JP3453012B2 - Combustion nozzle for exhaust gas treatment - Google Patents
Combustion nozzle for exhaust gas treatmentInfo
- Publication number
- JP3453012B2 JP3453012B2 JP20754895A JP20754895A JP3453012B2 JP 3453012 B2 JP3453012 B2 JP 3453012B2 JP 20754895 A JP20754895 A JP 20754895A JP 20754895 A JP20754895 A JP 20754895A JP 3453012 B2 JP3453012 B2 JP 3453012B2
- Authority
- JP
- Japan
- Prior art keywords
- exhaust gas
- gas
- passage
- combustion nozzle
- ejection port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000002485 combustion reaction Methods 0.000 title claims description 36
- 239000007789 gas Substances 0.000 claims description 153
- 239000002737 fuel gas Substances 0.000 claims description 42
- 230000002093 peripheral effect Effects 0.000 claims description 5
- 230000000052 comparative effect Effects 0.000 description 8
- 239000000843 powder Substances 0.000 description 7
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 6
- 238000000354 decomposition reaction Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 239000001294 propane Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 239000000446 fuel Substances 0.000 description 2
- 239000002341 toxic gas Substances 0.000 description 2
- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical compound N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- -1 and if necessary Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000001273 butane Substances 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000000567 combustion gas Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 210000003746 feather Anatomy 0.000 description 1
- 239000003063 flame retardant Substances 0.000 description 1
- 238000004817 gas chromatography Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- IJDNQMDRQITEOD-UHFFFAOYSA-N n-butane Chemical compound CCCC IJDNQMDRQITEOD-UHFFFAOYSA-N 0.000 description 1
- OFBQJSOFQDEBGM-UHFFFAOYSA-N n-pentane Natural products CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 1
- 239000003345 natural gas Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
- F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
- F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
Landscapes
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Incineration Of Waste (AREA)
- Treating Waste Gases (AREA)
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、半導体製造工程等
から排出される可燃性、若しくは有毒性のガス、又は環
境保護の観点から大気中に排出する際に除去、或いは濃
度を低減させる必要のあるガス成分が含まれる排ガスを
処理するための排ガス処理用燃焼ノズルに関するもので
ある。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention requires the removal or reduction of the concentration of flammable or toxic gas emitted from the semiconductor manufacturing process or the like when discharged into the atmosphere from the viewpoint of environmental protection. The present invention relates to an exhaust gas treating combustion nozzle for treating an exhaust gas containing a certain gas component.
【０００２】[0002]
【従来の技術及び発明が解決しようとする課題】例え
ば、半導体を製造する際の各種の工程において排出され
る排ガス中には半導体材料であるＳｉＨ4 等の有害成分
が含まれているため、かかる排ガスはそのままでは大気
中に排出することができない。そこで、従来は、有害成
分を含むこの種の排ガスを大気中に排出するにあたっ
て、特開昭６３−２７９０１４号公報に提案されている
ように、排ガス流路を中心として同心円状に燃料ガス流
路、助燃ガス流路を環状に配してなるノズルの先端で燃
料ガスを燃焼させて炎を環状に形成し、かかる炎によっ
てその中心を流れる排ガスを燃焼して有害成分を除去す
るということが行われている。2. Description of the Related Art For example, exhaust gas discharged in various steps in manufacturing a semiconductor contains harmful components such as SiH 4 which is a semiconductor material. Exhaust gas cannot be discharged into the atmosphere as it is. Therefore, conventionally, when this kind of exhaust gas containing harmful components is discharged into the atmosphere, a fuel gas flow path is concentrically formed around the exhaust gas flow path as proposed in Japanese Patent Laid-Open No. 63-279014. It is possible to burn fuel gas at the tip of a nozzle that has an auxiliary combustion gas passage arranged in an annular shape to form an annular flame, and burn the exhaust gas flowing through the center of the flame to remove harmful components. It is being appreciated.
【０００３】しかしながら、上記の如き方法では、排ガ
ス中に含まれる有害成分が可燃性のものであり、しか
も、その含有量が多ければ、有害成分を燃焼するととも
に有害成分自身の燃焼により大きな熱量が得られ、かか
る有害成分を効率良く除去することができるが、近年
は、半導体製造装置であるＣＶＤ等を真空排気する際、
系内の汚れを防止するため、ポンプ排気室に油等の封止
液のないドライポンプが使用されている。ドライポンプ
はその軸シールに多量の窒素ガスを用いており、これら
のパージガスは各プロセスからの排出ガスと一緒に排気
される。この結果、排ガス中に含まれる可燃性成分の濃
度は燃焼範囲以下の低濃度となるため可燃性の有害成分
の燃焼からは充分な熱量が得られず、排ガス中に半導体
製造装用のクリーニングガスであるＮＦ3 やＣ2 Ｆ6 等
の難燃性の有害成分が含まれている場合には、これらの
有害成分を除去するのが困難であった。However, in the above method, the harmful components contained in the exhaust gas are combustible, and if the content is large, the harmful components are burned and a large amount of heat is generated by the combustion of the harmful components themselves. Although it is possible to efficiently remove such harmful components, in recent years, when evacuation of CVD or the like, which is a semiconductor manufacturing apparatus, is performed,
In order to prevent contamination in the system, a dry pump without a sealing liquid such as oil is used in the pump exhaust chamber. The dry pump uses a large amount of nitrogen gas for its shaft seal, and these purge gases are exhausted together with the exhaust gas from each process. As a result, the concentration of the combustible components contained in the exhaust gas becomes a low concentration below the combustion range, so sufficient amount of heat cannot be obtained from the combustion of the combustible harmful components, and the cleaning gas for semiconductor manufacturing equipment is included in the exhaust gas. When a certain flame-retardant harmful component such as NF 3 or C 2 F 6 is contained, it is difficult to remove these harmful components.
【０００４】更に、前述したような方法によって排ガス
中の有害成分を除去するにあたり、例えば、排ガス中に
ＳｉＨ4 が含まれているとその燃焼生成物であるＳｉＯ
2 の粉末がノズルに付着して排ガス流路や炎の火口が塞
がれてしまう虞があり、排ガス中にこのようなノズルに
付着する虞のある粉末が生成されてしまうような有害成
分が含まれている場合には、かかる粉末の付着を防止し
なければならないという問題もある。Further, in removing harmful components in exhaust gas by the above-mentioned method, for example, when SiH 4 is contained in exhaust gas, its combustion product is SiO.
There is a risk that the powder of 2 will adhere to the nozzle and block the exhaust gas flow path and the flame crater, and harmful components such as powder that may adhere to the nozzle may be generated in the exhaust gas. If it is included, there is also the problem that such powder adhesion must be prevented.
【０００５】本発明者らは上記従来技術の有する問題を
解決すべく鋭意研究を重ねた結果、本発明を完成するに
至った。The present inventors have completed the present invention as a result of intensive studies to solve the problems of the above-mentioned conventional techniques.
【０００６】[0006]
【課題を解決するための手段】即ち、本発明の排ガス処
理用燃焼ノズルは、排ガス流路の周囲に燃料ガス供給路
を同心円状に配してなるノズルの先端で上記燃料ガス供
給路から供給される燃料ガスを燃焼せしめ、燃料ガスの
燃焼により形成される炎でガス噴出口から噴出される排
ガス中の有害成分を燃焼、又は熱分解して処理する排ガ
ス処理用燃焼ノズルであって、排ガス流路側に向かって
下方に斜行させた燃料ガス供給路の上端面に、排ガス流
路のガス噴出口を囲む複数の火口を一定の間隔をもって
非連続的に穿設したことを特徴とする。That is, in the exhaust gas treating combustion nozzle of the present invention, the fuel gas supply passage is concentrically arranged around the exhaust gas passage and is supplied from the fuel gas supply passage at the tip of the nozzle. A combustion nozzle for exhaust gas treatment, which burns the fuel gas to be burned and burns or thermally decomposes harmful components in the exhaust gas ejected from the gas jet with a flame formed by the combustion of the fuel gas. A plurality of craters surrounding the gas ejection port of the exhaust gas flow passage are discontinuously formed at regular intervals on the upper end surface of the fuel gas supply passage inclined downward toward the flow passage side.
【０００７】本発明にあっては、排ガス流路の中心から
壁面に向かって徐々に開口面積が広がるよう排ガス流路
の周方向に対して一定の傾きをもって複数の羽根片を取
り付けてなる案内羽根を排ガス流路のガス噴出口に設け
ておくのが好ましく、かかる案内羽根は排ガスの噴出流
により回転し得るよう構成するのが好ましい。According to the present invention, the guide vanes are formed by attaching a plurality of blade pieces with a certain inclination with respect to the circumferential direction of the exhaust gas passage so that the opening area gradually increases from the center of the exhaust gas passage toward the wall surface. Is preferably provided at the gas ejection port of the exhaust gas passage, and such guide vanes are preferably configured so as to be rotatable by the jet flow of the exhaust gas.
【０００８】更に、本発明では、ガス噴出口の端縁を、
燃料ガス供給路の端面の内周縁よりも上方に突出せしめ
ておくのが好ましい。Further, in the present invention, the edge of the gas ejection port is
It is preferable that the fuel gas supply passage is projected above the inner peripheral edge of the end face of the fuel gas supply passage.
【０００９】[0009]
【発明の実施の形態】以下、本発明排ガス処理用燃焼ノ
ズル１の実施の形態を図面に基づき詳細に説明する。
尚、図１は本発明燃焼ノズル１の一例の概略示す斜視図
であり、図２は図１のＩＩ−ＩＩ線における断面図であ
る。BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of a combustion nozzle 1 for treating exhaust gas of the present invention will be described below in detail with reference to the drawings.
1 is a schematic perspective view of an example of the combustion nozzle 1 of the present invention, and FIG. 2 is a sectional view taken along line II-II of FIG.
【００１０】本発明排ガス処理用燃焼ノズル１は、図示
するように、上端がガス噴出口２ａとして開口する排ガ
ス流路２と、上記ガス噴出口２ａの近傍に燃料ガスを供
給する燃料ガス供給路３とを、排ガス流路２を中心とす
る同心円状に配してなるものであって、燃料ガス供給路
３の上端面３ａには、ガス噴出口２ａを囲むように複数
の火口４が一定の間隔をもって非連続的に穿設されてい
るとともに、火口４が穿設された燃料ガス供給路３の上
端面３ａが排ガス流路２側に向かって下方に斜行してい
る。As shown in the figure, the combustion nozzle 1 for treating exhaust gas of the present invention has an exhaust gas passage 2 whose upper end opens as a gas ejection port 2a, and a fuel gas supply passage for supplying a fuel gas to the vicinity of the gas ejection port 2a. 3 are arranged concentrically around the exhaust gas flow path 2, and a plurality of craters 4 are fixed on the upper end surface 3a of the fuel gas supply path 3 so as to surround the gas ejection port 2a. The upper end surface 3a of the fuel gas supply passage 3 in which the crater 4 is formed is provided so as to be discontinuous at intervals of, and is inclined downward toward the exhaust gas passage 2 side.
【００１１】このような構成の本発明排ガス処理用燃焼
ノズル１は、図３に示すような排ガス処理装置５におけ
る筒状の燃焼室６内に設置して用いられ、点火バーナー
７により燃料ガス供給路３から供給される燃料ガスに点
火してガス噴出口２ａの周りに穿設された火口４に炎を
形成するとともに、ガス噴出口２ａから噴出する排ガス
を火口４に形成した炎に曝して加熱することによって、
排ガス中の有害成分を燃焼、又は熱分解して排ガスの処
理を行うというものである。The exhaust gas treating combustion nozzle 1 of the present invention having such a configuration is used by being installed in a cylindrical combustion chamber 6 in an exhaust gas treating apparatus 5 as shown in FIG. 3, and is supplied with fuel gas by an ignition burner 7. The fuel gas supplied from the passage 3 is ignited to form a flame at the crater 4 formed around the gas outlet 2a, and the exhaust gas emitted from the gas outlet 2a is exposed to the flame formed at the crater 4. By heating
It treats the exhaust gas by burning or thermally decomposing harmful components in the exhaust gas.
【００１２】図示する排ガス処理装置５にあっては、処
理後の排ガスを冷却したり、燃焼室６外に排除したりす
るために、燃焼室６の下方に設けた吸気口８から燃焼室
６上方に設けた排気口９に向かう空気の流れが生じるよ
うに構成されている。尚、図中１０は燃焼室６内での空
気の流量を調節するための弁であり、１１は燃焼室６内
における空気の流れを調整するための整流板である。ま
た、１２は炎の検知器であり、１３は外部から炎を監視
するための覗き窓である。そして、このような排ガス処
理装置５には、必要に応じて燃焼室６内の温度や圧力、
又は炎の温度を感知するセンサー等が設けられている。In the exhaust gas treatment apparatus 5 shown in the figure, in order to cool the exhaust gas after treatment and to remove it to the outside of the combustion chamber 6, the combustion chamber 6 is introduced from an intake port 8 provided below the combustion chamber 6. It is configured so that air flows toward the exhaust port 9 provided above. In the figure, 10 is a valve for adjusting the flow rate of air in the combustion chamber 6, and 11 is a straightening plate for adjusting the flow of air in the combustion chamber 6. Further, 12 is a flame detector, and 13 is a viewing window for externally monitoring the flame. The exhaust gas treatment device 5 as described above is provided with the temperature and pressure in the combustion chamber 6 as necessary.
Alternatively, a sensor or the like for detecting the temperature of the flame is provided.
【００１３】ここで、本発明排ガス処理用燃焼ノズル１
を用いて処理する排ガスとは、例えば、半導体を製造す
る際の各種の工程において排出されるＳｉＨ4 、ＳｉＨ
2 Ｃｌ2 、ＧｅＨ4 、Ｂ2 Ｈ6 、ＡｓＨ3 、ＰＨ3 、Ｎ
Ｆ3 、又はＣ2 Ｆ6 等のような可燃性、若しくは有毒性
のガス、又は環境保護の観点から大気中に排出する際に
除去、或いは濃度を低減させる必要のあるガス成分が有
害成分として含まれる排ガスをいうものとする。Here, the combustion nozzle 1 for treating exhaust gas according to the present invention.
Exhaust gas treated by using, for example, SiH 4 , SiH exhausted in various steps in manufacturing a semiconductor
2 Cl 2 , GeH 4 , B 2 H 6 , AsH 3 , PH 3 , N
A flammable or toxic gas such as F 3 or C 2 F 6 , or a gas component that needs to be removed or reduced in concentration when discharged into the atmosphere from the viewpoint of environmental protection is a harmful component. It refers to the exhaust gas contained.
【００１４】また、炎を形成する燃料ガスとしては、水
素、メタン、プロパン、ブタン、エチレン、天然ガス、
又はこれらの混合ガスを主燃料とし、これに必要に応じ
て空気や酸素富化された空気等を助燃ガスとして混合す
るとともに、更に必要に応じて窒素、アルゴン、二酸化
炭素等の不活性ガスで希釈したものが用いられる。The fuel gas forming the flame includes hydrogen, methane, propane, butane, ethylene, natural gas,
Alternatively, a mixed gas of these is used as a main fuel, and if necessary, air or oxygen-enriched air is mixed as a supporting gas, and if necessary, an inert gas such as nitrogen, argon or carbon dioxide is added. A diluted product is used.
【００１５】本発明排ガス処理用燃焼ノズル１によれ
ば、前述したように、燃料ガス供給路３から供給される
燃料ガスの燃焼により形成される炎で排ガス中の有害成
分を燃焼、又は熱分解することで当該排ガスの処理が行
われるが、炎の温度は可視部よりも外側の部分で最も高
くなるということが一般に知られている。According to the exhaust gas treatment combustion nozzle 1 of the present invention, as described above, the flame formed by the combustion of the fuel gas supplied from the fuel gas supply passage 3 burns or thermally decomposes the harmful components in the exhaust gas. By doing so, the exhaust gas is treated, but it is generally known that the temperature of the flame becomes highest in the portion outside the visible portion.
【００１６】このため、排ガス流路２側に向かって下方
に斜行させた燃料ガス供給路３の上端面３ａに、排ガス
流路２のガス噴出口２ａを囲む複数の火口４を一定の間
隔をもって非連続的に穿設した本発明排ガス処理用燃焼
ノズル１にあっては、ガス噴出口２ａを囲んで複数の炎
が分散し、且つそれぞれの炎がガス噴出口２ａ側に傾い
て形成されるので、ガス噴出口２ａから噴出される排ガ
スが個々の炎の高温部分に効率良く曝されるとともに、
複数の炎のそれぞれの高温部分を排ガスの処理に有効に
利用することができるため、排ガスを加熱処理するのに
充分な熱量を得ることができる。For this reason, a plurality of craters 4 surrounding the gas ejection port 2a of the exhaust gas passage 2 are formed at a fixed interval on the upper end surface 3a of the fuel gas supply passage 3 which is slanted downward toward the exhaust gas passage 2 side. In the exhaust gas treatment combustion nozzle 1 of the present invention which is discontinuously formed with a plurality of flames, a plurality of flames are dispersed around the gas ejection port 2a, and each flame is formed to be inclined toward the gas ejection port 2a side. Therefore, the exhaust gas ejected from the gas ejection port 2a is efficiently exposed to the high temperature portion of each flame, and
Since each high temperature part of the plurality of flames can be effectively used for the treatment of the exhaust gas, it is possible to obtain a sufficient amount of heat for the heat treatment of the exhaust gas.
【００１７】ここで、燃料ガス供給路３の上端面３ａの
傾きαは、排ガスの噴出方向に対して４５度以上９０度
未満の範囲から炎の高温部分を排ガスの処理に有効に利
用できる角度を適宜選択することができるが、炎の安定
性等を考慮すると６０度であるのが好ましい。そして、
本発明において燃料ガス供給路３の上端面３ａに穿設す
る火口４の形状は、スリット状、円形等の各種の形状か
ら適宜選択することができるが、炎の外側を流れる空気
からの炎への二次空気の混合や、立ち消えや逆火等が起
こらぬように炎の安定性を考慮すると、スリット状で一
列に配列するように穿設するのが好ましい。また、かか
る火口４を燃料ガス供給路３の上端面３ａに穿設する間
隔は、隣接する炎が重なってその高温部分を有効に利用
することができなくなってしまうことがないように、排
ガス流路２のガス排出口の口径や、穿設される火口４の
数によって適宜選択することができるが、通常は１〜１
０ｍｍの間隔で穿設しておくのが好ましい。Here, the inclination α of the upper end surface 3a of the fuel gas supply passage 3 is such that the high temperature portion of the flame can be effectively utilized for exhaust gas treatment from the range of 45 degrees or more and less than 90 degrees with respect to the exhaust gas ejection direction. Can be appropriately selected, but it is preferably 60 degrees in consideration of flame stability and the like. And
In the present invention, the shape of the crater 4 formed on the upper end surface 3a of the fuel gas supply passage 3 can be appropriately selected from various shapes such as a slit shape and a circular shape. Considering the stability of the flame so that secondary air mixing, extinguishing, flashback, etc. do not occur, it is preferable to form the slits so that they are arranged in a line. In addition, the interval at which the crater 4 is formed in the upper end surface 3a of the fuel gas supply passage 3 is such that the adjacent flames do not overlap each other and the high temperature portion cannot be effectively used. It can be appropriately selected depending on the diameter of the gas outlet of the passage 2 and the number of the crater 4 to be bored, but usually 1 to 1
It is preferable to make holes at intervals of 0 mm.
【００１８】また、本発明では、前述したように排ガス
を加熱処理するのに充分な熱量を得ることができるが、
排ガス流路２のガス噴出口２ａの口径が大きい場合等、
ガス噴出口２ａから噴出する排ガスの中心部を流れる排
ガスは、炎との距離があるため炎の高温部分との接触が
不充分となる虞がある。このため、本発明にあっては、
図４に示すような、排ガス流路２の中心から壁面に向か
って徐々に開口面積が広がるよう排ガス流路２の周方向
に対して一定の傾きをもって複数の羽根片１４ａを取り
付けてなる案内羽根１４を、図５に示すようにガス噴出
口２ａに設けておくのが好ましく、これによって、排ガ
スが炎の方向に向かって噴出するとともに、炎の高温部
分を旋回しながら流れ、排ガスと炎の高温部分との接触
をより充分なものとすることができる。尚、図中の二点
鎖線の矢印は排ガスの流れを概略的に示すものである。Further, in the present invention, as described above, it is possible to obtain a sufficient amount of heat to heat-treat exhaust gas.
When the diameter of the gas ejection port 2a of the exhaust gas passage 2 is large,
The exhaust gas flowing through the central portion of the exhaust gas ejected from the gas ejection port 2a may have insufficient contact with the high-temperature part of the flame because of the distance from the flame. Therefore, in the present invention,
As shown in FIG. 4, a guide blade in which a plurality of blade pieces 14a are attached with a certain inclination with respect to the circumferential direction of the exhaust gas flow channel 2 so that the opening area gradually increases from the center of the exhaust gas flow channel 2 toward the wall surface. As shown in FIG. 5, it is preferable to provide 14 at the gas outlet 2a, whereby the exhaust gas is jetted in the direction of the flame and swirls in the high temperature portion of the flame to generate the exhaust gas and the flame. The contact with the high temperature part can be more sufficient. The two-dot chain line arrow in the figure schematically shows the flow of exhaust gas.
【００１９】このときの案内羽根１４の各羽根片１４ａ
の取り付け角度βは、ガス噴出口２ａの口径や、排ガス
の流量等に応じて９０度を超えない範囲で適宜選択する
ことができるが、圧力損失や炎への影響を考慮すると３
０〜６０度の範囲にあるのが好ましく、特に好ましい角
度は３０度である。また、案内羽根１４の大きさは、そ
の直径がガス噴出口２ａの径と概略等しくなるようにす
るのが好ましい。Each blade piece 14a of the guide blade 14 at this time
The attachment angle β of can be appropriately selected within a range not exceeding 90 degrees depending on the diameter of the gas ejection port 2a, the flow rate of exhaust gas, etc., but considering the influence on the pressure loss and the flame, 3
It is preferably in the range of 0 to 60 degrees, and a particularly preferable angle is 30 degrees. Further, it is preferable that the guide vanes 14 have a diameter substantially equal to the diameter of the gas ejection port 2a.
【００２０】また、上記の如き案内羽根１４を排ガスの
噴出流により回転し得るように構成すれば、排ガス中の
有害成分を燃焼、又は熱分解する際にノズル１に付着す
る虞のある粉末が生成される場合であっても、かかる粉
末がノズル１に付着し難くすることができ、ガス噴出口
２ａや火口４が閉塞してしまうことがない。ここで、案
内羽根１４を回転可能に構成する具体的な手段は特に問
わないが、例えば、ガス噴出口２ａを塞ぐことのない棒
状の部材をガス噴出口２ａの相対する面に跨がせて設け
ておき、当該部材に案内羽根１４の中心を回動可能に軸
支せしめる等すれば良い。また、案内羽根１４を回転可
能に構成する場合には、案内羽根１４の重量や、羽根片
１４ａの取り付け角度等を適宜調整して１００〜２００
ｒ．ｐ．ｍ．の回転数で案内羽根１４が回転するように
構成するのが好ましい。Further, if the guide vanes 14 as described above are constructed so as to be rotatable by the jet flow of the exhaust gas, powder that may adhere to the nozzle 1 when burning or thermally decomposing harmful components in the exhaust gas is generated. Even if it is generated, the powder can be made difficult to adhere to the nozzle 1, and the gas ejection port 2a and the crater 4 will not be blocked. Here, the specific means for rotatably configuring the guide vanes 14 is not particularly limited, but, for example, a rod-shaped member that does not block the gas ejection port 2a may be straddled over the opposing surfaces of the gas ejection port 2a. It suffices if they are provided and the center of the guide blade 14 is rotatably supported by the member. When the guide vane 14 is configured to be rotatable, the weight of the guide vane 14, the mounting angle of the vane piece 14a, and the like are appropriately adjusted to 100 to 200.
r. p. m. It is preferable that the guide vanes 14 are rotated at the number of rotations.
【００２１】更に、本発明にあっては、図５に示すよう
に、ガス噴出口２ａの端縁２ｂを燃料ガス供給路３の端
面の内周縁３ｂよりも上方に突出せしめるのが好まし
く、これによって炎を安定して形成することができる。
かかる態様は、前述したような案内羽根１４をガス噴出
口２ａに設けた場合に特に効果的であり、案内羽根１４
の設置に伴い排ガスの炎への接触が向上する反面、炎の
乱れへの影響が生ずるが、このような影響を打ち消すこ
とができる。尚、ガス噴出口２ａの端縁２ｂを突出させ
る高さｈは、形成される炎の大きさ等に応じて適宜選択
する必要があるが実用上は５〜１０ｍｍが適切である。Further, in the present invention, as shown in FIG. 5, it is preferable that the end edge 2b of the gas ejection port 2a is projected above the inner peripheral edge 3b of the end surface of the fuel gas supply passage 3. The flame can be stably formed by.
This mode is particularly effective when the guide blade 14 as described above is provided at the gas ejection port 2a.
Although the contact of the exhaust gas with the flame is improved with the installation of, the influence on the turbulence of the flame occurs, but such an influence can be canceled. The height h at which the end edge 2b of the gas ejection port 2a is projected needs to be appropriately selected according to the size of the flame to be formed, etc., but is practically 5 to 10 mm.
【００２２】[0022]
【実施例】次に、実施例、及び比較例を挙げて本発明を
更に詳細に説明する。EXAMPLES Next, the present invention will be described in more detail with reference to Examples and Comparative Examples.
【００２３】〔実施例１〕排ガス流路の口径を４０ｍ
ｍ、燃料ガス供給路の上端面の傾きを３０度とし、燃料
ガス供給路の上端面にスリット状の火口を４ｍｍの間隔
でガス噴出口を囲むようにして一列に穿設してなる前述
の如きノズルを図２に示す排ガス処理装置に設置し、プ
ロパン５リットル／ｍｉｎ．に空気比０．６の割合で空
気を混合した燃料ガスを燃料ガス供給路に供給して各々
の火口に炎を形成した。このときの燃焼室内での空気の
流量が３ｍ3 ／ｍｉｎ．となるように調整した。そし
て、流量２リットル／ｍｉｎ．のＣ2 Ｆ6 にＮ2 を混合
したものを排ガスとみたてガス噴出口から噴出し、これ
を上記炎に曝して加熱処理した際のＣ2 Ｆ6 に混合する
Ｎ2 の流量の変化に対するＣ2 Ｆ6 の分解率を調べた。[Example 1] The diameter of the exhaust gas passage was 40 m.
m, the inclination of the upper end face of the fuel gas supply passage is 30 degrees, and slit-like craters are formed in a line in the upper end face of the fuel gas supply passage at intervals of 4 mm so as to surround the gas ejection port. Was installed in the exhaust gas treating apparatus shown in FIG. 2, and propane 5 liter / min. Fuel gas mixed with air at an air ratio of 0.6 was supplied to the fuel gas supply passage to form a flame at each crater. At this time, the flow rate of air in the combustion chamber is 3 m 3 / min. Was adjusted so that Then, the flow rate is 2 liters / min. A mixture of C 2 F 6 and N 2 is regarded as an exhaust gas and is ejected from a gas ejection port, and when it is exposed to the flame and subjected to heat treatment, the flow rate of N 2 mixed with C 2 F 6 is changed. The decomposition rate of C 2 F 6 was investigated.
【００２４】〔実施例２〕ガス噴出口に扇形の羽根片を
３０度の角度で取り付けた案内羽根を取り付けた以外は
実施例１と同様にしてＣ2 Ｆ6 に混合するＮ2 の流量の
変化に対するＣ2Ｆ6 の分解率を調べた。[Embodiment 2] The flow rate of N 2 mixed with C 2 F 6 was the same as in Embodiment 1 except that a guide blade in which fan-shaped blade pieces were attached at an angle of 30 degrees was attached to the gas ejection port. The decomposition rate of C 2 F 6 with respect to the change was investigated.
【００２５】〔比較例１〕燃料供給路の上端面を開口し
て炎が環状に形成されるようにした以外は実施例１と同
様にしてＣ2 Ｆ6 に混合するＮ2 の流量の変化に対する
Ｃ2 Ｆ6 の分解率を調べた。[Comparative Example 1] A change in the flow rate of N 2 mixed with C 2 F 6 was carried out in the same manner as in Example 1 except that the flame was formed in an annular shape by opening the upper end surface of the fuel supply passage. The decomposition rate of C 2 F 6 was investigated.
【００２６】上記実施例１、２、及び比較例１の結果を
図６に示す。この結果から、本発明によればＣ2 Ｆ6 の
分解率が大きく向上し、かかる本発明の効果は噴出口に
案内羽根を設けた場合により顕著なものとなることが判
る。The results of Examples 1 and 2 and Comparative Example 1 are shown in FIG. From this result, it is understood that according to the present invention, the decomposition rate of C 2 F 6 is significantly improved, and the effect of the present invention becomes more remarkable when the guide vanes are provided at the ejection port.
【００２７】〔実施例３〕燃料ガス供給路の上端面の傾
きαを６０度とし、且つＣ2 Ｆ6 の濃度が１％となるよ
うにＮ2 を混合したものを排ガスとみたてた以外は実施
例１と同様にしてＣ2 Ｆ6 に混合するＮ2 の流量の変化
に対するＣ2 Ｆ6 の分解率を調べた。[Embodiment 3] Except that the mixture of N 2 such that the inclination α of the upper end surface of the fuel gas supply passage is 60 degrees and the concentration of C 2 F 6 is 1% is regarded as the exhaust gas. We examined the degradation rate of C 2 F 6 with respect to the flow rate change in N 2 to be mixed with C 2 F 6 in the same manner as in example 1.
【００２８】〔比較例２〕燃料ガス供給路の上端面の傾
きαを９０度とした以外は実施例３と同様にしてＣ2 Ｆ
6 に混合するＮ2 の流量の変化に対するＣ2 Ｆ6 の分解
率を調べた。[Comparative Example 2] C 2 F was carried out in the same manner as in Example 3 except that the inclination α of the upper end face of the fuel gas supply passage was changed to 90 degrees.
The decomposition rate of C 2 F 6 with respect to the change of the flow rate of N 2 mixed with 6 was investigated.
【００２９】上記実施例３、及び比較例２の結果を図７
に示す。この結果から、炎をガス噴出口側に傾けて形成
することによりＣ2 Ｆ6 の分解率が向上することが判
る。The results of Example 3 and Comparative Example 2 are shown in FIG.
Shown in. From this result, it is understood that the decomposition rate of C 2 F 6 is improved by forming the flame by inclining it toward the gas ejection port.
【００３０】〔実施例４〕燃料ガス供給路の上端面の傾
きαを６０度とするとともにガス噴出口に実施例２と同
様の案内羽根を回転可能に設け、且つプロパン２リット
ル／ｍｉｎ．に空気比１．０の割合で空気を混合した燃
料ガスを用いた以外は実施例１と同様にして、流量５０
リットル／ｍｉｎ．のＮ2 に５％の濃度でＳｉＨ4 を混
合したものを排ガスとみたてて、排ガス処理後のＳｉＯ
2 の付着具合と、排ガス処理装置の排気口におけるＳｉ
Ｈ4 の濃度を調べた。その結果、ＳｉＯ2 の付着はみら
れず、また、ＳｉＨ4 の濃度は検出限界以下であった。
尚、案内羽根の回転数は１００ｒ．ｐ．ｍ．であった。[Embodiment 4] The inclination α of the upper end surface of the fuel gas supply passage is set to 60 degrees, the same guide vanes as in Embodiment 2 are rotatably provided at the gas ejection port, and propane 2 liter / min. A flow rate of 50 was obtained in the same manner as in Example 1 except that a fuel gas in which air was mixed at an air ratio of 1.0 was used.
Liter / min. The mixture of N 2 with SiH 4 at a concentration of 5% is regarded as the exhaust gas, and SiO after the exhaust gas treatment is treated.
The degree of adhesion of 2 and Si at the exhaust port of the exhaust gas treatment device
The concentration of H 4 was investigated. As a result, the adhesion of SiO 2 was not seen, and the concentration of SiH 4 was below the detection limit.
The rotation speed of the guide vanes was 100 r. p. m. Met.
【００３１】〔比較例３〕案内羽根を固定して設けた以
外は実施例４と同様にして、排ガス処理後のＳｉＯ2 の
付着具合と、排ガス処理装置の排気口におけるＳｉＨ4
の濃度を調べた。その結果、案内羽根の後流にＳｉＯ2
の付着が見られたが、ＳｉＨ4 の濃度は検出限界以下で
あった。[Comparative Example 3] Except that the guide vanes were fixedly provided, in the same manner as in Example 4, the degree of adhesion of SiO 2 after the exhaust gas treatment and the SiH 4 at the exhaust port of the exhaust gas treatment apparatus were performed.
Was examined. As a result, the SiO 2
However, the SiH 4 concentration was below the detection limit.
【００３２】尚、ＳｉＨ4 の濃度はガスクロマトグラフ
による分析結果であり、検出限界は０．１ｐｐｍであっ
た。The concentration of SiH 4 was the result of analysis by gas chromatography, and the detection limit was 0.1 ppm.
【００３３】[0033]
【発明の効果】以上説明したように、本発明では排ガス
流路側に向かって下方に斜行させた燃料ガス供給路の上
端面に、排ガス流路のガス噴出口を囲む複数の火口を一
定の間隔をもって非連続的に穿設されており、ガス噴出
口を囲んで複数の炎が分散し、且つそれぞれの炎がガス
噴出口側に傾いて形成されるので、ガス噴出口から噴出
される排ガスが個々の炎の高温部分に効率良く曝される
とともに、複数の炎のそれぞれの高温部分を排ガスの処
理に有効に利用することができるため、排ガスを加熱処
理するのに充分な熱量を得ることができる。As described above, according to the present invention, a plurality of craters surrounding the gas outlets of the exhaust gas passage are fixed on the upper end surface of the fuel gas supply passage that is slanted downward toward the exhaust gas passage. Exhaust gas ejected from the gas outlets is discontinuously provided at intervals, and a plurality of flames are dispersed around the gas outlets and each flame is formed to incline toward the gas outlet side. Is efficiently exposed to the hot parts of the individual flames, and each of the hot parts of the multiple flames can be effectively used to treat the exhaust gas, so that a sufficient amount of heat to heat the exhaust gas can be obtained. You can
【００３４】また、本発明では、排ガス流路の中心から
壁面に向かって徐々に開口面積が広がるよう排ガス流路
の周方向に対して一定の傾きをもって複数の羽根片を取
り付けてなる案内羽根を排ガス流路のガス噴出口に設け
ておくことによって、排ガスが炎の方向に向かって噴出
するとともに、炎の高温部分を旋回しながら流れ、排ガ
スと炎の高温部分との接触をより充分なものとすること
ができ、通常では分解の困難なＣ2 Ｆ6 等であっても良
好に分解することができる。Further, according to the present invention, the guide vanes are formed by attaching a plurality of vane pieces with a certain inclination with respect to the circumferential direction of the exhaust gas passage so that the opening area gradually increases from the center of the exhaust gas passage toward the wall surface. By providing it at the gas outlet of the exhaust gas flow path, the exhaust gas is ejected in the direction of the flame and flows while swirling in the high temperature part of the flame, so that contact between the exhaust gas and the high temperature part of the flame is more sufficient. And C 2 F 6 or the like, which is usually difficult to decompose, can be decomposed satisfactorily.
【００３５】そして、上記の如き案内羽根を排ガスの噴
出流により回転し得るよう構成すれば、排ガス中の有害
成分を燃焼、又は熱分解する際にノズルに付着する虞の
ある粉末が生成される場合であっても、かかる粉末がノ
ズルに付着し難くすることができ、ガス噴出口や火口が
閉塞してしまうことがない。If the guide vanes are constructed so that they can be rotated by the jet flow of the exhaust gas, powder that may adhere to the nozzle when burning or thermally decomposing harmful components in the exhaust gas is produced. Even in such a case, it is possible to make it difficult for the powder to adhere to the nozzle, and the gas ejection port and the crater will not be blocked.
【００３６】更に、本発明にあっては、ガス噴出口の端
縁を燃料ガス供給路の端面の内周縁よりも上方に突出せ
しめることによって炎を安定して形成することができ、
かかる効果は、案内羽根をガス噴出口に設けた場合に特
に有効である。Further, in the present invention, the flame can be stably formed by projecting the end edge of the gas ejection port upward from the inner peripheral edge of the end surface of the fuel gas supply passage,
Such an effect is particularly effective when the guide blade is provided at the gas ejection port.
【図１】本発明排ガス処理用燃焼ノズルの一例の概略を
示す斜視図である。FIG. 1 is a perspective view showing an outline of an example of a combustion nozzle for treating exhaust gas of the present invention.
【図２】図１のＩＩ−ＩＩにおける断面図である。FIG. 2 is a sectional view taken along line II-II in FIG.
【図３】本発明排ガス処理用燃焼ノズルが設置される排
ガス処理装置の一例を示す概略図である。FIG. 3 is a schematic view showing an example of an exhaust gas treating apparatus in which a combustion nozzle for treating exhaust gas of the present invention is installed.
【図４】案内羽根の一例を示す斜視図である。FIG. 4 is a perspective view showing an example of guide blades.
【図５】本発明排ガス処理用燃焼ノズルの他の一例の概
略をを示す断面図である。FIG. 5 is a sectional view schematically showing another example of the combustion nozzle for treating exhaust gas of the present invention.
【図６】実施例１、２、及び比較例１の結果を示すグラ
フである。FIG. 6 is a graph showing the results of Examples 1 and 2 and Comparative Example 1.
【図７】実施例３、及び比較例２の結果を示すグラフで
ある。7 is a graph showing the results of Example 3 and Comparative Example 2. FIG.
【符号の説明】 １ 排ガス処理用燃焼ノズル ２ 排ガス流路 ２ａ ガス噴出口 ２ｂ ガス噴出口の端縁 ３ 燃料ガス供給路 ３ａ 燃料ガス供給路の上端面 ３ｂ 燃料ガス供給路の端面の内周縁 ４ 火口 １４ 案内羽根 １４ａ 羽根片[Explanation of symbols] 1 Combustion nozzle for exhaust gas treatment 2 exhaust gas flow path 2a Gas outlet 2b Edge of gas outlet 3 Fuel gas supply path 3a Upper end surface of fuel gas supply passage 3b Inner peripheral edge of end face of fuel gas supply passage 4 crater 14 Guide vanes 14a feather piece
フロントページの続き (56)参考文献 特開 平５−1807（ＪＰ，Ａ) 特開 昭63−279014（ＪＰ，Ａ) (58)調査した分野(Int.Cl.7，ＤＢ名) F23G 7/06 Continuation of front page (56) References JP-A-5-1807 (JP, A) JP-A-63-279014 (JP, A) (58) Fields investigated (Int.Cl. 7 , DB name) F23G 7 / 06
Claims (4)
円状に配してなるノズルの先端で上記燃料ガス供給路か
ら供給される燃料ガスを燃焼せしめ、燃料ガスの燃焼に
より形成される炎でガス噴出口から噴出される排ガス中
の有害成分を燃焼、又は熱分解して処理する排ガス処理
用燃焼ノズルであって、排ガス流路側に向かって下方に
斜行させた燃料ガス供給路の上端面に、排ガス流路のガ
ス噴出口を囲む複数の火口を一定の間隔をもって非連続
的に穿設したことを特徴とする排ガス処理用燃焼ノズ
ル。1. A fuel gas supplied from the fuel gas supply passage is burned at the tip of a nozzle having a fuel gas supply passage arranged concentrically around the exhaust gas passage, and is formed by combustion of the fuel gas. A combustion nozzle for exhaust gas treatment that burns or thermally decomposes harmful components in exhaust gas ejected from a gas ejection port by a flame, and the fuel gas supply passage is slanted downward toward the exhaust gas passage side. A combustion nozzle for exhaust gas treatment, characterized in that a plurality of craters surrounding a gas ejection port of an exhaust gas flow path are discontinuously formed at regular intervals at an upper end surface.
に開口面積が広がるよう排ガス流路の周方向に対して一
定の傾きをもって複数の羽根片を取り付けてなる案内羽
根を排ガス流路のガス噴出口に設けた請求項１記載の排
ガス処理用燃焼ノズル。2. A guide vane formed by attaching a plurality of vane pieces with a certain inclination to the circumferential direction of the exhaust gas passage so that the opening area gradually increases from the center of the exhaust gas passage toward the wall surface. The exhaust gas treatment combustion nozzle according to claim 1, wherein the combustion nozzle is provided at a gas ejection port.
るよう構成した請求項２記載の排ガス処理用燃焼ノズ
ル。3. A combustion nozzle for treating exhaust gas according to claim 2, wherein the guide vanes are rotatable by the jet flow of the exhaust gas.
面の内周縁よりも上方に突出せしめた請求項１、２、又
は３記載の排ガス処理用燃焼ノズル。4. A combustion nozzle for exhaust gas treatment according to claim 1, 2 or 3, wherein the edge of the gas jet port is projected above the inner peripheral edge of the end surface of the fuel gas supply passage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20754895A JP3453012B2 (en) | 1995-07-21 | 1995-07-21 | Combustion nozzle for exhaust gas treatment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20754895A JP3453012B2 (en) | 1995-07-21 | 1995-07-21 | Combustion nozzle for exhaust gas treatment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0942643A JPH0942643A (en) | 1997-02-14 |
| JP3453012B2 true JP3453012B2 (en) | 2003-10-06 |
Family
ID=16541565
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20754895A Expired - Fee Related JP3453012B2 (en) | 1995-07-21 | 1995-07-21 | Combustion nozzle for exhaust gas treatment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3453012B2 (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4176132B2 (en) * | 1997-11-21 | 2008-11-05 | 株式会社荏原製作所 | Combustor for exhaust gas treatment |
| JP4066107B2 (en) * | 1997-11-21 | 2008-03-26 | 株式会社荏原製作所 | Combustor for exhaust gas treatment |
| JP4535558B2 (en) * | 2000-03-31 | 2010-09-01 | 大陽日酸株式会社 | Combustion exhaust gas treatment equipment |
| JP6734821B2 (en) * | 2017-07-13 | 2020-08-05 | 大陽日酸株式会社 | Combustion nozzle, combustion cylinder, and combustion abatement device |
| JP6691517B2 (en) * | 2017-07-26 | 2020-04-28 | 大陽日酸株式会社 | Combustion cylinder and combustion abatement device |
| GB2579197B (en) * | 2018-11-22 | 2021-06-09 | Edwards Ltd | Abatement method |
| CN116592371A (en) * | 2023-06-15 | 2023-08-15 | 濮阳市联众兴业化工有限公司 | A method for treating non-condensable gas in a device |
-
1995
- 1995-07-21 JP JP20754895A patent/JP3453012B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0942643A (en) | 1997-02-14 |
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