JP3450040B2 - Monitoring equipment for electron beam processing machines - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a monitoring device for an electron beam processing machine, and more particularly, to a component of the electron beam processing machine based on information whose value changes depending on the operating state of the electron beam processing machine. The present invention relates to a monitoring device for monitoring deterioration.

[0002]

2. Description of the Related Art Conventionally, for example, in an electron beam welding machine as an electron beam processing machine, a worker carries out periodical periodic inspections for one month, three months, etc. Further, the components of the electron beam welding machine, such as a seal ring for sealing the inside of the welding work chamber in a vacuum state, are regularly replaced with new ones.

[0003]

However, in the above-mentioned conventional periodical inspection by the worker, if a problem such as a judgment error due to individual differences of the worker occurs, or if an abnormality occurs before the periodical inspection, I couldn't deal with it immediately. Further, since the components such as the seal ring of the electron beam welding machine are regularly replaced regardless of the degree of deterioration thereof, there is a problem that maintenance costs increase.

An object of the present invention is to provide a monitoring device for an electron beam processing machine, which can predict and cope with deterioration of components of the electron beam processing machine.

[0005]

An electron beam processing machine monitoring apparatus according to the present invention irradiates an electron beam to a workpiece in a work chamber in a vacuum state to process the workpiece. A monitoring device for a machine, a detection means for detecting information whose value changes depending on the operating state of the electron beam processing machine, and an average value of the values of the detection information detected by the detection means for each predetermined unit period. Means for calculating the average value,
Prediction means for predicting future changes in the value of the detection information from the history of average values obtained by the average value calculation means, and until the value of the detection information predicted by the prediction means reaches a predetermined threshold value And a first alarm means for issuing an alarm when the margin period is within a predetermined warning period.

[0006]

The monitoring device for an electron beam processing machine according to the present invention detects information whose value changes in accordance with the operating state of the electron beam processing machine, and records the average value of the detected information for each predetermined unit time. From this, a margin period until the value of the detection information reaches a predetermined threshold value is predicted, and an alarm is issued when the margin period falls within a predetermined warning period. Therefore, an alarm is issued by predicting the deterioration of the components of the electron beam processing machine.

Further, for example, in the case of an electron beam welding machine, it is possible to predict deterioration of its components and avoid the deterioration of work efficiency of the electron beam welding machine and the deterioration of welding quality. To do.

[0008]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.

The present embodiment is an application example as a monitoring device of an electron beam welding machine for electron beam welding a work (workpiece) W. Therefore, first, the electron beam welding machine will be briefly described with reference to FIGS. 1, 2 and 3.

[0010] "About electron beam welding machine" this example an electron beam welding machine, while rotating the workpiece W about the axis O ₁ of the vertical in a vacuum chamber (welding chamber) R, the axis O ₁ Electron beam E on top of work W
By irradiating B (see FIG. 2), the upper portion of the work W is continuously welded along its rotation direction. In FIG. 2, reference numeral 15 is an electron gun for generating the electron beam EB. The vacuum chamber R is formed by a chamber chamber R ₁ and a column chamber R ₂ which are communicated with each other through an opening / closing valve (also referred to as “column valve”) 1, and the column chamber R ₂ has a high pressure (not shown). A filament 2 connected to the power supply is provided. Further, each of the chamber chamber R ₁ and the column chamber R ₂ is brought into a vacuum state by an individual exhaust system equipped with a vacuum pump. Below the chamber R ₁ , there is provided a lid 3 which is attachable to and detachable from the lower opening. In the case of this example, a total of four lids 3 are arranged at equal intervals along the circumferential direction of the rotating body 4 that rotates about the vertical axis O _2. depending on the lid 3 is alternatively chamber chamber R ₁
Located below. Each lid 3 is movable up and down with respect to the rotating body 4, and a rotary table 5 on which a work W can be mounted is further provided so as to be rotatable around an axis line in the vertical direction.

The lid 3 located below the chamber R ₁ is pushed up by the cylinder 6 and rises to close the lower opening of the chamber R ₁ as shown in FIG. further,
A rotary table 5 provided on the lid 3 is rotated by a driving force of an AC motor (electric motor) 7. That is, when the cylinder 6 extends upward, the rotary table 5
The upper end of the drive shaft 8 is connected to the lower end of the rotary shaft 5A of the drive shaft 8, and the drive shaft 8 is connected to the gears 10, 11, 12 in the gear box 9,
And is rotated by the motor 7 via the spline shaft 13. The gear 12 and the spline shaft 13 are spline-fitted to each other to transmit the rotational force of the motor 7 regardless of expansion and contraction of the cylinder 6.

After all, in the electron beam welding machine of this example, the rotary body 4 is rotated to sequentially position the four rotary tables 5 in the chamber R ₁ , so that the workpieces before the rotary tables 5 are welded to the rotary tables 5. It is possible to continuously mount W, weld the work W, and remove the work W after the welding is completed.

In FIG. 3, reference numerals 15 and 16 designate chamber chambers R.
It is a vacuum pump equipped in the exhaust system of ₁ , and also 17,18
Is a vacuum pump provided in the exhaust system of the column chamber R ₂ .
When welding the work W, assuming that the inside of the column chamber R ₂ has already been evacuated (exhausted) to a predetermined vacuum state, first, the chamber chamber R opened to the atmosphere.
_After placing the work W in the chamber ₁ , the chamber R ₁
Close. Then, the inside of the chamber R ₁ is evacuated (evacuated) to a vacuum state where welding is possible, and then the valve 1 is opened.
Then, while rotating the work W, the electron beam EB is irradiated onto the upper part of the work W to weld the work W. The evacuation of the chamber R ₁ is continued until the welding is completed.
After the welding is completed, the valve 1 is closed, the chamber R ₁ is opened, and the welded work W is taken out from the inside. Then, the inside of the column chamber R ₂ is exhausted to a predetermined vacuum state. After that, the same operation is repeated to weld the work W.

In such an electron beam welding machine, the monitoring device according to the present invention monitors the deterioration of the component parts related to the information based on the information that changes depending on the operating state. Next, the monitoring device will be described for each embodiment.

[Structure of the Monitoring Device of the First Embodiment] The monitoring device of the present embodiment, after starting the exhaust of the chamber R ₁ ,
The evacuation time T until the inside of the chamber R ₁ becomes a vacuum state where welding is possible is used as the monitoring information. This exhaust time T
Is long due to deterioration of the seal ring for sealing the chamber R ₁ , deterioration of the performance of the vacuum pumps 15 and 16 due to changes in pump oil, adhesion of carbon, and the like.

In order to detect the elapsed time T, as shown in FIG. 4, a pressure detecting means 20A, an exhaust operation start timing detecting means 20B, and an exhaust time measuring means (detecting means) 21 are provided. . Pressure detecting means 20A is a pressure sensor for detecting the pressure in the chamber chamber R _1, for example, are provided on the inner wall of the chamber room R _2.
The exhaust operation start timing detection unit 20B is the vacuum pump 1
This is for detecting the start timing of the evacuation of the inside of the chamber R ₁ based on the operating states of 5, 16 and, for example,
It is configured to detect the output timing of the drive signals of the vacuum pumps 15 and 16. The measuring means 21 is, as described later,
The exhaust time T is measured based on the detection content of the detection means 20A, 20B. Further, in the monitoring device of this example, the average value calculating means 22, the predicting means 23, the margin period calculating means 24, and the first and second alarm means 2 which function based on the exhaust time T thereof.
5, 26 and display means 27 are provided. These functions will be described later together with the operation.

Next, the operation of the monitoring apparatus of this embodiment will be described with reference to the flow charts of FIGS.

"Monitoring operation by the monitoring device of the first embodiment" First, the detection means 20B detects the start of the evacuation of the chamber R ₁ (step S1A), and the detection time point t ₀ (see FIG. 7). From the measuring means 21 to the exhaust time T
Measurement (for example, in 0.1 second units) is started (step S1B). Then, on condition that the inside of the chamber R ₁ is in a weldable vacuum state (step S1C), that is, the pressure inside the chamber R ₁ is weldable pressure V ₀ by the pressure detection means 20A (see FIG. 7). The value of the exhaust time T is determined on the condition that the above condition is satisfied (see FIG. 7). Then, when the time T (hereinafter also referred to as "detection time T") exceeds a predetermined comparison reference value T _MAX , an abnormality alarm is issued (steps S2, S3, S4). In such an alarm function, the alarm unit 26A (see FIG. 4) of the second alarm unit 26 is, for example, a display unit 27A such as a CRT in the display unit 27.
This is achieved by displaying the alarm details on (see Fig. 4),
Further, the setting function of the comparison reference value T _MAX has a threshold setting unit 26.
B (see FIG. 4) will be fulfilled. When the detection time T exceeds the reference value T _MAX , deterioration of the seal ring of the chamber R ₁ and deterioration of the capacity of the vacuum pumps 15 and 16 (hereinafter referred to as “degradation of performance of related components of the chamber R ₁ ”) Is determined to have occurred. In this way, the time T detected for each welding operation is accumulated as data, and the following (data processing of the detection time T) is performed.

(Data Processing of Detection Time T) First, in order to calculate the average value of the detection time T for every hour, every day, and every month, the average value calculating means 22 when they coincide with the elapsed time. Performs the following arithmetic processing.

That is, when it coincides with the elapsed time of every hour, the average value (TH) of the detection times T detected within the past hour is calculated in steps S5, S6 and S7, As shown in FIG. 9, the data of the “time change graph” (time change graph in time unit) G ₁ displayed on the display unit 27A of the display means 27 is updated. The horizontal axis of the graph G ₁ is the date and time, and the vertical axis is the average value (TH) for each hour. The upper limit in the graph G ₁ indicates the value of T _MAX .

Next, when it coincides with the elapsed time for each day,
In steps S8, S9 and S10, the average value (T-D) obtained by averaging the average values (T-H) for the past one day is calculated and displayed on the display unit 27A of the display means 27 as shown in FIG. in time course graph "(day updating data changes over time graph) G ₂ units horizontal axis month of chart G _2, the vertical axis the average value for each day (T ₁ -D) - is (day. The upper limit in the graph G ₂ indicates the value of T _MAX .

Next, when it coincides with the elapsed time of every one month, in the steps S11, S12 and S13, the past 1
Average value (T-M) obtained by averaging average values (T-D) for months
And the display unit 2 of the display means 27 is calculated as shown in FIG.
It is displayed in 7A - (aging graph monthly) "month aging graph" updates the data in the G _3. Abscissa years of the graph G _3, the vertical axis represents the average value for each one month (T ₁ -M). The upper limit in this graph G ₃ indicates the value of T _MAX .

Further, when it coincides with the elapsed time for each day, future changes in the average value (T ₁ -D) for each day are predicted (see FIG. 6).

That is, the average value (T-D) of the latest day and the average value (T-D) of 30 days before are A ₁ and B, respectively.
Read as ₁ (steps S15 and S16), and
Allowable alarm upper limit value C ₁ and warning days (warning period) D described later
₁ is read (steps S17, S18). Then, the predicting means 23 (see FIG. 4) uses the average change amount Z ₁ per day.
Is calculated by the following equation (1) (step S19).

[0025]

[Equation 1]

Further, based on the assumption that the average variation Z ₁ will continue in the future, the future average value (T
-D) is determined by simple arrival days to reach the upper limit value C ₁ (the following expression Slack) E ₁ (2) (step S2
3). The threshold setting unit 24B (see FIG. 4) fulfills the function of setting the upper limit C ₁ .

[0027]

[Equation 2]

For example, at the time of the latest day a in FIG. 8, the average value (TD) of the latest day a is (A ₁ -a), and the average of the days 29 days before that (a-29). value (T-D) as (B ₁ -a), the above equation (1), the upper limit value C ₁ (2)
Estimate the number of simple arrival days (E ₁ −a). After that, at the latest date b, the average value (T-
D) is (A ₁ -b), and 29 days before that (b
The average value (T-D) of −29) is set to (B ₁ −b), and the simple arrival days (E ₁ −b) from the above formulas (1) and (2) to the upper limit C ₁ are predicted. Become. By the way, the increase of the average value (TD) as shown in FIG. 8 means that the performance of the related parts of the chamber R ₁ is deteriorated.
Therefore, determining the simple arrival days E ₁ predicts the number of days until the deterioration of the performance of the related parts in the chamber R ₁ progresses to an extent corresponding to the upper limit value C ₁ .

After that, the simple arrival days E ₁ are the warning days D ₁
If it is within emits an alarm Hojiru degradation of performance of the related parts of the chamber room R ₁ (step S21, S22). As described above, the warning function when the simple arrival days E ₁ reaches the warning days D ₁ is, for example, the warning unit 25A (see FIG. 4) of the first warning unit 25, which alerts the display unit 27A of the display unit 27. This is achieved by displaying the contents, and the threshold setting unit 25B (see FIG. 4) fulfills the function of setting the number of warning days D ₁ . Then, the data of the deterioration prediction graph G ₄ described later is updated (step S23).

The display means 27 will now be described.

The display means 27 is a display unit 2 such as a CRT.
7A, and the display content is displayed by the display content switching unit 27.
It can be switched by B. The display screen includes a screen for chamber exhaust time monitoring that displays four graphs as shown in FIG. 9, an enlarged screen for individually displaying these four graphs in an enlarged manner, and a chamber exhaust time monitor screen as shown in FIG. Change prediction screen and threshold (T
_MAX ) setting screen. The graph G _{0 in} FIG. 9 is for sequentially displaying and monitoring changes in the detection time T ₁ . Further, the screen of FIG. 10 includes a graph G ₄ showing the history of the average value (TD) as shown in FIG. 8, the alarm output setting date as the warning days D ₁ , its change operation screen, and the simple arrival days. Display E ₁ . Of course, the display contents and display form of the display screen are arbitrary, not limited to such an example.

[Structure of Monitoring Device of Second Embodiment] In the monitoring device of this embodiment, the chamber chamber R at the time point t ₃ (see FIG. 7) when the evacuation of the chamber chamber R ₁ is completed after the welding is completed.
The pressure V in ₁ is used as monitoring information. After the time t ₃ when the evacuation is completed, the valve 1 is closed and then the chamber R ₁ is opened to take out the welded work W. Therefore, the pressure V corresponds to the maximum vacuum degree of the chamber R ₁ . Further, this pressure V changes in accordance with the deterioration of the related parts of the chamber R ₁ , as in the above-described detection time T _1, and the value increases as the deterioration progresses.

In the monitoring apparatus of this example, a pressure sensor 121 for detecting the pressure V and a pressure V (hereinafter,
The average value calculating means 122, the predicting means 123, and the margin period calculating means 12 that function based on "the detected pressure V")
4, first and second alarm means 125 and 126, and display means 127 are provided. These functions will be described later together with the operation.

Next, the operation of the monitoring device will be described with reference to FIGS.
A description will be given according to the flowchart shown in FIG.

[Monitoring Operation by Monitoring Device of Second Embodiment] First, the pressure sensor 121 is used to detect the chamber R ₁
Pressure V at time t ₃ (see FIG. 7) immediately after the evacuation of the inside
Is detected (step S101), and when the detected pressure V exceeds a predetermined comparison reference value V _MAX , an abnormality alarm is issued (steps S102 to 104). In such an alarm function, the alarm unit 126A of the second alarm unit 126 is, for example, a display unit 127 such as a CRT in the display unit 127.
This is achieved by displaying the alarm content on A, and the threshold setting unit 126B performs the function of setting the comparison reference value V _MAX . When the detected pressure V exceeds this reference value V _MAX , it is determined that the performance degradation of the related parts in the chamber R ₁ has occurred. In this way, the pressure V detected for each welding operation is accumulated as data, and the following (data processing of the detected pressure V) is performed.

(Data Processing of Detected Pressure V) First, in order to calculate the average value of the detected pressure V for every hour, every day, and every month, the average value calculating means 122 when they coincide with the elapsed time. Performs the following arithmetic processing.

That is, when it coincides with the elapsed time of every one hour, the average value (V-H) of the detected pressure V detected within the past one hour is calculated in steps S105 to 107 and shown in FIG. As shown, the display unit 127 of the display means 127.
Updates the data of the G ₁₀ (aging time graph units) "time change graph" displayed on the A. The horizontal axis of the graph G ₁₀ is the date and time, and the vertical axis is the average value (VH) for each hour. The upper limit in graph G ₁₀ indicates the value of V _MAX .

Next, when it coincides with the elapsed time for each day,
In steps S108 to 110, the average value (V-D) obtained by averaging the average values (V-H) for the past one day is calculated,
Is displayed on the display unit 127A of the display unit 127 as shown in FIG. 15 (day -. The horizontal axis of the temporal change graph "(day time course graph of the unit) to update the data of the G ₁₂ graph G ₁₂ is month, The vertical axis represents the average value (V-D) for each day, and the upper limit in the graph G ₁₂ represents the value of V _MAX .

Next, when it coincides with the elapsed time for each month, in steps S111 to 113, the average value (VM) obtained by averaging the average values (V-D) for the past one month is calculated, As shown in FIG. 15, the display unit 12 of the display means 127 is shown.
It is displayed in 7A - (aging graph monthly) "month aging graph" updates the data of the G _13. The horizontal axis of the graph G ₁₃ is the year and month, and the vertical axis is the average value (VM) for each month. The upper limit in this graph G ₁₃ indicates the value of V _MAX .

Further, when it coincides with the elapsed time for each day, future changes in the average value (VD) for each day are predicted (see FIG. 13).

That is, the average value (V-D) of the latest day and the average value (V-D) of 30 days before are A ₂ and B, respectively.
₂ is read (steps S115 and S116), and an alarm allowable upper limit value C ₂ and a warning days (warning period) D ₂ which will be described later are read (steps S117 and S118). Then, the prediction means 123 (see FIG. 11) obtains the average change amount Z ₂ per day by the following equation (11) (step S119).

[0042]

[Equation 3]

Further, based on the assumption that the average variation Z ₂ will continue in the future, the future average value (V-D) is calculated by the margin period calculating section 124A (see FIG. 11) of the margin period calculating means 124. The simple arrival days (margin period) E ₂ until reaching the upper limit C ₂ is calculated by the following equation (12) (step S123). The function of setting the upper limit value C ₂ is performed by the threshold value setting unit 124B (see FIG. 11).

[0044]

[Equation 4]

For example, at the latest date a in FIG. 14,
Average of the latest date a the _{(V-D) (A 2} -a), the average value of it 29 days prior than (a-29) to (V-D) as (B ₂ -a), the upper Predict the simple arrival days (E ₂ −a) from the expressions (11) and (12) to the upper limit value C ₂ . After that, at the latest date b, the average value (V
The -D) and (A ₂ -b), the average value of it 29 days prior than (b-29) to (V-D) as (B ₂ -b), the above equation (11), (12) To the upper limit value C ₂ from the simple arrival days (E ₂ −b). By the way, the increase of the average value (V-D) as shown in FIG. 14 means that the performance of the related parts of the chamber R ₁ is deteriorated. Therefore, obtaining the simple arrival days E ₂ predicts the number of days until the deterioration of the performance of the related components in the chamber R ₁ progresses to the extent corresponding to the upper limit C ₂ .

After that, the simple arrival days E ₂ are the warning days D ₂
If it is within the range, an alarm is issued to report the deterioration of the performance of the related parts in the chamber R ₁ (steps S121, S122).
In this way, the warning function when the simple arrival days E ₂ reaches the warning days D ₂ is the warning unit 12 of the first warning means 125.
5A (see FIG. 11) is achieved, for example, by displaying the warning content on the display unit 127A of the display means 127, and the threshold setting unit 125B (see FIG. 11) performs the function of setting the number of warning days D ₂ . become. Then, the data of the deterioration prediction graph G ₁₄ described later is updated (step S12).
3).

The display means 127 will be described below.

The display means 127 is provided with a display section 127A such as a CRT, and the display content can be switched by the display content switching section 127B. The display screen includes a screen for monitoring the degree of vacuum of the chamber that displays four graphs as shown in FIG. 15, an enlarged screen for individually enlarging and displaying these four graphs, and a screen for the degree of vacuum of the chamber as shown in FIG. There are a change prediction screen and a threshold (V _MAX ) setting screen. Graph G _{10 in} FIG.
Is for sequentially displaying and monitoring changes in the detection time V ₁ . Also, the screen of FIG. 16 shows a graph G ₁₄ showing the history of average values (V−D) as shown in FIG.
The alarm output setting date as the warning days D ₂ , the change operation screen, and the simple arrival days E ₂ are displayed. Of course, the display contents and display form of the display screen are arbitrary, not limited to such an example.

[Monitoring Device of Third Embodiment] In this embodiment, the exhaust time in the column chamber R ₂ is monitored by the monitoring device having the same configuration as that of the first embodiment described above. An exhaust time, from the start of the evacuation of the column chamber R _2, is an exhaust time to the column chamber R ₂ becomes a predetermined vacuum state weldable, in the first embodiment described above Similarly, by using the exhaust time as the monitoring information, deterioration of the seal ring of the column chamber R ₂ and the vacuum pumps 17 and 18 are performed.
It is possible to monitor the deterioration of the capacity (hereinafter referred to as “degradation of performance of related parts in the column room R ₂ ”).

[Monitoring Device of Fourth Embodiment] In this embodiment, the pressure in the column chamber R ₂ at a predetermined time is monitored by the monitoring device having the same configuration as that of the second embodiment described above. The pressure as the monitoring information is evacuated (exhausted) to a vacuum state in which the chamber R ₁ can be welded,
Column chamber R during the period until valve 1 is opened
_It is the pressure within ₂ , and the pressure increases as the deterioration of the seal portion of the valve 1 progresses. Therefore, the deterioration of the seal portion of the valve 1 can be monitored by monitoring the pressure in the column chamber R ₂ at that time.

[Monitoring Device of Fifth Embodiment] In general, the electron gun 15 (see FIG. 2) has a slight beam current flowing during a time other than welding (beam ON), that is, beam OFF. The electron beam EB generated at that time hits the bulb 1, and the bulb 1 is damaged. Therefore, the maintenance time of the valve 1 can be predicted by detecting the beam current of the electron gun 15 at times other than during welding and using the integrated value as monitoring information. For example, under the assumption that the amount of change between the latest value of the integrated value and the value before the predetermined time will continue in the future, until the integrated value reaches a value corresponding to the maintenance time of the valve 1. The simple arrival days (margin period) may be obtained, and an alarm may be issued when the number of days is within a predetermined warning days.

"Monitoring Device of Sixth Embodiment" Electron Beam E
The electron gun 15 for generating B (see FIG. 2) has a slight beam current flowing during a time other than welding (beam ON), that is, when the beam is OFF. It appears as a leakage current in the bipolar power supply that controls the drive of the. Its leakage current malfunction of the bipolar power supply, the deterioration of the degree of vacuum in the column chamber R _2, contamination of the electron gun 15 and the column chamber R _2, depending on the cause, such as insulation failure voltage cable for powering the electron gun 15 Increase. By the way, it is difficult to detect the stains in the column chamber R ₂ from the outside, and when the stains in the column chamber R ₂ become severe, the electron beam EB causes the electron beam EB to fall on the inner wall of the column chamber R ₂ . There is a risk that the bipolar power supply may be destroyed by being irradiated (arcing).

Therefore, by detecting the above-mentioned leakage current and using the value as monitoring information, it is possible to judge the degree of contamination in the column chamber R ₂ and predict the cleaning time. For example, based on the assumption that the amount of change between the latest value of the leakage current and the value before the predetermined time continues, the value of the leakage current becomes a value corresponding to the cleaning time of the column chamber R _2. The simple arrival days (margin period) until the arrival is obtained, and an alarm may be issued when the arrival times are within a predetermined warning days.

"Monitoring Device of Seventh Embodiment" In various electromagnetic switches provided in the electron beam welding machine, the control timing of the control circuit for controlling the opening and closing thereof and the drive control by the opening and closing operation thereof. It is considered that the drive timing of the drive circuit is shifted depending on the degree of deterioration of the contacts due to arc or the like during the opening / closing operation of the electromagnetic switch. Therefore, the deterioration of the electromagnetic switch can be monitored by detecting the amount of deviation between the control timing of the control circuit and the driving timing of the drive circuit during the opening / closing operation of the electromagnetic switch and using it as the monitoring information. Further, the deterioration of the electromagnetic switch can be monitored by detecting the voltage value at the start and stop of the electromagnetic switch and using it as the monitoring information. The monitoring method in these cases is the same as in the first and second embodiments described above.

(Others) In the monitoring apparatus of the present invention, the type of monitoring information is arbitrary and is not limited to the above-mentioned embodiment, and the point is that the value changes depending on the operating state of the electron beam welding machine. If Moreover, a large number of pieces of monitoring information can be centrally monitored by one monitoring device.

[0056]

As described above, the monitoring device for an electron beam processing machine according to the present invention detects information whose value changes depending on the operating state of the electron beam processing machine, and then detects the information for a predetermined unit period. It is configured to predict the margin period until the value of the detection information reaches a predetermined threshold value from the history of the average value for each, and to issue an alarm when the margin period falls within the predetermined warning period. Therefore, it is possible to predict the deterioration of the components of the electron beam processing machine and issue an alarm.

Therefore, for example, in the case of an electron beam welding machine, it is possible to predict deterioration of its components and prevent deterioration of work efficiency of the electron beam welding machine and deterioration of welding quality.

[Brief description of drawings]

FIG. 1 is a configuration diagram of a work rotation drive system of an electron beam welding machine provided with a monitoring device of the present invention.

FIG. 2 is a schematic configuration diagram of a vacuum chamber in the electron beam welding machine shown in FIG.

FIG. 3 is a side view of the entire electron beam welding machine shown in FIG.

FIG. 4 is a block diagram showing a first embodiment of the present invention.

FIG. 5 is a flow chart for explaining the operation of the first exemplary embodiment of the present invention.

FIG. 6 is a flowchart for explaining the operation of the first exemplary embodiment of the present invention.

7 is an explanatory diagram of a pressure change in the chamber shown in FIG.

FIG. 8 is an explanatory diagram of operations of a prediction unit and a margin period calculation unit shown in FIG.

9 is a front view of a display screen for explaining an example of display contents on the display unit shown in FIG. 4. FIG.

10 is a front view of a display screen for explaining another example of the display contents on the display unit shown in FIG.

FIG. 11 is a block diagram showing a second embodiment of the present invention.

FIG. 12 is a flow chart for explaining the operation of the second exemplary embodiment of the present invention.

FIG. 13 is a flow chart for explaining the operation of the second exemplary embodiment of the present invention.

FIG. 14 is an explanatory diagram of operations of a prediction unit and a margin period calculation unit shown in FIG. 11.

15 is a front view of a display screen for explaining an example of display contents on the display unit shown in FIG.

16 is a front view of a display screen for explaining another example of the display content on the display unit shown in FIG.

[Explanation of symbols]

R vacuum chamber (welding work room) W work (workpiece) EB electron beam 15,16,17,18 Vacuum pump 21 Exhaust time measurement means (detection means) 22 Mean value calculation means 23 Prediction means 24 Margin period calculation means 25 First alarm means 26 Second warning means 27 Display means

─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Shinichi Hasegawa 1 at 700 Kamoda, Imaizumi, Fuji City, Shizuoka Prefecture Jatco Ltd. (72) Inventor Hiroyoshi Nakagawa 1 at 700 Kamoda, Imaizumi, Fuji City, Shizuoka Prefecture Jatco stock In-house (56) Reference JP-A-7-78022 (JP, A) JP-A-2-69619 (JP, A) JP-A-7-100724 (JP, A) Actual development Sho-63-27903 (JP, U) ) Actual Kaihei 2-18197 (JP, U) (58) Fields investigated (Int.Cl. ⁷ , DB name) B23K 15/02-15/06 G01M 3/02 G05B 19/18 G05B 23/02

Claims (6)

(57) [Claims] 1. A monitoring device for an electron beam processing machine, which irradiates an electron beam to a workpiece in a working chamber which is in a vacuum state to process the workpiece, the operating state of the electron beam processing machine. By means of detecting information whose value changes by means, means for calculating an average value of the values of the detection information detected by the means for each predetermined unit period, and means for calculating the average value Prediction means for predicting a future change in the value of the detection information from the history of average values, and margin period calculation means for obtaining a margin period until the value of the detection information predicted by the prediction means reaches a predetermined threshold value. And a first alarm means for issuing an alarm when the margin period is within a predetermined warning period, the monitoring device for an electron beam processing machine. 2. The predicting means assumes that the degree of change between the past average value and the latest average value before the predetermined period, which is obtained by the average value calculating means, will continue in the future.
The monitoring device for an electron beam processing machine according to claim 1, wherein the monitoring device predicts a future change in the value of the detection information. 3. The electron beam according to claim 1, further comprising second alarm means for issuing an alarm when the value of the detection information of the detection means exceeds a predetermined threshold value. Monitoring equipment for processing machines. 4. The electronic device according to claim 1, further comprising display means for displaying a calculation result of said average value calculation means and said margin period calculation means and a prediction result of said prediction means. Beam processing machine monitoring device. 5. The detecting means detects the time from when the suction means for bringing the working chamber into a vacuum state starts to operate until when the working chamber reaches a predetermined pressure. The monitoring device for an electron beam processing machine according to claim 1, 2, 3, or 4. 6. The detection means detects the pressure in the work chamber at a predetermined operation timing of the suction means for bringing the work chamber into a vacuum state. , 3 or 4, the electron beam processing machine monitoring device.