JP3440526B2 - Classifier - Google Patents
ClassifierInfo
- Publication number
- JP3440526B2 JP3440526B2 JP00613894A JP613894A JP3440526B2 JP 3440526 B2 JP3440526 B2 JP 3440526B2 JP 00613894 A JP00613894 A JP 00613894A JP 613894 A JP613894 A JP 613894A JP 3440526 B2 JP3440526 B2 JP 3440526B2
- Authority
- JP
- Japan
- Prior art keywords
- solid
- gas
- particle recovery
- particles
- supersonic flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Landscapes
- Combined Means For Separation Of Solids (AREA)
Description
【0001】[0001]
【産業上の利用分野】本発明は、固体粒子を分級する分
級装置に関し、特に、分級効率の向上対策に係るもので
ある。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a classifier for classifying solid particles, and more particularly to a measure for improving classifying efficiency.
【0002】[0002]
【従来の技術】従来より、この種の分級装置には、特開
平5−115848号公報に開示されているものがあ
り、図10に示すように、分級室(a1)に超音速流発生手
段(b1)が連設されると共に、該分級室(a1)に粒子回
収手段(c1)が収納されて構成されているものがある。2. Description of the Related Art Conventionally, there is a classifying device of this type disclosed in Japanese Patent Application Laid-Open No. 5-115848. As shown in FIG. 10, a supersonic flow generating means is provided in a classifying chamber (a1). (B1) is connected in series, and the particle collecting means (c1) is housed in the classification chamber (a1).
【0003】該超音速流発生手段(b1)は、微粒子の固
体粒子と搬送ガスとの固気混合ガスGを超音速流で流出
口(b2)より分級室(a1)に噴出させる一方、上記粒子
回収手段(c1)は、一対の平行平板である区画壁(c2,
c2)を備え、区画壁(c2,c2)の間が粗粒子回収通路
(a2)に、区画壁(c2,c2)の両外側が細粒子回収通路
(a3,a3)に形成している。The supersonic flow generating means (b1) jets a solid gas mixture gas G of fine solid particles and carrier gas from the outlet (b2) to the classification chamber (a1) while supersonic flow is generated. The particle collecting means (c1) is a partition wall (c2, which is a pair of parallel flat plates).
c2), and between the partition walls (c2, c2) is formed in the coarse particle recovery passageway (a2), and both outer sides of the partition walls (c2, c2) are formed in the fine particle recovery passageways (a3, a3).
【0004】そして、上記超音速流発生手段(b1)から
固気混合ガスGは、粗粒子回収通路(a2)に向かって超
音速流で分級室(a1)に流入する。その際、上記粗粒子
回収通路(a2)の一端(図示しないが、図10の下端)が
閉塞されているので、他端の流入口(a4)に向って流れ
る固気混合ガスGに対して粗粒子回収通路(a2)が障害
物となる。この結果、上記粗粒子回収通路(a2)の流入
口(a4)の近傍における固気混合ガスGの超音速流場で
定在衝撃波Sが発生する。From the supersonic flow generating means (b1), the solid gas mixture gas G flows into the classification chamber (a1) in a supersonic flow toward the coarse particle recovery passageway (a2). At that time, since one end of the coarse particle recovery passage (a2) (not shown, the lower end of FIG. 10) is closed, the solid-gas mixture gas G flowing toward the inlet (a4) at the other end is closed. The coarse particle recovery passageway (a2) becomes an obstacle. As a result, the standing shock wave S is generated in the supersonic flow field of the solid-gas mixture gas G in the vicinity of the inflow port (a4) of the coarse particle recovery passageway (a2).
【0005】この定在衝撃波Sの波面前後において、上
記固気混合ガスGの流速と流れ方向とが急激に変更する
ことになる(図10F1参照)。そして、上記固気混合ガス
Gにおける固体粒子のうち細粒子Pfは、固気混合ガスG
の流れに伴って細粒子回収通路(a3)に流れ(図10F2参
照)、粗粒子Prはそのまゝ直進し(図10F3参照)、粗粒
子回収通路(a2)に流れて上記固体粒子が粗粒子Prと細
粒子Pfとに分級されることになる。Before and after the wavefront of the standing shock wave S, the flow velocity and the flow direction of the solid-gas mixture gas G suddenly change (see FIG. 10F1). The fine particles Pf among the solid particles in the solid gas mixture gas G are the solid gas mixture gas G.
Flow into the fine particle recovery passageway (a3) (see FIG. 10F2), the coarse particles Pr continue to go straight (see FIG. 10F3), and flow into the coarse particle recovery passageway (a2) where the solid particles become coarse. The particles will be classified into particles Pr and fine particles Pf.
【0006】[0006]
【発明が解決しようとする課題】上述した分級装置にお
いて、従来、区画壁(c2,c2)の上端である流入口端
は、単に区画壁(c2,c2)の切断面で構成されて、超音
速流の固気混合ガスGの流れを妨げる面積が区画壁(c
2,c2)の厚さ分のみであった。In the above-mentioned classification device, conventionally, the inlet end, which is the upper end of the partition wall (c2, c2), is simply constituted by the cut surface of the partition wall (c2, c2), The area that impedes the flow of the sonic-flow solid-gas mixture gas G is
The thickness was 2, c2) only.
【0007】この結果、上記固気混合ガスGの流れは、
図10F4に示すように、粗粒子回収通路(a2)の流入口
(a4)において湾曲し、逆流が生じ、細粒子Pf等が区画
壁(c2,c2)の流入口端近傍に当って付着し(図10F5参
照)、粒子の堆積部(c3)が生じて粗粒子Pr及び細粒子
Pfが回収されず、分級効率が低いという問題があった。As a result, the flow of the solid-gas mixture gas G is
As shown in FIG. 10F4, the coarse particle recovery passageway (a2) is curved at the inlet (a4) and a backflow occurs, and the fine particles Pf and the like hit the vicinity of the inlet ends of the partition walls (c2, c2) and adhere. (Refer to Fig. 10F5), coarse particles Pr and fine particles due to the accumulation of particles (c3)
There was a problem that Pf was not collected and the classification efficiency was low.
【0008】また、上記超音速流の固気混合ガスGの流
れを妨げる面積が区画壁(c2,c2)の厚さ分のみで小さ
く、定在衝撃波Sが円弧状になり、流れの方向変化が不
十分で、粗粒子Prが搬送ガスに伴って流れ、該粗粒子Pr
の回収効率、つまり、分級効率が低いという問題があっ
た。Further, the area that obstructs the flow of the solid gas mixture gas G of the supersonic flow is small only by the thickness of the partition walls (c2, c2), the standing shock wave S becomes an arc shape, and the flow direction changes. Is insufficient, the coarse particles Pr flow along with the carrier gas,
There was a problem that the collection efficiency of, that is, the classification efficiency was low.
【0009】更に、上記超音速流発生手段(b1)は、固
気混合ガスGを分級室(a1)に噴出させているのである
ことから、流れの中心部を流れる細粒子Pfが左右の何れ
にも変化せずにそのまゝ粗粒子回収通路(a2)に流れ
(図10F6参照)、分級されないという問題があった。Further, since the supersonic flow generating means (b1) jets the solid-gas mixture gas G into the classification chamber (a1), the fine particles Pf flowing in the center of the flow are either left or right. However, there was a problem that the particles did not change and flowed to the coarse particle recovery passageway (a2) (see Fig. 10F6), and the particles were not classified.
【0010】本発明は、斯かる点に鑑みてなされたもの
で、区画壁の流入口端における粒子の付着を防止すると
共に、搬送ガスが充分な方向変化を生じさせるようにし
て分級効率の向上を図る一方、他の発明は、固気混合ガ
スの流れの中心部を粒子が流れないようにして分級効率
の向上を図ることを目的とするものである。The present invention has been made in view of the above point, and prevents the particles from adhering to the inlet end of the partition wall, and improves the classification efficiency by causing the carrier gas to change its direction sufficiently. On the other hand, another object of the present invention is to improve the classification efficiency by preventing particles from flowing through the central portion of the flow of the solid-gas mixture gas.
【0011】[0011]
【課題を解決するための手段】上記の目的を達成するた
めに、1の発明が講じた手段は、区画壁における固気混
合ガスの流れを妨げる障害面積を大きくする一方、他の
発明が講じた手段は、固気混合ガスの流れの中心部にお
ける粒子密度を小さくするようにしたものである。[Means for Solving the Problems] In order to achieve the above-mentioned object, the means taken by the invention of 1 increases the obstacle area which obstructs the flow of the solid-gas mixture gas in the partition wall, while the invention of another invention is devised. The means is to reduce the particle density in the central portion of the solid-gas mixture gas flow.
【0012】具体的に、図1に示すように、請求項1に
係る発明が講じた手段は、先ず、固体粒子が搬送ガスに
混入してなる固気混合ガスGを超音速流で流出口(35)
より噴出させる超音速流発生手段(3)が設けられてい
る。そして、該超音速流発生手段(3)の流出口(35)
に連続して固気混合ガスGが超音速流で流入する分級室
(2)が設けられている。更に、該分級室(2)の内部に
粗粒子回収通路(21)と細粒子回収通路(22)とを区画
形成し且つ該粗粒子回収通路(21)の流入口(23)が超
音速流発生手段(3)の流出口(35)に対して所定間隔
を存して対面するように区画壁(41,41)が設けられる
と共に、上記分級室(2)の内部における粗粒子回収通
路(21)の流入口(23)の近傍の固気混合ガスGの超音
速流場に定在衝撃波Sを発生させるようにして上記固気
混合ガスG中の固体粒子を粗粒子Prと細粒子Pfとに分級
する粒子回収手段(4)が設けられている。Specifically, as shown in FIG. 1, in the means taken by the invention according to claim 1, first, a solid-gas mixture gas G in which solid particles are mixed in a carrier gas is discharged at a supersonic flow rate. (35)
A supersonic flow generating means (3) for further ejecting is provided. And the outlet (35) of the supersonic flow generating means (3)
Is provided with a classification chamber (2) into which the solid-gas mixture gas G flows in supersonic flow. Further, a coarse particle recovery passageway (21) and a fine particle recovery passageway (22) are defined in the inside of the classification chamber (2), and the inflow port (23) of the coarse particle recovery passageway (21) is a supersonic flow. The partition walls (41, 41) are provided so as to face the outlet (35) of the generating means (3) at a predetermined interval, and the coarse particle recovery passage inside the classification chamber (2) is provided.
The solid particles in the solid-gas mixture gas G are separated into coarse particles Pr so as to generate a standing shock wave S in the supersonic flow field of the solid-gas mixture gas G in the vicinity of the inlet (23) of the passage (21). Particle recovery means (4) for classifying into particles Pf is provided.
【0013】加えて、上記粒子回収手段(4)の区画壁
(41,41)の流入口端には、粗粒子回収通路(21)の中
心側に突出し且つ上記超音速流発生手段(3)の流出口
(35)に対向する面が平坦面(43)に形成された鍔部
(42)が形成された構成としている。In addition, at the inlet end of the partition wall (41, 41) of the particle collecting means (4), the supersonic flow generating means (3) is projected toward the center of the coarse particle collecting passageway (21). The surface facing the outflow port (35) is formed with a flange (42) having a flat surface (43).
【0014】また、請求項2に係る発明が講じた手段
は、上記請求項1の発明において、鍔部(42)の内面
(44)は、鍔部(42)の先端から区画壁(41,41)の内
面に滑らかに連続するように形成された構成としてい
る。Further, the means taken by the invention according to claim 2 is that in the invention according to claim 1, the inner surface (44) of the collar part (42) extends from the tip of the collar part (42) to the partition wall (41, The inner surface of 41) is formed so as to continue smoothly.
【0015】また、請求項3に係る発明が講じた手段
は、上記請求項1又は2の発明において、鍔部(42)の
先端間の流入口(23)は、超音速流発生手段(3)の流
出口(35)より大きく形成された構成としている。Further, the means taken by the invention according to claim 3 is that in the invention according to claim 1 or 2, the inlet (23) between the tips of the collar part (42) has a supersonic flow generating means (3). ) Is larger than the outlet (35).
【0016】また、請求項4に係る発明が講じた手段
は、上記請求項1乃至3の何れか1の発明において、超
音速流発生手段(3)は、流出口(35)の同心上に位置
して補助ガスを流出口(35)の中心部に向かって固気混
合ガスGに導入する補助導入路(3a)を備えた構成とし
ている。Further, the means taken by the invention according to claim 4 is that in the invention according to any one of claims 1 to 3, the supersonic flow generating means (3) is concentric with the outlet (35). The auxiliary gas is arranged so as to have an auxiliary introduction path (3a) for introducing the auxiliary gas into the solid-gas mixture gas G toward the center of the outflow port (35).
【0017】また、請求項5に係る発明が講じた手段
は、上記請求項1乃至4の何れか1の発明において、区
画壁(41,41)は、平行に配置された一対の平板で構成
されている。Further, the means of implementing the invention according to claim 5 is the invention according to any one of claims 1 to 4, wherein the partition walls (41, 41) are composed of a pair of flat plates arranged in parallel. Has been done.
【0018】[0018]
【作用】上記の構成により、請求項1及び5に係る発明
では、先ず、超音速流発生手段(3)が超微粒子等の固
体粒子を空気等の搬送ガスに混入した固気混合ガスGを
分級室(2)に供給する一方、該分級室(2)の内部が低
圧に設定されているので、上記固気混合ガスGの搬送ガ
スが超音速に加速されて分級室(2)に噴出され、固体
粒子も搬送ガスに伴って超音速になって分級室(2)に
噴出される。With the above-mentioned structure, in the inventions according to claims 1 and 5, first, the supersonic flow generating means (3) produces a solid-gas mixture gas G in which solid particles such as ultrafine particles are mixed in a carrier gas such as air. While supplying to the classification chamber (2), the inside of the classification chamber (2) is set to a low pressure, so that the carrier gas of the solid gas mixture gas G is accelerated to supersonic velocity and jetted into the classification chamber (2). Then, the solid particles also become supersonic with the carrier gas and are jetted into the classification chamber (2).
【0019】その後、上記超音速流の固気混合ガスG
は、分級室(2)において、超音速流発生手段(3)の流
出口(35)から粗粒子回収通路(21)の流入口(23)に
向かって流れることになる。その際、上記粗粒子回収通
路(21)及び鍔部(42)の平坦面(43)が固気混合ガス
Gの流れの障害物となり、流入口(23)の近傍において
定在衝撃波Sが発生することになる。Thereafter, the above-mentioned supersonic flow solid gas mixture gas G
Will flow from the outlet (35) of the supersonic flow generator (3) to the inlet (23) of the coarse particle recovery passageway (21) in the classification chamber (2). At that time, the coarse particle recovery passageway (21) and the flat surface (43) of the collar portion (42) become an obstacle to the flow of the solid-gas mixture gas G, and a standing shock wave S is generated in the vicinity of the inlet (23). Will be done.
【0020】この定在衝撃波Sによって固気混合ガスG
の搬送ガスの流れは急旋回し、固体粒子のうち細粒子Pf
は慣性力が小さいので、上記搬送ガスに追随して流れ方
向が変化し、区画壁(41,41)の外側の細粒子回収通路
(22)に流れる。一方、上記固体粒子のうち粗粒子Prは
慣性力が大きいので、上記搬送ガスの方向変化に拘りな
く直進し、区画壁(41,41)の内側の粗粒子回収通路
(21)に流入口(23)より流入して粗粒子Prと細粒子Pf
とが分級されることになる。A solid gas mixture gas G is generated by the standing shock wave S.
The flow of the carrier gas rapidly swirls and the fine particles Pf
Has a small inertial force, its flow direction changes following the carrier gas and flows into the fine particle recovery passageway (22) outside the partition walls (41, 41). On the other hand, among the solid particles, the coarse particles Pr have a large inertial force, and therefore, the coarse particles Pr go straight regardless of the change in the direction of the carrier gas, and enter the inlet ( 23) Inflow from coarse particles Pr and fine particles Pf
And will be classified.
【0021】そして、請求項3に係る発明では、上記粗
粒子回収通路(21)の流入口(23)が超音速流発生手段
(3)の流出口(35)より大きく設定されているので、
上記粗粒子Prが鍔部(42)の先端等に衝突することな
く、粗粒子回収通路(21)に流れることになる。In the invention according to claim 3, since the inlet (23) of the coarse particle recovery passageway (21) is set larger than the outlet (35) of the supersonic flow generating means (3),
The coarse particles Pr flow into the coarse particle recovery passageway (21) without colliding with the tip of the collar portion (42) or the like.
【0022】また、請求項2に係る発明では、上記鍔部
(42)の内面(44)が滑らかに区画壁(41,41)に連続
するので、粗粒子Prの速度が減速されて流れが滑らかに
なり、該粗粒子Prの区画壁(41,41)への付着が生ずる
ことはない。Further, in the invention according to claim 2, since the inner surface (44) of the collar portion (42) is smoothly continuous to the partition walls (41, 41), the velocity of the coarse particles Pr is decelerated to cause a flow. It becomes smooth, and the coarse particles Pr do not adhere to the partition walls (41, 41).
【0023】また、請求項4に係る発明では、補助ガス
が補助導入路(3a)から超音速流発生手段(3)におけ
る流出口(35)の中心部に供給され、固気混合ガスGに
おいて、該流入口(23)の中心上部分の固体粒子の密度
が低下することになる。この結果、上記流入口(23)の
中心部分を流れる細粒子Pfが低減され、該細粒子Pfは粗
粒子回収通路(21)に回収されることなく細粒子回収通
路(22)に流れることになる。In the invention according to claim 4, the auxiliary gas is supplied from the auxiliary introduction passage (3a) to the center of the outlet (35) of the supersonic flow generating means (3), and the solid gas mixture gas G That is, the density of solid particles in the upper center portion of the inflow port (23) decreases. As a result, the fine particles Pf flowing through the central portion of the inflow port (23) are reduced, and the fine particles Pf flow into the fine particle recovery passageway (22) without being recovered in the coarse particle recovery passageway (21). Become.
【0024】[0024]
【発明の効果】従って、請求項1に係る発明によれば、
上記区画壁(41,41)の流入口端に鍔部(42)を形成し
て平坦面(43)を設けるようにしたゝめに、搬送ガスの
流れを妨げる面積が大きく、定在衝撃波Sをほゞ平坦に
することができる。この平坦な定在衝撃波Sによって、
上記搬送ガスをほゞ直角に急旋回させることができるの
で、上記粗粒子回収通路(21)の流入口(23)におい
て、固気混合ガスGの逆流を確実に防止することができ
る。Therefore, according to the invention of claim 1,
Since the flange portion (42) is formed at the inlet end of the partition walls (41, 41) to provide the flat surface (43), the area that obstructs the flow of the carrier gas is large and the standing shock wave S Can be almost flat. With this flat standing shock wave S,
Since the carrier gas can be swirled at a substantially right angle, it is possible to reliably prevent the solid-gas mixture gas G from flowing backward at the inlet (23) of the coarse particle recovery passageway (21).
【0025】この結果、上記細粒子Pfが円滑にほゞ直角
に方向転換して細粒子回収通路(22)に回収されること
になり、区画壁(41,41)への付着が防止される。As a result, the fine particles Pf are smoothly redirected at a substantially right angle and collected in the fine particle collecting passage (22), so that they are prevented from adhering to the partition walls (41, 41). .
【0026】また、上記搬送ガスが確実に急旋回するこ
とから、粗粒子Prが搬送ガスに追随することがなく、確
実に粗粒子回収通路(21)に流れることになり、粗粒子
Prの回収効率、つまり、分級効率が向上する。Further, since the carrier gas surely makes a sharp turn, the coarse particles Pr do not follow the carrier gas and reliably flow into the coarse particle recovery passageway (21).
The Pr collection efficiency, that is, the classification efficiency is improved.
【0027】また、請求項2に係る発明によれば、上記
鍔部(42)によって流入口(23)より粗粒子回収通路
(21)を大きく設定するようにしたゝめに、該流入口
(23)より流入する固気混合ガスGの流速は小さいもの
ゝ該固気混合ガスGの流速が減速され、該粗粒子回収通
路(21)における固気混合ガスGの流れ、つまり、粗粒
子Prの流れが円滑になり、区画壁(41,41)への付着が
防止され、分級効率の向上を図ることができる。Further, according to the second aspect of the invention, since the coarse particle recovery passageway (21) is set to be larger than the inflow port (23) by the flange portion (42), the inflow port (21) 23) Although the flow velocity of the solid-gas mixture gas G flowing in is small, the flow velocity of the solid-gas mixture gas G is reduced and the flow of the solid-gas mixture gas G in the coarse particle collecting passage (21), that is, the coarse particles Pr. The flow becomes smooth, the adhesion to the partition walls (41, 41) is prevented, and the classification efficiency can be improved.
【0028】また、請求項3に係る発明によれば、上記
超音速流発生手段(3)の流出口(35)より粗粒子回収
通路(21)の流入口(23)を大きく設定するようにした
ゝめに、粗粒子Prが鍔部(42)の先端に衝突することを
確実に防止することができるので、分級効率を向上させ
ることができる。Further, according to the invention of claim 3, the inlet (23) of the coarse particle recovery passageway (21) is set to be larger than the outlet (35) of the supersonic flow generating means (3). Moreover, since it is possible to reliably prevent the coarse particles Pr from colliding with the tip of the collar portion (42), it is possible to improve the classification efficiency.
【0029】また、請求項4に係る発明によれば、上記
超音速流発生手段(3)の流出口(35)と同心上に位置
して補助ガスを固気混合ガスGに導入する補助導入路
(3a)を設けるようにしたゝめに、補助ガスの供給によ
って粗粒子回収通路(21)における流入口(23)の中心
部を流れる細粒子Pfが低減されるので、該細粒子Pfが粗
粒子回収通路(21)に回収されることを防止することが
でき、分級効率の向上を図ることができる。Further, according to the invention of claim 4, auxiliary introduction for introducing auxiliary gas into the solid-gas mixture gas G is located concentrically with the outlet (35) of the supersonic flow generating means (3). Since the passage (3a) is provided, the supply of the auxiliary gas reduces the fine particles Pf flowing through the center of the inflow port (23) in the coarse particle recovery passageway (21). It is possible to prevent the coarse particles from being recovered in the coarse particle recovery passageway (21) and improve the classification efficiency.
【0030】また、請求項5に係る発明によれば、上記
区画壁(41,41)を2枚の平行平板で構成するようにし
たゝめに、円筒壁に比して鍔部(42)の平坦面(43)の
面積が大きくなり、定在衝撃波Sの平坦部分を効率よく
形成することができる。Further, according to the invention of claim 5, the partition wall (41, 41) is composed of two parallel flat plates, so that the collar portion (42) is larger than the cylindrical wall. The area of the flat surface (43) is increased, and the flat portion of the standing shock wave S can be efficiently formed.
【0031】[0031]
【実施例】以下、本発明の実施例を図面に基づいて詳細
に説明する。Embodiments of the present invention will now be described in detail with reference to the drawings.
【0032】図1に示すように、 (1)は分級装置であ
って、微粒子による薄膜形成や粒径の測定等に用いられ
るものであって、図示しないが、微粒子製造装置が連結
されている。As shown in FIG. 1, (1) is a classifying device, which is used for forming a thin film of fine particles, measuring the particle size, etc., and is connected to a fine particle manufacturing device (not shown). .
【0033】上記分級装置(1)は、分級室(2)に超音
速流発生手段(3)が接続されると共に、該分級室(2)
に粒子回収手段(4)が収納されて構成されている。In the classification device (1), a supersonic flow generating means (3) is connected to the classification chamber (2) and the classification chamber (2) is also connected.
The particle collecting means (4) is housed in the inside.
【0034】該超音速流発生手段(3)は、図示しない
微粒子製造装置が連結され、該微粒子製造装置で気相
法、液相法、粉砕法等で製造された金属やセラミック等
の1μm以下の超微粒子である固体粒子が、空気やHe,
Ar等の不活性ガスの搬送ガスに混入してなる固気混合ガ
スGを超音速流で分級室(2)に噴出させるように構成
されている。The supersonic flow generating means (3) is connected to a fine particle production apparatus (not shown), and is 1 μm or less of metal, ceramic or the like produced by the fine particle production apparatus by a vapor phase method, a liquid phase method, a pulverization method or the like. Solid particles that are ultra-fine particles of air, He,
A solid gas mixture gas G mixed with an inert gas carrier gas such as Ar is jetted into the classification chamber (2) in a supersonic flow.
【0035】上記超音速流発生手段(3)は、ラバル管
(31)を備え、該ラバル管(31)は、下方に向かって先
細状に形成された導入部(32)と、該導入部(32)の下
端に連続形成されたスロート部(33)と、該スロート部
(33)の下端に連続形成されて下方に向かって広がる導
出部(34)とより構成されている。そして、上記導出部
(34)の下端面が固気混合ガスGの流出口(35)になっ
ている。The supersonic flow generating means (3) is provided with a Laval tube (31), and the Laval tube (31) has an introducing portion (32) which is tapered downward and the introducing portion. The throat part (33) is continuously formed at the lower end of the (32), and the lead-out part (34) is continuously formed at the lower end of the throat part (33) and spreads downward. The lower end surface of the lead-out portion (34) serves as an outlet (35) for the solid gas mixture gas G.
【0036】上記分級室(2)は、図2に示すように、
矩形状の箱体に形成されており、上記ラバル管(31)
は、図2において上下方向に延び、上記流出口(35)
は、分級室(2)の上面の中央部に上下方向に延びる矩
形に形成されている。As shown in FIG. 2, the classification chamber (2) is
The Laval tube (31) is formed in a rectangular box.
2 extends in the vertical direction in FIG. 2 and the outlet (35)
Is formed in a rectangular shape extending in the vertical direction at the center of the upper surface of the classification chamber (2).
【0037】上記粒子回収手段(4)は、2枚の区画壁
(41,41)を備えて成り、該区画壁(41,41)は、所定
間隔を存して平行に配置され、図2において、分級室
(2)の上下両面に亘って設けられている。The particle collecting means (4) is provided with two partition walls (41, 41), and the partition walls (41, 41) are arranged in parallel at a predetermined interval. In, the upper and lower surfaces of the classification chamber (2) are provided.
【0038】そして、上記両区画壁(41,41)の間は、
分級室(2)の中央部に位置して粗粒子回収通路(21)
に形成され、上記両区画壁(41,41)の外側は、分級室
(2)の両側部に位置して細粒子回収通路(22)に形成
されている。上記粗粒子回収通路(21)の下端は、薄膜
形成装置等に連結されて閉塞される一方、上記細粒子回
収通路(22)の下端には、図示しないが、真空ポンプが
連通されており、該真空ポンプによって分級室(2)の
内部が真空引されている。Between the two partition walls (41, 41),
Coarse particle recovery passageway (21) located in the center of the classification chamber (2)
The outer sides of the partition walls (41, 41) are formed in the fine particle recovery passageway (22) at both sides of the classification chamber (2). The lower end of the coarse particle recovery passageway (21) is connected to a thin film forming device or the like to be closed, while the lower end of the fine particle recovery passageway (22) is connected to a vacuum pump (not shown), The inside of the classification chamber (2) is evacuated by the vacuum pump.
【0039】更に、上記両区画壁(41,41)の上端間
は、粗粒子回収通路(21)の流入口(23)に形成され、
該流入口(23)が上記超音速流発生手段(3)の流出口
(35)に所定間隔を存して対面するように上記区画壁
(41,41)が配置されている。また、上記区画壁(41,
41)及び粗粒子回収通路(21)は、ラバル管(31)より
分級室(2)に流入した超音速流の固気混合ガスGの障
害物になるように配置されて上記流入口(23)の上方近
傍の超音速流場に定在衝撃波Sを発生させるようになっ
ている。この定在衝撃波Sによって固気混合ガスGの搬
送ガスは、流れの方向が変化して上記固気混合ガスG中
の固体粒子を粗粒子Prと細粒子Pfとに分級している。Further, the space between the upper ends of the partition walls (41, 41) is formed at the inlet (23) of the coarse particle recovery passageway (21).
The partition walls (41, 41) are arranged so that the inflow port (23) faces the outflow port (35) of the supersonic flow generating means (3) at a predetermined interval. In addition, the partition wall (41,
41) and the coarse particle recovery passageway (21) are arranged so as to obstruct the supersonic solid-gas mixture gas G flowing into the classification chamber (2) from the Laval tube (31), and the inlet (23) ), The standing shock wave S is generated in the supersonic flow field near the upper part. Due to the standing shock wave S, the carrier gas of the solid-gas mixture gas G changes its flow direction to classify the solid particles in the solid-gas mixture gas G into coarse particles Pr and fine particles Pf.
【0040】上記各区画壁(41,41)には、本発明の特
徴として、鍔部(42)が流入口端である上端に形成され
ている。該鍔部(42)は、上記粗粒子回収通路(21)の
中心側である内側に向かって突出している。そして、上
記鍔部(42)の上面であって上記ラバル管(31)の流出
口(35)に対向する面が平坦面(43)に形成されてい
る。つまり、該鍔部(42)の平坦面(43)は、上記超音
速流の固気混合ガスGの流れを妨げるのに充分な面積を
有するように形成されている。As a feature of the present invention, a collar portion (42) is formed on each of the partition walls (41, 41) at an upper end which is an inlet end. The collar portion (42) projects inward, which is the center side of the coarse particle recovery passageway (21). A flat surface (43) is formed on the upper surface of the collar portion (42) and faces the outlet (35) of the Laval tube (31). That is, the flat surface (43) of the collar portion (42) is formed so as to have an area sufficient to obstruct the flow of the solid gas mixture gas G of the supersonic flow.
【0041】また、上記鍔部(42)の内面(44)は、鍔
部(42)の先端から区画壁(41,41)の内面に滑らかに
連続するように形成され、該鍔部(42)の先端から区画
壁(41,41)の内面に向って真っ直ぐに傾斜する傾斜面
で形成されている。The inner surface (44) of the collar portion (42) is formed so as to smoothly continue from the tip of the collar portion (42) to the inner surface of the partition walls (41, 41). ) Of the partition wall (41, 41) from the tip to the inside of the partition wall (41, 41).
【0042】そこで、上記粗粒子回収通路(21)等の具
体的な寸法について図3に基づき説明する。Therefore, specific dimensions of the coarse particle recovery passageway (21) and the like will be described with reference to FIG.
【0043】先ず、上記ラバル管(31)の流出口(35)
の幅Dnは、分級する処理量等によって定まり、上記粗粒
子回収通路(21)の流入口(23)の幅Dcは、流出口(3
5)の幅Dnより大きく設定されており(Dc≧Dn)、この
流入口(23)の幅Dcが流出口(35)の幅Dnより小さい
と、粗粒子Prが鍔部(42)の先端に衝突することにな
る。First, the outlet (35) of the Laval pipe (31).
The width Dn of the rough particle recovery passage (21) is determined by the amount of treatment to be classified.
If the width Dc of this inlet (23) is smaller than the width Dn of the outlet (35), the coarse particles Pr will be larger than the width Dn of (5) (Dc ≧ Dn). Will collide with.
【0044】また、上記粗粒子回収通路(21)の幅Di
は、流入口(23)の幅Dcより大きく設定されており(Di
>Dc)、この粗粒子回収通路(21)が流入口(23)より
大きくなっていることから、流入口(23)より流入した
固気混合ガスGの流速は、小さいものゝ更に減速されて
流れが滑らかになるようにしている。The width Di of the coarse particle recovery passageway (21) is
Is set larger than the width Dc of the inlet (23) (Di
> Dc), since the coarse particle recovery passageway (21) is larger than the inflow port (23), the flow velocity of the solid-gas mixture gas G that has flowed in through the inflow port (23) is smaller, that is, further reduced. I try to make the flow smooth.
【0045】また、上記両区画壁(41,41)の外側の外
部幅Doは、流入口(23)の幅Dcの2倍以上が好ましく
(Do≧2Dc)、また、上記分級室(2)の幅Drは、定在
衝撃波Sの端部が干渉しないように、例えば、区画壁
(41,41)の外部幅Doの3倍以上に設定され(Dr≧3D
o)、また、上記流出口(35)と流入口(23)との間隔
Lは、流出口(35)の幅Dnに対して、例えば、 0.5Dn以
上で、5Dn以下に設定されている(0.5Dn≦L≦5D
n)。Further, the outer width Do on the outside of both the partition walls (41, 41) is preferably twice or more the width Dc of the inlet (23) (Do ≧ 2Dc), and the classification chamber (2). The width Dr is set to, for example, three times or more the external width Do of the partition walls (41, 41) so that the end of the standing shock wave S does not interfere (Dr ≧ 3D
o) Further, the interval L between the outlet (35) and the inlet (23) is set to, for example, 0.5 Dn or more and 5 Dn or less with respect to the width Dn of the outlet (35) ( 0.5Dn ≦ L ≦ 5D
n).
【0046】次に、上記分級装置(1)における分級動
作について説明する。Next, the classification operation in the classification device (1) will be described.
【0047】先ず、微粒子製造装置において製造された
超微粒子の固体粒子を空気等の搬送ガスに混入した固気
混合ガスGを超音速流発生手段(3)のラバル管(31)
に供給する一方、分級室(2)の粗粒子回収通路(21)
を介して真空ポンプによって分級室(2)の内部を真空
引きする。この真空引きによって超音速流発生手段
(3)の入口側と出口側とで、つまり、微粒子製造装置
側と分級室(2)の内部とで所定の圧力差が生じ、上記
固気混合ガスGは、ラバル管(31)を流れると共に、ラ
バル管(31)のスロート部(33)で絞られるので、導出
部(34)において超音速流となって流出口(35)より分
級室(2)に噴出することになる。つまり、固気混合ガ
スGの搬送ガスが超音速に加速されるので、固体粒子も
搬送ガスに伴って超音速になって分級室(2)に噴出さ
れる。First, the Laval tube (31) of the supersonic flow generating means (3) is supplied with the solid-gas mixture gas G prepared by mixing the solid particles of ultrafine particles produced in the fine particle production apparatus with the carrier gas such as air.
While supplying to the coarse particle recovery passageway (21) of the classification chamber (2)
The inside of the classification chamber (2) is evacuated by a vacuum pump via the. Due to this evacuation, a predetermined pressure difference is generated between the inlet side and the outlet side of the supersonic flow generating means (3), that is, between the fine particle manufacturing apparatus side and the inside of the classification chamber (2), and the solid-gas mixture gas G is generated. Flows through the Laval tube (31) and is throttled by the throat section (33) of the Laval tube (31), so that it becomes a supersonic flow in the derivation section (34) and from the outlet (35) to the classification chamber (2). It will gush out. That is, since the carrier gas of the solid gas mixture gas G is accelerated to supersonic velocity, the solid particles are also supersonic velocity accompanying the carrier gas and are jetted into the classification chamber (2).
【0048】その後、上記超音速流の固気混合ガスG
は、分級室(2)において、流出口(35)から粗粒子回
収通路(21)の流入口(23)に向かって流れることにな
る。その際、上記粗粒子回収通路(21)は、下端が閉塞
しているので、該粗粒子回収通路(21)及び鍔部(42)
の平坦面(43)が固気混合ガスGの流れの障害物とな
り、流入口(23)の上方近傍において定在衝撃波Sが発
生し、この定在衝撃波Sは、図1及び図4に示すよう
に、上記鍔部(42)に平坦面(43)が形成されているこ
とから、ほゞ平坦になる。After that, the above-mentioned supersonic flow solid-gas mixture gas G
Will flow from the outlet (35) toward the inlet (23) of the coarse particle recovery passageway (21) in the classification chamber (2). At this time, since the lower end of the coarse particle recovery passageway (21) is closed, the coarse particle recovery passageway (21) and the collar portion (42) are closed.
The flat surface (43) becomes an obstacle to the flow of the solid-gas mixture gas G, and a standing shock wave S is generated near the upper part of the inlet (23). The standing shock wave S is shown in FIGS. 1 and 4. As described above, since the flat surface (43) is formed on the collar portion (42), it is almost flat.
【0049】この定在衝撃波Sによって固気混合ガスG
の搬送ガスの流れFgは、図4に示すように、急旋回して
流れ方向がほゞ直角に変化すると共に、この固気混合ガ
スG中の固体粒子のうち細粒子Pfは、慣性力が小さいの
で、上記搬送ガスの方向変化に追随して流れ方向Ffが確
実に変化し、区画壁(41,41)の外側の細粒子回収通路
(22)に流れて回収されることになる。A solid gas mixture gas G is generated by the standing shock wave S.
As shown in FIG. 4, the carrier gas flow Fg of the carrier gas suddenly swirls and the flow direction changes to a substantially right angle, and the fine particles Pf of the solid particles in the solid-gas mixture gas G have an inertial force. Since it is small, the flow direction Ff surely changes following the change in the direction of the carrier gas, and flows into the fine particle recovery passageway (22) outside the partition walls (41, 41) to be recovered.
【0050】一方、上記固気混合ガスG中の固体粒子の
うち粗粒子Prは、慣性力が大きいので、上記搬送ガスの
方向変化に拘りなく直進する流れFrとなり、区画壁(4
1,41)の内側の粗粒子回収通路(21)に流入口(23)
より流入し、その上、該粗粒子回収通路(21)の断面積
が拡大しているので、粗粒子Prは減速して滑らかに流れ
て回収されることになる。On the other hand, among the solid particles in the solid-gas mixture gas G, the coarse particles Pr have a large inertial force, so that they become a straight flow Fr regardless of the change in the direction of the carrier gas, and the partition wall (4
Inlet (23) to the coarse particle recovery passageway (21) inside (1, 41)
Since the cross-sectional area of the coarse particle recovery passageway (21) is further increased, the coarse particles Pr are decelerated and smoothly flow to be recovered.
【0051】この結果、上記固気混合ガスGの固体粒子
が細粒子Pfと粗粒子Prとに分級される。As a result, the solid particles of the solid-gas mixture gas G are classified into fine particles Pf and coarse particles Pr.
【0052】従って、本実施例によれば、上記区画壁
(41,41)の流入口端の鍔部(42)を形成して平坦面
(43)を設けるようにしたゝめに、搬送ガスの流れを妨
げる面積が大きく、定在衝撃波Sをほゞ平坦にすること
ができる。この平坦な定在衝撃波Sによって、上記搬送
ガスをほゞ直角に急旋回させることができるので、上記
粗粒子回収通路(21)の流入口(23)において、固気混
合ガスGの逆流を確実に防止することができる。Therefore, according to this embodiment, since the flange portion (42) at the inlet end of the partition wall (41, 41) is formed to provide the flat surface (43), the carrier gas Has a large area that obstructs the flow of the stationary shock wave S, and the standing shock wave S can be made substantially flat. The flat standing shock wave S allows the carrier gas to swirl at a substantially right angle, so that the solid-gas mixture gas G can be reliably back-flowed at the inlet (23) of the coarse particle recovery passageway (21). Can be prevented.
【0053】この結果、上記細粒子Pfが円滑にほゞ直角
に方向転換して細粒子回収通路(22)に回収されること
になり、区画壁(41,41)への付着が防止される。As a result, the fine particles Pf are smoothly turned around at a right angle and collected in the fine particle collecting passageway (22), so that they are prevented from adhering to the partition walls (41, 41). .
【0054】また、上記搬送ガスが確実に急旋回するこ
とから、粗粒子Prが搬送ガスに追随することがなく、確
実に粗粒子回収通路(21)に流れることになり、粗粒子
Prの回収効率、つまり、分級効率が向上する。Further, since the carrier gas surely swirls suddenly, the coarse particles Pr do not follow the carrier gas and reliably flow into the coarse particle recovery passageway (21).
The Pr collection efficiency, that is, the classification efficiency is improved.
【0055】また、上記鍔部(42)によって流入口(2
3)の幅Dcより粗粒子回収通路(21)の幅Diを大きく設
定するようにしたゝめに、該流入口(23)より流入する
固気混合ガスGの流速は小さいものゝ該固気混合ガスG
の流速が減速され、該粗粒子回収通路(21)における固
気混合ガスGの流れ、つまり、粗粒子Prの流れが円滑に
なり、区画壁(41,41)への付着が防止され、分級効率
の向上を図ることができる。Further, the collar portion (42) allows the inlet (2
The width Di of the coarse particle recovery passageway (21) is set to be larger than the width Dc of 3), and the flow velocity of the solid gas mixture gas G flowing from the inlet port (23) is small. Mixed gas G
Of the solid-gas mixture gas G in the coarse particle recovery passageway (21), that is, the flow of the coarse particles Pr is smoothed, adhesion to the partition walls (41, 41) is prevented, and classification is performed. It is possible to improve efficiency.
【0056】また、上記超音速流発生手段(3)の流出
口(35)より粗粒子回収通路(21)の流入口(23)を大
きく設定するようにしたゝめに、上記粗粒子Prが鍔部
(42)の先端に衝突することを確実に防止することがで
きるので、分級効率を向上させることができる。Further, since the inlet (23) of the coarse particle recovery passageway (21) is set to be larger than the outlet (35) of the supersonic flow generating means (3), the coarse particles Pr are Since it is possible to reliably prevent the collision with the tip of the collar portion (42), it is possible to improve the classification efficiency.
【0057】また、上記区画壁(41,41)を2枚の平行
平板で構成するようにしたゝめに、円筒壁に比して鍔部
(42)の平坦面(43)の面積が大きくなり、定在衝撃波
Sの平坦部分を効率よく形成することができる。Since the partition walls (41, 41) are composed of two parallel flat plates, the area of the flat surface (43) of the collar portion (42) is larger than that of the cylindrical wall. Therefore, the flat portion of the standing shock wave S can be efficiently formed.
【0058】そこで、図5は、本実施例と従来例との分
級効率を示しており、粗粒子Prと細粒子Pfとに分級しよ
うとする予め設定された分級径に対し、本来、X1で示す
ように、分級径より大きい粗粒子が全て粗粒子回収通路
(21)に回収されるはずであるが、従来、X2に示すよう
に、粗粒子回収通路(21)に細粒子Pfが回収されると共
に、区画壁(41,41)に粗粒子Prが付着し、分級径より
大きい粗粒子Prの回収が低いものであった。Therefore, FIG. 5 shows the classification efficiency of the present example and the conventional example, where X1 is originally used for the preset classification diameter for classifying coarse particles Pr and fine particles Pf. As shown, all coarse particles larger than the classified diameter should be recovered in the coarse particle recovery passageway (21), but conventionally, as shown in X2, fine particles Pf are recovered in the coarse particle recovery passageway (21). In addition, the coarse particles Pr adhered to the partition walls (41, 41), and the recovery of the coarse particles Pr larger than the classified diameter was low.
【0059】尚、この図5において、上記分級効率は、
分級室(2)に供給される固気混合ガスGにおける粗粒
子R1に対する粗粒子回収通路(21)に回収される粗粒子
R2の比率[(R2/R1)100%]である。In FIG. 5, the classification efficiency is
Coarse particles recovered in the coarse particle recovery passageway (21) for the coarse particles R1 in the solid-gas mixture gas G supplied to the classification chamber (2)
It is the ratio of R2 [(R2 / R1) 100%].
【0060】これに対し、本実施例では、X3に示すよう
に、細粒子Pfは、搬送ガスに追随するので、粗粒子回収
通路(21)に回収される回収量が低下する一方、粗粒子
Prは、区画壁(41,41)に付着することがないので、粗
粒子回収通路(21)の回収量が上昇することになる。On the other hand, in the present embodiment, as indicated by X3, the fine particles Pf follow the carrier gas, so that the amount of recovery in the coarse particle recovery passageway (21) is reduced, while the coarse particles are recovered.
Since Pr does not adhere to the partition walls (41, 41), the amount recovered in the coarse particle recovery passageway (21) increases.
【0061】図6乃至図8は、鍔部(42)の他の実施例
を示しており、図6の鍔部(42)は、外側の隅角部が切
除されて面取り部(45)が形成されている。また、図7
の鍔部(42)は、外側の隅角部が円弧状に切除されてア
ール部(46)が形成されている。また、図8の鍔部(4
2)は、内面(47)が鍔部(42)の先端から区画壁(4
1,41)の内面に亘って凹状の円弧で連続する円弧面に
形成されている。6 to 8 show another embodiment of the collar portion (42). The collar portion (42) of FIG. 6 has a chamfered portion (45) formed by cutting off the outer corner portion. Has been formed. Also, FIG.
The outer corner portion of the collar portion (42) is cut into an arc shape to form a rounded portion (46). In addition, the collar (4
In 2), the inner surface (47) extends from the tip of the collar (42) to the partition wall (4
It is formed as an arc surface that is continuous with a concave arc over the inner surface of (1, 41).
【0062】図9は、請求項4に係る発明の実施例を示
しており、超音速流発生手段(3)には、流出口(35)
と同心上に位置して固気混合ガスGと別個に補助ガスの
みを固気混合ガスGに導入する補助導入路(3a)が設け
られたものである。FIG. 9 shows an embodiment of the invention according to claim 4, wherein the supersonic flow generating means (3) has an outlet (35).
Auxiliary introduction passage (3a) which is located concentrically with the solid gas mixture gas G and introduces only the auxiliary gas into the solid gas mixture gas G is provided.
【0063】該補助導入路(3a)は、ラバル管(31)に
おける導入部(32)の内部に設けられており、上端に
は、図示しないが、固体粒子が混入されていない搬送ガ
スのみの補助ガスを供給するガス供給手段が接続される
一方、下端は、スロート部(33)の上端近傍に位置して
開口しており、上記補助導入路(3a)は、搬送ガスのみ
を固気混合ガスGの中心部に供給するようなっている。The auxiliary introducing passage (3a) is provided inside the introducing portion (32) of the Laval tube (31), and has an upper end (not shown) of only carrier gas in which solid particles are not mixed. While the gas supply means for supplying the auxiliary gas is connected, the lower end is located near the upper end of the throat part (33) and opens, and the auxiliary introduction path (3a) mixes only the carrier gas with solid gas. The gas G is supplied to the central part.
【0064】この補助ガスの供給によっては、上記粗粒
子回収通路(21)における流入口(23)の中心上部分を
流れる固気混合ガスGにおいて、該流入口(23)の中心
上部分の固体粒子の密度が低下することになる。Depending on the supply of this auxiliary gas, in the solid-gas mixture gas G flowing in the central upper part of the inlet (23) in the coarse particle recovery passageway (21), the solid in the central upper part of the inlet (23) is The density of the particles will be reduced.
【0065】この結果、上記流入口(23)の中心上部分
を流れる細粒子Pfが低減され、該細粒子Pfは粗粒子回収
通路(21)に回収されることなく細粒子回収通路(22)
に流れることになる。つまり、図4Fsに示す細粒子Pfの
流れが防止されることになる。As a result, the fine particles Pf flowing in the central upper portion of the inflow port (23) are reduced, and the fine particles Pf are not recovered in the coarse particle recovery passageway (21), and the fine particle recovery passageway (22) is
Will flow to. That is, the flow of the fine particles Pf shown in FIG. 4Fs is prevented.
【0066】従って、図5のX4に示すように、粗粒子回
収通路(21)に回収される細粒子Pfが低減され、分級効
率が向上することになる。Therefore, as shown by X4 in FIG. 5, the fine particles Pf recovered in the coarse particle recovery passageway (21) are reduced, and the classification efficiency is improved.
【0067】尚、本実施例においては、上記分級室
(2)を断面矩形状にし、区画壁(41,41)を1対の平
行な平面板で形成したが、請求項1乃至4に係る発明で
は、区画壁(41,41)を円筒状にし、分級室(2)及び
ラバル管(31)をそれぞれ円筒状にしてもよい。In this embodiment, the classification chamber (2) has a rectangular cross section and the partition walls (41, 41) are formed by a pair of parallel flat plates. In the invention, the partition walls (41, 41) may be cylindrical, and the classification chamber (2) and the Laval tube (31) may be cylindrical.
【0068】また、図9に示す実施例において、補助ガ
スは、搬送ガスとしたが、請求項4に係る発明では、搬
送ガスに限られず、搬送ガスと異なる清浄ガスを用いる
ようにしてもよい。In the embodiment shown in FIG. 9, the auxiliary gas is the carrier gas, but the invention according to claim 4 is not limited to the carrier gas, and a clean gas different from the carrier gas may be used. .
【図1】本発明の分級装置を示す縦断面図である。FIG. 1 is a vertical sectional view showing a classification device of the present invention.
【図2】図1A−Aにおける平面断面図である。FIG. 2 is a plan sectional view of FIG. 1A-A.
【図3】流入口等の寸法を示す分級装置の概略縦断面図
である。FIG. 3 is a schematic vertical sectional view of a classification device showing dimensions of an inlet and the like.
【図4】固気混合ガスの流れを示す分級装置の縦断面図
である。FIG. 4 is a vertical cross-sectional view of a classification device showing a flow of a solid gas mixture gas.
【図5】分級効率の特性図である。FIG. 5 is a characteristic diagram of classification efficiency.
【図6】他の鍔部を示す断面図である。FIG. 6 is a cross-sectional view showing another collar portion.
【図7】他の鍔部を示す断面図である。FIG. 7 is a cross-sectional view showing another collar portion.
【図8】他の鍔部を示す断面図である。FIG. 8 is a cross-sectional view showing another collar portion.
【図9】補助導入路を備えた分級装置の縦断面図であ
る。FIG. 9 is a vertical cross-sectional view of a classification device including an auxiliary introduction path.
【図10】従来の分級装置を示す縦断面図である。FIG. 10 is a vertical cross-sectional view showing a conventional classification device.
1 分級装置 2 分級室 21 粗粒子回収通路 22 細粒子回収通路 23 流入口 3 超音速流発生手段 3a 補助導入路 35 流出口 4 粒子回収手段 41 区画壁 42 鍔部 43 平坦面 44,47 内面 G 固気混合ガス Pr 粗粒子 Pf 細粒子 S 定在衝撃波 1 classifier 2 classification room 21 Coarse particle recovery passage 22 Fine particle recovery passage 23 Inlet 3 Supersonic flow generation means 3a Auxiliary introduction route 35 outlet 4 Particle recovery means 41 division wall 42 Tsuba 43 flat surface 44,47 inside G Solid gas mixture Pr coarse particles Pf fine particles S standing shock wave
Claims (5)
混合ガスGを超音速流で流出口(35)より噴出させる超
音速流発生手段(3)と、 該超音速流発生手段(3)の流出口(35)に連続して固
気混合ガスGが超音速流で流入する分級室(2)と、 該分級室(2)の内部に粗粒子回収通路(21)と細粒子
回収通路(22)とを区画形成し且つ該粗粒子回収通路
(21)の流入口(23)が超音速流発生手段(3)の流出
口(35)に対して所定間隔を存して対面するように区画
壁(41,41)が設けられると共に、上記分級室(2)の
内部における粗粒子回収通路(21)の流入口(23)の近
傍の固気混合ガスGの超音速流場に定在衝撃波Sを発生
させるようにして上記固気混合ガスG中の固体粒子を粗
粒子Prと細粒子Pfとに分級する粒子回収手段(4)とを
備えた分級装置であって、 上記粒子回収手段(4)の区画壁(41,41)の流入口端
には、粗粒子回収通路(21)の中心側に突出し且つ上記
超音速流発生手段(3)の流出口(35)に対向する面が
平坦面(43)に形成された鍔部(42)が形成されている
ことを特徴とする分級装置。1. A supersonic flow generating means (3) for ejecting a solid gas mixture gas G in which solid particles are mixed in a carrier gas from a flow outlet (35) in a supersonic flow, and the supersonic flow generating means ( A classification chamber (2) into which the solid-gas mixture gas G continuously flows into the outlet (35) of 3) in a supersonic flow, and a coarse particle recovery passageway (21) and fine particles are provided inside the classification chamber (2). The recovery passageway (22) is partitioned and the inlet (23) of the coarse particle recovery passageway (21) faces the outlet (35) of the supersonic flow generating means (3) at a predetermined interval. The partition walls (41, 41) are provided so that the classification chamber (2)
Near the inlet (23) of the coarse particle recovery passageway (21) inside
Particle recovery means for classifying the solid particles in the solid-gas mixture gas G into coarse particles Pr and fine particles Pf by generating a standing shock wave S in the supersonic flow field of the solid-gas mixture gas G nearby. ) And the supersonic flow which projects toward the center of the coarse particle recovery passageway (21) at the inlet end of the partition wall (41, 41) of the particle recovery means (4). A classifying device characterized in that a flange (42) is formed in which a surface of the generating means (3) facing the outlet (35) is a flat surface (43).
壁(41,41)の内面に滑らかに連続するように形成され
ていることを特徴とする分級装置。2. The classifying apparatus according to claim 1, wherein the inner surface (44) of the collar portion (42) is smoothly continuous from the tip of the collar portion (42) to the inner surface of the partition wall (41, 41). A classification device characterized by being formed.
て、 鍔部(42)の先端間の流入口(23)は、超音速流発生手
段(3)の流出口(35)より大きく形成されていること
を特徴とする分級装置。3. The classifying apparatus according to claim 1, wherein the inlet (23) between the tips of the collar (42) is formed larger than the outlet (35) of the supersonic flow generating means (3). Classifying device characterized by being.
置において、 超音速流発生手段(3)は、流出口(35)の同心上に位
置して補助ガスを流出口(35)の中心部に向かって固気
混合ガスGに導入する補助導入路(3a)を備えているこ
とを特徴とする分級装置。4. The classifying device according to claim 1, wherein the supersonic flow generating means (3) is located concentrically with the outlet (35) and the auxiliary gas is delivered through the outlet (35). A classification device, characterized in that it is provided with an auxiliary introduction path (3a) for introducing the solid-gas mixture gas G toward the center of the.
置において、 区画壁(41,41)は、平行に配置された一対の平板で構
成されていることを特徴とする分級装置。5. The classification device according to claim 1, wherein the partition walls (41, 41) are composed of a pair of flat plates arranged in parallel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP00613894A JP3440526B2 (en) | 1994-01-25 | 1994-01-25 | Classifier |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP00613894A JP3440526B2 (en) | 1994-01-25 | 1994-01-25 | Classifier |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07204585A JPH07204585A (en) | 1995-08-08 |
| JP3440526B2 true JP3440526B2 (en) | 2003-08-25 |
Family
ID=11630154
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP00613894A Expired - Fee Related JP3440526B2 (en) | 1994-01-25 | 1994-01-25 | Classifier |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3440526B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB0420292D0 (en) * | 2004-09-10 | 2005-02-09 | Bae Systems Plc | Particle separator |
-
1994
- 1994-01-25 JP JP00613894A patent/JP3440526B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07204585A (en) | 1995-08-08 |
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