JP3438825B2 - Wound core, method of manufacturing wound core, high-voltage pulse generator, and laser device - Google Patents

Description

Detailed Description of the Invention

[0001]

The present invention relates to an excimer laser, TEA (Tr
ansversely excited atmospheric) -CO ₂ laser, TEMA (T
ransversely excited multi-atmospheric) -race track winding core used in high voltage pulse generators used in laser devices such as CO ₂ lasers, and high voltage pulse generators and laser devices using the same Is.

[0002]

_2. Description of the Related Art In a transverse discharge excitation gas laser such as an excimer laser, a TEA-CO ₂ laser or a TEMA-CO ₂ laser, in order to obtain a laser with a large diameter and high energy, the interval between the main discharge electrodes and the effective length must be long. At the same time, it is known that it is necessary to introduce a high voltage pulse having a large energy with a pulse width suitable for the type of laser to be oscillated into the laser gas.

In order to realize a highly efficient and highly reliable high voltage pulse generator that generates such high voltage pulses with high repetition, the inductance at saturation is as small as possible.
A saturable reactor or a saturable transformer that has a large ratio of non-saturated inductance to saturated inductance and has low loss is required.

Therefore, as a high voltage pulse generator, E.
Y. Chu, G. Honfmann, H. Kent, T. Bernhart, "Magnet
ic modulator for low-impedance discharge lasers ",
IEEEConf. Record of 15th Power Modulator Symposiu
m, p.32-36 (1982), RSTaylor, KE Leopold, "M
icrosecond duration optical pulses from a UV-preio
nized XeCl laser ", Appl. Phys. Lett. 47 (2), p.81
~ 83 (1985), CHFisher, MJ Kushner, TE DeH
art, JP McDaniel, RA Petr, JJEwing, "High
efficiency XeCl laser with spiker and magnetic is
olation ", Appl. Phys. Lett. 48 (23), p.1574-1576
(1986), S. Watanabe, M. Watanabe, A. Endoh, "High r
epetition long pulse XeCl laser with a coaxial cer
amicpulse-forming line ", Rev. Sci. Instrum. 57 (1
2), p.2970〜2973 (1986), Taylor, KE Leopold, "U
ltralong optical-pulse corona preionized XeCllase
r ", J. Appl. Phys. 65 (1), p.22-29 (1989), Japanese Patent Laid-Open No. 4-111185 or Inoue," Research on high output technology of excimer laser ", Ultra Advanced Machining System Technology Research Association , Proceedings of the 4th Symposium on Ultra-advanced Machining Systems, p.18-21 (1992), use saturable reactor or saturable transformer composed of racetrack-shaped magnetic core as shown in Fig.4. It is known to be effective.

This racetrack-type saturable magnetic core includes Ni--Zn ferrite magnetic core, iron-based or cobalt-based amorphous alloy ribbon and polyethylene terephthalate film (trade name, Mylar film, DuPont) as described in the above-mentioned document. A wound magnetic core formed by simultaneously winding polymer films such as those manufactured by the same company, Lumirror film, manufactured by Toray Co., Ltd. (hereinafter referred to as PET films) is used.

In order to manufacture a racetrack-shaped magnetic core using Ni-Zn ferrite, it is necessary to manufacture a dedicated press shaping die for each magnetic core shape, and moreover, the raw material powder is pressed into the racetrack shape by the above-mentioned die. There is a problem that cracks and chips are apt to occur due to shrinkage stress at the time of sintering after that, and the size that can be manufactured is limited. For this reason the above CHFishe
r, MJ Kushner, TE DeHart, JP McDaniel, R.
A. Petr, JJEwing, "High efficiency XeCl laser
with spiker and magnetic isolation ", Appl. Phys. Le
As described in tt. 48 (23), p.1574 to 1576 (1986), a large number of ferrite blocks are combined to form a racetrack-shaped magnetic core. There is a problem that it is significantly deteriorated compared to the material properties.

On the other hand, when a racetrack-shaped wound magnetic core is formed by simultaneously winding an iron-based or cobalt-based amorphous alloy ribbon and a polymer film, a special press-molding die like a ferrite magnetic core. Is unnecessary and has an advantage that an arbitrary shape can be easily manufactured.

The volume of a general saturable magnetic core is, for example, Nakashima,
Kagawa, Hirao, Watanabe, "Evaluation of dynamic characteristics of magnetic switch magnetic core using iron-based ultrafine crystalline alloy", Material of Plasma Research Society of the Institute of Electrical Engineers of Japan, EP-91-13, p.1-10 (1991), etc. As described above, it is determined from the dynamic characteristics of the magnetic core. That is, the average magnetic path length of the magnetic core is proportional to the relative permeability (μ _rs ) in the saturated region of the magnetic core,
It is inversely proportional to the effective maximum operating magnetic flux density amount (K · ΔBm) which is the product of the space factor (K) of the magnetic core and the maximum operating magnetic flux density amount (ΔBm). On the other hand, since the cross-sectional area of the magnetic core is inversely proportional to the effective maximum operating magnetic flux density (K · ΔBm) of the magnetic core, the magnetic core volume is proportional to the relative permeability (μ _rs ) in the saturation region of the magnetic core, and the effective maximum operating magnetic flux density is It is inversely proportional to the square of (K · ΔBm).

However, in the case of a racetrack-shaped saturable magnetic core used in a transverse discharge pumped gas laser or the like, the average magnetic path length of the saturable reactor constructed by using the same magnetic core is set to be as small as possible after saturation. Since the choice must be made according to the effective length of the laser main discharge electrode, the average magnetic path length of the actually used racetrack-shaped magnetic core is much longer than the average magnetic path length of the magnetic core determined from the dynamic characteristics of the magnetic core. Become. As a result, the actual magnetic core volume becomes larger than the magnetic core volume determined from the dynamic characteristics of the magnetic core. Therefore, the effective maximum operating magnetic flux density (K · ΔBm) is large like a wound magnetic core in which an iron-based amorphous alloy ribbon and a polymer film are wound at the same time, and the magnetic core loss Pcg of a gate half cycle per unit volume is large. Large (generally (Pcg) is (K · ΔBm
^{If the} magnetic core has a racetrack shape (proportional to ² ), the magnetic core volume will be larger than the dimension originally determined by the dynamic characteristics of the magnetic core, and the loss will be large. Therefore, in applications where the repetition frequency is high and high efficiency is required, as the racetrack-shaped winding magnetic core, the above-mentioned Japanese Patent Laid-Open No. 4-211185 or Inoue, “Research on high output technology of excimer laser”, Ultra-advanced machining system technology research association, As described in Proceedings of the 4th Symposium on Ultra-advanced Machining System Technology, p.18-21 (1992), a magnetic core is used in which a cobalt-based amorphous alloy ribbon and a polymer film are simultaneously wound.

A racetrack-shaped wound magnetic core formed by using a cobalt-based amorphous alloy ribbon and a polymer film is disclosed in, for example, JP-A-64-65889 and JP-A-2-19.
Those manufactured in the shape of a racetrack by the manufacturing method described in 4504, or JP-A-3-278.
No. 503 or JP-A-4-10603, the cobalt-based amorphous alloy ribbon and the polymer film are simultaneously wound to form a toroidal winding core, and then the winding core is racetracked. Those manufactured by deforming the shape are known.

[0011]

However, a racetrack-shaped wound magnetic core using a cobalt-based amorphous alloy ribbon according to the prior art described in JP-A-64-65889 or JP-A-2-19504, and JP-A-3-
The racetrack-shaped wound magnetic core using the cobalt-based amorphous alloy ribbon described in 278503 or JP-A-4-10603 has the following problems.

The racetrack-shaped wound magnetic core described in JP-A-64-65889, which is formed by simultaneously winding an unheated cobalt-based amorphous alloy ribbon and a polymer film, is manufactured by a melt quenching method. Due to the stress unavoidably applied to the cobalt-based amorphous alloy ribbon and the stress applied when the amorphous magnetic alloy ribbon and the polymer film are simultaneously wound to manufacture a wound magnetic core, When used as a saturable magnetic core for pulse power, there is a problem that its dynamic characteristics are poor. That is, when a racetrack-shaped wound magnetic core formed by simultaneously winding an unheated cobalt-based amorphous alloy ribbon and a polymer film is used as a saturable magnetic core for pulse power, the relative magnetic permeability (μ _rs ) becomes larger than 2 and the gate core loss per unit volume (P)
cg) also becomes extremely large.

In order to solve such a problem, it is conceivable that the unheated cobalt-based amorphous alloy ribbon and the polymer film are simultaneously wound to form a racetrack-shaped wound magnetic core, and then the heat treatment is performed. In order to relieve the stresses applied to the unheated cobalt-based amorphous alloy ribbon due to the above two causes, heat treatment at a relatively high temperature corresponding to the alloy composition below the crystallization temperature is performed. Preferably, heat treatment is generally performed at about 350 ° C. or higher for about several hours. Currently, there is a polyimide film (trade name, Kapton film, manufactured by DuPont, etc., hereinafter referred to as PI film) as a polymer film that does not interfere with heat treatment at about 350 ° C. or higher for several hours, but currently available. The thickness of the PI film obtained is at least 7.5 μm, which is too large compared to the lower limit of 2 μm of the film thickness considered necessary for the saturable magnetic core for pulse power, and the space factor K of the racetrack-shaped wound magnetic core is unnecessary. There is a problem that it lowers.

Therefore, as a polymer film used for a saturable magnetic core for pulse power as described in JP-A-2-194504, a PET film or a polyamide film (trade name, having a thickness of about 2 μm to 6 μm) (trade name,
Aramid film, manufactured by Toray Industries, Inc., etc. are mainly used. However, the practical heat treatment temperature of these films is PET even when the heat treatment time is limited to about 5 hours.
The film is limited to about 180 ° C and the polyamide film is limited to about 250 ° C. Such a heat treatment at a relatively low temperature for about several hours can alleviate the stress applied when the cobalt-based amorphous alloy ribbon and the polymer film are wound at the same time, but the melt quenching method The large stress applied to the alloy ribbon when manufactured in 1) could not be sufficiently relaxed, and the performance as a saturable magnetic core for pulse power was not sufficient.

To solve the above problems, Japanese Patent Laid-Open No. 64-6
No. 5889, the amorphous alloy ribbon in an unheated state is wound into a toroidal shape, heat-treated at about 400 ° C. for several hours, and sufficiently cooled to form an amorphous alloy ribbon by the melt quenching method. After alleviating the stress that was inevitably applied to the amorphous alloy ribbon when it was manufactured, a polymer film was simultaneously wound around the heat-treated amorphous alloy ribbon that was wound around the toroidal winding core. Attempts have been made to construct it as a racetrack-shaped wound magnetic core. However, when the cobalt-based amorphous alloy ribbon is heat-treated at about 400 ° C., the embrittlement significantly progresses even if the heat-treatment time is as short as about 1 hour. At the same time, it becomes extremely difficult to form a racetrack-shaped wound magnetic core having a high space factor (K) by winding at the same time.

For example, the thickness t is 20 μm and the width is 25.4.
mm Cobalt-based amorphous alloy ribbon and 4 μm thick PET
In order to obtain a wound magnetic core having a space factor (K) of about 65% or more by simultaneously winding the film, it is necessary to wind the cobalt-based amorphous alloy ribbon while applying a tension of about 0.2N or more. You will need it. However, the cobalt-based amorphous alloy ribbon, which has been heat-treated at about 400 ° C. for about 1 hour, is 0.2N.
When the polymer film is wound at the same time as a high tension, the stress is particularly concentrated, and the stress is particularly concentrated. The band is frequently broken, which makes it extremely difficult to form a racetrack-shaped wound magnetic core.
A wound magnetic core formed by frequently breaking the magnetic alloy thin ribbon forming the racetrack-shaped wound magnetic core has a reduced space factor (K) and an unsaturated region when used as a saturable magnetic core for pulse power. However, there is a problem that the relative permeability (μ _ru ) of is decreased and the relative permeability (μ _rs ) of the saturated region is increased.

In order to prevent breakage of the heat-treated cobalt-based amorphous alloy ribbon, the tension applied to the alloy ribbon may be lowered, but in that case, the space factor (K) is remarkably low. There was a problem that caused it.

Further, in the racetrack-shaped wound magnetic core described above, stress concentrates in the broken line in FIG. 4, but on the other hand, sufficient tension is not applied within the dashed-dotted line in FIG. 4, and the portion indicated by the dashed-dotted line is wound. There is also a problem that the space factor (K) is reduced by bulging from the core 5 side toward the outside, and it is difficult to form the target magnetic core shape.

In order to solve such a problem, for example, as described in Japanese Patent Application Laid-Open No. 3-78215, a winding magnetic core is formed by defining the ratio of the major axis to the minor axis of the racetrack-shaped magnetic core, or the structure shown in FIG. There is a method in which the portion shown in the alternate long and short dash line of the racetrack-shaped wound magnetic core is changed from a straight line to an elliptic arch. However, this method has a problem that the average magnetic path length becomes unnecessarily long as compared with the effective length of the laser main discharge electrode because the minor axis of the racetrack-shaped winding magnetic core becomes large.

On the other hand, a cobalt-based amorphous alloy ribbon described in JP-A-3-278503 or JP-A-4-10603 and a polymer film are simultaneously wound to form a toroidal wound magnetic core into a racetrack shape after being manufactured. In the case of a racetrack-shaped winding magnetic core formed by deformation and heat treatment, the problems associated with directly manufacturing the racetrack-shaped winding magnetic core can be solved, but like the winding magnetic core described in JP-A-2-194504, When an amorphous alloy ribbon was manufactured by the melt quenching method, there was a problem that the stress unavoidably applied to the amorphous alloy ribbon could not be sufficiently relaxed. Therefore, the present invention solves the problem of reliability due to the safe operation and life of the switch element for limiting the repetition frequency, limiting the continuous operation time or generating the pulse, which were problems when the laser device was operated at high repetition rates. The problem is to solve it.

[0021]

According to the present invention, a cobalt-based amorphous alloy ribbon is heat-treated after being heat-treated within a range capable of maintaining the flexibility of winding even if the embrittlement progresses. In this method, a cobalt-based amorphous alloy ribbon is wound on the surface thereof with an electrically insulating material interposed and then heat-treated again . That is, a cobalt-based amorphous alloy ribbon that has been heat-treated within a range that can maintain the flexibility that can be wound as a magnetic ribbon that constitutes a racetrack-shaped wound magnetic core is used, and the surface of the alloy ribbon is electrically insulated. The wound magnetic core formed by interposing a material intervening material can alleviate the stress unavoidably applied when manufacturing the amorphous alloy ribbon by the melt quenching method to a practically sufficient level, and the space factor Since the fracture of the amorphous alloy ribbon can be prevented even if the tension required to increase (K) is applied, the space factor (K) is high and the maximum when operating as a pulse power magnetic core. Amount of operating magnetic flux density (ΔBm)
Is large and the relative permeability (μ _rs ) in the saturation region is small, the magnetic core can be downsized, and the magnetic core loss per unit volume can be reduced.

The heat-treated cobalt-based amorphous alloy
It is constructed by winding an electrical insulating material on the surface of the gold ribbon.
By re-heat treating the racetrack-shaped wound core
The heat-treated amorphous alloy to form a wound magnetic core.
Stresses applied to the amorphous alloy ribbon when the ribbon is wound.
Since it can also be relaxed,
Better in terms of downsizing and loss reduction of the magnetic core
Excellent performance can be obtained.

Further, according to the present invention, in the above wound magnetic core of the present invention, the heat-treated cobalt-based amorphous alloy ribbon forming the wound magnetic core is wound in a direction opposite to the winding direction in the heat-treated state to form a racetrack shape. The characteristics of the pulse power magnetic core forming the winding magnetic core are the same as those of the winding direction of the heat-treated amorphous alloy ribbon forming the winding magnetic core, which is conventionally used, when the amorphous alloy ribbon is heat-treated. The space factor (K) can be easily improved by reducing the number of times of re-winding the heat-treated amorphous alloy ribbon, as compared with the case where the winding direction is the same. We have found that (K · ΔBm) can be improved and loss can be reduced at the same time.

[0024]

Further, the cobalt-based amorphous alloy ribbon is wound into a racetrack shape and then heat-treated while the linear portion is mechanically restrained, whereby the bulging of the linear portion can be prevented. The high-voltage pulse generator configured by using the racetrack-shaped winding magnetic core according to the present invention is capable of cooling the winding magnetic core with a cooling device having a small size and small power consumption, and thus is excellent in reliability during high repetition continuous operation, The efficiency of the entire system is also high. The laser device configured by using the racetrack-shaped wound magnetic core according to the present invention is highly efficient and highly reliable, and can be continuously operated in a high repetition frequency region which has been difficult in the past.

[0026]

EXAMPLES Examples of the present invention will be described in detail below, but the present invention is not limited to these examples. (Example 1) Composition Co ₆₈ Fe produced by melt quenching method
₄ Si ₁₅ B ₁₃ , saturation magnetostriction constant + 0.2 × 10 ⁻⁷ , Curie temperature 220 ° C., width 25.4 mm, thickness 20 μm amorphous alloy ribbon wound, toroidal shape with outer diameter 400 mm, inner diameter 200 mm The wound magnetic core 1 is constituted, and the toroidal wound magnetic core 1 is heated in a nitrogen atmosphere to a predetermined first step heat treatment temperature for 2 hours while applying a direct current magnetic field of 800 A / m in the magnetic path direction. After 2 hours heat treatment at the heat treatment temperature of 1
The temperature is lowered to 80 ° C. in 2 hours, the temperature is kept at 180 ° C. for 4 hours, and then a two-stage heat treatment is performed to gradually cool to room temperature. Next, the heat-treated toroidal winding core 1 was rewound as shown in FIG. 1 to newly form a racetrack winding core as shown in FIG. The heat-treated toroidal wound magnetic core 1
The amorphous alloy ribbon 3 constituting the above is unwound, and a tension of 0.3 N is applied to the amorphous alloy ribbon 3 and the PET having a width of 27 mm and a thickness of 4 μm. The film 4 has an outer long diameter dox 500 mm, an inner long diameter dix 480 mm, an outer short diameter dom 30 mm, an inner short diameter dim 10 mm, and a height 25.4 mm.
It is wound around the core 5 made of SUS304 until the outer long diameter Dox 600 mm and the outer short diameter Dom 130 mm, and the outermost circumference is made of SUS304 thin strips having a width of 25.4 mm and a thickness of 0.1 mm so that both ends overlap each other by 20 mm. It is wound around once, and the overlapping portion of this SUS304 ribbon is spot-welded to form.

The heat treatment temperature of the first step is set from 200 ° C. to 350
Table 1 shows the results of constructing the racetrack-shaped wound magnetic core as described above by using the amorphous alloy ribbon 3 having the above-mentioned composition which was heat-treated while being changed in the range up to ° C. It should be noted that in Table 1, the maximum strain ε _f at the time of breakage is obtained by bending the heat-treated amorphous alloy ribbon 3 used to construct the magnetic core and sandwiching it between two parallel plates. The minimum parallel plate distance that does not cause damage is L, and the thickness of the alloy thin ribbon 3 is t. ε _f = t / (Lt) (1) As can be seen from Table 1, when the heat treatment temperature of the first step, where ε _f is less than 0.05, exceeds 300 ° C, it frequently breaks and races. Abandoned the construction of track-shaped wound cores.

[0028]

[Table 1]

The four racetrack-shaped wound magnetic cores shown in Table 1 were set to a reset magnetizing force of 16 A / m by using the magnetic characteristic measuring circuit at the time of pulse driving shown in FIG. 2, and Nakajima, Kagawa, Hirao, Watanabe,
"Evaluation of dynamic characteristics of magnetic switch magnetic core using iron-based ultrafine crystalline alloy", Institute of Electrical Engineers of Japan Plasma Research Material, EP-91-13,
The half-value width τ _h of the voltage pulse induced between the 1-turn windings provided on the sample at the time of measurement should be 0.1 μs by the method described in detail in p.1-10 (1991). Table 2 shows the results of the measurement. In FIG. 2, 11 is a DC high-voltage power supply, 12 is a charging resistance of a capacitor 15, 13 is a thyratron, 14 is an inductance generated by wiring, 15 is a capacitor, 16 is a winding core to be measured, and a 1-turn winding is applied. Saturable reactor, 17 is a reactor for blocking surge current which tends to flow to the DC power supply 18 when the thyratron 13 is turned on, and 18 is a DC power supply for resetting the saturable reactor 16 composed of the magnetic core to be measured. is there.

[0030] Example Comparative Comparative Example 1 in Table 2 5, using a cobalt-based amorphous alloy ribbon of the same composition as Example 4 from Example 1, the same width and the same thickness, were manufactured by the following method It is a thing. Comparative Example 1 was manufactured in the same manner as in Reference Example except that the amorphous alloy ribbon which was not heat-treated was used instead of the heat-treated amorphous alloy ribbon. In Comparative Example 2, an amorphous alloy ribbon before heat treatment was used as a PI having a width of 27 mm and a thickness of 7.5 μm.
After winding together with the film to form a racetrack-shaped wound magnetic core, a direct current magnetic field of 800 A / m was applied in the magnetic path direction in a nitrogen atmosphere, the temperature was raised to 350 ° C. in 2 hours, then held for 2 hours, and then 180 ° in 2 hours. After the temperature was lowered to 0 ° C., the temperature was maintained for 4 hours, and then gradually cooled to room temperature. In Comparative Example 3, an amorphous alloy ribbon before heat treatment was wound together with a PET film having a width of 27 mm and a thickness of 4 μm to form a racetrack-shaped wound magnetic core.
In a nitrogen atmosphere, a direct current magnetic field of 800 A / m was applied in the magnetic path direction, the temperature was raised to 180 ° C. in 2 hours, then held for 3 hours, and then gradually cooled to room temperature. In Comparative Example 4, the first toroidal-shaped winding magnetic core, which was heat-treated and sufficiently cooled in the same manner as the above-mentioned Reference Example with the first-stage heat treatment temperature set at 350 ° C., was rewound as another toroidal-shaped second winding magnetic core, As in the case of the present invention, this was further wound by applying a weak tension of 0.1 N to the heat-treated amorphous alloy ribbon wound around the second toroidal winding magnetic core while interposing a PET film therebetween. It is a racetrack-shaped wound magnetic core. The number of times of rupture of the amorphous alloy ribbon subjected to the heat treatment when manufacturing the magnetic core reached 21 times. In Comparative Example 5, an amorphous alloy ribbon before heat treatment and a PET film were wound at the same time to produce a toroidal wound magnetic core, which was then transformed into a racetrack shape and a DC magnetic field of 800 A / m in the magnetic path direction in a nitrogen atmosphere. Was added, the temperature was raised to 180 ° C. in 2 hours, the temperature was maintained for 3 hours, and then gradually cooled to room temperature.

[0031]

[Table 2]

As can be seen from Table 2, reference from Reference Example 1
In Example 4, the space factor K is 0.67 or more, and the maximum operating magnetic flux density amount Δ
Bm is the relative magnetic permeability mu _rs of 1.9 times or more 1.09T or more and the saturation region of the effective saturation flux density Bms0.57T also 1.3 or less, it can be seen that excellent as compared with the ratio Comparative Examples.

[0033] Reference from the above-mentioned Reference Example 1 Example 4 and Comparative Example 1
From the above, the racetrack-shaped wound magnetic core of Comparative Example 5 was mounted on the magnetic core of the magnetically assistable saturable reactor 24 of the high-voltage pulse generator for the KrF excimer laser having the circuit configuration of FIG. In FIG. 3, 21 is an input DC high voltage power supply, 22 is a charging resistance of the main capacitor 25, 23 is a thyratron, 24 is a magnetic assist saturable reactor, 2
Reference numeral 5 is a main capacitor, 26 is a reactor for charging the main capacitor 25, 27 is a peaking capacitor, 28 is a gap for ultraviolet light preionization, and 29 is a laser main discharge electrode. In the mounting test, the voltage of the input DC high voltage power source 21 was 30 kV, the capacities of the main capacitor 22 and the peaking capacitor 27 were 50 nF, the effective lengths and intervals of the laser main discharge electrodes were 800 mm and 30 mm, respectively, and the repetition frequency was 100 Hz. The number of turns of the saturable reactor for magnetic assist was 1, and the racetrack-shaped wound magnetic core was forcibly cooled with silicon oil.

[0034] Reference from the above-mentioned Reference Example 1 Example 4 and Comparative Example 1
Table 3 shows a comparison of the energy transfer efficiency η _t , the laser oscillation efficiency η, and the temperature rise ΔT of the magnetic core when the racetrack-shaped wound magnetic core of Comparative Example 5 is mounted on the circuit of FIG.
Here, the energy transfer efficiency η _t is a value obtained by dividing the energy transferred to the peaking capacitor 27 by the stored energy of the main capacitor 25, and the laser oscillation efficiency η is the laser energy stored energy of the main capacitor 25. It is the divided value. When the magnetic core according to the reference example is used, the energy transfer efficiency η _t is 4% as compared with the magnetic core of the comparative example.
As a result, the laser oscillation efficiency η was improved by 1.26 times or more. Further, since the temperature rise of the magnetic core can be reduced by 11 ° C. or more, continuous operation at a higher repetition frequency, which has been difficult in the past, can be performed by using a cooling device with low power consumption.

[0035]

[Table 3]

(Example 2) An amorphous alloy ribbon having the same composition and size as in Example 1 was wound and the outer diameter was 400 mm and the inner diameter was 20.
After constructing a toroidal first wound magnetic core of 0 mm, and heating the wound magnetic core to 250 ° C. for 2 hours while applying a direct current magnetic field of 800 A / m in the magnetic path direction in a nitrogen atmosphere, and holding for a predetermined time Then, heat treatment is performed to gradually cool to room temperature. next,
The heat-treated first wound magnetic core 1 was rewound in the same manner as in Example 1 to newly form a racetrack-shaped wound magnetic core as shown in FIG. The size and structure of the racetrack-shaped wound magnetic core were the same as in Example 1.

The holding time at 250 ° C. is 2 hours, 5 hours, 10 hours, 20 hours, 50 hours, 100 hours, 20 hours.
Table 4 shows the results of forming the racetrack-shaped wound magnetic core as described above using the amorphous alloy ribbon of the above composition which was heat-treated for 0 hours. In Table 4, the maximum strain ε _f at break was defined and measured in the same manner as in Example 1 above. As can be seen from Table 4, the holding time at 250 ° C is 50
When the time was exceeded, the number of fractures increased sharply, and when the time was 100 hours or more, the fractures frequently occurred. Therefore, the race track-shaped wound magnetic core was abandoned.

[0038]

[Table 4]

Using the five racetrack-shaped winding magnetic cores of Table 4 and the comparative examples 1 to 5 with the magnetic characteristic measuring circuit at the time of pulse driving shown in FIG. 2, the reset magnetizing force was set to 16 A / m, and the sample was measured at the time of measurement. Table 5 shows the results of measurement with the half-value width τ _h of the voltage pulse induced between the provided 1-turn windings set to 0.1 μs. As you can see from Table 5
Reference Example 2, Reference from Reference Example 5 Example 8 space factor K is 0.68
As described above, the maximum operating magnetic flux density amount ΔBm is the effective saturation magnetic flux density Bm.
or 1.12T 1.9 times more s0.57T and also relative permeability mu _rs saturation region as small as 1.2 or less, it can be seen that excellent as compared with the ratio Comparative Examples.

The racetrack-shaped winding magnetic cores of Reference Example 2, Reference Example 5 to Reference Example 8 and Comparative Example 1 to Comparative Example 5 can be used for magnetic assist of the high voltage pulse generator for the KrF excimer laser having the circuit configuration of FIG. The characteristics were evaluated by mounting on the magnetic core of the saturated reactor 14. The conditions of the mounting test were the same as those in the first embodiment. Energy transfer efficiency η _t , laser oscillation efficiency η and race track when the racetrack-shaped winding cores of Reference Example 2, Reference Example 5 to Reference Example 8 and Comparative Example 1 to Comparative Example 5 are mounted in the circuit of FIG. Table 6 shows a comparison of the temperature increase ΔT of the shape wound magnetic core. As can be seen from Table 6, the energy transfer efficiency η _{t in} the case of using the racetrack-shaped winding magnetic core of the reference example is 5% or more higher than that in the case of using the racetrack-shaped winding magnetic core of the comparative example, and the laser oscillation efficiency η is 1.37 times improvement. Further, the temperature rise of the magnetic core can be reduced by 13 ° C. or more as compared with the conventional example, and continuous operation at a higher repetition frequency is possible using a cooling device with low power consumption.

[0041]

[Table 5]

[0042]

[Table 6]

(Example 3) The cobalt-based amorphous alloy ribbon used in Example 1 was used to form a toroidal first winding core having an outer diameter of 400 mm and an inner diameter of 200 mm. 250 while applying a DC magnetic field of 800 A / m in the magnetic path direction in the atmosphere
After the temperature is raised to 0 ° C. in 2 hours and the temperature is maintained for 20 hours, heat treatment is performed to gradually cool to room temperature. As shown in FIG. 1, the amorphous alloy ribbon 3 constituting the heat-treated toroidal wound magnetic core 1 is unwound, and the amorphous alloy ribbon 3 and the width 27 mm under the same conditions as in Example 1 are used. , PET film 4 with a thickness of 4 μm
Outer major axis dox 500 mm, inner major axis dix 480 mm, outer minor axis dom 30 mm, inner minor axis dim 10 mm, height 25.4 m
m of SUS304 core 5 with an outer long diameter Dox 600 mm,
It was rolled up until the outer short diameter Dom 130mm. At this time, the heat-treated amorphous alloy ribbon was never broken, the space factor K of the magnetic core was 0.70, and the maximum strain ε _f at the time of fracture of the heat-treated amorphous alloy ribbon was 0.062. Met. As shown in FIG. 6, this racetrack-shaped wound magnetic core is clamped by a pressing plate 6 made of SUS304, and both ends of the pressing plate are tightened with bolts 7 to press down the bulge of the straight portion of the racetrack-shaped magnetic core, and further in the atmosphere. 800A in the magnetic path direction
The temperature was raised to 150 ° C. in 2 hours while maintaining a direct current magnetic field of / m, held for 10 hours, and then gradually cooled to room temperature. afterwards,
The pressing plate 6 is removed, and the outermost circumference is 25.4 m wide.
A SUS304 thin strip having a thickness of 0.1 mm and a thickness of 0.1 mm is wound once with both ends overlapping each other by 20 mm.
The overlapping portion of the 04 ribbon was spot-welded to form the racetrack-shaped wound magnetic core of the present invention 1 .

Reference Example 7 of Example 2 having the same structure except for the racetrack-shaped wound magnetic core of the present invention 1 and the final heat treatment.
Table 7 shows the comparison of the dynamic characteristic during the short pulse drive of racetrack winding core and racetrack winding magnetic core of Comparative Example 5 Comparative Example 1. As can be seen from Table 7, in the racetrack-shaped winding core of the present invention 1 according to the present embodiment, the effective operating magnetic flux density amount K · ΔBm increases as compared with the racetrack-shaped winding core of Reference Example 7 in the second embodiment. The magnetic core loss Pcg of the gate half cycle per unit volume is also reduced. The dynamic characteristics of the wound magnetic core are improved by the heat treatment after the formation of the racetrack-shaped wound magnetic core when the heat-treated amorphous alloy ribbon is added to the heat-treated amorphous alloy ribbon when the magnetic core is manufactured by winding the heat-treated amorphous alloy ribbon. This is because the applied stress is relieved and unnecessary bulging of the one-dot chain line portion in FIG. 4 is suppressed by using the pressing plate 6 shown in FIG. The heat treatment after the formation of the racetrack-shaped wound magnetic core must be performed for an appropriate time within the range not exceeding the upper limit of the heat treatment temperature determined by the restriction of the heat resistant temperature of the insulating material used for the interlayer insulation as in this example. It goes without saying that this should not be the case.

[0045]

[Table 7]

The racetrack-shaped wound magnetic core of this embodiment was mounted on the magnetic core of the magnetically assistable saturable reactor 14 of the high voltage pulse generator for the KrF excimer laser having the circuit configuration shown in FIG. 3 under the same conditions as in the second embodiment. The characteristics were evaluated. Energy-transfer efficiency η _t when the racetrack-shaped winding magnetic core of the present embodiment, the racetrack-shaped winding magnetic core of Reference Example 7 of the second embodiment and the magnetic cores of Comparative Examples 5 to 8 are mounted in the circuit of FIG. Table 8 shows a comparison between the laser oscillation efficiency η and the temperature rise ΔT of the winding magnetic core. As can be seen from Table 8, the energy transfer efficiency η _{t in} the case of using the racetrack-shaped winding magnetic core according to the present invention is 6% or more higher than that in the case of using the racetrack-shaped winding magnetic core of the comparative example, and the laser oscillation efficiency η is Improves 1.42 times. Further, the temperature rise of the magnetic core can be reduced by 15 ° C. or more as compared with the comparative example.
Continuous operation at a higher repetition frequency is also possible using a cooling device that consumes less power than in the above case. In addition, after the heat treatment of the cobalt-based amorphous alloy ribbon described in this example is wound to form a racetrack-shaped winding core, the racetrack-shaped winding core is heat-treated again to improve the magnetic characteristics. It is also effective when a cobalt-based amorphous alloy having a composition other than that of this embodiment is used.

[0047]

[Table 8]

[0048]

As described above, according to the present invention, an excimer laser, a TEA-CO ₂ laser, a TEMA-CO ₂
Reliable due to safe operation and life of switching element for limiting repetition frequency, continuous operation time or pulse, which was a problem when operating laser equipment such as laser and copper vapor laser at high repetition rate. You can deal with sexual problems.

[Brief description of drawings]

FIG. 1 is a conceptual diagram for explaining a method of manufacturing a racetrack-shaped wound magnetic core according to an embodiment of the present invention.

FIG. 2 is a conceptual diagram of a circuit configuration for measuring dynamic characteristics of a racetrack-shaped wound magnetic core when driven by a high voltage pulse.

FIG. 3 is a conceptual diagram of a circuit configuration of an excimer laser main circuit using a magnetic assist circuit.

FIG. 4 is a configuration diagram of a racetrack-shaped wound magnetic core.

FIG. 5 is a configuration diagram of a racetrack-shaped wound magnetic core.

FIG. 6 is an explanatory diagram of a reheat treatment method after the winding core is configured during the method of manufacturing the racetrack-shaped winding core according to the embodiment of the present invention.

[Explanation of symbols]

1 winding core, 2 racetrack shape winding core, 3 amorphous alloy ribbon, 4 PET film 5 winding core

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Claims (5)

(57) [Claims] 1. A cobalt-based amorphous alloy ribbon which has been heat-treated after being heat-treated within a range capable of maintaining the flexibility of winding even if the embrittlement progresses. The surface of the product is wound with an electrically insulating material interposed and then heat treated again.
A method of manufacturing a racetrack-shaped wound magnetic core, comprising: 2. A method for producing a race track shape wound core according to claim 1 wherein the heat treated cobalt-based amorphous alloy ribbon constituting the winding core is rotating around the direction opposite to the winding direction in a state of being heat-treated . 3. A cobalt-based amorphous alloy ribbon which has been heat-treated after being heat-treated within a range capable of maintaining the flexibility of winding even if the embrittlement progresses. A method for producing a racetrack-shaped wound magnetic core, comprising: winding a racetrack shape with an electrically insulating material interposed on the surface of the core and heat-treating the wire while mechanically restraining the straight portion. 4. A high-voltage pulse generator comprising the racetrack-shaped wound magnetic core according to any one of claims 1 to 3 . 5. A laser device comprising the racetrack-shaped wound magnetic core according to any one of claims 1 to 3 .