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JP3440981B2 - Sintering device for plate to be fired - Google Patents
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JP3440981B2 - Sintering device for plate to be fired - Google Patents

Sintering device for plate to be fired

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Publication number
JP3440981B2
JP3440981B2 JP19218597A JP19218597A JP3440981B2 JP 3440981 B2 JP3440981 B2 JP 3440981B2 JP 19218597 A JP19218597 A JP 19218597A JP 19218597 A JP19218597 A JP 19218597A JP 3440981 B2 JP3440981 B2 JP 3440981B2
Authority
JP
Japan
Prior art keywords
fired
plate
plates
crucible
pair
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP19218597A
Other languages
Japanese (ja)
Other versions
JPH1137662A (en
Inventor
義宏 大日向
雅治 山田
秀夫 大島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Materials Corp
Original Assignee
Mitsubishi Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Materials Corp filed Critical Mitsubishi Materials Corp
Priority to JP19218597A priority Critical patent/JP3440981B2/en
Publication of JPH1137662A publication Critical patent/JPH1137662A/en
Application granted granted Critical
Publication of JP3440981B2 publication Critical patent/JP3440981B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、各種のセラミック
スからなる板状の被焼成物を焼成、熱処理する被焼成板
の焼成装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for firing a plate to be fired, which heats and heats a plate-shaped object made of various ceramics.

【0002】[0002]

【従来の技術】この種の板状の被焼成物を平板用の焼成
治具を用いて焼成する場合、被焼成物が小さいときには
焼成炉又はルツボ内部に単品毎に上向きに並べて配置し
て焼成される。一方、被焼成板が大きいときには複数枚
重ねた状態で焼成される。この被焼成板を上下方向に複
数枚重ねた状態で一度に焼成した場合には、下方に位置
する被焼成板と上方に位置する被焼成板とでは焼成時に
かかる荷重が異なり、焼成後における焼成板の品質にば
らつきが生じる不具合がある。また、焼成時にかかる荷
重を均一化するために溝付きの焼成用台板を使用して被
焼成板をその溝に複数枚立てて焼成することも考えられ
るが、焼成時における被焼成板の変形を防止することが
できない問題点がある。
2. Description of the Related Art When a plate-like object to be fired of this kind is fired by using a flat plate firing jig, when the object to be fired is small, it is placed in a firing furnace or crucible so that the individual articles are arranged in an upward direction and fired. To be done. On the other hand, when the plate to be fired is large, a plurality of sheets are fired in a stacked state. When a plurality of sheets to be fired are stacked at once in the vertical direction, the load applied at the time of firing is different between the sheets to be fired below and the sheets to be fired above, and the firing after firing is different. There is a problem that the quality of the plate varies. Also, in order to make the load applied during baking uniform, it is conceivable to use a baking base plate with grooves and stir a plurality of plates to be baked in the grooves. There is a problem that cannot be prevented.

【0003】これらの点を解消するために、従来図4に
示すように、複数枚の被焼成板2を立てて並べて、その
立てに並んだ複数枚の被焼成板2の両側に、両側の被焼
成板2の面と滑動できる縦面と反対側に斜面6を有する
重量部材5を置き、この斜面6に滑動できる斜面7を内
側にそれぞれ有する固定部材4を有する焼成用治具1が
提案されている(特開平5−296670)。この焼成
用治具1では、複数枚の被焼成板2を立てて並べて焼成
すると、被焼成板2が加熱されて収縮していくに従い、
その両側にある重量部材5が固定部材4の斜面7に沿っ
て自重により降下していくことにより、その力で立てて
並べられた複数枚の被焼成板2を両側から押すようにな
っている。このため、立てて並べられた複数枚の被焼成
板2は常に両側から支持される形になり、倒れることが
なく変形が抑制されて複数枚の被焼成板が同時に焼成さ
れることが期待されている。
In order to solve these problems, as shown in FIG. 4, conventionally, a plurality of sheets 2 to be fired are vertically arranged, and both sides of the plurality of sheets 2 to be fired are lined up on the stand. A baking jig 1 having a weight member 5 having an inclined surface 6 on the side opposite to the vertical surface that can slide with the surface of the plate to be fired 2 and a fixing member 4 having slidable inclined surfaces 7 inside is proposed. (Japanese Patent Laid-Open No. 5-296670). In this firing jig 1, when a plurality of fired plates 2 are stood side by side and fired, as the fired plates 2 are heated and shrink,
The weight members 5 on both sides thereof are lowered by their own weight along the sloped surface 7 of the fixing member 4, so that the plurality of plates 2 to be fired and arranged side by side by the force are pushed from both sides. . Therefore, the plurality of fired plates 2 arranged upright are always supported from both sides, and it is expected that the plurality of fired plates 2 will be fired at the same time without being fallen down and deformation will be suppressed. ing.

【0004】[0004]

【発明が解決しようとする課題】しかし、上述した治具
1では被焼成板2の加熱収縮に従って、立てて並べた複
数枚の被焼成板2の両側の重量部材5が、固定部材4の
斜面7に沿って降下する必要から、必然的に重量部材5
の下部は被焼成板2に接触しておらず、複数枚の被焼成
板2を両側から押す力が被焼成板2に均一に加わらない
未だ解決すべき課題が残存していた。また、立てて並べ
られた複数枚の被焼成板2の下端面は焼成炉又はルツボ
の内底面3と接触するために被焼成板2の加熱収縮に伴
う移動がその内底面3との接触抵抗力により阻害される
恐れもある。本発明の目的は、被焼成板と焼成炉又はル
ツボの内底面と接触抵抗力をなくし、被焼成板に加わる
力を均一化して被焼成板を複数枚同時に均一な品質で焼
成し得る被焼成板の焼成装置を提供することにある。
However, in the jig 1 described above, the weight members 5 on both sides of the plurality of plates to be fired 2 which are vertically arranged in accordance with the heat shrinkage of the plates to be fired 2 are the slopes of the fixing member 4. Since it is necessary to descend along 7, it is inevitable that the weight member 5
The lower part of No. 1 is not in contact with the plate 2 to be fired, and the force for pushing the plurality of plate 2 to be fired from both sides is not uniformly applied to the plate 2 to be fired. Further, since the lower end surfaces of the plurality of plates to be fired 2 arranged upright are in contact with the inner bottom surface 3 of the firing furnace or the crucible, the movement of the plates to be fired 2 due to heat shrinkage causes a contact resistance with the inner bottom surface 3. It may be hindered by force. The object of the present invention is to eliminate the contact resistance between the plate to be fired and the inner bottom surface of the firing furnace or crucible, and to make the force applied to the plate to be fired uniform so that a plurality of plates can be fired with uniform quality at the same time. An object is to provide a plate baking apparatus.

【0005】[0005]

【課題を解決するための手段】請求項1に係る発明は、
図1に示すように、焼成炉又はルツボ11の内部に立て
て並べておかれる複数枚の被焼成板12の両側に配置さ
れ被焼成板12の両端に密着可能に形成された鉛直面1
3aと鉛直面13aと反対側に形成された上向き傾斜面
13bとを有する一対の保持用ブロック13,13と、
一対の保持用ブロック13,13の両側に配置され上向
き傾斜面13bと同一傾斜角度で形成された下向き傾斜
面14bと下向き傾斜面14bと反対側に形成されルツ
ボ11の内壁に接触可能に形成された端面14aとを有
する一対の重し用ブロック14,14とを備え、ルツボ
11の内底面11aと複数の被焼成板12の下端面との
間に被焼成板12と同一材質を有する被焼成板の受け板
16が設けられた被焼成板の焼成装置である。
The invention according to claim 1 is
As shown in FIG. 1, a vertical plane 1 formed on both sides of a plurality of plates 12 to be fired standing upright inside a firing furnace or crucible 11 and formed in close contact with both ends of the plates 12 to be fired.
3a and a pair of holding blocks 13 and 13 each having an upward inclined surface 13b formed on the opposite side of the vertical surface 13a,
It is arranged on both sides of the pair of holding blocks 13, 13 and is formed on the opposite side of the downward inclined surface 14b and the downward inclined surface 14b formed at the same inclination angle as the upward inclined surface 13b, and is formed so as to be able to contact the inner wall of the crucible 11. And a pair of weighting blocks 14 and 14 each having an end face 14a, and between the inner bottom surface 11a of the crucible 11 and the lower end faces of the plurality of to-be-sintered plates 12, the to-be-sintered plate 12 is made of the same material. This is a device for baking a plate to be baked, which is provided with a plate receiving plate 16.

【0006】複数の被焼成板12を受け板16の上に複
数枚立てて並べて焼成することにより一度の焼成作業に
より複数の被焼成板を同時に焼成することを可能にす
る。保持用ブロック13,13の両側に配置された一対
の重し用ブロック14,14は自重により降下すること
により保持用ブロック13を移動させ、立てて並べられ
た複数の被焼成板12が加熱収縮する際に一対の保持用
ブロック13,13を介して両側から均一な力で押す。
受け板16は焼成時における被焼成板12の収縮と同一
の速度及び比率で収縮し、被焼成板12と焼成炉又はル
ツボ11の内底面11aとの間に生じる接触抵抗力を解
消する。
[0006] By firing a plurality of fired plates 12 standing on the receiving plate 16 side by side, it is possible to fire a plurality of fired plates simultaneously by one firing operation. The pair of weighting blocks 14 and 14 arranged on both sides of the holding blocks 13 and 13 are moved by their own weight so as to move the holding block 13, and the plurality of fired plates 12 arranged upright are heat-shrinked. In doing so, it is pushed with a uniform force from both sides via the pair of holding blocks 13, 13.
The receiving plate 16 contracts at the same rate and ratio as the contraction of the plate to be baked 12 during baking, and eliminates the contact resistance force generated between the plate to be baked 12 and the inner bottom surface 11a of the baking furnace or the crucible 11.

【0007】請求項2に係る発明は、請求項1に係る発
明であって、受け板16と一対の保持用ブロック13,
13が複数の小球17を介し焼成炉又はルツボ11の内
底面11aに置かれた被焼成板の焼成装置である。小球
17は被焼成板12の焼成時における受け板16の収縮
及び保持用ブロック13の移動を回転することにより容
易にする。請求項3に係る発明は、請求項1又は2に係
る発明であって、図3に示すように、上向き傾斜面13
bに傾斜方向に沿って複数の凸条13cが形成された被
焼成板の焼成装置である。複数の凸条13cを保持用ブ
ロック13に形成することにより、凸条13cにおける
頂点のみが重し用ブロック14の下向き傾斜面14bに
接触し、上向き傾斜面13bと下向き傾斜面14bとの
接触面積を縮小させ、重し用ブロック14が自重により
降下する際に発生する摺動抵抗を低減させる。
The invention according to claim 2 is the invention according to claim 1, wherein the receiving plate 16 and the pair of holding blocks 13,
Reference numeral 13 is a baking furnace or a baking apparatus for baking a plate placed on the inner bottom surface 11a of the crucible 11 through a plurality of small balls 17. The small balls 17 facilitate the contraction of the receiving plate 16 and the movement of the holding block 13 during the baking of the plate 12 to be baked. The invention according to claim 3 is the invention according to claim 1 or 2, and as shown in FIG.
This is a baking apparatus for a plate to be baked in which a plurality of convex stripes 13c are formed in b along the inclination direction. By forming a plurality of ridges 13c on the holding block 13, only the apexes of the ridges 13c contact the downward slope 14b of the weighting block 14, and the contact area between the upward slope 13b and the downward slope 14b. To reduce the sliding resistance generated when the weighting block 14 descends due to its own weight.

【0008】[0008]

【発明の実施の形態】次に本発明の実施の形態を図面に
基づいて詳しく説明する。図1及び図2に示すように、
本発明の焼成装置はルツボ11の内部に立てて並べてお
かれる複数枚の被焼成板12の両側に配置された一対の
保持用ブロック13,13と、その一対の保持用ブロッ
ク13,13の両側に配置された一対の重し用ブロック
14,14とを備える。保持用ブロック13は被焼成板
12の両端に密着可能に形成された鉛直面13aと、こ
の鉛直面13aと反対側に形成された上向き傾斜面13
bとを有し、図3に示すように、上向き傾斜面13bに
は傾斜方向に沿って複数の凸条13cが形成される。本
実施の形態における凸条13cは断面が三角形状を有し
ており、頂点が後述する重し用ブロック14の下向き傾
斜面14bと接触するように構成される。保持用ブロッ
ク13の材質は、被焼成板12との接触による反応が極
力少ないものが選定され、MgO、Al23、Zr
2、人造黒鉛等が例示される。
BEST MODE FOR CARRYING OUT THE INVENTION Next, embodiments of the present invention will be described in detail with reference to the drawings. As shown in FIGS. 1 and 2,
The firing apparatus of the present invention includes a pair of holding blocks 13 and 13 arranged on both sides of a plurality of plates 12 to be fired which are vertically arranged inside the crucible 11, and both sides of the pair of holding blocks 13 and 13. And a pair of weighting blocks 14 and 14 arranged in the. The holding block 13 has a vertical surface 13a formed in close contact with both ends of the plate 12 to be fired, and an upward inclined surface 13 formed on the opposite side of the vertical surface 13a.
As shown in FIG. 3, a plurality of ridges 13c are formed on the upward inclined surface 13b along the inclination direction. The ridge 13c in the present embodiment has a triangular cross section, and its apex is configured so as to come into contact with the downward inclined surface 14b of the weighting block 14 described later. The material of the holding block 13 is selected so that the reaction with the plate 12 to be fired is minimal as much as possible. MgO, Al 2 O 3 , Zr
O 2 and artificial graphite are exemplified.

【0009】図1及び図2に戻って、一対の保持用ブロ
ック13,13の両側に配置される一対の重し用ブロッ
ク14,14は、保持用ブロック13の上向き傾斜面1
3bと同一傾斜角度で形成された下向き傾斜面14b
と、この下向き傾斜面14bと反対側にはルツボ11の
内壁に接触可能に形成された端面14aが形成される。
重し用ブロック14は下向き傾斜面14bが保持用ブロ
ック13の上向き傾斜面13bに接触して、自重で降下
することにより保持用ブロック13を移動させるように
構成され、立てて並べられた複数枚の被焼成板12がな
ければ、ルツボ11の内底面下まで落ちてしまうもので
ある。従って、被焼成板12を、図のように、複数枚の
被焼成板12を立てて並べたときには、その被焼成板1
2により、図示のように、ある程度上昇した位置で留め
られることになる。
Referring back to FIGS. 1 and 2, the pair of weighting blocks 14 and 14 disposed on both sides of the pair of holding blocks 13 and 13 are the upwardly inclined surface 1 of the holding block 13.
Downwardly inclined surface 14b formed at the same inclination angle as 3b
Then, an end surface 14a formed so as to be in contact with the inner wall of the crucible 11 is formed on the side opposite to the downward inclined surface 14b.
The weighting block 14 is configured such that the downwardly inclined surface 14b comes into contact with the upwardly inclined surface 13b of the holding block 13 and moves downward by its own weight to move the holding block 13, and a plurality of standing blocks are arranged. Without the plate 12 to be fired, the crucible 11 would fall below the inner bottom surface. Therefore, when a plurality of plates 12 to be fired are arranged upright as shown in FIG.
2, it will be retained in a raised position as shown.

【0010】ルツボ11の内底面と立てて並べられた複
数の被焼成板12の下端面との間には被焼成板12と同
一材質を有する被焼成板の受け板16が設けられる。受
け板16は立てて並べられた複数枚の被焼成板12の下
端面が形成する四角形状より僅かに小さい四角状の外形
寸法に形成され、複数枚の被焼成板12の両側に配置さ
れた一対の保持用ブロック13,13の間に位置するよ
うに構成される。この受け板16と一対の保持用ブロッ
ク13,13は複数の小球17を介してルツボ11の内
底面11aにおかれ、受け板16と一対の保持用ブロッ
ク13,13はルツボ11の内底面11aに対して移動
が容易に行われるようになっている。なお、小球17の
材質は、焼成時の温度に十分耐え得るものが選定され、
MgO、Al23、ZrO2、サイアロン等からなる直
径が4〜30mm程度のものが好ましい。
Between the inner bottom surface of the crucible 11 and the lower end surfaces of the plurality of fired plates 12 which are vertically arranged, a receiving plate 16 of the fired plate made of the same material as the fired plates 12 is provided. The receiving plate 16 is formed to have a rectangular outer shape that is slightly smaller than the quadrangular shape formed by the lower end surfaces of the plurality of fired plates 12 that are vertically arranged, and is arranged on both sides of the plurality of fired plates 12. It is configured to be located between the pair of holding blocks 13, 13. The receiving plate 16 and the pair of holding blocks 13, 13 are placed on the inner bottom surface 11a of the crucible 11 via a plurality of small balls 17, and the receiving plate 16 and the pair of holding blocks 13, 13 are formed on the inner bottom surface of the crucible 11. 11a is easily moved. The material of the small balls 17 is selected so that it can withstand the temperature during firing.
It is preferable to use MgO, Al 2 O 3 , ZrO 2 , sialon or the like having a diameter of about 4 to 30 mm.

【0011】このように構成された被焼成板の焼成装置
では、複数枚の被焼成板12を受け板16の上に複数枚
立てて並べて焼成すると、被焼成板12は加熱されて収
縮する。この場合、受け板16は被焼成板12の収縮と
同一の速度及び比率で収縮し、被焼成板12のルツボ1
1の内底面11aとの間に生じる接触抵抗力を解消す
る。また、保持用ブロック13,13の両側に配置され
た一対の重し用ブロック14,14は図1の実線矢印で
示すように、自重で降下することにより被焼成板12の
収縮に伴い、保持用ブロック13を図の破線で示すよう
に移動させる。即ち、一対の重し用ブロック14,14
には、自重により常に降下しようとする力があり、その
力で、並べられた複数枚の被焼成板12を、一対の保持
用ブロック13,13を介して両側から均一な力で押す
ようになっている。
In the baking apparatus for baking the plate to be fired as described above, when a plurality of the plates to be baked 12 are stood on the receiving plate 16 side by side and baked, the plates to be baked 12 are heated and contract. In this case, the receiving plate 16 contracts at the same rate and rate as the contraction of the plate to be fired 12, and the crucible 1 of the plate to be fired 12 is contracted.
The contact resistance generated between the inner bottom surface 11a and the inner bottom surface 11a of 1 is eliminated. Further, the pair of weighting blocks 14 and 14 disposed on both sides of the holding blocks 13 and 13 are lowered by their own weight as shown by solid arrows in FIG. The block 13 is moved as shown by the broken line in the figure. That is, the pair of weighting blocks 14, 14
Has a force to constantly descend due to its own weight, and the force causes the plurality of fired plates 12 arranged side by side to be pushed by a uniform force from both sides via a pair of holding blocks 13 and 13. Has become.

【0012】受け板16の収縮及び保持用ブロック13
の移動の際、小球17は受け板16の収縮及び保持用ブ
ロック13の移動を回転することにより容易にし、保持
用ブロック13に形成された複数の凸条13cは、凸条
13cにおける頂点のみが重し用ブロック14の下向き
傾斜面14bと接触することにより接触面積を縮小さ
せ、重し用ブロック14が自重により降下する際に発生
する摺動抵抗を低減させる。なお、上述した実施の形態
ではルツボ11を使用して説明したが、ルツボの代りに
焼成炉を使用しても良い。
Block 13 for contracting and holding the receiving plate 16
At the time of the movement, the small balls 17 facilitate the contraction of the receiving plate 16 and the rotation of the holding block 13 by rotating, and the plurality of ridges 13c formed on the holding block 13 are only apexes of the ridges 13c. The contact area with the downwardly inclined surface 14b of the weighting block 14 is reduced, and sliding resistance generated when the weighting block 14 descends due to its own weight is reduced. Although the crucible 11 is used in the above embodiment, a firing furnace may be used instead of the crucible.

【0013】[0013]

【発明の効果】以上述べたように、本発明によれば、焼
成炉又はルツボの内部に立てて並べておかれる複数枚の
被焼成板の両側に上向き傾斜面を有する一対の保持用ブ
ロックを配置し、その一対の保持用ブロックの両側に下
向き傾斜面を有する一対の重し用ブロックを配置したの
で、複数の被焼成板を複数枚立てて並べて焼成すること
が可能になり、一対の重し用ブロックは自重で降下する
ことにより立てて並べられた複数枚の被焼成板が加熱収
縮する際にその被焼成板を一対の保持用ブロックを介し
て両側から均一な力で押す。この結果、被焼成板の焼成
時における変形が抑制され、かつ被焼成板に加わる力を
均一化することができる。
As described above, according to the present invention, a pair of holding blocks having upward inclined surfaces are arranged on both sides of a plurality of plates to be fired which are vertically arranged inside the firing furnace or crucible. However, since a pair of weighting blocks having a downward inclined surface is arranged on both sides of the pair of holding blocks, it becomes possible to stand and fire a plurality of sheets to be fired, and a pair of weights is placed. When the plurality of plates to be fired, which are vertically arranged by being lowered by its own weight, shrink due to heat, the plates to be fired are pressed from both sides by a uniform force through the pair of holding blocks. As a result, the deformation of the plate to be fired during firing can be suppressed, and the force applied to the plate to be fired can be made uniform.

【0014】また、焼成炉又はルツボの内底面と複数の
被焼成板の下端面との間に被焼成板と同一材質を有する
受け板を設けるので、受け板は焼成時における被焼成板
と同一の速度及び比率で収縮する。この結果、被焼成板
と焼成炉又はルツボの内底面との間に生じる接触抵抗力
を解消して被焼成板を複数枚同時に均一な品質で焼成す
ることができる。また、受け板と一対の保持用ブロック
を複数の小球を介して焼成炉又はルツボの内底面に置け
ば、小球が被焼成板の焼成時における受け板の収縮及び
保持用ブロックの移動を回転することにより容易にす
る。更に、上向き傾斜面に傾斜方向に沿って複数の凸条
を形成すれば、凸条における頂点のみが重し用ブロック
の下向き傾斜面に接触し、上向き傾斜面と下向き傾斜面
との接触面積を縮小させ、重し用ブロックが自重で降下
する際に発生する摺動抵抗を低減させることができる。
Further, since the receiving plate having the same material as the plate to be fired is provided between the inner bottom surface of the firing furnace or the crucible and the lower end faces of the plurality of plates to be fired, the receiving plate is the same as the plate to be fired during firing. Contract at the rate and rate of. As a result, it is possible to eliminate the contact resistance generated between the plate to be fired and the inner bottom surface of the firing furnace or the crucible, and to fire a plurality of plates to be fired at the same time with uniform quality. Further, if the receiving plate and the pair of holding blocks are placed on the inner bottom surface of the firing furnace or crucible through the plurality of small balls, the small balls can shrink the receiving plate and move the holding block during baking of the plate to be fired. Make it easier by rotating. Furthermore, if a plurality of ridges are formed along the sloping direction on the upward sloping surface, only the apexes of the ridges contact the downward sloping surface of the weighting block, and the contact area between the upward sloping surface and the downward sloping surface is increased. It is possible to reduce the sliding resistance which is generated when the weighting block is lowered by its own weight.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の焼成装置を示す図2のA−A線断面
図。
FIG. 1 is a sectional view taken along line AA of FIG. 2 showing a firing apparatus of the present invention.

【図2】その装置の斜視図。FIG. 2 is a perspective view of the device.

【図3】その装置の保持用ブロックを示す斜視図。FIG. 3 is a perspective view showing a holding block of the apparatus.

【図4】従来例を示す図1に対応する図。FIG. 4 is a diagram corresponding to FIG. 1 showing a conventional example.

【符号の説明】[Explanation of symbols]

11 ルツボ 11a 内底面 12 被焼成板 13 保持用ブロック 13a 鉛直面 13b 上向き傾斜面 13c 凸条 14 重し用ブロック 14a 端面 14b 下向き傾斜面 16 受け板 17 小球 11 crucibles 11a inner bottom surface 12 Plate to be fired 13 Holding block 13a Vertical plane 13b upward slope 13c convex stripe 14 Weighting block 14a end face 14b downward slope 16 Support plate 17 small balls

フロントページの続き (56)参考文献 特開 平5−296670(JP,A) (58)調査した分野(Int.Cl.7,DB名) F27D 3/12 C04B 35/64 Front page continuation (56) Reference JP-A-5-296670 (JP, A) (58) Fields investigated (Int.Cl. 7 , DB name) F27D 3/12 C04B 35/64

Claims (3)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 焼成炉又はルツボ(11)の内部に立てて並
べておかれる複数枚の被焼成板(12)の両側に配置され前
記被焼成板(12)の両端に密着可能に形成された鉛直面(1
3a)と前記鉛直面(13a)と反対側に形成された上向き傾斜
面(13b)とを有する一対の保持用ブロック(13,13)と、 前記一対の保持用ブロック(13,13)の両側に配置され前
記上向き傾斜面(13b)と同一傾斜角度で形成された下向
き傾斜面(14b)と前記下向き傾斜面(14b)と反対側に形成
され前記焼成炉又はルツボ(11)の内壁に接触可能に形成
された端面(14a)とを有する一対の重し用ブロック(14,1
4)とを備え、 前記焼成炉又はルツボ(11)の内底面(11a)と前記複数の
被焼成板(12)の下端面との間に前記被焼成板(12)と同一
材質を有する被焼成板の受け板(16)が設けられたことを
特徴とする被焼成板の焼成装置。
1. A firing furnace or crucible (11) is arranged on both sides of a plurality of fired plates (12) standing upright and arranged side by side so as to be adhered to both ends of the fired plate (12). Vertical (1
3a) and a pair of holding blocks (13, 13) having the upward inclined surface (13b) formed on the opposite side of the vertical surface (13a), and both sides of the pair of holding blocks (13, 13) And the downward slope (14b) formed at the same inclination angle as the upward slope (13b) and the opposite side of the downward slope (14b) to the inner wall of the firing furnace or crucible (11). A pair of weighting blocks (14, 1) having an end surface (14a) formed so that
4), and a substrate having the same material as the plate to be fired (12) between the inner bottom surface (11a) of the firing furnace or the crucible (11) and the lower end surface of the plurality of plates to be fired (12). A device for firing a plate to be fired, comprising a receiving plate (16) for the plate to be fired.
【請求項2】 受け板(16)と一対の保持用ブロック(13,
13)が複数の小球(17)を介して前記焼成炉又はルツボ(1
1)の内底面(11a)に置かれた請求項1記載の被焼成板の
焼成装置。
2. A receiving plate (16) and a pair of holding blocks (13,
13) is the firing furnace or crucible (1) through a plurality of small balls (17).
The apparatus for firing a plate to be fired according to claim 1, which is placed on the inner bottom surface (11a) of (1).
【請求項3】 上向き傾斜面(13b)に傾斜方向に沿って
複数の凸条(13c)が形成された請求項1又は2記載の被
焼成板の焼成装置。
3. The baking apparatus for a plate to be baked according to claim 1, wherein a plurality of convex stripes (13c) are formed on the upward inclined surface (13b) along the inclination direction.
JP19218597A 1997-07-17 1997-07-17 Sintering device for plate to be fired Expired - Fee Related JP3440981B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19218597A JP3440981B2 (en) 1997-07-17 1997-07-17 Sintering device for plate to be fired

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19218597A JP3440981B2 (en) 1997-07-17 1997-07-17 Sintering device for plate to be fired

Publications (2)

Publication Number Publication Date
JPH1137662A JPH1137662A (en) 1999-02-12
JP3440981B2 true JP3440981B2 (en) 2003-08-25

Family

ID=16287102

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19218597A Expired - Fee Related JP3440981B2 (en) 1997-07-17 1997-07-17 Sintering device for plate to be fired

Country Status (1)

Country Link
JP (1) JP3440981B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6335587B2 (en) * 2014-03-31 2018-05-30 株式会社荏原製作所 Substrate holding mechanism, substrate transfer device, semiconductor manufacturing device

Also Published As

Publication number Publication date
JPH1137662A (en) 1999-02-12

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