JP3444796B2 - Photosensitive resin composition - Google Patents
Photosensitive resin compositionInfo
- Publication number
- JP3444796B2 JP3444796B2 JP26835798A JP26835798A JP3444796B2 JP 3444796 B2 JP3444796 B2 JP 3444796B2 JP 26835798 A JP26835798 A JP 26835798A JP 26835798 A JP26835798 A JP 26835798A JP 3444796 B2 JP3444796 B2 JP 3444796B2
- Authority
- JP
- Japan
- Prior art keywords
- resin composition
- parts
- photosensitive resin
- film
- polyamic acid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000011342 resin composition Substances 0.000 title claims description 27
- 229920005575 poly(amic acid) Polymers 0.000 claims description 58
- 239000003960 organic solvent Substances 0.000 claims description 23
- 239000000126 substance Substances 0.000 claims description 16
- -1 acrylate compound Chemical class 0.000 claims description 14
- 239000002184 metal Substances 0.000 claims description 11
- 229910052751 metal Inorganic materials 0.000 claims description 11
- 239000002904 solvent Substances 0.000 claims description 11
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 claims description 9
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 claims description 8
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 claims description 6
- 238000001035 drying Methods 0.000 claims description 5
- 239000003999 initiator Substances 0.000 claims description 5
- 229920001515 polyalkylene glycol Polymers 0.000 claims description 4
- 230000001476 alcoholic effect Effects 0.000 claims description 3
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 claims description 2
- 239000012046 mixed solvent Substances 0.000 claims description 2
- 239000004033 plastic Substances 0.000 claims description 2
- 229920003023 plastic Polymers 0.000 claims description 2
- 238000007865 diluting Methods 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 description 22
- 239000000047 product Substances 0.000 description 21
- 238000003786 synthesis reaction Methods 0.000 description 21
- 238000000034 method Methods 0.000 description 19
- 230000000052 comparative effect Effects 0.000 description 18
- 239000007864 aqueous solution Substances 0.000 description 16
- 238000011161 development Methods 0.000 description 16
- 229910000679 solder Inorganic materials 0.000 description 16
- 238000012360 testing method Methods 0.000 description 14
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 12
- 239000004020 conductor Substances 0.000 description 12
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 11
- 239000004642 Polyimide Substances 0.000 description 11
- HVVWZTWDBSEWIH-UHFFFAOYSA-N [2-(hydroxymethyl)-3-prop-2-enoyloxy-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(CO)(COC(=O)C=C)COC(=O)C=C HVVWZTWDBSEWIH-UHFFFAOYSA-N 0.000 description 11
- 238000011156 evaluation Methods 0.000 description 11
- 229920001721 polyimide Polymers 0.000 description 11
- BTJPUDCSZVCXFQ-UHFFFAOYSA-N 2,4-diethylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(CC)=CC(CC)=C3SC2=C1 BTJPUDCSZVCXFQ-UHFFFAOYSA-N 0.000 description 10
- 239000011248 coating agent Substances 0.000 description 10
- 239000011889 copper foil Substances 0.000 description 10
- 238000000576 coating method Methods 0.000 description 9
- 238000013329 compounding Methods 0.000 description 9
- 239000000243 solution Substances 0.000 description 9
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 8
- 125000004386 diacrylate group Chemical group 0.000 description 8
- 229940113115 polyethylene glycol 200 Drugs 0.000 description 7
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 description 6
- 238000009413 insulation Methods 0.000 description 6
- 238000002156 mixing Methods 0.000 description 5
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical compound C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 4
- GOOHAUXETOMSMM-UHFFFAOYSA-N Propylene oxide Chemical compound CC1CO1 GOOHAUXETOMSMM-UHFFFAOYSA-N 0.000 description 4
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 239000007795 chemical reaction product Substances 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 4
- 229910052753 mercury Inorganic materials 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 238000007747 plating Methods 0.000 description 4
- 238000007650 screen-printing Methods 0.000 description 4
- 239000012956 1-hydroxycyclohexylphenyl-ketone Substances 0.000 description 3
- LZHUBCULTHIFNO-UHFFFAOYSA-N 2,4-dihydroxy-1,5-bis[4-(2-hydroxyethoxy)phenyl]-2,4-dimethylpentan-3-one Chemical compound C=1C=C(OCCO)C=CC=1CC(C)(O)C(=O)C(O)(C)CC1=CC=C(OCCO)C=C1 LZHUBCULTHIFNO-UHFFFAOYSA-N 0.000 description 3
- FGTYTUFKXYPTML-UHFFFAOYSA-N 2-benzoylbenzoic acid Chemical compound OC(=O)C1=CC=CC=C1C(=O)C1=CC=CC=C1 FGTYTUFKXYPTML-UHFFFAOYSA-N 0.000 description 3
- UCQABCHSIIXVOY-UHFFFAOYSA-N 3-[4-[4-(3-aminophenoxy)phenyl]phenoxy]aniline Chemical group NC1=CC=CC(OC=2C=CC(=CC=2)C=2C=CC(OC=3C=C(N)C=CC=3)=CC=2)=C1 UCQABCHSIIXVOY-UHFFFAOYSA-N 0.000 description 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- 244000028419 Styrax benzoin Species 0.000 description 3
- 235000000126 Styrax benzoin Nutrition 0.000 description 3
- 235000008411 Sumatra benzointree Nutrition 0.000 description 3
- 229960002130 benzoin Drugs 0.000 description 3
- MQDJYUACMFCOFT-UHFFFAOYSA-N bis[2-(1-hydroxycyclohexyl)phenyl]methanone Chemical compound C=1C=CC=C(C(=O)C=2C(=CC=CC=2)C2(O)CCCCC2)C=1C1(O)CCCCC1 MQDJYUACMFCOFT-UHFFFAOYSA-N 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 235000019382 gum benzoic Nutrition 0.000 description 3
- 230000000977 initiatory effect Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000002243 precursor Substances 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- HJIAMFHSAAEUKR-UHFFFAOYSA-N (2-hydroxyphenyl)-phenylmethanone Chemical compound OC1=CC=CC=C1C(=O)C1=CC=CC=C1 HJIAMFHSAAEUKR-UHFFFAOYSA-N 0.000 description 2
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 2
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 2
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- XTHFKEDIFFGKHM-UHFFFAOYSA-N Dimethoxyethane Chemical compound COCCOC XTHFKEDIFFGKHM-UHFFFAOYSA-N 0.000 description 2
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 150000008065 acid anhydrides Chemical class 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- 125000003118 aryl group Chemical group 0.000 description 2
- 229920005601 base polymer Polymers 0.000 description 2
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 description 2
- 239000011888 foil Substances 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 230000001771 impaired effect Effects 0.000 description 2
- 239000011229 interlayer Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000012299 nitrogen atmosphere Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 238000006116 polymerization reaction Methods 0.000 description 2
- 150000007519 polyprotic acids Polymers 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 229910000029 sodium carbonate Inorganic materials 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- UOCLXMDMGBRAIB-UHFFFAOYSA-N 1,1,1-trichloroethane Chemical compound CC(Cl)(Cl)Cl UOCLXMDMGBRAIB-UHFFFAOYSA-N 0.000 description 1
- LZDKZFUFMNSQCJ-UHFFFAOYSA-N 1,2-diethoxyethane Chemical compound CCOCCOCC LZDKZFUFMNSQCJ-UHFFFAOYSA-N 0.000 description 1
- GJZFGDYLJLCGHT-UHFFFAOYSA-N 1,2-diethylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=C(CC)C(CC)=CC=C3SC2=C1 GJZFGDYLJLCGHT-UHFFFAOYSA-N 0.000 description 1
- CYSGHNMQYZDMIA-UHFFFAOYSA-N 1,3-Dimethyl-2-imidazolidinon Chemical compound CN1CCN(C)C1=O CYSGHNMQYZDMIA-UHFFFAOYSA-N 0.000 description 1
- DKEGCUDAFWNSSO-UHFFFAOYSA-N 1,8-dibromooctane Chemical compound BrCCCCCCCCBr DKEGCUDAFWNSSO-UHFFFAOYSA-N 0.000 description 1
- YSTPZICNKYUMQJ-UHFFFAOYSA-N 1-(4-decylphenyl)-2-hydroxy-2-methylpropan-1-one Chemical compound CCCCCCCCCCC1=CC=C(C(=O)C(C)(C)O)C=C1 YSTPZICNKYUMQJ-UHFFFAOYSA-N 0.000 description 1
- VLDPXPPHXDGHEW-UHFFFAOYSA-N 1-chloro-2-dichlorophosphoryloxybenzene Chemical compound ClC1=CC=CC=C1OP(Cl)(Cl)=O VLDPXPPHXDGHEW-UHFFFAOYSA-N 0.000 description 1
- YNSNJGRCQCDRDM-UHFFFAOYSA-N 1-chlorothioxanthen-9-one Chemical compound S1C2=CC=CC=C2C(=O)C2=C1C=CC=C2Cl YNSNJGRCQCDRDM-UHFFFAOYSA-N 0.000 description 1
- RRQYJINTUHWNHW-UHFFFAOYSA-N 1-ethoxy-2-(2-ethoxyethoxy)ethane Chemical compound CCOCCOCCOCC RRQYJINTUHWNHW-UHFFFAOYSA-N 0.000 description 1
- CNJRPYFBORAQAU-UHFFFAOYSA-N 1-ethoxy-2-(2-methoxyethoxy)ethane Chemical compound CCOCCOCCOC CNJRPYFBORAQAU-UHFFFAOYSA-N 0.000 description 1
- KIAMPLQEZAMORJ-UHFFFAOYSA-N 1-ethoxy-2-[2-(2-ethoxyethoxy)ethoxy]ethane Chemical compound CCOCCOCCOCCOCC KIAMPLQEZAMORJ-UHFFFAOYSA-N 0.000 description 1
- KWVGIHKZDCUPEU-UHFFFAOYSA-N 2,2-dimethoxy-2-phenylacetophenone Chemical compound C=1C=CC=CC=1C(OC)(OC)C(=O)C1=CC=CC=C1 KWVGIHKZDCUPEU-UHFFFAOYSA-N 0.000 description 1
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 1
- FDSUVTROAWLVJA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol;prop-2-enoic acid Chemical compound OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OCC(CO)(CO)COCC(CO)(CO)CO FDSUVTROAWLVJA-UHFFFAOYSA-N 0.000 description 1
- DZZAHLOABNWIFA-UHFFFAOYSA-N 2-butoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OCCCC)C(=O)C1=CC=CC=C1 DZZAHLOABNWIFA-UHFFFAOYSA-N 0.000 description 1
- KMNCBSZOIQAUFX-UHFFFAOYSA-N 2-ethoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OCC)C(=O)C1=CC=CC=C1 KMNCBSZOIQAUFX-UHFFFAOYSA-N 0.000 description 1
- SJEBAWHUJDUKQK-UHFFFAOYSA-N 2-ethylanthraquinone Chemical compound C1=CC=C2C(=O)C3=CC(CC)=CC=C3C(=O)C2=C1 SJEBAWHUJDUKQK-UHFFFAOYSA-N 0.000 description 1
- RZCDMINQJLGWEP-UHFFFAOYSA-N 2-hydroxy-1,2-diphenylpent-4-en-1-one Chemical compound C=1C=CC=CC=1C(CC=C)(O)C(=O)C1=CC=CC=C1 RZCDMINQJLGWEP-UHFFFAOYSA-N 0.000 description 1
- QPXVRLXJHPTCPW-UHFFFAOYSA-N 2-hydroxy-2-methyl-1-(4-propan-2-ylphenyl)propan-1-one Chemical compound CC(C)C1=CC=C(C(=O)C(C)(C)O)C=C1 QPXVRLXJHPTCPW-UHFFFAOYSA-N 0.000 description 1
- XMLYCEVDHLAQEL-UHFFFAOYSA-N 2-hydroxy-2-methyl-1-phenylpropan-1-one Chemical compound CC(C)(O)C(=O)C1=CC=CC=C1 XMLYCEVDHLAQEL-UHFFFAOYSA-N 0.000 description 1
- LWRBVKNFOYUCNP-UHFFFAOYSA-N 2-methyl-1-(4-methylsulfanylphenyl)-2-morpholin-4-ylpropan-1-one Chemical compound C1=CC(SC)=CC=C1C(=O)C(C)(C)N1CCOCC1 LWRBVKNFOYUCNP-UHFFFAOYSA-N 0.000 description 1
- YTPSFXZMJKMUJE-UHFFFAOYSA-N 2-tert-butylanthracene-9,10-dione Chemical compound C1=CC=C2C(=O)C3=CC(C(C)(C)C)=CC=C3C(=O)C2=C1 YTPSFXZMJKMUJE-UHFFFAOYSA-N 0.000 description 1
- HLBLWEWZXPIGSM-UHFFFAOYSA-N 4-Aminophenyl ether Chemical compound C1=CC(N)=CC=C1OC1=CC=C(N)C=C1 HLBLWEWZXPIGSM-UHFFFAOYSA-N 0.000 description 1
- 239000004386 Erythritol Substances 0.000 description 1
- UNXHWFMMPAWVPI-UHFFFAOYSA-N Erythritol Natural products OCC(O)C(O)CO UNXHWFMMPAWVPI-UHFFFAOYSA-N 0.000 description 1
- AFCARXCZXQIEQB-UHFFFAOYSA-N N-[3-oxo-3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(CCNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 AFCARXCZXQIEQB-UHFFFAOYSA-N 0.000 description 1
- OFSAUHSCHWRZKM-UHFFFAOYSA-N Padimate A Chemical compound CC(C)CCOC(=O)C1=CC=C(N(C)C)C=C1 OFSAUHSCHWRZKM-UHFFFAOYSA-N 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- WUGQZFFCHPXWKQ-UHFFFAOYSA-N Propanolamine Chemical compound NCCCO WUGQZFFCHPXWKQ-UHFFFAOYSA-N 0.000 description 1
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 150000004984 aromatic diamines Chemical class 0.000 description 1
- 239000012752 auxiliary agent Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 1
- 239000012965 benzophenone Substances 0.000 description 1
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000006482 condensation reaction Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical compound OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 description 1
- 229940019778 diethylene glycol diethyl ether Drugs 0.000 description 1
- VFHVQBAGLAREND-UHFFFAOYSA-N diphenylphosphoryl-(2,4,6-trimethylphenyl)methanone Chemical compound CC1=CC(C)=CC(C)=C1C(=O)P(=O)(C=1C=CC=CC=1)C1=CC=CC=C1 VFHVQBAGLAREND-UHFFFAOYSA-N 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- UNXHWFMMPAWVPI-ZXZARUISSA-N erythritol Chemical compound OC[C@H](O)[C@H](O)CO UNXHWFMMPAWVPI-ZXZARUISSA-N 0.000 description 1
- 229940009714 erythritol Drugs 0.000 description 1
- 235000019414 erythritol Nutrition 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000007602 hot air drying Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 150000002762 monocarboxylic acid derivatives Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229920003986 novolac Polymers 0.000 description 1
- 125000005825 oxyethoxy group Chemical group [H]C([H])(O[*:1])C([H])([H])O[*:2] 0.000 description 1
- FZUGPQWGEGAKET-UHFFFAOYSA-N parbenate Chemical compound CCOC(=O)C1=CC=C(N(C)C)C=C1 FZUGPQWGEGAKET-UHFFFAOYSA-N 0.000 description 1
- 229920001281 polyalkylene Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- KCTAWXVAICEBSD-UHFFFAOYSA-N prop-2-enoyloxy prop-2-eneperoxoate Chemical compound C=CC(=O)OOOC(=O)C=C KCTAWXVAICEBSD-UHFFFAOYSA-N 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 238000010992 reflux Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 230000008961 swelling Effects 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- YFNKIDBQEZZDLK-UHFFFAOYSA-N triglyme Chemical compound COCCOCCOCCOC YFNKIDBQEZZDLK-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Production Of Multi-Layered Print Wiring Board (AREA)
- Materials For Photolithography (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Paints Or Removers (AREA)
- Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
- Non-Metallic Protective Coatings For Printed Circuits (AREA)
Description
【0001】[0001]
【発明の属する技術分野】本発明はポリアミド酸を主成
分とする感光性樹脂組成物に関する。より詳しくは本発
明は特定の構造を有するポリイミドの前駆体であるポリ
アミド酸に、特定の構造を有する(メタ)アクリレート
化合物、光重合開始剤を特定の比率で配合せしめること
により、良好な耐熱性、接着性、電気特性等を有し、更
には良好な伸び特性により、可とう性回路基板等の製造
に最適な、アルカリ水溶液で現像可能な液状レジストイ
ンキ組成物、カバーコート剤、多層プリント基板用絶縁
膜に関する。TECHNICAL FIELD The present invention relates to a photosensitive resin composition containing a polyamic acid as a main component. More specifically, the present invention provides a polyamic acid, which is a precursor of a polyimide having a specific structure, with a (meth) acrylate compound having a specific structure and a photopolymerization initiator in a specific ratio to obtain good heat resistance. A liquid resist ink composition that can be developed with an alkaline aqueous solution, a cover coat agent, and a multilayer printed circuit board, which have excellent adhesive properties, adhesive properties, electrical characteristics, and the like, and are also suitable for the production of flexible circuit boards, etc. For insulating film.
【0002】[0002]
【従来の技術】従来、プリント配線板は、スクリーン印
刷法でエッチングレジストまたはメッキレジストパター
ンを形成したレジストパターン形成後、金属箔のエッチ
ングまたはめっきを施し、所望の導体回路パターンを形
成していた。この導体回路パターンの酸化防止や絶縁性
を維持する目的から熱硬化性の樹脂組成物または光硬化
性の樹脂組成物を導体回路形成時と同様に、スクリーン
印刷法を用いて目的とする形状の皮膜を形成していた。
最近では、パターン密度を高めるために導体回路の微細
化が進んでいる。このことから導体回路形成時のエッチ
ングまたはめっきレジストもフォト法を用いて形成する
ことが広く用いられている。2. Description of the Related Art Conventionally, a printed wiring board has been formed with a desired conductive circuit pattern by etching or plating a metal foil after forming a resist pattern by forming an etching resist or a plating resist pattern by a screen printing method. A thermosetting resin composition or a photocurable resin composition having the desired shape is formed by screen printing using the screen printing method for the purpose of preventing oxidation of the conductor circuit pattern and maintaining insulation. It had formed a film.
Recently, miniaturization of conductor circuits is progressing in order to increase the pattern density. For this reason, it is widely used to form the etching or plating resist at the time of forming the conductor circuit by using the photo method.
【0003】フォト法で形成したエッチングまたはめっ
きレジストパターンは、スクリーン印刷法に比べて位置
精度や寸法精度が一段と高まっている。導体回路パター
ンの微細化と位置精度の向上と、更に実装部品の小型
化、ICパッケージのリードのファインピッチ化に依っ
て、ソルダーレジスト皮膜等の絶縁皮膜形成も画像精度
や位置精度の向上を必要とされていた。従って、近年で
は、精度良く皮膜形成ができる方法として上記フォト法
を用いて、ソルダーレジスト皮膜や絶縁皮膜を形成する
方法が広く使用されるようになった。The etching or plating resist pattern formed by the photo method has much higher positional accuracy and dimensional accuracy than the screen printing method. Due to miniaturization of conductor circuit pattern and improvement of position accuracy, and further miniaturization of mounting parts and fine pitch of leads of IC package, insulation film formation such as solder resist film also requires improvement of image accuracy and position accuracy. Was said. Therefore, in recent years, a method of forming a solder resist film or an insulating film by using the photo method has been widely used as a method of forming a film with high accuracy.
【0004】上記フォト法では、所望の大きさに感光性
樹脂組成物を塗布した後、必要に応じて乾燥して、感光
性皮膜を形成する。この感光性皮膜にネガのフォトマス
クを乗せて、紫外線等の活性光線で、露光焼き付けを行
う。フォトマスクの透明部分を透過した活性光線が感光
性皮膜を硬化させる。未露光部分は、現像で剥離して、
感光性皮膜を除去する。上記フォト法で形成した感光性
皮膜は更に、熱硬化や活性光線で硬化して、ソルダーレ
ジスト皮膜や絶縁皮膜に成るが、形成された画像は、フ
ォトマスクに極めて近い精度で形成できるため、微細な
画像や位置精度を容易に得ることができる。In the photo method, a photosensitive resin composition is applied to a desired size and then dried if necessary to form a photosensitive film. A negative photomask is placed on this photosensitive film, and exposure and baking are performed with active rays such as ultraviolet rays. The actinic rays that have passed through the transparent parts of the photomask cure the photosensitive film. The unexposed part is peeled off by development,
Remove the photosensitive film. The photosensitive film formed by the above photo method is further cured by heat or actinic rays to form a solder resist film or an insulating film, but since the formed image can be formed with an accuracy very close to that of a photomask, It is possible to easily obtain accurate images and positional accuracy.
【0005】しかしながら、この方法は、後に現像工程
を必要とする。現像では、未露光部の未硬化部分を有機
溶剤で溶解剥離することで除去していた。溶剤は、1,
1,1−トリクロロエタン等の毒性の強い溶剤または可
燃性の溶剤が一般的に使用されていて、作業安全性の面
からアルカリ水溶液を現像液としたフォトソルダーレジ
ストが望まれていた。そこで、アルカリ水溶液現像型の
フォトソルダーレジストの研究が近年盛んとなり、幾つ
かの組成物については開示されている。However, this method requires a developing step later. In the development, the uncured portion of the unexposed area was removed by dissolving and peeling with an organic solvent. The solvent is 1,
A highly toxic solvent such as 1,1-trichloroethane or a flammable solvent is generally used, and a photo solder resist using an alkaline aqueous solution as a developer has been desired from the viewpoint of work safety. Therefore, research on an alkaline aqueous solution development type photo solder resist has become popular in recent years, and some compositions have been disclosed.
【0006】例えば、特公昭56−40329公報に
は、エポキシ樹脂に不飽和モノカルボン酸を付加させ更
に多塩基酸無水物を付加させて成る反応生成物をベース
ポリマーとする感光性樹脂組成物が開示されている。特
開昭61−243869公報には、それぞれノボラック
型エポキシアクリレート等に多塩基酸無水物を付加させ
た反応生成物をベースポリマーとし、アルカリ水溶液を
現像液とするフォトソルダーレジスト組成物が開示され
ている。しかしながら、上記の組成物で得られるソルダ
ーレジスト皮膜は耐熱性、耐溶剤性や耐薬品性において
不十分であり、絶縁性、誘電率に関する特性も十分とは
いえない。また、可とう性に乏しいために、可とう性回
路基板には適用できない。For example, Japanese Patent Publication No. 56-40329 discloses a photosensitive resin composition having a base polymer as a reaction product obtained by adding an unsaturated monocarboxylic acid to an epoxy resin and further adding a polybasic acid anhydride. It is disclosed. JP-A-61-243869 discloses a photo solder resist composition containing a reaction product obtained by adding a polybasic acid anhydride to a novolac type epoxy acrylate as a base polymer and an alkaline aqueous solution as a developing solution. There is. However, the solder resist film obtained from the above composition is insufficient in heat resistance, solvent resistance and chemical resistance, and the properties relating to insulation and dielectric constant are not sufficient. In addition, since it is poor in flexibility, it cannot be applied to a flexible circuit board.
【0007】また、ポリイミド前駆体であるポリアミド
酸を加熱処理することによって得られるポリイミドが、
その優れた耐熱性、誘電特性から、ICの保護膜、層間
絶縁膜として使用されており、さらに、露光、現像によ
り直接パターンが形成できる感光性ポリイミド前駆体が
提案されている(特開昭60−228537公報、特開
昭59−52822号公報)。しかしながら、これらの
感光性ポリイミドは、現像に有機溶剤が使用されてお
り、作業安全の観点から、アルカリ水溶液で現像できる
感光性ポリイミドが望まれている。また、上記感光性ポ
リイミドは、銅箔等の導体との接着力が不十分であり、
十分な接着力を得るためには、導体表面を粗化するなど
の、なんらかの処理が必要である。更には、可とう性回
路基板に適用できるだけの十分な硬化皮膜の伸びにも欠
ける。Further, a polyimide obtained by heat-treating a polyamic acid that is a polyimide precursor is
Due to its excellent heat resistance and dielectric properties, it has been proposed as a photosensitive polyimide precursor which has been used as a protective film for ICs and an interlayer insulating film, and can form a pattern directly by exposure and development (Japanese Patent Laid-Open No. Sho 60). -228537, JP-A-59-52822). However, these photosensitive polyimides use organic solvents for development, and from the viewpoint of work safety, photosensitive polyimides that can be developed with an alkaline aqueous solution are desired. Further, the photosensitive polyimide has insufficient adhesion with a conductor such as copper foil,
In order to obtain a sufficient adhesive force, some treatment such as roughening the conductor surface is required. Further, it does not have sufficient elongation of the cured film to be applied to the flexible circuit board.
【0008】[0008]
【発明が解決しようとする課題】本発明の目的は、水酸
化ナトリウム水溶液、炭酸ナトリウム水溶液等のアルカ
リ水溶液で現像することができるとともに、露光による
画像の焼き付け時に十分に硬化した皮膜を得ることがで
き、現像後の熱処理によるイミド化後の皮膜特性とし
て、優れた耐熱性、導体との接着性、電気特性、更には
良好な伸び特性により、可とう性を発現する感光性樹脂
組成物やフォトソルダーレジスト、可とう性回路基板の
カバーコート剤に適した感光性樹脂組成物を提供するこ
とである。これらの感光性皮膜により耐熱、耐酸化性、
電気絶縁特性に優れた金属加工品を提供することであ
る。An object of the present invention is to obtain a film which can be developed with an alkaline aqueous solution such as an aqueous solution of sodium hydroxide or an aqueous solution of sodium carbonate and which is sufficiently cured when an image is printed by exposure. As a film property after imidization by heat treatment after development, excellent heat resistance, adhesiveness with a conductor, electrical properties, and further good elongation properties make a photosensitive resin composition or a photo-sensitive resin composition exhibiting flexibility. A photosensitive resin composition suitable for a solder resist and a cover coating agent for a flexible circuit board. With these photosensitive films, heat resistance, oxidation resistance,
It is to provide a metal processed product having excellent electric insulation properties.
【0009】[0009]
【課題を解決するための手段】すなわち、本発明は、
(1) (A)下記式(1)〔化3〕That is, the present invention is
(1) (A) The following formula (1) [Chemical formula 3]
【0010】[0010]
【化3】 (式中Rは、式(2)〔化4〕[Chemical 3] (In the formula, R is the formula (2)
【0011】[0011]
【化4】
を表す。)で表される繰り返し単位を有し、それの対数
粘度(N,N−ジメチルアセトアミド溶媒、濃度0.5
g/100ml、35℃で測定)が0.3〜1.0dl
/gであるポリアミド酸、100重量部に対して、
(B)アルコール性水酸基を含有し、少なくとも3つ以
上の光重合可能なC−C不飽和2重結合を有する(メ
タ)アクリレート化合物、10〜50重量部と、(C)
ポリアルキレングリコールジ(メタ)アクリレート化合
物、10〜50重量部と、(D)光重合開始剤を必須成
分として配合せしめた感光性樹脂組成物、(2)
(1)に記載の感光性樹脂組成物を、含チッソ有機溶剤
100部に対し、10〜1000部のグリコールエーテ
ル系有機溶剤を含む混合溶剤で希釈してなる感光性樹脂
組成物、および(3) 硬化後の皮膜の伸び率が20%
以上であることを特徴とする、(1)に記載の感光性樹
脂組成物、および(4) (1)に記載の感光性樹脂組
成物を金属、プラスチックまたはセラミックに塗布乾燥
して形成してなる感光性皮膜を有する加工品、を提供す
るものである。[Chemical 4] Represents ), The logarithmic viscosity thereof (N, N-dimethylacetamide solvent, concentration 0.5
g / 100 ml, measured at 35 ° C.) is 0.3 to 1.0 dl
/ G of polyamic acid, relative to 100 parts by weight,
(B) a (meth) acrylate compound containing an alcoholic hydroxyl group and having at least three or more photopolymerizable C-C unsaturated double bonds, 10 to 50 parts by weight, and (C)
A photosensitive resin composition containing 10 to 50 parts by weight of a polyalkylene glycol di (meth) acrylate compound and (D) a photopolymerization initiator as essential components, (2)
The photosensitive resin composition according to (1) is diluted with a mixed solvent containing 10 to 1000 parts of a glycol ether organic solvent with respect to 100 parts of a nitrogen-containing organic solvent, and (3) ) Elongation of cured film is 20%
The photosensitive resin composition according to (1), and (4) the photosensitive resin composition according to (1) are applied to a metal, a plastic, or a ceramic to be dried. The present invention provides a processed product having the following photosensitive film.
【0012】[0012]
【発明の実施の形態】本発明に用いるポリアミド酸、す
なわち、前記式(1)で表される繰り返し単位を有する
重合体は、芳香族ジアミンとして4,4’−ビス(3−
アミノフェノキシ)ビフェニルを使用し、また芳香族二
酸無水物として3,3’−4,4’−ビフェニルテトラ
カルボン酸二無水物を使用する。これらを、有機溶剤
中、縮合させて製造することができる(特開昭62−6
8817号公報に記載)。BEST MODE FOR CARRYING OUT THE INVENTION The polyamic acid used in the present invention, that is, a polymer having a repeating unit represented by the above formula (1) is 4,4'-bis (3-
Aminophenoxy) biphenyl is used and 3,3'-4,4'-biphenyltetracarboxylic dianhydride is used as the aromatic dianhydride. These can be produced by condensation in an organic solvent (JP-A-62-6).
8817).
【0013】上記の縮合反応において、反応温度は通常
10〜60℃、好ましくは20〜50℃であり、圧力は
特に限定されず、常圧で十分行うことができる。反応時
間は、使用する有機溶剤の種類、及び反応温度によりこ
となるが、通常、ポリアミド酸の生成が完了するに十分
な時間、すなわち4〜24時間である。本発明におい
て、上記のように得られるポリアミド酸の対数粘度は
0.3〜1.0dl/gの範囲であることが必要であ
る。 ここで、対数粘度とは次の数式
(1)〔数1〕In the above condensation reaction, the reaction temperature is usually 10 to 60 ° C., preferably 20 to 50 ° C., and the pressure is not particularly limited, and the reaction can be carried out at normal pressure. The reaction time varies depending on the type of organic solvent used and the reaction temperature, but is usually a time sufficient to complete the production of polyamic acid, that is, 4 to 24 hours. In the present invention, the polyamic acid obtained as described above needs to have an inherent viscosity of 0.3 to 1.0 dl / g. Here, the logarithmic viscosity means the following mathematical expression (1) [Equation 1]
【0014】[0014]
【数1】
対数粘度=ln(η/η0 )/C (1)
(式中、lnは自然対数、ηは溶媒のN,N−ジメチル
アセトアミド100ml中にポリアミド酸0.5gを溶
かした溶液の35℃で測定した粘度、η0 は該溶媒の3
5℃で測定した粘度、及びCは該溶媒100ml当たり
ポリアミド酸のgで表された重合体の溶液濃度であ
る。)で算出した値である。このポリアミド酸の対数粘
度が0.3dl/g未満では、ポリアミド酸の重合度が
小さく、現像時、露光部の塗膜が十分な強度を得られな
い。一方、この対数粘度が1.0dl/gを越えると、
ポリアミド酸の重合度が余りにも大きくなり、現像時、
未露光部が溶解不良となる。この対数粘度は、芳香族ジ
アミンと芳香族二酸無水物のモル比を変えることによ
り、任意に調整できる。## EQU1 ## Logarithmic viscosity = ln (η / η 0 ) / C (1) (wherein is a natural logarithm, η is a solution prepared by dissolving 0.5 g of polyamic acid in 100 ml of N, N-dimethylacetamide as a solvent). Viscosity measured at 35 ° C., η 0 is 3 of the solvent
The viscosity measured at 5 ° C. and C are the solution concentrations of the polymer in g of polyamic acid per 100 ml of the solvent. ) Is the value calculated in. When the logarithmic viscosity of the polyamic acid is less than 0.3 dl / g, the polyamic acid has a low degree of polymerization, and the coating film in the exposed portion cannot have sufficient strength during development. On the other hand, when this logarithmic viscosity exceeds 1.0 dl / g,
The degree of polymerization of polyamic acid becomes too large, and during development,
The unexposed area is poorly dissolved. This logarithmic viscosity can be arbitrarily adjusted by changing the molar ratio of the aromatic diamine and the aromatic dianhydride.
【0015】本発明に用いる溶剤は、含チッソ系有機溶
剤である。含チッソ系有機溶剤としては、N,N−ジメ
チルホルムアミド、N,N−ジメチルアセトアミド、N
−メチル−2−ピロリドン、1,3−ジメチル−2−イ
ミダゾリジノン等が挙げられる。The solvent used in the present invention is a nitrogen-containing organic solvent. As the nitrogen-containing organic solvent, N, N-dimethylformamide, N, N-dimethylacetamide, N
-Methyl-2-pyrrolidone, 1,3-dimethyl-2-imidazolidinone and the like.
【0016】本発明では、含チッソ系有機溶剤とグリコ
ールエーテル系有機溶剤を併用することが好ましい。グ
リコールエーテル系有機溶剤としては、エチレングリコ
ールジメチルエーテル、エチレングリコールジエチルエ
ーテル、ジエチレングリコールジメチルエーテル、ジエ
チレングリコールジエチルエーテル、ジエチレングリコ
ールメチルエチルエーテル、トリエチレングリコールジ
メチルエーテル、トリエチレングリコールジエチルエー
テル等が挙げられる。含チッソ系有機溶剤またはグリコ
ールエーテル系有機溶剤は2種以上混合して使用するこ
ともできる。In the present invention, it is preferable to use a nitrogen-containing organic solvent and a glycol ether organic solvent in combination. Examples of the glycol ether-based organic solvent include ethylene glycol dimethyl ether, ethylene glycol diethyl ether, diethylene glycol dimethyl ether, diethylene glycol diethyl ether, diethylene glycol methyl ethyl ether, triethylene glycol dimethyl ether, and triethylene glycol diethyl ether. Two or more kinds of nitrogen-containing organic solvents or glycol ether organic solvents may be mixed and used.
【0017】より好ましくは、上記含チッソ系有機溶剤
とグリコールエーテル系有機溶剤の混合割合は、含チッ
ソ系有機溶剤100重量部に対しグリコールエーテル系
有機溶剤が10重量部〜1000重量部、更に好ましく
は、20重量部〜500重量部の範囲である。グリコー
ルエーテル系有機溶剤の量が10重量部未満では、アル
カリ現像の際に、塗膜にクラックが生じる。また、グリ
コールエーテル系有機溶剤の量が1000重量部を越え
ると、ポリアミド酸の溶解が困難になり好ましくない。More preferably, the mixing ratio of the above-mentioned nitrogen-containing organic solvent and glycol ether-based organic solvent is 10 parts by weight to 1000 parts by weight of the glycol-ether-based organic solvent, more preferably 100 parts by weight of the nitrogen-containing organic solvent. Is in the range of 20 to 500 parts by weight. If the amount of the glycol ether-based organic solvent is less than 10 parts by weight, cracks will occur in the coating film during alkali development. Further, if the amount of the glycol ether type organic solvent exceeds 1000 parts by weight, it becomes difficult to dissolve the polyamic acid, which is not preferable.
【0018】本発明に用いる、アルコール性水酸基を含
有し、少なくても3つ以上の光重合可能なC−C不飽和
2重結合を有する(メタ)アクリレート化合物として
は、ペンタエリスリトールトリアクリレート、ペンタエ
リスリトールトリメタアクリレート、ジペンタエリスリ
トールペンタアクリレート、ジペンタエリスリトールペ
ンタメタアクリレート等が挙げられるが、該ポリアミド
酸との相溶性、また露光時の硬化性、更には、現像時の
アルカリ水溶液への未露光部の溶解性から、ペンタエリ
スリトールトリアクリレートが最も好ましい。Examples of the (meth) acrylate compound containing an alcoholic hydroxyl group and having at least three or more photopolymerizable C-C unsaturated double bonds used in the present invention include pentaerythritol triacrylate and pentaerythritol triacrylate. Examples thereof include erythritol trimethacrylate, dipentaerythritol pentaacrylate, and dipentaerythritol pentamethacrylate. Compatibility with the polyamic acid, curability during exposure, and unexposed to an alkaline aqueous solution during development From the solubility of parts, pentaerythritol triacrylate is most preferable.
【0019】上記(メタ)アクリレート化合物の配合量
は、該ポリアミド酸100重量部に対して10〜50重
量部である。10重量部未満では、露光後の皮膜が十分
に硬化せず、またアルカリ現像の際に、未露光部が完全
に溶解せず現像残りを生じる。50重量部を越えると露
光部の可とう性を損ない、露光後の皮膜の伸び率が著し
く低下する。本発明に用いる、ポリアルキレングリコー
ルジ(メタ)アクリレート化合物としては、つぎの式、
式3〔化3〕〜式8〔化10〕で示される化合物が挙げ
られる。The blending amount of the (meth) acrylate compound is 10 to 50 parts by weight with respect to 100 parts by weight of the polyamic acid. If the amount is less than 10 parts by weight, the film after exposure is not sufficiently cured, and the unexposed portion is not completely dissolved during alkali development, resulting in residual development. If it exceeds 50 parts by weight, the flexibility of the exposed area is impaired, and the elongation of the film after exposure is significantly reduced. The polyalkylene glycol di (meth) acrylate compound used in the present invention has the following formula:
Examples include compounds represented by Formula 3 [Chemical Formula 3] to Formula 8 [Chemical Formula 10].
【0020】[0020]
【化5】 (式中、nは2〜12である。)[Chemical 5] (In the formula, n is 2 to 12.)
【0021】[0021]
【化6】 (式中、nは2〜12である。)[Chemical 6] (In the formula, n is 2 to 12.)
【0022】[0022]
【化7】 (式中、nは2〜12である。)[Chemical 7] (In the formula, n is 2 to 12.)
【0023】[0023]
【化8】 (式中、nは2〜12である。)[Chemical 8] (In the formula, n is 2 to 12.)
【0024】[0024]
【化9】 (式中、nは2〜12である。)[Chemical 9] (In the formula, n is 2 to 12.)
【0025】[0025]
【化10】
(式中、nは2〜12である。)
上記ポリアルキレンジ(メタ)アクリレート化合物の配
合量は、該ポリアミド酸に対して10〜50重量部であ
る。10重量部未満では、露光部の可とう性が十分でな
く、露光後の皮膜の伸び率が低下する。50重量部を越
えると、耐熱性が著しく損なわれる。[Chemical 10] (In formula, n is 2-12.) The compounding quantity of the said polyalkylene di (meth) acrylate compound is 10-50 weight part with respect to this polyamic acid. If it is less than 10 parts by weight, the flexibility of the exposed portion is insufficient and the elongation of the film after exposure is lowered. If it exceeds 50 parts by weight, the heat resistance is significantly impaired.
【0026】本発明に用いる光重合開始剤は公知のもの
であり、具体的にはベンゾフェノン、ミヒラーケトン、
ベンゾイン、ベンゾインエチルエーテル、ベンゾインブ
チルエーテル、ベンゾインイソブチルエーテル、2,2
−ジメトキシ−2−フェニルアセトフェノン、2−ヒド
ロキシ2−フェニルアセトフェノン、2−ヒドロキシー
2−メチルプロピオフェノン、2−ヒドロキシ−4−イ
ソプロピル−2−メチルプロピオフェノン、2−エチル
アントラキノン、2−t−ブチルアントラキノン、ジエ
チルチオキサントン、クロルチオキサントン、ベンジ
ル、ベンジルジメチルケタール、1−ヒドロキシシクロ
ヘキシルフェニルケトン、ベンゾイル安息香酸、2−メ
チル−1−(4−メチルチオフェニル)−2−モルホリ
ノプロパン−1−オン、2,4,6トリメチルベンゾイ
ルジフェニルホスフィンオキサイド等が挙げられる。The photopolymerization initiator used in the present invention is a known one, specifically, benzophenone, Michler's ketone,
Benzoin, Benzoin ethyl ether, Benzoin butyl ether, Benzoin isobutyl ether, 2,2
-Dimethoxy-2-phenylacetophenone, 2-hydroxy-2-phenylacetophenone, 2-hydroxy-2-methylpropiophenone, 2-hydroxy-4-isopropyl-2-methylpropiophenone, 2-ethylanthraquinone, 2-t- Butylanthraquinone, diethylthioxanthone, chlorothioxanthone, benzyl, benzyldimethylketal, 1-hydroxycyclohexylphenyl ketone, benzoylbenzoic acid, 2-methyl-1- (4-methylthiophenyl) -2-morpholinopropan-1-one, 2, 4,6 trimethyl benzoyl diphenyl phosphine oxide etc. are mentioned.
【0027】さらにベンゾインとエチレンオキサイドの
等モル付加物や、2倍モル付加物から4倍モル付加物、
ベンゾインとプロピレンオキサイドの等モル付加物や2
倍モル付加物から4倍モル付加物、α−アリルベンゾイ
ン、1−ヒドロキシシクロヘキシルフェニルケトンとエ
チレンオキサイドの等モル付加物、2倍モル付加物から
4倍モル付加物、1−ヒドロキシシクロヘキシルフェニ
ルケトンとプロピレンオキサイドの等モル付加物、2倍
モル付加物から4倍モル付加物、ベンゾイル安息香酸と
エチレングリコール等モル反応物、ベンゾイル安息香酸
とプロピレングリコール等モル反応物、ヒドロキシベン
ゾフェノンとエチレンオキサイドの等モル付加物、2倍
モル付加物から4倍モル付加物、ヒドロキシベンゾフェ
ノンとプロピレンオキサイドの等モル付加物、2倍モル
付加物、4倍モルフカ物、4−(2−ヒドロキシエトキ
シ)フェニル−(2−ヒドロキシ−2−プロピル)ケト
ン、4−(2−アクロオキシエトキシ)−フェニル−
(2−ヒドロキシ−2−プロピル)ケトン、4−(2−
ヒドロキシエトキシ)フェニル−(2−ヒドロキシ−2
−プロピル)ケトンとエチレンオキサイドの等モル付加
物、2倍モル付加物から4倍モル付加物、4−(2−ヒ
ドロキシエトキシ)フェニル−(2−ヒドロキシ−2−
プロピル)ケトンとプロピレンオキサイドの等モル付加
物、2倍モル付加物から4倍モル付加物、1−(4−イ
ソプロピルフェニル)−2−ヒドロキシー2−メチルプ
ロパンー1−オン、1−(4−デシルフェニル)−2−
ヒドロキシ−2−メチルプロパン−1−オン等が挙げら
れる。これらは1種または2種以上混合して使用する。Further, an equimolar addition product of benzoin and ethylene oxide, a 2-fold addition product to a 4-fold addition product,
An equimolar addition product of benzoin and propylene oxide or 2
4-fold mole addition product to 4-fold mole addition product, α-allylbenzoin, equimolar addition product of 1-hydroxycyclohexylphenyl ketone and ethylene oxide, 2-fold addition product to 4-fold addition product, 1-hydroxycyclohexylphenyl ketone Equimolar adduct of propylene oxide, 2-molar to 4-molar adduct, benzoylbenzoic acid and ethylene glycol equimolar reaction product, benzoylbenzoic acid and propylene glycol equimolar reaction product, hydroxybenzophenone and ethylene oxide equimolar product Addition product, 2-fold addition product to 4-fold addition product, equimolar addition product of hydroxybenzophenone and propylene oxide, 2-fold addition product, 4-fold addition product, 4- (2-hydroxyethoxy) phenyl- (2- Hydroxy-2-propyl) ketone, 4- (2-a B oxy ethoxy) - phenyl -
(2-hydroxy-2-propyl) ketone, 4- (2-
Hydroxyethoxy) phenyl- (2-hydroxy-2
-Propyl) ketone and ethylene oxide equimolar adduct, 2-molar adduct to 4-molar adduct, 4- (2-hydroxyethoxy) phenyl- (2-hydroxy-2-
Propyl) ketone and propylene oxide equimolar addition product, 2-fold molar addition product to 4-fold molar addition product, 1- (4-isopropylphenyl) -2-hydroxy-2-methylpropan-1-one, 1- (4- Decylphenyl) -2-
Hydroxy-2-methylpropan-1-one and the like can be mentioned. These are used alone or in combination of two or more.
【0028】また公知光重合開始助剤を併用してもよ
い。これら光重合開始助剤として具体的には、トリエタ
ノールアミン、ジエタノールアミン、エタノールアミ
ン、トリプロパノールアミン、ジプロパノールアミン、
プロパノールアミン、4−ジメチルアミノ安息香酸エチ
ル、4−ジメチルアミノ安息香酸イソアミル等が挙げら
れる。上記光重合開始助剤は1種または2種以上混合し
て使用する。上記光重合開始剤の感光性樹脂組成物の固
形分総量に対する配合量は0.1wt%〜20wt%、
より好ましくは1.0wt%〜10wt%である。Further, a known photopolymerization initiation auxiliary agent may be used in combination. As these photopolymerization initiation aids, specifically, triethanolamine, diethanolamine, ethanolamine, tripropanolamine, dipropanolamine,
Propanolamine, ethyl 4-dimethylaminobenzoate, isoamyl 4-dimethylaminobenzoate and the like can be mentioned. The photopolymerization initiation aid is used alone or in combination of two or more. The blending amount of the photopolymerization initiator with respect to the total solid content of the photosensitive resin composition is 0.1 wt% to 20 wt%,
More preferably, it is 1.0 wt% to 10 wt%.
【0029】該感光性樹脂組成物を使用して、金属や金
属積層板の表面にソルダーレジスト皮膜や絶縁皮膜を形
成する方法は、既に公知のロールコーターやスクリーン
塗布、バーコーター等を用いて容易に塗布することがで
きる。塗布した感光性樹脂組成物は、有機溶剤を揮発さ
せることで感光性皮膜となるが、乾燥も公知の方法でよ
く、例えば、熱風乾燥機や遠赤外線、近赤外線等の乾燥
機を用いて50〜150℃で10〜60分乾燥すること
で感光性皮膜を形成することができる。感光性皮膜の膜
厚は、5〜200μm が適当で、好ましくは15〜10
0μmである。膜厚が5μm に満たないと、絶縁信頼性
が乏しく、200μm を越えると露光感度の低下を招
き、現像時間がかかるので好ましくない。The method of forming a solder resist film or an insulating film on the surface of a metal or a metal laminated plate using the photosensitive resin composition can be easily performed by using a known roll coater, screen coating, bar coater or the like. Can be applied to. The applied photosensitive resin composition becomes a photosensitive film by volatilizing an organic solvent, but drying may be performed by a known method, for example, using a hot air dryer, a far infrared ray, a near infrared ray, or the like. A photosensitive film can be formed by drying at ~ 150 ° C for 10 to 60 minutes. The thickness of the photosensitive film is appropriately 5 to 200 μm, preferably 15 to 10 μm.
It is 0 μm. If the film thickness is less than 5 μm, the insulation reliability is poor, and if it exceeds 200 μm, the exposure sensitivity is deteriorated and the developing time is long, which is not preferable.
【0030】また、本発明の感光性樹脂組成物は、ソル
ダーレジスト皮膜や絶縁皮膜の形成材料となるばかりで
なく、ポリエチレン、ポリプロピレン、ポリエステル等
の無色透明なフィルムに塗布乾燥することで、感光性フ
ィルムを得ることができる。Further, the photosensitive resin composition of the present invention not only serves as a material for forming a solder resist film or an insulating film, but is also applied to a colorless and transparent film such as polyethylene, polypropylene, polyester or the like to obtain a photosensitive resin composition. A film can be obtained.
【0031】上記感光性フィルムは、上記した膜厚10
〜100μm のフィルムに、リバースロールコーターや
グラビアロールコーター、コンマコーター、カーテンコ
ーター等の、公知の方法で塗布することができる。乾燥
は、熱風乾燥や遠赤外線、近赤外線を用いた乾燥機で温
度50〜120℃で乾燥でき、より好ましくは60〜1
00℃で10〜60分乾燥することにより、感光性フィ
ルムを得ることができる。この際の感光性樹脂組成物の
膜厚は、5〜200μm であり、より好ましくは15〜
100μm である。膜厚が5μm に満たないと、絶縁信
頼性に欠け、200μm を越えると露光感度の低下を招
き、現像に時間がかかるので好ましくない。The photosensitive film has a film thickness of 10 described above.
A film having a thickness of up to 100 μm can be coated by a known method such as a reverse roll coater, a gravure roll coater, a comma coater or a curtain coater. Drying can be carried out at a temperature of 50 to 120 ° C. with a dryer using hot air drying, far infrared rays, or near infrared rays, and more preferably 60 to 1
A photosensitive film can be obtained by drying at 00 ° C. for 10 to 60 minutes. At this time, the film thickness of the photosensitive resin composition is 5 to 200 μm, more preferably 15 to 200 μm.
It is 100 μm. If the film thickness is less than 5 μm, the insulation reliability will be insufficient, and if it exceeds 200 μm, the exposure sensitivity will be lowered and development will take a long time, which is not preferable.
【0032】なお、上記感光性フィルムを用いて、ソル
ダーレジスト皮膜や絶縁皮膜を得るには、平板プレスや
ロールプレス等の公知の方法により、40〜150℃に
加熱しながら、98kPa〜490kPa(1〜5Kg
f/cm2 )で熱圧着することで感光性皮膜を金属板や
金属積層板の表面に形成することができる。このように
して、感光性皮膜は、通常のフォトマスクを用いて露光
される。この際に使用される活性光線としては、例え
ば、紫外線、電子線、X線等が挙げられるが、これらの
中でより好ましくは紫外線であり、その光源としては、
例えば、低圧水銀灯、高圧水銀灯、超高圧水銀灯、ハロ
ゲンランプ等が挙げられる。In order to obtain a solder resist film or an insulating film using the above-mentioned photosensitive film, 98 kPa to 490 kPa (1) while heating at 40 to 150 ° C. by a known method such as a flat plate press or a roll press. ~ 5 Kg
By thermocompression bonding at f / cm 2 ), the photosensitive film can be formed on the surface of the metal plate or the metal laminated plate. In this way, the photosensitive film is exposed using a normal photomask. Examples of the actinic ray used at this time include ultraviolet rays, electron beams, X-rays and the like. Among these, ultraviolet rays are more preferable, and the light source thereof is
For example, a low pressure mercury lamp, a high pressure mercury lamp, a super high pressure mercury lamp, a halogen lamp, etc. are mentioned.
【0033】露光後、現像液を使用して現像を行う際に
は、浸漬法やスプレー法を用いることができる。現像液
としては、水酸化ナトリウム水溶液、炭酸ナトリウム水
溶液等のアルカリ水溶液が使用される。現像後は、希塩
酸、希硫酸等の酸性水溶液でリンスすることが望まし
い。現像によって得られたパターンは、その後、加熱処
理することによって、ポリイミドのパターンに変換され
る。加熱処理は、150〜450℃の温度のもとで、
0.1〜5時間、連続的または段階的に行われる。When the development is carried out using a developing solution after the exposure, an immersion method or a spray method can be used. As the developer, an alkaline aqueous solution such as an aqueous sodium hydroxide solution or an aqueous sodium carbonate solution is used. After development, it is desirable to rinse with an acidic aqueous solution such as diluted hydrochloric acid or diluted sulfuric acid. The pattern obtained by the development is then converted into a polyimide pattern by heat treatment. The heat treatment is performed at a temperature of 150 to 450 ° C.
It is carried out continuously or stepwise for 0.1 to 5 hours.
【0034】[0034]
【実施例】以下、実施例および比較例により本発明を具
体的に説明するが、本発明はこれらに限定されるもので
はない。
〔合成例1〕 (ポリアミド酸PA1)
反応器(攪拌機、還流冷却器および窒素導入管付き)
中、窒素雰囲気下、N,N−ジメチルアセトアミド13
5g、ジエチレングリコールジメチルエーテル135g
に4,4’−ビス(3−アミノフェノキシ)ビフェニル
67.16g(0.1825モル)を溶解し、これを攪
拌しながら、3,3’−4,4’−ビフェニルテトラカ
ルボン酸二無水物53.214g(0.1810モル)
を乾燥固体のまま少量ずつ添加した。この間、反応器の
温度を25〜30℃に保ち、添加後20時間、窒素雰囲
気下で攪拌を継続し、固形分30%のポリアミド酸を得
た。このポリアミド酸の対数粘度を表1に示す。EXAMPLES The present invention will be specifically described below with reference to Examples and Comparative Examples, but the present invention is not limited thereto. [Synthesis Example 1] (Polyamic acid PA1) Reactor (with stirrer, reflux condenser and nitrogen introduction tube)
Medium, under nitrogen atmosphere, N, N-dimethylacetamide 13
5 g, diethylene glycol dimethyl ether 135 g
67.16 g (0.1825 mol) of 4,4′-bis (3-aminophenoxy) biphenyl was dissolved in, and while stirring this, 3,3′-4,4′-biphenyltetracarboxylic dianhydride 53.214 g (0.1810 mol)
Was added in small portions as a dry solid. During this period, the temperature of the reactor was maintained at 25 to 30 ° C., and stirring was continued for 20 hours after the addition under a nitrogen atmosphere to obtain a polyamic acid having a solid content of 30%. Table 1 shows the logarithmic viscosity of this polyamic acid.
【0035】〔合成例2〕 (ポリアミド酸PA2)
合成例1の3,3’−4,4’−ビフェニルテトラカル
ボン酸二無水物のかわりに、ピロメリット酸二無水物を
用いた以外は、合成例1と全く同様に操作し、ポリアミ
ド酸を得た。このポリアミド酸の対数粘度を表1に示
す。[Synthesis Example 2] (Polyamic acid PA2) [0035] Instead of 3,3'-4,4'-biphenyltetracarboxylic dianhydride in Synthesis Example 1, pyromellitic dianhydride was used. The same operation as in Synthesis Example 1 was carried out to obtain a polyamic acid. Table 1 shows the logarithmic viscosity of this polyamic acid.
【0036】〔合成例3〕 (ポリアミド酸PA3)
合成例1の4,4’−ビス(3−アミノフェノキシ)ビ
フェニルのかわりに、4,4’−ジアミノジフェニルエ
ーテルを用いた以外は、合成例1と全く同様に操作し、
ポリアミド酸を得た。このポリアミド酸の対数粘度を表
1に示す。[Synthesis Example 3] (Polyamic acid PA3) Synthesis Example 1 was repeated except that 4,4'-bis (3-aminophenoxy) biphenyl in Synthesis Example 1 was used in place of 4,4'-diaminodiphenyl ether. Operate exactly like
Polyamic acid was obtained. Table 1 shows the logarithmic viscosity of this polyamic acid.
【0037】〔合成例4〜5〕 (ポリアミド酸4〜
5)
合成例1の3,3’−4,4’−ビフェニルテトラカル
ボン酸二無水物の量を44.1g(0.15モル)
(PA4)または、53.655g(0.1825モ
ル) (PA5)に変える以外、全く同様に操作し、2
種のポリアミド酸を得た。このポリアミド酸の対数粘度
を表1に示す。[Synthesis Examples 4 to 5] (Polyamic acid 4 to
5) The amount of 3,3′-4,4′-biphenyltetracarboxylic dianhydride in Synthesis Example 1 was 44.1 g (0.15 mol).
(PA4) or 53.655 g (0.1825 mol) (PA5)
A seed of polyamic acid was obtained. Table 1 shows the logarithmic viscosity of this polyamic acid.
【0038】〔合成例6〕 (ポリアミド酸6)
合成例1の有機溶媒全量をN,N−ジメチルアセトアミ
ド270gに変えた以外は、全く同様に操作し、ポリア
ミド酸を得た。このポリアミド酸の対数粘度を表1に示
す。[Synthesis Example 6] (Polyamic acid 6) Polyamide acid was obtained in the same manner as in Synthesis Example 1, except that the total amount of the organic solvent was changed to 270 g of N, N-dimethylacetamide. Table 1 shows the logarithmic viscosity of this polyamic acid.
【0039】[0039]
【表1】
上記合成例で示したポリアミド酸を用い、本発明の感光
性樹脂組成物の実施例を以下に示す。[Table 1] An example of the photosensitive resin composition of the present invention using the polyamic acid shown in the above synthesis example is shown below.
【0040】 〔実施例1〕 配合量(重量部) 合成例1 ポリアミド酸(PA1) 200 ペンタエリスリトールトリアクリレート (東亞合成社製 アロニックスM−305) 24 ポリエチレングリコール200ジアクリレート (新中村化学工業社製 NKA−200) 6 IRUGACURE907 (チバガイギー社製 以下IGC907と略す) 4 カヤキュアー DETX (日本化薬製 以下DETXと略す) 1[0040] [Example 1] Compounding amount (parts by weight) Synthesis Example 1 Polyamic acid (PA1) 200 Pentaerythritol triacrylate (Toagosei Co., Ltd. Aronix M-305) 24 Polyethylene glycol 200 diacrylate (NKA-200 manufactured by Shin-Nakamura Chemical Co., Ltd.) 6 IRUGACURE907 (Manufactured by Ciba-Geigy, abbreviated as IGC907 below) 4 Kayakyu DETX (Nippon Kayaku, hereinafter abbreviated as DETX) 1
【0041】 〔実施例2〕 配合量(重量部) 合成例1 ポリアミド酸(PA1) 200 ペンタエリスリトールトリアクリレート 6 ポリエチレングリコール200ジアクリレート 24 IGC907 4 DETX 1[0041] [Example 2] Compounding amount (parts by weight) Synthesis Example 1 Polyamic acid (PA1) 200 Pentaerythritol triacrylate 6 Polyethylene glycol 200 diacrylate 24 IGC907 4 DETX 1
【0042】 〔比較例1〕 配合量(重量部) 合成例2 ポリアミド酸(PA2) 200 ペンタエリスリトールトリアクリレート 24 ポリエチレングリコール200ジアクリレート 6 IGC907 4 DETX 1[0042] [Comparative Example 1] Compounding amount (parts by weight) Synthesis Example 2 Polyamic acid (PA2) 200 Pentaerythritol triacrylate 24 Polyethylene glycol 200 diacrylate 6 IGC907 4 DETX 1
【0043】 〔比較例2〕 配合量(重量部) 合成例3 ポリアミド酸(PA3) 200 ペンタエリスリトールトリアクリレート 24 ポリエチレングリコール200ジアクリレート 6 IGC907 4 DETX 1[0043] [Comparative Example 2] Compounding amount (parts by weight) Synthesis Example 3 Polyamic acid (PA3) 200 Pentaerythritol triacrylate 24 Polyethylene glycol 200 diacrylate 6 IGC907 4 DETX 1
【0044】 〔比較例3〕 配合量(重量部) 合成例4 ポリアミド酸(PA4) 200 ペンタエリスリトールトリアクリレート 24 ポリエチレングリコール200ジアクリレート 6 IGC907 4 DETX 1[0044] [Comparative Example 3] Compounding amount (parts by weight) Synthesis Example 4 Polyamic acid (PA4) 200 Pentaerythritol triacrylate 24 Polyethylene glycol 200 diacrylate 6 IGC907 4 DETX 1
【0045】 〔比較例4〕 配合量(重量部) 合成例5 ポリアミド酸(PA5) 200 ペンタエリスリトールトリアクリレート 24 ポリエチレングリコール200ジアクリレート 6 IGC907 4 DETX 1[0045] [Comparative Example 4] Compounding amount (parts by weight) Synthesis Example 5 Polyamic acid (PA5) 200 Pentaerythritol triacrylate 24 Polyethylene glycol 200 diacrylate 6 IGC907 4 DETX 1
【0046】 〔比較例5〕 配合量(重量部) 合成例6 ポリアミド酸(PA6) 200 ペンタエリスリトールトリアクリレート 24 ポリエチレングリコール200ジアクリレート 6 IGC907 4 DETX 1[0046] [Comparative Example 5] Compounding amount (parts by weight) Synthesis Example 6 Polyamic acid (PA6) 200 Pentaerythritol triacrylate 24 Polyethylene glycol 200 diacrylate 6 IGC907 4 DETX 1
【0047】 〔比較例6〕 配合量(重量部) 合成例1 ポリアミド酸(PA1) 200 ペンタエリスリトールトリアクリレート 30 IGC907 4 DETX 1[0047] [Comparative Example 6] Compounding amount (parts by weight) Synthesis Example 1 Polyamic acid (PA1) 200 Pentaerythritol triacrylate 30 IGC907 4 DETX 1
【0048】
〔比較例7〕
配合量(重量部)
合成例1 ポリアミド酸(PA1) 200
ポリアルキレングリコール200ジアクリレート 30
IGC907 4
DETX 1
上記の感光性樹脂組成物を調整して、導体回路パターン
を描いたプリント配線板に、ドクターブレードを用い均
一に塗布した。その後、80℃で40分間乾燥して、試
験用のサンプルを作成した。また、厚み1mmの金属板
および1オンスの銅箔光沢面に塗布乾燥して、テストサ
ンプルとした。乾燥した塗布膜厚は、導体回路上および
金属板上および銅箔光沢面上で20〜25μm の感光性
皮膜が得られるよう調整した。[Comparative Example 7] Blending amount (parts by weight) Synthesis example 1 Polyamic acid (PA1) 200 Polyalkylene glycol 200 diacrylate 30 IGC907 4 DETX 1 The above-mentioned photosensitive resin composition was prepared to form a conductor circuit pattern. The drawn printed wiring board was uniformly applied using a doctor blade. Then, it dried at 80 degreeC for 40 minutes, and created the sample for a test. Further, a 1 mm-thick metal plate and a 1-ounce copper foil glossy surface were coated and dried to obtain a test sample. The dried coating film thickness was adjusted so that a photosensitive film of 20 to 25 μm was obtained on the conductor circuit, the metal plate and the glossy surface of the copper foil.
【0049】次に、所望のフォトマスクを用いて3kw
の超高圧水銀灯にて、感光性皮膜に500mj/cm2
の光量が照射できるように露光した。露光した感光性皮
膜を1.0wt%の水酸化ナトリウム水溶液で30℃に
調節した現像液に50秒間浸漬して現像を行った。実施
例1〜2および比較例1〜2、6〜7では、未露光部は
容易に現像液で剥離され所望の画像が得られた。なお比
較例3では露光部が現像液に全て溶解し画像が得られな
かった。比較例4では未露光部が現像液に溶解せず、画
像を得ることができなかった。比較例5では所望の画像
が得られたものの、塗膜にクラックを生じた。実施例1
〜2および比較例1〜2、6〜7を250℃、10分間
加熱処理することにより、塗膜をポリイミドに変換せし
めた。Next, using a desired photomask, 3 kw
500mj / cm 2 on the photosensitive film with the ultra high pressure mercury lamp
It was exposed so that the amount of light could be irradiated. The exposed photosensitive film was developed by immersing it in a developing solution adjusted to 30 ° C. with a 1.0 wt% sodium hydroxide aqueous solution for 50 seconds. In Examples 1 to 2 and Comparative Examples 1 to 2 and 6 to 7, the unexposed portion was easily peeled off with the developer to obtain the desired image. In Comparative Example 3, the exposed area was completely dissolved in the developing solution and an image could not be obtained. In Comparative Example 4, the unexposed area was not dissolved in the developing solution and an image could not be obtained. In Comparative Example 5, a desired image was obtained, but cracks were generated in the coating film. Example 1
-2 and Comparative Examples 1-2 and 6-7 were heat-processed at 250 degreeC for 10 minute (s), and the coating film was converted into polyimide.
【0050】上記のポリイミドに変換せしめたテストサ
ンプルを、以下の方法を用い各評価を行った。
評価1:鉛筆硬度試験は、(JIS K−5405)に
記載の方法で行った。
評価2:クロスカット後の密着性は、(JIS K−5
405)に記載の方法で行った。
評価3:耐溶剤性試験は、(JIS K−5405)に
記載のクロスカットを入れた後、室温のアセトンに12
時間浸漬し、碁盤目の残量を測定した。
評価4:耐薬品性試験は、(JIS 5405)に記載
のクロスカットを入れた後、60℃の10wt%の塩酸
水溶液に12時間浸漬し、碁盤目の残量を測定した。
評価5:耐薬品性試験は、(JIS 5−5405)に
記載のクロスカットを入れた後、60℃の10wt%の
水酸化ナトリウム水溶液に12時間浸漬し、碁盤目の残
量を測定した。
評価6:感光性皮膜でソルダーレジストパターンを形成
した銅箔積層板を、60℃−95%RHの環境下で10
0時間放置した。このサンプルを280℃で溶融したは
んだに20秒間浸漬して銅箔とソルダーレジスト皮膜の
剥離や膨れの有無を確認した。
評価7:0.2mm銅板上に形成したテストサンプルに
おいて、90°の角度の折り曲げ試験を行い、皮膜のク
ラックの有無を確認した。
評価8:1オンス、圧延銅箔光沢面上に形成したテスト
サンプルにおいて、その後、銅箔を2mm幅にエッチン
グし、皮膜と2mm幅銅箔とを、角度90°で引き剥が
した時の強度をPeel強度(Kg/cm)で示した。
評価9:1オンス、圧延銅箔光沢面上に形成したテスト
サンプルにおいて、その後、銅箔を全面エッチングし皮
膜のみのテストサンプルを作成した。これを幅15m
m、長さ150mmの試験片に切断し、引っ張り伸度試
験を行った時の皮膜の伸び率(%)を示した。Each test sample converted into the above polyimide was evaluated by the following methods. Evaluation 1: The pencil hardness test was performed by the method described in (JIS K-5405). Evaluation 2: Adhesion after cross-cut is (JIS K-5
405). Evaluation 3: The solvent resistance test was carried out by adding a cross cut described in (JIS K-5405), and then applying 12 to acetone at room temperature.
After soaking for a period of time, the remaining amount on the cross was measured. Evaluation 4: In the chemical resistance test, after inserting the cross-cut described in (JIS 5405), it was dipped in a 10 wt% hydrochloric acid aqueous solution at 60 ° C. for 12 hours, and the remaining amount of the cross-cut was measured. Evaluation 5: In the chemical resistance test, after putting the cross-cut described in (JIS 5-5405), it was immersed in a 10 wt% sodium hydroxide aqueous solution at 60 ° C. for 12 hours, and the remaining amount of the cross-cut was measured. Evaluation 6: A copper foil laminate having a solder resist pattern formed of a photosensitive film was subjected to 10 in an environment of 60 ° C.-95% RH.
It was left for 0 hours. This sample was dipped in a molten solder at 280 ° C. for 20 seconds, and it was confirmed whether the copper foil and the solder resist film were peeled off or swollen. Evaluation 7: A test sample formed on a 0.2 mm copper plate was subjected to a bending test at an angle of 90 ° to confirm the presence or absence of cracks in the coating. Evaluation 8: 1 ounce, in a test sample formed on a rolled copper foil glossy surface, the copper foil was then etched to a width of 2 mm, and the strength when the coating and the 2 mm width copper foil were peeled off at an angle of 90 ° The Peel strength (Kg / cm) is shown. Evaluation 9: 1 ounce, a test sample formed on a glossy surface of a rolled copper foil, and then the copper foil was entirely etched to prepare a test sample having only a film. This is 15m wide
The elongation rate (%) of the coating film when cut into test pieces of m and 150 mm in length and subjected to a tensile elongation test was shown.
【0051】実施例1〜2および比較例1〜7の評価結
果を表2に示す。この評価結果から、実施例1〜2にお
いては、アルカリ水溶液で現像することが可能で導体と
の接着性、屈曲性、耐薬品性、皮膜の伸び性に優れ、さ
らに、はんだ耐熱性で剥離や膨れが発生しない。比較例
1においては、皮膜の伸び率が著しく低かった。比較例
2においては、導体との接着性が十分ではない。比較例
6においては、皮膜の伸び率が低かった。比較例7にお
いては、耐熱性が低く、半田浸漬後に剥離を生じた。Table 2 shows the evaluation results of Examples 1 and 2 and Comparative Examples 1 to 7. From these evaluation results, in Examples 1 and 2, it was possible to develop with an alkaline aqueous solution, and the adhesiveness with a conductor, flexibility, chemical resistance, and film extensibility were excellent. No swelling occurs. In Comparative Example 1, the elongation of the film was extremely low. In Comparative Example 2, the adhesiveness with the conductor is not sufficient. In Comparative Example 6, the elongation rate of the film was low. In Comparative Example 7, the heat resistance was low and peeling occurred after immersion in the solder.
【0052】[0052]
【表2】 [Table 2]
【0053】[0053]
【発明の効果】本発明による感光性樹脂組成物からなる
絶縁皮膜およびソルダーレジスト皮膜は、表2からも分
かるように、アルカリ水溶液で現像することができる。
またポリアミド酸を主成分とすることで、このポリアミ
ド酸に対応するポリイミド自体が有する、優れた耐熱
性、加工性、電気特性、可とう性を発現させることがで
き、プリント配線板の絶縁皮膜形成材料に最適である。
また、該ポリアミド酸は特定の構造を有することにより
熱可塑性を示し、金属箔等の導体に対して、強い接着力
を持ち、更には特定の(メタ)アクリレート化合物を配
合することにより、良好な皮膜の伸び性を持つことか
ら、多層プリント配線板の層間絶縁材料、可とう性回路
基板のカバーコート材料として、優れた性能が期待でき
る。The insulating film and the solder resist film made of the photosensitive resin composition according to the present invention can be developed with an alkaline aqueous solution, as can be seen from Table 2.
In addition, by using polyamic acid as the main component, it is possible to develop the excellent heat resistance, processability, electrical characteristics, and flexibility possessed by the polyimide itself corresponding to this polyamic acid, and to form an insulating film for printed wiring boards. Best for materials.
In addition, the polyamic acid exhibits thermoplasticity by having a specific structure, has a strong adhesive force to a conductor such as a metal foil, and further, by blending a specific (meth) acrylate compound, good Due to the extensibility of the film, excellent performance can be expected as an interlayer insulating material for multilayer printed wiring boards and as a cover coat material for flexible circuit boards.
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 FI G03F 7/027 502 G03F 7/027 502 H05K 3/28 H05K 3/28 D 3/46 3/46 T (56)参考文献 特開 平6−89028(JP,A) 特開 平7−316291(JP,A) 特開 平9−90630(JP,A) 特開 平5−40338(JP,A) 特開 平5−40339(JP,A) 特開 平5−40340(JP,A) 特開 平10−207063(JP,A) 特開 平10−207064(JP,A) 特開 平10−39510(JP,A) (58)調査した分野(Int.Cl.7,DB名) G03F 7/00 - 7/42 ─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. 7 Identification code FI G03F 7/027 502 G03F 7/027 502 H05K 3/28 H05K 3/28 D 3/46 3/46 T (56) References Kaihei 6-89028 (JP, A) JP 7-316291 (JP, A) JP 9-90630 (JP, A) JP 5-40338 (JP, A) JP 5-40339 ( JP, A) JP 5-40340 (JP, A) JP 10-207063 (JP, A) JP 10-207064 (JP, A) JP 10-39510 (JP, A) (58 ) Fields surveyed (Int.Cl. 7 , DB name) G03F 7/ 00-7/42
Claims (4)
粘度(N,N−ジメチルアセトアミド溶媒、濃度0.5
g/100ml、35℃で測定)が0.3〜1.0dl
/gであるポリアミド酸、100重量部に対して、
(B)アルコール性水酸基を含有し、少なくとも3つ以
上の光重合可能なC−C不飽和2重結合を有する(メ
タ)アクリレート化合物、10〜50重量部と、(C)
ポリアルキレングリコールジ(メタ)アクリレート化合
物、10〜50重量部と、(D)光重合開始剤を必須成
分として配合せしめた感光性樹脂組成物。1. (A) The following formula (1) [Chemical formula 1] (In the formula, R is the formula (2). Represents ), The logarithmic viscosity thereof (N, N-dimethylacetamide solvent, concentration 0.5
g / 100 ml, measured at 35 ° C.) is 0.3 to 1.0 dl
/ G of polyamic acid, relative to 100 parts by weight,
(B) a (meth) acrylate compound containing an alcoholic hydroxyl group and having at least three or more photopolymerizable C-C unsaturated double bonds, 10 to 50 parts by weight, and (C)
A photosensitive resin composition containing 10 to 50 parts by weight of a polyalkylene glycol di (meth) acrylate compound and (D) a photopolymerization initiator as essential components.
含チッソ有機溶剤100部に対し、10〜1000部の
グリコールエーテル系有機溶剤を含む混合溶剤で希釈し
てなる感光性樹脂組成物。2. The photosensitive resin composition according to claim 1,
A photosensitive resin composition obtained by diluting with a mixed solvent containing 10 to 1000 parts of a glycol ether organic solvent with respect to 100 parts of a nitrogen-containing organic solvent.
ることを特徴とする、請求項1に記載の感光性樹脂組成
物。3. The photosensitive resin composition according to claim 1, wherein the cured film has an elongation percentage of 20% or more.
属、プラスチックまたはセラミックに塗布乾燥して形成
してなる感光性皮膜を有する加工品。4. A processed product having a photosensitive film formed by applying the photosensitive resin composition according to claim 1 to a metal, a plastic or a ceramic and drying it.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26835798A JP3444796B2 (en) | 1998-09-22 | 1998-09-22 | Photosensitive resin composition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26835798A JP3444796B2 (en) | 1998-09-22 | 1998-09-22 | Photosensitive resin composition |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000098607A JP2000098607A (en) | 2000-04-07 |
| JP3444796B2 true JP3444796B2 (en) | 2003-09-08 |
Family
ID=17457407
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26835798A Expired - Fee Related JP3444796B2 (en) | 1998-09-22 | 1998-09-22 | Photosensitive resin composition |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3444796B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018154688A1 (en) * | 2017-02-23 | 2018-08-30 | 日立化成デュポンマイクロシステムズ株式会社 | Resin composition, cured product, pattern cured product, method for producing cured product, interlayer insulating film, surface protective film and electronic component |
-
1998
- 1998-09-22 JP JP26835798A patent/JP3444796B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2000098607A (en) | 2000-04-07 |
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