.
3 is fixed to the lid plate 26 side. Optical stage 21 configured as described above
Then, since the cover plate 26 of the magnet base part 22 is also used as a substrate of the stage part 23 and the number of parts is reduced,
The overall height of the optical stage 21 can be reduced. Thereby, the optical stage 21 can be made thin and compact, the height does not become an obstacle, and the cost can be reduced. In the above-described embodiment, the slide plate 33 that slides in the X-axis direction is provided as a base for supporting and sliding the optical element. A moving sliding plate may be attached. Thus, a stage that can slide in both the X axis and the Y axis can be configured. Also in this case, since the overall height of the optical stage 21 is lower than that of the conventional product, the height does not become an obstacle even if the Y-axis sliding plate is mounted. As described above, in the optical stage according to the present invention, the same member is used for the cover plate of the magnet base portion and the substrate of the stage portion. The total height of the optical stage can be kept low as well as being reduced. As a result, the cost can be reduced and the whole becomes compact, so that when the optical element is mounted at a predetermined position, its height does not become an obstacle.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view showing an optical stage according to the present invention. FIG. 2 is an exploded perspective view showing a state where main components of the optical stage in FIG. 1 are exploded. FIG. 3 is a front view showing a conventional optical stage. [Description of Signs] 21 ... optical stage, 22 ... magnet base part, 23
... Stage part, 24 bottom plate, 25 magnet plate, 26 lid plate, 33 sliding plate.

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Claims (1)

(57) [Claims 1] A magnet base portion which is attracted to a base made of a magnetic material by the attracting force of a magnet, and a stage provided on the magnet base portion for slidably supporting an optical element. An optical stage comprising: a bottom plate in which the magnet base portion is in direct contact with the base; a magnet plate provided in contact with the bottom plate; and a bottom plate in which the magnet plate is covered with the bottom plate. And a lid plate that forms a magnetic path between the base plate and the base plate, wherein the stage portion is supported on the magnet base portion side, and a slide plate slidably attached to the substrate. An optical stage, wherein the lid member of the magnet base portion and the substrate of the stage portion are shared by the same member.