JP3461870B2 - Silicon aluminum oxynitride - Google Patents
Silicon aluminum oxynitrideInfo
- Publication number
- JP3461870B2 JP3461870B2 JP21514093A JP21514093A JP3461870B2 JP 3461870 B2 JP3461870 B2 JP 3461870B2 JP 21514093 A JP21514093 A JP 21514093A JP 21514093 A JP21514093 A JP 21514093A JP 3461870 B2 JP3461870 B2 JP 3461870B2
- Authority
- JP
- Japan
- Prior art keywords
- alo
- powder
- aluminum
- raw material
- aluminum oxynitride
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- CSDREXVUYHZDNP-UHFFFAOYSA-N alumanylidynesilicon Chemical compound [Al].[Si] CSDREXVUYHZDNP-UHFFFAOYSA-N 0.000 title claims description 10
- 239000000843 powder Substances 0.000 claims description 24
- 239000000126 substance Substances 0.000 claims description 20
- 150000001875 compounds Chemical class 0.000 claims description 18
- 229910052782 aluminium Inorganic materials 0.000 claims description 15
- 239000002994 raw material Substances 0.000 claims description 14
- -1 aluminum alkoxide Chemical class 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 5
- 239000003638 chemical reducing agent Substances 0.000 claims description 5
- 239000002243 precursor Substances 0.000 claims description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
- 230000003301 hydrolyzing effect Effects 0.000 claims description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 14
- 229910052757 nitrogen Inorganic materials 0.000 description 7
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 238000002441 X-ray diffraction Methods 0.000 description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 5
- 229910052760 oxygen Inorganic materials 0.000 description 5
- 239000001301 oxygen Substances 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 4
- 150000004703 alkoxides Chemical class 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 238000005245 sintering Methods 0.000 description 4
- 239000002002 slurry Substances 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 3
- RDASHQZXQNLNMG-UHFFFAOYSA-N butan-2-olate;di(propan-2-yloxy)alumanylium Chemical compound CCC(C)O[Al](OC(C)C)OC(C)C RDASHQZXQNLNMG-UHFFFAOYSA-N 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000007062 hydrolysis Effects 0.000 description 3
- 238000006460 hydrolysis reaction Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000006227 byproduct Substances 0.000 description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 229910000323 aluminium silicate Inorganic materials 0.000 description 1
- 229910021486 amorphous silicon dioxide Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 238000006902 nitrogenation reaction Methods 0.000 description 1
- 229910052575 non-oxide ceramic Inorganic materials 0.000 description 1
- 239000011225 non-oxide ceramic Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000013001 point bending Methods 0.000 description 1
- 230000002829 reductive effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
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- Ceramic Products (AREA)
Description
【発明の詳細な説明】Detailed Description of the Invention
【０００１】[0001]
【産業上の利用分野】本発明は、化学式：Ｓｉ6ＡｌＯ6
Ｎ5で表わされる新規なシリコンアルミニウムオキシナ
イトライド及びその製造方法並びにその用途に関する。The present invention has the chemical formula: Si 6 AlO 6
The present invention relates to a novel silicon aluminum oxynitride represented by N 5 , a method for producing the same, and its use.
【０００２】[0002]
【従来の技術】現在、けい素、アルミニウム、酸素及び
窒素から構成される化合物は、例えばβ’−サイアロン
（Si(6-Z)AlZOZN(8-Z)：0≦Ｚ≦4.2）をはじめ、種々の
化合物が知られている。At present, silicon, aluminum, compound composed of oxygen and nitrogen, for example, β'- sialon (Si (6-Z) Al Z O Z N (8-Z): 0 ≦ Z ≦ 4.2 ), Various compounds are known.
【０００３】[0003]
【発明が解決しようとする課題】本発明者等は、けい
素、アルミニウム、酸素及び窒素から構成される化合物
について研究した結果、現在まで知られていない化学組
成を有する新規な物質、即ち化学式：Ｓｉ6ＡｌＯ6Ｎ5
で表わされる新規なシリコンアルミニウムオキシナイト
ライドを見い出し、本発明を完成したものであり、本発
明は、この新規物質を提供することを目的とするもので
ある。DISCLOSURE OF THE INVENTION As a result of research on a compound composed of silicon, aluminum, oxygen and nitrogen, the present inventors have found that a novel substance having a chemical composition unknown to date, that is, a chemical formula: Si 6 AlO 6 N 5
The present invention has been completed by discovering a novel silicon aluminum oxynitride represented by the following, and the present invention aims to provide this novel substance.
【０００４】[0004]
【課題を解決するための手段】そして、本発明に係る新
規物質(新規化合物)は、「化学式：Ｓｉ6ＡｌＯ6Ｎ5で
表わされる化合物からなるシリコンアルミニウムオキシ
ナイトライド。」である。The novel substance (new compound) according to the present invention is "silicon aluminum oxynitride consisting of a compound represented by the chemical formula: Si 6 AlO 6 N 5. "
【０００５】上記化合物は、「SiO2微粉末と加水分解に
よってAl(OH)3を生成するアルミニウムアルコキシドと
を所定比率で混合し、さらに還元剤として炭素粉末を添
加し、水を加えて上記アルミニウムアルコキシドを加水
分解した後、乾燥させて原料粉末とし、該原料粉末を加
熱処理すること。」によって製造することができ、そし
て、主として「高温部材用サイアロン前駆体」としての
有用性を有するものである。The above-mentioned compound is prepared by mixing a fine powder of SiO 2 and an aluminum alkoxide which produces Al (OH) 3 by hydrolysis at a predetermined ratio, further adding carbon powder as a reducing agent, and adding water to the above aluminum. After hydrolyzing the alkoxide, it is dried to obtain a raw material powder, and the raw material powder is heat-treated. "And has a usefulness mainly as a" sialon precursor for high temperature members ". is there.
【０００６】以下、本発明に係る新規物質(新規化合物)
について詳細に説明する。本発明の化合物は、けい素、
アルミニウム、酸素及び窒素から構成される固体状物質
であり、化学分析の結果、けい素、アルミニウム、酸素
及び窒素の原子比が6：1：6：5であることが確認され
た。また、その粉末は灰白色を呈する。そして、ピクノ
メーターにより真密度を測定すると、2.73〜2.74ｇ／ｃ
ｍ3であった。Hereinafter, the novel substance (new compound) according to the present invention
Will be described in detail. The compounds of the present invention are silicon,
It was a solid substance composed of aluminum, oxygen and nitrogen, and as a result of chemical analysis, it was confirmed that the atomic ratio of silicon, aluminum, oxygen and nitrogen was 6: 1: 6: 5. In addition, the powder is grayish white. Then, when the true density is measured with a pycnometer, it is 2.73 to 2.74 g / c.
It was m 3 .
【０００７】本発明の化合物は、正方晶系に属する物質
であり、その主要Ｘ線回折パタ−ンと強度は、次の表１
及び図１のとおりであった。以上、本発明の化合物に係
る前記の化学分析並びにＸ線回折の主要ピ−クを示す表
１、図１からみて、本発明の化合物は、化学式：Ｓｉ6
ＡｌＯ6Ｎ5で表わされるシリコンアルミニウムオキシナ
イトライドであることを確認した。The compounds of the present invention are substances belonging to the tetragonal system, and their main X-ray diffraction patterns and intensities are shown in Table 1 below.
And as shown in FIG. As shown in Table 1 and FIG. 1 showing the main peaks of the chemical analysis and X-ray diffraction of the compound of the present invention, the compound of the present invention has the chemical formula: Si 6
It was confirmed to be silicon aluminum oxynitride represented by AlO 6 N 5 .
【０００８】[0008]
【表１】 [Table 1]
【０００９】本発明に係る上記新規物質(新規化合物)
は、SiO2微粉末と加水分解によってAl(OH)3を生成する
アルミニウムアルコキシド及び還元剤として炭素粉末を
混合し、水を加えて上記アルミニウムアルコキシドを加
水分解した後、乾燥させて原料粉末とし、該原料粉末を
加熱処理することにより製造することができる。上記製
造方法において、SiO2微粉末、アルミニウムアルコキシ
ド及び還元剤を混合する際、有機溶剤(例えばイソプロ
パノ−ル)中で混合するのが好ましく、また、加熱条件
としては、窒素雰囲気下1450〜1550℃で加熱するのが好
ましい。The above novel substance (new compound) according to the present invention
Is a mixture of SiO 2 fine powder and aluminum alkoxide that produces Al (OH) 3 by hydrolysis and carbon powder as a reducing agent, and water is added to hydrolyze the aluminum alkoxide, followed by drying to obtain a raw material powder, It can be produced by heating the raw material powder. In the above manufacturing method, when mixing SiO 2 fine powder, the aluminum alkoxide and a reducing agent, an organic solvent (e.g. isopropanol - Le) is preferably mixed in, The heating conditions, under a nitrogen atmosphere from 1,450 to 1,550 ° C. It is preferable to heat at.
【００１０】本発明において、原料として「加水分解に
よってAl(OH)3を生成するアルミニウムアルコキシド」
を用いる理由は、次のとおりである。原料に結晶質のAl
O3を用いると、混合状態が悪くなり、副生成物が大量に
生じる。これに対して、上記アルコキシドを用いると、
SiO2表面とアルコキシドが反応し、その後の熱処理によ
って非晶質のアルミノシリケートが生成するため、混合
状態がよくなり、副生成物が大量に生じないからであ
る。In the present invention, "aluminum alkoxide which produces Al (OH) 3 by hydrolysis" is used as a raw material.
The reason for using is as follows. Crystalline Al as raw material
When O 3 is used, the mixed state becomes poor and a large amount of by-products are produced. On the other hand, if the above alkoxide is used,
This is because the SiO 2 surface and the alkoxide react with each other, and an amorphous aluminosilicate is generated by the subsequent heat treatment, so that the mixed state is improved and a large amount of by-products are not generated.
【００１１】上記アルコキシドとしては、
・モノsec-ブトキシアルミニウムジイソプロピレ−ト(A
MD)、
・アルミニウムエチレート、
・アルミニウムイソプロピレート、
・アルミニウムsec-ブチレート、
などを挙げることができ、いずれも本発明で使用するこ
とができる。The above-mentioned alkoxides include: mono sec-butoxyaluminum diisopropylate (A
MD), -aluminum ethylate, -aluminum isopropylate, -aluminum sec-butyrate, etc., all of which can be used in the present invention.
【００１２】本発明による化合物“Ｓｉ6ＡｌＯ6Ｎ5”
は、主として高温部材用サイアロンの前駆体として有用
性をもつ新規な化合物である。その他(1)β’−サイア
ロンを還元窒素化反応で合成する際の反応核として有用
であり、また(2)耐酸化性に優れた非酸化物セラミック
ス原料に用いることができる。The compound "Si 6 AlO 6 N 5 " according to the invention
Is a novel compound mainly useful as a precursor of sialon for high temperature members. Others (1) It is useful as a reaction nucleus when synthesizing β'-sialon by a reductive nitrogenation reaction, and (2) it can be used as a non-oxide ceramic raw material excellent in oxidation resistance.
【００１３】[0013]
【実施例】次に、本発明のＳｉ6ＡｌＯ6Ｎ5の製造例及
び用途例について、より具体的に説明する。EXAMPLES Next, production examples and application examples of Si 6 AlO 6 N 5 of the present invention will be described more specifically.
【００１４】（製造例）非晶質SiO2粉末と、アルミニウ
ムアルコキシドとしてモノsec-ブトキシアルミニウムジ
イソプロピレ−ト(ＡＭＤ)及び還元剤としてカ−ボンブ
ラック粉末をモル比で6：1：20となるようにイソプロパ
ノ−ル中で混合した。得られたスラリ−に水をモル比で
３単位加えてＡＭＤを加水分解した後、乾燥して原料粉
末とした。(Production Example) Amorphous SiO 2 powder, monosec-butoxyaluminum diisopropylate (AMD) as an aluminum alkoxide, and carbon black powder as a reducing agent in a molar ratio of 6: 1: 20. Were mixed in isopropanol. Water was added to the obtained slurry in a molar ratio of 3 units to hydrolyze AMD and then dried to obtain a raw material powder.
【００１５】この原料粉末を窒素気流中1475℃で１時間
加熱処理し、放冷後、焼成物を取り出した。焼成物に残
存するカ−ボンを730℃、6時間、空気中で熱処理するこ
とにより酸化除去し、灰白色の粉末を得た。This raw material powder was heat-treated in a nitrogen stream at 1475 ° C. for 1 hour, allowed to cool, and the fired product was taken out. The carbon remaining in the fired product was oxidized and removed by heat treatment in air at 730 ° C. for 6 hours to obtain an off-white powder.
【００１６】得られた化合物(灰白色の粉末)を化学分析
した結果、けい素、アルミニウム、酸素及び窒素の原子
比が6：1：6：5であることが確認された。また、Ｘ線回
折の主要ピ−クは、前記の表１に示したとおりであり、
そのＸ線回折パタ−ンは、図１に示すとおりであった。
その結果、得られた化合物は、化学式：Ｓｉ6ＡｌＯ6Ｎ
5で表わされるシリコンアルミニウムオキシナイトライ
ドであることを確認した。As a result of chemical analysis of the obtained compound (off-white powder), it was confirmed that the atomic ratio of silicon, aluminum, oxygen and nitrogen was 6: 1: 6: 5. The main peaks of X-ray diffraction are as shown in Table 1 above,
The X-ray diffraction pattern was as shown in FIG.
As a result, the obtained compound has the chemical formula: Si 6 AlO 6 N
It was confirmed to be silicon aluminum oxynitride represented by 5 .
【００１７】（用途例）本発明のＳｉ6ＡｌＯ6Ｎ5と窒
化けい素粉末、窒化アルミニウム粉末をモル比で1：2
0：5となるようにメタノ−ル中で混合し、さらに、焼結
助剤として酸化イットリウム粉末を4重量％(内割)加え
て粉砕・混合した。得られたスラリ−を乾燥した後、CI
Pにより35×50×5ｍｍの板に成形した。成形体を1800
℃、3時間、窒素中で焼成したところ、Si5.5Al0.5O0.5N
7.5で表されるＺ＝0.5のβ’−サイアロンを主成分とす
る焼結体が得られた。(Application example) Si 6 AlO 6 N 5 of the present invention, silicon nitride powder, and aluminum nitride powder in a molar ratio of 1: 2.
The mixture was mixed in methanol to give a ratio of 0: 5, and 4% by weight (inner ratio) of yttrium oxide powder was added as a sintering aid, and the mixture was pulverized and mixed. After drying the obtained slurry, CI
It was molded by P into a plate of 35 × 50 × 5 mm. Molded body 1800
When baked in nitrogen at ℃ for 3 hours, Si 5.5 Al 0.5 O 0.5 N
A sintered body containing β = -sialon represented by 7.5 and having Z = 0.5 was obtained.
【００１８】比較のため、通常の反応焼結法により、次
の方法でβ’−サイアロンを主成分とする焼結体を作製
した。アルミナ粉末、窒化けい素粉末及び窒化アルミニ
ウム粉末をモル比で1：11：1となるようにメタノ−ル中
で混合し、前記製造例と同様、焼結助剤として酸化イッ
トリウム粉末を4重量％(内割)添加し、原料スラリ−を
調製した。このスラリ−を前記製造例と同じ条件で混
合、乾燥、成形、焼結した。得られた焼結体は、やはり
Ｚ＝0.5のβ’−サイアロンを主成分としていた。For comparison, a sintered body containing β'-sialon as a main component was prepared by the following method by the ordinary reaction sintering method. Alumina powder, silicon nitride powder and aluminum nitride powder were mixed in methanol so that the molar ratio was 1: 11: 1, and 4% by weight of yttrium oxide powder was used as a sintering aid as in the above-mentioned production example. (Inner ratio) was added to prepare a raw material slurry. This slurry was mixed, dried, molded and sintered under the same conditions as in the above production example. The obtained sintered body also contained β'-sialon having Z = 0.5 as the main component.
【００１９】上記２種類の焼結体をそれぞれ3×4×40ｍ
ｍの試験片に加工し、JIS 1606に従って1200℃での３点
曲げ強度を測定した。その結果、Ｓｉ6ＡｌＯ6Ｎ5を原
料とする焼結体では平均で600MPaを示し、通常のアルミ
ナを用いる反応焼結法では、平均で350MPaであった。Each of the above two types of sintered bodies is 3 × 4 × 40 m
It processed into the test piece of m, and measured the 3-point bending strength at 1200 degreeC according to JIS 1606. As a result, the sintered body using Si 6 AlO 6 N 5 as a raw material showed an average of 600 MPa, and the ordinary reaction sintering method using alumina had an average of 350 MPa.
【００２０】このように本発明の“Ｓｉ6ＡｌＯ6Ｎ5”
を原料としてβ’-サイアロンを製造すると、焼結体全
体が均一となることから、得られた焼結体の高温強度が
高く、高温部材用サイアロンの前駆体として非常に有用
であることが理解できる。Thus, the "Si 6 AlO 6 N 5 " of the present invention is
It is understood that when β'-sialon is produced using as a raw material, the entire sintered body becomes uniform, so the high-temperature strength of the obtained sintered body is high and it is very useful as a precursor of sialon for high-temperature members. it can.
【００２１】[0021]
【発明の効果】本発明は、以上詳記したとおり、化学
式：Ｓｉ6ＡｌＯ6Ｎ5で表わされ、主として高温部材用
サイアロンの前駆体として有用性をもつ新規な化合物を
提供するものである。As described in detail above, the present invention provides a novel compound represented by the chemical formula: Si 6 AlO 6 N 5 and useful mainly as a precursor of sialon for high temperature members. .
【図１】本発明のＳｉ6ＡｌＯ6Ｎ5で表わされるシリコ
ンアルミニウムオキシナイトライドのＸ線回折パタ−ン
を示す図。FIG. 1 is a diagram showing an X-ray diffraction pattern of silicon aluminum oxynitride represented by Si 6 AlO 6 N 5 of the present invention.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 山岸 千丈 東京都杉並区荻窪２−17−４ (56)参考文献 特開 昭58−95607（ＪＰ，Ａ) 特開 平２−18308（ＪＰ，Ａ) (58)調査した分野(Int.Cl.7，ＤＢ名) C01B 21/082 C04B 35/626 ＣＡ（ＳＴＮ)─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Chijo Yamagishi 2-17-4 Ogikubo, Suginami-ku, Tokyo (56) References JP-A-58-95607 (JP, A) JP-A-2-18308 (JP, A) ) (58) Fields surveyed (Int.Cl. 7 , DB name) C01B 21/082 C04B 35/626 CA (STN)
Claims (3)
化合物からなるシリコンアルミニウムオキシナイトライ
ド。1. A silicon aluminum oxynitride comprising a compound represented by the chemical formula: Si 6 AlO 6 N 5 .
を生成するアルミニウムアルコキシドとを所定比率で混
合し、さらに還元剤として炭素粉末を添加し、水を加え
て上記アルミニウムアルコキシドを加水分解した後、乾
燥させて原料粉末とし、該原料粉末を加熱処理すること
を特徴とする化学式：Ｓｉ6ＡｌＯ6Ｎ5からなるシリコ
ンアルミニウムオキシナイトライドの製造方法。 2. Al (OH) 3 obtained by hydrolyzing SiO 2 fine powder
Is mixed with a predetermined ratio of aluminum alkoxide to produce a carbon powder as a reducing agent, water is added to hydrolyze the aluminum alkoxide, and then the raw material powder is dried to heat-treat the raw material powder. A method for producing a silicon aluminum oxynitride comprising a chemical formula: Si 6 AlO 6 N 5 .
シリコンアルミニウムオキシナイトライドからなること
を特徴とする高温部材用サイアロン前駆体。3. A sialon precursor for a high temperature member, which is composed of silicon aluminum oxynitride represented by the chemical formula: Si 6 AlO 6 N 5 .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21514093A JP3461870B2 (en) | 1993-08-07 | 1993-08-07 | Silicon aluminum oxynitride |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21514093A JP3461870B2 (en) | 1993-08-07 | 1993-08-07 | Silicon aluminum oxynitride |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0748107A JPH0748107A (en) | 1995-02-21 |
| JP3461870B2 true JP3461870B2 (en) | 2003-10-27 |
Family
ID=16667362
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21514093A Expired - Fee Related JP3461870B2 (en) | 1993-08-07 | 1993-08-07 | Silicon aluminum oxynitride |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3461870B2 (en) |
-
1993
- 1993-08-07 JP JP21514093A patent/JP3461870B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0748107A (en) | 1995-02-21 |
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